CN106350302A - Glue removal agent for processing silicon wafer and preparation method of glue removal agent - Google Patents
Glue removal agent for processing silicon wafer and preparation method of glue removal agent Download PDFInfo
- Publication number
- CN106350302A CN106350302A CN201610715999.7A CN201610715999A CN106350302A CN 106350302 A CN106350302 A CN 106350302A CN 201610715999 A CN201610715999 A CN 201610715999A CN 106350302 A CN106350302 A CN 106350302A
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- Prior art keywords
- parts
- glue removal
- removal agent
- glue
- raw material
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Classifications
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/40—Products in which the composition is not well defined
- C11D7/44—Vegetable products
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/24—Hydrocarbons
- C11D7/247—Hydrocarbons aromatic
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/268—Carbohydrates or derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3218—Alkanolamines or alkanolimines
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3245—Aminoacids
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/32—Organic compounds containing nitrogen
- C11D7/3281—Heterocyclic compounds
-
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/40—Products in which the composition is not well defined
Abstract
The invention relates to a glue removal agent for processing a silicon wafer, which relates to the technical field of the processing of silicon materials. The glue removal agent is prepared from the following raw materials in parts by weight: 15 to 25 parts of turpentine oil, 15 to 25 parts of rosin water, 20 to 30 parts of kerosene, 6 to 8 parts of methylbenzene, 2 to 4 parts of xylene, 3 to 5 parts of urotropin, 6 to 8 parts of oxalic acid, 8 to 10 parts of hydroxymethyl cellulose, 6 to 8 parts of sea mud saponin, 3 to 5 parts of acridine yellow, 2 to 4 parts of glyphosate synergist, 6 to 8 parts of tricarboxyl triethylamine, 2 to 4 parts of diethanol amine, and 6 to 8 parts of catalyst. The glue removal agent has the beneficial effects that the formula is scientific and reasonable, the selected raw materials are products low in price and easy to obtain, the prepared glue removal agent is moderate in performance, when the glue removal agent is applied to the glue removal of the silicon wafer, no physical harm and chemical corrosion to the silicon wafer are produced, and safety and thoroughness in glue removal can be realized; and moreover, the glue removal agent is environment-friendly, healthy and convenient in popularization and use.
Description
Technical field
The present invention relates to silicon materials processing technique field uses glue scavenger and its preparation and in particular to a kind of silicon chip is processed
Method.
Background technology
Silicon materials, are important semi-conducting materials, chemical elemental symbol si, and the silicon that electronics industry uses should have high-purity
Degree and the excellent performance such as electrical and mechanical, silicon is maximum, the most widely used semi-conducting material of yield, its yield and consumption mark
Will a national electronics industry level, monocrystal silicon application in solar cells, and high-purity monocrystal silicon is important half
Conductor material.The today developing rapidly in photovoltaic technology and microminiature semiconductor inverter technology, produced using silicon single crystal
Solaode directly solar energy can be converted into luminous energy it is achieved that the beginning of green energy resource revolution of marching toward.
Silicon chip is a kind of physical form that silicon materials exist, and in normal application, silicon chip, is the weight making integrated circuit
Want material, by the means such as photoetching, ion implanting are carried out to silicon chip, various semiconductor device can be made.Made with silicon chip
Chip has surprising operational capability, and the development of science and technology constantly promotes the development of quasiconductor, automatization and computer etc.
Technology develops, and makes the cost of this high-tech product of silicon chip have dropped down to very cheap degree, but silicon chip is in processing, different
Process node all can make silicon chip processing flaw occurs.
Silicon chip processing when, be the sheet article being cut into by corresponding silicon heavy stone used as an anchor, this silicon heavy stone used as an anchor generally cutting when,
It is fixed on suspension by corresponding glue, is then installed in cutting machine, after being cut, then cleaning and degumming is
Can, in order to ensure the stability cutting, it is all super glue that glue is usually used, although this glue reuses, pastes
More firm, but when removing glue, relative difficulty, not only waste of manpower, and remove not thorough, and when removing photoresist, also
Easily cause that silicon chip is impaired, the practical effect of impact silicon chip.
Content of the invention:
The technical problem to be solved is to provide a kind of raw material to be easy to get, and formula is rationally accurate, and using effect is good
Silicon chip processing with glue scavenger and preparation method thereof.
The technical problem to be solved employs the following technical solutions to realize:
A kind of silicon chip processing is with glue scavenger it is characterised in that being made up of following raw material:
Oleum Terebinthinae 15-25 part, rosin 15-25 part, kerosene 20-30 part, toluene 6-8 part, dimethylbenzene 2-4 part, Wu Luotuo
Product 3-5 part, oxalic acid 6-8 part, hydroxymethyl cellulose 8-10 part, sea mud Saponin 6-8 part, acriflavinium chloride 3-5 part, glyphosate synergist 2-
4 parts, three carboxyl triethylamine 6-8 parts, diethanolamine 2-4 part, catalyst 6-8 part.
