CN106406036A - Exposure device - Google Patents
Exposure device Download PDFInfo
- Publication number
- CN106406036A CN106406036A CN201611184425.8A CN201611184425A CN106406036A CN 106406036 A CN106406036 A CN 106406036A CN 201611184425 A CN201611184425 A CN 201611184425A CN 106406036 A CN106406036 A CN 106406036A
- Authority
- CN
- China
- Prior art keywords
- exposure
- light source
- para
- frozen water
- roller shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Sampling And Sample Adjustment (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention discloses an exposure device. An exposure assembly comprises a position adjusting mechanism, an attraction platform and an exposure template fixing platform. The attraction platform is fixedly installed in an installation square hole. The exposure template fixing platform is arranged on the position adjusting mechanism, and a feeding mechanism and a discharging mechanism are symmetrically arranged on the rear side and the front side of the exposure assembly respectively. An installation machine cover covers outside an installation rack, and a light inlet is formed in the installation machine cover and above the exposure template fixing platform. A light source generator is installed on a light source base, a light transmission frame is installed on the light source base, a first mirror is installed on the light transmission frame and located above the light source generator, the light transmission frame extends to the upper portion of the light inlet, a second mirror is installed on the light transmission frame and right faces to the light inlet, and the light source machine cover covers outside the light source base and the light transmission frame. the exposure device can input and output films automatically, exposure is automatically finished, and production efficiency is greatly improved.
Description
Technical field
The present invention relates to exposure instrument field, more particularly, to a kind of exposure sources.
Background technology
Current film exposure is general to be passed through manually the film to be installed in exposure stage, then by light source irradiation exposure
Light, passes through artificial taking-up again after exposure, production efficiency is low.
Content of the invention
It is an object of the invention to provide a kind of can automatically enter, export the film and be automatically performed the exposure sources of exposure,
Thus improve production efficiency.
To achieve these goals, the technical scheme is that：A kind of exposure sources are provided, including exposure, module are installed
And light source module, described exposure installs module and includes installing hood, installation frame and be installed on described installation frame
Feeding mechanism, discharging mechanism, exposure components and control panel, described exposure components include position adjusting mechanism, absorption platform
And exposing template fixed platform, the middle part of described exposure template fixed platform offers installation square hole, and described absorption platform is solid
Dingan County is loaded in described installation square hole, described absorption platform offers some adsorption holes, described absorption platform is in described installation
The surrounding of square hole is provided with template fixing tool, and described exposure template fixed platform is placed on described position adjusting mechanism, institute
State position adjusting mechanism for adjusting horizontal level, upright position and the anglec of rotation position of described exposure template fixed platform
Put, described feeding mechanism and discharging mechanism structure are identical, be symmetrically placed in rear side and the front side of described exposure components；Described fitting machine
Cover at outside described installation frame, the top that described fitting machine covers in described exposure template fixed platform offers entering light
Hole；Described light source module includes light source hood, light source base, light transfer frame, light source generator, the first reflecting mirror and second
Reflecting mirror, described light source generator is installed on described light source base, and described light transfer frame is installed on described light source base
Top, described first reflecting mirror is installed on described light transfer frame and is located at the top of described light source generator, described light
Transfer frame extends to the top of described light well, and described second reflecting mirror is installed on described light transfer frame, and described second
Just to described light well, described light source hood covers at outside described light source base and described light transfer frame reflecting mirror.
Described feeding mechanism or discharging mechanism include support, some roller shaft assemblies, roller shaft drive mechanism, lifter plate
And lift drive mechanism, described roller shaft assembly includes roller shaft, both ends are taken turns and intermediate transport wheel, end wheel described in two
It is connected to the two ends of described roller shaft, described intermediate transport wheel is admittedly placed on described roller shaft and is located at end wheel described in two
Between, the two ends of described roller shaft are rotatably connected on described support, and described in two, end wheel is located at outside the two of described support respectively
Side, described roller shaft drive mechanism is installed on described support, and for driving described roller shaft to rotate, described lifter plate is held on
On described support and between the wheel of both ends, the middle part of described lifter plate offers what the described intermediate transport wheel of some appearances stretched out
Stretch out hole, described lift drive mechanism is installed on described support, for driving described lifter plate to move up and down.
