CN106340837A - Water leakage detection line fixation apparatus and method - Google Patents
Water leakage detection line fixation apparatus and method Download PDFInfo
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- CN106340837A CN106340837A CN201610874584.4A CN201610874584A CN106340837A CN 106340837 A CN106340837 A CN 106340837A CN 201610874584 A CN201610874584 A CN 201610874584A CN 106340837 A CN106340837 A CN 106340837A
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- detection line
- leak detection
- firm banking
- fixed block
- leak
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02G—INSTALLATION OF ELECTRIC CABLES OR LINES, OR OF COMBINED OPTICAL AND ELECTRIC CABLES OR LINES
- H02G3/00—Installations of electric cables or lines or protective tubing therefor in or on buildings, equivalent structures or vehicles
- H02G3/02—Details
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Abstract
The invention discloses a water leakage detection line fixation apparatus. The water leakage detection line fixation apparatus comprises a fixation base used for fixation at a water leakage detection position; and a movable fixation block which is connected with a fixation base through an elastic apparatus and is provided with a cable arrangement apparatus used for arranging a water leakage detection line. The water leakage detection line fixation apparatus comprises a normal state and a separate state. The water leakage detection line is at the normal state when no external forces are applied, the elastic apparatus enables the movable fixation block to return to the fixation base, and the water leakage detection line realizes water leakage detection of the position arranged at the fixation base; and the water leakage detection line is at the separate state when being pulled by the external forces, the movable fixation block is disengaged from the fixation base, and the elastic apparatus is elongated to absorb the external forces applied to the water leakage detection line so as to prevent the water leakage detection line from fractures. The invention discloses a water leakage detection line fixation method. According to the invention, the water leakage detection line can be prevented from the fractures and can automatically return to an original detection position after being pulled.
Description
Technical field
The present invention relates to semiconductor integrated circuit manufactures field, more particularly to a kind of leak detection line fixing device；This
Invention further relates to a kind of leak detection line fixing meanss.
Background technology
Semiconductor integrated circuit uses pure water (di water), cooling water (pcw) and liquid chemicals in producing in a large number
Deng in order to find the laying in semiconductor production Factory Building (fab) of the abnormal conditions such as leak, the leakage of board and pipeline needs in time
Leak detection line, in fab, production equipment is numerous and area is big, and in a fab, the total length of the leak detection line of setting can surpass
Cross 1 myriametre.
In prior art, leak detection line typically adopts fixed block or wire casing to lay, and is laid using existing fixing meanss
There is following major defect in leak detection line:
1. the personnel easily by go-cart, passing by, the article promoting are pullled, are caused fracture, cause to report to the police.In fab
Go-cart is generally used for transporting required part or the maintenance tool of wafer and board equipment, and go-cart and staff are many
Many, so leak detection line is easy to be pulled to, or even cause fracture, post-rift leak detection line will be unable to work.
2. pullled, touch after easily deviate original test position, cause cannot to be found in time when leak, leakage, prolong
Deal with Time by mistake, may cause bigger harm.Even if also leak detection line does not pull fracture, but, leak detection line meeting
It is shifted, although leak detection line can work after displacement, the position that leak detection line is detected is no longer monitored position
Put, equally cannot be detected when there is leak when monitored position.
Because the quantity of leak detection line laying itself is many and total length is long, and the crowd such as the staff in fab and go-cart
How it is easy to there is the situation that leak detection line is pullled, and in order that leak detection line is in normal wire location, need to consume
Take a large amount of manpowers periodically to be arranged.
