CN106449484B - A kind of device for directive wheel horizontal alignment in TFT equipment - Google Patents
A kind of device for directive wheel horizontal alignment in TFT equipment Download PDFInfo
- Publication number
- CN106449484B CN106449484B CN201610947950.4A CN201610947950A CN106449484B CN 106449484 B CN106449484 B CN 106449484B CN 201610947950 A CN201610947950 A CN 201610947950A CN 106449484 B CN106449484 B CN 106449484B
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- China
- Prior art keywords
- directive wheel
- groove
- horizontal
- cutting ferrule
- equipment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
Abstract
The invention discloses a kind of devices for directive wheel horizontal alignment in TFT equipment, including horizontal cutting ferrule, horizontal cutting ferrule one end is arranged to groove, the other end extends one piece of connecting plate and is connected by fixedly connected part with pedestal, the internal diameter of groove the right and left of described horizontal cutting ferrule one end is identical as the diameter of directive wheel, and directive wheel is just caught in groove.The apparatus structure of directive wheel horizontal alignment of the present invention is simple, the quick reduction activity duration easy to use, improves working efficiency；Different personnel's operations can be adjusted in place, and will not be varied with each individual and be generated error, and the horizontal accuracy of the directive wheel after guaranteeing installation reduces equipment fragment rate, improve stabilization of equipment performance.
Description
Technical field
The present invention relates to the directive wheels (Guide Roller) in FPD industry device, and in particular to one kind is used for
The device of directive wheel horizontal alignment in TFT equipment.
Background technique
On existing TFT (thin film transistor (TFT)) equipment production line, transition element between each production equipment and some super
Directive wheel (Guide Roller) can all be arranged in long equipment to be oriented to glass substrate, prevent glass substrate in transmit process
In shift and cause fragment.Main component of the directive wheel Guide Roller of TFT equipment as guidance substrate transmission, in base
Play the role of in terms of plate transmission precision and guarantee substrate transmission stability considerable.Horizontal adjustment after directive wheel installation
Confirmation is always Important Problems of interest, and the directive wheel level after guaranteeing installation can reduce equipment fragment rate, improve simultaneously
The stability that equipment transmits substrate.
The confirmation of directive wheel levelness after installing in the prior art be by observe the level meter that is placed on directive wheel come
Judgement confirms whether bubble is located among level meter confirm whether directive wheel is horizontal in level meter by rotary steering wheel.This
There is very big error by macroscopic horizontal confirmation in kind, it cannot be guaranteed that the horizontal accuracy of directive wheel to a certain extent.Especially
It is that TFT WET equipment in TFT equipment (TFT wet etching equipment) has 5 ° of special leaning devices, error can become in this case
Bigger, acquired results are not accurate enough, in addition scene confirmation directive wheel Guide Roller whether level take a long time and precision because
People and it is different.
Summary of the invention
Goal of the invention: in view of the problems of the existing technology, the present invention provides a kind of dress for directive wheel horizontal alignment
It sets, which can rapidly and accurately confirm the horizontal accuracy of the directive wheel after installation.
Technical solution: to achieve the goals above, a kind of for the horizontal school of directive wheel in TFT equipment as described in the present invention
Quasi- device, including horizontal cutting ferrule, horizontal cutting ferrule one end are arranged to groove, and the other end extends one piece of connecting plate and connected by fixed
Fitting is connected with pedestal, and the internal diameter of groove the right and left of described horizontal cutting ferrule one end is identical as the diameter of directive wheel, guiding
Wheel is just caught in groove.
The transmission shaft flat contact of the pedestal and directive wheel both sides.Ensure that pedestal is suitable on the transmission shaft on directive wheel both sides
Benefit sliding.
Graduated scale is provided on the groove inner wall.Graduated scale is used to measure to be positioned with subsidiary level.
The fixedly connected part is screw.
When, without any deviation, overlooking in the groove that directive wheel is just caught in horizontal cutting ferrule, directive wheel confirms and groove inside is complete
Full connected, and pedestal in transmission shaft without inclination, confirm that directive wheel is horizontal.
Working principle: the device of directive wheel horizontal alignment is promoted on two transmission shafts on directive wheel both sides, directive wheel
It is just caught in the groove of the horizontal cutting ferrule of groove of device, no any deviation is overlooked on the inside of directive wheel confirmation and groove and connect completely
Touching, and pedestal on transmission shaft without inclination, confirm that directive wheel is horizontal；If directive wheel cannot be caught in device or overlook guiding
Wheel is directive wheel horizontal abnormality with incomplete contact between on the inside of groove.
The utility model has the advantages that compared with prior art, the device for directive wheel horizontal alignment in TFT equipment of the invention has
Following advantage: the apparatus structure of directive wheel horizontal alignment of the present invention is simple, the quick reduction activity duration easy to use, improves work
Efficiency；Different personnel's operations can be adjusted in place, and will not be varied with each individual and be generated error, the level essence of the directive wheel after guaranteeing installation
Degree reduces equipment fragment rate, improves stabilization of equipment performance.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the device of directive wheel horizontal alignment of the present invention；
Fig. 2 is the schematic diagram that the device of directive wheel horizontal alignment uses；
Directive wheel is just caught in schematic diagram in the groove of horizontal cutting ferrule when Fig. 3 is directive wheel level；
Directive wheel cannot be caught in schematic diagram in the groove of horizontal cutting ferrule when Fig. 4 is directive wheel horizontal abnormality.
Specific embodiment
Below in conjunction with drawings and examples, the invention will be further described.
