CN1063558A - Property measuring instrument for semiconductor devices - Google Patents
Property measuring instrument for semiconductor devices Download PDFInfo
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- CN1063558A CN1063558A CN 91100540 CN91100540A CN1063558A CN 1063558 A CN1063558 A CN 1063558A CN 91100540 CN91100540 CN 91100540 CN 91100540 A CN91100540 A CN 91100540A CN 1063558 A CN1063558 A CN 1063558A
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Abstract
A kind of property measuring instrument for semiconductor devices, comprise generation circuit of scanning signals, stairstep signal produces circuit, electric current, tension measuring circuit and characteristic display device etc., have the measuring transmission loss operational amplifier especially, spurious oscillation suppresses circuit and unique function conversion control circuit novel in design.This device can directly illustrate semiconductor three ends or the six groups of standard feature of twoport device (or network) and the i-v characteristic of various types of semiconductor two-terminal devices that comprises forward and reverse transport property, the spurious oscillation that occurs in the time of suppressing the negative resistance device characteristic test effectively, compact conformation, multiple functional, reliable operation, easy and simple to handle, be a kind of novel semiconductor device characteristic testing tool.
Description
The invention belongs to the proving installation of semiconductor devices and resistive two-port network characteristic.
Conventional semiconductor device property proving installation, representational in the world is the Type 576Curve Tracer that U.S. Tekt-ronix company produces, Type 577 Curve Tracer; Home products is a QT2 transistor npn npn characteristic demonstrator etc.Domestic and international existing this class graphic instrument, its principle of work is roughly the same, all be that the voltage source that is respectively positive and negative half-wave sine wave with waveform is the test scan signal, staircase voltage source and current source with positive and negative ladder are control signal, the electric current of the voltage at measured device two ends and the corresponding port of flowing through is measured by voltage, current testing circuit respectively, be added to the horizontal channel and the vertical channel of display device then respectively, the characteristic with measured device on fluorescent screen shows with curve form.This class graphic instrument is the i-v characteristic of test voltage control type semiconductor two-terminal device and input, the output characteristic curve family of three ends or twoport device directly, and the characteristic that can only show poincare half plane or lower half-plane respectively, and the direct i-v characteristic of measuring current control type semiconductor two-terminal device, particularly can not measuring semiconductor three ends or the forward and reverse transport property of twoport device (or network).At present, direct test to the forward and reverse transport property of semiconductor three ends or twoport device (or network), still semiconductor device characteristic method of testing and a technical long-standing difficult problem and blank in the world, thereby semiconductor devices manufacturer brings inconvenience from failing to provide at its product manual the forward and reverse transfer curve family and the relevant parameters of the relevant device that directly records to the relevant device of correct use.Simultaneously, the above-mentioned semiconductor device characteristic tester, when the characteristic of test negative-resistance device, the system that test circuit and tested negative-resistance device constitute usually is easy to generate vibration, in case this oscillatory occurences takes place, the most interested negative resistance section of tested family curve just thickens unclear, and test job can't normally be carried out.
The objective of the invention is at the existing problem of existing semiconductor device tester, the direct test voltage control type of a kind of energy, current-control type are proposed and neither voltage-controlled, the input of the i-v characteristic of the mixed type semiconductor two-terminal device of non-Flow Control and semiconductor three ends or twoport device (or network) again, semiconductor devices (or network) characteristic test device of six groups of standard feature families of curves (its six groups of standard feature expressions are as shown in Table 1) such as output characteristics and forward and reverse transport property.Further purpose of the present invention also is to design a kind of semiconductor devices (or network) characteristic tester that spurious oscillation suppresses circuit that has, the oscillatory occurences that occurs when being suppressed at test negative-resistance device characteristic effectively makes that the negative resistance property of this device is stable clearly to be shown in proving installation.