In addition, it should be noted that fab is the application scenarios special procured, the leak detection line of fab needs to be laid in ground
On face, often the person of someone will or go-cart etc. pass through, and this and common cable are generally laid in the ground that personnel's article generally will not be encountered
Side's (such as metope, wire casing etc.) is different.Therefore if avoiding leak detection line not occur after being pullled to rupture or shift is one
Individual important and complicated problem, existing method, in order that leak detection line is in normal wire location, needs to expend in a large number
Manpower is periodically arranged；Even if but expend a large amount of manpowers and periodically arranged, arrange leak detection line in interval regular
It is possible at any time be pullled, so that not enabling the real-time monitoring to leak water detdction position.And the semiconductor equipment in fab
Costliness, and have numerous poisonous and hazardous chemical substances, and it is also expensive, once occurring to be formed with the product wafer of integrated circuit
Leakage accident is without being detected, it will cause heavy losses.
Content of the invention
The technical problem to be solved is to provide a kind of leak detection line fixing device, can prevent leak detection line
It is torn, original test position can be automatically reverted to after being pullled by leak detection line.For this reason, the present invention also provides a kind of leak
Detection line fixing meanss.
For solving above-mentioned technical problem, the leak detection line fixing device that the present invention provides includes:
Firm banking, is used for being fixed on leak water detdction position.
Movable fixed block, is connected by elastic device and described firm banking, and described activity fixed block is provided with cable
Arrangement apparatus, described cable arrangement apparatus supply leak detection line to arrange.
Leak detection line fixing device includes normal condition and released state.
It is in normal condition, described elastic device makes described activity fixed block reply when described leak detection line is by external force
To on described firm banking, described leak detection line is realized to the leak water detdction at described firm banking set location.
Described leak detection line is in released state when being pullled by external force, and described activity fixed block departs from described fixing bottom
Seat, described elastic device is elongated thus being absorbed the external force that described leak detection line is subject to, and prevents described leak detection line quilt
Fracture.
Further improvement is that described firm banking passes through sticking double faced adhesive tape and is fixed on leak water detdction position.
Further improvement is that the top of described firm banking is in middle indent arc, the bottom of described activity fixed block
In middle outer convex, outside the centre of described activity fixed block in normal condition, convex is located at the centre of described firm banking
Indent arc is interior and matches.
Further improvement is that described elastic device is automatic rebounding Winder, and described elastic device is fixed on described
On firm banking, the bottom of described activity fixed block is connected with the first end of a connecting line, and the second end of described connecting line connects
The coiling of described automatic rebounding Winder.
Further improvement is that described connecting line is nylon wire.
Further improvement is that described cable arrangement apparatus include cross fixing groove, the arrangement side of described leak detection line
Formula has two kinds, and the first arrangement is the whole piece straight-line groove that described leak detection line passes through in described cross fixing groove；The
Two kinds of arrangements penetrate from one of described cross fixing groove straight-line groove and carry out when midpoint for described leak detection line
Right-angled bend passes from another straight-line groove.
Further improvement is that described cable arrangement apparatus also include a cover plate, and described cover plate is in described leak detection line
Arrangement after the completion of cover in described cross fixing groove.
Further improvement is that described firm banking band is magnetic, and makes described activity fixed block be returned to institute by magnetic
When stating on firm banking, position and direction adjustment are carried out to described activity fixed block.
Further improvement is that leak detection line fixing device is arranged on semiconductor production Factory Building, described leak water detdction position
Setting in the ground of described semiconductor production Factory Building, described leak detection line passes through multiple leak detection line fixing devices.
For solving above-mentioned technical problem, the leak detection line fixing meanss that the present invention provides comprise the steps:
Step one, firm banking is fixed at leak water detdction position.
Step 2, pass through elastic device connection activity fixed block and described firm banking.
Step 3, by leak detection line be arranged in described activity fixed block cable arrangement apparatus on.
When described leak detection line is by external force, leak detection line fixing device is in normal condition, described elastic device
Described activity fixed block is made to be returned on described firm banking, described leak detection line is realized to described firm banking set location
The leak water detdction at place.
When described leak detection line is pullled by external force, the fixing dress of described leak detection line is in released state, described work
Dynamic fixed block departs from described firm banking, and described elastic device is elongated thus absorbed that described leak detection line is subject to is outer
Power, prevents described leak detection line to be broken off.
Further improvement is to be pasted described firm banking by double faced adhesive tape in step one and be fixed on leak water detdction position
Put.
