CN106313351B - A kind of multi-line cutting machine gauze tension measuring device and method - Google Patents
A kind of multi-line cutting machine gauze tension measuring device and method Download PDFInfo
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- CN106313351B CN106313351B CN201510391150.4A CN201510391150A CN106313351B CN 106313351 B CN106313351 B CN 106313351B CN 201510391150 A CN201510391150 A CN 201510391150A CN 106313351 B CN106313351 B CN 106313351B
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Abstract
The invention discloses a kind of multi-line cutting machine gauze tension measuring device and method.Tension force is an important parameter during multi-wire saw machines crystal ingot, and the tension force on gauze is to change and be difficult to detect instrument by common tension force to measure.The measuring principle of the measurement apparatus is to reach balance in vertical direction power according to by survey line, the pressure of the crystal ingot suffered by survey line is equivalent to using measurable gravity, so as to calculate the tension force of outlet, device includes measurement pillar, T-shaped connecting rod, pressure sensor, connecting line, elongated box, the crystal ingot with heavy-fluid, universal meter and sandwich conductive foil and formed.By measuring tension force on diverse location line, it is possible to draw the distribution situation of gauze tension force.The present invention realizes the measurement of cutting process center line web tension force, and the foundation of science is provided for technique adjustment.
Description
Technical field
The present invention relates to a kind of multi-line cutting machine gauze tension measuring device and method, for measuring multi-line cutting machine section
During gauze tension force, belong to multi-wire saw manufacture field.
Background technology
Multi-line cutting machine is a kind of hard brittle material slice processing equipment of high-efficiency high-precision, abbreviation scroll saw.According to abrasive material
Mode it is different, be divided into two types：Free abrasive multi-wire saw and consolidated diamond multi-wire saw.Free abrasive multi-wire saw
Its incision principle is wrapped in steel wire on the groove of multiple guide wheels, forms gauze, and the rotational movement gauze of guide wheel is transported at a high speed
It is dynamic, workpiece is filled with workbench to lower feeding；Mortar simultaneously containing cutting abrasive material is sprayed onto on gauze, and the gauze of motion is with sand
Slurry enters by cut part, so as to by work piece cut into the thin slice of hundreds of thousands of.The principle of consolidated diamond multi-wire saw be by
Diamond abrasive is bonded on steel wire, other identical with free abrasive multi-wire saw process.Multi-wire saw is because its cutting efficiency
High, the small base material in strategic new industries such as solar energy, IC chip, hair diodes of material loss slice processing
In be used widely, generally using multi-thread in such as high-volume slice processing of monocrystalline silicon, polysilicon, sapphire crystalline material
Cutting machine is processed.
In multi-wire saw process, line tension is to influence an important parameter of cut quality, particularly tension force
Fluctuation easily causes broken string to cause sliced crystal to be scrapped.Connect therefore, Chinese patent ZL201310494668.1 describes using non-
The device and method of touch detection cutting line tension.But this method is applied to measurement steel wire inlet wire or outgoing line part tension force
Detection.And gauze center line is in cutting process, steel wire abrasion, feed speed and fatigue can all have an impact to line tension.Institute
The tension force applied with the tension force in gauze and inlet wire or line outlet tension arm be it is different, this be also cause wafer quality produce compared with
One of the reason for great fluctuation process, universal law are gradually deteriorated from incoming line to line outlet wafer quality.But in gauze between steel wire
Away from only less than 0.2 millimeter, it is unclear to the tension force in gauze, gauze tension distribution that current device for testing tensile force is difficult to test
Chu, the Reasonable adjustment to technological parameter bring difficulty.
The content of the invention
For gauze tension distribution influence cut quality in multi-wire saw process, what tension force can not be measured effectively asks
Topic, the present invention is intended to provide a kind of multi-wire saw machining process center line net tension measuring device and method.The device and method
The additional downward pulling force to line is measured by the way that crystal ingot in cutting process is equivalent to the active force of line, so as to bend according to line
Angle and the equilibrium condition of power calculate tension force in outlet, take a sample test the tension force of diverse location in gauze, it is possible to outlet
The distribution of net tension force.
In order to realize the present invention, the technical solution adopted in the present invention is：
A kind of multi-line cutting machine gauze tension measuring device, including two measurement pillars, described measure among pillar have company
Splicing is connected with T-shaped connecting rod, and the T-shaped connecting rod lower end is connected with pressure sensor；The pressure sensor and lower connection
Bar is connected；The lower connecting rod is connected by connecting rope with elongated box；It is equipped with inside the elongated box and matches somebody with somebody heavy-fluid, the measurement branch
Elastic supports are adjacent by survey line at two of gauze, it is described deviateed by survey line under the downward power effect of crystal ingot equilbrium position into
One angle A, the sandwich conductive foil of the crystal ingot, the conductive foil are connected with electric wire with universal meter one end, and described ten thousand
It is connected with another pole of table with electric wire with measurement pillar.
