CN106405828A - Composite type beam coarse and fine coupling scanning device - Google Patents

Composite type beam coarse and fine coupling scanning device Download PDF

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Publication number
CN106405828A
CN106405828A CN201611043521.0A CN201611043521A CN106405828A CN 106405828 A CN106405828 A CN 106405828A CN 201611043521 A CN201611043521 A CN 201611043521A CN 106405828 A CN106405828 A CN 106405828A
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China
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picture frame
bearing
wedge
prism
ball
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CN201611043521.0A
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CN106405828B (en
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李安虎
易万力
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Tongji University
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Tongji University
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10Scanning systems
    • G02B26/108Scanning systems having one or more prisms as scanning elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)

Abstract

The invention relates to a composite type beam coarse and fine coupling scanning device which comprises a base, a spring, a middle lens frame, an inner lens frame, a wedge prism, a large bearing end cover, a rotary encoder rotor, a rotary encoder stator, an outer lens frame, a large bearing retainer ring, a large bearing, a nylon pad, a wedge retainer ring, a threaded pressing ring, a prism tightening screw, a torque motor stator, a torque motor rotor, a voice coil motor rotor, a push rod, a voice coil motor stator, a push groove, a third nylon pad, a small bearing, a small bearing end cover, a half shaft, and a small rotary encoder assembly. Through the rotation of the wedge prism, the beam large range coarse scanning is realized, through the deflection of the wedge prism, the beam local range high precision scanning is realized. One set of the device or multiple sets of the devices can be used together, the scanning range of the beam can be increased further when the multiple sets of the devices are used, the rich scanning styles are realized, and the device has extensive prospect in the application fields with high requirements of a beam scanning range and precision such as photoelectric imaging detection, free space laser communication, and dynamic target laser tracking.

Description

The coarse-fine coupling scanning means of compound light beam
Technical field
The present invention relates to a kind of optical scanner, the coarse-fine coupling scanning means of particularly a kind of compound light beam, can use High precision light beam in precision engineering field scans, follows the tracks of and is aligned, and belongs to precision optics scanning field.
Background technology
Precision optics scanning means is the necks such as photonics image detection, free space laser communication, the tracking of dynamic object laser One of the key technology in domain.There is compact conformation, be used to refraction type prism wedge for the optical scanner of core optical element Property the advantages of square is little, dynamic property is good, in above-mentioned field, tool has been widely used.Common prism wedge optical scanner has Rotation biprism scanning means and two kinds of beat biprism scanning means.Rotation biprism scanning means adopts a pair of biprism same Axle rotates, and its distinguishing feature is that light beam scanning field of view is big.Beat biprism scanning means adopts two prism-coupled to swing, and it shows Work feature is light beam steering high precision.
(1)Hereinafter formerly give the structure composition of several rotation biprism scanning means in technology.
Formerly technology(The patents such as Yuan Yan, application number:201210432016.0, a kind of November 2 2012 applying date " base Light beam scanning mechanism in rotation folding wedge mirror ")Engage transmission motor torque using two groups of teeth wheel set, drive two optical wedges respectively Mirror rotates.In sweep mechanism, using direct current torque motor driving, straight spur gear engaged transmission, optical wedge mirror precision bearing system Supporting and optical wedge mirror reliability clamping, the technology such as positioning are it is achieved that the stable scanning of incident beam.Its shortcoming is device along light Direction of principal axis size is larger, complex structure and not compact.
Formerly technology(The patents such as Li Anhu, application number:201210439061.9, November 7 2012 applying date " is realized The prism machinery of coarse-fine two-stage scan ")In, electric rotating machine drives prism and inside and outside picture frame assembly to realize by worm and gear Circle rotates, and has big speed ratio, advantages of simple structure and simple, but there is worm gear worm backlash, forward and reverse in needs It is difficult to eliminate the impact of hysterisis error in the application of rotation frequent switching.
Formerly technology(The patents such as Li Anhu, application number:201310072421.0, March 7 2013 applying date " Timing Belt Drive rotary prism device ")In, by the way of Timing Belt direct drive prism rotation, gear ratio is accurate, no slippage, and ties Close rotary encoder and realize feedback regulation, the accurate control of the prism anglec of rotation can be completed, and Timing Belt has stable drive, Can shock-absorbing, noise is little, flexible arrangement, the advantages of compact conformation.But Timing Belt life-time service will face ageing of rubber cracking, become The problems such as shape, elongation, fracture.
(2)Hereinafter formerly give the structure composition of several beat biprism scanning means in technology.
Formerly technology(The patents such as Sun Jianfeng, application number:200410024986.2, June 8 2004 applying date " swashs between star Optical communication terminal high accuracy dynamic and static weighing device ")In, propose to realize the inclined of prism using motor direct-coupling rotary shaft Pendulum.This method reduce mechanical transmission errors, the corner of motor is consistent with the pendulum angle of prism, between the two relation letter Single, compact mechanical structure.But prism pivot angle resolution is directly restricted by motor step pitch angular resolution, to motor Precision and performance requirement are high, and motor easily resonates in the case of controlling improperly, affect system operation precision.With When, this mechanical system does not provide the feedback information of the rotational angle of beat biprism it is difficult to revise the corner of biprism in real time Error.
