CN106431830A - Decomposition method of tetramethyl ammonium hydroxide solution and decomposition device thereof - Google Patents
Decomposition method of tetramethyl ammonium hydroxide solution and decomposition device thereof Download PDFInfo
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- CN106431830A CN106431830A CN201610654822.0A CN201610654822A CN106431830A CN 106431830 A CN106431830 A CN 106431830A CN 201610654822 A CN201610654822 A CN 201610654822A CN 106431830 A CN106431830 A CN 106431830A
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- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C29/00—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring
- C07C29/09—Preparation of compounds having hydroxy or O-metal groups bound to a carbon atom not belonging to a six-membered aromatic ring by hydrolysis
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- C—CHEMISTRY; METALLURGY
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- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
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Abstract
The invention discloses a decomposition method of a tetramethyl ammonium hydroxide (TMAH) solution and a decomposition device thereof. The aim that TMAH is decomposed is achieved by mixing the TMAH solution, an oxidizing agent and a catalyst. The oxidizing agent comprises a hypochlorite or a pypocholoride, the TMAH solution and the oxidizing agent are reacted, and the catalyst can adsorb oxygen atoms generated in the reaction process. The oxygen atoms adsorbed by the catalyst can be further participated in a reaction, and therefore the TMAH is decomposed into nitrogen and alcohol. By means of the decomposition method of the TMAH solution, the removing rate of the TMAH in the TMAH solution can be larger than 99%.
Description
Technical field
The present invention, about the decomposition method of a kind of TMAH (TMAH) solution and decomposer thereof, mainly will
Tetramethyl ammonium hydroxide solution, oxidant and catalyst mixing, to produce nitrogen and alcohols.
Background technology
Frequently with TMAH in manufacture of semiconductor（TMAH, tetramethyl ammonium hydroxide）
Remove photoresistance, and produce the waste water containing TMAH.Owing to TMAH has toxicity, waste water can not be straight
Running in and putting, the general practice is to use microorganism or bleaching water to discharge after decomposing the TMAH in waste water again.Micro-
The speed of biological decomposition TMAH is slow, and must use large-area place, it is impossible to meet current semiconductor industry
Demand.
Use bleaching water to decompose TMAH, be usually and use break point chlorination method, by repeatedly at tetramethyl hydrogen
Amine-oxides waste water adds hypochlorous acid, and pH-value when controlling reaction is between PH6 to PH7, reach decomposition tetramethyl hydrogen
The purpose of amine-oxides.But break point chlorination method must consume substantial amounts of hypochlorous acid, and because constantly to add time chlorine in course of reaction
Acid, the interval control difficulty of pH-value is high.Additionally, after TMAH reacts chlorination with hypochlorous acid, with water effect again
Ammonia nitrogen form can be reduced into, decomposition efficiency greatly reduces, its decomposition efficiency about only 5% to 10%.
Content of the invention
One purpose of the present invention, is to provide the decomposition method of a kind of tetramethyl ammonium hydroxide solution, mainly by tetramethyl
Base Ammonia, oxidant and catalyst mixing, utilize catalyst absorption tetramethyl ammonium hydroxide solution to react with oxidant
Rear produced oxygen atom, to produce nitrogen and alcohols.The tetramethyl in tetramethyl ammonium hydroxide solution can be made by the method
Base ammonium hydroxide clearance is more than 99%, and can be by the tetramethyl in TMAH waste water produced by manufacture of semiconductor
Base ammonium hydroxide concentration by 4000ppm to drop to below 1ppm.
