CN106433454A - Method for forming protection layer on surface of object and product with protection layer formed on surface - Google Patents

Method for forming protection layer on surface of object and product with protection layer formed on surface Download PDF

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Publication number
CN106433454A
CN106433454A CN201610815598.9A CN201610815598A CN106433454A CN 106433454 A CN106433454 A CN 106433454A CN 201610815598 A CN201610815598 A CN 201610815598A CN 106433454 A CN106433454 A CN 106433454A
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China
Prior art keywords
protective layer
plasma
body surface
surface formed
product
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CN201610815598.9A
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Chinese (zh)
Inventor
王俊
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SHANGHAI PNC PROCESS SYSTEMS CO Ltd
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SHANGHAI PNC PROCESS SYSTEMS CO Ltd
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Priority to CN201610815598.9A priority Critical patent/CN106433454A/en
Publication of CN106433454A publication Critical patent/CN106433454A/en
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    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09D—COATING COMPOSITIONS, e.g. PAINTS, VARNISHES OR LACQUERS; FILLING PASTES; CHEMICAL PAINT OR INK REMOVERS; INKS; CORRECTING FLUIDS; WOODSTAINS; PASTES OR SOLIDS FOR COLOURING OR PRINTING; USE OF MATERIALS THEREFOR
    • C09D183/00—Coating compositions based on macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon, with or without sulfur, nitrogen, oxygen, or carbon only; Coating compositions based on derivatives of such polymers
    • C09D183/04—Polysiloxanes
    • C09D183/08—Polysiloxanes containing silicon bound to organic groups containing atoms other than carbon, hydrogen, and oxygen

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Wood Science & Technology (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

The invention provides a method for forming a protection layer on the surface of an object. The method comprises the following steps: exposing at least one part of surface of the object in a plasma body, wherein gas forming the plasma body at least comprises a compound expressed by the chemical formula (I) described in the specification; R1, R2 and R3 are selected respectively and independently from hydrogen, alkyl, olefin, halogenated alkyl, halogenated olefin or optional aryl with hydrogen substituted by halogen; R4, R5 and R6 are selected respectively and independently from hydrogen, chlorine, bromine, iodine, alkyl, olefin, hydroxyl, halogenated alkyl, halogenated olefin, optional aryl with hydrogen substituted by halogen or an -O-R<7> group; and R<7> is selected from alkyl. The invention also provides a product with the protection layer formed on the surface, and the protection layer is formed on the surface of the product by the method.

