CN106293995A - The data backup system of manufacturing execution system and method - Google Patents
The data backup system of manufacturing execution system and method Download PDFInfo
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- CN106293995A CN106293995A CN201510249796.9A CN201510249796A CN106293995A CN 106293995 A CN106293995 A CN 106293995A CN 201510249796 A CN201510249796 A CN 201510249796A CN 106293995 A CN106293995 A CN 106293995A
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Abstract
Present invention is disclosed the data backup system of a kind of manufacturing execution system, including: Backup Data lab setting module, Production database according to described manufacturing execution system sets up backup database, and in described backup database, the storage mode to the information of wafer batch is identical to the storage mode of the information of wafer batch with described Production database;Data relationship bag generation module, according to wafer batch Information Extracting Mechanism, imports described backup database by the information meeting the wafer batch in time limit;Data deletion module, according to importing to the result of wafer batch in described backup database, deletes the information of the wafer batch imported in described Production database in order.The data back up method also disclosing manufacturing execution system of the present invention.Data backup system and the method for the manufacturing execution system that the present invention provides can efficiently reduce the consuming cost of hardware resource, the human cost of database maintenance personnel and time cost.
Description
Technical field
The present invention relates to semiconductor manufacturing and perform systems technology field, particularly relate to a kind of manufacturing execution system
Data backup system and method.
Background technology
The production of modernization large scale integrated circuit is high-tech manufacture process, because product category is various, adds
Work complex procedures, it is desirable to production process is implemented the management of more lean by Semiconductor enterprises, and manufactures execution
System (MES) has provided the user a manufacturing industry environment become more meticulous, and helps Reducing Cost in Enterprises, presses
Phase delivers goods, improves the quality of product and improve service quality.The most all of semiconductor production enterprise is designed with
Production executive system (MES) monitors and manages production scene.It may be said that MES system is to advanced fab
Production most important.
Technological process and product are run data persistently the carrying out along with production process of goods, Jiu Hui by MES system
In data base, bulk deposition gets up, and in the prior art, wafer batch (lot) produces in technological process
The archiving method of data is: backuped quarterly by the Production database of MES system, then deletes expired
The technological process data of lot.Concrete, after lot shipment, i.e. the production status of lot shows as " shipped "
After three months, MES is automatically deleted this lot all of technological process data.Additionally, IT engineer's each season
At the beginning of the first month of degree, at the beginning of i.e. 1 month, at the beginning of 4 months, at the beginning of 7 months and at the beginning of 10 months, to the upper cycle in a season
MES Production database carries out full backup, and stores in a backup database.
If the technological process data that user has demand to recover a certain lot are done heavily processing (rework) or answer
Looking into, IT engineer can first find the backup database in corresponding time and month, then recovers this Backup Data
Storehouse, after database recovery, therefrom obtains the packet of the technological process of lot, then is inputted by this packet
In the middle of Production database, notify that lot is re-worked by user.
But, along with production process persistently carry out with production procedure day by day complicated, Production database also can
More and more huger, Production database is backuped quarterly, it is desirable to have the biggest hard drive space is supported, this
Increase the consuming cost of hardware resource, too increase the human cost of database maintenance personnel simultaneously.Further,
Recover backup database very time-consuming, submit to application to recover from user, return in user's hands to data,
At least need the cycle in a week, which increase user to waiting time of lot technological process data and shut-down
Time, have impact on the flow process that lot re-works.
Summary of the invention
It is an object of the invention to, it is provided that the data backup system of a kind of manufacturing execution system and method, it is possible to
Efficiently reduce the consuming cost of hardware resource, the human cost of database maintenance personnel and time cost.
For solving above-mentioned technical problem, the present invention provides the data backup system of a kind of manufacturing execution system, bag
Include:
Backup Data lab setting module, sets up Backup Data according to the Production database of described manufacturing execution system
Storehouse, in described backup database in the storage mode of the information of wafer batch and described Production database to crystalline substance
The storage mode of the information of circle batch is identical;
Data relationship bag generation module, according to wafer batch Information Extracting Mechanism, will meet the wafer lot in time limit
Secondary information imports described backup database;
Data deletion module, according to importing to the result of wafer batch in described backup database, in described life
Produce the information deleting the wafer batch imported in data base in order.
