CN106313053A - Wafer transfer manipulator with anticollision function and anticollision method thereof - Google Patents
Wafer transfer manipulator with anticollision function and anticollision method thereof Download PDFInfo
- Publication number
- CN106313053A CN106313053A CN201610921265.4A CN201610921265A CN106313053A CN 106313053 A CN106313053 A CN 106313053A CN 201610921265 A CN201610921265 A CN 201610921265A CN 106313053 A CN106313053 A CN 106313053A
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- Prior art keywords
- mechanical hand
- frequency
- collision
- sheet
- sheet mechanical
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J13/00—Controls for manipulators
- B25J13/08—Controls for manipulators by means of sensing devices, e.g. viewing or touching devices
- B25J13/086—Proximity sensors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/16—Programme controls
- B25J9/1628—Programme controls characterised by the control loop
- B25J9/1653—Programme controls characterised by the control loop parameters identification, estimation, stiffness, accuracy, error analysis
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- Engineering & Computer Science (AREA)
- Robotics (AREA)
- Mechanical Engineering (AREA)
- Human Computer Interaction (AREA)
- Manipulator (AREA)
Abstract
The invention discloses a wafer transfer manipulator with an anticollision function and an anticollision method thereof. A vibrating sensor chip is arranged on the wafer transfer manipulator to collect the vibrating frequency generated when a grip of the wafer transfer manipulator collides with a wafer, so that a small impact force generated by collision can be effectively collected and a collision signal can be immediately transmitted. Vibrating frequency data is recorded and analyzed through a manipulator controller. When the vibrating frequency exceeds a set collision alarm threshold value, emergency stop control can be generated through an emergency stop control circuit and emergency brake of shaft motor drivers of the wafer transfer manipulator is triggered, so that the wafer transfer manipulator stops moving to realize hard interlock between collision alarm and emergency brake, so that emergency control of the wafer transfer manipulator is realized.
Description
Technical field
The present invention relates to semiconductor production equipment, be used for transmitting having of Wafer (silicon chip) more particularly, to one anti-
Hit biography sheet mechanical hand and the avoiding collision thereof of function.
Background technology
Biography sheet mechanical hand of the present invention refers to the mechanical hand used by semiconductor production equipment.
In the Chinese invention patent of Application No. 201110094429.8, disclose a kind of mechanical hand, utilize comparator to incite somebody to action
The analog voltage of optical fiber distance measuring sensor output compares with the reference voltage of setting, it is judged that whether mechanical hand is less than barrier
Safe altitude, if it is by relay cut off kinetic control system power supply, be also turned on brakes power supply, make machinery
The motion of hands stops rapidly.Owing to its mechanical hand is mounted in Z-direction, the most only crashproof in Z-direction can be had
Effect.But the collision of the mechanical hand in semicon industry and Wafer mostly occurs at R direction of principal axis (arm when i.e. mechanical hand picks and places silicon chip
Forward extend out the stage), thus this patent has significant limitation.
A kind of mechanical hand is disclosed, by mechanical hand in the Chinese invention patent of Application No. 201410152240.3
On install swing component and magnetic switch additional, utilize mode thus the jerk of Crush trigger hands letter that collision impact makes magnetic switch disconnect
Number, stop robot movement.But, the mode installing swing component additional takes what silicon chip was occurred relative to semicon industry mechanical hand biography
For impact force, its sensitivity is the most not enough.
Also have by the way of mechanical hand motor being carried out moment of torsion detection and detects side collision, when Motor torque is beyond normal fortune
During scope during row, i.e. think and collide, thus start emergency stop device.Due to from mechanical hand Fork (handgrip) to motor
Need to through actuating devices such as decelerators, thus its be difficult to by when colliding with silicon chip produce impact force transmit timely and effectively
To motor side.
Although the duty of mechanical hand can be monitored simply with upper type, but all can not fully meet
Semicon industry is to the demand for passing the mechanical hand taking Wafer.
Summary of the invention
It is an object of the invention to the drawbacks described above overcoming prior art to exist, it is provided that a kind of biography sheet with collision prevention function
Mechanical hand and avoiding collision thereof, it is possible to effectively collect and pass the weak impact power that sheet hand grip produces with silicon chip collision,
And collision alarm can be transmitted in time, produce corresponding jerk and control, make biography sheet mechanical hand stop motion.