Formerly technology(The patents such as Li Anhu, application number:200510026553.5, June 8 2005 applying date " double wedges Light beam steering machinery ")In, propose a kind of linear electric motors screw propelling and put illuminating apparatus structure.Deflection mechanism is mainly walked by straight line The structure compositions such as stepper motor, motor screw, nut, slide block, base, vertical connecting plates.This mechanism will be straight for the relatively large distance of motor Line conversion of motion is the Small-angle Rotation of pendulum mirror, improves control accuracy, but the movement relation of motor and prism is relatively from principle Complexity, the velocity and acceleration of motor is in that erratic behavior changes.It is also easy to produce friction between nut and picture frame V-groove in this scheme simultaneously With abnormal sound, affect system accuracy.
Formerly technology(The patents such as Li Anhu, application number:201010588924.X, December 15 2010 applying date " beat Wedge scanning means ")In, devise a kind of double-slider and involve the deflecting optical wedge scanning device that formula puts illuminating apparatus structure, mainly by straight line Motor, cover plate, horizontal guide rail, cross sliding clock, oscillating bearing, upright guide rail, vertical slipper, base, L-type plate, picture frame connecting plate Etc. structure composition.Compared with linear electric motors screw rod propulsive mechanism, the point between nut and vertical connecting plates is contacted and is changed into by this mechanism Face between upright slide block and guide rail contacts, and reduces inter-agency frictional force, improves the service behaviour of pendulum illuminating apparatus structure, but motor More complicated with the movement relation of pendulum mirror.Meanwhile, the movement clearance between slide block and oscillating bearing can affect the operating accuracy of system.
Formerly technology(The patents such as Li Anhu, application number:201210375722.6, October 8 2012 applying date " adopts Cam-actuated pendulum illuminating apparatus structure ")In it is proposed that a kind of using cam-actuated pendulum illuminating apparatus structure, mainly device, partially is close to by spring Pendulum cam mechanism, motor and running part, the pendulum composition such as mirror supporting construction and support.Using this cam drive it is only necessary to Design suitable cam contour, driven member just can accurately realize the arbitrary characteristics of motion.But due to being line between cam and swing component Contact, occurs to affect system accuracy during abrasion, and a set of cam mechanism can only scan a kind of specific track, limits this dress The versatility put.
Formerly technology(The patents such as Li Anhu, application number:201510560372.4,2015 applyings date September " yeast inoculation on the 7th The pendulum illuminating apparatus structure of handle slider-actuated ")In it is proposed that a kind of crank block drive pendulum illuminating apparatus structure.This mechanism is by the little angle of prism Degree swings the movement being converted to slide block relatively large distance, reduces the requirement of control accuracy, but transmission process is complex, inapplicable In application scenarios such as real-time trackings.
The common drawback rotating above biprism scanning means is that circumferential scanning precision is affected relatively by frame for movement precision Greatly, the common drawback of above beat biprism scanning means is that scanning field of view is less.
Content of the invention
It is an object of the invention to provide a kind of coarse-fine coupling scanning means of compound light beam.
The present invention adopts voice coil motor to drive prism around the axis beat perpendicular to prism principal section, is driven using torque motor Index prism system for winding optical axis rotates, prism-integrated rotation and beat motion in single complete equipment.The present invention combines the double rib of rotation Mirror large field of view scan and the advantage of beat biprism high accuracy scanning, by the rotation beat coupling of two or more prisms Motion, realizes the scanning of large scale and high accuracy coarse-fine coupled light beam, to solve the weak point in above-mentioned background technology.
