CN106441110A - High precision laser displacement sensor system based on CMOS - Google Patents
High precision laser displacement sensor system based on CMOS Download PDFInfo
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- CN106441110A CN106441110A CN201610846228.1A CN201610846228A CN106441110A CN 106441110 A CN106441110 A CN 106441110A CN 201610846228 A CN201610846228 A CN 201610846228A CN 106441110 A CN106441110 A CN 106441110A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- General Physics & Mathematics (AREA)
- Measurement Of Optical Distance (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a high precision laser displacement sensor system based on CMOS. The problem of complicated peripheral circuit and low measurement precision in the prior art are solved. The system consists of a power supply module (1), a semiconductor laser diode module (2), a digital signal processing module (3), an image sensing module (4), a direct triangulation module (5) and a differential subtraction circuit (6). The infrared laser of the semiconductor laser diode module irradiates the image sensing module through the direct triangulation module. The image sensing module completes spot sensing, converts an optical signal into an analog electrical signal, and outputs the signal to the digital signal processing module through the differential subtraction circuit for AD acquisition. The digital signal processing module carries out operation processing on an acquired digital signal to output digital actual displacement amount. The high precision laser displacement sensor system provided by the invention has the characteristics of simple external circuit, high measurement accuracy and high stability, and can be used for non-contact measurement.
Description
Technical field
The invention belongs to accurate automatic measurement technology field, more particularly to a kind of displacement transducer system, can be used for non-
Contact type measurement.
Background technology
Laser displacement sensor, with its remarkable measurement performance, realizes non-contact forecasting displacement, and dynamic monitoring is important
There is micro-deformation when carrying in component.In recent years, in particular with the continuous development of modern photoelectric technology, laser displacement senses
Device is increasingly becoming the main flow of non-contact detecting product, more commonly used abroad contactless measuring method carry out high-precision
The detection of degree.
The photoelectric device that laser displacement sensor uses at present mainly has Position-Sensitive Detector PSD, charge coupled cell
CCD.It is beasurement base using the direct-injection type meeting Scheimpflug condition or oblique fire formula triangulation, realized by FPGA
The control of the sequencing contro to photoelectric device and semiconductor laser circuit and the collection of digital signal, by A/D change-over circuit
Realize AD conversion to photoelectric device analog output signal, by DSP and FPGA interact realization to the process of digital signal and
Output.This sensor is because using PSD or CCD, as sensor light electrical part, not only certainty of measurement is not high, and periphery electricity
Road and sequencing contro are all more complicated, simultaneously because completing sequencing contro, AD conversion, digital signal using DSP+FPGA dual chip
, so that the frame for movement of laser displacement sensor and circuit all can be more complicated, volume increases, and cost is very for collection and processing function
High.
Content of the invention
Present invention aims to above-mentioned the deficiencies in the prior art, a kind of high-precision laser position based on CMOS is proposed
Displacement sensor system, with peripheral circuits, improves certainty of measurement.
The technical scheme is that and be achieved in that：
A kind of high precision laser displacement sensor system based on CMOS, including power module, semiconductor laser diode
Module, digital signal processing module, image sensing module, direct-injection type triangulation module and differential type subtraction circuit, its feature
It is：
Described image sensing module, using cmos image sensor as photoelectric device, in order to realize hot spot perception and mould
Intend signal output；
Described digital signal processing module, using dsp chip as main control chip, it includes：
Power up control submodule, power up control for providing for semiconductor laser diode module；
Sequencing contro submodule, for providing sequencing contro for image sensing module；
AD gathers submodule, for carrying out AD collection to the analog output signal of image sensing module；
Computing output sub-module, the digital signal for gathering to AD acquisition module carries out calculation process and result number
Wordization exports.
The present invention compared with prior art has the advantage that：
1st, the present invention due to as photoelectric device, not only increasing certainty of measurement and stablizing using cmos image sensor
Property, and simplify peripheral circuit；
2nd, the present invention, due to as main control chip, not only simplify mechanically and electrically line structure using dsp chip, reduces simultaneously
System bulk, reduces cost.
