CN106483600B - A kind of ultrashort vertical waveguide coupler with tolerance of producing extensively - Google Patents
A kind of ultrashort vertical waveguide coupler with tolerance of producing extensively Download PDFInfo
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
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Abstract
The invention discloses a kind of ultrashort vertical waveguide coupler with tolerance of producing extensively.It is made of in the coupler vertical direction upper waveguide, wall and lower waveguide.In the propagation direction, vertical coupler is divided into input area, coupling regime and output area.It is gradually become smaller in the width of coupling regime, upper waveguide, is divided into leading portion, middle section and back segment；Leading portion and back segment are upper duct width rapid desufflation section, and middle section is mode shifts section.The present invention increases the coefficient of coup by reducing the thickness of the wall between waveguide up and down, so as to shorten the length of coupler；In the middle section of coupling regime, the suitably upper duct width rate of regression of setting and suitable length, make waveguide width because actual fabrication precision limitation generate deviation when, the mode of upper waveguide still can downwards waveguide efficiently shift, to realize big production tolerance.
Description
Technical field
The present invention relates to a kind of optical component more particularly to a kind of vertical waveguide couplers.
Background technique
As optical communication system updates to higher rate, more and more optical devices are integrated into integrated optical circuit
The single-chip integration of various different function is realized on (photonic integrated circuits, PIC).In order to make optic communication device
Part develops to the direction that smaller, power consumption is lower, stability is more reliable, and active and passive device integrate will be essential
's.Currently, integreted phontonics technology mainly has: Butt-joint regrowth techniques, biasing Quantum Well technology, quantum well mixing technology
Deng.The relative complex manufacture craft of these integrated technologies leads to that its cost of manufacture is relatively high, yield rate is low, in addition, due to active
It cannot be separately designed with passive device structure, thus limit to the performance of integrated device.The double wave that Suematsu et al. is proposed
Vertical coupled technology is led, mainly realizes active and passive device collection using upper waveguide downward waveguide from top to bottom is vertical coupled
At (Y.Suematsu, M.Yamada, and K.Kayashi.Integrated twin-guide AlGaAs laser with
multiheterosctructure[J].IEEE J.Quantum Electron.,1975,11(7):457-460.).The technology
In, different waveguide layer can be grown from the bottom to top, avoided complicated regrowth process, greatly simplified manufacture craft, together
When relatively independent can be designed due to upper and lower waveguide, there is greater flexibility.
Vertical coupled technology has the advantages that manufacture craft is simple, can be perfectly suitable for the collection of device in integrated optical circuit
At.According to super model coupled wave theory, realizing vertical coupled scheme at present mainly has resonance coupler (resonant couplers)
(XiankaiSun,Hsi-Chun Liu,and AmnonYariv,Adiabaticity criterion and the
shortest adiabaticmode transformer in a coupled-waveguide system,Opt.Lett.,
2009,34 (3): 280-282.) and adiabatic coupler (adiabatic couplers).In resonance coupler, energy is average
Be distributed in symmetric mode and anti symmetric mode, using the two eigen modes interfere realize up and down waveguide couple
(M.Galarza,K.De Mesel,R.Baets,A.Martinez,C.Aramburu,and M.Lopez-Amo,Compact
spot-size converters with fiber-matched antiresonant reflecting optical
waveguide,Appl.Opt.,2003,42:4841-4846.).In the initial segment, power concentrates on waveguide.Along waveguide
Longitudinal propagation direction on, two modes interfere, when two modal phase differences be π when, mode coherent phase in upper waveguide
Disappear, the coherent enhancement in lower waveguide, power concentrates on lower waveguide；And when two modal phase differences are 2 π, mode is in lower waveguide
Middle coherent subtraction, the coherent enhancement in upper waveguide, power are returned to waveguide.So in the propagation direction, week is presented in optical power
Phase sexual behaviour is coupled to lower waveguide by upper waveguide in half period, is coupled back into upper waveguide by lower waveguide again in a cycle.Resonance
The coupling length of coupler depends on the coefficient of coup between upper and lower waveguide, and the coefficient of coup is bigger, and coupling length is shorter
(A.Wieczorek,B.Roycroft,F.H.Peters,and B.Corbett,Loss analysis and increasing
of the fabrication tolerance of resonant coupling by tapering the mode
beating section,Opt.Quantum Electron.,2011,42(8):521–529.).In resonance coupler, due to
Periodically coupling is so that coupling efficiency is strongly depend on the length and structure of coupler, actual fabrication caused by the interference of mode
In the upper duct width as caused by production precision and process deviation influence of the change to coupling efficiency it is very big, resonance in this way
The usual very little of production tolerance of coupler.For adiabatic coupler, energy is concentrated mainly in symmetric mode, with the light of lower waveguide
Restriction factor becomes larger, optical power slowly by upper waveguide be coupled to lower waveguide (F.Xia, V.M.Menon, and S.R.Forrest,
Photonic integration using asymmetric twin-waveguide(ATG)technology:part
Iconcepts and theory [J] .IEEE J.Sel.Top.Quantum Electron., 2005,11 (1): 17-29.).