The coarse-fine coupling scanning means of compound light beam proposed by the present invention, including pedestal 1, spring 2, middle picture frame 3, interior picture frame 4th, prism wedge 5, the first big bearing (ball) cover 6, rotary encoder rotor 7, rotary encoder stator 8, outer picture frame 9, big bearing rib Circle the 10, first big bearing 11, second largest bearing (ball) cover 12, the first nylon cushion block 13, wedge shape back-up ring 14, the second nylon cushion block 15, Threaded ring 16, prism holding screw 17, torque motor stator 18, torque motor rotor 19, voice coil motor mover 20, push rod 21st, voice coil motor stator 22, push away groove 23, the 3rd nylon cushion block 24, second largest bearing 25, the first little bearing 26, the first little bearing End cap 27, the first semiaxis 28, the second semiaxis 29, the second little bearing (ball) cover 30, little rotary encoder assembly 31 and the second little bearing 32, wherein:
Described prism wedge 5 is loaded in interior picture frame 4, and the planar side of prism wedge 5 is realized axially by the end face step of interior picture frame 4 Positioning;The wedge surface side of prism wedge 5 is positioned opposite with the wedge surface side of wedge shape back-up ring 14, and the angle of wedge of two wedge surfaces is equal, threaded ring 16 are screwed into interior picture frame 4, for compressing the planar side of wedge shape back-up ring 14, thus realizing the axial restraint of prism wedge 5;Prism wedge The groove that cross section is circular arc is had on 5 thick side wall, prism holding screw 17 is screwed into the screwed hole on interior picture frame 4 side wall In, and the blunt end of prism holding screw 17 snaps in the groove of the circular arc of prism wedge 5, the circumference realizing prism wedge 5 is fixed Position;The radial positioning of described prism wedge 5 and wedge shape back-up ring 14 passes through the dimensional fits realization of its outer wall and interior picture frame 4 inwall, First nylon cushion block 13 is installed between the planar side of wedge shape back-up ring 14 and threaded ring 16, in the wedge surface side of prism wedge 5 Second nylon cushion block 15 is installed and the wedge surface side of wedge shape back-up ring 14 between, in end face step and the prism wedge 5 of interior picture frame 4 3rd nylon cushion block 24 is installed between planar side;
The described groove 23 that pushes away is installed on interior picture frame 4 bottom surface;
Described first big bearing (ball) cover 6 is installed on middle picture frame 3, and its flange compresses the inner ring of second largest bearing 25, described rotation Encoder mover 7 is installed on the first big bearing (ball) cover 6, and described rotary encoder stator 8 is installed on outer picture frame 9, and described Two big bearing (ball) covers 12 are installed on middle picture frame 3, and its flange compresses the inner ring of the first big bearing 11, and described big end ring 10 is pacified It is loaded on outer picture frame 9;
Described voice coil motor stator 22 is installed on the first big bearing (ball) cover 6, and described voice coil motor mover 20 can be in voice coil motor Move along a straight line vertically in stator 22;Described push rod 21 one end is installed on voice coil motor mover 20 by end thread, pushes away Bar 21 other end contacts with pushing away groove 23, and the linear motion of voice coil motor mover 20 makes push rod 21 stretch and slides pushing away in groove 23, Thus driving prism wedge 5 beat;
Described spring 2 is installed between interior picture frame 4 and the first big bearing (ball) cover 6, and spring 2 is pre-pressing spring, and effect is to maintain Push away groove 23 to contact all the time with push rod 21;
The inner ring of described second largest bearing 25 and the outer ring interference fit of middle picture frame 3, the outer ring of second largest bearing 25 and outer picture frame 9 Inner ring interference fit, second largest bearing 25 passes through the step of middle picture frame 3 and outer picture frame 9 and the convex of the first big bearing (ball) cover 6 Edge axial restraint;The inner ring of described first big bearing 11 and the outer ring interference fit of middle picture frame 3, the inner ring of outer ring and outer picture frame 9 Interference fit, the first big bearing 11 passes through middle picture frame 3 and the step of outer picture frame 9 and the flange axial direction of second largest bearing (ball) cover 12 Fixing;
Described first semiaxis 28 is installed on interior picture frame 4 side, and described first little bearing (ball) cover 27 is arranged on the bearing of middle picture frame 3 At hole;Described first little bearing 26 is installed between middle picture frame 3 and the first semiaxis 28, the inner ring of the first little bearing 26 and the first half Axle 28 interference fit, the outer ring of the first little bearing 26 and the dead eye interference fit of middle picture frame 3;First little bearing 26 passes through first The step of semiaxis 28 and the flange axially position of the first little bearing (ball) cover 27;
Described second semiaxis 29 is installed on interior picture frame 4 opposite side, and described second little bearing (ball) cover 30 is arranged on the axle of middle picture frame 3 At bearing bore;Described second little bearing 32 is installed between middle picture frame 3 and the second semiaxis 29, the inner ring and second of the second little bearing 32 Semiaxis 29 interference fit, the outer ring of the second little bearing 32 and the dead eye interference fit of middle picture frame 3, the second little bearing 32 passes through the The step of two semiaxis 29 and the flange axially position of the second little bearing (ball) cover 30;
Described little rotary encoder assembly 31 is installed on middle picture frame 3, and its axle head extends in the hole of the second semiaxis 29, by tightening Screw and the second semiaxis 29 are fixing;
Described torque motor stator 18 is installed in outer picture frame 9;Described torque motor rotor 19 is installed on middle picture frame, moment electricity When machine starts, outer picture frame 9 and torque motor stator 18 remains stationary, torque motor rotor 19 band disorder of internal organs picture frame 3 rotates;
Described outer picture frame 9 is installed in the hole of pedestal 1.
In the present invention, the bottom surface of described pedestal 1 and plane-parallel.
In the present invention, described first nylon cushion block 13, the second nylon cushion block 15 and the 3rd nylon cushion block 24 all use in groups (As 4 one group or 6 one group), play protection piece surface and the effect of buffering vibration isolation.
In the present invention, the bottom surface of pedestal 1 is machined with one group of screw thread unthreaded hole, is used for securing the device to the load such as ground or guide rail On body, in order to the installation of device.
