CN106350058A - Preparation method of nanoporous gold-based fluorescence enhanced base - Google Patents

Preparation method of nanoporous gold-based fluorescence enhanced base Download PDF

Info

Publication number
CN106350058A
CN106350058A CN201610701397.6A CN201610701397A CN106350058A CN 106350058 A CN106350058 A CN 106350058A CN 201610701397 A CN201610701397 A CN 201610701397A CN 106350058 A CN106350058 A CN 106350058A
Authority
CN
China
Prior art keywords
gold
different
thickness
preparation
silicon dioxide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201610701397.6A
Other languages
Chinese (zh)
Other versions
CN106350058B (en
Inventor
曾和平
张玲
陈超
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chongqing Institute of East China Normal University
Shanghai Langyan Optoelectronics Technology Co Ltd
Original Assignee
Shanghai Langyan Optoelectronics Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shanghai Langyan Optoelectronics Technology Co Ltd filed Critical Shanghai Langyan Optoelectronics Technology Co Ltd
Priority to CN201610701397.6A priority Critical patent/CN106350058B/en
Publication of CN106350058A publication Critical patent/CN106350058A/en
Application granted granted Critical
Publication of CN106350058B publication Critical patent/CN106350058B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/02Use of particular materials as binders, particle coatings or suspension media therefor
    • C09K11/025Use of particular materials as binders, particle coatings or suspension media therefor non-luminescent particle coatings or suspension media
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B82NANOTECHNOLOGY
    • B82YSPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y20/00Nanooptics, e.g. quantum optics or photonic crystals
    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09KMATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K11/00Luminescent, e.g. electroluminescent, chemiluminescent materials
    • C09K11/08Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials
    • C09K11/58Luminescent, e.g. electroluminescent, chemiluminescent materials containing inorganic luminescent materials containing copper, silver or gold

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biophysics (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)

Abstract

The invention provides a preparation method of a nanoporous gold-based fluorescence enhanced base. The preparation method of the nanoporous gold-based fluorescence enhanced base comprises the following steps: placing a gold silver alloy film into concentrated nitric acid and performing corrosion to obtain a precursor I; placing a porous gold film of the precursor I into pure water and rinsing for many times to obtain a precursor II; and depositing a silicon dioxide film on the surface of the precursor II by a physical vapor deposition method to obtain the fluorescence enhanced base. Compared with the prior art, the preparation method of the nanoporous gold-based fluorescence enhanced base has the following beneficial effects that silicon dioxide modified nanoporous gold with different in pore diameter and different in thickness can be prepared by depositing the silicon dioxide films different in thickness on the surfaces of porous gold with different pore diameters by the physical vapor deposition method; and a base material can realize fluorescence enhancement on different fluorescent substances, the pore diameter of the porous gold and the thickness of the silicon dioxide on the surface, corresponding to the optimal enhancement, are different for different fluorescent substances, and the application field is widened.