The measurement strut diameter is 0.5-1 millimeters, and length is two by 1.2-2 times of distance between survey line.
The resistance of path between the universal meter monitoring measurement pillar and conductive foil.
Described to be gradually added into heavy-fluid, its weight is exactly equal to universal meter and shows that resistance increase signal occurs, and is taken off by survey line
Resistance is caused to increase from crystal ingot and conductive foil, now crystal ingot is to being approximately equal to the gravity for measuring pillar and applying by survey line directed force F
G, record the value of pressure sensor.
Described with heavy-fluid can be coolant that incisory mortar is either used in ethylene glycol or cutting process.
The conductive foil thickness is 0.1-1 millimeters, the length of its length and height and crystal ingot 2 and highly identical.
The output signal of the pressure sensor is connected by electric wire with pressure display module.
Present invention also offers a kind of line tension measuring method of multi-line cutting machine gauze tension measuring device, including it is as follows
Step：
1）Prepare workpiece：The crystal ingot and conductive foil cut workbench with rear integral installation in gluing knot to crystal holder to line
On, measurement pillar, connecting rope, T-shaped connecting rod, the weight of pressure sensor are measured, is designated as G1；
2）Start cutting, it is necessary to which measurement position pause, is measured：Measure gauze and measured in crystal ingot and deviate equilbrium position
Distance D；By measurement pillar branch in the two sides of crystal ingot by survey line, resistance grade, the input of universal meter are arrived in universal meter regulation
It is connected with conductive foil and measurement pillar with electric wire, is gradually added into toward elongated box with heavy-fluid respectively, until obvious become occurs for resistance
Change, record the gravimetric value of pressure display module, be designated as G2；
3）Calculate gauze tension force：Gauze line bends angle A
（1）
Being tested line tension T is
（2）
Formula（a）Middle L is the centre-to-centre spacing of two guide wheels, two crystal ingots and the width after conductive foil bonding, formula when W is experiment
（b）Middle G=G1+G2；
4）Repeat step 2 and 3, the steel wire of diverse location is measured, calculate the tension distribution situation of gauze.
The present invention can measure the tension variation of gauze from the inlet to the outlet in multi-wire saw process, investigate gauze
Relation between power distribution and cutting parameter, so as to which adjusting process is to reduce influence of the tension force reduction to cut quality, reduce disconnected
The risk of line.
Brief description of the drawings
Fig. 1 is apparatus of the present invention structure chart；
Fig. 2 is apparatus of the present invention partial enlarged drawing；
Fig. 3 is apparatus of the present invention sectional view；
Fig. 4 is apparatus of the present invention schematic diagram.
In figure：
1- guide wheels；2- crystal ingots；3- crystal holders；4- cutting working platforms；5- gauzes；6- conductive foils；7- glue；8- measures pillar；
9- is by survey line；10- pressure display modules；11- pressure sensors；The long flasks of 12-；13- electric wires；14- universal meters；15- connecting ropes；
16-T type connecting rods；17- lower connecting rods；18- matches somebody with somebody heavy-fluid.
Embodiment
With reference to the accompanying drawings and examples, the present invention is described in detail.It is emphasized that following examples are only used
In explanation the application, but scope of the present application is not defined.This embodiment is not all for the section Example of the application
Embodiment, all other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, all
Belong to the scope of the application protection.Fig. 1 is invention device structure chart, and Fig. 2 is apparatus of the present invention partial enlarged drawing, and Fig. 3 is this hair
Bright device sectional view, Fig. 4 are invention device schematic diagram.
With reference to Fig. 1, Fig. 2 and Fig. 3, a kind of multi-line cutting machine gauze tension measuring device, including two measurement pillars 8, institute
Stating among measurement pillar 8 has connecting rope 15 to be connected with T-shaped connecting rod 16, the T-shaped lower end of connecting rod 16 and pressure sensor 11
It is connected；The pressure sensor 11 is connected with by lower connecting rod 17；The lower connecting rod 17 passes through connecting rope 15 and elongated box
12 are connected, the inside of elongated box 12 equipped with match somebody with somebody heavy-fluid 18, it is described measure pillar 8 be supported on two of gauze 5 it is adjacent by survey line 9
On, it is described that equilbrium position A at an angle is deviateed under the downward power effect of crystal ingot 2 by survey line 9, pressed from both sides among the crystal ingot 2
Conductive foil 6, the conductive foil 6 is connected with electric wire 13 with the one end of universal meter 14, another pole electric wire of universal meter 14
13 are connected with measurement pillar 8.
The measurement a diameter of 0.5-1 millimeters of pillar 8, length are two by 1.2-2 times of distance between survey line 9.
