CN106415361B - Couple scheme for the scanning lens array equipped with universal joint - Google Patents
Couple scheme for the scanning lens array equipped with universal joint Download PDFInfo
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- CN106415361B CN106415361B CN201580005002.2A CN201580005002A CN106415361B CN 106415361 B CN106415361 B CN 106415361B CN 201580005002 A CN201580005002 A CN 201580005002A CN 106415361 B CN106415361 B CN 106415361B
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- rotating member
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- support element
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
- G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
- G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
- B81B3/004—Angular deflection
- B81B3/0045—Improve properties related to angular swinging, e.g. control resonance frequency
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/10—Scanning systems
- G02B26/101—Scanning systems with both horizontal and vertical deflecting means, e.g. raster or XY scanners
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/04—Optical MEMS
- B81B2201/042—Micromirrors, not used as optical switches
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0145—Flexible holders
- B81B2203/0154—Torsion bars
Abstract
The invention discloses a kind of scanning devices (64,220,230), the scanning device includes substrate (68) and the gimbals (72 around two or more parallel rotating components (102), 232), wherein the substrate is etched to define the array of rotating member.Gimbals are connected to substrate and limit the first rotary shaft by first axle (106,234), which rotates around first rotary shaft relative to substrate.Rotating member is connected to support element and limits corresponding second rotary shaft that is mutually parallel of the rotating member relative to support element by second hinge (74), which is not parallel to first axle.
Description
Technical field
Present invention relates generally to micro mechanical systems, and more particularly to using such system to carry out optical scanner.
Background technology
Various methods well known in the art for optics 3D mappings pass through the optical imagery next life of process object
The 3D profiles on the surface of pairs of elephant.This 3D profiles are also referred to as 3D figures, depth map or depth image, and 3D mappings are also claimed
It is surveyed and drawn for depth.
PCT International Publication WO 2012/020380 (the disclosure of which is herein incorporated by reference) is described for surveying and drawing
The equipment for including lighting module.The module includes being configured as the radiation source of transmitting radiation beam and being configured as selected
Angular range in receive and scanning light beam scanner.Illumination optics are configured as projecting scanned light beam, so as to
Generate the pattern of the point extended on interested region.Image-forming module is configured as capture and is projected onto in interested region
Object on pattern image.Processor is configured as processing image, to construct three-dimensional (3D) figure of object.
U.S. Patent Application Publication 2011/0279648 (the disclosure of which is herein incorporated by reference) describes one kind
The method that 3D for constructing detected object is indicated comprising the 2D images of detected object are captured using camera.This method is also
Include that modulated illuminating bundle is scanned on detected object to irradiate multiple target areas of detected object one at a time, with
And it measures and comes in terms of the modulation of the light of the illuminating bundle of each target area reflection.It is swept using moving lens optical beam scanner
Retouch illuminating bundle, and using photodetector come for the use of measuring modulation.This method further includes based on for each target area institute
In terms of calculating depth in terms of the modulation of measurement, and will be associated with the respective pixel of 2D images in terms of depth.
United States Patent (USP) 8,018,579 (the disclosure of which is herein incorporated by reference) describes a kind of three-dimensional imaging and aobvious
Show system, wherein being detected in imaging volume optically according to its phase shift by measuring the path length of amplitude modulation scanning light beam
User inputs.It is presented about the visual pattern user feedback input by user detected.
United States Patent (USP) 7,952,781 (the disclosure of which is herein incorporated by reference) describes a kind of side of scanning light beam
Method and a kind of method of manufacture MEMS (MEMS) (may be incorporated into scanning device).
U.S. Patent Application Publication 2013/0207970 (the disclosure of which is herein incorporated by reference) describes one kind
Scan depths engine comprising send out the transmitter of the light beam of the pulse comprising light and be configured as in scene predefined
Scanning range in scanning light beam scanner.The scanner may include preparing using MEMS (MEMS) technology micro-
Mirror.Receiver receive from the light of scene reflectivity and generation be used to indicate the pulse for travelling to and fro between the point in scene transition time it is defeated
Go out.Processor is coupled to control scanner and handle the output of receiver, to generate the 3D figures of scene.
Another transition time scanner using MEMS technology is by Fraunhofer Institute for Photonic
Lamda scanner modules prepared by Microsystems (IPMS) (Dresden, Germany).The Lamda modules be based on by
Same scan mirror element composition segmented MEMS scanner equipments and construct.The single scanning mirror of calibrated transmitting light beam
It is parallel to the segmented scanning mirror device of receiver optical device and vibrates.
Invention content
Invention described below embodiment provides modified scanning device, and carries out 3D using this equipment
The apparatus and method for of mapping.
Therefore, an embodiment according to the present invention, provides a kind of scanning device including substrate, which is eclipsed
It carves to limit the array of two or more parallel rotating components and around the gimbals of rotating member.First axle will be universal
Holder is connected to substrate and limits the first rotary shaft, which rotates around first rotary shaft relative to substrate.The
Two hinge rotating member is connected to gimbals and limit rotating member relative to gimbals corresponding second mutually
Parallel rotary shaft, corresponding second rotary shaft being mutually parallel are not parallel to the first rotary shaft.