Further improvement is that the top of described firm banking is in middle indent arc, the bottom of described activity fixed block
In middle outer convex, outside the centre of described activity fixed block in normal condition, convex is located at the centre of described firm banking
Indent arc is interior and matches.
Further improvement is that described elastic device is automatic rebounding Winder, and described elastic device is fixed on described
On firm banking, the bottom of described activity fixed block is connected with the first end of a connecting line, and the second end of described connecting line connects
The coiling of described automatic rebounding Winder.
Further improvement is that described connecting line is nylon wire.
Further improvement is that described cable arrangement apparatus include cross fixing groove, the arrangement side of described leak detection line
Formula has two kinds, and the first arrangement is the whole piece straight-line groove that described leak detection line passes through in described cross fixing groove；The
Two kinds of arrangements penetrate from one of described cross fixing groove straight-line groove and carry out when midpoint for described leak detection line
Right-angled bend passes from another straight-line groove.
Further improvement is that described cable arrangement apparatus also include a cover plate, and described cover plate is in described leak detection line
Arrangement after the completion of cover in described cross fixing groove.
Further improvement is that described firm banking band is magnetic, and makes described activity fixed block be returned to institute by magnetic
When stating on firm banking, position and direction adjustment are carried out to described activity fixed block.
Further improvement is that leak detection line fixing device is arranged on semiconductor production Factory Building, described leak water detdction position
Setting in the ground of described semiconductor production Factory Building, described leak detection line passes through multiple leak detection line fixing devices.
Leak detection line fixing device of the present invention has the firm banking matching and movable fixed block, leak detection line cloth
Put on movable fixed block, firm banking is fixed on leak water detdction position, between movable fixed block and firm banking, pass through elasticity
Device connects, and when by external force, movable fixed block can separate with firm banking, and absorbs external force using elastic device, so as to
Leak detection line is prevented to be torn；And after external force disappears, elastic device can make movable fixed block be returned on firm banking again,
Thus enabling leak detection line to automatically revert to original test position after being pullled.
Above-mentioned two technique effect can prevent leak detection line to be torn and energy leak detection line is automatic after being pullled
Being returned to original test position enables leak detection line fixing device of the present invention to carry in the application of semiconductor production Factory Building
Carry out more unexpected technique effect, the total length maximum due to the leak detection line in semiconductor production Factory Building can surpass ten thousand
Rice, and in staff and work process, go-cart used is numerous, therefore the motion of the walking of staff and go-cart all can be right
Leak detection line produces and frequently pulls, and technical scheme well solved this pull brought to leakage
The technical problem that water detection line is pulled apart and shifted, so also can save and be largely used to leak detection line is periodically arranged
Manpower and time are it is also possible to eliminate when leak detection line between regular arrangement and pulling apart and shift and produce leakage accident
Infringement to the board equipment in quasiconductor factory and to the injury of staff moreover it is possible to avoid during equipment fault to crystalline substance
The infringement of circle is it is known that this effect has the characteristics that marked improvement.
Brief description
The present invention is further detailed explanation with reference to the accompanying drawings and detailed description:
Fig. 1 a is the structural representation of the released state of embodiment of the present invention leak detection line fixing device；
Fig. 1 b is the structural representation of the normal condition of embodiment of the present invention leak detection line fixing device；
Fig. 2 is the schematic diagram carrying out leak detection line arrangement using embodiment of the present invention leak detection line fixing device；
Fig. 3 is leak detection line arrangement schematic diagram when leak detection line is pullled at one of Fig. 2 position.