In the present invention, during use, using the complete use of multiple scanning means, for example, form biprism with two this devices thick Essence coupling scanning means, or form prism coarse-fine coupling scanning means etc. with three this devices.
In the present invention, described little rotary encoder assembly 31 is used for detecting prism wedge deflection angle position, is installed on outer Rotary encoder on picture frame 9 and the first big bearing (ball) cover 6 is used for detecting prism wedge rotary angle position, described two rotations Encoder and electric machine control system can carry out open loop or closed loop control to voice coil motor and torque motor.
Compared with prior art, the present invention has the advantage that and has the beneficial effect that:
(1)The present invention be a kind of by prism rotary motion with the beat integrated refraction type light-beam scanner of motion, by wedge shape Light beam large range coarse scanning is realized in the rotation of prism, realizes light beam subrange high accuracy by the beat of prism wedge and scans, Ensure that from optical principle light beam scanning of the present invention on a large scale and high accuracy.
(2)The present invention passes through the superposition of rotary motion pair and beat kinematic pair in set of device, constitutes compound light Beam scanning system, compact conformation, it is to avoid the space structure scattering problem that coarse-fine scanning separate design is brought, and system thick Smart error term is difficult to the problem of separation and correction of tracing to the source.
(3)In the present invention, rotary motion and beat motion are respectively adopted the form that torque motor and voice coil motor directly drive, There is no the motion transmission chain of complexity, simple frame for movement reduces error accumulation, therefore ensure that from device design principle Light beam scanning accuracy.
(4)The present invention adopts voice coil motor to promote described interior picture frame 4 beat, drives described middle picture frame 3 using torque motor Rotation, detects prism wedge deflection angle position by little rotary encoder, by being arranged on outer picture frame 9 and the first big bearing end Rotary encoder detection prism wedge rotary angle position on lid 6.The angle position letter being obtained according to two rotary encoders Number, closed loop feedback control is carried out to voice coil motor and torque motor, has the advantages that real-time is good and control accuracy is high.
(5)For different application scenarios, apparatus of the present invention can be used cooperatively using single set or many sets, cover use more When can increase the sweep limitss of light beam further, realize more abundant scanning pattern, in photonics image detection, free space The application that laser communication, the tracking of dynamic object laser etc. all have higher requirements to light beam sweep limitss and precision has widely Prospect.
Brief description
Fig. 1 is the motion mode schematic diagram of prism wedge of the present invention.
Fig. 2 is the overall appearance schematic diagram of the present invention, there is shown the overall appearance of single assembly and shape.
Fig. 3 is the front view of the present invention.
Fig. 4 is the left view sectional view of the present invention, illustrates the internal structure of device.
Fig. 5 is the vertical view cutaway drawing of the present invention, illustrates the internal structure of device.
Fig. 6 is the local structural graph at C in Fig. 5.
Fig. 7 is the base construction figure of the present invention.
Fig. 8 is the scope mount structure figure of the present invention.
Fig. 9 is the middle frame structure figure of the present invention.
Figure 10 is the epi mirror mount structure figure of the present invention.
Figure 11 is the biprism coarse-fine coupling scanning system structure chart using two sets of apparatus of the present invention compositions.Wherein, first Prism assembly and the second prism assembly structure are identical, the modes of emplacement of two prism assemblies may each be prism planes side towards left or Person is towards the right side.Shown in Figure 11 be the first prism assembly and the second prism assembly is planar side towards right situation.
In figure label:A- prism beat axle, b- prism principal section, c- prism rotary shaft, 1- pedestal, 2- spring, mirror in 3- Frame, picture frame in 4-, 5- prism wedge, the big bearing (ball) cover of 6- first, 7- rotary encoder rotor, 8- rotary encoder stator, 9- Outer picture frame, the big end ring of 10-, the big bearing of 11- first, the second largest bearing (ball) cover of 12-, 13- the first nylon cushion block, 14- wedge shape Back-up ring, 15- the second nylon cushion block, 16- threaded ring, 17- prism holding screw, 18- torque motor stator, 19- torque motor Rotor, 20- voice coil motor mover, 21- push rod, 22- voice coil motor stator, 23- pushes away groove, 24- the 3rd nylon cushion block, 25- second Big bearing, the little bearing of 26- first, the little bearing (ball) cover of 27- first, 28- first semiaxis, 29- second semiaxis, the little bearing of 30- second End cap, 31- little rotary encoder assembly, the little bearing of 32- second, 33- base, 34- laser stent, 35- laser instrument, 36- One prism assembly, 37- the second prism assembly.
Specific embodiment
With reference to each accompanying drawing, by the structure composition of embodiment coupling coarse-fine to prism wedge of the present invention scanning means and The process realizing coarse-fine coupling scanning is described in further detail, but scope of patent protection not limited to this of the present invention.