Purpose of the present invention can realize by the design proposal that circuit block diagram shown in Figure 1 constitutes, comprise in the Design of device scheme: one produces output waveform for just, the generation circuit of scanning signals of negative half-wave or the sinusoidal wave sweep signal of all-wave, a stairstep signal generation circuit that produces output waveform by the step signal of positive ladder or negative stepped change, and electric current, tension measuring circuit and display device etc., the test signal (sweep signal and step signal) that generation circuit of scanning signals and stairstep signal is produced circuit (common name test signal source circuit) output is input to the relevant port of measured device (or network), electric current to be measured and voltage on the measured device corresponding port are sent to electric current, tension measuring circuit is measured, again with electric current, the output signal of tension measuring circuit is sent to the family curve of display device with the diagram measured device, the sweep signal that said generation circuit of scanning signals produces comprises voltage source sweep signal Vs(t) and current source sweep signal Is(t), the step signal that stairstep signal produces the circuit generation comprises voltage source stairstep signal Vst and current source stairstep signal Ist; In device, also be provided with the measuring transmission loss operational amplifier, spurious oscillation suppresses circuit and function conversion control circuit, the function conversion control circuit has some control ports, be connected to generation circuit of scanning signals, stairstep signal respectively and produce the input end of the output terminal of circuit and electric current, tension measuring circuit, and the test combination hub of can peg graft semiconductor two ends and three ends or twoport device (or network) patch port.In order to or Vs(t), step signal Ist or Vst to the type (sweep signal Is(t) of input test signal) and the connected mode of test circuit switch to form the test mode of each semiconductor devices to be measured (or network) characteristic.Measuring transmission loss operational amplifier and spurious oscillation suppress circuit and also receive in the function conversion control circuit respectively, the measuring transmission loss operational amplifier can be received between testing source output in the test circuit of device and the measured device transport property with measuring semiconductor three ends or twoport device (or network) by the function conversion control circuit, spurious oscillation suppresses circuit and is connected in the test circuit of device by the function conversion control circuit, and the sweep signal of input is added on the corresponding port of measured device (or network) through spurious oscillation inhibition circuit earlier again.
Measuring transmission loss operational amplifier of the present invention is usually with an operational amplifier that works in linear segments, when the transport property of measuring semiconductor three ends or twoport device (or network), switch by the function conversion control circuit, make Is(t) or Ist be added on the port of measured device through the inverting input of measuring transmission loss operational amplifier, Vst or Vs(t) be added on the same port of measured device through the in-phase input end of measuring transmission loss operational amplifier, the output terminal of measuring transmission loss operational amplifier is linked another port of measured device, while and electric current, the input end of tension measuring circuit is connected, when measuring other characteristics of semiconductor body (or network), this measuring transmission loss operational amplifier switches by the function conversion control circuit and breaks away from test macro, and its homophase, inverting input disturbs with preventing generation with the introducing of cutting off other signals respectively by ground resistance earth.
The task of electric current of the present invention, tension measuring circuit is to measure the electric current of the voltage at measured device (or network) two ends and the corresponding port of flowing through, it can be made of (input end of current measurement passage is measured after should earlier tested current conversion being become voltage again) two identical metering circuit passages, and x, the y input end of characteristic display device are delivered in the output of two measurement passages respectively.Characteristic display device (being oscillograph) can be combined into one with whole proving installation, also can adopt independent dual beam oscilloscope, at this moment the remainder of proving installation is dressed up a proving installation independently, and two outputs of the electric current in this device, voltage measurement passage are delivered to x, the y input end of external dual beam oscilloscope with lead, the function of utilizing dual beam oscilloscope shows the characteristic of measured device on fluorescent screen with curve form.
Generation circuit of scanning signals of the present invention can produce circuit, waveform transformation circuit, current source sweep signal circuit and voltage source sweep signal circuit by sinusoidal signal and form, the sinusoidal signal of sinusoidal signal generation circuit output is added to the input end of waveform transformation circuit, the waveform transformation circuit is exported the input end that positive and negative half-wave or all-wave sine voltage are added to current source sweep signal circuit and voltage source sweep signal circuit simultaneously, current source sweep signal circuit output current source sweep signal Is(t).Voltage source sweep signal circuit output voltage source sweep signal Vs(t), Is(t) and Vs(t) receive the control port of function conversion control circuit respectively with on the respective terminal that is added to measured device.