It is another object of the present invention to the decomposition method of tetramethyl ammonium hydroxide solution of the present invention, application
In a tetramethyl ammonium hydroxide solution decomposer.Tetramethyl ammonium hydroxide solution decomposer mainly includes a mixing channel, extremely
A few transfer tube and a catalyst groove, wherein mixing channel connects catalyst groove by transfer tube.Mixing channel is in order to mix tetramethyl hydrogen-oxygen
Change ammonium salt solution and oxidant, and produce N (CH3)3ClOH, catalyst groove is then in order to an accommodating catalyst, and passes through transfer tube by mixing channel
Receive N (CH3)3Hydrone in ClOH and tetramethyl ammonium hydroxide solution.Hydrone and N (CH3)3ClOH reaction produces NH
(CH3)3OH, catalyst then adsorbed water molecule and N (CH3)3The oxygen atom producing after ClOH reaction.NH(CH3)3OH, catalyst are inhaled
Attached oxygen atom and hydrone can react generation nitrogen and alcohols.In addition tetramethyl ammonium hydroxide solution, N (CH3)3ClOH、
NH(CH3)3OH, oxidant and/or hydrochloric acid can flow between mixing channel and catalyst groove via transfer tube, with reach to puddle
Effect, and increase nitrogen and the efficiency of alcohols generation.
For reaching above-mentioned purpose, the present invention provides the decomposition method of a kind of tetramethyl ammonium hydroxide solution, including following step
Suddenly：Mixing a tetramethyl ammonium hydroxide solution, an oxidant and a catalyst, wherein oxidant includes a hypochlorite or a chlorine
Hydrochlorate, catalyst then adsorbs a produced oxygen atom after tetramethyl ammonium hydroxide solution reacts with oxidant；And produce a nitrogen
Gas and an alcohols.
For reaching above-mentioned purpose, the present invention provides the decomposer of a kind of tetramethyl ammonium hydroxide solution, including：One mixing
Groove, in order to mix a tetramethyl ammonium hydroxide solution and an oxidant, to produce a N (CH3)3ClOH, wherein tetramethyl hydroxide
Ammonium salt solution includes a TMAH and a hydrone, and oxidant includes a hypochlorite or a hypochlorite；At least
One transfer tube, connects mixing channel；And a catalyst groove, in order to an accommodating catalyst, and connect transfer tube, wherein catalyst groove is by transmission
Pipe is received N (CH by mixing channel3)3ClOH and hydrone so that hydrone and N (CH3)3ClOH reaction produces a NH (CH3)3OH,
And catalyst adsorbed water molecule and N (CH3)3The oxygen atom that ClOH reaction produces, and make NH (CH3)3The oxygen that OH, catalyst are adsorbed
Atom and water molecule reaction produce a nitrogen and an alcohols.
In decomposition method one embodiment of the present invention, wherein tetramethyl ammonium hydroxide solution includes a TMAH
And a hydrone.
In decomposition method one embodiment of the present invention, wherein further comprising the steps of：Tetramethyl ammonium hydroxide solution, oxidation
After agent and catalyst mixing, produce a NH (CH3)3OH；And catalyst adsorbed oxygen atom, NH (CH3)3OH and hydrone are anti-
Nitrogen and alcohols should be produced.
In decomposition method one embodiment of the present invention, further comprising the steps of：Mixing tetramethyl ammonium hydroxide solution and oxygen
Agent, to produce a N (CH3)3ClOH；Add catalyst, make catalyst, N (CH3)3ClOH mixes with hydrone, and produces a NH
(CH3)3OH, and catalyst absorption N (CH3)3Produced oxygen atom after ClOH and water molecule reaction；And oxygen that catalyst is adsorbed is former
Son, NH (CH3)3OH and water molecule reaction produce nitrogen and alcohols.
In decomposition method one embodiment of the present invention, further comprising the steps of：Tetramethyl ammonium hydroxide solution, oxidant with
And after catalyst mixing, produce a NH (CH3)3OH and a hydrochloric acid；And add an alkali, make alkali and hydrochloric acid acid-base neutralization.
In decomposition method one embodiment of the present invention, wherein alkali is NaOH.
In decomposition method one embodiment of the present invention, wherein catalyst includes carbon or activated carbon.
In decomposition method one embodiment of the present invention, wherein catalyst tool electric conductivity and will not be with tetramethyl ammonium hydroxide solution
The oxygen atom producing after reacting with oxidant produces chemical reaction.
In decomposition method one embodiment of the present invention, wherein the consumption of oxidant by palpus Moore equivalents 1 to 1.2
Times.
In decomposition method one embodiment of the present invention, wherein oxidant includes hypochlorous acid, sodium hypochlorite or calcium hypochlorite.