Described feeding mechanism or discharging mechanism also include positioning mechanism.Described positioning mechanism includes both sides para-position assembly,
Side para-position assembly described in two is installed in described frame and is symmetrically positioned in the left and right sides of described support, described side para-position assembly bag
Include para-position cylinder, para-position cylinder block, aligning plate and some para-position rollers, described para-position cylinder block is installed in frame and is located at
Described feeding mechanism or the side of described discharging mechanism, described para-position cylinder is installed on described para-position cylinder block, and described
The output shaft of para-position cylinder is stretched out inside and is connected with the outer end of described aligning plate, and described para-position roller is pacified from front then Rotating with Uniform
It is loaded on the bottom of the inner of described aligning plate, described para-position roller is located at the top of described lifter plate.
Described exposure sources also include frozen water machine, and described frozen water machine includes frozen water cabinet, frozen water body and defecator,
Described frozen water body is installed in described frozen water cabinet, and described defecator is installed on the top of described frozen water cabinet, described mistake
The outfan of filter device is connected with the input of described frozen water body, described light source hood offers cold wind import, described ice
The outfan of water dispenser body is connected with the connection of described cold wind import.
Described exposure sources also include hair-dryer, and described hair-dryer is installed on described light transfer frame and is located at described cold
The side of wind inlet
Compared with prior art, exposure sources of the present invention can automatically enter the output film and be automatically performed exposure, substantially increase
Production efficiency.
By description below and combine accompanying drawing, the present invention will become more fully apparent, and these accompanying drawings are used for explaining the present invention
Embodiment.
Brief description
Fig. 1 is the structure chart of exposure sources of the present invention.
Fig. 2 is the structure chart of the exposure installation module of exposure sources of the present invention.
Fig. 3 is the structure chart of the light source module of exposure sources of the present invention.
Specific embodiment
Referring to figs. 1 to Fig. 3, exposure sources 1000 of the present invention include exposure and install module 100 and light source module 200.
Described exposure is installed module 100 and is included installing hood 60, installation frame 10 and be installed on described installation frame 10
On feeding mechanism 20, discharging mechanism 30, exposure components 40 and control panel 50.
Described exposure components 40 include position adjusting mechanism 41, absorption platform 42 and exposure template fixed platform 43.Institute
The middle part stating exposure template fixed platform 43 offers installation square hole 431.Described absorption platform 42 is fixedly installed in described installation
In square hole 431.Some adsorption holes 421 are offered on described absorption platform 42, described absorption platform 42 is in described installation square hole 431
Surrounding be provided with template fixing tool 422.Described exposure template fixed platform 43 is placed on described position adjusting mechanism 41,
Described position adjusting mechanism 41 is used for adjusting horizontal level, upright position and the anglec of rotation of described exposure template fixed platform 43
Degree position.Described feeding mechanism 20 and discharging mechanism 30 structure are identical, are symmetrically placed in rear side and the front side of described exposure components 40.
Described installation hood 60 covers at outside described installation frame 10, and described installation hood 60 is in described exposure template fixed platform 43
Top offer light well 61.
Described feeding mechanism 20 or discharging mechanism 30 include support 201, some roller shaft assemblies 202, roller shaft driving
Mechanism 205, lifter plate 206 and lift drive mechanism（Not shown）.Described roller shaft assembly 202 includes roller shaft 2021, two
End wheel 2022 and intermediate transport wheel 2023.Described in two, end wheel 2022 is connected to the two ends of described roller shaft 2021.