Description

The preparation method of the Fluorescence Increasing substrate based on nano-porous gold
Technical field
The present invention relates to a kind of preparation method of the Fluorescence Increasing substrate based on nano-porous gold, belong to fluorescent material technology Field.
Background technology
Fluorescent technique as a kind of important modern spectral technique, because the advantages of its sensitivity is high and method is various, extensively General for various analysis and characterization processes.However, in real process, due to the particularity of sample, fluorescent technique is existing sensitive Degree still can not meet all of mensure needs.Accordingly, it is desirable to be able to improve the sensitivity of fluoroscopic examination further so as to apply Scope more expands.
Nano-porous gold is the nano-porous structure material of the noble metal gold that a class has special construction, in recent years due to it Special structural behaviour and its noble metal characteristic are widely used in a lot of fields.The structure of nano-porous gold be by Form in the golden space of nanoscale and ligament, there is the fundamental characteristics of noble metal gold material, there is loose structure gold simultaneously again The special nature belonging to.With respect to other fine and close metal materials, nano-porous gold is a kind of nano-structured macroscopic material, its Architectural feature is the nanovoids that inside has a large amount of connections, and the microscopic dimensions in its ligament and space are in nanoscale, just It is that these construction featuress impart a lot of characteristic of this structure, as little in proportion, the big feature of specific surface area.Nano-porous gold is as one Plant thin-film material, not only there is the characteristic of noble metal and porous material, also there is the metallic character of rough surface simultaneously, it has Small-size effect as other nano materials, skin effect, quantum size effect, with macroscopic quantum effect etc., make this kind of Material has special performance at aspects such as magnetic, light, electricity.
Traditional nano-porous gold is usually the base strengthening substrate or surface enhanced raman spectroscopy directly as surface fluorescence Bottom, in the enhanced application of surface fluorescence, due to metal can lead to fluorescent quenching and fluorescence be a kind of across steric effect so that The nano-porous gold modified is not had much to be limited as Fluorescence Increasing substrate.Current solution is at it using wet method Superficial growth prepares the materials such as silicon dioxide or by controlling fluorescent probe molecule and substrate in its Surface coating serum albumin The distance between, realize Fluorescence Increasing.However, the drawback that these methods exist is preparation method complexity, need by multiple Miscellaneous step just can complete, process loaded down with trivial details and very difficult precise control isolation distance, simultaneously postscript its be easily destroyed porous gold structure With thin-film material itself.It is therefore desirable to have a kind of new preparation method, can will not be too much during preparation porous gold Destroy the performance of the structure of porous gold, the method for simple and fast can also be adopted accurately quickly to coat on its surface different simultaneously The silica membrane of thickness, to meet the application under different condition, expands range of application.
Content of the invention
The shortcomings of for solving the preparation method complexity of existing Fluorescence Increasing substrate, strengthening scarce capacity, expand fluorescence inspection The application surveyed, the invention provides a kind of new being capable of significantly Fluorescence Increasing substrate and its preparation method and application.
The preparation method of this new substrate is quick and simple, using the electrum ag that 100nm is thick65au35(gold silver Component ratio be 35% and 65%) as template, the method removing alloy using chemical etching prepares nanoporous gold thin film, Remove the silver element in alloy using nitric acid, remaining gold atom occurs to reset and assembles, and forms porous gold thin film.Then utilize The method of physical vapour deposition (PVD) the surface of porous gold thin film silence one layer of different-thickness silica membrane, as space Layer, thus realize Fluorescence Increasing.
The present invention is achieved by the following technical solutions:
The present invention provides a kind of preparation method of the Fluorescence Increasing substrate based on nano-porous gold, and it comprises the steps:
Electrum thin film is placed in concentrated nitric acid and is corroded, obtain presoma one;
Described presoma one is placed in pure water and is repeatedly rinsed, obtain presoma two;
Deposit silica membrane on the surface of described presoma two using physical vaporous deposition, obtain described fluorescence Strengthen substrate.
Preferably, the thickness of described electrum thin film is 100nm.
Preferably, in described electrum thin film, the content of gold element and silver element is respectively 65% and 35%.
Preferably, the mass fraction of described concentrated nitric acid is not less than 65%.
Preferably, described pure water is deionized water or ultra-pure water.
Preferably, the technical parameter of described physical vaporous deposition is 200 DEG C of temperature, pressure 7*10-4Pa, evaporation Speed 0.3nm/s, line 190ma, no ion source assist, no oxygenation capacity.
Using the electrum ag that 100nm is thick65au35As raw material, this alloy firm is changed in concentrated nitric acid Learn corrosion.Because silver is more active than gold, can react, with silver, principle (the chemistry side that simultaneously not react with gold hence with concentrated nitric acid Formula 1), using going the method for alloy by the silver element erosion removal in electrum, thus remaining gold atom is reset And gathering, it is the formation of the nano-porous structure of this continuous insertion, wherein, the time reset and assemble is longer, the hole of formation Size will be bigger, that is, the so-called response time is longer, aperture bigger (Fig. 6).Then, using the side of physical vapour deposition (PVD) Method, the porous gold surface completing in preparation deposits the silica membrane of different-thickness, to meet fluorescence across sky as space layer Between effect, realize surface fluorescence strengthen.
