CN106350764B - Controlled atmosphere thin layer carburizing technique - Google Patents

Controlled atmosphere thin layer carburizing technique Download PDF

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Publication number
CN106350764B
CN106350764B CN201611066871.9A CN201611066871A CN106350764B CN 106350764 B CN106350764 B CN 106350764B CN 201611066871 A CN201611066871 A CN 201611066871A CN 106350764 B CN106350764 B CN 106350764B
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argon gas
carburizing
titanium alloy
technique
operating pressure
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CN106350764A (en
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徐加军
杨利
王伟
田绍洁
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Zhangjiakou Haosheng Machinery Manufacturing Co ltd
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DDA SHENGJIE VACUUM TECHNIQUES DEVELOP Co Ltd
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/36Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases using ionised gases, e.g. ionitriding
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)

Abstract

The present invention relates to a kind of controlled atmosphere thin layer carburizing techniques, belong to field of metal material surface treatment.The present invention carries out Carburization Treatment using surface of the plasma carburising method to titanium alloy, and for this method using titanium alloy as workpiece pole, the voltage of workpiece pole is 350~400V, and the carburizing temperature of workpiece pole is 900~1000 DEG C;Using graphite as source electrode, the voltage of source electrode is 750~900V;Using argon gas as carrier gas, control the operating pressure of argon gas in 0.1Pa~30Pa, and with carburization process carry out be gradually reduced the operating pressure of argon gas.Partial pressure of this method by control carrier gas argon gas in vacuum drying oven, so that the rate of carburizing is controlled, the carburized layer intensity having the same at each thickness for being, and then promote the intensity of entire carburized surface.

Description

Controlled atmosphere thin layer carburizing technique
Technical field
The present invention relates to a kind of controlled atmosphere thin layer carburizing techniques, belong to field of metal material surface treatment.
Background technique
The alloy that other alloying elements form is added by matrix of titanium and is referred to as titanium alloy.Titanium alloy is a kind of new structure material Material, it has excellent comprehensive performance, if density is small, specific strength and, fatigue strength and resistance to crack extension energy higher than fracture toughness Power is good, low-temperature good toughness, and etch resistant properties are excellent.Therefore, it is obtained increasingly in industrial departments such as Aeronautics and Astronautics, chemical industry, shipbuildings It is widely applied, development is swift and violent.Due to titanium and its excellent etch resistant properties of alloy, good mechanical property, and qualified group Compatibility is knitted, the biomaterials such as production prosthetic appliance are also particularly suitable.Meanwhile titanium alloy have density is low, specific strength is high, The advantages that corrosion resistance is good, processing performance is good is ideal aerospace engineering structural material.However, the technique of titanium alloy Performance is poor, and machining is difficult, in hot-working, is very easy to absorb the impurity such as hydrogen-oxygen nitrogen carbon.It is poor that there are also wear resistences, produces work Skill is complicated.
In order to improve the abrasion resistance of titanium alloy surface, carburizing tech can be used at present, surface is carried out to the surface of titanium alloy Processing, however current carburizing mainly uses the gases such as methane as carbon source, and " hydrogen embrittlement " phenomenon easily occurs.
Summary of the invention
The object of the present invention is to provide a kind of controlled atmosphere thin layer carburizing techniques, to solve the problems, such as above-mentioned " hydrogen embrittlement ".
Controlled atmosphere thin layer carburizing technique, the carburization process are the technique that carburizing is carried out on titanium alloy, the technique It is carried out in plasma carburising vacuum drying oven, specially:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 350~400V, the carburizing temperature of workpiece pole is 900~ 1000℃;
Using graphite as source electrode, the voltage of source electrode is 750~900V;
Using argon gas as carrier gas, control the operating pressure of argon gas in 0.1Pa~30Pa, and with carburization process carry out make argon The operating pressure of gas is gradually reduced,
Carburizing time is at least 0.5h.
" plasma carburising vacuum drying oven " of the present invention is commercially available.
Further, described using argon gas as carrier gas, control argon gas initialization pressure is 20~30Pa, and carburization process terminates When argon working pressure be 0.1~5Pa;
Carburizing time is at least 3h.
Further, described using argon gas as carrier gas, control argon gas initialization pressure is 25Pa, at the end of carburization process Argon working pressure is 1Pa;
Carburizing time is 4h.
The preferably described titanium alloy of the present invention is TiAl alloy.
It is a further object of the present invention to provide utilize titanium alloy made from above-mentioned technique.
A kind of titanium alloy of case-carbonizing, the titanium alloy surface carburized layer are 200~500 microns, the hardness of carburized layer For 9000~12000MPa.
Beneficial effects of the present invention are:The present invention is carried out at carburizing using surface of the plasma carburising vacuum method to titanium alloy Reason, for this method using titanium alloy as workpiece pole, the voltage of workpiece pole is 350~400V, the carburizing temperature of workpiece pole for 900~ 1000℃;Using graphite as source electrode, the voltage of source electrode is 750~900V;Using argon gas as carrier gas, the operating pressure for controlling argon gas exists 0.1Pa~30Pa, and with carburization process carry out be gradually reduced the operating pressure of argon gas.This method passes through control carrier gas argon Partial pressure of the gas in vacuum drying oven, so that the rate of carburizing is controlled, the carburized layer intensity having the same at each thickness for being, in turn Promote the intensity of entire carburized surface.
Specific embodiment
Following non-limiting embodiments can with a person of ordinary skill in the art will more fully understand the present invention, but not with Any mode limits the present invention.
Test method described in following embodiments is unless otherwise specified conventional method;The reagent and material, such as Without specified otherwise, commercially obtain.
Embodiment 1
Controlled atmosphere thin layer carburizing technique, the carburization process are the technique that carburizing is carried out on titanium alloy, the technique It is carried out in plasma carburising vacuum drying oven, specially:
Using TiAl alloy as workpiece pole, the voltage of workpiece pole is 380V, and the carburizing temperature of workpiece pole is 900 DEG C;
Using graphite as source electrode, the voltage of source electrode is 750V;
Described using argon gas as carrier gas, control argon gas initialization pressure is 25Pa, argon gas work pressure at the end of carburization process Power is 1Pa, and carburizing time 4h at the uniform velocity reduces the operating pressure of argon gas in carburizing process.
The titanium alloy surface carburized layer is 270 microns, and the hardness of carburized layer is 9230MPa.
Embodiment 2
Controlled atmosphere thin layer carburizing technique, the carburization process are the technique that carburizing is carried out on titanium alloy, the technique It is carried out in plasma carburising vacuum drying oven, specially:
Using TiAl alloy as workpiece pole, the voltage of workpiece pole is 400V, and the carburizing temperature of workpiece pole is 950 DEG C;
Using graphite as source electrode, the voltage of source electrode is 900V;
Described using argon gas as carrier gas, control argon gas initialization pressure is 30Pa, argon gas work pressure at the end of carburization process Power is 0.1Pa, and carburizing time 6h at the uniform velocity reduces the operating pressure of argon gas in carburizing process.
The titanium alloy surface carburized layer is 410 microns, and the hardness of carburized layer is 11250MPa.

