CN106444016A - Reflective deformable mirror - Google Patents
Reflective deformable mirror Download PDFInfo
- Publication number
- CN106444016A CN106444016A CN201611219087.7A CN201611219087A CN106444016A CN 106444016 A CN106444016 A CN 106444016A CN 201611219087 A CN201611219087 A CN 201611219087A CN 106444016 A CN106444016 A CN 106444016A
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- China
- Prior art keywords
- mirror body
- mirror
- actuator
- reflection type
- type deformable
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0858—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by piezoelectric means
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/0866—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by thermal means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention discloses a reflective deformable mirror which comprises a mirror frame and a mirror body, wherein the mirror frame is used for connecting with a mirror cylinder, and the mirror body is mounted in the mirror frame. A detector and an actuator are inlaid in the mirror body, the detector is used for detecting shape of the mirror body, the actuator is used for driving the mirror body to deform, a structure of the mirror body is prepared by the aid of an additive manufacturing process, so that the detector and the actuator can be inlaid in the mirror body and cannot be mounted at the back of the mirror body, the whole structure is more compact, the height of the mirror body can be thinner on the premise of ensuring the same surface figure accuracy, needed driving force is smaller, and the size of the actuator can be smaller. Compared with the shortcomings that a traditional reflective deformable mirror body made of optical glass materials and ceramic materials is friable and small in deformation, the mirror body of the reflective deformable mirror is better in structure toughness, and the adjustment quantity of deformation can be increased.
Description
Technical field
The present invention relates to optical telescope field, more particularly to a kind of reflection type deformable mirror.Remote mirror.
Background technology
With the continuous development of optical technology, people are to the detection range of ground-to-air, air to surface telescope and resolution
Require more and more higher, the bore that this allows for telescope increases constantly.And the increase of aperture of mirror of looking in the distance, except bringing telescope
Cost is outer with the cube increase of bore, will also cause primary and secondary mirror and supports difficulty, surface figure accuracy to control difficulty, optical system excessively
Complicated heavy a series of problems, such as.
Core in reflecting telescope is reflecting mirror, in order to obtain preferable image quality, the face shape essence of mirror mirror
Degree requires very high (3 0 to sixtieths of optical wavelength).During reflecting telescope uses, because gravity deformation, heat become
The reflecting mirror surface shape error that shape and mismachining tolerance cause has a significant impact to image quality.Active optics is to solve having of this problem
One of effect approach, makes entire surface shape be effectively controlled using the controlled local deformation that mirror mirror produces or reaches school
Just remaining face shape error.Can be to bigbore reflecting mirror due to gravitational load, thermal force and mismachining tolerance using active optics
The face shape error leading to is corrected, thus reducing the rigidity requirement of reflecting mirror.Before the specific stiffness of reflecting mirror material is certain
Put, using active optics so that bigger, the i.e. reflecting mirror of identical bore that can do of the radius-thickness ratio of reflecting mirror, thickness can
Less with do.
Active optics system is generally passed through to manufacture reflecting mirror using optical glass, in order to ensure initial reflection mirror surface-shaped precision
Need ensures certain radius-thickness ratio, and the excessive ultra-thin mirror difficulty of processing of radius-thickness ratio is very big, or even cannot process.
More than mirror body in reflection type deformable mirror, the method by removing material processes at this stage, for ensureing primary face
Shape, needs mirror body thickness larger, and radius-thickness ratio is little so that mirror body stiffness by itself is relatively large, and weight is also relatively large.Separately
Outward, reflection type deformable mirror pushes and pulls reflecting mirror so that reflecting mirror is deformed by being arranged on the actuator of mirror back surface
The face shape error of correction reflecting mirror, the power of the brake of the big needs of reflecting mirror stiffness by itself is just big, the volume and weight of actuator
Also increase so that overall structure is loose and weight is larger therewith.
Therefore, how on the premise of ensureing reflection type deformable mirror mirror surface-shaped precision, the footpath increasing reflection type deformable mirror is thick
The weight and volume reducing reflection type deformable mirror is the current technical issues that need to address of those skilled in the art to ratio.
Content of the invention
It is an object of the invention to provide a kind of reflection type deformable mirror, reduce the weight and volume of reflection type deformable mirror, compact
Structure.
