CN106323941A - Laser inspection device and method - Google Patents
Laser inspection device and method Download PDFInfo
- Publication number
- CN106323941A CN106323941A CN201610807299.0A CN201610807299A CN106323941A CN 106323941 A CN106323941 A CN 106323941A CN 201610807299 A CN201610807299 A CN 201610807299A CN 106323941 A CN106323941 A CN 106323941A
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- Prior art keywords
- lens
- light path
- light
- scattered
- scattered light
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- Health & Medical Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
A laser inspection device comprises a laser device, an excitation light path, a scattered light collection light path and a spectrometer. Each of the excitation light path and the scattered light collection light path adopts optical fiber transmission. By introducing optical fiber into a Raman spectrometer, an optical system in a conventional Raman spectrometer is simplified. The laser inspection device is smaller in integral size and can meet needs on portability, instantaneity and quickness.
Description
Technical field
The present invention relates to a kind of article and check apparatus and method, a kind of device utilizing laser to carry out material inspection
And method.
Background technology
Existing Raman spectrometer includes laser instrument, outside optical system, spectrogrph three parts, and what laser instrument sent excites
Light gets to sample through outer light path, after producing raman excitation light, is transferred to spectrogrph through outside optical system.
Owing to all using conventional light path to realize light between laser instrument and outside optical system, between outside optical system and spectrogrph
The transmission of bundle, thus by many restrictions such as light path position, sizes, this results in existing Raman spectroscopy device entirety chi
Very little relatively big, its detection mode, instrument installation etc. are not suitable for onsite application, it is difficult to meet the industry demand about portable inspection.
Summary of the invention
It is an object of the invention to provide a kind of Portable Raman spectrometer, it is possible to meet portability, volume little, flexible
Industry requirement.
The embodiment provides a kind of Portable Raman spectrometer, including: laser instrument, excitation light path, scattered light
Collect light path and spectrogrph, excitation light path and described scattered light collection light path and all use fiber-optic transfer.
Alternatively, excitation light path includes importing optical fiber, the first lens and dichroic mirror, and scattered light is collected light path and included second
Lens, the 3rd lens and collection optical fiber.Wherein, the exciting light that laser instrument sends is through the focusing of the first lens, dichroic mirror
The surface of testee is arrived after the focusing of reflection and the second lens.Scattered coloured light, scattering is produced after exciting light and measured object effect
Light is received by collection optical fiber after the second lens, dichroic mirror and the 3rd lens, and is finally received by spectrogrph.
Alternatively, excitation light path and scattered light collect light path is being coaxial through the second lens.
Alternatively, excitation light path and scattered light collect light path being axially parallel and keep certain through the second lens
Distance.
Alternatively, infrared temperature measurement apparatus is also included.This infrared temperature measurement apparatus is arranged between the second lens and testee,
By the infrared spectrum in detection scattered light, it is judged that the temperature on measured object surface.
Preferably, scattered light collection light path is used for collecting Raman diffused light.
By introducing in Raman spectrometer by optical fiber, simplify the optical system in tradition Raman spectrometer, and optical fiber
Length can select according to practical situation, the position of the parts such as laser instrument, probe arranges more flexible, the overall chi of device
Very little less, it is possible to realize demand portable, real-time.
Accompanying drawing explanation
Accompanying drawing described herein is used for providing a further understanding of the present invention, constitutes the part of the application, this
Bright schematic description and description is used for explaining the present invention, is not intended that inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the device schematic diagram of one embodiment of the invention；
Fig. 2 is the device schematic diagram of another embodiment of the present invention；
Fig. 3 is the device schematic diagram of another embodiment of the present invention.
Detailed description of the invention
Below by drawings and Examples, technical scheme is described in further detail.