Described intermediate transport wheel 2023 is admittedly placed on described roller shaft 2021 and is located at end described in two and takes turns between 2022.Described roller shaft
2021 two ends are rotatably connected on described support 201.Described in two, end wheel 2022 is located at outside the two of described support 201 respectively
Side.Described roller shaft drive mechanism 205 is installed on described support 201, for driving described roller shaft 2021 to rotate.Described liter
Fall plate 206 is held on described support 201 and is located between both ends wheel 2022.If the middle part of described lifter plate 206 offers
What the described intermediate transport wheel 2023 of dry appearance stretched out stretches out hole 2061, and described lift drive mechanism is installed on described support 201, uses
Move up and down in driving described lifter plate 206.
Preferably, described feeding mechanism 20 or discharging mechanism 30 also include positioning mechanism.Described positioning mechanism includes two
Side para-position assembly.Side para-position assembly described in two is installed in described frame 10 and is symmetrically positioned in the left and right sides of described support 201.
Described side para-position assembly includes para-position cylinder 251, para-position cylinder block 252, aligning plate 253 and some para-position rollers 254.Described
Para-position cylinder block 252 is installed in frame 10 and is located at the side of described feeding mechanism 20 or described discharging mechanism 30.Described
Para-position cylinder 251 is installed on described para-position cylinder block 252, and the output shaft of described para-position cylinder 251 stretch out inside with described
The outer end of aligning plate 253 connects, and described para-position roller 254 is installed on the inner of described aligning plate 253 from front then Rotating with Uniform
Bottom.Described para-position roller 254 is located at the top of described lifter plate 206.
Described light source module 500 includes light source hood 510, light source base 520, light transfer frame 530, light source generator
540th, the first reflecting mirror 550 and the second reflecting mirror 560.Described light source generator 540 is installed on described light source base 520.
Described light transfer frame 530 is installed on the top of described light source base 520.Described first reflecting mirror 550 is installed on described light
On transfer frame 530 and be located at the top of described light source generator 540, described light transfer frame 530 extends to described light well 61
Top.Described second reflecting mirror 560 is installed on described light transfer frame 530, and described second reflecting mirror 560 is just to described
Light well 61.Described light source hood 510 covers at outside described light source base 520 and described light transfer frame 530.
Preferably, exposure sources 1000 also include frozen water machine 300 and hair-dryer 400.Described frozen water machine 300 includes frozen water
Cabinet 310, frozen water body（Not shown）And defecator 330.Described frozen water body is installed in described frozen water cabinet 310.
Described defecator 330 is installed on the top of described frozen water cabinet 310, the outfan of described defecator 330 and described frozen water
The input of body connects.Cold wind import 511, the outfan of described frozen water body and institute are offered on described light source hood 510
State cold wind import 511 connection to connect.Described hair-dryer 400 is installed on described light transfer frame 230 and enters positioned at described cold wind
The side of mouth 511.
When exposure sources 1000 of the present invention use, the film is placed on feeding mechanism 20, the film with feeding mechanism transport to
On absorption platform 421, the film is adsorbed in the presence of outside induced-draught fan by absorption platform 42 to be fixed, and then passes through exposure template
Template fixing tool 422 is fixed in exposure template fixed platform 43.Light source generator 540 starts and emits beam, successively afterwards
Vertically it is incident upon after the first reflecting mirror 550 and the second reflecting mirror 560 in exposure template thus completing to expose, the film is exposed
Transferred out by discharging mechanism 30 afterwards.The cold air that frozen water machine 300 produces reaches installation hood 60 and light source hood successively
510, exposure process is played with the effect of cooling.Overall process is automatically controlled by control panel 50.
Exposure sources of the present invention can automatically enter the output film and be automatically performed exposure, substantially increase production efficiency.
Above in association with most preferred embodiment, present invention is described, but the invention is not limited in enforcement disclosed above
Example, and modification, the equivalent combinations that the various essence according to the present embodiment are carried out should be covered.