ag+2hno3(dense)=agno3+no2↑+h2o (1)
Fluorescence is across steric effect, and metal can lead to fluorescent quenching simultaneously, therefore, between fluorescence molecule and metallic substrates Apart from very little when, can greatly lead to fluorescent quenching;When the distance of fluorescence molecule and metal substrate surface is 5~20nm's When, the plasma resonance Fluorescence Increasing of metal surface can be more than the fluorescent quenching of metal surface, realizes Fluorescence Increasing.But It is so far, to be that command range is come or by absorption in base superficial growth material as space layer using wet method mostly Serum albumin carrys out command range and realizes Fluorescence Increasing, these methods all cannot precise control distance numerical value, also cannot know away from From for how many whens, the amplitude of Fluorescence Increasing is maximum.In this regard, invention provides a kind of new method, by physics gas The method mutually depositing, deposits the silicon dioxide of one layer of different-thickness on the porous gold thin film surface preparing, and as space layer, comes Control fluorescence molecule the distance between metallic substrates.What this method was maximum be a little operating process simple and fast it is easy to Control, and the thickness of the silicon dioxide depositing can be accurately controlled, and can be as accurate as 1nm, then just can be by controlling The thickness of the silicon dioxide of deposition, finds the maximum thickness of Fluorescence Increasing, can expand answering of fluoroscopic examination using this advantage Use scope.
Compared with prior art, the present invention has a following beneficial effect:
1st, pass through the silica membrane of different-thickness is deposited on the porous gold thin film of different pore size, substantially increase glimmering Light intensification factor, with respect to alloy firm, the Fluorescence Increasing multiple that deposited the porous gold substrate of silicon dioxide can reach 230 Again (fluorescence molecule is r6g) and 160 times (fluorescent material is phycoerythrin).
2nd, pass through the silicon dioxide without thickness is deposited on the nano-porous gold of different pore size, it is possible to achieve to material list The regulation (Fig. 7) of surface plasma resonance wavelength;
3rd, this base material can realize the Fluorescence Increasing to different fluorescent materials, and for different fluorescent materials, The optimal golden aperture of corresponding porous that strengthens is different with the silicon dioxide thickness on surface, has widened application.
Brief description
The detailed description with reference to the following drawings, non-limiting example made by reading, the further feature of the present invention, Objects and advantages will become more apparent upon:
Fig. 1 go the alloy reaction time be 24 little constantly, porous gold sem figure, aperture be 45nm;
Porous gold thin film sem of the silicon dioxide that Fig. 2 aperture is 42nm, surface deposits 10nm thickness is schemed;
Porous gold thin film tem of the silicon dioxide that Fig. 3 aperture is 42nm, surface deposits 10nm thickness is schemed;
Fig. 4 porous gold pore size is with the graph of relation going alloy time change;
Fig. 5 surface deposits the extinction spectra figure of the porous gold of different-thickness silicon dioxide;
Fig. 6 is ag65au35The substrate over-assemble r6g molecule of alloy firm and surface deposition different-thickness silicon dioxide Fluorescence measurements;
Fig. 7 deposited the multiple aperture substrate of different-thickness silicon dioxide with respect to not depositing silicon dioxide for surface The fluorescence of bare multiple aperture substrate over-assemble r6g molecule improves multiple.
Improve multiple by figure to can be seen that, with respect to the porous gold not depositing silicon dioxide, surface deposition is different The fluorescence intensity of the r6g molecule of porous gold surface assembling of thickness silicon dioxide is significantly improved, wherein silicon dioxide When thickness is 20nm, the multiple of raising is maximum, is 25 times.
Fig. 8 is ag65au35Alloy firm and the substrate over-assemble phycoerythrin of surface deposition different-thickness silicon dioxide (r-pe) fluorescence measurements of molecule.
Figure a is ag65au35Alloy firm, the porous gold not depositing silicon dioxide and surface deposition different-thickness titanium dioxide The porous gold surface of silicon assembles the fluorescence spectrum of the aperture substrate of fluorescence intensity maximum of phycoerythrin (r-pe) molecule.
Figure b is ag65au35Alloy firm, the porous gold not depositing silicon dioxide and surface deposition different-thickness titanium dioxide The porous gold surface of silicon assembles the block diagram of the fluorescence intensity of phycoerythrin (r-pe) molecule.
Fig. 9 deposited the multiple aperture substrate of different-thickness silicon dioxide with respect to not depositing silicon dioxide for surface The fluorescence of bare multiple aperture substrate over-assemble phycoerythrin (r-pe) molecule improves multiple;
Improve multiple by figure to can be seen that, with respect to the porous gold not depositing silicon dioxide, surface deposition is different The fluorescence intensity of the phycoerythrin (r-pe) of porous gold surface assembling of thickness silicon dioxide is significantly improved, and wherein two When silicon oxide thickness is 15nm, the multiple of raising is maximum, is 20 times.
Specific embodiment
With reference to specific embodiment, the present invention is described in detail.Following examples will be helpful to the technology of this area Personnel further understand the present invention, but the invention is not limited in any way.It should be pointed out that the ordinary skill to this area For personnel, without departing from the inventive concept of the premise, some deformation can also be made and improve.These broadly fall into the present invention Protection domain.
Embodiment 1
