CN106422691A - High-frequency power supply circuit used in organic exhaust gas plasma processing device - Google Patents
High-frequency power supply circuit used in organic exhaust gas plasma processing device Download PDFInfo
- Publication number
- CN106422691A CN106422691A CN201610721987.5A CN201610721987A CN106422691A CN 106422691 A CN106422691 A CN 106422691A CN 201610721987 A CN201610721987 A CN 201610721987A CN 106422691 A CN106422691 A CN 106422691A
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- China
- Prior art keywords
- power supply
- supply circuit
- exhaust gas
- frequency
- organic exhaust
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2257/00—Components to be removed
- B01D2257/70—Organic compounds not provided for in groups B01D2257/00 - B01D2257/602
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2259/00—Type of treatment
- B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
- B01D2259/818—Employing electrical discharges or the generation of a plasma
Abstract
The invention discloses a high-frequency power supply circuit used in an organic exhaust gas plasma processing device, and belongs to the technical field of air purification. The high-frequency power supply circuit comprises a high frequency generator for generating a high frequency signal of a set frequency, and is characterized by further comprising an automatic power adjustment circuit (104) which adjusts the power of the signal output by the high frequency generator according to the size of a forward transmission signal. The high-frequency power supply circuit provided by the invention has stable output power.
Description
Technical field
The present invention relates to a kind of high-frequency power supply circuit for organic exhaust gas plasma processing apparatus, belong to air cleaning
Technical field.
Background technology
With the fast development of global industry, problem of environmental pollution becomes more serious, needs pollution control is carried out sternly
Strict regulation and control.And, the variation of pollution source category and the lasting generation of new pollutant have caused various approach next more efficient
Ground solves pollution problem.
After nineteen ninety, application lower temperature plasma technology controls the research of air pollutants vigorously to send out in international academic community
Exhibition, related lower temperature plasma technology occurs successively, such as electron beam, glow discharge, corona discharge, dielectric barrier discharge, micro-
Ripple electric discharge, gliding arc discharge etc..The principle of low temperature plasma is to apply electric energy by gas ionization to accelerate gas-phase chemical reaction,
Particularly generate the free radical of high oxidative to carry out gaseous oxidation reaction, hazardous air pollutants are oxidized to harmless object or low
Poisonous substance, has been shown to be effectively used for multiple gaseous states such as nitrogen-containing oxide NOx, sulfur dioxide SO2, volatile organic matter VOCs
The removal of pollutant.But offer for organic exhaust gas plasma processing apparatus medium-high frequency power supply output work in prior art
Rate is unstable.
Content of the invention
For overcoming shortcoming present in prior art, the goal of the invention of the present invention be provide a kind of for organic exhaust gas etc. from
The high-frequency power supply circuit of daughter processing meanss, its stable output power.
For realizing described goal of the invention, the present invention provides the high frequency in a kind of plasma processing apparatus for organic exhaust gas
Power circuit, its high frequency generator, described high frequency generator is used for producing the high-frequency signal of setpoint frequency it is characterised in that going back
Including power automatic circuit 104, it adjusts the work(of the signal of high frequency generator output according to the size of positive transmission signal
Rate.
Preferably, for the high-frequency power supply circuit in organic exhaust gas plasma processing apparatus it is characterised in that also fixed
To bonder 107, its signal input part is connected to automatic circuit 104.
Preferably, the coupled output of the positive transmission signal of directional coupler 107 is connected to by the first comparison circuit
Automatic circuit 104.
Preferably, the coupled output of the reverse transmission signal of directional coupler 107 is connected to by the second comparison circuit
Automatic circuit 104.
Preferably, it is additionally provided with power amplifier between automatic circuit 104 and directional coupler.
Compared with prior art, provided by the present invention for the high frequency electric source electricity of organic exhaust gas plasma processing apparatus
Road, its stable output power.
Brief description
Fig. 1 is the composition schematic diagram of the organic exhaust gas plasma processing apparatus that the present invention provides；
Fig. 2A is the axial sectional diagrammatical view illustration of the first stage particles decomposer that the present invention provides；
Fig. 2 B is the axial sectional diagrammatical view illustration of the secondary particle decomposer that the present invention provides；
Fig. 3 A is the radial section schematic diagram from unit cathodes position for the plasma electric that the present invention provides；
Fig. 3 B is the schematic diagram that the plasma ionization module that the present invention provides is seen at anode vertically
Fig. 3 C is the particle absorption unit radial schematic cross-section that the present invention provides；
Fig. 4 is the radial section schematic diagram of the ozone decomposed device that the present invention provides；
Fig. 5 is the composition frame chart of the high-frequency power supply circuit provided by the present invention for organic exhaust gas plasma processing apparatus.