In decomposer one embodiment of the present invention, wherein N (CH3)3After ClOH, catalyst contact with hydrone, produce NH
(CH3)3OH and a hydrochloric acid.
In decomposer one embodiment of the present invention, wherein catalyst includes carbon or activated carbon.
In decomposer one embodiment of the present invention, wherein mixing channel or catalyst groove are also in order to receive an alkali and hydrochloric acid soda acid
Neutralize, make the pH-value in mixing channel or catalyst groove be more than PH7.
In decomposer one embodiment of the present invention, wherein transfer tube forms loop between mixing channel and catalyst groove, and
Tetramethyl ammonium hydroxide solution, N (CH3)3ClOH、NH(CH3)3OH or oxidant then via transfer tube at mixing channel and catalyst
Flow between groove.
Brief description
Fig. 1 is the flow chart of steps of the decomposition method of the tetramethyl ammonium hydroxide solution of one embodiment of the invention.
Fig. 2 is the organigram of the decomposer of the tetramethyl ammonium hydroxide solution of one embodiment of the invention.
Although describing the detailed description of the invention of the present invention by way of example in the drawings, and herein it is made
Detailed description, but the present invention also allows for various modification and alternative forms.The graphic content of the present invention can be not geometric ratio
Example, graphic and detailed describes the exposure being only specific pattern, and the restriction for the present invention, not contrary, according to patent model
Modify in the spirit and scope enclosed, impartial component and displacement thereof are all the scope that the present invention is covered.
【Primary clustering symbol description】：
Decomposer 21 mixing channel of 20 tetramethyl ammonium hydroxide solutions
211 input 22 catalyst grooves
221 input pipe 23 catalyst
24 transfer tubes.
Detailed description of the invention
Refer to Fig. 1, be the flow chart of steps of the decomposition method of the tetramethyl ammonium hydroxide solution of one embodiment of the invention.
As it can be seen, decomposition method of the present invention can include step S101 and S103.Mixing tetramethyl ammonium hydroxide solution, oxidation
Agent and catalyst, wherein oxidant includes hypochlorite or hypochlorite, catalyst in order to adsorb tetramethyl ammonium hydroxide solution with
Produced oxygen atom after oxidant reaction, as shown in step S101.
Tetramethyl ammonium hydroxide solution of the present invention includes TMAH（TMAH, N (CH3)4OH）And moisture
Son.In an embodiment of the present invention, tetramethyl ammonium hydroxide solution can be the produced hydrogen-oxygen containing tetramethyl of manufacture of semiconductor
Change the waste water of ammonium.
Catalyst of the present invention, can be to have electric conductivity, and will not be with tetramethyl ammonium hydroxide solution and oxidant
After reaction, produced oxygen atom produces the material of chemical reaction.In an embodiment of the present invention, catalyst includes carbon or work
Property carbon, wherein activated carbon is the present invention one preferred embodiment.Activated carbon has bigger surface area, the effect of its absorption oxygen atom
Rate and quantity are all preferable, therefore use activated carbon can promote the reaction rate of decomposition method of the present invention.
After tetramethyl ammonium hydroxide solution, oxidant and catalyst mixing, nitrogen and alcohols can be produced, such as step S103
Shown in.Specifically, after tetramethyl ammonium hydroxide solution, oxidant and catalyst mixing, NH (CH can be produced3)3OH（Trimethyl
Ammonium hydroxide）, catalyst then can adsorb oxygen atom, and such as tetramethyl ammonium hydroxide solution and oxidant react generation NH (CH3)3OH and oxygen atom, catalyst then adsorbs produced oxygen atom after tetramethyl ammonium hydroxide solution reacts with oxidant.Then touch
The oxygen atom that matchmaker is adsorbed can be with NH (CH3)3Water molecule reaction in OH and tetramethyl ammonium hydroxide solution, and produce nitrogen
And alcohols, can effectively decompose TMAH thus.