For solving above-mentioned technical problem, the present invention provides a kind of reflection type deformable mirror, including the picture frame for connecting lens barrel
With the mirror body being installed in described picture frame, it is inlaid with the detector for detecting described mirror body shape inside described mirror body and is used for
Drive the actuator of described mirror body deformation.
Preferably, including multiple described detectors and multiple described actuator.
Preferably, multiple described detectors are uniformly embedded in inside described mirror body around described mirror body center, described in one
Actuator is embedded in described mirror body center, and remaining described actuator is uniformly embedded in described mirror body around all described detectors
Portion
Preferably, the circumferential profile of described mirror body is regular hexagon, including six described detectors and seven described actuatings
Device.
Preferably, the circumferential profile of described mirror body is circle, including four described detectors and seven described actuators.
Preferably, described detector is specially displacement transducer or strain gauge, and it is thin that described actuator is specially piezoelectricity
Piece, piezoelectric fabric silk or hot water radiation wire.
Preferably, the cable of described detector and described actuator stretches out communication connection control list by the described mirror body back side
Unit.
Preferably, described picture frame includes picture frame and lower picture frame, and described mirror body is installed on described upper picture frame and described lower mirror
Between frame.
Preferably, described mirror body is specially increasing material manufacturing carbon fibre composite mirror body.
The reflection type deformable mirror that the present invention provides, including the picture frame for connecting lens barrel and the mirror body being installed in picture frame,
It is inlaid with the detector for detecting mirror body shape and the actuator for driving mirror body deformation inside mirror body.Mirror structure adopts
Prepared by increasing material manufacturing technique, it is possible to achieve detector and actuator are embedded in inside mirror body, replaces being installed on the mirror body back side,
Make overall structure compacter；Can realize that mirror body thickness is thinner on the premise of ensureing identical surface figure accuracy, the drive of needs
Power is less, and the volume of actuator can be less；Reflective-type variable compared to traditional optical glass material and ceramic material
Mirror body is more crisp and deflection can not be made thin big shortcoming, and the toughness of the mirror structure in the present invention more preferably, can increase deformation
Adjustment amount.
Brief description
Fig. 1 is the structural representation of the embodiment one of reflection type deformable mirror provided by the present invention；
Fig. 2 is the schematic rear view of the embodiment one of reflection type deformable mirror provided by the present invention；
Fig. 3 is the schematic side view of the embodiment one of reflection type deformable mirror provided by the present invention；
Fig. 4 is the schematic front view of the embodiment two of reflection type deformable mirror provided by the present invention；
Fig. 5 is the side view cutaway drawing of the embodiment two of reflection type deformable mirror provided by the present invention.
In accompanying drawing, labelling is as follows：
Mirror body 1, actuator 2, detector 3, upper picture frame 4, lower picture frame 5.
Specific embodiment
The core of the present invention is to provide a kind of reflection type deformable mirror, reduces the weight and volume of reflection type deformable mirror, compact
Structure.In order that those skilled in the art more fully understand the present invention program, right with reference to the accompanying drawings and detailed description
The present invention is described in further detail.
Refer to Fig. 1 to Fig. 3, Fig. 1 is the structural representation of the embodiment one of reflection type deformable mirror provided by the present invention；
Fig. 2 is the schematic rear view of the embodiment one of reflection type deformable mirror provided by the present invention；Fig. 3 is reflection provided by the present invention
The schematic side view of the embodiment one of formula distorting lenss.
The reflection type deformable mirror that the specific embodiment of the invention provides, including picture frame and mirror body 1, picture frame connects lens barrel, mirror
Body 1 is installed in picture frame, and picture frame can be arranged with integral type, also can be divided into picture frame 4 and lower picture frame 5, and mirror body 1 is installed on picture frame
Between 4 and lower picture frame 5.Mirror body 1 can be connected with picture frame by way of bonding or compression, all protection scope of the present invention it
Interior.It is inlaid with detector 3 and actuator 2 inside mirror body 1, detector 3 is used for detecting mirror body 1 shape, actuator 2 can produce
Displacement, drives mirror body 1 to deform.