Specific embodiment
Below in conjunction with accompanying drawing, technical scheme is clearly and completely described with the enforcement it is clear that described
Example is a part of embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill
The every other embodiment that personnel are obtained under the premise of not making creative work, broadly falls into the scope of protection of the invention.
In describing the invention, it should be noted that term " " center ", " on ", D score, " vertical ", " level ",
The orientation of instruction such as " interior ", " outward " or position relationship are based on orientation shown in the drawings or position relationship, are for only for ease of and retouch
State the present invention and simplify description, rather than the device of instruction or hint indication or element must have specific orientation, with specific
Azimuth configuration and operation, be therefore not considered as limiting the invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " set
Put ", should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or integratedly " being connected ", " connection "
Connect；Can be to be joined directly together it is also possible to be indirectly connected to by intermediary, can also be the connection of two element internals, right
For those of ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
Fig. 1 is the composition schematic diagram of the organic exhaust gas plasma processing apparatus that the present invention provides, as shown in figure 1, this
The organic exhaust gas plasma processing apparatus of bright offer include housing 1, controller 12, blower fan 4 and gas treatment equipment, wherein,
Housing sidewall position on the lower side is provided with air inlet 2, and housing sidewall position on the upper side is provided with air vent 9, and air inlet connects
Inlet air plenum, air inlet is provided with primary filter 3, and primary filter 3 is used for carrying out tentatively mistake to the air entering air intake interior
Filter, to remove the large particulate matter of in the air.The air with organic pollution that blower fan 4 is used for will go into air intake interior carries
Supply gas processing meanss, described gas treatment equipment includes the N level particle decomposer 6 being sequentially connected, and also includes being connected to end
The ozone decomposed device 8 of pole particle decomposer, described N level particle decomposer 6 and ozone decomposed device 8 pass through the connector 7 of annular
Connection, the oxygen entering its interior in the air is converted to ozone by described particle decomposer 6, and ozone can be to entering into decomposer
Organic pollution decomposed.Ozone decomposed device 8 is used for ozone being reduced, to prevent ozone from air is caused with secondary dirt
Dye.Controller is used for the working condition of blower fan and particle decomposer is controlled.
Fig. 2A is the axial sectional diagrammatical view illustration of the first stage particles decomposer that the present invention provides, and as shown in Figure 2 A, the present invention carries
For particle decomposer include plasma ionization module 61 and particle absorption unit 62, plasma ionization module 61 includes insulator
Shell 6, axially arranged along insulation body case 6 has M（M is the integer more than or equal to 2）Gas channel, each air-flow leads to
It is disposed with negative electrode along airflow direction, such as cathode ring 613, discharge anode and absorber 615, discharge anode includes anode electrode
Plate 604 and with axis angle at an acute angle stretch to multiple spray points 602 of negative electrode.In the present invention, gas channel is preferably cylinder
Shape cavity, cathode ring 613 is annular, and it is arranged on the first end of cylindrical cavity；Positive plate is arranged on cylindrical cavity
The central authorities at the second end；Multiple spray points 602 are connected with positive plate, and multiple spray points are uniformly distributed, and are arranged on cylindrical cavity
Interior, and radial to cathode ring extension.Particle absorption unit 62 includes the body case that insulate, axially arranged along insulation body case
Have M gas channel, the content of each gas channel is circumferentially arranged fiber medium 615, for absorb decomposed organic
Exhaust gas particles.In the present invention, plasma ionization module 61 and particle absorption unit 62 can be connected by circular connector, so
So that the gas channel of plasma ionization module 61 is communicated with the gas channel of particle absorption unit 62, and be easy to arrange negative electrode, sun
Pole and fiber medium.
Fig. 2 B is the axial sectional diagrammatical view illustration of the secondary particle decomposer that the present invention provides, and as shown in Figure 2 B, the present invention carries
For particle decomposer include two grades, the structure of every one-level is identical, and first order particle decomposer is first with second level particle decomposer
Tail is connected, and so, extends decomposition path-ways and the time of organic exhaust gas, thus providing decomposition efficiency.Although the present invention is with one
Level particle decomposer and secondary particle decomposer are illustrated, but, it is also not necessarily limited to above-mentioned two kinds of situations, N level, N can be sent out
Be more than or equal to integer.Actual should when, can degree of purification as requested, freely set.In the present invention, N level
Particle decomposer spirals spirality so, so that the space of occupancy is reduced, makes to enter into the convolution of organic exhaust gas simultaneously
Time lengthening, more improves purification efficiency.