In an embodiment of the present invention, first tetramethyl ammonium hydroxide solution and oxidant can be mixed, add afterwards
Catalyst, refer to following chemical chemical equation：
N(CH3)4OH + HOCl → N(CH3)3ClOH + CH3OH ……… (1)
N(CH3)3ClOH + H2O + C* → NH(CH3)3OH + HCl + C*O ……… (2)
3C*O + 2NH(CH3)3OH + H2O → N2+ 6CH3OH + 3C* ……… (3)
For example, first tetramethyl ammonium hydroxide solution can be mixed with oxidant hypochlorous acid, make TMAH
（TMAH, N (CH3)4OH）React with hypochlorous acid, and produce N (CH3)3ClOH（One chlorine trimethylammonium hydroxide）, such as chemical reaction
Shown in formula (1).It is subsequently added into catalyst, make catalyst, N (CH3)3Hydrone contact in ClOH and tetramethyl ammonium hydroxide solution
Or mixing, to produce NH (CH3)3OH（Trimethylammonium hydroxide）And oxygen atom, catalyst then can adsorb oxygen atom, such as N
(CH3)3ClOH produces NH (CH with water molecule reaction3)3OH and oxygen atom, catalyst then adsorbs N (CH3)3ClOH and hydrone
The produced oxygen atom of reaction, as shown in chemical equation (2).The oxygen atom that then catalyst is adsorbed can further with NH
(CH3)3OH and water molecule reaction, and produce nitrogen and alcohols, as shown in chemical equation (3).
C* in chemical equation (2) and chemical equation (3) represents the catalyst including carbon, and C*O then represents suction
The catalyst of attached oxygen atom, rather than carbon monoxide.Due to oxygen atom itself unstable, generally, two oxygen atoms can be tied
Synthesize oxygen（O2）To form stable octet structure.The present invention is then to utilize catalyst to adsorb oxygen atom, to avoid two
Individual oxygen atom is combined into oxygen, as shown in chemical equation (2).The oxygen atom that catalyst is adsorbed afterwards can further with NH
(CH3)3OH and water molecule reaction produce nitrogen and alcohols, as shown in chemical equation (3).
Although chemical equation (2) and (3) they are as a example by the catalyst including carbon, but this and non-invention interest field
Restriction, in other embodiments of the present invention, as long as it was previously stated, meeting tool electric conductivity and will not be molten with TMAH
The oxygen atom that liquid produces after reacting with oxidant produces the condition of chemical reaction, can be used as catalyst used in the present invention.
If not using catalyst, then the oxygen atom being combined into oxygen will not participate in the described reaction of chemical equation (3), changes
Sentence is talked about, and the reaction described in chemical equation (3) will not occur.Refer to the following chemical equation not using catalyst：
2N(CH3)3ClOH + 2H2O → 2NH(CH3)3OH + 2HCl + O2……… (4)
NH(CH3)3OH + HOCl → NH(CH3)2ClOH + CH3OH ……… (5)
2NH(CH3)2ClOH + 2H2O → 2NH2(CH3)2OH + 2HCl + O2……… (6)
NH2(CH3)2OH + HOCl → NH2(CH3)ClOH + CH3OH ……… (7)
2NH2(CH3)ClOH + 2H2O → 2NH3(CH3)OH + 2HCl + O2……… (8)
For convenience of follow-up explanation, at this by the NH (CH in above-mentioned chemical equation (4) to (8)3)3OH（Trimethyl hydroxide
Ammonium）、NH2(CH3)2OH（Dimethyl hydrogen amine-oxides）And NH3(CH3)OH（Ammonium hydroxide）It is commonly referred to as TMAH to spread out
Biology, and the N (CH in chemical equation (4) to (8)3)3ClOH（One chlorine trimethylammonium hydroxide）、NH(CH3)2ClOH（One chlorine
Dimethyl hydrogen amine-oxides）And NH2(CH3)ClOH（Chloromethyl ammonium hydroxide）It is commonly referred to as TMAH chloride.
TMAH derivative and oxidant reaction can produce TMAH chloride, such as chemical reaction
Formula (5), shown in (7), and can produce after TMAH chloride and water effect TMAH derivative with
And oxygen, as shown in chemical equation (4), (6), (8).In other words, if not using catalyst of the present invention, tetramethyl hydrogen
Ammonium hydroxide solution then cannot be decomposed and be converted to nitrogen and alcohols.
