CN106335990B - Purifying agent for silicon wafer processing wastewater and preparation method thereof - Google Patents

Purifying agent for silicon wafer processing wastewater and preparation method thereof Download PDF

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Publication number
CN106335990B
CN106335990B CN201610714884.6A CN201610714884A CN106335990B CN 106335990 B CN106335990 B CN 106335990B CN 201610714884 A CN201610714884 A CN 201610714884A CN 106335990 B CN106335990 B CN 106335990B
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parts
raw materials
stirring
silicon wafer
sodium hydroxide
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CN106335990A (en
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吕凤岗
程林
曹来福
戴珍旭
胡正田
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Tianchang Yusheng Energy Technology Co ltd
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Anhui Zhengtian Energy Technology Co ltd
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    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/52Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/54Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using organic material
    • C02F1/56Macromolecular compounds
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/28Treatment of water, waste water, or sewage by sorption
    • C02F1/285Treatment of water, waste water, or sewage by sorption using synthetic organic sorbents
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/52Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/5236Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using inorganic agents
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00Treatment of water, waste water, or sewage
    • C02F1/52Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities
    • C02F1/54Treatment of water, waste water, or sewage by flocculation or precipitation of suspended impurities using organic material
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00Nature of the contaminant
    • C02F2101/10Inorganic compounds
    • C02F2101/20Heavy metals or heavy metal compounds
    • CCHEMISTRY; METALLURGY
    • C02TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02FTREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00Nature of the contaminant
    • C02F2101/30Organic compounds
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02WCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W10/00Technologies for wastewater treatment
    • Y02W10/30Wastewater or sewage treatment systems using renewable energies
    • Y02W10/37Wastewater or sewage treatment systems using renewable energies using solar energy

Abstract

A purifying agent for silicon wafer processing wastewater relates to the technical field of silicon material processing, and is prepared from the following raw materials in parts by weight: 15-25 parts of montmorillonite, 3-5 parts of plaster of paris, 15-25 parts of alum, 3-5 parts of calcium chloride, 6-8 parts of bentonite, 2-4 parts of citric acid, 6-8 parts of tannin, 10-20 parts of soybean protein, 5-7 parts of activated carbon, 8-10 parts of alginic acid, 2-4 parts of ferrous sulfate, 5-7 parts of sodium hydroxide, 5-7 parts of polyaluminium chloride, 5-7 parts of polyacrylamide, 15-25 parts of modified starch, 80-120 parts of gelatin and 35-45 parts of magnetic clay. The invention has the beneficial effects that: the raw materials adopted by the invention are rich and cheap, the manufacturing process is simple and convenient, the silicon wafer cutting wastewater is suitable for removing the pollution of the water body, the organic harmful substances and the heavy metals in the water body are quickly and thoroughly removed, the conversion is realized by physical and chemical reactions, namely, the scavenger and the curing agent are used, the water body pollutants are fundamentally controlled and removed, and the effect is obvious.