Claims (6)
1. a kind of exposure sources are it is characterised in that include：
Module is installed in exposure, and described exposure is installed module and included installing hood, installation frame and be installed on described installation frame
On feeding mechanism, discharging mechanism, exposure components and control panel, described exposure components include position adjusting mechanism, absorption
Platform and exposure template fixed platform, the middle part of described exposure template fixed platform offers installation square hole, and described absorption is put down
Platform is fixedly installed in described installation square hole, described absorption platform offers some adsorption holes, described absorption platform is in described
Install square hole surrounding be provided with template fixing tool, described exposure template fixed platform be placed in described position adjusting mechanism it
On, described position adjusting mechanism is used for adjusting horizontal level, upright position and the anglec of rotation of described exposure template fixed platform
Degree position, described feeding mechanism and discharging mechanism structure are identical, are symmetrically placed in rear side and the front side of described exposure components；Described peace
Installation cover cover at outside described installation frame, described fitting machine cover in described exposure template fixed platform top offer into
Unthreaded hole；
Light source module, described light source module includes light source hood, light source base, light transfer frame, light source generator, the first reflection
Mirror and the second reflecting mirror, described light source generator is installed on described light source base, and described light transfer frame is installed on described
The top of light source base, described first reflecting mirror is installed on described light transfer frame and is located at the upper of described light source generator
Side, described light transfer frame extends to the top of described light well, and described second reflecting mirror is installed on described light transfer frame,
And described second reflecting mirror is just to described light well, described light source hood covers at described light source base and described light transfer frame
Outside.
2. as claimed in claim 1 exposure install module it is characterised in that：Described feeding mechanism or discharging mechanism include propping up
Frame, some roller shaft assemblies, roller shaft drive mechanism, lifter plate and lift drive mechanism, described roller shaft assembly includes rolling
Wheel shaft, both ends wheel and intermediate transport wheel, end wheel described in two is connected to the two ends of described roller shaft, described middle biography
Send wheel to be admittedly placed on described roller shaft and be located at described in two between the wheel of end, the two ends of described roller shaft are rotatably connected in described
On frame, described in two, end wheel is located at outside the two of described support respectively, and described roller shaft drive mechanism is installed on described support,
For driving described roller shaft to rotate, described lifter plate is held on described support and is located between the wheel of both ends, described lifting
The middle part of plate offer some hold described intermediate transport wheel stretch out stretch out hole, described lift drive mechanism is installed on described support
On, for driving described lifter plate to move up and down.
3. as claimed in claim 2 exposure install module it is characterised in that：Described feeding mechanism or discharging mechanism also include
Positioning mechanism.
4. positioning mechanism described in includes both sides para-position assembly, and described in two, side para-position assembly is installed in described frame and is symmetrically positioned in
The left and right sides of described support, described side para-position assembly includes para-position cylinder, para-position cylinder block, aligning plate and some para-positions rolling
Wheel, described para-position cylinder block is installed in frame and is located at the side of described feeding mechanism or described discharging mechanism, described right
Position cylinder is installed on described para-position cylinder block, and the output shaft of described para-position cylinder stretches out the outer end with described aligning plate inside
Connect, described para-position roller is installed on the bottom of the inner of described aligning plate, described para-position roller position from front then Rotating with Uniform
Top in described lifter plate.
5. exposure sources as claimed in claim 1, its feature exists：Also include frozen water machine, described frozen water machine include frozen water cabinet,
Frozen water body and defecator, described frozen water body is installed in described frozen water cabinet, and described defecator is installed on described
The top of frozen water cabinet, the outfan of described defecator is connected with the input of described frozen water body, on described light source hood
Offer cold wind import, the outfan of described frozen water body is connected with the connection of described cold wind import.
