CN106404170A - Vacuum chamber cover plate device for spectrometer - Google Patents
Vacuum chamber cover plate device for spectrometer Download PDFInfo
- Publication number
- CN106404170A CN106404170A CN201610731728.0A CN201610731728A CN106404170A CN 106404170 A CN106404170 A CN 106404170A CN 201610731728 A CN201610731728 A CN 201610731728A CN 106404170 A CN106404170 A CN 106404170A
- Authority
- CN
- China
- Prior art keywords
- cover plate
- hole
- vacuum chamber
- seal member
- spectrogrph
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007789 sealing Methods 0.000 claims abstract description 20
- 239000012634 fragment Substances 0.000 claims description 10
- 229920001971 elastomer Polymers 0.000 claims 1
- 239000000806 elastomer Substances 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 2
- 230000008569 process Effects 0.000 abstract description 2
- 230000003139 buffering effect Effects 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0202—Mechanical elements; Supports for optical elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
Abstract
The invention discloses a vacuum chamber cover plate device for a spectrometer. The vacuum chamber cover plate device for the spectrometer comprises a cover plate, wherein a lower portion of the cover plate has a concave cover plate chamber, the cover plate chamber internally has convex supporting column, a lower portion of a first sealing part has a first sealing chamber, the first sealing part and the cover plate are connected with the convex supporting column and a matching through hole through a first connection member, a second sealing part is mounted in the first sealing chamber and is at a lower portion of the matching through hole, the matching through hole is sealed through a second connection member connected with the first sealing part, an elastic member is mounted on the first connection member or an outer wall of the convex supporting column, and the elastic member is arranged between the first connection member or the outer wall of the convex supporting column and an inner wall of the matching through hole. The device is advantaged in that the cover plate chamber, the convex supporting column, the elastic member, the first sealing part and the second sealing part are employed for matching, a buffering effect is realized during a vacuum pumping process when a cover plate structure bears force, so a sample chamber is not influenced by rapidly-changing pressure, and a to-be-detected sample is protected.
Description
Technical field
The invention belongs to mechanical field, more particularly, to one kind are used for spectrogrph vacuum chamber cover board arrangement.
Background technology
Need during spectrometer measurement to put into sample in vacuum cavity to measure, specific operation process is：Chamber cover plate
Open, inside and outside air communicates, and puts into sample, subsequent chamber cover plate is closed, start evacuation it is desirable to vacuum leakproofness is good, due to
Atmospheric pressure is very big, and mechanical mechanism bears very big pressure change；Simultaneously in order to protect sample, impact effect should be avoided as far as possible
Should, therefore in the urgent need to finding a kind of mechanical mechanism that can solve the problem that this problem.
Content of the invention
In view of this, need to overcome at least one of drawbacks described above of the prior art, the invention provides a kind of use
In spectrogrph vacuum chamber cover board arrangement.
Described one kind includes cover plate for spectrogrph vacuum chamber cover board arrangement, the first seal member, the second seal member；
Described cover plate bottom has recessed cover plate chamber, and described cover plate within the chamber has raised pillar；Described first seal member is installed
In described cover plate chamber interior, and with described projection pillar correspondence position, there is cooperation through hole, described first seal member bottom
There is first annular seal space room, described first seal member couples described projection pillar and institute with described cover plate by the first connector
State cooperation through hole to be coupled；Described second seal member is arranged on described first annular seal space interior and is located at described cooperation through hole
Bottom and the second connector described cooperation through hole of closing by coupling with described first seal member；Described first connector or
Described projection pillar position outer wall is provided with elastic component, and described elastic component is located at described first connector or described projection column sections
Between position outer wall and described cooperation through-hole wall, described cover plate carries out rotating folding by the axle positioned at itself one end.
According in this patent background technology, to described in prior art, prior art covering plate structure is single, when carrying out evacuation
When, due to the requirement of high leakproofness, mechanical covering plate structure needs to bear very big active force, and the easy deformation of rigid attachment is impaired, and
The change conference of pressure contrast impacts to sample；And vacuum chamber cover board arrangement disclosed by the invention, by using cover plate chamber
Room, raised pillar, the cooperation of elastic component, the first seal member and the second seal member so that during evacuation, cover plate
Have during structure stress a cushioning effect and can automatic adjusting position within the specific limits, enhance seal, simultaneously sample
Product chamber will not be subject to pressure influence jumpy, protect detected sample, therefore have clear advantage.