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid carry out corrode 24h;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses;
3) deposit the thick silicon dioxide of 5nm using the method for physical vapour deposition (PVD) in the porous gold surface preparing.
Alloy firm go the alloy reaction time be 24 little constantly, the surface topography of the porous of formation gold is as illustrated, hole Footpath is 45nm.
Embodiment 2
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid that to be corroded to aperture be 42nm;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses;
3) the thick silicon dioxide of 10nm, dioxy are deposited using the method for physical vapour deposition (PVD) in the porous gold surface preparing The thickness of SiClx is 10nm.
Aperture is 42nm, surface deposits the sem figure of the thick porous gold thin film of silicon dioxide of 10nm and tem schemes respectively as schemed Shown in 2 and Fig. 3, the silicon dioxide thickness ratio of porous gold surface deposition is more uniform, and the thickness of actual deposition and theoretical value kissing Close, error very little.
Embodiment 3
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid and corroded;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses;
3) deposit different-thickness using the method for physical vapour deposition (PVD) in the porous gold surface of the different pore size preparing Silicon dioxide, the thickness of silicon dioxide is 15nm.
Embodiment 4
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid and corroded;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses;
3) deposit different-thickness using the method for physical vapour deposition (PVD) in the porous gold surface of the different pore size preparing Silicon dioxide, the thickness of silicon dioxide is respectively 20nm.
Embodiment 5
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid and corroded;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses;
3) deposit different-thickness using the method for physical vapour deposition (PVD) in the porous gold surface of the different pore size preparing Silicon dioxide, the thickness of silicon dioxide is respectively 25nm.
Porous gold pore size, goes to close as shown in figure 4, the time of reaction is longer with the relation curve going alloy time change It is more abundant that gold reaction is carried out, and remaining silver is fewer, and the free built-up time of golden composition is longer, the chi of the loose structure being formed Degree is bigger, and that is, the response time is longer, and aperture is bigger.
Comparative example 1
1) by 100nm thickness ag65au35Alloy firm be placed in 65% concentrated nitric acid and corroded;
2) the porous gold thin film obtaining corrosion is placed in pure water and repeatedly rinses, and does not carry out silica deposit.
Performance detection is tested
The thin film that Example 3 and comparative example 1 obtain respectively carries out delustring experiment, and result is as shown in figure 5, Fig. 5 a and Fig. 5 b It is respectively the delustring experiment of comparative example 1 and embodiment 3.
Take embodiment 1~5 of the same area and the thin film of comparative example 1 preparation, being immersed in concentration respectively is 10-6The r6g of m In aqueous solution, soak 2 hours, carry out chemisorbed, after its surface-assembled r6g molecule, take out, quickly clear in deionized water Wash, wash the molecule of surface physics absorption off, then dry;By the use of the laser of the 532nm for 1mw for the power as exciting light, measure The fluorescence spectrum of different samples;Comparison surface deposited the porous metallographic of the different pore size of different-thickness silicon dioxide for alloy The Fluorescence Increasing multiple of thin film.
Alloy firm and surface deposit different-thickness silicon dioxide after assembling r6g molecule, the maximum sample of fluorescence intensity As shown in Figure 6 a, Fig. 7 is with respect to alloy firm to the corresponding fluorescence spectrum of product, deposits the maximum fluorescence intensity pair under different-thickness Answer the raising situation of the fluorescence intensity of porous gold substrate in aperture;Alloy firm and surface deposition different-thickness silicon dioxide are in group After having filled r6g molecule, block diagram such as Fig. 6 b institute of the Insulin of the substrate of alloy firm and different pore size different-thickness Show.
Change another fluorescent material phycoerythrin (r-pe), repeat above step, the wherein concentration of r-pe is 0.04mg/ml, soak time is 12 hours, other step all sames.
Alloy firm and surface deposit different-thickness silicon dioxide after assembling r-pe molecule, the maximum sample of fluorescence intensity As shown in Figure 8 a, alloy firm and surface deposition different-thickness silicon dioxide are assembling r6g molecule to the corresponding fluorescence spectrum of product Afterwards, the block diagram of the Insulin of the substrate of alloy firm and different pore size different-thickness is as shown in Figure 8 b.Fig. 9 is relatively In alloy firm, deposit the raising feelings of the fluorescence intensity of porous gold substrate in the corresponding aperture of maximum fluorescence intensity under different-thickness Condition, improves multiple by figure and can be seen that, and with respect to the porous gold not depositing silicon dioxide, surface deposits different-thickness two The fluorescence intensity of the phycoerythrin (r-pe) of porous gold surface assembling of silicon oxide is significantly improved, wherein silicon dioxide When thickness is 15nm, the multiple of raising is maximum, is 20 times.
Embodiment 6
1) by 100nm thickness ag75au25Alloy firm be placed in 60% concentrated nitric acid and corroded, corrode 8s respectively, 15s, 30s, 5min;
2) thin film having reacted different time is removed, be placed in pure water and repeatedly rinsed;
3) method utilizing physical vapour deposition (PVD), deposits the silicon dioxide of different-thickness in the porous gold surface of different pore size Thin film, completes the preparation of Fluorescence Increasing substrate.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned Particular implementation, those skilled in the art can make various modifications or modification within the scope of the claims, this not shadow Ring the flesh and blood of the present invention.