In some embodiments, which, which is configured as utilizing, is enough to make rotating member around corresponding second axis
Two or more parallel rotating components are coupled together by the synchronous coupling intensity of oscillation.In general, rotating member, universal branch
Frame and hinge are etched to define the pattern of the oscillation with quality factor q, and the quality factor q and coupling intensity γ meet pass
System：1/Q < < | γ | < < 1, wherein the pattern vibrated is defined such that γ>0, and rotating member surrounds corresponding second axis
With mutually rotation.
In addition to this or alternatively, which includes coupling device, which is connected to rotating member to make rotation
Turn component to synchronize around the oscillation of corresponding second axis.In one embodiment, which is configured as by rotating
Apply electromagnetic force between component to make the oscillation of rotating member synchronize.The coupling device may include being fixed to rotating member forever
Magnet.In another embodiment, which includes belt, and the belt is from substrate etch and with being attached respectively to revolve
The first end and the second end for turning the first rotating member and the second rotating member in component, to make rotating member surround phase
The oscillation of the second axis is answered to synchronize.
In disclosed embodiments of the present invention, which includes plate, and the equipment includes being applied in plate
On substrate reflectance coating, thus the plate serve as micro mirror.
In general, substrate is a part for Silicon Wafer.
In some embodiments, which includes electromagnetic driver, which is coupled to drive universal branch
Frame and rotating member surround first axle respectively and the second axis rotates.
An embodiment according to the present invention, provides a kind of scanning device, which includes substrate, the substrate
Array, the support element around rotating member for being etched to define two or more parallel rotating components, and structure will be rotated
Part is connected to the respective hinge of support element, to limit respective parallel rotary shaft of the rotating member relative to support element.Coupling dress
It sets and is connected to rotating member, to make rotating member be synchronized around the oscillation of corresponding axis.
In one embodiment, which includes belt, and the belt is from substrate etch and with being attached respectively to
The first end and the second end of the first rotating member and the second rotating member in rotating member.
In another embodiment, which is configured as making by applying electromagnetic force between rotating member
The oscillation of rotating member synchronizes.The coupling device may include the permanent magnet for being fixed to rotating member.
The coupler member can be configured such that rotating member in-phase oscillation so that rotating member has phase in the duration of oscillation
Same angle is orientated, or so that rotating member anti-phase oscillations.
An embodiment according to the present invention additionally provides a kind of method for manufacturing scanning device.This method packet
Include etching substrate so as to limit two or more parallel rotating components array, around the rotating member support element and
Rotating member is connected to the corresponding hinge of support element, to limit respective parallel rotation of the rotating member relative to support element
Axis.Apply coupling power to rotating member, to make rotating member be synchronized around the oscillation of corresponding axis.
An embodiment according to the present invention additionally provides a kind of method for manufacturing scanning device.This method packet
Include etching substrate, so as to limit two or more parallel rotating components array, around the rotating member gimbals, with
And first axle, the first axle by gimbals be connected to substrate and limit the first rotary shaft, gimbals around this first
Rotary shaft is rotated relative to substrate.Second hinge is etched, which is connected to gimbals by rotating member and limits
Corresponding second rotary shaft that is mutually parallel of the rotating member relative to gimbals, corresponding second rotation being mutually parallel
Axis is not parallel to the first rotary shaft.
An embodiment according to the present invention, additionally provides a kind of method for scanning, and this method includes providing base
Plate, the substrate are etched to define the array of two or more parallel micro mirrors and the gimbals around the micro mirror.Driving
Micro mirror is rotated with surrounding respective parallel first rotary shaft relative to gimbals, while driving gimbals to surround the second axis phase
Substrate is rotated.Apply coupling power to micro mirror, to make micro mirror be synchronized around the oscillation of corresponding axis.In micro mirror and gimbals
While rotation, light beam is guided to micro mirror array, so that micro mirror scans the light beam in scene.
In disclosed embodiments of the present invention, guiding light beam includes the pulse of light being guided towards micro mirror array, and be somebody's turn to do
Method includes receiving the light from scene reflectivity by the reflection from micro mirror array, and generate to be used to indicate and travel to and fro between the scene
In point pulse transition time output.Output is handled during light beam scans, to generate the graphics of scene.
In some embodiments, substrate is etched to define corresponding first axle, which connects micro mirror
Gimbals are connected to, to limit respective parallel first rotary shaft of the micro mirror relative to gimbals.One or more flexibility couplings
Connection member is connected to micro mirror, to make micro mirror be synchronized around the oscillation of corresponding first axle, and second hinge along the second axis by ten thousand
It is connected to substrate to holder.
In disclosed embodiments of the present invention, it includes applying electric current to electromagnetic driver to drive the mirror, which drives
Dynamic device is couple to micro mirror array to make micro mirror be rotated around first axle with first frequency, which is the resonance frequency of rotation
Rate, while gimbals being made to be rotated around the second axis with second frequency, which is less than first frequency.