Description

Purifying agent for silicon wafer processing wastewater and preparation method thereof
Technical Field
The invention relates to the technical field of silicon material processing, in particular to a purifying agent for silicon wafer processing wastewater and a preparation method thereof.
Background
Silicon material, which is an important semiconductor material, is represented by chemical element symbol Si, and silicon used in the electronic industry should have high purity and excellent electrical and mechanical properties, and silicon is the most productive and widely used semiconductor material, and its yield and usage mark the electronic industry level in a country, and single crystal silicon is used in solar cells, and high purity single crystal silicon is an important semiconductor material. At present, with the rapid development of photovoltaic technology and micro-miniature semiconductor inverter technology, solar cells produced from silicon single crystals can directly convert solar energy into light energy, and the beginning of the green energy revolution is realized.
The silicon chip is a physical form of silicon material, and in normal application, the silicon chip is an important material for manufacturing an integrated circuit, and various semiconductor devices can be manufactured by means of photoetching, ion implantation and the like on the silicon chip. The chip made of silicon chip has amazing operational capability, and the development of science and technology continuously pushes the development of semiconductor, automation, computer and other technologies, so that the manufacturing cost of the high-technology product of silicon chip is reduced to a very low degree, however, when the silicon chip is processed, different process nodes can cause the processing of the silicon chip to have flaws.
The silicon wafer is generally formed by slicing a corresponding silicon ingot, and because a large amount of cutting fluid is applied and some polluting chemical reagents are used for assisting in cutting, the silicon wafer needs to be correspondingly cleaned after being cut so as to ensure the cleanness of the silicon wafer and further ensure the corresponding physical properties of the silicon wafer, an indispensable step is required in silicon wafer processing during silicon wafer cleaning, so that a large amount of processing wastewater exists in silicon wafer processing enterprises, and if the wastewater is directly discharged, environmental pollution is inevitably caused, so that the wastewater can be discharged after corresponding treatment, but in the technical field at present, a special treating agent for the silicon wafer wastewater does not exist, so that the wastewater cannot be fully purified.
The invention content is as follows:
the invention aims to provide a purifying agent for silicon wafer processing wastewater, which has the advantages of reasonable formula, thorough purification, low cost and obvious use effect, and a preparation method thereof.
The technical problem to be solved by the invention is realized by adopting the following technical scheme:
the purifying agent for silicon wafer processing wastewater is characterized by being prepared from the following raw materials in parts by weight:
15-25 parts of montmorillonite, 3-5 parts of plaster of paris, 15-25 parts of alum, 3-5 parts of calcium chloride, 6-8 parts of bentonite, 2-4 parts of citric acid, 6-8 parts of tannin, 10-20 parts of soybean protein, 5-7 parts of activated carbon, 8-10 parts of alginic acid, 2-4 parts of ferrous sulfate, 5-7 parts of sodium hydroxide, 5-7 parts of polyaluminium chloride, 5-7 parts of polyacrylamide, 15-25 parts of modified starch, 80-120 parts of gelatin and 35-45 parts of magnetic clay.
The preferable components of the raw materials are as follows:
20 parts of montmorillonite, 4 parts of plaster of paris, 20 parts of alum, 4 parts of calcium chloride, 7 parts of bentonite, 3 parts of citric acid, 7 parts of tannin, 15 parts of soybean protein, 6 parts of activated carbon, 9 parts of alginic acid, 3 parts of ferrous sulfate, 6 parts of sodium hydroxide, 6 parts of polyaluminum chloride, 6 parts of polyacrylamide, 20 parts of modified starch, 100 parts of gelatin and 40 parts of magnetic soil.
The magnetic soil is prepared by compounding clay and magnetic powder according to the weight ratio of 10:1 and grinding, and the particle diameter is 60-70 um;
the modified starch consists of the following raw materials in parts by weight: 100 parts of starch, 3 parts of sodium hexametaphosphate, 35 parts of water, 4 parts of phosphoric acid, 15 parts of sodium hydroxide, 2.5 parts of borax and 20 parts of sodium-based bentonite;
the preparation method comprises the following steps: putting starch into a stirring and dissolving device, adding sodium hexametaphosphate into a container, stirring and mixing, adding 20 parts of water into the starch, stirring for 5 minutes, standing for swelling and dispersing for 40 minutes, adding 5 parts of phosphoric acid and water into the stirring container, stirring uniformly, standing for 30 minutes, adding sodium hydroxide, borax and the remaining 10 parts of water into the stirring container, stirring uniformly, standing for 45 minutes, adding sodium-based bentonite, and drying to obtain the modified starch.