6. exposure sources as claimed in claim 4, its feature exists：Also include hair-dryer, described hair-dryer is installed on described light
On line transfer frame and be located at described cold wind import side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611184425.8A CN106406036B (en) | 2016-12-20 | 2016-12-20 | Exposure sources |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611184425.8A CN106406036B (en) | 2016-12-20 | 2016-12-20 | Exposure sources |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106406036A true CN106406036A (en) | 2017-02-15 |
| CN106406036B CN106406036B (en) | 2018-05-22 |
Family
ID=58087415
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611184425.8A Active CN106406036B (en) | 2016-12-20 | 2016-12-20 | Exposure sources |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106406036B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838552A (en) * | 2018-07-13 | 2018-11-20 | 上海骄成机电设备有限公司 | A kind of anvil block exposure all-in-one machine |
| CN110764373A (en) * | 2019-11-24 | 2020-02-07 | 湖南凯通电子有限公司 | Circuit board exposure machine |
| CN111562722A (en) * | 2020-04-16 | 2020-08-21 | 珠海市泓电电子科技有限公司 | Full-automatic exposure machine |
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| JP2007193296A (en) * | 2005-12-19 | 2007-08-02 | Nsk Ltd | Exposure device and exposure method |
| CN101713931A (en) * | 2008-10-03 | 2010-05-26 | 株式会社日立高新技术 | An exposure device for display panel, exposure method and assembling or adjusting method of the display panel exposure device |
| US20110008718A1 (en) * | 2009-07-10 | 2011-01-13 | Canon Kabushiki Kaisha | Substrate conveyance method and substrate conveyance device, exposure apparatus using same, and device manufacturing method |
| CN204347433U (en) * | 2014-12-17 | 2015-05-20 | 东莞市海圣光电科技有限公司 | There is the exposure machine of intelligent control system |
| CN205644016U (en) * | 2016-04-14 | 2016-10-12 | 东莞市安石金属科技有限公司 | Full -automatic LED exposure machine |
| CN206431421U (en) * | 2016-12-20 | 2017-08-22 | 广东莱宝智能装备股份有限公司 | Exposure sources |
-
2016
- 2016-12-20 CN CN201611184425.8A patent/CN106406036B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007193296A (en) * | 2005-12-19 | 2007-08-02 | Nsk Ltd | Exposure device and exposure method |
| CN101713931A (en) * | 2008-10-03 | 2010-05-26 | 株式会社日立高新技术 | An exposure device for display panel, exposure method and assembling or adjusting method of the display panel exposure device |
| US20110008718A1 (en) * | 2009-07-10 | 2011-01-13 | Canon Kabushiki Kaisha | Substrate conveyance method and substrate conveyance device, exposure apparatus using same, and device manufacturing method |
| CN204347433U (en) * | 2014-12-17 | 2015-05-20 | 东莞市海圣光电科技有限公司 | There is the exposure machine of intelligent control system |
| CN205644016U (en) * | 2016-04-14 | 2016-10-12 | 东莞市安石金属科技有限公司 | Full -automatic LED exposure machine |
| CN206431421U (en) * | 2016-12-20 | 2017-08-22 | 广东莱宝智能装备股份有限公司 | Exposure sources |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108838552A (en) * | 2018-07-13 | 2018-11-20 | 上海骄成机电设备有限公司 | A kind of anvil block exposure all-in-one machine |
| CN110764373A (en) * | 2019-11-24 | 2020-02-07 | 湖南凯通电子有限公司 | Circuit board exposure machine |
| CN111562722A (en) * | 2020-04-16 | 2020-08-21 | 珠海市泓电电子科技有限公司 | Full-automatic exposure machine |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106406036B (en) | 2018-05-22 |
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Address after: No. 1, Niu Shan gate of Niu Shan, Dongcheng District, Dongcheng District, Guangdong Applicant after: Guangdong LEYBOLD intelligent equipment Limited by Share Ltd Address before: 523000 Guangdong city of Dongguan province Dongcheng District Dongguan long Lu Niu Mountain Village Gate No. 1 Campo LEYBOLD company Applicant before: DONGGUAN LAIBAO ELECTRICAL TECHNOLOGY CO., LTD. |
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