Optionally, in the data backup system of described manufacturing execution system, the number of described manufacturing execution system
Also include according to standby system:
Key in module, for keying in the sequence number of a wafer batch to be checked;
Query engine, connects described key entry module and backup database respectively, according to described wafer to be checked
The sequence number of batch, finds the information of described wafer batch to be checked in described backup database.
Optionally, in the data backup system of described manufacturing execution system, described key entry module is described system
Make a key entry interface of execution system.
Optionally, in the data backup system of described manufacturing execution system, the number of described manufacturing execution system
Also include a recovery module according to standby system, described recovery module by the information of wafer batch to be restored from institute
State backup database and import described Production database, and retain wafer batch corresponding in described backup database
Information.
Optionally, in the data backup system of described manufacturing execution system, the number of described manufacturing execution system
Also include a sub-wafer batch judging unit according to standby system, described sub-wafer batch judging unit judges to lead
Whether the wafer batch entered is sub-wafer batch, if the described wafer batch imported is mother wafer batch,
The most described data deletion module deletes the information of the wafer batch imported in described Production database;If institute
Stating the wafer batch imported is sub-wafer batch, and the mother wafer batch of the described wafer batch imported exists
In described Production database, the most described data deletion module does not delete the crystalline substance imported in described Production database
The information of circle batch;If the described wafer batch imported is sub-wafer batch, and described Production database
In do not exist described in the mother wafer batch of wafer batch that imported, the most described data deletion module is deleted described
The information of the wafer batch imported in Production database.
Optionally, in the data backup system of described manufacturing execution system, the number of described manufacturing execution system
Also include a neutral sheet batch judging unit according to standby system, described neutral sheet batch judging unit judges to lead
Whether the wafer batch entered is neutral sheet batch, if the described wafer batch imported is neutral sheet batch,
The most described data deletion module does not delete the information of the wafer batch imported in described Production database;If
The described wafer batch imported is not for neutral sheet batch, the most described data deletion module described production number of deletion
Information according to the wafer batch imported in storehouse.
Optionally, in the data backup system of described manufacturing execution system, the number of described manufacturing execution system
Also include a recovery wafer batch judging unit according to standby system, described recovery wafer batch judging unit judges
Whether the wafer batch imported reenters described Production database in special time, leads if described
The wafer batch entered reenters described Production database, the most described data deletion mould in described special time
Block does not delete the information of the wafer batch imported in described Production database;If the described wafer imported
Batch does not reenters described Production database in described special time, and the most described data deletion module is deleted
The information of the wafer batch imported in described Production database.
Optionally, in the data backup system of described manufacturing execution system, according to the method for data base view
Set up described wafer batch Information Extracting Mechanism.
According to the another side of the present invention, also provide for the data back up method of a kind of manufacturing execution system, including:
Production database according to described manufacturing execution system sets up backup database, in described backup database
To storage side to the information of wafer batch in the storage mode of the information of wafer batch and described Production database
Formula is identical;
According to wafer batch Information Extracting Mechanism, the information meeting the wafer batch in time limit is imported described backup
Data base;
According to importing to the result of wafer batch in described backup database, by suitable in described Production database
Sequence deletes the information of the wafer batch imported.
Optionally, in the data back up method of described manufacturing execution system, the number of described manufacturing execution system
Also include according to backup method:
Key in the sequence number of a wafer batch to be checked;
According to the sequence number of described wafer batch to be checked, find described to be checked in described backup database
The information of the wafer batch ask.
Optionally, in the data back up method of described manufacturing execution system, at described manufacturing execution system
One keys in interface keys in the sequence number of shown wafer batch to be checked.
Optionally, in the data back up method of described manufacturing execution system, the number of described manufacturing execution system
Also include according to backup method: the information of wafer batch to be restored is imported described life from described backup database
Produce data base, and retain the information of wafer batch corresponding in described backup database.