Detector 3 can detect the relevant parameter of mirror body 1 front shape, to control unit sending signal, under calculating
One of input information of one moment actuator 2 displacement；Actuator 2 is received and is driven based on the actuator 2 that face shape error data calculates
Move corresponding displacement so that mirror body 1 produces certain deformation, thus correcting the ripple difference of mirror body 1 after dynamic displacement；Then, examine
Survey device 3 to be detected again, actuator 2 carries out face shape correction again, form a closed loop control, real time correction mirror shape error.
The reflecting surface of mirror body 1 is front, and another side is the back side.
Specifically, detector 3 can be displacement transducer or strain gauge, and actuator 2 can be piezoelectric sheet, piezoelectricity
Cellosilk or hot water radiation wire, may also be employed the electronic component that other have corresponding function, all within protection scope of the present invention.
Need with control unit communication connection for detector 3 and actuator 2 and it needs to connect power supply it is therefore desirable to extraction cable and
Control unit connects, and the cable of detector 3 and actuator 2 stretches out communication connection control unit by mirror body 1 back side, also can be by no
Line mode communicates to connect.
By being embedded in detector 3 and actuator 2 inside mirror body, replace being installed on mirror body 1 back side so that entirety
Structure is compacter；Can realize that mirror body 1 thickness is thinner on the premise of ensureing identical surface figure accuracy, the driving force of needs is more
Little, the volume of actuator 2 can be less；Compared to traditional optical glass material and ceramic material reflective-type variable mirror body relatively
Crisp and deflection can not be made thin big shortcoming, the toughness of the mirror structure in the present invention more preferably, can increase deformation adjustment amount.
In order to improve detection and the degree of accuracy controlling, multiple detectors 3 and multiple actuator 2 can be set.Have multiple
Multiple detectors 3 can be uniformly embedded in inside mirror body 1 around mirror body 1 center, an actuator 2 is inlayed by arrangement mode
In mirror body 1 center, remaining actuator 2 is uniformly embedded in inside mirror body 1 around whole detectors 3.I.e. around the center of mirror body 1
Setting multiple structure, center is actuator 2, and outer layer is detector 3, then outer layer is actuator 2, can be according to mirror body 1 actual size
Size, the setting detector 3 of more layers and actuator 2.
Mirror body 1 can be set to various shapes, the circumferential profile of mirror body 1 is positive six sides by the shape according to lens barrel simultaneously
Shape, including six detectors 3 and seven actuators 2.
The circumferential profile of mirror body 1 is alternatively circle, refer to Fig. 4 and Fig. 5, and Fig. 4 is reflective change provided by the present invention
The schematic front view of the embodiment two of shape mirror；Fig. 5 is that the side-looking of the embodiment two of reflection type deformable mirror provided by the present invention is cutd open
View.Including four detectors 3 and seven actuators 2.The shape of mirror body 1 and the quantity of each element can according to circumstances be adjusted,
All within protection scope of the present invention.
On the basis of the reflecting mirror that above-mentioned each specific embodiment provides, it is fine that mirror body 1 can be specially increasing material manufacturing carbon
Dimension composite mirror body, lightweight, intensity is high, can embed detector 3 and actuator 2 during machine-shaping simultaneously
To in mirror body 1, the other materials such as glass fiber compound material certainly may also be employed and make mirror body.
The reflection type deformable mirror that the specific embodiment of the invention provides can apply to reflecting telescope, this reflecting telescope
The structure of other each several parts refer to prior art, can be naturally also applied to other optical devices, repeats no more herein.
Above reflection type deformable mirror provided by the present invention is described in detail.Specific case pair used herein
The principle of the present invention and embodiment are set forth, and the explanation of above example is only intended to help and understands the method for the present invention
And its core concept.It should be pointed out that for those skilled in the art, before without departing from the principle of the invention
Put, the present invention can also be carried out with some improvement and modify, these improve and modify the guarantor also falling into the claims in the present invention
In the range of shield.
Claims (9)
1. a kind of reflection type deformable mirror, including the picture frame for connecting lens barrel and the mirror body (1) being installed in described picture frame, it is special
Levy and be, be inlaid with inside described mirror body (1) detector (3) for detecting described mirror body (1) shape and being used for drive described
The actuator (2) that mirror body (1) deforms.
2. reflection type deformable mirror according to claim 1 is it is characterised in that include multiple described detectors (3) and multiple
Described actuator (2).