Specific embodiment
As shown in Figure 1a, be the released state of embodiment of the present invention leak detection line fixing device structural representation；As
Shown in Fig. 1 b, it is the structural representation of the normal condition of embodiment of the present invention leak detection line fixing device；As shown in Fig. 2 being
Carry out the schematic diagram of leak detection line arrangement using embodiment of the present invention leak detection line fixing device；Embodiment of the present invention leak
Detection line fixing device 101 includes:
Firm banking 1, is used for being fixed on leak water detdction position.Preferably, described firm banking 1 passes through sticking double faced adhesive tape simultaneously
It is fixed on leak water detdction position.Also described firm banking 1 can be fixed on by leak inspection using alternate manner in other embodiments
Location is put, and the mode of sticking double faced adhesive tape is not construed as limiting the invention.
Movable fixed block 2, is connected by elastic device 5 and described firm banking 1, and described activity fixed block 2 is provided with
Cable arrangement apparatus, described cable arrangement apparatus are arranged for leak detection line 102.
Preferably, refer to the released state schematic diagram shown in Fig. 1 a, the top of described firm banking 1 is in middle imploded arcs
Shape 3, the bottom of described activity fixed block 2 is in middle outer convex 4；With reference to shown in Fig. 1 b, in normal condition, described activity is solid
Determine convex 4 outside the centre of block 2 to be located in the middle indent arc 3 of described firm banking 1 and match.
Described elastic device 5 is automatic rebounding Winder, and described elastic device 5 is fixed on described firm banking 1,
The outlet of the coiling of described elastic device 5 is only shown, the overall structure of automatic rebounding Winder is positioned at described solid in Fig. 1 a
Determine the inside of base 1.The bottom of described activity fixed block 2 is connected with the first end of a connecting line 7, and the second of described connecting line 7
End connects the coiling of described automatic rebounding Winder.In the embodiment of the present invention, described connecting line 7 is nylon wire.Other real
Apply in example, described connecting line 7 can be also other any lines being wound on automatic rebounding Winder.
Described cable arrangement apparatus include cross fixing groove 6, and the arrangement of described leak detection line 102 has two kinds, the
A kind of arrangement is the whole piece straight-line groove that described leak detection line 102 passes through in described cross fixing groove 6；Second is arranged
Mode penetrates from one of described cross fixing groove 6 straight-line groove and carries out right angle when midpoint for described leak detection line 102
Turn and pass from another straight-line groove.The arrangement of described leak detection line 102 may be referred to shown in Fig. 2, labelling in Fig. 2
Leak detection line 102 described in leak detection line fixing device corresponding to 101a and 101d adopts the first arrangement, this
The mode of kind does not change the bearing of trend of described leak detection line 102；Leak detection line corresponding to labelling 101b and 101c is fixed
The line of leak detection described in device 102 adopts second arrangement, and this mode is by the extension side of described leak detection line 102
To 90 degree of change.
Preferably, described cable arrangement apparatus also include a cover plate, and described cover plate is in the arrangement of described leak detection line 102
After the completion of cover in described cross fixing groove 6.
Described firm banking 1 band is magnetic, and so that described activity fixed block 2 is returned on described firm banking 1 by magnetic
When to described activity fixed block 2 carry out position and direction adjustment.
Leak detection line fixing device 101 is arranged on semiconductor production Factory Building, and described leak water detdction position is located at described half
The ground of conductor factory, described leak detection line 102 passes through multiple leak detection line fixing devices 101.
Leak detection line fixing device 101 includes normal condition and released state.
It is in normal condition, described elastic device 5 makes described activity fixed block when described leak detection line 102 is by external force
2 are returned on described firm banking 1, and described leak detection line 102 is realized to the leak inspection at described firm banking 1 set location
Survey.
Described leak detection line 102 is in released state when being pullled by external force, and described activity fixed block 2 departs from described solid
Determine base 1, described elastic device 5 is elongated thus being absorbed the external force that described leak detection line 102 is subject to, and prevents described leak
Detection line 102 is broken off.As shown in figure 3, be at one of Fig. 2 position leak detection line pullled i.e. be subject to external force produce draw
Leak detection line arrangement schematic diagram when pulling, the at this moment movable fixed block of the leak detection line fixing device corresponding to labelling 101c
2 and firm banking 1 separates it is known that after movable fixed block 2 and firm banking 1 separate, leak detection line 102 is not forced,
External force is absorbed by described elastic device 5, therefore leak detection line 102 can be prevented to be torn.After external force eliminates, the mark in Fig. 3
Leak detection line fixing device corresponding to note 101c can be returned to the normal condition shown in Fig. 2 again, at this moment enable to solid again
Determine to carry out leak water detdction at position shown in base 1, after preventing external force from eliminating, leak detection line 102 will not be returned to lacking of original position
Fall into.