Optionally, in the data back up method of described manufacturing execution system, described basis imports to described standby
In part data base, the result of wafer batch, deletes the wafer lot imported in described Production database in order
The step of secondary information includes:
Judge whether the wafer batch imported is sub-batch, if the described wafer batch imported is mother crowd
Secondary, the most described data deletion module deletes the information of the wafer batch imported in described Production database;
If the described wafer batch imported is sub-batch, and female batch of the described wafer batch imported
In described Production database, the most described data deletion module is not deleted and has been imported in described Production database
The information of wafer batch;
If the described wafer batch that imported be sub-batch, and described Production database do not exist described in
Female batch of the wafer batch imported, the most described data deletion module is deleted in described Production database and is imported
The information of wafer batch.
Optionally, in the data back up method of described manufacturing execution system, described basis imports to described standby
In part data base, the result of wafer batch, deletes the wafer lot imported in described Production database in order
The step of secondary information includes:
Judge whether the wafer batch that imported is neutral sheet batch, if the described wafer batch that imported is
Neutral sheet batch, the most described data deletion module does not delete the wafer batch imported in described Production database
Information;
If the described wafer batch imported is not neutral sheet batch, the most described data deletion module deletes institute
State the information of the wafer batch imported in Production database.
Optionally, in the data back up method of described manufacturing execution system, described basis imports to described standby
In part data base, the result of wafer batch, deletes the wafer lot imported in described Production database in order
The step of secondary information includes:
Judge whether the wafer batch imported reenters described Production database in special time, if
The described wafer batch imported reenters described Production database, the most described number in described special time
The information of the wafer batch imported in described Production database is not deleted according to removing module;
If the described wafer batch imported does not reenters described creation data in described special time
Storehouse, the most described data deletion module deletes the information of the wafer batch imported in described Production database.
Optionally, in the data back up method of described manufacturing execution system, according to the method for data base view
Set up described wafer batch Information Extracting Mechanism.
Compared with prior art, data backup system and the method for the manufacturing execution system that the present invention provides has
Advantages below:
In the data backup system of the manufacturing execution system of present invention offer, described data relationship bag generates mould
The information meeting the wafer batch in time limit, according to wafer batch Information Extracting Mechanism, is imported described backup number by tuber
According to storehouse, described data deletion module is according to importing to the result of wafer batch in described backup database, in institute
State the information deleting the wafer batch imported in Production database in order, so that described Backup Data
Storehouse only preserves the information of wafer batch (lot), it is to avoid in described backup database, preserve board PM (pre-
Anti-property is safeguarded) or the too much record such as OCAP (Out of Control Action Plan, abnormal control plan),
Thus save memory space;Further, the data backup system moment the most automatically logarithm of manufacturing execution system
According to backing up, it is to avoid IT engineer manually backs up, save human resources.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of the data backup system of manufacturing execution system in one embodiment of the invention;
Fig. 2 is the flow chart of the data back up method of manufacturing execution system in one embodiment of the invention.
Detailed description of the invention
Below in conjunction with schematic diagram, data backup system and the method for the manufacturing execution system of the present invention are carried out more
Detailed description, which show the preferred embodiments of the present invention, it should be appreciated that those skilled in the art are permissible
Amendment invention described herein, and still realize the advantageous effects of the present invention.Therefore, description below should
Be understood to for those skilled in the art is widely known, and is not intended as limitation of the present invention.
In order to clear, whole features of practical embodiments are not described.In the following description, it is not described in detail public affairs
The function known and structure, because they can make to due to the fact that unnecessary details and chaotic.Will be understood that
In the exploitation of any practical embodiments, it is necessary to make a large amount of implementation detail to realize the specific objective of developer,
Such as according to about system or about the restriction of business, an embodiment change into another embodiment.Separately
Outward, it should think that this development is probably complicated and time-consuming, but for people in the art
It it is only routine work for Yuan.
Referring to the drawings the present invention the most more particularly described below in the following passage.According to following explanation and
Claims, advantages and features of the invention will be apparent from.
The core concept of the present invention is, it is provided that the data backup system of a kind of manufacturing execution system, such as Fig. 1
Shown in, including: Backup Data lab setting module 110, according to the production number of described Manufacturing Executive System MES
Backup database DB2 is set up, storage to wafer batch lot in described backup database DB2 according to storehouse DB1
Mode is identical to the storage mode of wafer batch lot with described Production database DB1;Data relationship Bao Sheng
Become module 120, according to wafer batch Information Extracting Mechanism, the information meeting wafer batch lot in time limit is led
Enter described backup database DB2;Data deletion module 130, according to importing to DB2 in described backup database
The result of wafer batch lot, deletes the wafer batch imported in described Production database DB1 in order
The information of lot.