Embodiment 1:
Referring to Figure 11, the present embodiment is a set of biprism coarse-fine coupling scanning means, realizes the thick of laser beam for interior on a large scale Essence coupling scanning.As shown in figure 11, mainly to include base 33, laser stent 34, laser instrument 35, the first prism total for the present embodiment One-tenth 36 and the second prism assembly 37.Wherein, the first prism assembly 36 is identical with the second prism assembly 37, is institute of the present invention The single prism wedge coarse-fine coupling scanning means stated.Described first prism assembly 36 and the second prism assembly 37 are arranged on base On 33, described laser stent 34 is arranged on base 33, and described laser instrument 35 is arranged on laser stent 34 top.This enforcement In example, the optical axis of the central shaft of laser instrument 35, the optical axis of the first prism assembly 36 and the second prism assembly 37 is on the same line. In the present embodiment, the first prism assembly and the second prism assembly are prism wedge planar side towards the right side, it is noted that two ribs The modes of emplacement of mirror assembly may each be prism wedge planar side towards a left side or towards the right side.
Referring to Fig. 1, Fig. 1 is the motion mode schematic diagram of prism wedge described in the present embodiment, and prism wedge can be inclined around a axle Pendulum, can rotate around c-axis again.
Referring to Fig. 2 Figure 10, Fig. 2 is the overall appearance schematic diagram of the present embodiment single assembly, and Fig. 3 is that the present embodiment is single The front view of device, Fig. 4 is the left view sectional view of the present embodiment single assembly, and Fig. 5 is that the vertical view of the present embodiment single assembly is cutd open View, Fig. 6 is the local structural graph at C in Fig. 5, and Fig. 7 is the base construction figure of the present embodiment, and Fig. 8 is the scope of the present embodiment Mount structure figure, Fig. 9 is the middle frame structure figure of the present embodiment, and Figure 10 is the epi mirror mount structure figure of the present embodiment.
With reference to Fig. 2 Figure 10, describe the structure composition of the first prism assembly 36 in the present embodiment, the second prism in detail The structure of assembly 37 is completely the same with the first prism assembly 36.
Described prism wedge 5 is contained in interior picture frame 4, and its axially position method is as follows:The planar side of prism wedge 5 is passed through interior Axially position realized by the end face step of picture frame 4;The wedge surface side of prism wedge 5 is positioned opposite with the wedge surface side of wedge shape back-up ring 14, and two The angle of wedge of wedge surface is equal, and threaded ring 16 is screwed into interior picture frame 4, and the planar side of compression wedge shape back-up ring 14, thus realize prism wedge 5 Axial restraint.The circumferentially positioned method of prism wedge 5 is as follows:Having cross section on the thick side wall of prism wedge 5 is circular arc The groove of shape, prism holding screw 17 is screwed in the screwed hole on interior picture frame 4 side wall, and the blunt end of prism holding screw 17 snaps in In the groove of prism wedge 5, realize the circumferentially positioned of prism wedge 5.The radial positioning of described prism wedge 5 and wedge shape back-up ring 14 is led to The dimensional fits crossing its outer wall with interior picture frame 4 inwall are realized.Between the planar side of wedge shape back-up ring 14 and threaded ring 16 equipped with First nylon cushion block 13, equipped with the second nylon cushion block 15 between the wedge surface side and the wedge surface side of wedge shape back-up ring 14 of prism wedge 5, Between the end face step of interior picture frame 4 and the planar side of prism wedge 5, dress is provided with the 3rd nylon cushion block 24, above-mentioned first nylon Cushion block 13, the second nylon cushion block 15 and the 3rd nylon cushion block 24 all use in groups(As 4 one group or 6 one group), play protection zero Part surface and the effect of buffering vibration isolation.
The described groove 23 that pushes away is attached to interior picture frame 4 bottom surface.
Described voice coil motor stator 22 is arranged on the first big bearing (ball) cover 6.Described voice coil motor mover 20 can be in sound Move along a straight line vertically in circle motor stator 22.Described push rod 21 is arranged on voice coil motor mover 20 by end thread, The other end of push rod 21 contacts with pushing away groove 23, and the linear motion of voice coil motor mover 20 makes push rod 21 stretch and sliding in groove 23 pushing away Dynamic, thus driving prism wedge 5 beat.
Described spring 2 is arranged between interior picture frame 4 and the first big bearing (ball) cover 6, and spring 2 is pre-pressing spring, and effect is Holding is pushed away groove 23 and is contacted all the time with push rod 21.
Described first big bearing (ball) cover 6 is arranged on middle picture frame 3, and its flange compresses the inner ring of second largest bearing 25.Described Rotary encoder mover 7 is arranged on the first big bearing (ball) cover 6.Described rotary encoder stator 8 is arranged on outer picture frame 9.Institute State second largest bearing (ball) cover 12 to be arranged on middle picture frame 3, its flange compresses the inner ring of the first big bearing 11.Described big end ring 10 are arranged on outer picture frame 9.