For achieving the above object, technical scheme is as follows:
A kind of biography sheet mechanical hand with collision prevention function, described biography sheet mechanical hand is provided with:
Vibrating sensor chip, passes, for gathering, the frequency of vibration produced when sheet tongs collides with silicon chip, and
The frequency of vibration signal collected is passed to Manipulator Controller；
Manipulator Controller, for recording frequency of vibration data and analyzing, and exceedes setting at frequency of vibration
During collision warning threshold value, alarm signal is passed to jerk and controls loop；
Jerk controls loop, controls for producing jerk when receiving alarm signal, and triggers the biography each axle of sheet mechanical hand
The brake hard of motor driver, it is achieved the jerk passing sheet mechanical hand controls.
Preferably, described Manipulator Controller is provided with CPU, analog input interface, digital-quantity output interface, described vibration
The frequency of vibration signal collected is converted into analog signals and passes to analog input interface, described CPU by sensor chip
The analog quantity of analog input interface collection is carried out digital-to-analogue conversion, and frequency of vibration data is recorded and analyzes, work as inspection
When the frequency of vibration measured exceedes the collision warning threshold value of setting, by digital-quantity output interface, alarm signal exported biography sheet
The jerk of mechanical hand controls loop.
Preferably, described Manipulator Controller connects biography sheet mechanical hand each spindle motor driver, is used for controlling to pass sheet machinery
Hands is in each axial operation.
Preferably, described vibrating sensor chip is located at handgrip and passes the connecting portion of sheet manipulator arm.
Preferably, by described Manipulator Controller to passing the normal operating frequency in each stage in sheet mechanical hand running
Detect and segment, and the collision warning threshold value in the range set each stage according to the normal operating frequency in each stage.
A kind of based on the above-mentioned avoiding collision passing sheet mechanical hand with collision prevention function, comprise the following steps:
Step S01: when passing sheet robot work, the biography sheet hand grip that will be collected by vibrating sensor chip
Frequency of vibration signal pass to the analog input interface of Manipulator Controller；
Step S02: by the CPU of Manipulator Controller, the analog quantity of analog input interface collection is carried out digital-to-analogue and turn
Change, and frequency of vibration data are recorded and analyzes；
Step S03: when the frequency of vibration detected exceedes the collision warning threshold value of setting, by Manipulator Controller
Digital-quantity output interface, exports the jerk control loop passing sheet mechanical hand by alarm signal；
Step S04: control loop by jerk and produce jerk control when receiving alarm signal, and trigger biography sheet machinery
The brake hard of hands each spindle motor driver, it is achieved the jerk passing sheet mechanical hand controls.
Preferably, utilize Manipulator Controller the normal operating frequency passed in sheet mechanical hand running is carried out detection and
Segmentation, and according to the range set collision warning threshold value of normal operating frequency.
Preferably, Manipulator Controller is utilized to carry out passing the normal operating frequency in each stage in sheet mechanical hand running
Detection and segmentation, and the collision warning threshold value in the range set each stage according to each stage normal operating frequency.
Preferably, pass sheet robot work time, by described Manipulator Controller control pass sheet mechanical hand each axially
Operation, and jerk control loop receive alarm signal produce jerk control time, directly trigger that to pass each axle of sheet mechanical hand electric
The brake hard of machine driver, it is achieved the interlocking between collision warning and brake hard.
Preferably, the frequency of vibration simulation letter by the CPU of described Manipulator Controller, vibrating sensor chip transmitted
Number it is acquired and is formed the record of daily record (Log) form.
The present invention has a following remarkable advantage:
1) use high accuracy and highly sensitive vibrating sensor chip, and realize passing sheet machine by Analog input mModule
The collection of frequency of vibration signal in tool hands running.
2) vibrating sensor chip is installed on Fork root and passes the bearing of sheet manipulator arm, it is possible to the most anti-
The accident reflecting Fork collision occurs.
3) by Manipulator Controller, frequency of vibration Log segmentation is passed the collision of different phase in sheet mechanical hand running
Alarm threshold value, it is to avoid the wrong report that the threshold value setting means of single solution for diverse problems brings and the contradiction failing to report collision.