The preparation method of the purifying agent comprises the following steps:
1) taking a ball mill, putting montmorillonite, plaster of paris, alum, calcium chloride, bentonite, citric acid, tannin, soybean protein, activated carbon, alginic acid, ferrous sulfate, sodium hydroxide, polyaluminium chloride, polyacrylamide and modified starch in raw materials, starting the ball mill until the fineness of particles is 20-30um, and stopping grinding to obtain a mixture for later use;
2) putting gelatin in the raw materials into a pot, boiling, adding the raw materials in the step 1 while the gelatin is hot, mixing, adding water, stirring, drying and granulating to obtain pills with the particle diameter of 0.2-0.3mm for later use;
3) and (3) taking a roller stirrer, heating to 45-55 ℃, adding the magnetic soil in the raw materials, adding the materials obtained in the step (2), and starting stirring until the magnetic soil is fully attached to the surface wall of the pellet.
When the product is used, 1 kg of the product is adopted per cubic meter of sewage, and the product is directly scattered into water, stirred, kept stand for 30-40min and filtered.
The method is characterized in that materials with decomposition and flocculation effects are combined by adopting gelatin to form a pill body, then magnetic soil is matched with the surface of the pill body, after the pill body enters a wastewater body, the magnetic soil directly positioned on the surface wall of the pill body works in advance, metal particles in the wastewater are adsorbed and then directly fall to the water body, after the magnetic soil on the surface of the pill body is diluted, decomposed substances and flocculated substances mixed with the gelatin inside can decompose and flocculate harmful substances in the water body, finally uniformly fall into the water bottom, the harmful substances are directly separated from water, and finally, the filtered water is discharged with great care.
The invention has the beneficial effects that: the raw materials adopted by the invention are rich and cheap, the manufacturing process is simple and convenient, the silicon wafer cutting wastewater is suitable for removing the pollution of the water body, the organic harmful substances and the heavy metals in the water body are quickly and thoroughly removed, the conversion is realized by physical and chemical reactions, namely, the scavenger and the curing agent are used, the water body pollutants are fundamentally controlled and removed, and the effect is obvious.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further described with the specific embodiments.
Example 1
Weighing: 15kg of montmorillonite, 3kg of plaster of paris, 15kg of alum, 3kg of calcium chloride, 6kg of bentonite, 2kg of citric acid, 6kg of tannin, 10kg of soybean protein, 5kg of activated carbon, 8kg of alginic acid, 2kg of ferrous sulfate, 5kg of sodium hydroxide, 5kg of polyaluminium chloride, 5kg of polyacrylamide, 15kg of modified starch, 80kg of gelatin and 35kg of magnetic soil.
Example 2
Weighing: 20kg of montmorillonite, 4kg of plaster of paris, 20kg of alum, 4kg of calcium chloride, 7kg of bentonite, 3kg of citric acid, 7kg of tannin, 15kg of soybean protein, 6kg of activated carbon, 9kg of alginic acid, 3kg of ferrous sulfate, 6kg of sodium hydroxide, 6kg of polyaluminium chloride, 6kg of polyacrylamide, 20kg of modified starch, 100kg of gelatin and 40kg of magnetic soil.
The method for preparing the above example 1 or 2 is:
1) taking a ball mill, putting montmorillonite, plaster of paris, alum, calcium chloride, bentonite, citric acid, tannin, soybean protein, activated carbon, alginic acid, ferrous sulfate, sodium hydroxide, polyaluminium chloride, polyacrylamide and modified starch in raw materials, starting the ball mill until the fineness of particles is 20-30um, and stopping grinding to obtain a mixture for later use;
2) putting gelatin in the raw materials into a pot, boiling, adding the raw materials in the step 1 while the gelatin is hot, mixing, adding water, stirring, drying and granulating to obtain pills with the particle diameter of 0.2-0.3mm for later use;
3) and (3) taking a roller stirrer, heating to 45-55 ℃, adding the magnetic soil in the raw materials, adding the materials obtained in the step (2), and starting stirring until the magnetic soil is fully attached to the surface wall of the pellet.
When the product is used, 1 kg of the product is adopted per cubic meter of sewage, and the product is directly scattered into water, stirred, kept stand for 30-40min and filtered.
The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are described in the specification and illustrated only to illustrate the principle of the present invention, but that various changes and modifications may be made therein without departing from the spirit and scope of the present invention, which fall within the scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.