Brief description
Fig. 1 is the entire block diagram of the present invention；
Fig. 2 is the digital signal processing module block diagram in the present invention；
Fig. 3 is the direct-injection type triangulation module schematic diagram in the present invention；
Fig. 4 is the semiconductor laser diode module drive circuit figure in the present invention；
Fig. 5 is the differential type subtraction circuit schematic diagram in the present invention.
Specific embodiment
With reference to Fig. 1, present system includes power module 1, semiconductor laser diode module 2, Digital Signal Processing mould
Block 3, image sensing module 4, direct-injection type triangulation module 5 and differential type subtraction circuit 6.Wherein：
Power module 1, is system power supply using DCDC power supply chip, and power supply chip selects model MP2565, input electricity
Press as 12～24V, output voltage is 5V, maximum output current is 2.5A, for electricity on completion system, that is, to semiconductor laser two
The work of pole pipe module 2, digital signal processing module 3 and image sensing module 4 provides power supply；
Semiconductor laser diode module 2, for providing lasing light emitter for direct-injection type triangulation module 5；
Digital signal processing module 3, selects but is not limited to the serial dsp chip of TMS320, and flat using the slim four directions of PGF
Flat package, provides and powers up control and sequencing contro for being respectively semiconductor laser diode module 2 and image sensing module 4,
AD collection, calculation process and result Digital output are carried out to the analog output signal of image sensing module 4 simultaneously；
Image sensing module 4, is used for completing hot spot perception and analog signal output, receives semiconductor laser diode module
2 through direct-injection type triangulation module 5 iraser, this image sensing module using but be not limited to model ELIS-1024A
The high speed linear array cmos image sensor of series, this cmos image sensor powered using DC5V, wherein have 128,256,512,
1024 4 kinds of pixel dot patterns are available, and this cmos image sensor has full photo frame and two kinds of output modes of dynamic pixel；
Direct-injection type triangulation module 5, for realizing meeting swashing of the direct-injection type triangulation of cheimpflug condition
Light triangulation structure, provides optical environment for image sensing module 4.
Differential type subtraction circuit 6, the 2～5V analogue signal for exporting image sensing module 4 controls in 0～3V scope
Interior, and output it to digital signal processing module 3.
With reference to Fig. 2, described digital signal processing module 3, it includes powering up control submodule 31, sequencing contro submodule
32nd, AD collection submodule 33 and computing output sub-module 34.This powers up control submodule 31, is realized half-and-half by exporting I/O signal
Conductor Laser diode (led) module 2 power up control；This sequencing contro submodule 32, when providing required for image sensing module 4
Sequence, makes cmos image sensor normal work；This AD gathers submodule 33, electrically connects with image sensing module 4, for collection figure
As the analogue signal in the range of 2～5V of sensing module 4 output, and analog output signal control is made by differential type subtraction circuit 6
System is in the range of 0～3V；This computing output sub-module 34, transports for AD is gathered with the digital signal that submodule 33 collects
Calculate the Digital output processing with result.
With reference to Fig. 3, the direct-injection type triangulation module 5 in the present invention includes semiconductor laser diode 51, collimating lens
52nd, optical filter 53 and imaging len 54.Wavelength X=the 650nm of wherein semiconductor laser diode 51, emergent pupil power is 0.8～
1mW, running voltage is 2.8～3V, and beam divergence angle ＜ 0.3mrad, for launching iraser；Collimating lens 52, from Jiao
Away from the aspheric surface plastic lens for 7.8～8mm, launch the collimation of laser for realizing semiconductor laser diode 51；Optical filter
53 central wavelength lambda=650nm, spectral width is 624.5nm～697.5nm, and peak transmittance >=85% is used for filtering irradiation
The veiling glare that laser-bounce on measured object is returned；Imaging len 54, the non-spherical lens being 8～10mm from focal length, it is used for
Laser through optical filter 53 is radiated on cmos image sensor and forms clearly hot spot.