4) by collision warning signal being incorporated into the jerk control loop passing sheet mechanical hand, improving and passing the collision of sheet mechanical hand
The reliability of brake hard during generation.
Accompanying drawing explanation
Fig. 1 is that the vibrating sensor chip of a preferred embodiment of the present invention shows in a kind of installation site passed on sheet mechanical hand
It is intended to；
Fig. 2 is the biography sheet manipulator control signal transfer principle schematic diagram of a preferred embodiment of the present invention；
Fig. 3 is the collision warning threshold value setting means schematic diagram of a preferred embodiment of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings, the detailed description of the invention of the present invention is described in further detail.
It should be noted that in following detailed description of the invention, when describing embodiments of the present invention in detail, in order to clear
Ground represent the structure of the present invention so that explanation, special to the structure in accompanying drawing not according to general scale, and carried out local
Amplify, deform and simplification process, therefore, should avoid being understood in this, as limitation of the invention.
A kind of biography sheet mechanical hand with collision prevention function of the present invention, be provided with vibrating sensor chip, Manipulator Controller,
Jerk controls loop.
Refer to vibrating sensor chip that Fig. 1, Fig. 1 are a preferred embodiment of the present invention in the one passed on sheet mechanical hand
Installation site schematic diagram.As it is shown in figure 1, its display passes the handgrip 10 of sheet mechanical hand 10,11 and arm 11 structure of local, vibration
Sensor chip 12 be arranged on biography sheet mechanical hand on, for gather pass sheet tongs 10 collide with silicon chip time generation shake
Dynamic frequency.For ensureing authentic and valid and gathering collision alarm in time, above-mentioned vibrating sensor chip 12 can be arranged on biography sheet
Tongs 10 (Fork) root and the junction passing sheet manipulator arm 11, thus can collide with silicon chip at Fork
Moment collect collision alarm in time.
The frequency of vibration signal collected is passed to Manipulator Controller by vibrating sensor chip.Use high accuracy and spirit
The micro-vibration sensor chip of sensitivity, the available frequency comparing vibrating sensor, complete Fork is produced with silicon chip collision
The collection of weak impact power.
Refer to the biography sheet manipulator control signal transfer principle schematic diagram that Fig. 2, Fig. 2 are a preferred embodiment of the present invention.
As in figure 2 it is shown, Manipulator Controller is for recording the frequency of vibration data of vibrating sensor chip transmission and analyze, and
When frequency of vibration exceedes the collision warning threshold value of setting, alarm signal is passed to jerk and controls loop.
Described Manipulator Controller can be provided with Manipulator Controller CPU, analog input interface (module), digital output
Interface (module).The frequency of vibration signal collected is converted into analog signals and passes to simulation by described vibrating sensor chip
Amount input interface, thus can gather biography sheet mechanical hand and normally pass the frequency of vibration letter taken when sheet runs whole process and collides
Number.
The analog quantity of analog input interface collection is carried out digital-to-analogue conversion by described CPU, and carries out frequency of vibration data
Record and analysis, and the record of daily record (Log) form can be formed, thus in the Log of above-mentioned frequency of vibration signal can being recorded just
Often run and be analyzed with different frequency during collision.
When the frequency of vibration that described CPU detects exceedes the collision warning threshold value of setting, can be connect by digital output
Alarm signal is exported mechanical hand jerk and controls loop by mouth.Jerk controls loop for receiving Manipulator Controller transmission
Alarm signal time produce jerk control, and trigger pass sheet mechanical hand each spindle motor driver brake hard, it is achieved pass sheet machine
The jerk of tool hands controls.
Described Manipulator Controller connects biography sheet mechanical hand each spindle motor driver, is used for controlling to pass sheet mechanical hand at each axle
To operation.When receiving alarm signal generation jerk control in jerk control loop, can directly trigger the biography each axle of sheet mechanical hand
The brake hard of motor driver, it is achieved the hard interlocking between collision warning and brake hard.