Description

Form the method for protective layer in body surface and surface forms the product of matcoveredn
Technical field
The present invention relates to the product of a kind of method forming protective layer in body surface and surface formation matcoveredn.
Background technology
People produce and daily life in it is often necessary to its use object avoid by liquid (water, oil, the aqueous solution or Person other contain water, the mixing liquid etc. of oil) contact its surface, cause object to be contaminated, soak, or because these liquid Act on and cause physical damage.Here, the object that people use is product.For example, product include electrical equipment, electronic equipment, Wrist-watch and wearing product.
In the existing technology preventing object from being contacted by liquid, disclose a kind of by using the grade containing polymer from Daughter forms protective polymers layer in body surface, and for example, Chinese Patent Application No. CN200780002557 discloses one kind and exists Body surface forms protective polymers layer, to prevent object to be contaminated by the liquid or to soak.However, existing by using containing The plasma of polymer is formed in the technology of protective polymers layer in body surface, exists and prevents object by fluid contact surface Ability weak, and the problems such as the adhesion difference of protective polymers layer and body surface.
Content of the invention
In order to solve the above problems, the present invention proposes a kind of method forming protective layer in body surface, by the present invention The method forming protective layer in body surface proposing, it is possible to increase prevent object by the ability of fluid contact surface, and improve Protective layer and the adhesion of body surface.The present invention also proposes the product that a kind of surface forms matcoveredn, the protection of this product Layer can improve prevents product by the ability of fluid contact surface, and improves the adhesion of protective layer and product surface.
According to an aspect of the present invention, the present invention provides a kind of method forming protective layer in body surface, including：
At least a portion surface of described object is exposed in plasma, forms the gas of described plasma at least Including the compound being represented by chemical formula (I),
Wherein, R1、R2、R3Separately it is selected from hydrogen, alkyl, alkene, haloalkyl, alkenyl halide or optionally hydrogen quilt The aryl of halogen substiuted.R4、R5、R6Separately it is selected from hydrogen, chlorine, bromine, iodine, alkyl, alkene, hydroxyl, haloalkyl, halo Aryl that alkene, optionally hydrogen are optionally substituted by halogen or by-O-R7Group, wherein R7Selected from alkyl.
According to an aspect of the present invention, R1、R2、R3At least one of be haloalkyl.
According to an aspect of the present invention, R1、R2、R3At least one of be CH2CH2(CF2)nCF3, wherein n is 0 or 1 Any integer in 11.
According to an aspect of the present invention, R4、R5、R6At least one of include-O- (CH2)mThe group of-Y, wherein m are 0 Or any integer in 1 to 10, Y is selected from hydrogen or methyl.
According to an aspect of the present invention, the compound that chemical formula (I) represents is CF3(CF2)7CH2CH2Si(OCH3)3.
According to an aspect of the present invention, work as R4、R5、R6Be selected from hydrogen, alkyl, alkene, haloalkyl, alkenyl halide or The aryl being optionally optionally substituted by halogen, the gas forming described plasma also includes oxygen.
According to an aspect of the present invention, formed plasma gas also include carrier gas, carrier gas be selected from inert gas, CF4、C3F8、N2、H2In at least one.
According to an aspect of the present invention, including the gas forming plasma of the compound being represented by chemical formula (I) Form plasma in the plasma chamber of plasma apparatus.Plasma apparatus include the electrode being arranged in pairs, and become The electrode of setting is contained in plasma chamber.
According to an aspect of the present invention, the electrode being arranged in pairs is connected with continuous radio-frequency power supply, is applied to and sets in pairs The continuous electric power range of the electrode put is 0.0001-5000w/m3；At least a portion surface of described object be exposed to etc. from Time in daughter is 0.001 second -60 minutes；Pressure in plasma chamber is 0.0001-1000 millitorr.
According to an aspect of the present invention, the continuous electric power range being applied to the electrode being arranged in pairs is 300-3000w/ m3；The time that at least a portion surface of object is exposed in plasma is 1-60 minute；Pressure in plasma chamber For 0.1-500 millitorr.
According to an aspect of the present invention, the continuous electric power range being applied to the electrode being arranged in pairs is 600-2000w/ m3；The time that at least a portion surface of object is exposed in plasma is 5-15 minute；Pressure in plasma chamber For 0.1-200 millitorr.
According to an aspect of the present invention, the electrode being arranged in pairs is connected with pulse radiation frequency power supply, is applied to described one-tenth To electrode pulsed electric power scope be 0.0001-5000w/m3；Pressure in plasma chamber is 0.0001-1000 milli Support；The time that at least a portion surface of described object is exposed in plasma is 0.001 second -80 minutes；It is applied to described The pulse frequency of paired electrode is 10-5000Hz.Dutycycle is 5%-95%.
According to an aspect of the present invention, be applied to described in the pulsed electric power scope of electrode that is arranged in pairs be 10- 2000w/m3；Pressure in plasma chamber is 0.1-500 millitorr；At least a portion surface of object is exposed to plasma In time be 1-55 minute.
According to an aspect of the present invention, the pulsed electric power scope being applied to the electrode being arranged in pairs is 50-1200w/ m3；Pressure in plasma chamber is 0.1-300 millitorr；At least a portion surface of object be exposed in plasma when Between be 2-30 minute.
