CN106334506B - A kind of supercritical reaction device and supercritical processing system - Google Patents
A kind of supercritical reaction device and supercritical processing system Download PDFInfo
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- CN106334506B CN106334506B CN201610940179.8A CN201610940179A CN106334506B CN 106334506 B CN106334506 B CN 106334506B CN 201610940179 A CN201610940179 A CN 201610940179A CN 106334506 B CN106334506 B CN 106334506B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/02—Apparatus characterised by being constructed of material selected for its chemically-resistant properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0006—Controlling or regulating processes
- B01J19/002—Avoiding undesirable reactions or side-effects, e.g. avoiding explosions, or improving the yield by suppressing side-reactions
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J19/0053—Details of the reactor
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F1/00—Treatment of water, waste water, or sewage
- C02F1/72—Treatment of water, waste water, or sewage by oxidation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00051—Controlling the temperature
- B01J2219/00074—Controlling the temperature by indirect heating or cooling employing heat exchange fluids
- B01J2219/00087—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor
- B01J2219/00099—Controlling the temperature by indirect heating or cooling employing heat exchange fluids with heat exchange elements outside the reactor the reactor being immersed in the heat exchange medium
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/00049—Controlling or regulating processes
- B01J2219/00245—Avoiding undesirable reactions or side-effects
- B01J2219/00259—Preventing runaway of the chemical reaction
- B01J2219/00263—Preventing explosion of the chemical mixture
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
- B01J2219/02—Apparatus characterised by their chemically-resistant properties
- B01J2219/0204—Apparatus characterised by their chemically-resistant properties comprising coatings on the surfaces in direct contact with the reactive components
- B01J2219/0236—Metal based
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- C—CHEMISTRY; METALLURGY
- C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
- C02F2101/00—Nature of the contaminant
- C02F2101/30—Organic compounds
Abstract
The embodiment of the present invention provides a kind of supercritical reaction device and supercritical processing system, is related to first supercritical processing field, can reduce the risk that detonation occurs during startup for supercritical reaction device.The supercritical reaction device includes outer cylinder and the inner cylinder that outer barrel is arranged in, cooling water inlet and material outlet are provided on outer cylinder, inner cylinder is made of resistant material, and sacrificial layer is covered on the inner wall of inner cylinder, and the high temperature oxidation resisting ability of sacrificial layer is greater than the high temperature oxidation resisting ability of inner cylinder.The present invention is used for supercritical reaction device.
Description
Technical field
The present invention relates to first supercritical processing field more particularly to a kind of supercritical reaction devices and supercritical processing system.
Background technique
Supercritical water oxidation method processing technique is using supercritical water as medium, under high-temperature and high-pressure conditions, by waste water
Or organic matter contained in sewage resolves into the simple nontoxic small molecule compound such as water, carbon dioxide with oxygen.Faced due to super
Boundary's water oxidation processing technique nearly reaches 100% to organic matter clearance rate contained in waste water or sewage, and in totally-enclosed shape
State organic matter is fully oxidized, without secondary pollution, and therefore, technique is increasingly subject to the attention of people.But this high temperature and pressure
Reaction condition to the more demanding of equipment, and the corrosive ion contained in material can generate violent corrosion to reactor,
Especially chloride ion can generate strong spot corrosion to a variety of materials, greatly reduce service life of equipment and economy.
To solve the above problems, devising a kind of double-deck reactor of water cooled wall type in the prior art, i.e., internal layer is not hold
The inner sleeve of pressure, predominantly material reaction area；Outer layer plays pressure-bearing, and cooling water is led between outer layer and internal layer, reduces inner tube wall
Temperature.To cope with corrosion of the chloride ion contained in material to reactor, the titanium or titanium that internal layer usually selects chlorine-resistant property excellent
Alloy production.However found through research practice, violent combustion can occur under 500 DEG C or more of pure oxygen environment for titanium or titanium alloy
It burns.Before supercritical reaction starts, it need to usually introduce fuel and rise temperature simultaneously with pressure change, and in control pressure change
And during flow disturbance, the temperature of system intermittent can be reduced, and reduce the influence caused by system to make up temperature, often
Fuel and combustion adjuvant (usually oxygen) are supplemented into system.Since temperature display has certain hysteresis quality, temperature is caused to increase
Still there is excessive combustion adjuvant to be supplemented in afterwards to come, makes inevitably to generate a degree of detonation in reactor.If detonation is sent out
When life is near inner cylinder, high temperature and the oxygen-enriched situation coexisted will be generated in this regional area, titanium or titanium alloy can be made in this way
Vigorous oxidation or even burning bring greater risk and loss for production.Although in the prior art by the continuous of control condition
This influence of fluctuations can be controlled within certain limits, so that detonation will not occur when reactor stable operation, but reacted by optimization
During device starts, since great variety can occur for temperature, pressure and the oxygen content in reactor, in reactor there are still
Biggish detonation risk.