Refer to the collision warning threshold value setting means schematic diagram that Fig. 3, Fig. 3 are a preferred embodiment of the present invention.Such as Fig. 3 institute
Show, after vibrating sensor chip is arranged on the appropriate location passing sheet mechanical hand, can be by described Manipulator Controller pair
Pass the normal operating frequency (curve A) of each stage 1-N in sheet mechanical hand running to detect and segment, and by above-mentioned vibration
In the Log record of frequency signal, properly functioning and during collision different frequency is analyzed, and is just determining therefrom that each stage
Frequency range when scope B of normal running frequency and collision；And can be according to the scope of the normal operating frequency in each stage and touch
Frequency range when hitting sets collision warning threshold value C in each stage.
Below by detailed description of the invention and combine Fig. 1-Fig. 3, a kind of to the present invention has crashproof merit based on above-mentioned
The avoiding collision passing sheet mechanical hand of energy is described in detail.
The present invention's is a kind of based on the above-mentioned avoiding collision passing sheet mechanical hand with collision prevention function, it may include walk below
Rapid:
Step S01: as it is shown in figure 1, first vibrating sensor chip 12 to be arranged on Fork10 root and the hands of mechanical hand
Arm 11 junction, when Fork collides with silicon chip, vibration signal just can be delivered to vibrating sensor core via Fork at first
Sheet；Afterwards, as in figure 2 it is shown, when passing sheet robot work, each spindle motor driver can be controlled by Manipulator Controller, with
Control to pass sheet mechanical hand in each axial operation；And pass shaking of sheet hand grip by vibrating sensor chip by collect
Dynamic frequency signal passes to the analog input interface of Manipulator Controller.
Step S02: by the CPU of Manipulator Controller, the analog quantity of analog input interface collection is carried out digital-to-analogue and turn
Change, and frequency of vibration data are recorded and analyzes, and the record of daily record (Log) form can be formed.
Step S03: when the frequency of vibration detected exceedes the collision warning threshold value of setting, Manipulator Controller can be passed through
Digital-quantity output interface export this warning, the IO alarm signal of digital output is incorporated into pass sheet mechanical hand jerk control
Loop.
The normal operating frequency passed in sheet mechanical hand running is detected and Log note by available Manipulator Controller
Record segmentation, and according to the range set collision warning threshold value of normal operating frequency.
As it is shown on figure 3, to each stage in biography sheet mechanical hand running be just also with Manipulator Controller further
Often running frequency (curve A) detects and segments, and sets touching of each stage according to scope B of each stage normal operating frequency
Hit alarm threshold value.By Manipulator Controller, frequency of vibration Log segmentation is passed different phase in sheet mechanical hand running to touch
Hit alarm threshold value C, the wrong report that the threshold value setting means imposed uniformity without examining individual cases can be avoided to bring and the contradiction failing to report collision.
Step S04: control loop by jerk and produce jerk control when receiving alarm signal, and trigger biography sheet machinery
The brake hard of hands each spindle motor driver, it is achieved the jerk passing sheet mechanical hand controls.
When passing sheet robot work, can control to pass sheet mechanical hand in each axial fortune by described Manipulator Controller
OK；And when jerk control loop receives alarm signal generation jerk control, can directly trigger the biography each spindle motor of sheet mechanical hand
The brake hard of driver, it is achieved the hard interlocking between collision warning and brake hard, can be effectively improved biography sheet mechanical hand collision
The reliability of brake hard during generation.
In sum, the present invention passes grabbing of sheet mechanical hand by arranging vibrating sensor chip collection on biography sheet mechanical hand
The frequency of vibration produced when hands collides with silicon chip, it is possible to effectively collect biography sheet hand grip micro-with what silicon chip collision produced
Frequency of vibration data are recorded by Manipulator Controller and analyze by little impulsive force, and can transmit collision alarm in time, when
When frequency of vibration exceedes the collision warning threshold value of setting, loop can be controlled by jerk and produce jerk control, and trigger biography sheet machine
The brake hard of tool hands each spindle motor driver, makes biography sheet mechanical hand stop motion, it is achieved between collision warning and brake hard
Hard interlocking, thus the jerk realizing passing sheet mechanical hand controls.
The above-described the preferred embodiments of the present invention that are only, described embodiment is also not used to limit the patent guarantor of the present invention
Protect scope, the equivalent structure change that the description of the most every utilization present invention and accompanying drawing content are made, in like manner should be included in
In protection scope of the present invention.