The preferred component of each raw material is: 20 parts of Oleum Terebinthinae, 20 parts of rosin, 25 parts of kerosene, 7 parts of toluene, 3 parts of dimethylbenzene,
4 parts of hexamethylenamine, 7 parts of oxalic acid, 9 parts of hydroxymethyl cellulose, 7 parts of sea mud Saponin, 4 parts of acriflavinium chloride, 3 parts of glyphosate synergist, three
7 parts of carboxyl triethylamine, 3 parts of diethanolamine, 7 parts of catalyst.
Described catalyst is sodium hydroxide, one or more mixing of potassium hydroxide, ammonia, Tetramethylammonium hydroxide
Thing.
It is another object of the present invention in the preparation present invention silicon chip processing with the method for glue scavenger it is characterised in that
Comprise the following steps:
1) Oleum Terebinthinae, rosin, kerosene, toluene, dimethylbenzene, hexamethylenamine and oxalic acid are sequentially added in agitator tank, open
Open stirring until obtaining the colloid mixing, standby；
2) by the hydroxymethyl cellulose in raw material, sea mud Saponin, acriflavinium chloride, glyphosate synergist, three carboxyl triethylamines, two
After ethanolamine premixing, it is warming up to 60-80 DEG C, after high-speed stirred 15-25min, obtain assisting liquid, standby；
3) separately take an agitator tank, the raw material in step 1 and 2 be added thereto, then the catalyst in raw material is added thereto,
Control rotating speed is 2500-3500r/min, and after high-speed stirred 20-30min, after detection is qualified, subpackage can get.
The invention has the beneficial effects as follows: inventive formulation selection is scientific and reasonable, and the raw material of selection is product cheap and easy to get
Product, the excision colloid prepared, moderate performance, it is applied to silicon chip removing glue, physical injury and chemistry will not be caused in itself to silicon chip
Corrosion, safety is thorough, environment protection health simultaneously, is easy to promote and uses.
Specific embodiment
In order that technological means, creation characteristic, reached purpose and effect that the present invention realizes are easy to understand, tie below
Close specific embodiment, the present invention is expanded on further.
Embodiment 1
Weigh: Oleum Terebinthinae 15kg, rosin 15kg, kerosene 20kg, toluene 6kg, dimethylbenzene 2kg, hexamethylenamine 3kg, grass
Sour 6kg, hydroxymethyl cellulose 8kg, sea mud Saponin 6kg, acriflavinium chloride 3kg, glyphosate synergist 2kg, three carboxyl triethylamine 6kg,
Diethanolamine 2kg, catalyst 6kg；
Embodiment 2
Weigh: Oleum Terebinthinae 20kg, rosin 20kg, kerosene 25kg, toluene 7kg, dimethylbenzene 3kg, hexamethylenamine 4kg, grass
Sour 7kg, hydroxymethyl cellulose 9kg, sea mud Saponin 7kg, acriflavinium chloride 4kg, glyphosate synergist 3kg, three carboxyl triethylamine 7kg,
Diethanolamine 3kg, catalyst 7kg；
The method preparing above-described embodiment 1 or 2 is:
1) Oleum Terebinthinae, rosin, kerosene, toluene, dimethylbenzene, hexamethylenamine and oxalic acid are sequentially added in agitator tank, open
Open stirring until obtaining the colloid mixing, standby；
2) by the hydroxymethyl cellulose in raw material, sea mud Saponin, acriflavinium chloride, glyphosate synergist, three carboxyl triethylamines, two
After ethanolamine premixing, it is warming up to 60-80 DEG C, after high-speed stirred 15-25min, obtain assisting liquid, standby；
3) separately take an agitator tank, the raw material in step 1 and 2 be added thereto, then the catalyst in raw material is added thereto,
Control rotating speed is 2500-3500r/min, and after high-speed stirred 20-30min, after detection is qualified, subpackage can get.
Ultimate principle and principal character and the advantages of the present invention of the present invention have been shown and described above.The technology of the industry
, it should be appreciated that the present invention is not restricted to the described embodiments, the simply explanation described in above-described embodiment and description is originally for personnel
The principle of invention, without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, these changes
Change and improvement both falls within scope of the claimed invention.Claimed scope by appending claims and its
Equivalent thereof.
Claims (4)
1. a kind of silicon chip processing with glue scavenger it is characterised in that being made up of following raw material:
Oleum Terebinthinae 15-25 part, rosin 15-25 part, kerosene 20-30 part, toluene 6-8 part, dimethylbenzene 2-4 part, hexamethylenamine 3-5
Part, oxalic acid 6-8 part, hydroxymethyl cellulose 8-10 part, sea mud Saponin 6-8 part, acriflavinium chloride 3-5 part, glyphosate synergist 2-4 part,
Three carboxyl triethylamine 6-8 parts, diethanolamine 2-4 part, catalyst 6-8 part.