In addition, also there is following supplementary technology spy according to disclosed by the invention for spectrogrph vacuum chamber cover board arrangement
Levy：
Further, there is screwed hole in described projection pillar, described first connector is to have externally threaded connector, described bullet
Described first seal member is coupled with described cover plate by property part by described first connector.
Further, described elastic component is cylindrical elastic body or shell fragment.
Further, described shell fragment is dish-shaped shell fragment.
The use of dish-shaped shell fragment can allow has error absorption function between cover plate and the first seal member so that evacuation
When, automatically can carry out position adjustment so that vacuum sealing performance is more preferable between the first seal member and cover plate.
Further, the first annular seal space room of described first seal member is to have chamber that is downwardly open and having perisporium
Room, described perisporium top surface has perisporium seal groove.
Further, described perisporium seal groove is built with seal member.
Further, the first annular seal space room of described first seal member is to have chamber that is downwardly open and having perisporium
Room, forms described cooperation through hole and has through hole seal groove positioned at the indoor top surface of described first annular seal space.
Further, described through hole seal groove is built with seal member.
Alternatively, described seal member is sealing ring.
Preferably, described sealing ring is circular or X-type sealing ring for cross section.
The aspect that the present invention adds and advantage will be set forth in part in the description, and partly will become from the following description
Obtain substantially, or recognized by the practice of the present invention.
Brief description
The above-mentioned and/or additional aspect of the present invention and advantage will become from the following description of the accompanying drawings of embodiments
Substantially and easy to understand, wherein：
Fig. 1 is the schematic diagram for spectrogrph vacuum chamber cover board arrangement；
Fig. 2 is the generalized section for spectrogrph vacuum chamber cover board arrangement；
Fig. 3 is the enlarged diagram of part A in Fig. 2；
In figure, cover plate 100, cover plate chamber 101, raised pillar 102, axle 103, the first seal member 200, first annular seal space room
201, coordinate through hole 202, perisporium 203, perisporium seal groove 204, seal member 205, through hole seal groove 206, the first connector
300, elastic component 301, the second seal member 400, the second connector 401.
Specific embodiment
Embodiments of the invention are described below in detail, the example of described embodiment is shown in the drawings, wherein from start to finish
The element that same or similar label represents same or similar element or has same or like function；Below with reference to attached
The embodiment of figure description is exemplary, is only used for explaining the present invention, and is not construed as limiting the claims.
In describing the invention it is to be understood that term " on ", D score, " bottom ", " top ", "front", "rear",
The orientation of instruction such as " interior ", " outward ", " horizontal ", " erecting " or position relationship are based on orientation shown in the drawings or position relationship, are only
For the ease of the description present invention and simplification description, rather than the device of instruction or hint indication or element must have specific side
Position, with specific azimuth configuration and operation, be therefore not considered as limiting the invention.
In describing the invention, it should be noted that unless otherwise clearly defined and limited, term " connection ", " company
Logical ", should be interpreted broadly " being connected ", " connection ", " cooperation ", for example, it may be being fixedly connected, be integrally connected or
It is detachably connected；It can be the connection of two element internals；Can be to be joined directly together it is also possible to pass through the indirect phase of intermediary
Even；" cooperation " can be the cooperation that face is with face or the cooperation in point and face or line and face, also includes the cooperation of hole axle, right
For those of ordinary skill in the art, above-mentioned term concrete meaning in the present invention can be understood with concrete condition.
The inventive concept of the present invention is as follows, by using cover plate chamber, raised pillar, elastic component, the first seal member and
The cooperation of the second seal member is so that during evacuation, have a cushioning effect during covering plate structure stress, and sample
Chamber will not be subject to pressure influence jumpy, protect detected sample, therefore have clear advantage.
The present invention to be described below with reference to accompanying drawings, wherein Fig. 1 is the signal for spectrogrph vacuum chamber cover board arrangement
Figure；Fig. 2 is the generalized section for spectrogrph vacuum chamber cover board arrangement；Fig. 3 is the enlarged diagram of part A in Fig. 2.