Claims (3)

1. The purifying agent for silicon wafer processing wastewater is characterized by being prepared from the following raw materials in parts by weight:
15-25 parts of montmorillonite, 3-5 parts of plaster of paris, 15-25 parts of alum, 3-5 parts of calcium chloride, 6-8 parts of bentonite, 2-4 parts of citric acid, 6-8 parts of tannin, 10-20 parts of soybean protein, 5-7 parts of activated carbon, 8-10 parts of alginic acid, 2-4 parts of ferrous sulfate, 5-7 parts of sodium hydroxide, 5-7 parts of polyaluminium chloride, 5-7 parts of polyacrylamide, 15-25 parts of modified starch, 80-120 parts of gelatin and 35-45 parts of magnetic soil;
the magnetic soil is prepared by compounding clay and magnetic powder according to the weight ratio of 10:1 and grinding, and the particle diameter is 60-70 um;
the preparation method of the purifying agent for the silicon wafer processing wastewater comprises the following preparation steps:
1) taking a ball mill, putting montmorillonite, plaster of paris, alum, calcium chloride, bentonite, citric acid, tannin, soybean protein, activated carbon, alginic acid, ferrous sulfate, sodium hydroxide, polyaluminium chloride, polyacrylamide and modified starch in raw materials, starting the ball mill until the fineness of particles is 20-30um, and stopping grinding to obtain a mixture for later use;
2) putting gelatin in the raw materials into a pot, boiling, adding the raw materials in the step 1 while the gelatin is hot, mixing, adding water, stirring, drying and granulating to obtain pills with the particle diameter of 0.2-0.3mm for later use;
3) and (3) taking a roller stirrer, heating to 45-55 ℃, adding the magnetic soil in the raw materials, adding the materials obtained in the step (2), and starting stirring until the magnetic soil is fully attached to the surface wall of the pellet.
2. The purifying agent for silicon wafer processing wastewater according to claim 1, wherein the preferable components of the raw materials are: 20 parts of montmorillonite, 4 parts of plaster of paris, 20 parts of alum, 4 parts of calcium chloride, 7 parts of bentonite, 3 parts of citric acid, 7 parts of tannin, 15 parts of soybean protein, 6 parts of activated carbon, 9 parts of alginic acid, 3 parts of ferrous sulfate, 6 parts of sodium hydroxide, 6 parts of polyaluminum chloride, 6 parts of polyacrylamide, 20 parts of modified starch, 100 parts of gelatin and 40 parts of magnetic soil.
3. The purifying agent for silicon wafer processing wastewater according to claim 1, which is characterized in that: the modified starch consists of the following raw materials in parts by weight: 100 parts of starch, 3 parts of sodium hexametaphosphate, 35 parts of water, 4 parts of phosphoric acid, 15 parts of sodium hydroxide, 2.5 parts of borax and 20 parts of sodium-based bentonite;
the preparation method comprises the following steps: putting starch into a stirring and dissolving device, adding sodium hexametaphosphate into a container, stirring and mixing, adding 20 parts of water into the starch, stirring for 5 minutes, standing for swelling and dispersing for 40 minutes, adding 5 parts of phosphoric acid and water into the stirring container, stirring uniformly, standing for 30 minutes, adding sodium hydroxide, borax and the remaining 10 parts of water into the stirring container, stirring uniformly, standing for 45 minutes, adding sodium-based bentonite, and drying to obtain the modified starch.
CN201610714884.6A 2016-08-24 2016-08-24 Purifying agent for silicon wafer processing wastewater and preparation method thereof Active CN106335990B (en)

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CN110921760A (en) * 2019-12-13 2020-03-27 西安润川环保科技有限公司 Wastewater decontamination material and preparation method thereof

Citations (5)

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CN1522972A (en) * 2003-09-03 2004-08-25 华南理工大学 Method for preparing magnetic filling with biological affinity, hydrophilicity and activity for water treatment
JP2007237097A (en) * 2006-03-09 2007-09-20 Osaka Prefecture Magnetic adsorbent and waste water treating technique using it
CN104478058A (en) * 2014-11-04 2015-04-01 沈礼群 Pond-lake heavy-metal pesticide fertilizer pollutant solidifying removing agent and preparation method thereof
CN104478016A (en) * 2014-11-28 2015-04-01 南京化学工业园新城科技创业中心 Novel industrial wastewater treatment agent
CN105731580A (en) * 2016-01-29 2016-07-06 张锐 Heavy metal sewage treatment particles and preparation method thereof

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9758414B2 (en) * 2010-06-24 2017-09-12 Richcore Lifesciences Pvt. Ltd. Method for rapid treatment of waste water and a composition thereof

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1522972A (en) * 2003-09-03 2004-08-25 华南理工大学 Method for preparing magnetic filling with biological affinity, hydrophilicity and activity for water treatment
JP2007237097A (en) * 2006-03-09 2007-09-20 Osaka Prefecture Magnetic adsorbent and waste water treating technique using it
CN104478058A (en) * 2014-11-04 2015-04-01 沈礼群 Pond-lake heavy-metal pesticide fertilizer pollutant solidifying removing agent and preparation method thereof
CN104478016A (en) * 2014-11-28 2015-04-01 南京化学工业园新城科技创业中心 Novel industrial wastewater treatment agent
CN105731580A (en) * 2016-01-29 2016-07-06 张锐 Heavy metal sewage treatment particles and preparation method thereof

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