In one embodiment, apply coupling power include etch substrate with limit one between being connected micro mirror or
Multiple flexibility coupler members.In another embodiment, it includes so that electromagnetic force is applied between micro mirror to apply coupling power.
In addition to this or alternatively, which is etched so that gimbals and is applied to micro mirror with being enough the coupling intensity for making oscillation synchronize
Couple power.
An embodiment according to the present invention, additionally provides a kind of scanning device, which includes substrate, the base
Plate be etched to define two or more parallel rotating components array, around rotating member support element and will rotation
Component is connected to the respective hinge of support element, to limit respective parallel rotary shaft of the rotating member relative to support element.Coupling
Device is connected to rotating member and is configured as applying electromagnetic force between rotating member to make rotating member around corresponding
The oscillation of axis synchronizes.
In one embodiment, which includes the permanent magnet for being fixed to rotating member.
The present invention will be more fully understood to the detailed description of embodiment of the present invention from below in conjunction with attached drawing, attached
In figure：
Description of the drawings
Fig. 1 is the schematic illustration for the optical scanning head for showing embodiment according to the present invention；
Fig. 2 is the schematic illustration for the MEMS scanners for showing embodiment according to the present invention；
Fig. 3 is the schematic rear view of the micro mirror array equipped with universal joint of embodiment according to the present invention；
Fig. 4 is the schematic, detailed for the micro mirror array element for showing Fig. 3；
Fig. 5 is the front schematic view in the micro mirror array work of Fig. 3；
Fig. 6 is the signal of the operation principle for the micro mirror array equipped with universal joint for showing embodiment according to the present invention
Figure；
Fig. 7 is the schematic rear view of the optionally micro mirror array equipped with universal joint of embodiment according to the present invention；
Fig. 8 is the schematic front of the micro mirror array equipped with universal joint of another embodiment according to the present invention
Figure.
Specific implementation mode
Above-mentioned U.S. Patent Application Publication 2013/0207970 describes next life transition time by measuring scanning light beam
At the depth engine of 3D surveying and mapping datas.Optical transmitting set such as laser guides short light pulse towards scanning mirror, which is feeling
Scanning light beam in the scene of interest.Such as sensitive high-speed photodiode (for example, avalanche photodide) of receiver receives warp
The light returned from scene by same scanning mirror.Processing circuit measures the light emitted at each point in a scan and is received
Obtain the time delay between light pulse.The delay indicates the distance that light beam is advanced, to indicate the depth of the object at the point.Place
Reason circuit uses the depth data so extracted when the 3D for generating scene schemes.
In order to realize compactedness, low cost and low-power consumption, MEMS technology can be used to produce sweeping in this scanning system
Retouch mirror (may be by the various technologies described in above-mentioned United States Patent (USP) 7,952,781).In order to enhance the sensitivity of system, favorably
, mirror is as big as possible (usually to be had in 5mm2-25mm2Active region in range).Meanwhile in order to carry out 3D mappings and
Other scanning applications, it is desirable to which mirror (being usually ± 10 ° -25 °) in wide-angle is surrounded extremely with high frequency (being usually 2kHz-25kHz)
A few axis carries out mechanical scanning.(around the second scan axis scanning range can bigger, but scan frequency is usually lower.) to height
The demand of scan frequency and range conflicts with needing for mirror size is increased, and in material (such as silicon wafer of manufacture scanner
Circle) it is conditional in the case of, manufacture desired size, range and frequency capabilities single scanning mirror may be infeasible.
Some embodiments described herein seek to overcome these design constraints by using the array of multiple adjacent mirrors.Mirror
It is scanned with being mutually in step, to behavior optically as they are the single mirrors for the size that size is equal to entire array
Equally.Term " synchronization " in a conventional sense be used for this described and claimed, with indicate mirror under identical frequency consistently into
Row scanning.In general, the phase and amplitude of scarnning mirror is also identical.Certainly, perfect absolute synchronization is in the mechanical system of reality
It cannot achieve.Therefore, it should be appreciated by those skilled in the art that statement mirror using identical frequency, amplitude and/or phase into
Row scanning means that any difference between its corresponding oscillation is less than the child's hair twisted in a knot-childhood tolerance that array is used for system therein.
In some embodiments, the coupling device between the mirror in array couples the oscillation of mirror, to keep
Synchronization between them.The coupling device may include the connector of any suitable type, mechanical couplings between such as mirror or
The connector that electromagnetic force is applied, the connector can not have to work in the case of Mechanical Contact between mirror.As long as in general, coupling
It is just enough to generate required synchronization that device applies weak coupling power, especially in driving mirror with its rotary harmonic frequency or approximation
In the case that rotary harmonic frequency is scanned.In addition, if the mirror in array is individually driven, then be adjusted be applied to it is each
The relative amplitude and phase of the respective drive signal of mirror, so as to any difference in the amplitude and phase of compensating glass rotation.