Dependence since the change width of the upper waveguide of adiabatic coupler is very gentle, this reduces coupling efficiency to coupler length
Property, production tolerance is relatively large.But adiabatic coupler usually requires the coupled zone of long enough (~200 μm) to guarantee upper ripple
Waveguide mode is eventually coupled in lower waveguide, and reducing Mode change is the introduced loss of other higher order modes.This coupler is not
The density of integrated device is only reduced, and will increase the insertion loss of coupler, largely limits its practical application.
In short, current vertical coupler there is a problem of making tolerance it is small or length is too long, cause the yield rate of integrated device it is low,
Cost of manufacture is high, so that it is unable to get large-scale application.
Summary of the invention
The technical problem to be solved by the present invention is to propose a kind of new ultrashort vertical coupler with tolerance of producing extensively,
For reducing the size of optical integrated device, the production tolerance of optical integrated device is improved, and then improve the yield rate of optical integrated device.
In order to solve the above-mentioned technical problem, the invention proposes a kind of new ultrashort vertical waveguides with tolerance of producing extensively
Coupler is respectively upper waveguide, wall and lower wave on the vertical cross-section of the ultrashort vertical waveguide coupler from top to bottom
It leads.
In the propagation direction, the ultrashort vertical coupler is divided into input area, coupling regime and output area；Described
Input area, the mode propagation constant β of upper waveguide1Greater than the mode propagation constant β of lower waveguide2, the mode propagation of upper and lower waveguide is normal
Half, the i.e. δ β of number difference, δ β are greater than coefficient of coup κ, i.e. δ β > κ, δ β=(β between two waveguides1-β2)/2, upper waveguide mode not by
Lower waveguide is existing to be influenced；In the coupling regime, as the width of the upper waveguide gradually becomes smaller, it is divided into the three of sequence linking
Section: leading portion, middle section and back segment；Leading portion and back segment are upper duct width rapid desufflation section, and middle section is mode shifts section；
Thickness by reducing the wall between waveguide up and down increases the coefficient of coup κ between two waveguides, to reduce coupling
Close length, the half δ β for the maximum propagation constant difference that the increased upper limit of the coefficient of coup is able to achieve between input area up and down waveguide.
Further, in the middle section of coupling regime, upper duct width is gradually reduced, and waveguide mode propagation constant is made to be omitted
It is decreased to be slightly less than the mode propagation constant of lower waveguide greater than lower waveguide；The width of upper waveguide, which gradually reduces, meets following formula:
β1(A)=β2+Δβ
β1(β)=β2-Δβ
In above formula, β1(A) mode propagation constant corresponding to the upper waveguide start width for coupling regime middle section, β1(B) it is
Mode propagation constant corresponding to the terminal end width of upper waveguide, Δ β are upper waveguide brought by the maximum production tolerance of upper waveguide
The offset of mode propagation constant；The middle section of coupling regime, that is, mode shifts section length is Lc1.5~4 times, LcIt is defined as straight
Waveguide coupling length.
Preferably, in the leading portion of coupling regime, the width of upper waveguide quickly reduces, terminal end width and coupling regime middle section
Start width it is identical.The width of the upper waveguide of coupling regime leading portion quickly reduces, and can shorten the length of coupler.