Each device position in this direct-injection type triangulation module 5 must is fulfilled for the triangulation of cheimpflug condition
Feature just can make image sensing module 4 receive correct hot spot.The triangulation feature meeting cheimpflug condition exists
It is pooled to one in making semiconductor laser diode 51 launch optical axis, imaging len 54 extending shaft and cmos image sensor extending shaft
On individual point, collimating lens 52 are all vertical with transmitting optical axis with optical filter 53 simultaneously.It is as follows that it meets relational expression：
In formula, a is the object distance of imaging len 54 and measured object, b be imaging len 54 away from cmos image sensor apart,
α is the angle of imaging len 54 normal and measured object, and β is the angle of imaging len 54 normal and cmos image sensor, and x is
Hot spot displacement on cmos image sensor, y is the actual displacement of measured object.When taking imaging len 54 focal length to be 10mm, a
=40mm, b=13.33mm, α=45 °, β=71.56 °, when measured object moves along semiconductor laser diode 51 transmitting optical axis direction
When dynamic, on cmos image sensor, hot spot displacement is x, and the actual displacement extrapolating measured object is y.
With reference to Fig. 4, the semiconductor laser diode module 2 in the present invention includes constant-current source circuit 21, slow start circuit 22
With protection circuit 23.Wherein：
Constant-current source circuit 21, for providing electricity by three-terminal voltage-stabilizing integrated package LM317 for semiconductor laser diode module 2
Flow the constant-current source for 20mA；
Slow start circuit 22, during for providing a delayed startup by RC circuit for semiconductor laser diode module 2
Between, prevent the damage to laser diode for the current spike surge；
Protection circuit 23, is made up of a Zener diode and three forward diode, is semiconductor laser diode mould
Block 2 punctures offer protection because voltage is excessive.
With reference to Fig. 5, it is as follows that the differential type subtraction circuit in the present invention meets relational expression：
In formula, R1, R2, R3 and Rf are parameter resistance, and v1 is the analog output voltage value of image sensing module 4, and v0 is ginseng
Examine magnitude of voltage, v2 is to export the analog voltage gathering submodule 33 to AD.Take v0=2V, R1=R2=R3=Rf=1k Ω,
Because the analog voltage v1 of image sensing module 4 output is in the range of 2～5V, you can release and be transferred to AD collection submodule 33
Analog voltage v2 is in the range of 0～3V.
The operation principle of the present invention is as follows：
Power module 1 is that semiconductor laser diode module 2, digital signal processing module 3 and image sensing module 4 supply
Electricity.Power up control submodule 31 and power up control, semiconductor laser diode module 2 for semiconductor laser diode module 2 offer
There is provided lasing light emitter for direct-injection type triangulation module 5, direct-injection type triangulation module 5 provides optics ring for image sensing module 4
Border, sequencing contro submodule 32 provides sequencing contro for image sensing module 4.Semiconductor laser diode module 2 is through direct projection
The iraser of formula triangulation module 5 is radiated on image sensing module 4, and image sensing module 4 completes hot spot and perceives and incite somebody to action
Optical signal is converted to the analog electrical signal of 2～5V and exports.The analog electrical signal of image sensing module 4 output is subtracted by differential type
Method circuit 6 makes it control in the range of 0～3V and exports to carry out AD collection, and the numeral letter by collection to AD collection submodule 33
Number export to computing output sub-module 34, computing output sub-module 34 carries out calculation process to this digital signal, export digitized
Actual displacement amount.
Above description is only example of the present invention it is clear that for those skilled in the art, is understanding
After present invention and principle, all may carry out in form and details in the case of without departing substantially from the principle of the invention, structure
Various modifications and corrigendum, but these corrections based on inventive concept and change are still in the claims of the present invention
Within.