Embodiment
As shown in Figure 1, a kind of device for directive wheel horizontal alignment, including horizontal cutting ferrule (1), horizontal cutting ferrule (1) one
End is arranged to groove (2), and the internal diameter of groove (2) the right and left is identical as the diameter of directive wheel (6), and directive wheel (6) is just caught in
In groove (2), groove (2) inner wall is additionally provided with graduated scale, and graduated scale is used to measure to be positioned with subsidiary level.Horizontal cutting ferrule (1)
The other end extends one piece of connecting plate (3) and is connected by fixedly connected part (4) with pedestal (5), pedestal (5) and directive wheel (6)
Transmission shaft (7) flat contact on both sides, it is ensured that pedestal (5) smoothly slides on the axis on directive wheel both sides.
As indicated with 2, the device for being used for directive wheel horizontal alignment in TFT equipment is placed on to two biographies on directive wheel (6) both sides
It send on axis (7), it is ensured that pedestal (5) and transmission shaft (7) flat contact are slowly pushed ahead；Directive wheel (6) is caught in horizontal cutting ferrule
(2) in groove (2)；As shown in figure 3, directive wheel (6) is just caught in the groove (2) of horizontal cutting ferrule, without any deviation, overlook
Directive wheel (6) confirmation is completely attached to on the inside of groove (2), and pedestal (5) on transmission shaft (7) without inclination, confirm directive wheel (6)
It is horizontal；As shown in figure 4, directive wheel (6) cannot be caught in the groove (2) of the horizontal cutting ferrule (1) of device or overlook directive wheel
It (6) is directive wheel horizontal abnormality with incomplete contact between on the inside of groove (2).
Claims (3)
1. a kind of device for directive wheel horizontal alignment in TFT equipment, which is characterized in that including horizontal cutting ferrule (1), horizontal card
Set (1) one end is arranged to groove (2), and the other end extends one piece of connecting plate (3) and passes through fixedly connected part (4) and pedestal (5) phase
Connection, the internal diameter of groove (2) the right and left of described horizontal cutting ferrule (1) one end is identical as the diameter of directive wheel (6), the pedestal
(5) it is just caught in groove (2) with transmission shaft (7) flat contact on directive wheel (6) both sides, directive wheel (6), overlooks directive wheel
(6) confirmation is completely attached to on the inside of groove (2), and pedestal (5) on transmission shaft (7) without inclination, confirm directive wheel (6) water
It is flat.
2. the device according to claim 1 for directive wheel horizontal alignment in TFT equipment, which is characterized in that described recessed
Graduated scale is provided on slot (2) inner wall.
3. the device according to claim 1 for directive wheel horizontal alignment in TFT equipment, which is characterized in that described solid
Determining connector (4) is screw.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610947950.4A CN106449484B (en) | 2016-10-26 | 2016-10-26 | A kind of device for directive wheel horizontal alignment in TFT equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610947950.4A CN106449484B (en) | 2016-10-26 | 2016-10-26 | A kind of device for directive wheel horizontal alignment in TFT equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106449484A CN106449484A (en) | 2017-02-22 |
| CN106449484B true CN106449484B (en) | 2019-06-07 |
Family
ID=58177860
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610947950.4A Active CN106449484B (en) | 2016-10-26 | 2016-10-26 | A kind of device for directive wheel horizontal alignment in TFT equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106449484B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101269749A (en) * | 2008-04-10 | 2008-09-24 | 友达光电股份有限公司 | Convection guide device |
| CN204657427U (en) * | 2015-06-03 | 2015-09-23 | 舞阳钢铁有限责任公司 | A kind of slab caster quick-replaceable platform control gauge checkout gear |
| CN104986574A (en) * | 2015-06-04 | 2015-10-21 | 合肥京东方光电科技有限公司 | Guiding device and conveying device |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001261135A (en) * | 2000-03-24 | 2001-09-26 | Kohan Kogyo Kk | Carrier for tube-like body, carrying method for tube-like body, and repair device and repair method for seam welded part of welded can |
-
2016
- 2016-10-26 CN CN201610947950.4A patent/CN106449484B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101269749A (en) * | 2008-04-10 | 2008-09-24 | 友达光电股份有限公司 | Convection guide device |
| CN204657427U (en) * | 2015-06-03 | 2015-09-23 | 舞阳钢铁有限责任公司 | A kind of slab caster quick-replaceable platform control gauge checkout gear |
| CN104986574A (en) * | 2015-06-04 | 2015-10-21 | 合肥京东方光电科技有限公司 | Guiding device and conveying device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106449484A (en) | 2017-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB03 | Change of inventor or designer information |
Inventor after: Wang Wencheng Inventor after: Di Yunhua Inventor after: Sha Shuangqing Inventor after: Chen Rui Inventor before: Wang Wencheng Inventor before: Wang Xiaohong |
|
| CB03 | Change of inventor or designer information | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170508 Address after: Xianlin University City Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Applicant after: Nanjing Huadong Electronics Information Technology Co.,Ltd. Applicant after: Nanjing CLP panda flat panel display technology Co., Ltd. Address before: A city road Nanjing city Jiangsu province 210033 Qixia Xianlin University No. 7 Applicant before: Nanjing Huadong Electronics Information Technology Co.,Ltd. |
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| TA01 | Transfer of patent application right | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200827 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Patentee after: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Address before: Xianlin University City Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Co-patentee before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Patentee before: Nanjing East China Electronic Information Technology Co.,Ltd. |
|
| TR01 | Transfer of patent right |