CN106290264A - A kind of system and method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum - Google Patents
A kind of system and method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum Download PDFInfo
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- CN106290264A CN106290264A CN201610955767.9A CN201610955767A CN106290264A CN 106290264 A CN106290264 A CN 106290264A CN 201610955767 A CN201610955767 A CN 201610955767A CN 106290264 A CN106290264 A CN 106290264A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L21/00—Vacuum gauges
- G01L21/26—Vacuum gauges by making use of radiometer action, i.e. of the pressure caused by the momentum of molecules passing from a hotter to a cooler member; Vacuum gauges of the Knudsen type
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Abstract
The invention discloses a kind of system and method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, the method utilizes laser focusing ablation vacuum chamber target material inside to produce plasma, being focused on by optical lens, spectrogrph light splitting, image intensifier imaging measures plasma spectrometry.Through repetitive measurement difference air pressure environment inferior gas ions spectrum, analyze the relation finding plasma spectrum and air pressure.Utilize this relation, i.e. would know that vacuum chamber air pressure by measuring plasma spectrometry.
Description
Technical field
Vacuum sensing technology field of the present invention, is specifically related to one and punctures technology for detection vacuum holding based on induced with laser spectrum
Put the system and method for vacuum.
Background technology
Producing and in experiment, some specific event needs to realize in vacuum environment.Commonly use as in power system
High-Voltage Electrical Appliances vacuum circuit breaker.In order to improve the pressure of switch, strengthen the connecting-disconnecting function of switch, often select vacuum conduct
Its arc-chutes environment.And for example in the experiment of Z constriction, in order to realize implosion the constriction of tinsel battle array, its vacuum typically requires low
In 10-5Pa.In order to reach vacuum environment, typically it is used in combination by mechanical pump and molecular pump and extracts unnecessary air out.But it is used for
Judge and evaluate vacuum chamber vacuum then to need special vacuometer to realize.
Conventional vacuometer includes directly measuring vacuometer 2 kinds: 1, utilize U-tube two ends liquid level difference to measure the quiet of pressure
State liquid level vacuometer；2, the effect being under pressure on the vessel surface being connected with vacuum is utilized to produce elastic deformation to measure pressure
The elastic element gauge of force value.Indirectly measure vacuometer 8 kinds: 1, utilize volume and the compression of pressure dependence measurement of vacuum
Vacuometer；2, air heat under low pressure is utilized to conduct the thermal radiation vacuum gauge made with pressure about this principle；3, low pressure is utilized
The thermal radiation vacuum gauge that the lower pressure-dependent principle of gas radiation is made；4, utilize under low pressure gas molecule by lotus energy particle
Ionization by collision, the ion gauge that the pressure-dependent principle of ion stream of generation is made；5, utilize gas discharge situation and put
Electricity color with pressure about the discharge tube indicator made；6, gas and the momentum-exchange i.e. external friction of chamber wall under low pressure are utilized
The viscosity gauge that principle is made；7, utilize and between absorption and desorption time and pressure, there is the field cause frequency microscope that relation is made；
8, mass-spectrometric technique is utilized to carry out the partial pressure vacuometer of mixed gas partial pressure measurement.Above vacuometer is required to and tested vacuum
Chamber contacts, (such as radioprotective) and inapplicable in some special environment.
Summary of the invention
It is an object of the invention to provide and a kind of puncture technology for detection vacuum equipment vacuum based on induced with laser spectrum
System and method, with the defect overcoming above-mentioned prior art to exist, the present invention utilizes induced with laser spectrum to puncture technology, by examining
Break and analyze the spectrum of the plasma of generation in vacuum chamber, evaluating the vacuum of this vacuum chamber, utilizing swashing of the present invention
Photoinduction spectrum punctures technology can realize the detection of Non-contact vacuum degree.