Described backup database DB2 only preserves the information of wafer batch (lot), it is to avoid at described backup number
According in the DB2 of storehouse preserve board PM (preventive maintenance) or OCAP (Out of Control Action Plan,
Abnormal control plan) etc. too much record, thus save memory space;Further, Manufacturing Executive System MES
The data backup system moment the most automatically data are backed up, it is to avoid IT engineer manually backs up,
Save human resources.
Further, in conjunction with the data backup system of above-mentioned manufacturing execution system, present invention also offers a kind of system
Make the data back up method of execution system, as in figure 2 it is shown, include:
Step S1, sets up backup database, described backup according to the Production database of described manufacturing execution system
To information to wafer batch in the storage mode of the information of wafer batch and described Production database in data base
Storage mode identical;
Step S2, according to wafer batch Information Extracting Mechanism, imports the information meeting the wafer batch in time limit
Described backup database;
Step S3, according to importing to the result of wafer batch in described backup database, at described creation data
Storehouse is deleted the information of the wafer batch imported in order.
Data backup system and the side of the manufacturing execution system of the present invention are described below in conjunction with specific embodiment
Method.As it is shown in figure 1, described data backup system includes Backup Data lab setting module 110, data relationship bag
Generation module 120 and data deletion module 130.
When described data backup system carries out data backup, first carry out step S1, described backup database
Module 110 is set and sets up backup database according to the Production database DB1 of described Manufacturing Executive System MES
DB2, wherein, to the storage mode of wafer batch lot information and described production in described backup database DB2
In database D B1, the storage mode to wafer batch lot information is identical.The most described backup database DB2 and
Production database DB1 has identical framework, table, index, major key, and by described Production database DB1
This described backup database DB2 of the data syn-chronization of 14 allocation lists relevant to lot information, additionally in institute
State and backup database DB2 sets up 11 inquiry views relevant with lot information, finally at described backup number
According to setting up control of authority table in the DB2 of storehouse, wherein, described backup database DB2 is for depositing the unit of data
Lattice are empty.
Table | Data | Index | Data |
A | X1 | D | X2 |
B | Y1 | E | Y2 |
C | Z1 | F | Z2 |
Table 1
Table | Data | Index | Data |
A | D | ||
B | E | ||
C | F |
Table 2
Such as, table 1 is the storage mode in described Production database DB1 to wafer batch lot information, institute
The tables of data stating Production database DB1 includes Table (table, the project such as including A, B, C) and Data thereof
(include X1, Y1, Z1 etc. concrete data), Index (index, the project such as including D, E, F) and
Data (includes the concrete data such as X2, Y2, Z2).Table 2 is to wafer in described backup database DB2
The storage mode of batch lot information, the tables of data of described backup database DB2 include Table (table, including
The projects such as A, B, C) and Data (wherein concrete data be empty), Index (index, including D, E,
The projects such as F) and Data (wherein concrete data are empty).
Then carrying out step S2, described data relationship bag generation module 120 is according to wafer batch information extraction machine
System, imports described backup database DB2 by the information meeting wafer batch lot in time limit.It is also preferred that the left according to
The method of data base view sets up described wafer batch Information Extracting Mechanism, and the method for data base view is ability
The those of ordinary skill in territory may be appreciated.Concrete, engineer is according to lot in described Production database DB1
Tables of data relation, sets up a complete lot Information Extracting Mechanism, when the sequence number (lot ID) of input wafer batch
Time, the total data set about lot can be obtained, thus by this lot in described Production database DB1
All data milli free of errors import to inside described backup database DB2.
Carrying out step S3 afterwards, described data deletion module 130 is according to importing to described backup database DB2
The result of middle wafer batch lot, with lot ID as input source, deletes in described Production database DB1 in order
Information except wafer batch lot imported.