Shown in Fig. 1, the beam outlet of laser instrument 1 is connected with importing optical fiber 2.Import the other end of optical fiber 2 and first saturating
Mirror 3 is connected, and exciting light, after the first lens 3, is reflected by dichroic mirror 4, and beats tested after the second lens 5 converge
The surface of object.Owing to exciting light and testee surface interaction can produce Raman scattering, Raman diffused light is through the
After two lens 5, dichroic mirror 4 and the 3rd lens 6, enter in spectrogrph 8 by collecting optical fiber 7.
In this embodiment, all have employed optical fiber due to excitation light path and collection light path, it is possible to the most convenient adjustment
The position of optics, length, size so that the overall dimensions of this product greatly reduces compared to full optics pattern.
In the embodiment shown in Figure 2, critical piece is identical with the embodiment shown in Fig. 1.Difference is, at excitation light path
In set up reflecting mirror 9.Setting by reflecting mirror 9 so that excitation beam is through the portion of the off-center axis of the second lens 5
Point.Such as shown in figure, excitation beam is through the top of the second lens 5.The central axis of its excitation light path and collection light path
Centerline axis parallel and misaligned, keep certain distance.
This scheme can reduce the exciting light impact on collecting light path so that it is the most accurate to check.
In the embodiment shown in fig. 3, it is additionally arranged infrared radiation thermometer 10 compared to a upper embodiment.Utilize this temperature measurer,
The temperature that laser and measured object can be made use is monitored.If because laser continuous action causes measured object surface temperature too high
Time, alarm can be sent in time.Wherein, the particular location of infrared radiation thermometer is not limited to shown in figure.
In embodiments of the invention, by optical fiber is introduced in Raman spectrometer, simplify in tradition Raman spectrometer
Optical system, and the length of optical fiber can select according to practical situation, and the position of the parts such as laser instrument, probe is arranged more
Flexibly, the overall dimensions of device is less, it is possible to realize demand portable, real-time.
The present invention does not limit to above-mentioned hardware unit, further relates to utilize above-mentioned hardware unit to realize the corresponding method checked.Should
Method includes utilizing laser instrument, excitation light path, scattered light to collect light path and the composition of spectrogrph inspection measured matter, wherein, swashs
Luminous road and scattered light are collected light path and are all used fiber-optic transfer, and scattered light is collected light path and is used for collecting Raman diffused light.Exciting light
Road includes importing optical fiber, the first lens and dichroic mirror, and scattered light is collected light path and included the second lens, the 3rd lens and collect light
Fine.The exciting light that laser instrument sends arrives after the focusing of the focusing of the first lens, the reflection of dichroic mirror and the second lens
The surface of testee；Producing after exciting light and measured object effect and dissipate coloured light, scattered light is through the second lens, dichroic mirror and the
By collecting optical fiber reception after three lens, and finally received by spectrogrph.Excitation light path and described scattered light are collected light path and are being passed through
Can be coaxial during described second lens, or excitation light path and scattered light collect axial through the second lens of light path
It is parallel and keeps certain distance.
Finally should be noted that: above example is only in order to illustrate technical scheme and non-alignment limits；To the greatest extent
The present invention has been described in detail by pipe with reference to preferred embodiment, and those of ordinary skill in the field are it is understood that still
The detailed description of the invention of the present invention can be modified or portion of techniques feature is carried out equivalent；Without deviating from this
The spirit of bright technical scheme, it all should be contained in the middle of the technical scheme scope that the present invention is claimed.
Claims (10)
1. a laser checks device, it is characterised in that described device includes that laser instrument, excitation light path, scattered light collect light path
With spectrogrph, described excitation light path and described scattered light collection light path all use fiber-optic transfer.
2. device as claimed in claim 1, it is characterised in that described excitation light path includes importing optical fiber, the first lens and two
To color mirror, described scattered light is collected light path and is included the second lens, the 3rd lens and collect optical fiber, and wherein, described laser instrument sends
Exciting light after the focusing of focusing, the reflection of described dichroic mirror and described second lens of described first lens, arrive quilt
Survey the surface of object；Producing scattered coloured light after described exciting light and measured object effect, described scattered light is through described second lens, institute
Received by described collection optical fiber after stating dichroic mirror and described 3rd lens, and finally received by described spectrogrph.