For reaching above-mentioned purpose, the present invention adopts the following technical scheme that
A kind of system puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, including nanosecond laser and
Vacuum cavity, is provided with metallic target in vacuum cavity, what the dead ahead of metallic target was provided with sending nanosecond laser swashs
Light light beam focuses on the lens on metallic target, vacuum cavity be provided with for by the first watch window of laser beam and for
Self luminous second watch window of plasma produced by laser ablation metallic target, the underface of the second watch window is arranged
There is the spectral measurement device for measuring plasma self-luminous spectrum, vacuum cavity is additionally provided with for controlling going out of vacuum
QI KOU, also includes the digital delay generator for Time-delayed trigger nanosecond laser and spectral measurement device.
Further, described spectral measurement device includes the spectrogrph being arranged on the underface of the second watch window, spectrum
The optical lens for plasma self-luminous being focused on spectrograph slit, spectrogrph it is provided with between instrument and the second watch window
Upper connection has image intensifier.
Further, described metallic target is pyrite target or vacuum chamber inwall.
Further, the laser energy that described nanosecond laser produces is not less than 30mJ.
Further, the focal length of described lens is less than the spacing between the first watch window and metallic target.
Further, described spectrometer slit widths is less than 20 μm.
A kind of method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, comprises the following steps:
1) metallic target is installed in vacuum chamber, and by gas outlet evacuation；
2) utilize digital delay generator to control nanosecond laser produce laser beam and focus on metallic target surface；
3) after utilizing digital delay generator to trigger nanosecond laser, Time-delayed trigger spectral measurement device, measure metallic target
The plasma self-luminous spectrum produced；
4) the plasma self-luminous spectrum that under repetitive measurement difference vacuum, metallic target produces, finds spectral intensity with true
The relation of reciprocal of duty cycle；
5) according to the relation of spectral intensity Yu vacuum, the spectral intensity of image intensifier record is utilized i.e. to can interpolate that vacuum
The vacuum of chamber.
Compared with prior art, the present invention has a following useful technique effect:
Present system by arranging nanosecond laser, vacuum chamber and spectral measurement device, pass through nanosecond laser
The laser ablation vacuum chamber target material sent, by spectral measurement device measure by laser ablation metallic target produce etc.
Gas ions self-luminous spectrum, utilize the relation of plasma spectrometry and vacuum chamber air pressure to detect vacuum chamber vacuum, can
With under the structure situation not changing vacuum chamber, directly vacuum chamber vacuum is carried out in real time, on-line measurement.
Further, the laser energy that nanosecond laser produces is at least above 30mJ so that it is can burn in vacuum environment
Erosion metal or chamber walls produce bright plasma self-luminous.
Further, the focal length of lens cannot be greater than the spacing of the first watch window and metallic target, to ensure laser beam energy
Focus on metallic target surface.
Further, spectrograph slit should be sufficiently small, at least should be less than 20 μm, to ensure the resolution capability of spectrum.
The inventive method is that a kind of induced with laser spectrum punctures technology, can in real time, on-line checking, utilize the inventive method
Vacuum can be determined by metallic target constituent content in detection vacuum chamber, the vacuum of chamber is carried out contactless
Detection, and owing to laser speckle after over-focusing is little, the infringement to metallic target or vacuum chamber wall is little, close to Non-Destructive Testing.
Accompanying drawing explanation
Fig. 1 is the structural representation of present system；
Wherein, 1, nanosecond laser；2, digital delay generator；3, spectrogrph；4, vacuum chamber；5, metallic target,；6, saturating
Mirror；7, the first watch window；8, the second watch window；9, optical lens；10, image intensifier；11, gas outlet.
Fig. 2 is the linear relationship of vacuum and spectral line Zn II 492.40nm/Cu I 521.8nm strength ratio.
Detailed description of the invention
Below in conjunction with the accompanying drawings the present invention is described in further detail:
Seeing Fig. 1, a kind of system puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, including vacuum
The tested vacuum equipment that chamber 4, gas outlet the 11, first watch window the 7, second watch window 8 are constituted；And by nanosecond laser
1, digital delay generator 2, spectrogrph 3, image intensifier (ICCD) 10, optical lens 9, lens 6 and the vacuum of metallic target 5 composition
Degree detecting system.