It is also preferred that upper duct width quickly reduces in the back segment of coupling regime, the start width of back segment and middle section
Terminal end width is identical, and the terminal end width of back segment is the minimum widith that production allows, and the end of back segment is clearing end, on termination endface
It is coated with anti-reflective film, to reduce reflection.Equally, the width of the upper waveguide of coupling regime back segment quickly reduces, and can shorten coupler
Length.
In the middle section of coupling regime, the quickly downward waveguide transfer by way of resonance transfer of upper waveguide mode.
In the middle section of coupling regime, when upper duct width because when there is deviation in the limitation of production precision, upper waveguide mode
It still can be in the different location efficiently downward waveguide transfer in middle section.
In the only lower waveguide of output area.
The present invention increases the coefficient of coup by reducing the thickness of the wall between waveguide up and down, so as to shorten coupler
Length；It is realized as follows in the middle section of coupling regime by using suitable width rate of regression and suitable length simultaneously
Effect: when the upper duct width i.e. when coupling regime middle section changes in a certain range, the mode of upper waveguide can be in middle section difference
The efficiently downward waveguide transfer in position, in this way when the width of waveguide generates deviation because of the limitation of actual fabrication precision, upper waveguide
Mode still can downwards waveguide efficiently shift, to realize big production tolerance.
Detailed description of the invention
Technical solution of the present invention is further described in detail with reference to the accompanying drawings and detailed description.
Fig. 1 is the structural schematic diagram of the ultrashort vertical waveguide coupler with tolerance of producing extensively of the invention.
Fig. 2 is the cross section index distribution schematic diagram of present example.
Fig. 3 is that the upper waveguide of mode shifts section 7 uses the overlooking structure figure of straight wave guide.
Fig. 4 is that the upper waveguide of mode shifts section 7 uses two waveguide power conversions up and down when straight wave guide to emulate schematic diagram.
Fig. 5 be mode shifts section 7 upper waveguide using Different Slope width successively decrease waveguide when, the coupling efficiency of lower waveguide
With the change curve of propagation distance L.
Fig. 6 be mode shifts section 7 upper waveguide using the width of certain slope successively decrease waveguide when coupler of the present invention bow
Depending on structure chart.
Fig. 7 be the upper waveguide of mode shifts section 7 using straight wave guide and the present invention (width of certain slope successively decrease waveguide) when
The coupling efficiency of coupler of the present invention with upper waveguide change width tolerance schematic diagram.
Simulation result schematic diagram when Fig. 8 is a coupling efficiency extreme value of present example, at this time mode shifts section 7
Upper waveguide change width is Δ w1。
Simulation result schematic diagram when Fig. 9 is another coupling efficiency extreme value of present example, at this time mode shifts section 7
Upper waveguide change width be Δ w2。
Specific embodiment
As shown in Figure 1, the optical waveguide structure side view with the ultrashort vertical waveguide coupler of tolerance of producing extensively of the invention,
It is laterally successively made of from top to bottom coating 1, upper ducting layer 2, wall 3, lower waveguide layer 4 and substrate 5, the wall 3
As one layer of low-index layer between upper ducting layer 2 and lower waveguide layer 4, the coupler that upper and lower waveguide constitutes vertical direction makes light
Gradually it is coupled to lower waveguide layer from upper ducting layer.In the propagation direction, it is divided into input area 9, coupling regime (6,7,8), output
Region 10.
In input area, the mode propagation constant β of upper waveguide1Greater than the mode propagation constant β of lower waveguide2, upper and lower waveguide
Half δ β=(R of mode propagation constant difference1-β2)/2 are greater than the coefficient of coup κ between two waveguides, i.e. δ β > κ, upper waveguide mode is not
It is influenced by existing for lower waveguide；In coupling regime, as upper duct width gradually becomes smaller, three regions is segmented into, are respectively,
Leading portion rapid desufflation section 6: quickly reducing the width of upper waveguide, reduce mode propagation constant, and the mode for being close to lower waveguide passes
Broadcast constant；Middle section mode shifts section 7: being gradually reduced duct width, and upper waveguide mode propagation constant is from slightly larger than lower waveguide
It is decreased to be slightly less than the mode propagation constant of lower waveguide, the downward waveguide by way of resonance transfer of upper waveguide mode quickly turns
It moves；Back segment rapid desufflation section 8: quickly reduce the supreme waveguide mode cut-off of width of upper waveguide again, inhibit the light in lower waveguide
It is coupled back into waveguide.The only lower waveguide of output area.Thickness by reducing the wall between waveguide up and down increases by two waveguides
Between coefficient of coup κ, to reduce coupling length, the increased upper limit of the coefficient of coup is that input area is able to achieve most between waveguide up and down
The half δ β of big propagation constant difference.