As shown in Figure 1a, be the released state of embodiment of the present invention leak detection line fixing device structural representation；As
Shown in Fig. 1 b, it is the structural representation of the normal condition of embodiment of the present invention leak detection line fixing device；As shown in Fig. 2 being
Carry out the schematic diagram of leak detection line arrangement using embodiment of the present invention leak detection line fixing device；Embodiment of the present invention leak
Detection line fixing meanss comprise the steps:
Step one, firm banking 1 is fixed at leak water detdction position.Preferably, described firm banking 1 passes through double faced adhesive tape
Paste and be fixed on leak water detdction position.Also using alternate manner, described firm banking 1 can be fixed in other embodiments
Leak water detdction position, the mode of sticking double faced adhesive tape is not construed as limiting the invention.
In present invention method, leak detection line fixing device 101 is arranged on semiconductor production Factory Building, described leak
Test position is located at the ground of described semiconductor production Factory Building, and described leak detection line 102 is fixed through multiple leak detection lines
Device 101.
Step 2, pass through elastic device 5 connection activity fixed block 2 and described firm banking 1.
Preferably, refer to the released state schematic diagram shown in Fig. 1 a, the top of described firm banking 1 is in middle imploded arcs
Shape 3, the bottom of described activity fixed block 2 is in middle outer convex 4；With reference to shown in Fig. 1 b, in normal condition, described activity is solid
Determine convex 4 outside the centre of block 2 to be located in the middle indent arc 3 of described firm banking 1 and match.
Described elastic device 5 is automatic rebounding Winder, and described elastic device 5 is fixed on described firm banking 1,
The outlet of the coiling of described elastic device 5 is only shown, the overall structure of automatic rebounding Winder is positioned at described solid in Fig. 1 a
Determine the inside of base 1.The bottom of described activity fixed block 2 is connected with the first end of a connecting line 7, and the second of described connecting line 7
End connects the coiling of described automatic rebounding Winder.In present invention method, described connecting line 7 is nylon wire.At it
In its embodiment method, described connecting line 7 can be also other any lines being wound on automatic rebounding Winder.
Described firm banking 1 band is magnetic, and so that described activity fixed block 2 is returned on described firm banking 1 by magnetic
When to described activity fixed block 2 carry out position and direction adjustment.
Step 3, by leak detection line 102 be arranged in described activity fixed block 2 cable arrangement apparatus on；
Preferably, described cable arrangement apparatus include cross fixing groove 6, and the arrangement of described leak detection line 102 has
Two kinds, the first arrangement is the whole piece straight-line groove that described leak detection line 102 passes through in described cross fixing groove 6；The
Two kinds of arrangements penetrate and when midpoint from one of described cross fixing groove 6 straight-line groove for described leak detection line 102
Carry out right-angled bend to pass from another straight-line groove.The arrangement of described leak detection line 102 may be referred to shown in Fig. 2, Fig. 2
Leak detection line 102 described in leak detection line fixing device corresponding to middle labelling 101a and 101d adopts the first arrangement side
Formula, this mode does not change the bearing of trend of described leak detection line 102；Leak detection line corresponding to labelling 101b and 101c
The line of leak detection described in fixing device 102 adopts second arrangement, and this mode is prolonged described leak detection line 102
Stretch direction and change 90 degree.
Preferably, described cable arrangement apparatus also include a cover plate, and described cover plate is in the arrangement of described leak detection line 102
After the completion of cover in described cross fixing groove 6.