Alternatively, a mirror can be used to reflect and scan transmitting light beam, and another mirror (or two in bigger array or
More mirrors) reflect the light received from the scene towards receiver.In this way, independent transmitting mirror can be made synchronous with mirror is received, example
Such as it is the U.S. Patent application 14/554 submitted on November 26th, 2014, described in 086, the disclosure of which is with the side of reference
Formula is incorporated herein.
In following embodiments, by mirror simultaneously in the support element, the support element is from substrate identical with mirror itself
(such as semiconductor wafer) etching.The support element itself can be configured as rotation gimbals.The gimbals usually by
The substrate that is hingedly attached to of the first rotary shaft is limited, wherein holder is rotated around first rotary shaft relative to substrate.The mirror by
Second hinge is connected to gimbals (or other support elements), which limits corresponding second of mirror relative to gimbals
The rotary shaft being mutually parallel.In general, second axis is perpendicular to (or otherwise non-parallel to) first axle.Thus, for example can
The miniature lens array equipped with universal joint is prepared in MEMS technology.This array structure equipped with universal joint can not only be answered
For mirror, but also it can be applied to other kinds of rotating member, such as micromechanics rotating element.
In some disclosed embodiments of the present invention, which, which itself is configured as utilizing, is enough to make mirror to surround phase
Two or more parallel rotating components are coupled together by the coupling intensity for answering the oscillation of axis synchronous.For this purpose, in these realities
It applies in scheme, support element is usually designed to there is enough flexibilities and mechanical property appropriate, to realize desired synchronization
Degree.For example, the mechanical property of support element may be selected using quality factor and to be up to enough to generate the expectation of rotating member
The coupling intensity of synchronization limit system oscillation pattern and resonant frequency.The specific of such gimbals is described in detail below
Attribute and design standard.
In most of embodiments shown in figure, synchronous lens array includes push-push operation and is installed in equipped with ten thousand
To on the base portion of connector for two micro mirrors of two axis scannings of progress.(only indicate very small using term " micro mirror " herein
Mirror is typically not greater than several millimeters, although certain principles of the present invention can be applied to the mirror of bigger.) alternatively, this mirror
Array may include greater amount of mirror, and can be deployed with or not dispose gimbals.Alternatively or except this it
Outside, the synchronization of other forms can be realized by the appropriately designed of mirror and the coupling between them, the reverse phase of mirror in such as array
Rotation.
Consider for clarity and integrality, although embodiment described below is specifically related to micro mirror, these implementations
The principle of scheme can be subject to it is necessary change be applied similarly to prepare and configure according to these principles it is other kinds of micro-
Mechanical rotating member.In disclosed embodiments of the present invention, these rotating members have the form from the plate of substrate etch,
Reflectance coating is coated on the substrate to form micro mirror.However, being synchronized with other shapes using the techniques described herein
It is also within the scope of the invention with the rotating member of form.
What Fig. 1 schematically showed embodiment according to the present invention includes the micro mirror array 100 equipped with universal joint
Optical scanning head 40 element.Other than micro mirror array itself, optical scanning head 40 is similar to above-mentioned U.S. Patent application
Optical scanning head described in 2013/0207970 is disclosed.Transmitter 44 emits light pulse towards polarization beam apparatus 60.In general, beam splitting
The zonule immediately below the light path of transmitter 44 in device is applied for reflecting, and the rest part of beam splitter is being sent out
(or even for it with anti-reflection coating) fully transparent in wave-length coverage is penetrated, to allow returned light to pass through, to reach
Receiver 48.Light from transmitter 44 is reflected from beam splitter 60, then from folding mirror 62 towards micro mirror array 100
Reflection.MEMS scanners 64 are with desired scan frequency and amplitude scanning micro-mirror array in the x-direction and the z-direction.With figure below
In show the details of micro mirror array and scanner.
From the optical pulse strikes to micro mirror array 100 that scene returns, the micro mirror array is logical via folding mirror 62
Cross 60 reflected light of beam splitter.It, can in receiver path in order to limit the amount for the unnecessary ambient light for reaching receiver 48
Bandpass filter (not shown) can be combined on substrate identical with beam splitter 60.Receiver 48 senses returned light pulse simultaneously
Generate corresponding electric pulse.Controller 30 drives transmitter 44 and scanner 64, and analyzes transmitting pulse and come from receiver 48
Respective pulses between time delay, to measure the transition time of each pulse.Based on the transition time, controller calculates
The depth coordinate that each of scanning of scanned head 40 in scene is put, to generate the depth map of scene.
In order to improve the sensitivity of detection, the gross area in 48 aperture of beam splitter 60 and receiver is noticeably greater than the face of transmitting beam
Product.It is also desirable that the micro mirror in micro mirror array 100 is as big as possible in the inertial confinement applied by scanner.For example, each micro mirror
Area about can be 5mm2-15mm2, and the gross area of micro mirror array about can be 10mm2-30mm2。
Specific mechanical and the optical design of optical head shown in Fig. 1, and implementation of class are described by way of example herein
It is considered as within the scope of the present invention like the alternate design of principle.As previously mentioned, in some alternative designs, in array 100
Different micro mirrors can be used for emitting and receive.