The inner ring of described second largest bearing 25 and the outer ring interference fit of middle picture frame 3, the inner ring interference of outer ring and outer picture frame 9 Cooperation, second largest bearing 25 passes through middle picture frame 3 and the step of outer picture frame 9 and the flange axial restraint of the first big bearing (ball) cover 6. The inner ring of described first big bearing 11 and the outer ring interference fit of middle picture frame 3, the inner ring interference fit of outer ring and outer picture frame 9, the One big bearing 11 passes through middle picture frame 3 and the step of outer picture frame 9 and the flange axial restraint of second largest bearing (ball) cover 12.
Described first semiaxis 28 is arranged on interior picture frame 4.Described first little bearing (ball) cover 27 is arranged on the bearing of middle picture frame 3 At hole.Described first little bearing 26 is arranged between middle picture frame 3 and the first semiaxis 28, the inner ring of the first little bearing 26 and the first half The dead eye interference fit of axle 28 interference fit, outer ring and middle picture frame 3.First little bearing 26 by the step of the first semiaxis 28 with And first little bearing (ball) cover 27 flange axially position.
Described second semiaxis 29 is arranged on interior picture frame 4.Described second little bearing (ball) cover 30 is arranged on the bearing of middle picture frame 3 At hole.Described second little bearing 32 is arranged between middle picture frame 3 and the second semiaxis 29, the inner ring of the second little bearing 32 and the second half The dead eye interference fit of axle 29 interference fit, outer ring and middle picture frame 3.Second little bearing 32 by the step of the second semiaxis 29 with And second little bearing (ball) cover 30 flange axially position.
Described little rotary encoder assembly 31 is arranged on middle picture frame 3, and its axle head extends in the hole of the second semiaxis 29, passes through Holding screw and the second semiaxis 29 are fixing.
Described torque motor stator 18 is arranged in outer picture frame 9.Described torque motor rotor 19 is arranged on middle picture frame, power When torque motor starts, outer picture frame 9 and torque motor stator 18 remains stationary, torque motor rotor 19 band disorder of internal organs picture frame 3 rotates.
Described outer picture frame 9 is arranged in the hole of pedestal 1.
Explanation the present embodiment carries out the detailed process of coarse-fine coupling scanning below in conjunction with the accompanying drawings.
(1)The laser beam that laser instrument 35 produces, passes sequentially through two in the first prism assembly 36 and the second prism assembly 37 Individual prism wedge, the refraction action of prism wedge makes laser beam deflect.
(2)Controller and torque motor driver(It is not drawn in accompanying drawing)Can be rotated with control moment rotor 19, from And control the anglec of rotation of prism wedge 5;Controller and voice coil motor driver(It is not drawn in accompanying drawing)Voice coil loudspeaker voice coil electricity can be controlled Motor-driven sub 20 stretch, and are aided with the backhaul effect of spring 2, thus controlling the deflection angle of prism wedge 5 simultaneously.
(3)Little rotary encoder assembly 31 detects prism wedge 5 deflection angle, is arranged on outer picture frame 9 and the first big bearing Rotary encoder detection prism wedge 5 anglec of rotation on end cap 6.Above-mentioned two rotary encoder is by the beat of prism wedge 5 Angle and anglec of rotation Real-time Feedback, to controller, can carry out closed loop feedback control to voice coil motor and torque motor, improve rib The real-time of mirror motion and precision.
(4)Light beam coarse scanning process:When the current location of light beam scanning and target location are apart from each other, control moment electricity Machine rotates prism wedge 5, makes light beam scan position produce large range of change, is quickly moving toward target location.Light beam essence scanning Process:The current location of light beam scanning, behind target location, controls voice coil motor to swing prism wedge 5, makes light beam scanning position Put high precision fine tuning near target location, until the deviation of light beam scanning current location and target location is less than set-point.On State light beam coarse-fine coupling scan method, achievable large scale and high accuracy light beam scanning.