Claims (10)
1. a biography sheet mechanical hand with collision prevention function, it is characterised in that described biography sheet mechanical hand is provided with:
Vibrating sensor chip, passes, for gathering, the frequency of vibration produced when sheet tongs collides with silicon chip, and will adopt
Collect to frequency of vibration signal pass to Manipulator Controller；
Manipulator Controller, for recording frequency of vibration data and analyzing, and exceedes the collision of setting at frequency of vibration
During alarm threshold value, alarm signal is passed to jerk and controls loop；
Jerk controls loop, controls for producing jerk when receiving alarm signal, and triggers the biography each spindle motor of sheet mechanical hand
The brake hard of driver, it is achieved the jerk passing sheet mechanical hand controls.
The biography sheet mechanical hand with collision prevention function the most according to claim 1, it is characterised in that described Manipulator Controller
It is provided with CPU, analog input interface, digital-quantity output interface, the frequency of vibration letter that described vibrating sensor chip will collect
Number being converted into analog signals passes to analog input interface, and the analog quantity of analog input interface collection is entered by described CPU
Row digital-to-analogue conversion, and frequency of vibration data are recorded and analyzes, when the frequency of vibration detected exceedes the collision report of setting
During alert threshold value, by digital-quantity output interface, alarm signal is exported the jerk control loop of biography sheet mechanical hand.
The biography sheet mechanical hand with collision prevention function the most according to claim 1, it is characterised in that described Manipulator Controller
Connect and pass sheet mechanical hand each spindle motor driver, for controlling biography sheet mechanical hand in each axial operation.
The biography sheet mechanical hand with collision prevention function the most according to claim 1 and 2, it is characterised in that described vibrating sensing
Device chip is located at handgrip and passes the connecting portion of sheet manipulator arm.
The biography sheet mechanical hand with collision prevention function the most according to claim 1, it is characterised in that manual by described machinery
Device processed detects passing the normal operating frequency in each stage in sheet mechanical hand running and segments, and according to each stage just
The often collision warning threshold value in range set each stage of running frequency.
6. based on the avoiding collision passing sheet mechanical hand with collision prevention function described in claim 1-5 any one, its
It is characterised by, comprises the following steps:
Step S01: when passing sheet robot work, passes shaking of sheet hand grip by vibrating sensor chip by collect
Dynamic frequency signal passes to the analog input interface of Manipulator Controller；
Step S02: the analog quantity of analog input interface collection is carried out digital-to-analogue conversion by the CPU of Manipulator Controller, and
Frequency of vibration data are recorded and analyzes；
Step S03: when the frequency of vibration detected exceedes the collision warning threshold value of setting, by the numeral of Manipulator Controller
Amount output interface, exports the jerk control loop passing sheet mechanical hand by alarm signal；
Step S04: control loop by jerk and produce jerk control when receiving alarm signal, and it is each to trigger biography sheet mechanical hand
The brake hard of spindle motor driver, it is achieved the jerk passing sheet mechanical hand controls.
Avoiding collision the most according to claim 6, it is characterised in that utilize Manipulator Controller to run passing sheet mechanical hand
During normal operating frequency detect and segment, and according to the range set collision warning threshold value of normal operating frequency.
Avoiding collision the most according to claim 7, it is characterised in that utilize Manipulator Controller to run passing sheet mechanical hand
During the normal operating frequency in each stage detect and segment, and the range set according to each stage normal operating frequency is each
The collision warning threshold value in stage.
Avoiding collision the most according to claim 6, it is characterised in that when passing sheet robot work, by described machinery
Hand controls control biography sheet mechanical hand is in each axial operation, and receives alarm signal generation jerk control in jerk control loop
Time processed, directly trigger the brake hard passing sheet mechanical hand each spindle motor driver, it is achieved between collision warning and brake hard
Interlocking.