In an embodiment of the present invention, the consumption of oxidant by 1 to 1.2 times of palpus Moore equivalents.Of the present invention
Equivalents, refer to balance afore mentioned chemical reaction equation (1), (2), (3) institute must use oxidant mole number.Although chemical reaction
Formula is using hypochlorous acid as oxidant in (1), but hypochlorous acid is only a present invention wherein embodiment, and non-invention interest field
Restriction, in other embodiments of the present invention, oxidant can be hypochlorite or other include the liquid of hypochlorite, example
Such as sodium hypochlorite, calcium hypochlorite, liquor natrii hypochloritis or calcium hypochlorite solution.
In an embodiment of the present invention, catalyst, N (CH3)3Hydrone in ClOH and tetramethyl ammonium hydroxide solution mixes
Close or after contact, NH (CH can be produced3)3OH（Trimethylammonium hydroxide）And hydrochloric acid, as shown in chemical equation (2).
Owing to the decomposition method of tetramethyl ammonium hydroxide solution of the present invention is carried out in the environment of meta-acid, can produce
The stronger Cl of toxicity2And/or Cl3, for this in an embodiment of the present invention, an alkali, such as sodium hydroxid can be added, make alkali and salt
Acid acid-base neutralization.In a preferred embodiment of the present invention, NaOH can be used to adjust pH-value to more than PH7, avoid
Cl2And/or Cl3Generation.
By the decomposition method of tetramethyl ammonium hydroxide solution of the present invention, can make in tetramethyl ammonium hydroxide solution
TMAH clearance reach more than 99%.With TMAH waste water produced by general manufacture of semiconductor
As a example by, the TMAH concentration in waste water is about at below 4000ppm, by TMAH of the present invention
TMAH concentration in waste water can be down to below 1ppm, therefore TMAH by the decomposition method of solution
Clearance be more than 99.975%, refer to following calculating formula：
The decomposition method of tetramethyl ammonium hydroxide solution of the present invention, can be further applied to TMAH molten
In the decomposer of liquid.
Refer to Fig. 2, be the organigram of the decomposer of the tetramethyl ammonium hydroxide solution of one embodiment of the invention.
As it can be seen, the decomposer 20 of tetramethyl ammonium hydroxide solution includes that a mixing channel the 21st, at least one transfer tube 24 and touches
Matchmaker's groove 22, wherein mixing channel 21 connects catalyst groove 22 by transfer tube 24.
Mixing channel 21 is in order to mix tetramethyl ammonium hydroxide solution and oxidant, wherein tetramethyl ammonium hydroxide solution bag
Including TMAH and hydrone, oxidant includes hypochlorite or hypochlorite.In tetramethyl ammonium hydroxide solution
TMAH mixes in mixing channel 21 with oxidant, and produces N (CH3) 3ClOH（One chlorine trimethylammonium hydroxide）.
Catalyst groove 22 is in order to an accommodating catalyst 23, and is received N (CH by transfer tube 24 by mixing channel 213)3ClOH and tetramethyl
Hydrone in base Ammonia so that hydrone and N (CH3)3ClOH reaction produces NH (CH3)3OH（One chlorine trimethyl
Ammonium hydroxide）And oxygen atom, and catalyst 23 adsorbed water molecule and N (CH3)3The produced oxygen atom of ClOH reaction, and make NH
(CH3)3Oxygen atom and hydrone that OH, catalyst 23 are adsorbed continue reaction in catalyst groove 22 and produce nitrogen and alcohols.
Certainly N (the CH when reality is applied, in mixing channel 213)3ClOH and hydrone also may produce reaction, and in
Form NH (CH in mixing channel 213)3OH.For this, mixing channel 21 is delivered to the solution of catalyst groove 22 except N (CH3)3ClOH and water
Outside molecule, may also include oxidant, NH (CH3)3OH and/or hydrochloric acid etc..