Claims (6)

1. the coarse-fine coupling scanning means of compound light beam, including pedestal (1), spring (2), middle picture frame (3), interior picture frame (4), wedge shape Prism (5), the first big bearing (ball) cover (6), rotary encoder rotor (7), rotary encoder stator (8), outer picture frame (9), big axle Hold back-up ring (10), the first big bearing (11), second largest bearing (ball) cover (12), the first nylon cushion block (13), wedge shape back-up ring (14), Two nylon cushion blocks (15), threaded ring (16), prism holding screw (17), torque motor stator (18), torque motor rotor (19), voice coil motor mover (20), push rod (21), voice coil motor stator (22), push away groove (23), the 3rd nylon cushion block (24), Two big bearings (25), the first little bearing (26), the first little bearing (ball) cover (27), the first semiaxis (28), the second semiaxis (29), second Little bearing (ball) cover (30), little rotary encoder assembly (31) and the second little bearing (32) it is characterised in that:
Described prism wedge (5) is loaded in interior picture frame (4), and the planar side of prism wedge (5) passes through the end face step of interior picture frame (4) Realize axially position;The wedge surface side of prism wedge (5) is positioned opposite with the wedge surface side of wedge shape back-up ring (14), the angle of wedge phase of two wedge surfaces Deng threaded ring (16) is screwed into interior picture frame (4), for compressing the planar side of wedge shape back-up ring (14), thus realizing prism wedge (5) Axial restraint;The groove that cross section is circular arc is had on the thick side wall of prism wedge (5), prism holding screw (17) is screwed into In screwed hole on the wall of interior picture frame (4) side, and the blunt end of prism holding screw (17) snaps in the circular arc of prism wedge (5) In groove, realize the circumferentially positioned of prism wedge (5);The radial positioning of described prism wedge (5) and wedge shape back-up ring (14) passes through it Outer wall and the dimensional fits realization of interior picture frame (4) inwall, pacify between the planar side of wedge shape back-up ring (14) and threaded ring (16) Equipped with the first nylon cushion block (13), it is provided between the wedge surface side of the wedge surface side of prism wedge (5) and wedge shape back-up ring (14) Two nylon cushion blocks (1 (5)), are provided with the 3rd nylon between the end face step of interior picture frame (4) and the planar side of prism wedge (5) Cushion block (24);
The described groove (23) that pushes away is installed on interior picture frame (4) bottom surface;
Described first big bearing (ball) cover (6) is installed on middle picture frame (3), and its flange compresses the inner ring of second largest bearing (25), institute State rotary encoder mover (7) to be installed on the first big bearing (ball) cover (6), described rotary encoder stator (8) is installed on epi mirror On frame (9), described second largest bearing (ball) cover (12) is installed on middle picture frame (3), and its flange compresses the interior of the first big bearing (11) Circle, described big end ring (10) is installed on outer picture frame (9);
Described voice coil motor stator (22) is installed on the first big bearing (ball) cover (6), and described voice coil motor mover (20) can be in sound Move along a straight line vertically in circle motor stator (22);Described push rod (21) one end is installed on voice coil motor by end thread and moves On sub (20), push rod (21) other end contacts with pushing away groove (23), and the linear motion of voice coil motor mover (20) makes push rod (21) stretch Contract push away in groove (23) slide, thus driving prism wedge (5) beat;
Described spring (2) is installed between interior picture frame (4) and the first big bearing (ball) cover (6), and spring (2) is pre-pressing spring, makees Pushed away groove (23) and contacted all the time with push rod (21) with being to maintain;
The outer ring interference fit of the inner ring of described second largest bearing (25) and middle picture frame (3), the outer ring of second largest bearing (25) with The inner ring interference fit of outer picture frame (9), second largest bearing (25) passes through the step and first of middle picture frame (3) and outer picture frame (9) The flange axial restraint of big bearing (ball) cover (6);The described inner ring of the first big bearing (11) and the outer ring interference of middle picture frame (3) are joined Close, the inner ring interference fit of outer ring and outer picture frame (9), the first big bearing (11) passes through the step of middle picture frame (3) and outer picture frame (9) And the flange axial restraint of second largest bearing (ball) cover (12);
Described first semiaxis (28) is installed on interior picture frame (4) side, and described first little bearing (ball) cover (27) is arranged on middle picture frame (3) at dead eye;Described first little bearing (26) is installed between middle picture frame (3) and the first semiaxis (28), the first little bearing (26) inner ring and the first semiaxis (28) interference fit, the outer ring of the first little bearing (26) and the dead eye interference of middle picture frame (3) Cooperation;The flange of step and the first little bearing (ball) cover (27) that the first little bearing (26) passes through the first semiaxis (28) is axially determined Position;
Described second semiaxis (29) is installed on interior picture frame (4) opposite side, and described second little bearing (ball) cover (30) is arranged on middle mirror At the dead eye of frame (3);Described second little bearing (32) is installed between middle picture frame (3) and the second semiaxis (29), the second little axle Hold inner ring and the second semiaxis (29) interference fit of (32), the outer ring of the second little bearing (32) and the dead eye mistake of middle picture frame (3) It is full of cooperation, the second little bearing (32) passes through the step of the second semiaxis (29) and the flange of the second little bearing (ball) cover (30) is axially fixed Position;
Described little rotary encoder assembly (31) is installed on middle picture frame (3), and its axle head extends in the hole of the second semiaxis (29), leads to Cross holding screw and the second semiaxis (29) is fixing;
Described torque motor stator (18) is installed in outer picture frame (9);Described torque motor rotor (19) is installed on middle picture frame, When torque motor starts, outer picture frame (9) and torque motor stator (18) remains stationary, torque motor rotor (19) band disorder of internal organs picture frame (3) rotate;
Described outer picture frame (9) is installed in the hole of pedestal (1).
2. compound light beam according to claim 1 coarse-fine coupling scanning means is it is characterised in that the bottom of described pedestal (1) Face and plane-parallel.
3. compound light beam according to claim 1 coarse-fine coupling scanning means is it is characterised in that described first nylon cushion Block (13), the second nylon cushion block (15) and the 3rd nylon cushion block (24) all use in groups, play protection piece surface and buffering vibration isolation Effect.