The width in upper waveguide middle section 7, which gradually reduces, meets following formula:
β1(A)=β2+Δβ
β1(B)=β2-Δβ
In above formula, β1(A) mode propagation constant corresponding to the upper waveguide start width for coupling regime middle section, β1(B) it is
Mode propagation constant corresponding to the terminal end width of upper waveguide, Δ β are upper waveguide brought by the maximum production tolerance of upper waveguide
The offset of mode propagation constant；The middle section of coupling regime, that is, mode shifts section length is Lc1.5~4 times, LcIt is defined as straight
Waveguide coupling length.
There is the ultrashort vertical waveguide coupler of tolerance of producing extensively in the present embodiment, operation wavelength is 1.30 μm, different
The refractive index and structural parameters of ducting layer are given in the following table.
The refractive index and structural parameters of each ducting layer of 1 vertical coupler of table
| Corresponding ducting layer | Refractive index | Thickness |
| Coating 1 | 3.2044 | 2μm |
| Upper ducting layer 2 | 3.3448 | 0.498μm |
| Wall 3 | 3.2044 | d |
| Lower waveguide layer 4 | 3.3048 | 0.4μm |
| Substrate layer 5 | 3.2044 | 2μm |
Fig. 2 show the refractive index profile of the cross section of present example.(i.e. straight wave constant for upper duct width
Lead) vertical coupler, overlooking structure figure is as shown in Figure 3.By coupled-mode theory, in the propagation direction, upper and lower waveguide normalizing
The power of change is distributed are as follows:
Wherein 2 θ=arctan (κ/δ β), κ are the coefficient of coup, and δ β is upper and lower waveguide mode propagation constant in communication process
β1、β2Difference half (β1-β2)/2.As it can be seen that δ β is smaller, upper and lower waveguide power transfer efficiency is higher；If it is required that power shifts
Be greater than 90% to the efficiency in lower waveguide mode, then have: δ β/κ < 1/3, i.e., the half of the propagation constant difference of waveguide is necessary up and down
Meet κ/3 δ β <.When β=0 δ, i.e., when phase exactly matches, the complete transfer of power is realized in upper and lower waveguide, upper waveguide at this time
Width, i.e. match width wm, as shown in the figure, coupling length LcAre as follows:
It can be seen that coupling length depends on the coefficient of coup between upper and lower two waveguide, the coefficient of coup is bigger, and coupling length is shorter.
And the coefficient of coup depends on the overlapping degree of upper and lower two waveguide modes, wall is thinner, and the overlapping of two waveguide modes is bigger, coupling
Collaboration number is also bigger.Therefore, to obtain small coupling length, the wall between two waveguides just needs thin.Here in order to increase
High coupling coefficient reduces the length of vertical coupler, and the space layer d between upper and lower waveguide is taken as 0.3 μm.Fig. 4 is upper waveguide
When for match width, the simulation result schematic diagram of upper and lower two waveguide powers conversion.It can be seen that optical power in the propagation direction
It presents and periodically couples behavior back and forth.