As described in the decomposition method of tetramethyl ammonium hydroxide solution of the present invention, catalyst 23 has electric conductivity, and will not be with
Tetramethyl ammonium hydroxide solution produced oxygen atom generation chemical reaction after reacting with oxidant.In one embodiment of the invention
In, catalyst 23 includes carbon or activated carbon, and wherein activated carbon is the present invention one preferred embodiment, and activated carbon has bigger
Surface area, the efficiency of its absorption oxygen atom and quantity are all preferable, therefore use activated carbon to promote and fill of the present invention decomposition
The reaction rate put.
Additionally, as described in the decomposition method of tetramethyl ammonium hydroxide solution of the present invention, oxidant of the present invention, can
To be hypochlorite or other include the liquid of hypochlorite, such as sodium hypochlorite, calcium hypochlorite, sodium chlorate solution or secondary chlorine
Acid calcium solution.
In an embodiment of the present invention, mixing channel 21 can include an input 211, molten in order to input TMAH
Liquid and oxidant.
In an embodiment of the present invention, N (CH3)3ClOH and water molecule reaction can produce NH (CH3)3OH and hydrochloric acid.Such as this
Described in the decomposition method of invention tetramethyl ammonium hydroxide solution, the decomposition reaction of tetramethyl ammonium hydroxide solution is at the ring of meta-acid
Carry out under border, the stronger Cl of toxicity can be produced2And/or Cl3.For this in an embodiment of the present invention, can at mixing channel 21 and/or
Catalyst groove 22 adds an alkali, for example, by the input 211 of mixing channel 21, alkali is added mixing channel 21, or catalyst groove 22 can enter
One step includes an input pipe 221, and by the input pipe 221 of catalyst groove 22, alkali is added catalyst groove 22, makes alkali and hydrochloric acid soda acid
Neutralize.In a preferred embodiment of the present invention, NaOH can be added in mixing channel 21 or catalyst groove 22, by mixing channel 21
And/or the pH-value in catalyst groove 22 is adjusted to more than PH7, avoid Cl2And/or Cl3Generation.
In an embodiment of the present invention, transfer tube 24 can form loop between mixing channel 21 and catalyst groove 21 so that four
Ammonium hydroxide solution, N (CH3)3ClOH、NH(CH3)3OH or oxidant via transfer tube at mixing channel 21 and catalyst groove
Between 22, flowing or circulation, so can reach the effect puddled, to increase the generation efficiency of nitrogen and alcohols.
Certainly, in another embodiment of the decomposer of tetramethyl ammonium hydroxide solution of the present invention, also may not include catalyst
Groove 22 and transfer tube 24.Mixing channel 21 also may be used to accommodating catalyst 23, and directly uses mixing channel 21 to make TMAH
Solution, oxidant and catalyst 23 mix or contact, for example by an agitator (not shown) make tetramethyl ammonium hydroxide solution,
Oxidant and catalyst 23 mix or contact, to produce nitrogen and alcohols.
Described in this description perhaps, must and the restriction of the wording such as change non-invention.Specification is used
Technical term, mainly in order to carry out the description of specific embodiment, is not the restriction of the present invention.The odd number amount that specification is used
Value (as one and this) also can be multiple, unless the content at specification expressly states otherwise.For example mentioned by specification
One device can include the combination of two or more device, and the material that specification is carried then can include multiple
The mixing of material.
As described above, only presently preferred embodiments of the present invention, it is not used for limiting the scope that the present invention implements, i.e.
All impartial changes done according to the shape described in the claims in the present invention, construction, feature and spirit with modify, all should include at this
In the claim of invention.
Claims (15)
1. the decomposition method of a tetramethyl ammonium hydroxide solution, it is characterised in that dividing of described tetramethyl ammonium hydroxide solution
Solution method comprises the following steps：
Mix a tetramethyl ammonium hydroxide solution, an oxidant and a catalyst, wherein said oxidant include a hypochlorite or
One hypochlorite, described catalyst then adsorbs after described tetramethyl ammonium hydroxide solution reacts with described oxidant produced one
Oxygen atom；And
Produce a nitrogen and an alcohols.
2. decomposition method as claimed in claim 1, it is characterised in that wherein said tetramethyl ammonium hydroxide solution includes or four
Ammonium hydroxide and a hydrone.