Claims (6)

1. a kind of preparation method of the Fluorescence Increasing substrate based on nano-porous gold is it is characterised in that comprise the steps:
Electrum thin film is placed in concentrated nitric acid and is corroded, obtain presoma one;
Described presoma one is placed in pure water and is repeatedly rinsed, obtain presoma two;
Deposit silica membrane on the surface of described presoma two using physical vaporous deposition, obtain described fluorescence Strengthen substrate.
2. the preparation method of the Fluorescence Increasing substrate based on nano-porous gold as claimed in claim 1 is it is characterised in that described The thickness of electrum thin film is 100nm.
3. the Fluorescence Increasing substrate based on nano-porous gold as claimed in claim 1 or 2 preparation method it is characterised in that In described electrum thin film, the content of gold element and silver element is respectively 65% and 35%.
4. the preparation method of the Fluorescence Increasing substrate based on nano-porous gold as claimed in claim 1 is it is characterised in that described The mass fraction of concentrated nitric acid is not less than 65%.
5. the preparation method of the Fluorescence Increasing substrate based on nano-porous gold as claimed in claim 1 is it is characterised in that used Pure water is deionized water or ultra-pure water.
6. the preparation method of the Fluorescence Increasing substrate based on nano-porous gold as claimed in claim 1 is it is characterised in that described The technical parameter of physical vaporous deposition is 200 DEG C of temperature, pressure 7*10-4Pa, evaporation rate 0.3nm/s, line 190ma.
CN201610701397.6A 2016-08-22 2016-08-22 The preparation method of fluorescence enhancement substrate based on nano-porous gold Active CN106350058B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201610701397.6A CN106350058B (en) 2016-08-22 2016-08-22 The preparation method of fluorescence enhancement substrate based on nano-porous gold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201610701397.6A CN106350058B (en) 2016-08-22 2016-08-22 The preparation method of fluorescence enhancement substrate based on nano-porous gold