During in view of actual fabrication, due to making the influence of precision and process repeatability, upper duct width is often
Deviate ideal match width, so mode shifts section generallys use the waveguiding structure that width successively decreases.Fig. 5 show mode shifts
The efficiency of the upper downward waveguide coupling of waveguide power gives waveguide with the variation relation of spread length as difference in figure in section 7
Slope width successively decreases the coupling efficiency curve in the case of waveguide and straight wave guide.As can be seen that the upper waveguide successively decreased using width
The periodicity that structure can destroy power in the case of straight wave guide couples back and forth, so that the peak value for backing towards coupling is become smaller, to make to couple
Device reduces the change sensitivity of structure；Under certain slope, the complete inhibition for backing towards coupling may be implemented, also, certain
Match width w is attained by when upper duct width changes in relatively large range under slopem, make multiple power-efficient branchpoints
It is included, to increase production tolerance；When slope increases, longer coupling length is usually needed to increase coupler
Tolerance also will increase the transmission loss of coupler in this way.Therefore, it is also contemplated that relatively while increasing the tolerance of coupler
Short coupler length, to improve integrated level and to reduce transmission loss.
Coupler of the present invention bows when Fig. 6 show the upper waveguide that mode shifts section 7 is successively decreased using the width of certain slope
Depending on structure chart.The rapid desufflation section of the upper duct width of two sections of front and back section of coupler is contained in figure.Here, coupler middle section is
The length of pattern match section is straight wave guide coupling length Lc2~4 times.The width of waveguide increases in the same direction in mode shifts section in this way
When big or reduction, there is duct width that can reach match width wm.Specifically, in change width Δ w1、Δw2In the case of, mode
Match width wmCan exist in former and later two positions, corresponding optical power reaches Best Coupling condition, sends out coupling extreme value
Life increases the tolerance of duct width in mode shifts section in the two different in width in this way.In existing lithographic accuracy
Under the conditions of, this vertical waveguide coupler with tolerance of producing extensively can significantly improve the yield rate of integrated device.
To verify production tolerance of the invention, using BeamPROP software to ultrashort vertical waveguide coupler of the invention
Be simulated emulation, the length of the upper duct width rapid desufflation sections of the leading portion of coupler and back segment two are set respectively in simulation
It is set to 6 μm and 5 μm.By the upper waveguide of analytical model transfer leg 7 using the coupling under straight wave guide and tapered waveguide structure situation
Efficiency discovery: for straight wave guide structure shown in Fig. 3, the row of the coupling period up and down of power is shown in the propagation direction
For the coupling length of calculating is about 20 μm, and the coupling efficiency of emulation as shown in Fig. 7 dotted line, can be seen with upper waveguide change width
Only one maximum of coupling efficiency curve out, upper waveguide width tolerance is about -0.06 μm of < Δ w when 90% coupling efficiency
0.075 μm of <；For tapered waveguide structure shown in Fig. 4, when stage mode shifts about 40 μm of segment length in the middle, the coupling effect of emulation
Rate is shown in solid with upper waveguide change width such as Fig. 7, is different from straight wave guide, and the coupling efficiency of tapered waveguide occurs two greatly
Value, it is 3 of tolerance under straight wave guide that upper waveguide width tolerance, which is about -0.2 μm 0.19 μm of < of < Δ w, when 90% coupling efficiency
Times or so.
It is respectively Δ w that Fig. 8 and Fig. 9, which show coupler in the upper waveguide change width of mode shifts section,1With Δ w2When it is corresponding
Two extreme value coupling efficiencies simulation result diagram, wherein left figure represents inside vertical coupler optical field distribution along the direction of propagation
Variation, right figure is then the variation diagram of normalization light power.In right figure, black and Grey curves respectively represent waveguide power and
Lower waveguide power changes with spread length.As can be seen from Figure 8 z=30 μm or so of position, lower waveguide power is significant
Rise, fast transfer occurs for optical power.In the end of vertical coupler, lower waveguide power reaches maximum, and coupling efficiency is about
97%.Similarly, Coupling power occurs mainly in z=42 μm or so of position in Fig. 9, and coupling efficiency is about 96%, most with Fig. 8
Big coupling position is one in front and one in back corresponding.
It should be noted last that the above specific embodiment is only used to illustrate the technical scheme of the present invention and not to limit it,
Although being described the invention in detail referring to preferred embodiment, those skilled in the art should understand that, it can be right
Technical solution of the present invention is modified or replaced equivalently, without departing from the spirit and scope of the technical solution of the present invention,
It is intended to be within the scope of the claims of the invention.