Claims (7)
1. a kind of high precision laser displacement sensor system based on CMOS, including power module (1), semiconductor laser diode
Module (2), digital signal processing module (3), image sensing module (4), direct-injection type triangulation module (5) and differential type subtraction
Circuit (6) it is characterised in that：
Described image sensing module (4), using cmos image sensor as photoelectric device, in order to realize hot spot perception and to simulate
Signal output；
Described digital signal processing module (3), using dsp chip as main control chip, it includes：
Power up control submodule (31), power up control for providing for semiconductor laser diode module (2)；
Sequencing contro submodule (32), for providing sequencing contro for image sensing module (4)；
AD collection submodule (33), for carrying out AD collection to the analog output signal of image sensing module (4)；
Computing output sub-module (34), carries out calculation process and process for AD is gathered with the digital signal that submodule (33) gathers
Resulting numberization exports.
2. system according to claim 1 it is characterised in that：AD collection submodule (33) and image sensing module (4) electricity
Connect, for gathering the analogue signal in the range of 2～5V that image sensing module (4) exports, and pass through differential type subtraction circuit
(6) analog output signal is made to control in the range of 0～3V.
3. system according to claim 1 it is characterised in that：Power module (1) adopts DCDC power supply chip to supply for system
Electricity, power supply chip selects model MP2565, and input voltage is 12～24V, and output voltage is 5V, and maximum output current is
2.5A.
4. system according to claim 1 it is characterised in that：Semiconductor laser diode module (2), it includes：
Constant-current source circuit (21), for providing 20mA constant current-supplying for semiconductor laser diode module (2)；
Slow start circuit (22), for providing a start-up time delay for semiconductor laser diode module (2), prevents electric current
The damage to laser diode for the peak surge；
Protection circuit (23), prevents semiconductor laser diode module (2) from puncturing because voltage is excessive.
5. system according to claim 1 it is characterised in that：Direct-injection type triangulation module (5), including：Quasiconductor swashs
Optical diode (51), collimating lens (52), optical filter (53) and imaging len (54),
Described semiconductor laser diode (51), its wavelength X=650nm, emergent pupil power is 0.8～1mW, and running voltage is 2.8
～3V, beam divergence angle ＜ 0.3mrad；
Described collimating lens (52), the aspheric surface plastic lens being 7.8～8mm from focal length；
Described optical filter (53), its central wavelength lambda=650nm, spectral width is 624.5nm～697.5nm, peak transmittance >=
85%；
Described imaging len (54), the non-spherical lens being 8～10mm from focal length.
6. system according to claim 1 it is characterised in that：Digital signal processing module (3), from TMS320 series
Dsp chip, and adopt the slim quad flat package of PGF.
7. system according to claim 1 it is characterised in that：Image sensing module (4), using model ELIS-1024A
The high speed linear array cmos image sensor of series, is powered using DC5V, have 128,256,512,1,024 4 kind of pixel dot pattern supply
Select, have full photo frame and two kinds of output modes of dynamic pixel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610846228.1A CN106441110A (en) | 2016-09-23 | 2016-09-23 | High precision laser displacement sensor system based on CMOS |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610846228.1A CN106441110A (en) | 2016-09-23 | 2016-09-23 | High precision laser displacement sensor system based on CMOS |
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| CN106441110A true CN106441110A (en) | 2017-02-22 |
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| CN201610846228.1A Pending CN106441110A (en) | 2016-09-23 | 2016-09-23 | High precision laser displacement sensor system based on CMOS |
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| CN108169757A (en) * | 2018-01-11 | 2018-06-15 | 上海兰宝传感科技股份有限公司 | Center pixel high-precision identification light measurement system and method |
| CN109974597A (en) * | 2019-04-29 | 2019-07-05 | 大连理工大学 | A kind of X/Y plane photo-electric non-contact displacement sensor system and its application method |
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Application publication date: 20170222 |