Fig. 2 is the schematic illustration for the MEMS scanners 64 for showing embodiment according to the present invention.It is above-mentioned to be similar to
United States Patent (USP) 7,952, principle manufactures and operates this scanner those of described in 781, but enables the two dimension of micro mirror array 100
Scanning.By suitably etching semiconductor substrate 68 to separate the micro mirror 102 in array from support element 72 and from remaining of substrate 68
Part separates support element to manufacture micro mirror array.After the etching, micro mirror 102 (being coated with reflectance coating appropriate on it) can
Rotated in the Y direction relative to the support element 72 on hinge 106, and support element 72 relative to the substrate 68 on hinge 74 in the side X
It rotates up, which is couple to the wing 104 of support element 72.(such hinge may be additionally referred to as main shaft or pivot.)
In the case where support element 72 itself can such as rotate in the above described manner, support element is also referred to as universal branch
Frame.However, the term " support element " and " gimbals " used in this described and claimed are not fully interchangeable：
The real various aspects for applying scheme described herein can be applied to the array of rotating element, be such as installed in non-rotating support element
In micro mirror 102.Other aspects of embodiment of the present invention can be applied to the rotating element array equipped with universal joint,
At least some of element of middle gimbals itself or gimbals is not necessarily from substrate etch identical with rotating element.
Micro mirror 102 and support element 72 are installed on a pair of of rotor 76 including permanent magnet.(in this figure in rotor only
One rotor is visible.) rotor 76 is suspended in the corresponding air gap of magnetic core 78.Magnetic core 78 is twined using the corresponding coil 80 of conductor wire
Around to generate electromagnetic stator component.Although each magnetic core, which for simplicity, is shown in FIG. 2, has single coil, can
Two or more coils are alternatively wound on each magnetic core；Coil can be wrapped at the different location on magnetic core；And
Different core shapes also can be used.For example, the PCT Patent Application PCT/IB2013/056101 submitted on July 25th, 2013
In show alternative magnetic core and coil design, be herein incorporated by reference.
It driving current through coil 80 and generates magnetic field in air gap, the magnetic field and the magnetization of rotor 76 interact, to
So that rotor is rotated in air gap or is otherwise moved.Specifically, using high frequency differential electric current come driving coil 80, thus
Micro mirror 46 is caused to be rotated toward complex resonance around hinge 70 with high frequency (as described above, usually in the range of 2kHz-25kHz).This
Kind resonance rotation generates the high speed Y-direction raster scanning of the output bundle from engine 22.Meanwhile line is driven with lower frequency simultaneously
Circle 80 by surrounding hinge 74 by desired scanning range rotary support member 72 to drive X-direction to scan.Alternatively, it can incite somebody to action
Other stator arrangements and drive scheme for these purposes, such as such as institute in above-mentioned PCT Patent Application PCT/IB2013/056101
It states.X rotates and Y rotations generate the overall grating scan pattern of micro mirror 46 together.
As shown in Figure 1, it needs accurately to be aligned from discrete optically and mechanically component assembling optical head 40, and can
It can somewhat expensive.In alternative embodiment, it can be combined in the single integration packaging on silicon optical bench (SiOB) and need essence
All parts (such as optical transmitting set, receiver and associated optical device) really placed and be aligned.This method can save
Cost and depth engine may make to be more easily handled.The various alternate designs of these types are in above-mentioned U.S. Patent Application Publication
It is shown in 2013/0207970, and is also adjustable to and is used together with micro mirror array.
In addition to this or alternatively, as described above, the optical head can be configured with independent transmission channel and receiving channel,
Such as described in above-mentioned U.S. Patent application 14/554,086.In this case, a micro mirror 102 can be used reflecting and
The light beam output of transmitter 44 is scanned, and another micro mirror (or two or more micro mirrors in bigger array) reflection connects from direction
Receive the light that the scene of device 48 is received.
The principle of the present invention can be subject to it is necessary change other kinds of scanner (including be based on other MEMS designs and
The scanner of other kinds of driver) in be similarly implemented.For example, Hah et al. can be changed in " Theory and
Experiments of Angular Vertical Comb-Drive Actuators for Scanning
Micromirrors”(IEEE Journal of Selected Topics in Quantum Electronics 10:3
(in May, 2004/June), 505-513 pages) described in micro mirror and actuator, to work in the context of micro mirror array.