As Figure 1-3, according to embodiments of the invention, described include for spectrogrph vacuum chamber cover board arrangement：Lid
Plate 100, the first seal member 200, the second seal member 400；Described cover plate 100 bottom has recessed cover plate chamber 101,
There is raised pillar 102 in described cover plate chamber 101；Described first seal member 200 is arranged on inside described cover plate chamber 101,
And with described projection pillar 102 correspondence position, there is cooperation through hole 202, it is close that described first seal member 200 bottom has first
Envelope chamber 201, described first seal member 200 couples described projection pillar with described cover plate 100 by the first connector 300
102 and described cooperation through hole 202 coupled；Described second seal member 400 be arranged in described first annular seal space room 201 and
Coordinate through hole 202 bottom and closed by the second connector 401 coupling with described first seal member 200 described positioned at described
Cooperation through hole 202；Described first connector 300 or described projection pillar 102 position outer wall are provided with elastic component 301, described bullet
Property part 301 be located at described first connector 300 or described projection pillar 102 position outer wall and described cooperation through hole 202 inwall it
Between, described cover plate 100 carries out rotating folding by the axle 103 positioned at itself one end.
According in this patent background technology, to described in prior art, prior art covering plate structure is single, when carrying out evacuation
When, due to the requirement of high leakproofness, mechanical covering plate structure needs to bear very big active force, and the change conference of pressure contrast is to sample
Product impact；And vacuum chamber cover board arrangement disclosed by the invention, by using cover plate chamber 101, raised pillar 102, bullet
The cooperation of property part 301, the first seal member 200 and the second seal member 400 so that during evacuation, covering plate structure
Have a cushioning effect during stress, and sample chamber will not be subject to pressure influence jumpy, protects detected sample,
Therefore there is clear advantage.
In addition, also there is following supplementary technology spy according to disclosed by the invention for spectrogrph vacuum chamber cover board arrangement
Levy：
According to some embodiments of the present invention, described elastic component 301 is cylindrical elastic body or shell fragment.
According to some embodiments of the present invention, shell fragment is dish-shaped shell fragment.
According to some embodiments of the present invention, the first annular seal space room 201 of described first seal member 200 is to have downwards
Opening and have the chamber of perisporium 203, described perisporium 203 top surface has perisporium seal groove 204.
According to some embodiments of the present invention, described perisporium seal groove 204 is built with seal member 205.
According to some embodiments of the present invention, the first annular seal space room 201 of described first seal member 200 is to have downwards
Opening and have the chamber of perisporium 203, forms the top surface tool that described cooperation through hole 202 is located in described first annular seal space room 201
There is through hole seal groove 206.
According to some embodiments of the present invention it is characterised in that described through hole seal groove 206 is built with seal member 205.
According to some embodiments of the present invention, described seal member 205 is sealing ring.
According to some embodiments of the present invention, described sealing ring is circular seal ring or X-shaped sealing ring for cross section.
Any refer to " embodiment ", " embodiment ", " illustrative examples " etc. mean with reference to this embodiment description
Concrete component, structure or feature are contained at least one embodiment of the present invention；Schematic in this specification everywhere this
Statement is not necessarily referring to identical embodiment；And, when describing concrete component, structure or feature with reference to any embodiment
When, advocated, realize such component, structure or feature in conjunction with other embodiments and all fall within those skilled in the art
Within the scope of.
Although the multiple illustrative examples with reference to the present invention have carried out detailed retouching to the specific embodiment of the present invention
State, it must be understood that those skilled in the art can be designed that multiple other improvement and embodiment, these improve and implement
Example will fall within spirit and scope；Specifically, in the scope of aforementioned disclosure, accompanying drawing and claim
Within, rational modification and improvement can be made in terms of the arrangement of parts and/or sub-combination layout, without departing from
The spirit of the present invention；Except modification and the improvement of parts and/or layout aspect, its scope by claims and its is equal to
Thing limits.