Claims (5)

1. controlled atmosphere thin layer carburizing technique, it is characterised in that:The carburization process is the technique that carburizing is carried out on titanium alloy, The technique carries out in plasma carburising vacuum drying oven, specially:
Using titanium alloy as workpiece pole, the voltage of workpiece pole is 350~400V, and the carburizing temperature of workpiece pole is 900~1000 DEG C;
Using graphite as source electrode, the voltage of source electrode is 750~900V;
Using argon gas as carrier gas, control the operating pressure of argon gas in 0.1Pa~30Pa, and with carburization process carry out make argon gas Operating pressure is gradually reduced,
Carburizing time is at least 0.5h.
2. technique according to claim 1, it is characterised in that:It is described using argon gas as carrier gas, control argon gas initialization pressure Power is 20~30Pa, and argon working pressure is 0.1~5Pa at the end of carburization process, and argon gas is at the uniform velocity reduced in carburizing process Operating pressure;
Carburizing time is at least 3h.
3. technique according to claim 2, it is characterised in that:It is described using argon gas as carrier gas, control argon gas initialization pressure Power is 25Pa, and argon working pressure is 1Pa at the end of carburization process, and the operating pressure of argon gas is at the uniform velocity reduced in carburizing process;
Carburizing time is 4h.
4. technique according to claim 1, it is characterised in that:The titanium alloy is TiAl alloy.
5. utilizing titanium alloy made from technique described in claim 1, it is characterised in that:The titanium alloy surface carburized layer is 200 ~500 microns, the hardness of carburized layer is 9000~12000MPa.
CN201611066871.9A 2016-11-25 2016-11-25 Controlled atmosphere thin layer carburizing technique Active CN106350764B (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1451779A (en) * 2002-03-11 2003-10-29 太原理工大学表面工程研究所 Process for glow ion hydrogen-free carbonizing titanium surface
EP1288327B1 (en) * 2001-09-03 2006-06-14 Fuji Oozx Inc. TI alloy surface treatment
CN102086501A (en) * 2009-12-08 2011-06-08 上海汉鑫硬质合金有限公司 Ion nitrocarburizing treatment method for iron-based sintered material
CN103590047A (en) * 2013-11-13 2014-02-19 南京金鑫传动设备有限公司 Processing method capable of preventing deformation of low-carbon steel gear
CN103882369A (en) * 2014-04-11 2014-06-25 北京石油化工学院 Graphite source electrode for glow carburizing without hydrogen

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1288327B1 (en) * 2001-09-03 2006-06-14 Fuji Oozx Inc. TI alloy surface treatment
CN1451779A (en) * 2002-03-11 2003-10-29 太原理工大学表面工程研究所 Process for glow ion hydrogen-free carbonizing titanium surface
CN102086501A (en) * 2009-12-08 2011-06-08 上海汉鑫硬质合金有限公司 Ion nitrocarburizing treatment method for iron-based sintered material
CN103590047A (en) * 2013-11-13 2014-02-19 南京金鑫传动设备有限公司 Processing method capable of preventing deformation of low-carbon steel gear
CN103882369A (en) * 2014-04-11 2014-06-25 北京石油化工学院 Graphite source electrode for glow carburizing without hydrogen

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