Fig. 3 is the schematic rear view of the micro mirror array 100 equipped with universal joint of embodiment according to the present invention.Figure
Array 100 shown in 3 is different from Fig. 1 and micro mirror array shown in Fig. 2 in shape and some details being orientated, but its yuan
Part is identical with operation principle.As previously mentioned, array 100 includes two parallel micro mirrors 102, which passes through phase
The hinge 106 answered is connected to support element 72.Magnet rotor 76 is attached to the wing 104 of support element 72, which is coupled by hinge 74
To substrate 68 and perpendicular to hinge 106.At work, rotor 76 is suspended in the air gap of magnetic core 78, as shown in Figure 2 and as above
Described in text.By the coupling device of the flexible coupler member including 108 form of belt by mirror 102 it is mechanically to each other link, such as will
It is described below.
Fig. 4 is the amplification detailed view of the micro mirror 102 for the details for showing a belt in belt 108.With from substrate
68 etch separates mirrors and its identical photoetching process of hinge produce this belt.Therefore belt 108 includes typically about 10 μ
M-100 μm wide of thin silicon item, the thin silicon item from the support element 72 on side and from the micro mirror 102 on the other side by being etched through
The groove of substrate separates.The thickness of belt can be the full-thickness of chip (i.e. perpendicular to the dimension of wafer surface).It is alternative
Belt 108 can be thinned to change belt coupling stiffness and realize the bending in addition to torsional mode shown in Fig. 5 of belt in ground
Pattern and broadening pattern.Every one end of belt 108 is connected to the corresponding micro mirror in micro mirror.Optionally, it can be pivoted at center
Belt is anchored to support element 72 at point 110.
In embodiment shown in figures 4 and 5, belt 108 on the direction of hinge 106 micro mirror 102 it
Between extend straight.In other embodiments, belt and other coupling devices can be attached at difference, and/or opposite
Extend on the different directions of micro mirror and hinge.For example, the end of belt is attached to hinge itself, rather than it is attached to such as Fig. 4
Shown in micro mirror.In addition to this or alternatively, which becomes in the space with S configurations or X configurations between micro mirror and extends.
Although not being shown specifically these alternative configurations in the accompanying drawings, after the specific implementation mode for reading the present invention, they are to this
It will be apparent and be considered as within the scope of the invention for the technical staff in field.
Fig. 5 is the schematic diagram of the array 100 in the work pushed by MEMS scanners as described above.The MEMS scanners
Two micro mirrors 102 are driven, rotate (as defined in Fig. 2) around X-axis in simultaneously.It will by the elastic force that belt 108 applies
The movement of two micro mirrors is couple to together so that their in-phase synchronizations are rotated and are orientated (such as at duration of oscillation angle having the same
It is upper described, within the scope of the limitation of system tolerance).Even if being enough to maintain mechanical lock if the actual power very little applied by belt
Phase, to make to have two adjacent vibration generators (i.e. micro mirror) of roughly the same resonant frequency synchronous.Therefore, the optics row of array 100
For as be both wherein size be equal to the assembled dimension of two micro mirrors 102 together single oscillation mirror.
Physically, hinge 106 serves as torsionspring, and belt 108 adds third spring to system, thus will be big
The micro mirror 102 of amount is couple to together.In the case where making a large amount of micro mirrors couple via the third spring, in fact it could happen that two kinds of movements
Pattern：One is a large amount of micro mirrors to move in the same direction, and another kind is that a large amount of micro mirrors move in the opposite direction.(with
The individual frequency of two mirrors when component is not coupled on the contrary, each pattern has the frequency of its own shared by two mirrors.) can
The rigidity of third spring is adjusted, even up to belt 108 is the point of basic spring, to apply the power than 106 bigger of pivot.
Fig. 6 is the operation principle for the micro mirror array 200 equipped with universal joint for showing embodiment according to the present invention
Schematic diagram.The figure shows how above-mentioned principle can be expanded to three micro mirrors 202,204,206 (be labeled as M1, M2 and M3) or
The array of more micro mirrors.Mirror M1, M2 and the M3B for being represented as spring K3, K4, K5 are installed in 208 (such as mentioned kind of pivot
Hinge) on.As described above, mirror M1, M2 and M3 or spring K3, K4 and K5 (or both) by being represented as the coupling of spring K1 and K2
Connection device 210 links.This arrangement can be used, the rotation of three mirrors is made in a manner of identical with the embodiment of above-mentioned two mirror
It is synchronous.Three (or more) mirror similarly can together be installed on the support element equipped with universal joint.
No matter array includes two, three or more mirrors, spring can be embodied as to the pivot of type shown in prior figures
Axis and belt, or use the other kinds of coupling device that can pass through any applicable technology manufacture well known in the prior art.This
Class coupling device may include such as flexible mechanical element, elastic mechanical element, such as portion of belt 108 or gimbals itself
Part.Alternatively or in addition to this, which may include electromagnetic component.
Fig. 7 is the schematic rear of the optionally micro mirror array 220 equipped with universal joint of embodiment according to the present invention
Figure.In the above-described embodiment, array 220 can be used instead of array 100.Before the mechanical organ of the array 220 is similar to
Mechanical organ in embodiment, and these component labellings have the identical label with preceding attached drawing.