When described leak detection line 102 is not subject to external force, leak detection line fixing device 101 is in normal condition, described bullet
Property device 5 make described activity fixed block 2 be returned on described firm banking 1, described leak detection line 102 is realized to described fixation
Leak water detdction at base 1 set location.
When described leak detection line 102 is pullled by external force, the fixing dress of described leak detection line 102 is in released state,
Described activity fixed block 2 departs from described firm banking 1, and described elastic device 5 is elongated thus being absorbed described leak detection line
102 external force being subject to, prevent described leak detection line 102 to be broken off.
Above by specific embodiment, the present invention is described in detail, but these have not constituted the limit to the present invention
System.Without departing from the principles of the present invention, those skilled in the art also can make many deformation and improve, and these also should
It is considered as protection scope of the present invention.
Claims (18)
1. a kind of leak detection line fixing device is it is characterised in that include:
Firm banking, is used for being fixed on leak water detdction position；
Movable fixed block, is connected by elastic device and described firm banking, and described activity fixed block is provided with cable arrangement
Device, described cable arrangement apparatus supply leak detection line to arrange；
Leak detection line fixing device includes normal condition and released state；
It is in normal condition, described elastic device makes described activity fixed block be returned to institute when described leak detection line is by external force
State on firm banking, described leak detection line is realized to the leak water detdction at described firm banking set location；
Described leak detection line is in released state when being pullled by external force, and described activity fixed block departs from described firm banking,
Described elastic device is elongated thus being absorbed the external force that described leak detection line is subject to, and prevents described leak detection line from being broken
Split.
2. leak detection line fixing device as claimed in claim 1 it is characterised in that: described firm banking pass through two-sided gluing
Paste and be fixed on leak water detdction position.
3. leak detection line fixing device as claimed in claim 1 it is characterised in that: the top of described firm banking be in centre
Indent arc, the bottom of described activity fixed block is in middle outer convex, the centre of described activity fixed block in normal condition
Outer convex is located in the middle indent arc of described firm banking and matches.
4. leak detection line fixing device as claimed in claim 1 it is characterised in that: described elastic device be automatic rebounding around
Line apparatus, described elastic device is fixed on described firm banking, the bottom of described activity fixed block and the first of a connecting line
End is connected, and the second end of described connecting line connects the coiling of described automatic rebounding Winder.
5. leak detection line fixing device as claimed in claim 4 it is characterised in that: described connecting line be nylon wire.
6. leak detection line fixing device as claimed in claim 1 it is characterised in that: described cable arrangement apparatus include cross
Fixing groove, the arrangement of described leak detection line has two kinds, and the first arrangement passes through described for described leak detection line
A whole piece straight-line groove in cross fixing groove；Second arrangement is described leak detection line from described cross fixing groove
One straight-line groove penetrates and carries out right-angled bend when midpoint and passes from another straight-line groove.
7. leak detection line fixing device as claimed in claim 1 it is characterised in that: described cable arrangement apparatus also include one
Cover plate, described cover plate covers in described cross fixing groove after the completion of the arrangement of described leak detection line.
8. leak detection line fixing device as claimed in claim 1 it is characterised in that: described firm banking band is magnetic, lead to
Crossing magnetic makes described activity fixed block carry out position and direction tune to described activity fixed block when being returned on described firm banking
Whole.
9. leak detection line fixing device as claimed in claim 1 it is characterised in that: leak detection line fixing device is arranged on
Semiconductor production Factory Building, described leak water detdction position is located at the ground of described semiconductor production Factory Building, and described leak detection line is worn
Cross multiple leak detection line fixing devices.
10. a kind of leak detection line fixing meanss are it is characterised in that comprise the steps:
Step one, firm banking is fixed at leak water detdction position；
Step 2, pass through elastic device connection activity fixed block and described firm banking；
Step 3, by leak detection line be arranged in described activity fixed block cable arrangement apparatus on；
When described leak detection line is by external force, leak detection line fixing device is in normal condition, and described elastic device makes institute
State movable fixed block to be returned on described firm banking, described leak detection line is realized to described firm banking set location
Leak water detdction；
When described leak detection line is pullled by external force, the fixing dress of described leak detection line is in released state, and described activity is solid
Determine block and depart from described firm banking, described elastic device is elongated thus being absorbed the external force that described leak detection line is subject to, prevent
Only described leak detection line is broken off.
11. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: pass through double faced adhesive tape in step one by institute
State firm banking to paste and be fixed on leak water detdction position.
12. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: during the top of described firm banking is in
Between indent arc, the bottom of described activity fixed block is in middle outer convex, in the described movable fixed block in normal condition
Between outer convex be located at described firm banking middle indent arc interior and match.
13. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: described elastic device be automatic rebounding
Winder, described elastic device is fixed on described firm banking, and the of the described activity bottom of fixed block and a connecting line
One end is connected, and the second end of described connecting line connects the coiling of described automatic rebounding Winder.
14. leak detection line fixing meanss as claimed in claim 13 it is characterised in that: described connecting line be nylon wire.
15. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: described cable arrangement apparatus include ten
Word fixing groove, the arrangement of described leak detection line has two kinds, and the first arrangement passes through institute for described leak detection line
State the whole piece straight-line groove in cross fixing groove；Second arrangement is described leak detection line from described cross fixing groove
A straight-line groove penetrate and carry out right-angled bend when midpoint and pass from another straight-line groove.
16. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: described cable arrangement apparatus also include
One cover plate, described cover plate covers in described cross fixing groove after the completion of the arrangement of described leak detection line.
17. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: described firm banking band is magnetic,
Described activity fixed block is made to carry out position and direction to described activity fixed block when being returned on described firm banking by magnetic
Adjustment.
18. leak detection line fixing meanss as claimed in claim 10 it is characterised in that: leak detection line fixing device setting
In semiconductor production Factory Building, described leak water detdction position is located at the ground of described semiconductor production Factory Building, described leak detection line
Through multiple leak detection line fixing devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610874584.4A CN106340837B (en) | 2016-09-30 | 2016-09-30 | Leak detection line fixing device and its method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610874584.4A CN106340837B (en) | 2016-09-30 | 2016-09-30 | Leak detection line fixing device and its method |
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| CN106340837A true CN106340837A (en) | 2017-01-18 |
| CN106340837B CN106340837B (en) | 2017-12-05 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900629A (en) * | 2009-05-26 | 2010-12-01 | 邓龙告 | Water leakage detection line |
| CN201993207U (en) * | 2011-01-10 | 2011-09-28 | 上海华虹Nec电子有限公司 | Improved water leakage detection system |
| CN202584366U (en) * | 2012-05-18 | 2012-12-05 | 高青县供电公司 | Computer room leakage monitoring device |
| CN103376191A (en) * | 2012-04-20 | 2013-10-30 | 上海华虹Nec电子有限公司 | Intelligent multi-channel leakage and breakage detection system |
| KR20150131888A (en) * | 2014-05-16 | 2015-11-25 | (주)유민에쓰티 | Water leak detection sensor |
-
2016
- 2016-09-30 CN CN201610874584.4A patent/CN106340837B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101900629A (en) * | 2009-05-26 | 2010-12-01 | 邓龙告 | Water leakage detection line |
| CN201993207U (en) * | 2011-01-10 | 2011-09-28 | 上海华虹Nec电子有限公司 | Improved water leakage detection system |
| CN103376191A (en) * | 2012-04-20 | 2013-10-30 | 上海华虹Nec电子有限公司 | Intelligent multi-channel leakage and breakage detection system |
| CN202584366U (en) * | 2012-05-18 | 2012-12-05 | 高青县供电公司 | Computer room leakage monitoring device |
| KR20150131888A (en) * | 2014-05-16 | 2015-11-25 | (주)유민에쓰티 | Water leak detection sensor |
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| Publication number | Publication date |
|---|---|
| CN106340837B (en) | 2017-12-05 |
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