Vacuum chamber 4 refers to the vacuum chamber of any vacuum equipment, and its size at least can accommodate the metallic target 5 of diameter 1cm, and
Vacuum chamber 4 at least has two watch windows and a gas outlet 11, and the first watch window 7 is mainly used in passing through laser light
Bundle, the second watch window 8 is mainly used in collecting induced with laser metallic target 5 and produces the self-luminous of plasma, and gas outlet 11 is used for
Bleed with air inlet thus control the vacuum of vacuum chamber 4.The laser energy that nanosecond laser 1 produces, not less than 30mJ, passes through
First watch window 7 is focused on metallic target 5 by lens 6 again.Lens 6 focal length cannot be greater than the first watch window 7 and metallic target 5
Spacing, to ensure that laser beam can focus on metallic target 5 surface.Metallic target 5 can be pyrite target material, can be inside device
A certain metal device, it is also possible to be vacuum chamber 4 wall.
It is made up of spectral measurement system spectrogrph 3, optical lens 9 and image intensifier ICCD10 and is mainly used in Laser Measurement burning
Erosion metallic target 5 produces the self-luminous of plasma.Optical lens 9 for focusing plasma self-luminous in the slit of spectrogrph 3,
By imaging on image intensifier ICCD10 after spectrogrph 3 light splitting.
Digital delay generator 2, for triggering and control nanosecond laser 1 and the movement time of spectrogrph 3, adjusts spectrum
The time delay of instrument detection plasma self-luminous spectrum.
A kind of method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, mainly includes following step
Rapid:
1) metallic target 5 is installed in vacuum chamber 4, and evacuation；
2) utilize digital delay generator 2 to control nanosecond laser 1 and produce laser focusing in metallic target 5 surface；
3) after utilizing digital delay generator 2 to trigger nanosecond laser 1, Time-delayed trigger spectral measurement system action, measure
The plasma spectrometry that metallic target 5 produces；
4) plasma spectrometry that under repetitive measurement difference air pressure, metallic target 5 produces, finds wherein the intensity of spectral line and air pressure
Relation；
5) vacuum of vacuum chamber 4 is judged according to the spectral intensity of image intensifier ICCD10 record.
Below in conjunction with specific embodiment, the present invention is described in further detail:
A kind of method puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, needs to include that one can use
In the nanosecond laser 1 of generation short-pulse laser, produce laser and also focused in vacuum chamber 4 by lens 6；Including a set of light
Spectrometry device, mainly comprises optical lens 9, spectrogrph 3 and image intensifier 10, is used for measuring plasma self-luminous light
Spectrum；Including the vacuum chamber 4 being detected, vacuum chamber 4 at least needs two watch windows, and watch window can not be with always
On line；Including one for controlling triggering nanosecond laser 1 and the digital delay generator 2 of spectrogrph 3 action.
The realization of this technical scheme needs to follow following steps:
1) utilizing digital delay generator 2 to control to trigger nanosecond laser 1 and produce laser, the laser of generation passes through lens 6
Focus on the pyrite target (or other metal materials, or vacuum chamber wall) of vacuum chamber 4；
2) pyrite target (or other metal materials, or vacuum chamber wall) is produced plasma and is gathered by optical lens 9
Burnt in spectrogrph 3 slit；
3) utilizing digital delay generator 2 to control to trigger spectrogrph 3, spectrogrph 3 action will enter the plasma of slit
Self-luminous imaging after light splitting, in image intensifier 10, measures nitrogen and the spectral line of copper (or other metals)；
4) nitrogen and the spectral line of copper (or other metals) under repetitive measurement difference vacuum environment, find out different vacuum and nitrogen/
The relation of copper the intensity of spectral line ratio.