Stairstep signal of the present invention produces circuit can produce circuit by sinusoidal signal, the ladder wave generation circuit, the waveform transformation circuit, staircase voltage source circuit and staircase waveform current source circuit are formed, the sinusoidal signal that is produced circuit output by sinusoidal signal is added to staircase waveform generation circuit input end, the staircase voltage signal of ladder wave generation circuit output carries out waveform transformation by the waveform transformation circuit, the stairstep signal of output plus or minus is added to the input end of staircase voltage source circuit, the output of staircase voltage source circuit divides two-way, one the tunnel is added to the corresponding controling end mouth of function conversion control circuit as voltage source stairstep signal Vst, another road is added to the input end of staircase waveform current source circuit, the output of staircase waveform current source circuit just, negative staircase waveform current source signal is carried out Polarity Control by the waveform transformation circuit again, and output is added to the corresponding controling end mouth of function conversion control circuit by the current source stairstep signal Ist of positive ladder or negative stepped change.
Measuring transmission loss operational amplifier of the present invention, it is an operational amplifier that works in linear segments, this amplifier has been realized singular circuit element nullator and has not been had and decide simulating of device, utilize nullator and nothing to decide the peculiar i-v characteristic of device, realized a current source and a voltage source are added on the same port of tested semiconductor three ends or twoport device (or network) simultaneously, and on another port, the characteristic of measured device is not introduced any additional influence again because of the access of metering circuit, thus can be just with semiconductor three ends or twoport device (or network), backward transfer character directly diagram is come out.At measuring semiconductor three ends or twoport device (or network) just, during the inverse current transport property, the current source sweep signal Is(t of current source sweep signal circuit output) inverting input through function conversion control circuit and measuring transmission loss operational amplifier is added on the port of measured device, meanwhile, the staircase voltage Vst of staircase voltage source output is added on the same port of measured device through the in-phase input end of function conversion control circuit and measuring transmission loss operational amplifier, at measuring semiconductor three ends or twoport device (or network) just, during the reverse voltage transport property, the voltage source sweep signal Vs(t of voltage source sweep signal circuit output) in-phase input end through function conversion control circuit and measuring transmission loss operational amplifier is added on the port of measured device, meanwhile, staircase waveform current source signal Ist is added on the same port of measured device by the in-phase input end of function conversion control circuit and measuring transmission loss operational amplifier.In above-mentioned measuring transmission loss, electric current, tension measuring circuit that voltage on another port of measured device or the electric current that flows through are connected by the output terminal with the measuring transmission loss operational amplifier are measured.
Spurious oscillation of the present invention suppresses circuit can comprise that the current control device spurious oscillation suppresses circuit and the voltage-controlled device spurious oscillation suppresses circuit.The current control device spurious oscillation suppress circuit by with current source sweep signal Is(t) variable resistor R in parallel
p, change-over switch and one group of inductance (contain the null situation of inductance, can connect external inductance in case of necessity) R
pWith Is(t) in parallel after, connect with any inductance (or external inductance) in the inductive bank by change-over switch, receive the corresponding port of measured device again, when spurious oscillation appears in measuring current control type negative-resistance device characteristic, regulate R
p(or) select suitable inductance value in the tandem electric inductance group by change-over switch, spurious oscillation is suppressed and disappears.The voltage-controlled device spurious oscillation suppress circuit by with voltage source sweep signal Vs(t) variable resistor Rs, change-over switch and one group of electric capacity of connecting (contains the null situation of electric capacity, can connect external capacitor in case of necessity) form, Rs and Vs(t) connect after, by change-over switch be added to again on the corresponding port of measured device after any electric capacity (or external capacitor) in the capacitance group is in parallel.When spurious oscillation appears in test voltage control type negative electricity group characteristic, regulate Rs and (or) by change-over switch select with capacitance group in suitable capacitance, spurious oscillation is suppressed and disappears.Above-mentioned spurious oscillation suppresses circuit can be suppressed at the spurious oscillation that occurs when testing the negative-resistance device characteristic effectively, and test circuit is stably worked, and records stable negative-resistance device characteristic clearly.