Summary of the invention
The embodiment of the present invention provides a kind of supercritical reaction device and supercritical processing system, can reduce supercritical reaction
The risk of detonation occurs during startup for device.
In order to achieve the above objectives, the embodiment of the present invention adopts the following technical scheme that
On the one hand, the embodiment of the present invention provides a kind of supercritical reaction device, including outer cylinder and setting portion in the outer cylinder
Inner cylinder, be provided with cooling water inlet and material outlet on the outer cylinder, the inner cylinder is made of resistant material, the inner cylinder
Inner wall on be covered with sacrificial layer, the high temperature oxidation resisting ability of the sacrificial layer is greater than the high temperature oxidation resisting ability of the inner cylinder.
Optionally, the material of the inner cylinder is titanium or titanium alloy, and the material of the sacrificial layer is carbon steel, stainless steel or Ni-based
Alloy.
Optionally, the sacrificial layer with a thickness of 1.5mm~2.5mm.
Optionally, when the ratio of height to diameter H/D of the inner cylinder is 2.7~3.2, the inside of the sacrificial layer is provided with benefit in one week
Layer is repaid, the setting height of the compensation layer is 0.28H~0.36H；
The high temperature oxidation resisting ability of the compensation layer is greater than the high temperature oxidation resisting ability of the inner cylinder.
Optionally, the width of the compensation layer is 20mm~50mm.
Optionally, the compensation layer with a thickness of 1.4mm~2.5mm.
Optionally, the material of the inner cylinder is titanium or titanium alloy, and the material of the compensation layer is carbon steel, stainless steel or Ni-based
Alloy.
Optionally, the sacrificial layer is produced on the inner wall of the inner cylinder by explosion composite method.
Optionally, the inner cylinder includes taper necking, is provided between the outer cylinder and the side wall of the taper necking
Multiple through-holes are distributed on the distribution grid in distribution grid, and the opening direction of the through-hole is inclined with the side wall of the taper necking
Tilted direction is consistent.
On the other hand, the embodiment of the present invention provides a kind of supercritical processing system, including surpassing described in any one of the above
Critical reaction device.
Supercritical reaction device and supercritical processing system provided in an embodiment of the present invention, the supercritical reaction device include outer
Cylinder and the inner cylinder of outer barrel is set, is provided with cooling water inlet and material outlet on outer cylinder, inner cylinder is by resistant material system
At being covered with sacrificial layer on the inner wall of inner cylinder, the high temperature oxidation resisting ability of sacrificial layer is greater than the high temperature oxidation resisting ability of inner cylinder.Phase
Compared with the prior art, the embodiment of the present invention is by covering sacrificial layer on the inner wall of the inner cylinder of supercritical reaction device, due to sacrificing
The high temperature oxidation resisting ability of layer is greater than the high temperature oxidation resisting ability of inner cylinder, thus utilizes the stronger sacrificial layer of high temperature oxidation resisting ability
Inner cylinder and the oxygen-enriched environment in reactor are kept apart, in this way in supercritical reaction device start-up course, even if supercritical reaction
The part of device, which generates high temperature and oxygen-enriched environment, supercritical reaction device, will not occur detonation risk, that is, reduce supercritical reaction
The risk of detonation occurs during startup for device.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is a kind of structural schematic diagram of supercritical reaction device provided in an embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The embodiment of the present invention provides a kind of supercritical reaction device, refering to what is shown in Fig. 1, the supercritical reaction device includes outer cylinder
1 and the inner cylinder 2 that is arranged in inside outer cylinder 1, cooling water inlet 3 and material outlet 4 are provided on outer cylinder 1, and inner cylinder 2 is by corrosion-resistant material
Material is made, and sacrificial layer 5 is covered on the inner wall of inner cylinder 2, and the high temperature oxidation resisting ability of sacrificial layer 5 is greater than the high temperature resistant oxygen of inner cylinder 2
Change ability.