Publications (2)

Publication Number Publication Date
CN106350058A true CN106350058A (en) 2017-01-25
CN106350058B CN106350058B (en) 2019-01-22

Family

ID=57844386

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201610701397.6A Active CN106350058B (en) 2016-08-22 2016-08-22 The preparation method of fluorescence enhancement substrate based on nano-porous gold

Country Status (1)

Country Link
CN (1) CN106350058B (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109557042A (en) * 2018-11-26 2019-04-02 广东朗研科技有限公司 Terahertz Enhancement Method and system based on semiconductor plating porous metal film structure
CN111139062A (en) * 2020-01-07 2020-05-12 江苏理工学院 Preparation method of silver-containing nano porous metal loaded chlorine-containing perovskite quantum dot film
CN113444520A (en) * 2021-06-25 2021-09-28 佛山安亿纳米材料有限公司 Sulfide phosphor with coating layer and magnetron sputtering method for preparing sulfide phosphor with coating layer

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101535526A (en) * 2006-10-17 2009-09-16 罗伯特.博世有限公司 Method for stabilizing and functionalizing porous metallic layers
CN103376244A (en) * 2012-04-18 2013-10-30 中国科学院电子学研究所 Surface plasma resonance chip and sensor applying same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101535526A (en) * 2006-10-17 2009-09-16 罗伯特.博世有限公司 Method for stabilizing and functionalizing porous metallic layers
CN103376244A (en) * 2012-04-18 2013-10-30 中国科学院电子学研究所 Surface plasma resonance chip and sensor applying same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
JULIE S. BITEEN ET AL.: "Enhanced Radiative Emission Rate and Quantum Efficiency in Coupled Silicon Nanocrystal-Nanostructured Gold Emitters", 《NANO LETT.》 *
张喆等: "纳米多孔金薄膜的表面等离子体共振传感特性", 《物理化学学报》 *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109557042A (en) * 2018-11-26 2019-04-02 广东朗研科技有限公司 Terahertz Enhancement Method and system based on semiconductor plating porous metal film structure
CN109557042B (en) * 2018-11-26 2021-10-08 广东朗研科技有限公司 Nano-mesoporous metal film plating structure based on semiconductor and terahertz wave enhancement system
CN111139062A (en) * 2020-01-07 2020-05-12 江苏理工学院 Preparation method of silver-containing nano porous metal loaded chlorine-containing perovskite quantum dot film
CN111139062B (en) * 2020-01-07 2022-11-22 江苏理工学院 Preparation method of silver-containing nano porous metal loaded chlorine-containing perovskite quantum dot film
CN113444520A (en) * 2021-06-25 2021-09-28 佛山安亿纳米材料有限公司 Sulfide phosphor with coating layer and magnetron sputtering method for preparing sulfide phosphor with coating layer
CN113444520B (en) * 2021-06-25 2022-03-25 佛山安亿纳米材料有限公司 Sulfide phosphor with coating layer and magnetron sputtering method for preparing sulfide phosphor with coating layer