Function conversion control circuit of the present invention can be (as SW by some change-over switches
1, SW
2And SW
3) and pilot relay (as J
1, J
2, J
3And J
4) ON-OFF control circuit formed, its feature is by simple switching manipulation, realize measurable flow control type, voltage-controlled type and neither the i-v characteristic of the non-again voltage-controlled mixed type semiconductor two-terminal device of Flow Control and six groups of switchings of the metering circuit connection status of totally 12 kinds of standard feature of three ends or twoport device (or network).Promptly when carrying out each feature measurement, the function conversion control circuit is input to required test signal the corresponding port of measured device, and the measured parameter that measured device is exported is transferred to corresponding electric current, tension measuring circuit, meanwhile, cut off the power supply of idle circuit and with its input end grounding, to get rid of issuable interference.
By the property measuring instrument for semiconductor devices that circuit provided by the present invention constituted, novel, the ingenious uniqueness of structure, test function is complete, working stability is reliable, become and to measure comprehensively and directly to illustrate voltage-controlled type, current-control type and mixed type semiconductor two-terminal device comprise the i-v characteristic of negative-resistance device and as the input of described semiconductor three ends of the listed expression of table 1 or twoport device (or network), the novel semi-conductor device property proving installation of six groups of standard feature families of curves such as output characteristics and forward and reverse transport property.
Table 1 is six groups of standard physical characteristic expressions of semiconductor three ends or twoport device (or network);
Fig. 1 is a way circuit block diagram of the present invention;
Fig. 2 is the physical circuit block diagram of the embodiment of the invention.
Below in conjunction with description of drawings embodiment of the invention CONSTRUCTED SPECIFICATION:
As shown in Figure 2, present embodiment comprises by sinusoidal signal generation circuit (1), waveform transformation circuit (2), the generation circuit of scanning signals that current source sweep signal circuit (3) and voltage source sweep signal circuit (4) are formed and produce circuit (1) by sinusoidal signal, ladder wave generation circuit (5), waveform transformation circuit (2), the stairstep signal that staircase voltage source circuit (6) and staircase waveform current source circuit (7) are formed produces circuit, electric current, tension measuring circuit (8), (9), measuring transmission loss operational amplifier (10), spurious oscillation suppresses circuit (11), function conversion control circuit (12), has a, b, the device (or network) of three plug receptacles of c is tested combination hub (13) and the power circuit (14) that makes the needed direct supply of relevant circuit operate as normal is provided for whole graphic instrument, the characteristic display device of present embodiment adopts independently external dual beam oscilloscope, electric current, tension measuring circuit (8), (9) external dual beam oscilloscope x.y input end is delivered in output respectively, and the function of utilizing dual beam oscilloscope shows the characteristic of measured device on video screen with curve form.Current source sweep signal Is(t by current source sweep signal circuit (3) output), the voltage source sweep signal Vs(t of voltage source sweep signal circuit (4) output), the voltage source stairstep signal Vst of staircase voltage source (6) output and be added to the corresponding controling end mouth of function conversion control circuit (12) by the current source stairstep signal Ist that staircase waveform current source (7) output signal is undertaken exporting after the Polarity Control by waveform transformation circuit (2) respectively, the test combination hub has a, b, three plug receptacles of c, C mouth ground connection wherein, a, the b mouth is received the corresponding controling end mouth of function conversion control circuit (12) respectively.Article two, the input end of virtually completely identical metering circuit channel current, tension measuring circuit (8), (9) is also received the corresponding controling end mouth of function conversion control circuit (12) respectively, has the current measurement resistance (R that current conversion becomes voltage before the input end of electric current, tension measuring circuit (8), (9) respectively
3-R
6) and (R
7-R
10) respectively by change-over switch SW
4And SW
5Select range.Measurement of transmission characterist operational amplifier (10) is an operational amplifier that works in linear segments, and its in-phase input end, inverting input and output terminal also are connected on function conversion control circuit (12) control corresponding port, resistance R
1And R
2Be two stake resistances that can be connected on measurement of transmission characterist operational amplifier homophase and inverting input respectively.Suppress in the circuit (11), in spurious oscillation with Is(t) variable resistor R in parallel
pWith change-over switch SW
6And inductive bank L
1-L
6With external inductance socket L
0Constitute the current control device spurious oscillation and suppress circuit, with Vs(t) the variable resistor R that connects