However, in the array 220, compared in preceding embodiment, the coupling device between micro mirror 102 by applying electricity
Magnetic force and work.For this purpose, the coupling device includes the permanent magnet 222 fixed to micro mirror 102, but alternatively, other electrical equipments
And/or magnetic element can also be used for this purpose.Electromagnetic force between magnet 222 makes the oscillation of rotational micromirror 102 synchronize.This power can
It include the magnetic pull to work in a manner of similar to the mechanical elastic applied by belt 108.Magnetic pull generation can be considered as
It is equivalent to the power of the spring between being connected to micro mirror.
The magnetic force between micro mirror 102 can be adjusted by the appropriately designed of array 220, to assign desired synchronous belong to
Property.This power depend on include magnet 222 size and polarity and the factors such as distance between them.In addition, between magnet 222
Power by by distance of these magnets away from magnet rotor 76 and magnetic core 78 and they with magnet rotor 76 and magnetic core 78 and component
The interactions of other mangneto active elements (driving current for being such as applied in magnetic core) adjust.
It (is not shown in the accompanying drawings) in other embodiments, the coupling device to work between micro mirror in an array can be applied
Add other kinds of electromagnetic force so that micro mirror synchronizes.In this context, term " electromagnetic force " uses in a broad sense, which exists
Any power from electromagnetic field is understood as to refer in physics.Therefore, in addition to the gravitation and/or repulsion between permanent magnet,
The induced magnetism between electromagnetic force or current-carrying conductor between such as electrical body also can be used in the coupling device.All these replacements
Specific implementation is considered as within the scope of the invention.
Fig. 8 be the micro mirror array 230 equipped with universal joint of another embodiment according to the present invention it is schematic before
View.In the above-described embodiment, array 230 can equally be used instead of array 100.Being similar to for array 230 is implemented before
Mechanical organ in scheme is marked with the identical label with preceding attached drawing.
Micro mirror 102 in array 230 is connected to gimbals 232 by hinge 234, which limits the rotation of micro mirror
Axis.Gimbals 232 include crossbeam 236, and the both ends of hinge 234 are connected to the crossbeam.What it is to gimbals 232 includes crossbeam
236 structure is selected so that flexible, elasticity gimbals itself are to be enough the oscillation for making them surround corresponding rotary shaft
The movement of micro mirror 102 is coupled together by synchronous coupling intensity.The component of simultaneously etched array 230 is designed to limit array
The mode of resonance of total oscillation body of 230 (while including gimbals 232 and mirror 102) is up to enough to make mirror with humorous to have
The quality factor q that vibration frequency synchronously rotates.
It is only the type for providing the flexible gimbals structure for it is expected coupling that crossbeam 236, which is attached in gimbals 234,
An example will be to one skilled in the art with the other structures of like attribute upon reading this disclosure
Obviously.It can be used for optimization array in tool well known in the prior art and the technology such as finite element analysis of MEMS design
230 feature structure is to reach target oscillation frequency and amplitude.
When designing array 230 of the MEMS system such as with N number of micro mirror 102, each micro mirror is considered as oscillator i, should
Oscillator has the resonance frequency omega of its own around the oscillation of its hingei0And quality factor qi.In general,
Wherein KiFor the mechanical stiffness of hinge, and JiFor the moment of inertia of micro mirror.Each oscillator (micro mirror) is mechanically set
Although counting into resonant frequency close to each other and with same magnitude and phase place-due to manufacturing tolerance, each resonant frequency
Between be almost constantly present certain difference.
Each oscillator i couples constant r by machineryijIt is coupled to each other oscillators j, machinery coupling constant can be
Positive value or negative value.Some such systems can utilize rij=1 designs, and in this case oscillator will be with identical width
Degree, frequency and phase are fully synchronized.However, such design may be difficult reality in the MEMS micromirror array of type described herein
Now or it cannot achieve.Therefore, in order to keep low inertia and support with the oscillation of each resonant frequency of micro mirror in this array,
Weak coupling is used in some embodiments, i.e., | γij| < < 1.
This system of pine coupling oscillator will have system resonance frequencies ω0, it is given by the following formula：
With overall qualities factor Q, it is given by the following formula：
In order to all micro mirrors it is seriously damp in the case of with system resonance frequencies ω0It reliably vibrates jointly, altogether
Have mode of resonance overall Q factor must be between sufficiently high and micro mirror coupling must be sufficiently strong to overcome each resonant frequency
ωi0With system frequency ω0Between difference.Q factor and coupling intensity be also sufficiently high with will desired shared mode of resonance and
Other systems pattern separates, and otherwise may have ghost effect.
Above-mentioned condition can be indicated by following relationship, and each micro mirror i is met：
Wherein | γi|=max | γij|, j=1, N }.For two micro mirrors array the case where, such as in array 230,
The relationship becomes：
Wherein Δ ω12=ω10-ω20For the difference between each eigenfrequency of two micro mirrors, and γ ≡ γ12.?