Also Published As

Publication number Publication date
CN106350058B (en) 2019-01-22

Similar Documents

Publication Publication Date Title
CN104746049B (en) The method that the surface enhanced Raman scattering substrate in metal nano gap is prepared using ALD
Masuda et al. Deposition mechanism of anatase TiO2 on self-assembled monolayers from an aqueous solution
CN1312034C (en) Process for preparing monocrystalline silicon nano line array with single axial arranging
CN104949957A (en) Embedded type nano dot array surface enhanced Raman active substrate and preparation method thereof
CN102621128A (en) Preparation method of large-area sequential controllable surface-enhanced Raman active substrate
CN107543813A (en) A kind of preparation method and applications of surface-enhanced Raman ordered composite array chip
CN102590179A (en) Silver nano lattice surface enhanced raman active substrate and preparation method thereof
CN103938158A (en) SERS (Surface Enhanced Raman Scattering) substrate with self-assembled spherical array and preparation method thereof
CN106350058A (en) Preparation method of nanoporous gold-based fluorescence enhanced base
CN103774088B (en) A kind of SERS probe molecule is from collecting micro-pipe and its preparation method and application
CN107937957A (en) The preparation method of surface enhanced Raman substrate and the substrate are used to detect animal virus
CN108456848B (en) Ag/FeS layered composite SERS substrate and preparation method thereof
CN103213938B (en) Gold nano cap array surface strengthens Raman active substrate and preparation method thereof
CN103668140B (en) A kind of preparation method of micro-nano dendritic silver super-hydrophilic film and the application of surface-enhanced Raman substrate
CN108611604B (en) Manufacturing method of economical high-precision surface enhanced Raman active substrate based on high dielectric material
JP2017020944A (en) Method for producing carbon microelectrode
CN103364390A (en) Surface-enhanced Raman substrate, preparation method and application thereof
Sayed et al. Characterization of the interface of gold and silver nanostructures on InP and GaAs synthesized via galvanic displacement
CN106645077B (en) The preparation method of SERS active-substrate of the spot size less than 5nm
CN108823541B (en) Preparation method of surface-enhanced Raman scattering active substrate
CN108693166B (en) Method for manufacturing surface enhanced Raman scattering substrate based on aluminum nitride nanostructure
CN113433110B (en) Preparation method for generating substrate with honeysuckle dendritic crystal flower-like nano structure by in-situ substitution method
CN108362678A (en) A method of utilizing hollow Ag-Au alloys composite construction micro-nano array detection melamine
CN114012103A (en) Method for preparing silver nanoparticles with controllable size on silicon surface
CN103305890A (en) Preparation method of three-dimensional penetrating anode aluminum oxide template

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
TA01 Transfer of patent application right
TA01 Transfer of patent application right

Effective date of registration: 20180508

Address after: 200237 District 2319, room 69, Lane 1985, Chunshen Road, Minhang District, Shanghai 1 district.

Applicant after: Shanghai Langyan Optoelectronics Technology Co.,Ltd.

Applicant after: East China Normal University

Address before: 200237 District 2319, room 69, Lane 1985, Chunshen Road, Minhang District, Shanghai 1 district.

Applicant before: Shanghai Langyan Optoelectronics Technology Co.,Ltd.

GR01 Patent grant
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20210811

Address after: Room 4001, building 21, No. 123, Lane 1165, Jindu Road, Minhang District, Shanghai 201100

Patentee after: SHANGHAI LANGYAN OPTOELECTRONICS TECHNOLOGY Co.,Ltd.

Patentee after: Chongqing Research Institute of East China Normal University

Address before: 200237 District 2319, room 69, Lane 1985, Chunshen Road, Minhang District, Shanghai 1 district.

Patentee before: SHANGHAI LANGYAN OPTOELECTRONICS TECHNOLOGY Co.,Ltd.

Patentee before: EAST CHINA NORMAL University