5, change-over switch SW
7And capacitance group C
1-C
6With external capacitor socket C
0Constitute the voltage-controlled device spurious oscillation and suppress circuit.Function conversion control circuit (12) is mainly by one three cutter, six bit switch SW
1, double-pole three-position switch SW
2And SW
3The pilot relay J of Pei Heing with it
1, J
2, J
3, J
4And respective lines constitutes SW
1Six positions correspond respectively to six groups of standard feature measure describing semiconductor three ends or twoport device (or network), it cooperates with pilot relay, when a certain group of characteristic of test, automatically will test needed sweep signal of this group characteristic and stairstep signal and be added to the measured device corresponding ports, cut off the power supply of the sweep signal circuit of not using simultaneously, and with the input end grounding of this circuit, SW
3With pilot relay J
3, J
4Cooperate, on the one hand, the input end of electric current, tension measuring circuit (8), (9) is linked on the relevant port of measured device, to measure the voltage on this port or to flow through the electric current of this port; On the other hand, when the input of the i-v characteristic of measuring the semiconductor two-terminal device and three ends or twoport device (or network), output characteristics, utilize resistance R
1, R
2Homophase and reverse inter-input-ing ending grounding with measuring transmission loss operational amplifier IC, to prevent to introduce undesired signal, and just measuring semiconductor three ends or twoport device (or network), during backward transfer character, sweep signal is added on the relevant port of measured device with inverting input with the homophase of stairstep signal by measurement of transmission characterist operational amplifier IC, and when measuring the curtage transport property, allow electric current, tension measuring circuit (8), (9) be in curtage simultaneously and measure state, to measure the curtage of input end and output terminal respectively.Double-pole three-position switch SW
2In order to the type of control measured device characteristic, its primary importance (among Fig. 2 from top to bottom) is corresponding to the i-v characteristic of measuring the semiconductor two-terminal device and the input-output characteristic curve family of three ends or twoport device (or network); Second, third position corresponds respectively to the electric current and the voltage-transfer characteristic curve family of measuring semiconductor three ends or twoport device (or network).Double-pole three-position switch SW
3Be added to sweep signal and stairstep signal on the measured device in order to switching, its primary importance (calculating from left to right among Fig. 2) is in order to measure the i-v characteristic of semiconductor two-terminal device, the second place is corresponding to input characteristics or the forward characteristic of measuring semiconductor three ends or twoport device (or network), and the 3rd position is corresponding to output characteristics or the backward transfer character of measuring semiconductor three ends or twoport device (or network).
Claims (7)
1, a kind of property measuring instrument for semiconductor devices, comprising: one produces output waveform for just, the generation circuit of scanning signals of negative half-wave or all-wave sine wave, a stairstep signal generation circuit that produces output waveform by the step signal of positive ladder or negative stepped change, and electric current, tension measuring circuit and display device etc., the test signal (sweep signal and step signal) of generation circuit of scanning signals and the output of stairstep signal generation circuit is input to the relevant port of measured device (or network), electric current to be measured and voltage on the measured device corresponding port are sent to electric current, tension measuring circuit is measured, again with electric current, the output signal of tension measuring circuit is sent to the family curve of display device with the diagram measured device, it is characterized in that having the measuring transmission loss operational amplifier in the device, spurious oscillation suppresses circuit and function conversion control circuit, the sweep signal that said generation circuit of scanning signals produces comprises voltage source sweep signal Vs (t) and current source sweep signal Is (t), the step signal that stairstep signal produces the circuit generation comprises voltage source stairstep signal Vst and current source stairstep signal Ist, the function conversion control circuit switches to form the test mode of each semiconductor devices to be measured (or network) characteristic the type of input test signal and the connected mode of test circuit, the measuring transmission loss operational amplifier can be received between testing source output in the device to test circuit and the measured device transport property with measuring semiconductor three ends or twoport device (or network) by the function conversion control circuit, spurious oscillation suppresses circuit and is connected in the test circuit of device by the function conversion control circuit, makes the sweep signal of input suppress to be added on the corresponding port of measured device (or network) behind the circuit through spurious oscillation earlier again.