It is also preferred that the left in described step S3, also include, it is input source according to lot ID, to each lot's
Basic condition judges successively, as it is shown in figure 1, described data backup system also includes that lot basic condition is sentenced
Disconnected unit 170, concrete, described lot basic condition judging unit 170 include sub-batch judging unit 171,
Neutral sheet batch judging unit 172, recovery wafer batch judging unit 173.In described data back up method,
Step S3 includes step S31, step S32 and step S33:
Carrying out described step S31, described sub-batch judging unit 171 judges the most to have imported successively
Wafer batch lot whether be sub-batch (sub-lot), if described wafer batch lot imported for mother batch
Secondary (female lot), described data deletion module 130 deletes the wafer imported in described Production database DB1
The information of batch lot;If wafer batch lot imported described in step s 2 is sub-batch, and described
In described Production database DB1, (i.e. female lot's female lot of wafer batch lot imported of this sub-lot exists
In described Production database DB1), the most described data deletion module 130 does not delete described Production database DB1
In the information of wafer batch (this sub-lot) that imported;If described wafer batch lot imported is sub-lot,
And female batch (i.e. this sub-lot of the wafer batch imported described in not existing in described Production database DB1
Female lot not in described Production database DB1), the most described data deletion module 130 deletes described life
Produce the information of the wafer batch (this sub-lot) imported in database D B1;
Carrying out described step S32, described neutral sheet batch judging unit 172 has judged the most successively
Whether wafer batch lot imported is neutral sheet batch (V lot), if described wafer batch lot imported
For neutral sheet batch (V lot), the most described data deletion module 130 does not delete described Production database DB1
In the information of wafer batch (this V lot) that imported;If described wafer batch lot imported is not for sky
Catch batch (V lot), the most described data deletion module 130 is deleted in described Production database DB1 and is led
The information of the wafer batch (this V lot) entered;
Carrying out described step S33, described recovery wafer batch judging unit 173 judges in step s 2 successively
Whether wafer batch lot imported reenters (restore) described Production database in special time
DB1, described special time is configured as the case may be, does not limits at this.The most described special time
Can be 7 days, then judge whether wafer batch lot imported did the operation of restore in 7 days.As
Wafer batch lot imported described in Guo reenters described Production database DB1 in described special time,
The most described data deletion module 130 does not delete this lot in described Production database DB1;Lead if described
Wafer batch lot entered does not reenters described Production database DB1, the most described number in described special time
This lot in described Production database DB1 is deleted according to removing module 130.
Wherein, the sequencing of step S31, step S32 and step S33 does not limits.
Through step S1-step S3, by the lot information back-up in described Production database DB1 to described backup
Database D B2, only preserves the information of wafer batch (lot), it is to avoid in institute in described backup database DB2
State and backup database DB2 preserves board PM (preventive maintenance) or OCAP (Out of Control Action
Plan, abnormal control plan) etc. too much record, thus save memory space;Further, manufacturing execution system
Data are the most automatically backed up by the data backup system moment of MES, it is to avoid IT engineer is manually carried out
Backup, saves human resources.
The information of wafer batch lot that customer inquiries is deleted in described Production database DB1 for convenience,
It is also preferred that the left as it is shown in figure 1, described data backup system also includes keying in module 140 and query engine 150,
Described query engine 150 connects described key entry module 140 and backup database DB2 respectively.In described data
In backup method, also include step S4, specifically include step S41 and step S42:
Carrying out step S41, client keys in the sequence number of key entry one wafer batch to be checked in module described 140
(lot ID), this wafer batch to be checked is the wafer batch being deleted in described Production database DB1;
Carrying out step S42, described query engine 150 is according to the sequence number (lot of described wafer batch to be checked
ID), in described backup database, DB2 finds the information of described wafer batch to be checked.
Preferably, described key entry module 140 is a key entry interface of described MES, performs system described manufacture
System MES sets up described key entry interface, to facilitate client directly to inquire about in MES system, and will look into
Ask result to show in the result display interface of MES system.
For convenience the information of deleted wafer batch lot is returned to from described backup database DB2
In described Production database DB1, it is also preferred that the left as it is shown in figure 1, described data backup system also includes that one is extensive
Multiple module 160.In described data back up method, also include step S5, specifically include:
Described recovery module 160 by the information of wafer batch lot to be restored from described backup database DB2
Import described Production database DB1, to facilitate wafer batch lot to be restored to carry out re-working (rework);
Meanwhile, the information of wafer batch lot corresponding in described backup database DB2 is retained.Wherein, treat described in
Wafer batch lot recovered can be wafer batch lot found in described step S4.