Integral installation is cut on workbench 4 to line after the crystal ingot 2 and conductive foil 6 are bonded in crystal holder 3 with glue 7, is surveyed
Measurement pillar 8, connecting rope 15, T-shaped connecting rod 16, the weight of pressure sensor 11 are measured, is designated as G1.
The resistance of path between the monitoring of the universal meter 14 measurement pillar 8 and conductive foil 6.
Described to be gradually added into heavy-fluid 18, its weight is exactly equal to universal meter 14 and shows that resistance increase signal occurs, and is tested
Line 9, which departs from crystal ingot 2 and conductive foil 6, causes resistance to increase, and now crystal ingot 2 by the directed force F of survey line 9 to being approximately equal to measurement pillar 8
The gravity G of application, record the value of pressure sensor 11.
Described with heavy-fluid 18 can be coolant that incisory mortar is either used in ethylene glycol or cutting process.
The thickness of conductive foil 6 is 0.1-1 millimeters, the length of its length and height and crystal ingot 2 and highly identical.
The output signal of the pressure sensor 11 is connected by electric wire 13 with pressure display module 10.
With reference to principle of the invention Fig. 4, in process to producing pressure F by survey line 9, pressure F reaches crystal ingot 2 with tension force T
To balance；By Fig. 1 described devices, apply a gravity G on by survey line 9, G is approximately equal to F；Line bow angle A can be according to leading
The width of 1 centre distance and crystal ingot 2 is taken turns by formula（1）Obtain；To reach balance in vertical direction power, according to formula（5）Can
Calculate by the tension force of survey line 9.
It is as follows with reference to apparatus of the present invention and method, step by taking certain model multi-line cutting machine as an example：
1）Prepare workpiece：Processing crystal ingot 2 is installed, measures measurement pillar 8, connecting rope 15, T-shaped connecting rod 16, pressure
The weight of sensor 11, is designated as G1, and G1 is equal to 0.784 newton；
2）Start cutting, it is necessary to which measurement position pause, is measured：8 quilts in the two sides of crystal ingot 2 of pillar will be measured
On survey line 9, universal meter 14 regulation arrive resistance grade, by the input of universal meter 14 with electric wire 13 respectively with conductive foil（6）And measurement
Pillar 8 connects, and is gradually added into toward elongated box 12 with heavy-fluid 18, until significant change, record pressure display module 10 occur for resistance
The newton of gravimetric value 0.49, equal to G2；It is 4 millimeters that gauze 5, which is measured, in the distance D that crystal ingot 2 measures deviation equilbrium position；Formula
（2）Middle G is 1.274 newton；
3）Calculate gauze tension force：L is the centre-to-centre spacing of two guide wheels 1, and L is 540 millimeters；Two crystal ingots 2 and conductive thin when W is tests
Width after piece 6 bonds is 150 millimeters, and bending angle A according to the line of 3 gauze of formula 5 is approximately
（3）
Being tested line tension T is
（4）
Formula（4）Middle result is by the tension force of survey line 9；
4）Repeat step 2 and 3, measure the steel wire of diverse location, it is possible to calculate the tension distribution situation of gauze 5.
In above example, 1 number of guide wheel is two, apparatus of the present invention and equally applicable three or four guide wheels of method
The gauze tonometry of multi-line cutting machine.
Embodiments of the present invention are described in detail above in conjunction with accompanying drawing, but the present invention is not limited to above-mentioned reality
Mode is applied, one of ordinary skill in the art can also not depart from the premise of present inventive concept after the content of such scheme is understood
Under make many variations.
Claims (8)
1. a kind of multi-line cutting machine gauze tension measuring device, including two measurement pillars（8）, it is characterised in that the measurement
Pillar（8）There is connecting rope centre（15）With T-shaped connecting rod（16）It is connected, the T-shaped connecting rod（16）Lower end and pressure sensor
（11）It is connected；The pressure sensor（11）Lower end and lower connecting rod（17）It is connected；The lower connecting rod（17）Pass through connection
Rope（15）With elongated box（12）It is connected, the elongated box（12）The inside, which is equipped with, matches somebody with somebody heavy-fluid（18）, the measurement pillar（8）It is supported on
Gauze（5）Two it is adjacent by survey line（9）On, it is described by survey line（9）In crystal ingot（2）Downward power effect lower deviate balance position
It is set to an angle A, the crystal ingot（2）Sandwich conductive foil（6）, the conductive foil（6）Use electric wire（13）With general-purpose
Table（14）One end is connected, the universal meter（14）Another pole electric wire（13）With measuring pillar（8）It is connected.
A kind of 2. multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that the measurement branch
Post（8）A diameter of 0.5-1 millimeters, length are two by survey line（9）Between 1.2-2 times of distance.
A kind of 3. multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that the universal meter
（14）Monitoring measurement pillar（8）And conductive foil（6）Between path resistance.