According to an aspect of the present invention, protective layer is lyophobicity protective layer.
The method forming protective layer in body surface being proposed by one aspect of the present invention, it is possible to increase prevent thing Body is by the ability of fluid contact surface, and improves the adhesion of protective layer and body surface.
According to another aspect of the present invention, a kind of surface is provided to form the product of matcoveredn, this protective layer passes through upper State the surface that the method forming protective layer in body surface that one aspect of the present invention proposed is formed at described product.
According to another aspect of the present invention, described product includes：Electrical equipment, electronic equipment, cloth, permeable membrane, hand At least one in table and wearing product.
According to another aspect of the present invention, electrical equipment includes：Communication base station, converting equipment, data exchange equipment, friendship The part of at least one and/or any of which in logical instrument, outdoor lightings.
According to another aspect of the present invention, electronic equipment includes：Handheld communication devices, electronic game station, wearable The part of at least one and/or any of which in electronic equipment.
According to another aspect of the present invention, wearing product includes at least one in clothes, shoes and hats and/or ornaments.
The surface being provided according to another aspect of the present invention forms the product of matcoveredn, the protective layer energy of this product Enough raising prevents product by the ability of fluid contact surface, and improves the adhesion of protective layer and product surface.
Specific embodiment
Below the technical scheme of the more than one embodiment of the present invention is described.Obviously, described embodiment It is only a part of embodiment of the present invention, rather than whole embodiments.It should be noted that based on these enforcements in the present invention Example, the every other embodiment that those of ordinary skill in the art are obtained, broadly fall into the scope of protection of the invention.
It should be noted that in the present invention, the statement of " gas " refers to or single or form of mixtures gas Body or steam and aerosol.
In one embodiment of the invention, a kind of method forming protective layer in body surface is provided, including：
At least a portion surface of object is exposed in plasma, the gas forming plasma at least includes by changing The compound that formula (I) represents,
Wherein, R1、R2、R3Separately it is selected from hydrogen, alkyl, alkene, haloalkyl, alkenyl halide or optionally hydrogen quilt The aryl of halogen substiuted.R4、R5、R6Separately it is selected from hydrogen, chlorine, bromine, iodine, alkyl, alkene, hydroxyl, haloalkyl, halo Aryl that alkene, optionally hydrogen are optionally substituted by halogen or by-O-R7Group, wherein R7Selected from alkyl.
An example according to an embodiment of the invention, R1、R2、R3At least one of be haloalkyl.As this example An example, R2It is haloalkyl.In the other examples of this example or R1Or R3It is haloalkyl.Real as this Apply another example of example, R1、R2、R3In have 2 be haloalkyl.
Further say, according to an embodiment of the invention an example, R1、R2、R3At least one of be CH2CH2 (CF2)nCF3, wherein n is any integer in 0 or 1 to 11.
An example according to an embodiment of the invention, R4、R5、R6At least one of include-O- (CH2)mThe group of-Y, Wherein m is any integer in 0 or 1 to 10, and Y is selected from hydrogen or methyl.
An example according to an embodiment of the invention, the compound that chemical formula (I) represents is CF3(CF2)7CH2CH2Si (OCH3)3.That is, the compound that chemical formula (I) represents is 1H, 1H, 2H, 2H- perfluor certain herbaceous plants with big flowers base trimethoxy silane.
An example, works as R according to an embodiment of the invention4、R5、R6It is selected from hydrogen, alkyl, alkene, haloalkyl, halogen During the aryl being optionally substituted by halogen for alkene or optionally, the gas forming described plasma also includes oxygen.
An example according to an embodiment of the invention, the gas forming plasma also includes carrier gas, and carrier gas is selected from lazy Property gas, CF4、C3F8、N2、H2In at least one.
An example according to an embodiment of the invention, forms plasma including the compound being represented by chemical formula (I) The gas of body forms plasma in the plasma chamber of plasma apparatus.Plasma apparatus include being arranged in pairs Electrode, the electrode being arranged in pairs is contained in plasma chamber.
An example according to an embodiment of the invention, CF3(CF2)nCH2CH2Si(OCH3)3In n be 3-6 in any One integer.As an example, n is 5 or 6.So, depress in predetermined saturated vapor, its corresponding temperature is relatively low, bag The gas of the formation plasma of this compound representing containing chemical formula (I) by pipeline import to the grade of plasma apparatus from In daughter cavity, to form plasma, become to be more prone to.
An example according to an embodiment of the invention, CF3(CF2)nCH2CH2Si(OCH3)3In n be 8-11 in appoint What integer.As an example, n is 8 or 9.So, by the gas institute comprising this compound that chemical formula (I) represents The lyophobicity of the protective layer that the surface of the object after the corona treatment being formed is formed is more preferable.And when n is 8 or 9, bag The gas of the formation plasma of this compound representing containing chemical formula (I) by pipeline import to the grade of plasma apparatus from In daughter cavity, to form plasma, it is to be more prone to when more than 10 than n.