3. decomposition method as claimed in claim 2, it is characterised in that further comprising the steps of：
After described tetramethyl ammonium hydroxide solution, described oxidant and the mixing of described catalyst, produce a NH (CH3)3OH；And
Described oxygen atom that described catalyst is adsorbed, described NH (CH3)3OH and described water molecule reaction produce described nitrogen with
And described alcohols.
4. decomposition method as claimed in claim 2, it is characterised in that further comprising the steps of：
Mix described tetramethyl ammonium hydroxide solution and described oxidant, to produce a N (CH3)3ClOH；
Add described catalyst, make described catalyst, described N (CH3)3ClOH mixes with described hydrone, and produces a NH (CH3)3OH,
And the described N (CH of described catalyst absorption3)3Produced described oxygen atom after ClOH and described water molecule reaction；And
Described oxygen atom that described catalyst is adsorbed, described NH (CH3)3OH and described water molecule reaction produce described nitrogen and
Described alcohols.
5. decomposition method as claimed in claim 1, it is characterised in that further comprising the steps of：
After described tetramethyl ammonium hydroxide solution, described oxidant and the mixing of described catalyst, produce a NH (CH3)3OH and a salt
Acid；And
Add an alkali, make described alkali and described hydrochloric acid acid-base neutralization.
6. decomposition method as claimed in claim 5, it is characterised in that wherein said alkali is NaOH.
7. decomposition method as claimed in claim 1, it is characterised in that wherein said catalyst includes carbon or activated carbon.
8. decomposition method as claimed in claim 1, it is characterised in that wherein said catalyst tool electric conductivity and will not be with described four
The described oxygen atom that ammonium hydroxide solution produces after reacting with described oxidant produces chemical reaction.
9. decomposition method as claimed in claim 1, it is characterised in that the consumption of wherein said oxidant by palpus Moore equivalent
1 to 1.2 times of number.
10. decomposition method as claimed in claim 1, it is characterised in that wherein said oxidant includes hypochlorous acid, sodium hypochlorite
Or calcium hypochlorite.
The decomposer of 11. 1 kinds of tetramethyl ammonium hydroxide solutions, it is characterised in that dividing of described tetramethyl ammonium hydroxide solution
Solve device to include：
One mixing channel, in order to mix a tetramethyl ammonium hydroxide solution and an oxidant, to produce a N (CH3)3ClOH, Qi Zhongsuo
State tetramethyl ammonium hydroxide solution and include a TMAH and a hydrone, and described oxidant includes a hypochlorite
Or a hypochlorite；
At least one transfer tube, connects described mixing channel；And
One catalyst groove, in order to an accommodating catalyst, and connects described transfer tube, and wherein said catalyst groove passes through described transfer tube by institute
State mixing channel and receive described N (CH3)3ClOH and described hydrone so that described hydrone and described N (CH3)3ClOH reacts product
A raw NH (CH3)3OH, and the described hydrone of described catalyst absorption and described N (CH3)3The oxygen atom that ClOH reaction produces, and
Make described NH (CH3)3Described oxygen atom and described water molecule reaction that OH, described catalyst are adsorbed produce a nitrogen and one
Alcohols.
12. decomposers as claimed in claim 11, it is characterised in that wherein said N (CH3)3ClOH, described catalyst and institute
After stating hydrone contact, produce described NH (CH3)3OH and a hydrochloric acid.
13. decomposers as claimed in claim 11, it is characterised in that wherein said catalyst includes carbon or activated carbon.
14. decomposers as claimed in claim 12, it is characterised in that wherein said mixing channel or described catalyst groove also in order to
Receive an alkali and described hydrochloric acid acid-base neutralization, make the pH-value in described mixing channel or described catalyst groove be more than PH7.
15. decomposers as claimed in claim 11, it is characterised in that wherein said transfer tube is at described mixing channel and described
Formation loop between catalyst groove, and described tetramethyl ammonium hydroxide solution, described N (CH3)3ClOH, described NH (CH3)3OH or institute
State oxidant then to flow between described mixing channel and described catalyst groove via described transfer tube.
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| CN118307123A (en) * | 2024-06-11 | 2024-07-09 | 信联电子材料科技股份有限公司 | Wastewater treatment method of tetramethyl ammonium hydroxide |
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