Fig. 3 A is the radial section schematic diagram from unit cathodes position for the plasma electric that the present invention provides, as shown in Figure 3A,
Each plasma ionization module 61 includes M（M is the integer more than or equal to 2）Individual gas channel, the of each gas channel
One end is respectively provided with a negative electrode coil, and each negative electrode coil is connected to ground wire 615 by wire.
Fig. 3 B is the schematic diagram that the plasma ionization module that the present invention provides is seen at anode vertically.As Fig. 3 B institute
Show, each plasma ionization module 61 includes M（M is the integer more than or equal to 2）Individual gas channel, each gas channel
The central authorities at the second end are respectively provided with an anode pole 604, and each positive plate 604 is connected with multiple radial sparking electrodes
602, each sparking electrode extends to plate winding 613, but does not contact, and each positive plate connects high-field electrode 605 by wire.
Fig. 3 C is the particle absorption unit radial schematic cross-section that the present invention provides, as shown in Figure 3 C, particle absorption unit
62 include M gas channel, and each air-flow leads to interior circumferentially arranged fiber medium 615, and described fiber medium 615 is used for adsorbing quilt
The organic exhaust gas particle decomposing.
Fig. 4 is the radial section schematic diagram of the spiral type ozone decomposed pipe that the present invention provides.As shown in figure 4, spiral type is smelly
Oxygen solution pipe 8 includes the gas channel 101 of a M, the inwall of cellular gas channel is coated with, manganese oxide particle 102,
Preferably manganese dioxide granule 102.Rotation shape ozone decomposed pipe 8 can be rigidity or flexibility.
Fig. 5 is the composition frame of the high-frequency power supply circuit provided by the present invention for organic exhaust gas plasma processing apparatus
Figure, as shown in figure 5, the high-frequency power supply circuit that the present invention provides includes：Agitator 101, it is used for producing the high frequency letter setting frequency
Number, the agitator preferred crystal agitator in the present invention, operating center frequency is in 2MHz to 4MHz.
High-frequency power supply circuit also includes phase-locked loop, and described phase-locked loop includes phase discriminator（PD）102nd, loop filter
（LF）103 and voltage controlled oscillator（VCO）114, wherein, phase discriminator（PD）102 are used for comparing voltage controlled oscillator（VCO）114 and brilliant
The phase place of the signal that oscillation body device 101 provides, its output voltage is the function of corresponding two phase contrasts.Loop low pass filter
102 are used for filtering the high-frequency signal in the voltage of phase discriminator 102 output, obtain controlling voltage controlled oscillator（VCO）114 control electricity
Pressure.The output voltage control voltage controlled oscillator of loop low pass filter（VCO）114 frequency of oscillation, makes voltage controlled oscillator（VCO）
114 output frequency is drawn close to the frequency of crystal oscillator, until both frequencies identical so that voltage controlled oscillator（VCO）114
The phase place of the signal of output to crystal oscillator for the output phase place reach certain relation of holding, reach the purpose of PGC demodulation.This
In invention, the outfan of low pass filter is connected to first movable end of switching switch K, and the fixing end of switching switch K is connected to pressure
Controlled oscillator（VCO）114 input.
High-frequency power supply circuit also includes converter 104, the first power amplifier 105, the second power amplifier 106 and orientation
Bonder 107, wherein, the first input end of converter 104 is connected to voltage controlled oscillator（VCO）114 outfan, outfan is even
Connect the input of the first power amplifier 105.The outfan of the first power amplifier 105 is connected to the second power amplifier 106
Input.Second power amplifier 106 is connected to the input of directional coupler 107.High-frequency power supply circuit also includes comparing
Device 110, its end of oppisite phase is connected to the coupled end of the positive transmission signal of directional coupler, and in-phase end is connected to variable resistance RW1
Movable end, first fixing end of RW1 is connected to ground, and the second fixing end is connected to power supply Vc, and the outfan of comparator is connected to
The adjustment end of converter 104, the purpose of setting comparator 110 is the size adjustment power adjusting circuit according to positive transmission signal
Output.High-frequency power supply circuit also includes comparator 111, and its end of oppisite phase is connected to the reverse transmission signal of directional coupler
Coupled end, in-phase end is connected to the movable end of variable resistance RW2, and first fixing end of RW2 is connected to ground, and the second fixing end is even
It is connected to power supply Vc, the outfan of comparator is connected to the input of echo suppression circuit 113, echo suppression circuit 113
The adjustment end of outfan converter 104, the purpose of setting comparator 111 is the size adjustment Frequency according to positive transmission signal
The output of device.