Through step S4, step S5, client can the most as required, and oneself is looked in MES system
Looking for, it is to avoid submit application to IT engineer, client can by described data backup system and the method for the present invention
With the lot information searched rapidly and recover in described backup database DB2, save the time.
Further, in step S5, described recovery module 160 retains correspondence in described backup database DB2
The information of wafer batch lot, but when this lot pours described backup database DB2 again into, then delete
The information that last time pours into.After do so can avoid these Lot data to return to described Production database DB1,
If there being fortuitous event to occur, such as lot data exception, user misoperation data, need to begin the beguine once
During restore lot data, the lot source data in described backup database DB2 is lost.
Additionally, the information of board can also be carried out by the data backup system of described manufacturing execution system and method
Backup and recovery, this is it will be understood by those skilled in the art that, does not repeats at this.
Obviously, those skilled in the art can carry out various change and modification without deviating from this to the present invention
Bright spirit and scope.So, if the present invention these amendment and modification belong to the claims in the present invention and
Within the scope of its equivalent technologies, then the present invention is also intended to comprise these change and modification.
Claims (16)
1. a data backup system for manufacturing execution system, including:
Backup Data lab setting module, sets up Backup Data according to the Production database of described manufacturing execution system
Storehouse, in described backup database in the storage mode of the information of wafer batch and described Production database to crystalline substance
The storage mode of the information of circle batch is identical;
Data relationship bag generation module, according to wafer batch Information Extracting Mechanism, will meet the wafer lot in time limit
Secondary information imports described backup database;
Data deletion module, according to importing to the result of wafer batch in described backup database, in described life
Produce the information deleting the wafer batch imported in data base in order.
2. the data backup system of manufacturing execution system as claimed in claim 1, it is characterised in that described
The data backup system of manufacturing execution system also includes;
Key in module, for keying in the sequence number of a wafer batch to be checked;
Query engine, connects described key entry module and backup database respectively, according to described wafer to be checked
The sequence number of batch, finds the information of described wafer batch to be checked in described backup database.
3. the data backup system of manufacturing execution system as claimed in claim 2, it is characterised in that described
Key in the key entry interface that module is described manufacturing execution system.
4. the data backup system of the manufacturing execution system as described in any one in claims 1 to 3, its
Being characterised by, the data backup system of described manufacturing execution system also includes a recovery module, described recovery mould
The information of wafer batch to be restored is imported described Production database from described backup database by block, and retains
The information of wafer batch corresponding in described backup database.
5. the data backup system of the manufacturing execution system as described in any one in claims 1 to 3, its
Being characterised by, the data backup system of described manufacturing execution system also includes a sub-batch judging unit, described
Sub-batch judging unit judges whether the wafer batch imported is sub-batch, if the described wafer imported
Batch is female batch, and the most described data deletion module deletes the wafer batch imported in described Production database
Information;If the described wafer batch imported is sub-batch, and the mother of the described wafer batch imported
Batch is in described Production database, and the most described data deletion module is not deleted in described Production database and led
The information of the wafer batch entered;If the described wafer batch imported is sub-batch, and described creation data
Female batch of the wafer batch imported described in not existing in storehouse, the most described data deletion module deletes described life
Produce the information of the wafer batch imported in data base.
6. the data backup system of the manufacturing execution system as described in any one in claims 1 to 3, its
Being characterised by, the data backup system of described manufacturing execution system also includes a neutral sheet batch judging unit,
Described neutral sheet batch judging unit judges whether the wafer batch imported is neutral sheet batch, if described
The wafer batch imported is neutral sheet batch, and the most described data deletion module does not delete described Production database
In the information of wafer batch that imported;If the described wafer batch imported is not neutral sheet batch, then
Described data deletion module deletes the information of the wafer batch imported in described Production database.