4. a kind of multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that described to match somebody with somebody heavy-fluid
（18）It is gradually added into, by survey line（9）Depart from crystal ingot（2）And conductive foil（6）Resistance is caused to increase, now crystal ingot（2）To tested
Line（9）Directed force F is approximately equal to measurement pillar（8）The gravity G of application, record pressure sensor（11）Pressure value.
5. a kind of multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that described to match somebody with somebody heavy-fluid
（18）It can be the coolant that incisory mortar is either used in ethylene glycol or cutting process.
A kind of 6. multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that the conductive thin
Piece（6）Thickness is 0.1-1 millimeters.
7. a kind of multi-line cutting machine gauze tension measuring device according to claim 1, it is characterised in that the pressure passes
Sensor（11）Output signal pass through electric wire（13）With pressure display module（10）It is connected.
8. a kind of line tension measuring method of multi-line cutting machine gauze tension measuring device according to claims 1 to 7, its
It is characterised by comprising the following steps：
1）Prepare workpiece：The crystal ingot（2）And conductive foil（6）Use glue（21）It is bonded to crystal holder（3）Integral installation is to arriving after upper
Line cuts workbench（4）On, measure measurement pillar（8）, connecting rope（15）, T-shaped connecting rod（16）, pressure sensor（11）Weight
Amount, is designated as G1；
2）Start cutting, it is necessary to which measurement position pause, is measured：Measure gauze（5）In crystal ingot（2）Deviate equilbrium position in side
Distance D；Pillar will be measured（8）Branch is in crystal ingot（2）Two sides by survey line（9）On, universal meter（14）Resistance grade is adjusted,
Universal meter（14）Input electric wire（13）Respectively with conductive foil（6）With measurement pillar（8）Connection, toward elongated box（12）Gradually
Heavy-fluid is matched somebody with somebody in addition（18）, until significant change, record pressure display module occur for resistance（10）Gravimetric value, be designated as G2；
3）Calculate gauze tension force：Gauze（5）Line bends angle A
（1）
Being tested line tension T is
（2）
Formula（1）Middle L is two guide wheels（1）Centre-to-centre spacing, W for experiment when two crystal ingots（2）With conductive foil（6）Width after bonding
Degree, formula（2）Middle G=G1+G2；
4）Repeat step 2 and 3, measures the steel wire of diverse location, calculates gauze（5）Tension distribution situation.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510391150.4A CN106313351B (en) | 2015-07-06 | 2015-07-06 | A kind of multi-line cutting machine gauze tension measuring device and method |
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|---|---|---|---|
| CN201510391150.4A CN106313351B (en) | 2015-07-06 | 2015-07-06 | A kind of multi-line cutting machine gauze tension measuring device and method |
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| CN106313351A CN106313351A (en) | 2017-01-11 |
| CN106313351B true CN106313351B (en) | 2018-02-23 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107214868B (en) * | 2017-07-04 | 2019-02-01 | 杨凌美畅新材料股份有限公司 | A kind of multi-line cutting machine entirety additional tension detection method |
| CN109708799B (en) * | 2019-02-27 | 2023-10-17 | 天津职业技术师范大学(中国职业培训指导教师进修中心) | Single-wire tension measuring device for dense wire mesh |
| CN110076920B (en) * | 2019-05-31 | 2021-03-26 | 江苏吉星新材料有限公司 | Method for measuring wire mesh angle of multi-wire slicing machine |
| FR3102947A1 (en) * | 2019-11-07 | 2021-05-14 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Method for determining at least one cutting parameter of a brick of a semiconductor material AND device implementing the method |
| CN113665009B (en) * | 2021-08-30 | 2022-07-19 | 燕山大学 | Wire bow parameter monitoring device for multi-wire cutting machine |
| CN116277559B (en) * | 2023-05-17 | 2023-08-18 | 浙江求是半导体设备有限公司 | Crystal bar cutting system and diamond wire service life detection method |
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| CN1982004A (en) * | 2005-12-12 | 2007-06-20 | 株式会社高鸟 | Cutting method by wire saw and cut workpiece supporting member in wire saw |
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| DE102011004341B4 (en) * | 2011-02-17 | 2014-05-28 | Deutsche Solar Gmbh | Saw device |
| JP2015050460A (en) * | 2013-09-02 | 2015-03-16 | アプライド マテリアルズ スウィッツァーランド エス アー エール エル | Wire saw device |
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| KR20120013426A (en) * | 2009-05-04 | 2012-02-14 | 마이어 부르거 아게 | Wire saw |
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| CN1982004A (en) * | 2005-12-12 | 2007-06-20 | 株式会社高鸟 | Cutting method by wire saw and cut workpiece supporting member in wire saw |
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| DE102011004341B4 (en) * | 2011-02-17 | 2014-05-28 | Deutsche Solar Gmbh | Saw device |
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