An example according to an embodiment of the invention, the electrode being arranged in pairs is connected with continuous radio-frequency power supply, applies Continuous electric power range to the electrode being arranged in pairs is 0.0001-5000w/m3.At least a portion surface of described object is sudden and violent The time being exposed in plasma is 0.001 second -60 minutes；Pressure in plasma chamber is 0.0001-1000 millitorr.
Further say, according to an embodiment of the invention an example, be applied to the continuous electricity of the electrode being arranged in pairs Power bracket is 300-3000w/m3.The time that at least a portion surface of object is exposed in plasma is 1-60 minute. Pressure in plasma chamber is 0.1-500 millitorr.
Further say, according to an embodiment of the invention an example, be applied to the continuous electricity of the electrode being arranged in pairs Power bracket is 600-2000w/m3.The time that at least a portion surface of object is exposed in plasma is 5-15 minute. Pressure in plasma chamber is 0.1-200 millitorr.
An example according to an embodiment of the invention, the electrode being arranged in pairs is connected with pulse radiation frequency power supply, applies Pulsed electric power scope to described paired electrode is 0.0001-5000w/m3.Pressure in plasma chamber is 0.0001-1000 millitorr.At least a portion surface of described object be exposed to time in plasma be 0.001 second -80 points Clock.The pulse frequency being applied to described paired electrode is 10-5000Hz.Dutycycle is 5%-95%.
Further say, according to an embodiment of the invention an example, be applied to described in the arteries and veins of electrode that is arranged in pairs Rushing electric power range is 10-2000w/m3.Pressure in plasma chamber is 0.1-500 millitorr.At least a portion of object The time that surface is exposed in plasma is 1-55 minute.
Further say, according to an embodiment of the invention an example, be applied to the pulse electricity of the electrode being arranged in pairs Power bracket is 50-1200w/m3.Pressure in plasma chamber is 0.1-300 millitorr.At least a portion surface of object The time being exposed in plasma is 2-30 minute.So, it is favorably improved the lyophobicity of protective layer.
An example according to an embodiment of the invention, protective layer is lyophobicity protective layer.Here, " liquid " of lyophobicity is Refer to liquid.Specifically, liquid include water, oil, the aqueous solution or other contain in mixing liquid of water or oil etc. at least A kind of.
The method forming protective layer in body surface being proposed by one aspect of the present invention, it is possible to increase prevent thing Body is by the ability of fluid contact surface, and improves the adhesion of protective layer and body surface.
According to another embodiment of the invention, a kind of surface is provided to form the product of matcoveredn, this protective layer passes through The method forming protective layer in body surface that the one side of the invention described above is proposed is formed at the surface of described product.
An example according to another embodiment of the invention, product includes：Electrical equipment, electronic equipment, cloth, mistake At least one in filter membrane, wrist-watch and wearing product.
An example according to another embodiment of the invention, electrical equipment includes：Communication base station, converting equipment, number According at least one in switching equipment, the vehicles and outdoor lightings.Electrical equipment can also include：Communication base station, change The part of any one of electric equipment, data exchange equipment, the vehicles and outdoor lightings.
An example according to another embodiment of the invention, electronic equipment includes：Handheld communication devices, electronic game Any one of equipment, wearable electronic.Electronic equipment can also include handheld communication devices, electronic game station, Any part of any one of wearable electronic.
An example according to another embodiment of the invention, wearing product includes clothes, shoes and hats and/or ornaments.
The surface being provided according to another aspect of the present invention forms the product of matcoveredn, the protective layer energy of this product Enough raising prevents product by the ability of fluid contact surface, and improves the adhesion of protective layer and product surface.
Although above be not particularly illustrated to the present invention, it will be understood to those skilled in the art that disclosed in prior art Content can by connected applications in the present invention.Prior art includes but is not limited to Chinese Patent Application No. CN200780002629, CN200780048614, CN200980120491, CN200780002557 and CN200880114449. For example, those skilled in the art is it is recognised that object in the present invention and product be not limited to above description and limited , all objects and product disclosed in these patents can also be included.For example, during electronic equipment described in the invention also includes All electronic equipments disclosed in state number of patent application CN200780002557.Again for example, if the present invention illustrates, Technological parameter disclosed in these prior arts, method, embodiment etc. can also be attached to the present invention by way of replacing In.
Above protection is formed with to a kind of method in body surface formation protective layer provided by the present invention and surface The product of layer is described in detail, and specific case used herein is explained to the principle of the present invention and embodiment State, the explanation of above example is only intended to help and understands the method for the present invention and inventive concept；Simultaneously for this area one As technical staff, according to the present invention thought, all will change in specific embodiments and applications, to sum up institute State, this specification content should not be construed as limitation of the present invention.