7. the data backup system of the manufacturing execution system as described in any one in claims 1 to 3, its
Being characterised by, the data backup system of described manufacturing execution system also includes a recovery wafer batch judging unit,
Described recovery wafer batch judging unit judges whether the wafer batch imported reenters in special time
Described Production database, if the described wafer batch imported reenters described in described special time
Production database, the most described data deletion module does not delete the wafer batch imported in described Production database
Information;If the described wafer batch imported does not reenters described production number in described special time
According to storehouse, the most described data deletion module deletes the information of the wafer batch imported in described Production database.
8. the data backup system of manufacturing execution system as claimed in claim 1, it is characterised in that according to
The method of data base view sets up described wafer batch Information Extracting Mechanism.
9. a data back up method for manufacturing execution system, including;
Production database according to described manufacturing execution system sets up backup database, in described backup database
To storage side to the information of wafer batch in the storage mode of the information of wafer batch and described Production database
Formula is identical;
According to wafer batch Information Extracting Mechanism, the information meeting the wafer batch in time limit is imported described backup
Data base;
According to importing to the result of wafer batch in described backup database, by suitable in described Production database
Sequence deletes the information of the wafer batch imported.
10. the data back up method of manufacturing execution system as claimed in claim 9, it is characterised in that described
The data back up method of manufacturing execution system also includes:
Key in the sequence number of a wafer batch to be checked;
According to the sequence number of described wafer batch to be checked, find described to be checked in described backup database
The information of the wafer batch ask.
The data back up method of 11. manufacturing execution systems as claimed in claim 10, it is characterised in that in institute
The sequence number of shown wafer batch to be checked is keyed at the key entry interface stating manufacturing execution system.
The data back up method of manufacturing execution system as described in any one in 12. such as claim 9 to 11, its
Being characterised by, the data back up method of described manufacturing execution system also includes: by wafer batch to be restored
Information imports described Production database from described backup database, and retains correspondence in described backup database
The information of wafer batch.
The data back up method of manufacturing execution system as described in any one in 13. such as claim 9 to 11, its
Being characterised by, described basis imports to the result of wafer batch in described backup database, at described production number
Include according to the step of the information deleting the wafer batch imported in storehouse in order:
Judge whether the wafer batch imported is sub-batch, if the described wafer batch imported is mother crowd
Secondary, the most described data deletion module deletes the information of the wafer batch imported in described Production database;
If the described wafer batch imported is sub-batch, and female batch of the described wafer batch imported
In described Production database, the most described data deletion module is not deleted and has been imported in described Production database
The information of wafer batch;
If the described wafer batch that imported be sub-batch, and described Production database do not exist described in
Female batch of the wafer batch imported, the most described data deletion module is deleted in described Production database and is imported
The information of wafer batch.
The data back up method of manufacturing execution system as described in any one in 14. such as claim 9 to 11, its
Being characterised by, described basis imports to the result of wafer batch in described backup database, at described production number
Include according to the step of the information deleting the wafer batch imported in storehouse in order:
Judge whether the wafer batch that imported is neutral sheet batch, if the described wafer batch that imported is
Neutral sheet batch, the most described data deletion module does not delete the wafer batch imported in described Production database
Information;
If the described wafer batch imported is not neutral sheet batch, the most described data deletion module deletes institute
State the information of the wafer batch imported in Production database.
The data back up method of manufacturing execution system as described in any one in 15. such as claim 9 to 11, its
Being characterised by, described basis imports to the result of wafer batch in described backup database, at described production number
Include according to the step of the information deleting the wafer batch imported in storehouse in order:
Judge whether the wafer batch imported reenters described Production database in special time, if
The described wafer batch imported reenters described Production database, the most described number in described special time
The information of the wafer batch imported in described Production database is not deleted according to removing module;
If the described wafer batch imported does not reenters described creation data in described special time
Storehouse, the most described data deletion module deletes the information of the wafer batch imported in described Production database.
The data back up method of 16. manufacturing execution systems as claimed in claim 9, it is characterised in that according to
The method of data base view sets up described wafer batch Information Extracting Mechanism.
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CN112818180A (en) * | 2020-12-31 | 2021-05-18 | 广州粤芯半导体技术有限公司 | Storage and query method of wafer processing historical data and process control system |
CN115269581A (en) * | 2022-09-23 | 2022-11-01 | 广州粤芯半导体技术有限公司 | Processing method and system of furnace tube production data, storage medium and computer equipment |
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