4. compound light beam according to claim 1 coarse-fine coupling scanning means is it is characterised in that the bottom surface of pedestal (1) adds Work has one group of screw thread unthreaded hole, is used for securing the device to ground or guide rail.
5. compound light beam according to claim 1 coarse-fine coupling scanning means is it is characterised in that when using, using multiple The complete use of scanning means.
6. compound light beam according to claim 1 coarse-fine coupling scanning means is it is characterised in that described little rotary coding Device assembly (31) is used for detecting prism wedge deflection angle position, is installed on outer picture frame (9) and the first big bearing (ball) cover (6) Rotary encoder is used for detecting that prism wedge rotary angle position, described two rotary encoders and electric machine control system can be to sounds Circle motor and torque motor carry out open loop or closed loop control.
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CN108817775A (en) * 2018-08-06 2018-11-16 无锡奥特维科技股份有限公司 A kind of Telescopic rotating device and welding equipment
CN110031949A (en) * 2019-04-19 2019-07-19 同济大学 A kind of rotating mirror system of single power source driving polygon prism
WO2020062112A1 (en) * 2018-09-28 2020-04-02 深圳市大疆创新科技有限公司 Ranging assembly and movable platform
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure
CN111805531A (en) * 2020-06-30 2020-10-23 同济大学 Pipeline endoscopic robot
CN111880281A (en) * 2020-07-31 2020-11-03 同济大学 Optical axis adjusting device
CN112230239A (en) * 2020-07-31 2021-01-15 同济大学 Monitoring device based on optical axis refraction and reflection
CN113358070A (en) * 2021-07-07 2021-09-07 苏州鑫睿益荣信息技术有限公司 Automobile brake pad flatness and pin height detection system and detection method thereof
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CN114270163A (en) * 2019-10-15 2022-04-01 深圳市大疆创新科技有限公司 Inner rotor assembly testing system and movable platform
CN114791666A (en) * 2022-04-13 2022-07-26 哈尔滨工业大学 Compact biprism scanning device

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WO2018176291A1 (en) 2017-03-29 2018-10-04 SZ DJI Technology Co., Ltd. Hollow motor apparatuses and associated systems and methods
CN110383647A (en) * 2017-03-29 2019-10-25 深圳市大疆创新科技有限公司 Hollow motor apparatus and related system and method
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CN108817775A (en) * 2018-08-06 2018-11-16 无锡奥特维科技股份有限公司 A kind of Telescopic rotating device and welding equipment
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WO2020062112A1 (en) * 2018-09-28 2020-04-02 深圳市大疆创新科技有限公司 Ranging assembly and movable platform
CN110031949B (en) * 2019-04-19 2020-08-18 同济大学 Rotating mirror system for driving polygon prism by single power source
CN110031949A (en) * 2019-04-19 2019-07-19 同济大学 A kind of rotating mirror system of single power source driving polygon prism
CN114270163A (en) * 2019-10-15 2022-04-01 深圳市大疆创新科技有限公司 Inner rotor assembly testing system and movable platform
CN111650710A (en) * 2020-06-24 2020-09-11 嘉兴旭锐电子科技有限公司 Fine adjustment structure using wedge, pressing member thereof, and optical component using the fine adjustment structure
CN111650710B (en) * 2020-06-24 2024-02-06 嘉兴旭锐电子科技有限公司 Fine tuning structure using wedge-shaped sheet, pressing member and optical member
CN111805531A (en) * 2020-06-30 2020-10-23 同济大学 Pipeline endoscopic robot
CN111805531B (en) * 2020-06-30 2021-12-31 同济大学 Pipeline endoscopic robot
CN112230239A (en) * 2020-07-31 2021-01-15 同济大学 Monitoring device based on optical axis refraction and reflection
CN112230239B (en) * 2020-07-31 2022-07-05 同济大学 Monitoring device based on optical axis refraction and reflection
CN111880281A (en) * 2020-07-31 2020-11-03 同济大学 Optical axis adjusting device
RU2755587C1 (en) * 2020-09-24 2021-09-17 Федеральное государственное казенное военное образовательное учреждение высшего образования "ВОЕННАЯ АКАДЕМИЯ МАТЕРИАЛЬНО-ТЕХНИЧЕСКОГО ОБЕСПЕЧЕНИЯ имени генерала армии А.В. Хрулева" Laser reconnaissance apparatus
CN113358070B (en) * 2021-07-07 2023-03-28 苏州鑫睿益荣信息技术有限公司 Automobile brake pad flatness and pin height detection system and detection method thereof
CN113358070A (en) * 2021-07-07 2021-09-07 苏州鑫睿益荣信息技术有限公司 Automobile brake pad flatness and pin height detection system and detection method thereof
CN114791666A (en) * 2022-04-13 2022-07-26 哈尔滨工业大学 Compact biprism scanning device
CN114791666B (en) * 2022-04-13 2023-01-31 哈尔滨工业大学 Compact biprism scanning device

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