Claims (22)

1. a kind of method in body surface formation protective layer is it is characterised in that include：
At least a portion surface of described object is exposed in plasma, the gas forming described plasma at least includes The compound being represented by chemical formula (I),
Wherein, R1、R2、R3Separately be selected from hydrogen, alkyl, alkene, haloalkyl, alkenyl halide or optionally hydrogen by halogen The aryl replacing；
R4、R5、R6Separately it is selected from hydrogen, chlorine, bromine, iodine, alkyl, alkene, hydroxyl, haloalkyl, alkenyl halide, optionally Aryl that hydrogen is optionally substituted by halogen or by-O-R7Group, wherein R7Selected from alkyl.
2. according to claim 1 body surface formed protective layer method it is characterised in that
R1、R2、R3At least one of be haloalkyl.
3. according to claim 2 body surface formed protective layer method it is characterised in that
R1、R2、R3At least one of be CH2CH2(CF2)nCF3, wherein n is any integer in 0 or 1 to 11.
4. according to claim 1 body surface formed protective layer method it is characterised in that
R4、R5、R6At least one of include-O- (CH2)mThe group of-Y, wherein m are any integer in 0 or 1 to 10, and Y selects From hydrogen or methyl.
5. as claimed in any of claims 1 to 4 body surface formed protective layer method it is characterised in that
The compound that described chemistry formula (I) represents is CF3(CF2)7CH2CH2Si(OCH3)3.
6. according to claim 1 body surface formed protective layer method it is characterised in that
Work as R4、R5、R6Be selected from hydrogen, alkyl, alkene, haloalkyl, alkenyl halide or the aryl being optionally optionally substituted by halogen when, The gas forming described plasma also includes oxygen and/or argon gas.
7. according to claim 1 body surface formed protective layer method it is characterised in that
The gas forming described plasma also includes carrier gas, and described carrier gas is selected from inert gas, CF4、C3F8、N2、H2In extremely Few one kind.
8. according to claim 1 body surface formed protective layer method it is characterised in that
The compound that described chemistry formula (I) represents is CF3(CF2)nCH2CH2Si(OCH3)3, n is any one integer in 3-6.
9. according to claim 1 body surface formed protective layer method it is characterised in that
The compound that described chemistry formula (I) represents is CF3(CF2)nCH2CH2Si(OCH3)3, n is any one integer in 8-11.
10. according to claim 1 body surface formed protective layer method it is characterised in that：
The plasma in plasma apparatus for the gas forming described plasma including the compound being represented by chemical formula (I) Form described plasma in body cavity body；
Described plasma apparatus include the electrode being arranged in pairs, and the described electrode being arranged in pairs is contained in described plasma chamber In body.
11. according to claim 10 body surface formed protective layer methods it is characterised in that：
The described electrode being arranged in pairs is connected with continuous radio-frequency power supply, is applied to the continuous electrical power model of described paired electrode Enclose for 0.0001-5000w/m3；At least a portion surface of described object be exposed to time in plasma be 0.001 second- 60 minutes；Pressure in plasma chamber is 0.0001-10000 millitorr.
12. according to claim 11 body surface formed protective layer methods it is characterised in that：
The continuous electric power range being applied to described paired electrode is 100-3000w/m3；At least a portion table of described object The time that face is exposed in plasma is 1-60 minute；Pressure in plasma chamber is 0.1-1000 millitorr.
13. according to claim 12 body surface formed protective layer methods it is characterised in that：
The continuous electric power range being applied to described paired electrode is 600-2000w/m3；At least a portion table of described object The time that face is exposed in plasma is 5-15 minute；Pressure in plasma chamber is 0.1-200 millitorr.
14. according to claim 10 body surface formed protective layer methods it is characterised in that：
Described paired electrode is connected with pulse radiation frequency power supply, and the pulsed electric power scope being applied to described paired electrode is 0.0001-5000w/m3；Pressure in plasma chamber is 0.0001-1000 millitorr；At least a portion table of described object The time that face is exposed in plasma is 0.001 second -80 minutes；The pulse frequency being applied to described paired electrode is 10- 5000Hz.Dutycycle is 5%-95%.
15. according to claim 14 body surface formed protective layer methods it is characterised in that：
The pulsed electric power scope being applied to described paired electrode is 10-2000w/m3；Pressure in plasma chamber is 0.1-500 millitorr；The time that at least a portion surface of described object is exposed in plasma is 1-55 minute.
16. according to claim 15 body surface formed protective layer methods it is characterised in that：
The pulsed electric power scope being applied to described paired electrode is 50-1200w/m3；Pressure in plasma chamber is 0.1-300 millitorr；The time that at least a portion surface of described object is exposed in plasma is 2-30 minute.
17. according to claim 1 body surface formed protective layer methods it is characterised in that：
Described protective layer is lyophobicity protective layer.
A kind of 18. surfaces formed matcoveredn products it is characterised in that：
Described protective layer passes through the method shape forming protective layer in body surface as any one of claim 1-17 The surface of product described in Cheng Yu.
19. surfaces according to claim 18 formed matcoveredns product it is characterised in that：Described product includes：
At least one in electrical equipment, electronic equipment, wrist-watch, cloth, permeable membrane and wearing product.
20. surfaces according to claim 19 formed matcoveredns product it is characterised in that：
Described electrical equipment includes：In communication base station, converting equipment, data exchange equipment, the vehicles, outdoor lightings Any one and/or any one of communication base station, converting equipment, data exchange equipment, the vehicles, outdoor lightings Any part.
21. surfaces according to claim 19 formed matcoveredns product it is characterised in that：
Described electronic equipment includes：Any one of handheld communication devices, electronic game station, wearable electronic and/ Or any part of any one of handheld communication devices, electronic game station, wearable electronic.
22. surfaces according to claim 19 formed matcoveredns product it is characterised in that：
Described wearing product includes clothes, shoes and hats and/or ornaments.
CN201610815598.9A 2016-09-12 2016-09-12 Method for forming protection layer on surface of object and product with protection layer formed on surface Pending CN106433454A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610815598.9A CN106433454A (en) 2016-09-12 2016-09-12 Method for forming protection layer on surface of object and product with protection layer formed on surface