Avoiding collision the most according to claim 6, it is characterised in that by the CPU of described Manipulator Controller to vibration
The frequency of vibration analogue signal of sensor chip transmission is acquired and forms the record of journal format.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610921265.4A CN106313053B (en) | 2016-10-21 | 2016-10-21 | A kind of biography piece manipulator and its avoiding collision with collision prevention function |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610921265.4A CN106313053B (en) | 2016-10-21 | 2016-10-21 | A kind of biography piece manipulator and its avoiding collision with collision prevention function |
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| Publication Number | Publication Date |
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| CN106313053A true CN106313053A (en) | 2017-01-11 |
| CN106313053B CN106313053B (en) | 2018-12-18 |
Family
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610921265.4A Active CN106313053B (en) | 2016-10-21 | 2016-10-21 | A kind of biography piece manipulator and its avoiding collision with collision prevention function |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107891450A (en) * | 2018-01-17 | 2018-04-10 | 深圳市美卡达科技有限公司 | The security system and control method of manipulator anticollision |
| CN108247654A (en) * | 2018-02-05 | 2018-07-06 | 遨博（北京）智能科技有限公司 | A kind of control method of robot, device and system |
| CN108536215A (en) * | 2018-04-16 | 2018-09-14 | 深圳市小龙电器有限公司 | A kind of waterproof Joystick controller based on control device intelligent anti-collision system |
| CN108858190A (en) * | 2018-06-28 | 2018-11-23 | 共享智能铸造产业创新中心有限公司 | The safety monitoring device of servo-control system |
| CN109283862A (en) * | 2018-09-27 | 2019-01-29 | 浙江明度智控科技有限公司 | A kind of AGV safety control system and AGV |
| CN109382850A (en) * | 2018-11-27 | 2019-02-26 | 中国科学院合肥物质科学研究院 | A kind of aluminium alloy extrusions feeding mechanical hand anti-collision system |
| CN110579301A (en) * | 2019-09-29 | 2019-12-17 | 苏州钮曼精密机电科技有限公司 | Three-dimensional anti-collision sensor and induction processing system |
| CN110757463A (en) * | 2019-11-20 | 2020-02-07 | 贵州大学 | Manipulator grabbing force control method and device |
| CN113021332A (en) * | 2019-12-24 | 2021-06-25 | 合肥欣奕华智能机器有限公司 | Industrial robot control system and control equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107891450A (en) * | 2018-01-17 | 2018-04-10 | 深圳市美卡达科技有限公司 | The security system and control method of manipulator anticollision |
| CN108247654A (en) * | 2018-02-05 | 2018-07-06 | 遨博（北京）智能科技有限公司 | A kind of control method of robot, device and system |
| CN108536215B (en) * | 2018-04-16 | 2020-04-03 | 深圳市小龙电器有限公司 | Waterproof control rod controller based on intelligent anti-collision system of control equipment |
| CN108536215A (en) * | 2018-04-16 | 2018-09-14 | 深圳市小龙电器有限公司 | A kind of waterproof Joystick controller based on control device intelligent anti-collision system |
| CN108858190A (en) * | 2018-06-28 | 2018-11-23 | 共享智能铸造产业创新中心有限公司 | The safety monitoring device of servo-control system |
| CN109283862A (en) * | 2018-09-27 | 2019-01-29 | 浙江明度智控科技有限公司 | A kind of AGV safety control system and AGV |
| CN109382850A (en) * | 2018-11-27 | 2019-02-26 | 中国科学院合肥物质科学研究院 | A kind of aluminium alloy extrusions feeding mechanical hand anti-collision system |
| CN109382850B (en) * | 2018-11-27 | 2024-03-29 | 中国科学院合肥物质科学研究院 | Anti-collision system for aluminum alloy profile feeding manipulator |
| CN110579301A (en) * | 2019-09-29 | 2019-12-17 | 苏州钮曼精密机电科技有限公司 | Three-dimensional anti-collision sensor and induction processing system |
| CN110757463B (en) * | 2019-11-20 | 2023-06-27 | 贵州大学 | Mechanical arm grabbing force control method and device |
| CN110757463A (en) * | 2019-11-20 | 2020-02-07 | 贵州大学 | Manipulator grabbing force control method and device |
| CN113021332A (en) * | 2019-12-24 | 2021-06-25 | 合肥欣奕华智能机器有限公司 | Industrial robot control system and control equipment |
| CN113021332B (en) * | 2019-12-24 | 2022-05-27 | 合肥欣奕华智能机器股份有限公司 | Industrial robot control system and control equipment |
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|---|---|
| CN106313053B (en) | 2018-12-18 |
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