2, by the described property measuring instrument for semiconductor devices of claim 1, it is characterized in that said measuring transmission loss operational amplifier is an operational amplifier that works in linear segments, when the transport property of measuring semiconductor three ends or twoport device (or network), switch by the function conversion control circuit, Is(t) or Ist, inverting input through the measuring transmission loss operational amplifier is added on the port of measured device, Vst or Vs(t) be added on the same port of measured device through the in-phase input end of measuring transmission loss operational amplifier, the output terminal of measuring transmission loss operational amplifier is linked the another port of measured device, while and electric current, the input end of tension measuring circuit is connected; When measuring other characteristics of semiconductor devices (or network), this measuring transmission loss operational amplifier switches by the function conversion control circuit and breaks away from test macro, and its homophase, inverting input pass through ground resistance earth respectively.
3, by the described property measuring instrument for semiconductor devices of claim 1, it is characterized in that described generation circuit of scanning signals produces circuit (1) by sinusoidal signal, waveform transformation circuit (2), current source sweep signal circuit (3) and voltage source sweep signal circuit (4) are formed, the sinusoidal signal of sinusoidal signal generation circuit (1) output is added to the input end of waveform transformation circuit (2), waveform transformation circuit (2) output just, negative half-wave or all-wave sine voltage are added to the input end of current source sweep signal circuit (3) and voltage source sweep signal circuit (4) simultaneously, current source sweep signal circuit (3) output current source sweep signal Is(t), voltage source sweep signal circuit (4) output voltage source sweep signal Vs(t).
4, by the described semiconductor device testing apparatus of claim 1, it is characterized in that said stairstep signal produces circuit and produces circuit (1) by sinusoidal signal, ladder wave generation circuit (5), waveform transformation circuit (2), staircase voltage source circuit (6) and staircase waveform current source circuit (7) are formed, be added to the input end of ladder wave generation circuit (5) by the sinusoidal signal of sinusoidal signal generation circuit (1) output, the staircase voltage signal of ladder wave generation circuit (5) output carries out waveform transformation by waveform transformation circuit (2), the stairstep signal of output plus or minus is added to the input end of staircase voltage source circuit (6), the output of staircase voltage source circuit (6) divides two-way, one the tunnel is added to the corresponding controling end mouth of function conversion control circuit as voltage source stairstep signal Vst, another road is added to the input end of staircase waveform current source circuit (7), staircase waveform current source circuit (7) output just, negative staircase waveform current source signal is carried out Polarity Control by waveform transformation circuit (2) again, and output is added to the corresponding controling end mouth of function conversion control circuit by the current source stairstep signal Ist of positive ladder or negative stepped change.
5, by the described property measuring instrument for semiconductor devices of claim 1, it is characterized in that said function conversion control circuit mainly comprises change-over switch SW
1, SW
2And SW
3And pilot relay J
1, J
2, J
3And J
4, SW
1The pilot relay J of Pei Heing with it
1And J
2, and SW
3Sweep signal and the stairstep signal be added to the relevant port of measured device switched in control, cuts off the power supply of the sweep signal circuit of not using simultaneously, and with the input end grounding of this circuit, SW
2The pilot relay J of Pei Heing with it
3And J
4The connecting mode of control switch current, tension measuring circuit input end and the relevant port of measured device so as the voltage of the relevant port of measurement measured device or (with) electric current.
6, by the described characteristic of semiconductor proving installation of claim 4, it is characterized in that said change-over switch SW
1Be six change-over switches of three cuttves, SW
2And SW
3Be three change-over switches of double-pole.