Refering to what is shown in Fig. 1, during the starting of supercritical reaction device, due to being covered with high temperature resistant on the inner wall of inner cylinder 2
The sacrificial layer 5 of oxidation will not cause the burning of inner cylinder 2 accordingly even when the part of inner cylinder 2 produces high temperature and oxygen-enriched environment,
To protect the normal operation of inner cylinder 2.Supercritical water oxidation with the gradually stable operation of supercritical reaction device, in inner cylinder 2
The corrosive ions such as the chloride ion in environment and oxidant can corrode sacrificial layer 5, and sacrificial layer 5 is gradually eroded and naked
Expose inner cylinder 2, supercritical reaction device is stable at this time, inner cylinder 2 can play its excellent corrosion resistance and there is no
The danger of detonation, to ensure that supercritical reaction device being capable of stable operation.
So, compared to the prior art, the embodiment of the present invention passes through on the inner wall of the inner cylinder of supercritical reaction device
Sacrificial layer is covered, since the high temperature oxidation resisting ability of sacrificial layer is greater than the high temperature oxidation resisting ability of inner cylinder, thus utilizes high temperature resistant
The stronger sacrificial layer of oxidability keeps apart inner cylinder and the oxygen-enriched environment in reactor, starts in this way in supercritical reaction device
Cheng Zhong, even if the part of supercritical reaction device, which generates high temperature and oxygen-enriched environment, supercritical reaction device, will not occur detonation risk,
Reduce the risk that detonation occurs during startup for supercritical reaction device.
In practical applications, since the corrosion resistance of titanium or titanium alloy is strong, especially anti-chlorine ion corrosion performance is strong, because
And the material of inner cylinder 2 generally selects titanium or titanium alloy, and titanium or titanium alloy are easy vigorous oxidation even under high-temperature oxygen-enriched environment
It burns, thus covers the sacrificial layer 5 of high temperature oxidation resisting on the inner wall of inner cylinder 2, material is generally carbon steel, stainless steel or Ni-based
Alloy, to protect inner cylinder 2 that it is avoided to aoxidize or burn.
Since the weldability between titanium or titanium alloy and other kinds of metal material can be poor, thus explosion can be used
Sacrificial layer 5 is produced on the inner wall of inner cylinder 2 by composite algorithm.Specifically: inner cylinder 2 and sacrificial layer 5 are made first with explosion composite method
Double-deck composite plate structure is made to accomplish fluently groove then by composite plate rolling into barrel-shape in outer, successively weld.Due to water
The structure type of cold wall type to inner cylinder 2 without bearing requirements, thus it is lower to the welding and requirement of mechanical strength of inner cylinder 2.In reality
In, sacrificial layer 5 can also be produced on the inner wall of inner cylinder 2 using interference composite algorithm, the embodiment of the present invention does not make this
It limits.
It should be noted that since sacrificial layer 5 can gradually be eroded in supercritical reaction device operational process, thus
After each long-play of supercritical reaction device interrupts, inner cylinder 2 should be taken out, coat sacrificial layer again on the inner wall of inner cylinder 2
5, it can just put into next use.
In supercritical reaction device operational process, the variation of hot-zone will lead to temperature when due to supercritical reaction device internal oxidition
The variation in section, therefore the degree that the sacrificial layer 5 of different location is corroded is different.In addition, the material of production sacrificial layer 5 is not
Together, corrosion rate also can different from.Comprehensively consider from economy point, general choose 24 hours is opened as supercritical reaction device
The wave time of temperature when dynamic.In this wave time section, in order to guarantee that it is sacrificial without exposed that inner cylinder 2 is sacrificed the cladding completely of layer 5
The material of domestic animal layer 5 generally chooses stainless steel 304 or Stainless steel 316, and thickness is generally 1.5~2.5mm.