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Application Number Priority Date Filing Date Title
CN201610815598.9A CN106433454A (en) 2016-09-12 2016-09-12 Method for forming protection layer on surface of object and product with protection layer formed on surface

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108933088A (en) * 2017-05-25 2018-12-04 上海稷以科技有限公司 A kind of method and encapsulating structure of encapsulation

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Publication number Priority date Publication date Assignee Title
CN1698188A (en) * 2003-01-31 2005-11-16 应用材料公司 Method for depositing a low dielectric constant film
CN101802984A (en) * 2007-10-22 2010-08-11 应用材料股份有限公司 On substrate, form the method for silicon oxide layer
CN102137722A (en) * 2006-10-03 2011-07-27 杨百翰大学 Hydrophobic and oleophobic coating and method for preparing the same
CN103582719A (en) * 2011-06-03 2014-02-12 气体产品与化学公司 Compositions and processes for depositing carbon-doped silicon-containing films
CN104718258A (en) * 2012-08-13 2015-06-17 欧洲等离子公司 Surface coatings

Patent Citations (5)

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Publication number Priority date Publication date Assignee Title
CN1698188A (en) * 2003-01-31 2005-11-16 应用材料公司 Method for depositing a low dielectric constant film
CN102137722A (en) * 2006-10-03 2011-07-27 杨百翰大学 Hydrophobic and oleophobic coating and method for preparing the same
CN101802984A (en) * 2007-10-22 2010-08-11 应用材料股份有限公司 On substrate, form the method for silicon oxide layer
CN103582719A (en) * 2011-06-03 2014-02-12 气体产品与化学公司 Compositions and processes for depositing carbon-doped silicon-containing films
CN104718258A (en) * 2012-08-13 2015-06-17 欧洲等离子公司 Surface coatings

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108933088A (en) * 2017-05-25 2018-12-04 上海稷以科技有限公司 A kind of method and encapsulating structure of encapsulation

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Application publication date: 20170222