Claims (10)
1., for spectrogrph vacuum chamber cover board arrangement it is characterised in that inclusion cover plate, the first seal member, second is close for one kind
Envelope part；
Described cover plate bottom has recessed cover plate chamber, and described cover plate within the chamber has raised pillar；
Described first seal member is arranged on described cover plate chamber interior, and to have cooperation logical with described projection pillar correspondence position
Hole, described first seal member bottom has first annular seal space room, and described first seal member passes through first with described cover plate
Fitting connection described projection pillar and described cooperation through hole are coupled；
Described second seal member be arranged on described first annular seal space indoor and be located at described cooperation through hole bottom and by with institute
The second connector stating the first seal member connection closes described cooperation through hole；
Described first connector or described projection pillar position outer wall are provided with elastic component, and described elastic component is located at described first
Between fitting or described projection pillar position outer wall and described cooperation through-hole wall, described cover plate is by the axle positioned at itself one end
Carry out rotating folding.
2. according to claim 1 for spectrogrph vacuum chamber cover board arrangement it is characterised in that
There is screwed hole, described first connector is to have externally threaded connector, and described elastic component passes through in described projection pillar
Described first seal member is coupled by described first connector with described cover plate.
3. according to claim 1 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described elastic component be circle
Cylindrical elastomer or shell fragment.
4. according to claim 3 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described shell fragment be dish
Shell fragment.
5. according to claim 1 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described first sealing
The first annular seal space room of part is to have chamber that is downwardly open and having perisporium, and described perisporium top surface has perisporium seal groove.
6. according to claim 5 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described perisporium seal groove
Built with seal member.
7. according to claim 1 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described first sealing
The first annular seal space room of part is to have chamber that is downwardly open and having perisporium, forms described cooperation through hole close positioned at described first
The top surface of envelope within the chamber has through hole seal groove.
8. according to claim 7 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described through hole seal groove
Built with seal member.
9. according to claim 6,8 any one for spectrogrph vacuum chamber cover board arrangement it is characterised in that described close
Envelope part is sealing ring.
10. according to claim 9 for spectrogrph vacuum chamber cover board arrangement it is characterised in that described sealing ring is
Cross section is circular or X-type sealing ring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610731728.0A CN106404170B (en) | 2016-08-26 | 2016-08-26 | One kind being used for spectrometer vacuum chamber cover board arrangement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610731728.0A CN106404170B (en) | 2016-08-26 | 2016-08-26 | One kind being used for spectrometer vacuum chamber cover board arrangement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106404170A true CN106404170A (en) | 2017-02-15 |
| CN106404170B CN106404170B (en) | 2018-10-09 |
Family
ID=58004856
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610731728.0A Active CN106404170B (en) | 2016-08-26 | 2016-08-26 | One kind being used for spectrometer vacuum chamber cover board arrangement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106404170B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6040927A (en) * | 1983-08-15 | 1985-03-04 | Shimadzu Corp | Interference spectroscope in infrared region |
| CN202018430U (en) * | 2011-03-17 | 2011-10-26 | 东莞市善时电子科技有限公司 | X-ray fluorescence spectrometer |
| CN202264465U (en) * | 2011-08-30 | 2012-06-06 | 钧腾科技有限公司 | Vacuum platform mechanism for laminating machine |
| CN104007133A (en) * | 2014-06-13 | 2014-08-27 | 苏州科德溯源仪器有限公司 | X-ray fluorescence spectrograph |
| CN204359715U (en) * | 2014-12-16 | 2015-05-27 | 韩晓朋 | The hermetically-sealed construction of x-ray fluorescence spectrometry instrument sample cup and vacuum chamber |
-
2016
- 2016-08-26 CN CN201610731728.0A patent/CN106404170B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6040927A (en) * | 1983-08-15 | 1985-03-04 | Shimadzu Corp | Interference spectroscope in infrared region |
| CN202018430U (en) * | 2011-03-17 | 2011-10-26 | 东莞市善时电子科技有限公司 | X-ray fluorescence spectrometer |
| CN202264465U (en) * | 2011-08-30 | 2012-06-06 | 钧腾科技有限公司 | Vacuum platform mechanism for laminating machine |
| CN104007133A (en) * | 2014-06-13 | 2014-08-27 | 苏州科德溯源仪器有限公司 | X-ray fluorescence spectrograph |
| CN204359715U (en) * | 2014-12-16 | 2015-05-27 | 韩晓朋 | The hermetically-sealed construction of x-ray fluorescence spectrometry instrument sample cup and vacuum chamber |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106404170B (en) | 2018-10-09 |
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