In order to ensure technical scheme reliable realizes and certainty of measurement is it is also noted that following item:
1) nanosecond laser 1 produce laser energy sufficiently strong, at least above 30mJ, can in vacuum environment ablation gold
Belong to or chamber walls produces bright plasma self-luminous；
2) in the case of ensureing that measurement the intensity of spectral line is sufficiently strong, spectrogrph 3 slit should be sufficiently small, at least should be less than 20
μm, to ensure the resolution capability of spectrum；
3) spectral line measurement should select suitably measure moment and ICCD time of exposure, to ensure that spectral line signal to noise ratio is high, line
Spectrum is substantially；
4), under repetitive measurement difference vacuum environment during the spectral line of nitrogen and copper (or other metals), should ensure that except Chamber vacuum
Other measuring conditions beyond degree keep constant.
In the present embodiment, as it is shown in figure 1, nanosecond laser 1 produces the 1064nm laser of energy ＞ 30mJ, laser is through
One watch window 7 enters vacuum chamber 4, focal distance f=30cm lens 6 focus on pyrite target surface and produce plasma.Deng from
Daughter self-luminous focuses on spectrogrph 3 slit, slit width ＜ 20 μm through optical lens 9.Through spectrogrph 3 light splitting, as increasing
Strong device 10 imaging, can be recorded plasma spectrometry image, be regulated the vacuum of vacuum chamber 4 by gas outlet 11, can record
Plasma spectrum picture under different vacuums.
Fig. 2 is under different air pressure environment, spectral line Zn II 492.40nm and the strength ratio of Cu I 521.8nm.Through over-fitting
Finding, the strength ratio degree linear with air pressure of spectral line Zn II 492.40nm/Cu I 521.8nm is best, is suitable for vacuum
Measurement.So only just can need to be calculated very by the strength ratio measuring spectral line Zn II 492.40nm/Cu I 521.8nm
The vacuum of plenum chamber.
As it has been described above, the present invention punctures measuring technology based on induced with laser spectrum, produced by Laser Measurement ablation target material
Raw plasma self-luminous spectrum, utilizes the relation of plasma spectrometry and vacuum chamber air pressure to detect vacuum chamber vacuum
Degree.
Claims (7)
1. the system puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum, it is characterised in that include receiving
Second laser instrument (1) and vacuum cavity (4), be provided with metallic target (5) in vacuum cavity (4), the dead ahead of metallic target (5) is provided with
The laser beam focusing that can nanosecond laser (1) be sent lens (6) on metallic target (5), vacuum cavity (4) is provided with
For by first watch window (7) of laser beam and for the plasma that produced by laser ablation metallic target (5) from
Luminous the second watch window (8), the underface of the second watch window (8) is provided with for measuring plasma self-luminous spectrum
Spectral measurement device, vacuum cavity (4) is additionally provided with the gas outlet (11) for controlling vacuum, also include for time delay touch
Send out nanosecond laser (1) and the digital delay generator (2) of spectral measurement device.
The most according to claim 1 a kind of based on what induced with laser spectrum punctured technology for detection vacuum equipment vacuum it is
System, it is characterised in that described spectral measurement device includes the spectrogrph (3) being arranged on the underface of the second watch window (8), light
The optics for plasma self-luminous being focused on spectrogrph (3) slit it is provided with between spectrometer (3) and the second watch window (8)
Camera lens (9), the upper connection of spectrogrph (3) has image intensifier (10).
The most according to claim 1 a kind of based on what induced with laser spectrum punctured technology for detection vacuum equipment vacuum it is
System, it is characterised in that described metallic target (5) is pyrite target or vacuum chamber inwall.
The most according to claim 1 a kind of based on what induced with laser spectrum punctured technology for detection vacuum equipment vacuum it is
System, it is characterised in that the laser energy that described nanosecond laser (1) produces is not less than 30mJ.
The most according to claim 1 a kind of based on what induced with laser spectrum punctured technology for detection vacuum equipment vacuum it is
System, it is characterised in that the focal length of described lens (6) is less than the spacing between the first watch window (7) and metallic target (5).