Refering to what is shown in Fig. 1, being concentrated as far as possible and narrower width to make to corrode in sacrificial layer 5 heavier region, supercritical reaction
The ratio of height to diameter H/D of the inner cylinder 2 of device is typically designed between 2.7~3.2.At this point, in order to corrode the different location of sacrificial layer 5
Degree is more uniform, can in the one week setting compensation layer 6 in the inside of sacrificial layer 5, the setting height of compensation layer 6 be 0.28H~
0.36H (using the side wall bottom end of inner cylinder 2 as 0 point of level)；The high temperature oxidation resisting ability of compensation layer 6 is greater than the high temperature resistant oxygen of inner cylinder 2
Change ability.Compensation layer 6 can compensate for corroding heavier region in sacrificial layer 5, so that the exposed time of 2 different location of inner cylinder more connects
Closely.In the case where considering the setting range of the ratio of height to diameter of supercritical reaction device, the width general control of compensation layer 6 is in 20mm
~50mm, the thickness general control of compensation layer 6 is in 1.4mm~2.5mm.
When the material of inner cylinder 2 is titanium or titanium alloy, the material of compensation layer 6 is generally carbon steel, stainless steel or nickel-base alloy.
It should be noted that the material of compensation layer 6 can be identical as the material of sacrificial layer 5, it can also be different from the material of sacrificial layer 5, this
Inventive embodiments do not limit this.In practical applications, compensation layer 6 is generally welded on sacrificial layer 5 using bead-welding technology.
Optionally, refering to what is shown in Fig. 1, inner cylinder 2 includes taper necking 21, between outer cylinder 1 and the side wall of taper necking 21
It is provided with distribution grid 7, multiple through-holes are distributed on distribution grid 7, the side wall of the opening direction and taper necking 21 of the through-hole
Inclined direction is consistent.
Refering to what is shown in Fig. 1, material is entered by nozzle 8 in the inner cylinder 2 of supercritical reaction device, and it is contrary wherein
It answers.Cooling water is imported by cooling water inlet 3 between the outer cylinder 1 and inner cylinder 2 of supercritical reaction device to be used to cool down to inner cylinder 2, and is made
Outer cylinder 1 keeps low temperature.Material in inner cylinder 2 after reaction mixes after taper necking 21 with cooling water, then by 4 row of material outlet
Out.In order to reinforce exchanging heat, it is provided with distribution grid 7 between outer cylinder 1 and the side wall of taper necking 21, is distributed on distribution grid 7 more
A through-hole, cooling water are mixed with the hot water flowed out by taper necking 21 again after the through-hole on distribution grid 7.By the through-hole
Opening direction setting it is consistent with the inclined direction of the side wall of taper necking 21, can further strengthen in this way cooling water with react after
Hot water between heat exchange.
Supercritical reaction device provided in an embodiment of the present invention, including outer cylinder and the inner cylinder that outer barrel is arranged in, on outer cylinder
It is provided with cooling water inlet and material outlet, inner cylinder is made of resistant material, and sacrificial layer is covered on the inner wall of inner cylinder, sacrifices
The high temperature oxidation resisting ability of layer is greater than the high temperature oxidation resisting ability of inner cylinder.Compared to the prior art, the embodiment of the present invention by
Sacrificial layer is covered on the inner wall of the inner cylinder of supercritical reaction device, since the high temperature oxidation resisting ability of sacrificial layer is greater than the resistance to height of inner cylinder
Warm oxidability, thus inner cylinder is isolated with the oxygen-enriched environment in reactor using high temperature oxidation resisting ability stronger sacrificial layer
It opens, it is super to face even if the part of supercritical reaction device generates high temperature and oxygen-enriched environment in this way in supercritical reaction device start-up course
Detonation risk will not occur for boundary's reactor, that is, reduce the risk that detonation occurs during startup for supercritical reaction device.