3. device as claimed in claim 1, it is characterised in that described excitation light path and described scattered light are collected light path and passed through
It is coaxial during described second lens.
4. device as claimed in claim 1, it is characterised in that described excitation light path and described scattered light are collected light path and passed through
Being axially parallel and keep certain distance during described second lens.
5. device as claimed in claim 1, it is characterised in that also include that infrared temperature measurement apparatus, described infrared temperature measurement apparatus set
Put between described second lens and testee, by the infrared spectrum in detection scattered light, it is judged that the temperature on measured object surface
Degree.
6. device as claimed in claim 1, it is characterised in that described scattered light is collected light path and is used for collecting Raman diffused light.
7. a laser inspection method, it is characterised in that described method includes utilizing laser instrument, excitation light path, scattered light to collect
Light path and spectrogrph check the composition of measured matter, and wherein, described excitation light path and described scattered light are collected light path and all used light
Fine transmission, described scattered light is collected light path and is used for collecting Raman diffused light.
8. method as claimed in claim 7, it is characterised in that described excitation light path includes importing optical fiber, the first lens and two
To color mirror, described scattered light is collected light path and is included the second lens, the 3rd lens and collect optical fiber, and wherein, described laser instrument sends
Exciting light after the focusing of focusing, the reflection of described dichroic mirror and described second lens of described first lens, arrive quilt
Survey the surface of object；Producing scattered coloured light after described exciting light and measured object effect, described scattered light is through described second lens, institute
Received by described collection optical fiber after stating dichroic mirror and described 3rd lens, and finally received by described spectrogrph.
9. method as claimed in claim 7, it is characterised in that described excitation light path and described scattered light are collected light path and passed through
It is coaxial during described second lens, or described excitation light path collects light path through described second lens with described scattered light
Time be axially parallel and keep certain distance.
10. method as claimed in claim 7, it is characterised in that also include utilizing infrared temperature measurement apparatus to obtain measured matter table
The temperature in face, is wherein arranged on described infrared temperature measurement apparatus between described second lens and testee, is scattered by detection
Infrared spectrum in light judges the temperature on measured object surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610807299.0A CN106323941A (en) | 2016-09-07 | 2016-09-07 | Laser inspection device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610807299.0A CN106323941A (en) | 2016-09-07 | 2016-09-07 | Laser inspection device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106323941A true CN106323941A (en) | 2017-01-11 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610807299.0A Pending CN106323941A (en) | 2016-09-07 | 2016-09-07 | Laser inspection device and method |
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103616351A (en) * | 2013-11-26 | 2014-03-05 | 中国科学院广州地球化学研究所 | Laser-induced breakdown spectroscopy analyzer and laser-induced breakdown spectroscopy analysis method |
| CN105593651A (en) * | 2013-08-02 | 2016-05-18 | 威利食品有限公司 | Spectrometry system and method, spectroscopic devices and systems |
| CN205538685U (en) * | 2016-03-15 | 2016-08-31 | 安徽芯核防务装备技术股份有限公司 | Integral type binary channels raman spectroscopy collection probe |
-
2016
- 2016-09-07 CN CN201610807299.0A patent/CN106323941A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105593651A (en) * | 2013-08-02 | 2016-05-18 | 威利食品有限公司 | Spectrometry system and method, spectroscopic devices and systems |
| CN103616351A (en) * | 2013-11-26 | 2014-03-05 | 中国科学院广州地球化学研究所 | Laser-induced breakdown spectroscopy analyzer and laser-induced breakdown spectroscopy analysis method |
| CN205538685U (en) * | 2016-03-15 | 2016-08-31 | 安徽芯核防务装备技术股份有限公司 | Integral type binary channels raman spectroscopy collection probe |
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| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20170111 |
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| WD01 | Invention patent application deemed withdrawn after publication |