In this case, γ is selected to cause two micro mirrors to surround their axis corresponding to the static torque for being applied to a micro mirror for positive value
With mutually rotation so that the pattern that rotational micromirror is orientated at duration of oscillation angle having the same.When γ is negative value, it is applied in one
The static torque of a micro mirror leads to another micro mirror rotate in the opposite direction, i.e., micro mirror reverse phase rotates.
Necessary conditionIt can relax to share the damping of oscillation mode as cost so that the mould
Formula is wide to being enough to overcome frequency separation Δ ω12.In this case, system resonance carries out amount of decrease, wherein q=by coefficient Q/q
ω0/Δω12, it means that more external energies are needed to keep given oscillation amplitude.
Although above mainly describing micro mirror array 100,220 and 230 in the context that optical head 40 and 3D are surveyed and drawn
Operation, but substantially any application of the compact high-frequency resonant scanner of needs can be directed to come the class in other kinds of optical scanner
As apply these arrays principle.Such scanner can be driven by magnetic means, as in the embodiment above, or
Person uses the driving mechanism of any other appropriate type well known in the prior art, such as including various magnetic drives and electrostatic
Driver.In addition, as described above, can couple and drive the mirror so that when being rotated with identical frequency, mirror is in its respective scanned phase
Between be orientated with different angle.The latter operation mode may be useful in synchronous multi beam scanning system.Although
Rotating member in array 100,220 and 230 is coated to serve as mirror, but the necessary part of such coating and non-present invention,
And the principles described herein can analogously be applied to the array that rotating member is formed for other purposes.
It will thus be appreciated that the embodiment above is quoted by way of example, and the present invention is not limited to above
The content for specifically illustrating and describing.On the contrary, the scope of the present invention includes the technology of various features and this field described above
The group of its variations and modification without disclosed in the prior art that personnel will recognize that after reading the above description
Conjunction and sub-portfolio.
Claims (10)
1. a kind of scanning device, including：
Substrate, the substrate are etched to define：
The array of two or more parallel rotating components；
Around the support element of the rotating member；With
The rotating member is connected to the support element by respective hinge, the respective hinge, to limit the rotating member
Respective parallel rotary shaft relative to the support element；With
Permanent magnet, the electromagnetism that the permanent magnet is fixed to the rotating member and is configured so that between the permanent magnet
Power makes the rotating member be synchronized around the oscillation of corresponding axis.
2. equipment according to claim 1, wherein the electromagnetic force for keeping the oscillation synchronous is described including being fixed to
Magnetic pull between the permanent magnet of rotating member.
3. equipment according to claim 1, wherein the permanent magnet is configured such that the rotating member in-phase oscillation,
So that the rotating member is orientated at duration of oscillation angle having the same.
4. equipment according to claim 1, wherein the permanent magnet is configured such that the rotating member anti-phase oscillations.
5. equipment according to any one of claim 1-3, wherein the rotating member includes plate, and the equipment packet
The reflectance coating for being applied in the substrate over the plates is included, thus the plate serves as micro mirror.
6. equipment according to any one of claim 1-3, wherein the substrate is a part for Silicon Wafer.
7. equipment according to any one of claim 1-3 further includes electromagnetic driver, the electromagnetic driver is coupled to
To drive the rotating member to be vibrated around respective parallel axis.
8. a kind of method for manufacturing scanning device, the method includes：
Substrate is etched to limit：
The array of two or more parallel rotating components；
Around the support element of the rotating member；With
The rotating member is connected to the support element by respective hinge, the respective hinge, to limit the rotating member
Respective parallel rotary shaft relative to the support element；With
Permanent magnet is fixed to the rotating member so that the electromagnetic force between the permanent magnet makes the rotating member surround phase
The oscillation of axis is answered to synchronize.
9. according to the method described in claim 8, the wherein described substrate is a part for Silicon Wafer.
10. according to the method described in claim 8, the electromagnetic force for wherein making the oscillation synchronous is described including being fixed to
Magnetic pull between the permanent magnet of rotating member.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461929071P | 2014-01-19 | 2014-01-19 | |
| US61/929,071 | 2014-01-19 | ||
| PCT/US2015/011883 WO2015109273A2 (en) | 2014-01-19 | 2015-01-18 | Coupling schemes for gimbaled scanning mirror arrays |
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| CN106415361B true CN106415361B (en) | 2018-11-13 |
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| US9703096B2 (en) * | 2015-09-30 | 2017-07-11 | Apple Inc. | Asymmetric MEMS mirror assembly |
| US9869858B2 (en) | 2015-12-01 | 2018-01-16 | Apple Inc. | Electrical tuning of resonant scanning |
| US11181734B2 (en) * | 2018-12-18 | 2021-11-23 | Beijing Voyager Technology Co., Ltd. | Micromachined mirror assembly having micro mirror array and hybrid driving method thereof |
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| WO2015109273A2 (en) | 2015-07-23 |
| WO2015109273A3 (en) | 2015-09-24 |
| CN106415361A (en) | 2017-02-15 |
| WO2015109273A4 (en) | 2015-10-22 |
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