3. reflection type deformable mirror according to claim 2 is it is characterised in that multiple described detector (3) is around described mirror
Body (1) center is uniformly embedded in described mirror body (1) inside, and a described actuator (2) is embedded in described mirror body (1) center, its
It is internal that remaining described actuator (2) is uniformly embedded in described mirror body (1) around all described detectors (3).
4. reflection type deformable mirror according to claim 3 is it is characterised in that the circumferential profile of described mirror body (1) is positive six
Side shape, including six described detectors (3) and seven described actuators (2).
5. reflection type deformable mirror according to claim 3 it is characterised in that described mirror body (1) circumferential profile be circle,
Including four described detectors (3) and seven described actuators (2).
6. reflection type deformable mirror according to claim 1 is it is characterised in that described detector (3) is specially displacement sensing
Device or strain gauge, described actuator (2) is specially piezoelectric sheet, piezoelectric fabric silk or hot water radiation wire.
7. reflection type deformable mirror according to claim 6 is it is characterised in that described detector (3) and described actuator (2)
Cable communication connection control unit is stretched out by described mirror body (1) back side.
8. reflection type deformable mirror according to claim 1 is it is characterised in that described picture frame includes picture frame (4) and lower mirror
Frame (5), described mirror body (1) is installed between described upper picture frame (4) and described lower picture frame (5).
9. the reflection type deformable mirror according to claim 1 to 8 any one is it is characterised in that described mirror body (1) is specially
Increasing material manufacturing carbon fibre composite mirror body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611219087.7A CN106444016A (en) | 2016-12-26 | 2016-12-26 | Reflective deformable mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611219087.7A CN106444016A (en) | 2016-12-26 | 2016-12-26 | Reflective deformable mirror |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106444016A true CN106444016A (en) | 2017-02-22 |
Family
ID=58215399
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611219087.7A Pending CN106444016A (en) | 2016-12-26 | 2016-12-26 | Reflective deformable mirror |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106444016A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114967036A (en) * | 2022-05-30 | 2022-08-30 | 深圳综合粒子设施研究院 | Reflector surface shape control structure and beam line device |
| CN115079402A (en) * | 2022-07-08 | 2022-09-20 | 中国科学院光电技术研究所 | Quick reflection mirror based on piezoelectric fiber actuation |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101183174A (en) * | 2006-11-17 | 2008-05-21 | 船井电机株式会社 | Deformable mirror |
| US20080266631A1 (en) * | 2007-04-26 | 2008-10-30 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device and Image Forming Apparatus |
| CN101636696A (en) * | 2007-02-06 | 2010-01-27 | 卡尔蔡司Smt股份公司 | The monitoring method of multiple mirror arrays and equipment in the illuminator of microlithographic projection exposure apparatus |
| CN105572862A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Optical-mechanical integrated rapid control reflector |
-
2016
- 2016-12-26 CN CN201611219087.7A patent/CN106444016A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101183174A (en) * | 2006-11-17 | 2008-05-21 | 船井电机株式会社 | Deformable mirror |
| CN101636696A (en) * | 2007-02-06 | 2010-01-27 | 卡尔蔡司Smt股份公司 | The monitoring method of multiple mirror arrays and equipment in the illuminator of microlithographic projection exposure apparatus |
| US20080266631A1 (en) * | 2007-04-26 | 2008-10-30 | Brother Kogyo Kabushiki Kaisha | Light Scanning Device and Image Forming Apparatus |
| CN105572862A (en) * | 2015-12-22 | 2016-05-11 | 中国科学院长春光学精密机械与物理研究所 | Optical-mechanical integrated rapid control reflector |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114967036A (en) * | 2022-05-30 | 2022-08-30 | 深圳综合粒子设施研究院 | Reflector surface shape control structure and beam line device |
| CN114967036B (en) * | 2022-05-30 | 2024-02-02 | 深圳综合粒子设施研究院 | Mirror surface shape control structure and beam line device |
| CN115079402A (en) * | 2022-07-08 | 2022-09-20 | 中国科学院光电技术研究所 | Quick reflection mirror based on piezoelectric fiber actuation |
| CN115079402B (en) * | 2022-07-08 | 2023-06-30 | 中国科学院光电技术研究所 | Quick reflection mirror based on piezoelectric fiber actuation |
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Application publication date: 20170222 |
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| RJ01 | Rejection of invention patent application after publication |