2. a kind of silicon chip processing according to claim 1 with glue scavenger it is characterised in that the preferred component of each raw material
For: 20 parts of Oleum Terebinthinae, 20 parts of rosin, 25 parts of kerosene, 7 parts of toluene, 3 parts of dimethylbenzene, 4 parts of hexamethylenamine, 7 parts of oxalic acid, hydroxyl first
9 parts of base cellulose, 7 parts of sea mud Saponin, 4 parts of acriflavinium chloride, 3 parts of glyphosate synergist, 7 parts of three carboxyl triethylamine, diethanolamine 3
Part, 7 parts of catalyst.
3. a kind of silicon chip processing glue scavenger according to claim 1 it is characterised in that: described catalyst for
Sodium hydroxide, potassium hydroxide, ammonia, one or more mixture of Tetramethylammonium hydroxide.
4. the method for preparation the claims 1 or 2 is it is characterised in that include following preparation process:
1) Oleum Terebinthinae, rosin, kerosene, toluene, dimethylbenzene, hexamethylenamine and oxalic acid are sequentially added in agitator tank, unlatching is stirred
Mix until obtaining the colloid mixing, standby；
2) by the hydroxymethyl cellulose in raw material, sea mud Saponin, acriflavinium chloride, glyphosate synergist, three carboxyl triethylamines, diethanol
After amine premixing, it is warming up to 60-80 DEG C, after high-speed stirred 15-25min, obtain assisting liquid, standby；
3) separately take an agitator tank, the raw material in step 1 and 2 is added thereto, then the catalyst in raw material is added thereto, control
Rotating speed is 2500-3500r/min, and after high-speed stirred 20-30min, after detection is qualified, subpackage can get.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610715999.7A CN106350302A (en) | 2016-08-24 | 2016-08-24 | Glue removal agent for processing silicon wafer and preparation method of glue removal agent |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610715999.7A CN106350302A (en) | 2016-08-24 | 2016-08-24 | Glue removal agent for processing silicon wafer and preparation method of glue removal agent |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106350302A true CN106350302A (en) | 2017-01-25 |
Family
ID=57844206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610715999.7A Pending CN106350302A (en) | 2016-08-24 | 2016-08-24 | Glue removal agent for processing silicon wafer and preparation method of glue removal agent |
Country Status (1)
| Country | Link |
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| CN (1) | CN106350302A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106345710A (en) * | 2016-08-24 | 2017-01-25 | 安徽正田能源科技有限公司 | Glue pre-decomposition agent for silicon wafer processing and preparation method thereof |
| CN107419562A (en) * | 2017-08-04 | 2017-12-01 | 巢湖美维食品有限公司 | A kind of stamp pre-treating method for strengthening garment printing effect |
Citations (5)
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|---|---|---|---|---|
| CN101265441A (en) * | 2008-05-09 | 2008-09-17 | 大连三达奥克化学股份有限公司 | Polycrystal silicon chip water-base cleaning agent |
| CN101899365A (en) * | 2009-05-27 | 2010-12-01 | 宁波百仕高联合工业有限公司 | Adhesive remover and preparation method thereof |
| CN102373126A (en) * | 2010-10-11 | 2012-03-14 | 青岛海芬海洋生物科技有限公司 | Antibacterial adhesive remover for marine organism |
| CN105199877A (en) * | 2015-10-16 | 2015-12-30 | 朱建权 | Adhesive removing agent as well as preparation and using methods thereof |
| CN105505633A (en) * | 2015-12-11 | 2016-04-20 | 天津璞誉环保科技开发有限公司 | Novel environment-friendly adhesive removing agent |
-
2016
- 2016-08-24 CN CN201610715999.7A patent/CN106350302A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101265441A (en) * | 2008-05-09 | 2008-09-17 | 大连三达奥克化学股份有限公司 | Polycrystal silicon chip water-base cleaning agent |
| CN101899365A (en) * | 2009-05-27 | 2010-12-01 | 宁波百仕高联合工业有限公司 | Adhesive remover and preparation method thereof |
| CN102373126A (en) * | 2010-10-11 | 2012-03-14 | 青岛海芬海洋生物科技有限公司 | Antibacterial adhesive remover for marine organism |
| CN105199877A (en) * | 2015-10-16 | 2015-12-30 | 朱建权 | Adhesive removing agent as well as preparation and using methods thereof |
| CN105505633A (en) * | 2015-12-11 | 2016-04-20 | 天津璞誉环保科技开发有限公司 | Novel environment-friendly adhesive removing agent |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106345710A (en) * | 2016-08-24 | 2017-01-25 | 安徽正田能源科技有限公司 | Glue pre-decomposition agent for silicon wafer processing and preparation method thereof |
| CN107419562A (en) * | 2017-08-04 | 2017-12-01 | 巢湖美维食品有限公司 | A kind of stamp pre-treating method for strengthening garment printing effect |
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| C06 | Publication | ||
| PB01 | Publication | ||
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| RJ01 | Rejection of invention patent application after publication | ||
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Application publication date: 20170125 |