The most according to claim 1 a kind of based on what induced with laser spectrum punctured technology for detection vacuum equipment vacuum it is
System, it is characterised in that described spectrogrph (3) slit width is less than 20 μm.
7. the system puncturing technology for detection vacuum equipment vacuum based on induced with laser spectrum used described in claim 1
Vacuum detecting method, it is characterised in that comprise the following steps:
1) metallic target (5) is installed in vacuum chamber (4), and by gas outlet (11) evacuation；
2) utilize digital delay generator (2) to control nanosecond laser (1) produce laser beam and focus on metallic target (5) table
Face；
3) after utilizing digital delay generator (2) to trigger nanosecond laser (1), Time-delayed trigger spectral measurement device, measure metal
The plasma self-luminous spectrum that target (5) produces；
4) the plasma self-luminous spectrum that under repetitive measurement difference vacuum, metallic target (5) produces, finds spectral intensity with true
The relation of reciprocal of duty cycle；
5) according to the relation of spectral intensity Yu vacuum, the spectral intensity utilizing image intensifier (10) to record i.e. can interpolate that vacuum
The vacuum of chamber (4).
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843387A (en) * | 2017-10-30 | 2018-03-27 | 佛山市蓝瑞欧特信息服务有限公司 | The vacuum identifying system of closed container |
| CN112082691A (en) * | 2020-08-24 | 2020-12-15 | 西安交通大学 | Low-pressure measuring method and device based on laser plasma imaging |
| CN114942101A (en) * | 2022-01-28 | 2022-08-26 | 西安交通大学 | Vacuum degree on-line detection system and method of single optical fiber laser induced breakdown spectroscopy |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002027301A1 (en) * | 2000-09-28 | 2002-04-04 | Voest-Alpine Industrieanlagenbau Gmbh & Co | Device used for the chemical analysis of material samples and corresponding metallurgical vessel |
| CN102253029A (en) * | 2011-06-24 | 2011-11-23 | 哈尔滨工业大学 | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction |
| CN202854037U (en) * | 2012-09-10 | 2013-04-03 | 北京宝瑞光电科技有限公司 | Integration laser-induced intensified plasma spectrum acquisition system |
| CN105575725A (en) * | 2016-02-22 | 2016-05-11 | 西安交通大学 | Online monitoring device and method of vacuum degree of vacuum arc extinguishing chamber in vacuum switch |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
-
2016
- 2016-10-27 CN CN201610955767.9A patent/CN106290264B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002027301A1 (en) * | 2000-09-28 | 2002-04-04 | Voest-Alpine Industrieanlagenbau Gmbh & Co | Device used for the chemical analysis of material samples and corresponding metallurgical vessel |
| CN102253029A (en) * | 2011-06-24 | 2011-11-23 | 哈尔滨工业大学 | Apparatus and method for measuring electron temperature of plasma in gas based on laser induction |
| CN202854037U (en) * | 2012-09-10 | 2013-04-03 | 北京宝瑞光电科技有限公司 | Integration laser-induced intensified plasma spectrum acquisition system |
| CN105575725A (en) * | 2016-02-22 | 2016-05-11 | 西安交通大学 | Online monitoring device and method of vacuum degree of vacuum arc extinguishing chamber in vacuum switch |
| CN105675587A (en) * | 2016-03-12 | 2016-06-15 | 西安交通大学 | Electric equipment online monitoring method and device based on laser-induced breakdown spectrometry |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107843387A (en) * | 2017-10-30 | 2018-03-27 | 佛山市蓝瑞欧特信息服务有限公司 | The vacuum identifying system of closed container |
| CN112082691A (en) * | 2020-08-24 | 2020-12-15 | 西安交通大学 | Low-pressure measuring method and device based on laser plasma imaging |
| CN114942101A (en) * | 2022-01-28 | 2022-08-26 | 西安交通大学 | Vacuum degree on-line detection system and method of single optical fiber laser induced breakdown spectroscopy |
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