Another embodiment of the present invention provides a kind of supercritical processing systems, including overcritical anti-described in any one of the above
Answer device.By covering sacrificial layer on the inner wall of the inner cylinder of the supercritical reaction device, due to the high temperature oxidation resisting energy of sacrificial layer
Power is greater than the high temperature oxidation resisting ability of inner cylinder, thus will be in inner cylinder and reactor using the stronger sacrificial layer of high temperature oxidation resisting ability
Oxygen-enriched environment keep apart, in this way in supercritical reaction device start-up course, though supercritical reaction device part generate high temperature
And detonation risk will not occur for oxygen-enriched environment, supercritical reaction device, that is, reduces supercritical reaction device and send out during startup
The risk of raw detonation, and then ensure that the normal operation of entire supercritical processing system.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (10)
1. a kind of supercritical reaction device, which is characterized in that including outer cylinder and the inner cylinder that portion in the outer cylinder is arranged, the outer cylinder
On be provided with cooling water inlet and material outlet, the inner cylinder is made of resistant material, is covered on the inner wall of the inner cylinder
Sacrificial layer, the high temperature oxidation resisting ability of the sacrificial layer are greater than the high temperature oxidation resisting ability of the inner cylinder；
The sacrificial layer is for the inner cylinder to be isolated with the high-temperature oxygen-enriched environment in the inner cylinder, to prevent the inner cylinder
Oxidation or burning avoid the detonation of the inner cylinder in startup stage in turn, and the sacrificial layer is corroded and makes in stable operation stage
The inner cylinder exposes.
2. supercritical reaction device according to claim 1, which is characterized in that
The material of the inner cylinder is titanium or titanium alloy, and the material of the sacrificial layer is carbon steel, stainless steel or nickel-base alloy.
3. supercritical reaction device according to claim 1 or 2, which is characterized in that
The sacrificial layer with a thickness of 1.5mm~2.5mm.
4. supercritical reaction device according to claim 1, which is characterized in that
When the ratio of height to diameter H/D of the inner cylinder is 2.7~3.2, the inside of the sacrificial layer is provided with compensation layer, the benefit for one week
The setting height for repaying layer is 0.28H~0.36H；
The high temperature oxidation resisting ability of the compensation layer is greater than the high temperature oxidation resisting ability of the inner cylinder.
5. supercritical reaction device according to claim 4, which is characterized in that
The width of the compensation layer is 20mm~50mm.
6. supercritical reaction device according to claim 4, which is characterized in that
The compensation layer with a thickness of 1.4mm~2.5mm.
7. supercritical reaction device according to claim 4, which is characterized in that
The material of the inner cylinder is titanium or titanium alloy, and the material of the compensation layer is carbon steel, stainless steel or nickel-base alloy.
8. supercritical reaction device according to claim 2, which is characterized in that the sacrificial layer is made by explosion composite method
On the inner wall of the inner cylinder.
9. supercritical reaction device according to claim 1, which is characterized in that the inner cylinder includes taper necking, described
It is provided with distribution grid between outer cylinder and the side wall of the taper necking, multiple through-holes, the through-hole are distributed on the distribution grid
Opening direction it is consistent with the inclined direction of side wall of the taper necking.
10. a kind of supercritical processing system, which is characterized in that including overcritical anti-described in any one of claim 1 to 9
Answer device.
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| CN201610940179.8A CN106334506B (en) | 2016-10-25 | 2016-10-25 | A kind of supercritical reaction device and supercritical processing system |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973621A (en) * | 2010-10-15 | 2011-02-16 | 西安交通大学 | Baffling tank type supercritical water treatment reactor with sacrificial lining |
| CN102751180A (en) * | 2011-04-19 | 2012-10-24 | 三星电子株式会社 | GaN film structure, method of fabricating the same, and semiconductor device including the same |
| CN103531487A (en) * | 2013-09-29 | 2014-01-22 | 南通富士通微电子股份有限公司 | Formation method of semiconductor packaging structure |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7125453B2 (en) * | 2002-01-31 | 2006-10-24 | General Electric Company | High temperature high pressure capsule for processing materials in supercritical fluids |
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2016
- 2016-10-25 CN CN201610940179.8A patent/CN106334506B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101973621A (en) * | 2010-10-15 | 2011-02-16 | 西安交通大学 | Baffling tank type supercritical water treatment reactor with sacrificial lining |
| CN102751180A (en) * | 2011-04-19 | 2012-10-24 | 三星电子株式会社 | GaN film structure, method of fabricating the same, and semiconductor device including the same |
| CN103531487A (en) * | 2013-09-29 | 2014-01-22 | 南通富士通微电子股份有限公司 | Formation method of semiconductor packaging structure |
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Denomination of invention: A supercritical reactor and supercritical treatment system Effective date of registration: 20230303 Granted publication date: 20190802 Pledgee: Bank of Hebei Limited by Share Ltd. Langfang branch Pledgor: Xindi Environmental Protection Technology Co.,Ltd. Registration number: Y2023980033986 |
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