7, by the described property measuring instrument for semiconductor devices of claim 1, it is characterized in that said spurious oscillation suppresses circuit and comprises that the current control device spurious oscillation suppresses circuit and the voltage-controlled device spurious oscillation suppresses circuit, the current control device spurious oscillation suppress circuit by with current source sweep signal Is(t) variable resistor R in parallel
p, change-over switch SW
4And one group of inductance (can connect external inductance in case of necessity) is formed R
pWith Is(t) in parallel after, pass through SW
4Connect with any inductance in the inductive bank (or external inductance), receive the corresponding port of measured device again, the voltage-controlled device spurious oscillation suppress circuit by with voltage source sweep signal Vs(t) the variable resistor Rs, the change-over switch SW that connect
5And one group of electric capacity (can connect external capacitor in case of necessity) is formed Rs and Vs(t) connect after, pass through SW
5Be added to again on the corresponding port of measured device after any electric capacity (or external capacitor) in the capacitance group is in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100540 CN1032983C (en) | 1991-01-26 | 1991-01-26 | Property measuring instrument for semiconductor devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 91100540 CN1032983C (en) | 1991-01-26 | 1991-01-26 | Property measuring instrument for semiconductor devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1063558A true CN1063558A (en) | 1992-08-12 |
| CN1032983C CN1032983C (en) | 1996-10-09 |
Family
ID=4904680
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 91100540 Expired - Fee Related CN1032983C (en) | 1991-01-26 | 1991-01-26 | Property measuring instrument for semiconductor devices |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1032983C (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443912C (en) * | 2004-08-31 | 2008-12-17 | 国际商业机器公司 | Method and apparatus for measuring transfer characteristics of a semiconductor device |
| CN101888177A (en) * | 2009-05-12 | 2010-11-17 | 横河电机株式会社 | Power supply and semiconductor test device using the same |
| CN108318783A (en) * | 2018-02-06 | 2018-07-24 | 国网四川省电力公司电力科学研究院 | A kind of current transformer traveling wave progress of disease model and its construction method |
| CN109298307A (en) * | 2018-09-26 | 2019-02-01 | 广西桂芯半导体科技有限公司 | Semiconductor packages detection system |
| CN110045259A (en) * | 2019-03-28 | 2019-07-23 | 武汉市毅联升科技有限公司 | A kind of LD-TO device aging system |
| CN110426581A (en) * | 2019-08-02 | 2019-11-08 | 湘潭大学 | A kind of photoelectrical coupler radiation effect test macro and test method |
-
1991
- 1991-01-26 CN CN 91100540 patent/CN1032983C/en not_active Expired - Fee Related
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100443912C (en) * | 2004-08-31 | 2008-12-17 | 国际商业机器公司 | Method and apparatus for measuring transfer characteristics of a semiconductor device |
| CN101888177A (en) * | 2009-05-12 | 2010-11-17 | 横河电机株式会社 | Power supply and semiconductor test device using the same |
| CN108318783A (en) * | 2018-02-06 | 2018-07-24 | 国网四川省电力公司电力科学研究院 | A kind of current transformer traveling wave progress of disease model and its construction method |
| CN108318783B (en) * | 2018-02-06 | 2023-11-28 | 国网四川省电力公司电力科学研究院 | Current transformer traveling wave transformation model and construction method thereof |
| CN109298307A (en) * | 2018-09-26 | 2019-02-01 | 广西桂芯半导体科技有限公司 | Semiconductor packages detection system |
| CN110045259A (en) * | 2019-03-28 | 2019-07-23 | 武汉市毅联升科技有限公司 | A kind of LD-TO device aging system |
| CN110045259B (en) * | 2019-03-28 | 2021-01-05 | 武汉市毅联升科技有限公司 | LD-TO device aging system |
| CN110426581A (en) * | 2019-08-02 | 2019-11-08 | 湘潭大学 | A kind of photoelectrical coupler radiation effect test macro and test method |
| CN110426581B (en) * | 2019-08-02 | 2021-10-08 | 湘潭大学 | Photoelectric coupler radiation effect testing method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1032983C (en) | 1996-10-09 |
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