High-frequency power supply circuit also includes voltage current phase detector 108, and it is used for detecting the letter that directional coupler provides
Number voltage and current phase place, and be supplied to matching network 109, matching network be used for making the output impedance of phase detectors with
The input impedance of particle decomposer 6 is mated, so that output is maximum.
High-frequency power supply circuit also includes power amplifier 112, and its input is connected to phase detectors, and outfan connects to be cut
Change second movable end of switch K.
Although the present invention is with the diameter phase of the pipe diameter of spiral type particle decomposer and spiral type ozone decomposed pipe, serpentine pipe
With as a example be illustrated, but for save space, pipe diameter, serpentine pipe diameter can also be different, such as spiral type ozone
The cylinder decomposing pipe formation is arranged in the cylinder of spiral type particle decomposer formation, can also be arranged on outside cylinder, described cylinder
Body can be cylindrical or cuboid, etc..
For eliminating organic pollutant in the present invention, it is provided with multistage particle decomposer, make the oxygen of in the air become smelly
Oxygen, extends and kills the organic compound of in the air or the time of mushroom and path, but during the concentration over-standard of ozone, ozone
It is then an invisible killer, the respiratory tract of its intense stimulus people, causes laryngopharynx swelling and pain, cough uncomfortable in chest, causes bronchitis and lung qi
Swollen；Cause the neurotoxic of people, dizziness headache, visual deterioration, hypomnesis；Vitamin E in human body skin is played brokenly
Bad act on, the skin causing people is wrinkling, black speck；The immune function of human body, induction lymphocyte chromosome disease also can be destroyed
Become, accelerate old and feeble, cause anemia of pregnant woman to have a deformed child, be therefore provided with ozone decomposed pipe, ozone reduction is oxygen by it, it is to avoid be smelly
The secondary pollution to air for the oxygen.
Above in association with accompanying drawing, the operation principle of the present invention is described in detail.But those of ordinary skill in the art should
Understand, description is only for explaining claims.But protection scope of the present invention is not limited to description.Any familiar
Those skilled in the art in the technical scope that the present invention discloses, the change that can readily occur in or replacement, all should contain
Cover within protection scope of the present invention.Therefore, protection scope of the present invention should be defined by the protection domain of claims.
Claims (5)
1. the high-frequency power supply circuit in a kind of plasma processing apparatus for organic exhaust gas, its high frequency generator, described high frequency
Generator is used for producing the high-frequency signal of setpoint frequency it is characterised in that also including power automatic circuit（104）, its root
Adjust the power of the signal of high frequency generator output according to the size of positive transmission signal.
2. the high-frequency power supply circuit in the plasma processing apparatus for organic exhaust gas according to claim 1, its feature
It is, go back directional coupler（107）, its signal input part is connected to automatic circuit（104）.
3. the high-frequency power supply circuit in the plasma processing apparatus for organic exhaust gas according to claim 2, its feature
It is, directional coupler（107）The coupled output of positive transmission signal adjust automatically is connected to by the first comparison circuit
Circuit（104）.
4. the high-frequency power supply circuit in the plasma processing apparatus for organic exhaust gas according to claim 3, its feature
It is, directional coupler（107）The coupled output of reverse transmission signal adjust automatically is connected to by the second comparison circuit
Circuit（104）.
5. the high-frequency power supply circuit in the plasma processing apparatus for organic exhaust gas according to claim 4, its feature
It is, automatic circuit（104）It is additionally provided with power amplifier and directional coupler between.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610721987.5A CN106422691A (en) | 2016-08-25 | 2016-08-25 | High-frequency power supply circuit used in organic exhaust gas plasma processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610721987.5A CN106422691A (en) | 2016-08-25 | 2016-08-25 | High-frequency power supply circuit used in organic exhaust gas plasma processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106422691A true CN106422691A (en) | 2017-02-22 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610721987.5A Pending CN106422691A (en) | 2016-08-25 | 2016-08-25 | High-frequency power supply circuit used in organic exhaust gas plasma processing device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108302733A (en) * | 2018-01-19 | 2018-07-20 | 河海大学常州校区 | The parameter regulator control system and method for PDM power drives DBD air purifiers |
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| US6449465B1 (en) * | 1999-12-20 | 2002-09-10 | Motorola, Inc. | Method and apparatus for linear amplification of a radio frequency signal |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN108302733B (en) * | 2018-01-19 | 2020-06-05 | 河海大学常州校区 | Parameter regulation and control system and method for DBD air purifier driven by PDM power supply |
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Effective date of abandoning: 20230707 |