Claims (6)
1. a kind of ultrashort vertical waveguide coupler with tolerance of producing extensively, which is characterized in that the ultrashort vertical waveguide coupling
On the vertical cross-section of device from top to bottom, respectively upper waveguide, wall and lower waveguide；
In the propagation direction, the ultrashort vertical coupler is divided into input area, coupling regime and output area；In the input
Region, the mode propagation constant β of upper waveguide1Greater than the mode propagation constant β of lower waveguide2, the mode propagation constant of upper and lower waveguide is poor
Half, i.e. δ β, δ β be greater than two waveguides between coefficient of coup κ, i.e. δ β > κ, δ β=(β1-β2)/2, upper waveguide mode is not by lower wave
Lead existing influence；In the coupling regime, as the width of the upper waveguide gradually becomes smaller, it is divided into three sections of sequence linking:
Leading portion, middle section and back segment；Leading portion and back segment are upper duct width rapid desufflation section, and middle section is mode shifts section；
Thickness by reducing the wall between waveguide up and down increases the coefficient of coup κ between two waveguides, to reduce coupling length
Degree, the half δ β for the maximum propagation constant difference that the increased upper limit of the coefficient of coup is able to achieve between input area up and down waveguide；
In the middle section of coupling regime, upper duct width is gradually reduced, and the width of upper waveguide, which gradually reduces, meets following formula:
β1(A)=β2+Δβ
β1(B)=β2-Δβ
In above formula, β1(A) mode propagation constant corresponding to the start width for the upper waveguide in coupling regime middle section, β1It (B) is upper
Mode propagation constant corresponding to the terminal end width of waveguide, Δ β are upper wave guide mode brought by the maximum production tolerance of upper waveguide
The offset of formula propagation constant；The length in the middle section of coupling regime is Lc1.5~4 times, LcIt is defined as straight wave guide coupling length,
Lc=π/(2 κ).
2. the ultrashort vertical waveguide coupler with tolerance of producing extensively according to claim 1, which is characterized in that coupling
The width of the leading portion in region, upper waveguide quickly reduces, and terminal end width is identical as the start width in coupling regime middle section.
3. the ultrashort vertical waveguide coupler with tolerance of producing extensively according to claim 1 or 2, which is characterized in that
The back segment of coupling regime, upper duct width quickly reduce, and the start width of back segment and the terminal end width in middle section are identical, the end of back segment
End width is the minimum widith that production allows, and the end of back segment is clearing end, is coated with anti-reflective film on termination endface, anti-to reduce
It penetrates.
4. the ultrashort vertical waveguide coupler with tolerance of producing extensively according to claim 1, which is characterized in that coupling
The middle section in region, the quickly downward waveguide transfer by way of resonance transfer of upper waveguide mode.
5. the ultrashort vertical waveguide coupler with tolerance of producing extensively according to claim 1, which is characterized in that coupling
The middle section in region, when upper duct width because upper waveguide mode still can be in middle section when deviation occurs in the limitation of production precision
The efficiently downward waveguide transfer of different location.
6. the ultrashort vertical waveguide coupler with tolerance of producing extensively according to claim 1, which is characterized in that exporting
The only lower waveguide in region.
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| CN1564406A (en) * | 2004-04-02 | 2005-01-12 | 华中科技大学 | Ridge waveguide polarized don't-care semiconductor optical enlarger of integrated modular spot converter |
| EP1297369B1 (en) * | 2000-05-12 | 2006-09-27 | The Trustees of Princeton University | Photonic integrated detector having a plurality of asymmetric waveguides |
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| EP1297369B1 (en) * | 2000-05-12 | 2006-09-27 | The Trustees of Princeton University | Photonic integrated detector having a plurality of asymmetric waveguides |
| CN1564406A (en) * | 2004-04-02 | 2005-01-12 | 华中科技大学 | Ridge waveguide polarized don't-care semiconductor optical enlarger of integrated modular spot converter |
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| Design of compact and efficient polarization-insensitive taper coupler for SiGe photonic integration;HENG ZHOU etal;《OPTICS EXPRESS》;Optical Society of America;20161004;第24卷(第21期);正文第1-4部分，附图2-14 |
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