CN106289096A - A kind of convex spherical mirror surface testing system and detection method - Google Patents
A kind of convex spherical mirror surface testing system and detection method Download PDFInfo
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- CN106289096A CN106289096A CN201511017673.9A CN201511017673A CN106289096A CN 106289096 A CN106289096 A CN 106289096A CN 201511017673 A CN201511017673 A CN 201511017673A CN 106289096 A CN106289096 A CN 106289096A
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Abstract
The present invention relates to technical field of optical detection, particularly to convex spherical mirror surface testing system, point-diffraction interference device produces diffraction light, and interferes with the reflection light of tested convex spherical mirror；Diffraction light is reflexed to tested convex spherical mirror by benchmark concave spherical mirror, and by the reflected light back of tested convex spherical mirror to point-diffraction interference device；Benchmark concave spherical mirror guiding mechanism adjusts the position of benchmark concave spherical mirror；Tested convex spherical mirror guiding mechanism adjusts tested convex spherical mirror position；Image processing apparatus calculates according to the face shape error of interference image and benchmark concave mirror, obtains the face shape information of tested convex spherical mirror；Control device and control benchmark concave spherical mirror guiding mechanism adjustment benchmark concave spherical mirror position and the tested convex spherical mirror position of tested convex spherical mirror guiding mechanism adjustment.Present invention additionally comprises convex spherical mirror surface testing method. set-point of the present invention diffraction interferometer, benchmark concave mirror and guiding mechanism, reach the beneficial effect of accurate test convex spherical mirror surface-shaped.
Description
Technical field
The present invention relates to technical field of optical detection, particularly to a kind of convex spherical mirror surface testing system
And detection method.
Background technology
Point-diffraction interferometer is mainly used in the optical wavefront detection of superhigh precision, at optical wavefront tester
The fields such as amount, high-precision optical imaging system development are widely used.Point-diffraction interferometer is high
Optical wavefront measuring accuracy, be the important means of optical manufacturing and accuracy evaluation, only have in the world
The company of advanced technology has with R&D institution.
As it is shown in figure 1, point-diffraction interferometer concave spherical surface mirror surface-shaped method of testing: by LASER Light Source 1
The laser gone out, after pin hole illuminating spotlight mirror 2 converges, focusing illumination is on the pin hole of pinhole plate 3.
It is divided into two parts through the outgoing light wave of pin hole diffraction；It is partly into interference image imaging lens group 4；Separately
A part is irradiated on reflecting mirror 7.Make to be reflected by tested position accurate adjusting mechanism 8 of showing on trial
The light that irradiates of mirror 7 returns and focuses near the pin hole of pinhole plate 3, and is reflected into doing through pinhole plate
Relating to image imaging lens group 4, produce interferogram with front portion diffraction light wave interference, imaged mirror group 4 becomes
As to interference image receptor 5, image acquisition obtaining tested with System control computer 6 computational analysis
Examination concave spherical mirror face shape error information.
Owing to the test job principle of point-diffraction interferometer is to obtain the most recessed based on tiny dots diffraction by aperture
Spherical wave, as interferometry benchmark, therefore can be directly used for the test of the superhigh precision to concave spherical surface wavefront.
And at present superhigh precision to convex spherical wavefront is tested and cannot be directly obtained interference testing benchmark.Therefore,
The method and apparatus needing a kind of point-diffraction interferometer test convex spherical mirror surface-shaped badly.
Summary of the invention
It is contemplated that overcome the skill that convex spherical mirror surface-shaped cannot be detected by existing point-diffraction interferometer
Art defect, it is provided that the device of a kind of convex spherical mirror surface testing, including point-diffraction interference device, benchmark
Concave spherical mirror, benchmark concave spherical mirror guiding mechanism, tested convex spherical mirror guiding mechanism, control device and
Image processing apparatus；
Described point-diffraction interference device, be used for producing diffraction light, and by described diffraction light with receive
The interference of light, produces interference image；
Described benchmark concave spherical mirror, for reflexing to the diffraction light that described point-diffraction interference device produces
Tested convex spherical mirror, forms the first reflection light, and by the reflected light back of tested convex spherical mirror to described
Point-diffraction interference device, forms the second reflection light；
Described benchmark concave spherical mirror guiding mechanism, for adjusting the position of benchmark concave spherical mirror；
Described tested convex spherical mirror guiding mechanism, is used for adjusting described tested convex spherical mirror position；
Described image processing apparatus, for receiving the interference image of described point-diffraction interference device, and root
Calculate according to the face shape error data of described interference image and described benchmark concave mirror, thus obtain institute
State the face shape information of tested convex spherical mirror；
Described control device, is used for controlling the described benchmark concave spherical mirror guiding mechanism described benchmark of adjustment recessed
Coquille position, and control the described tested convex spherical mirror position of tested convex spherical mirror guiding mechanism adjustment.
As preferably, described benchmark concave mirror is reflecting mirror.
As preferably, described point-diffraction interference device include light source, pin hole illuminating spotlight mirror, pinhole plate,
Interference image imaging group；Beam projecting direction along described light source sets gradually described pin hole illuminating spotlight
Mirror, described pinhole plate, described interference image imaging group；The light of described light source outgoing shines through described pin hole
After bright condenser lens converges, being irradiated on described pinhole plate produce diffraction light, described diffraction light includes first
Diffraction light and the second diffraction light, described first diffraction light is irradiated to described interference image imaging group；Described
Second diffraction light and described second reflection light are irradiated on described benchmark concave spherical mirror.
As preferably, described benchmark concave spherical mirror guiding mechanism includes angle-adjusting mechanism and position adjustment
Mechanism；Described position adjusting mechanism, for adjusting described benchmark concave mirror along the direction being perpendicular to optical axis
Mobile；Described angle-adjusting mechanism, for adjusting the deviation angle of described benchmark concave mirror, thus adjusts
The angle of reflection of whole described first reflection light.
As preferably, described tested convex spherical mirror guiding mechanism is additionally operable to support described tested convex spherical mirror.
As preferably, the face shape information of described benchmark concave mirror is detected by described point-diffraction interference device
Obtain described face shape error data.
Correspondingly, present invention additionally comprises the detection method of a kind of convex spherical mirror surface-shaped, including following step
Rapid:
S1, point-diffraction interference device produce diffraction light, including the first diffraction light and the second diffraction light, and
Described second diffraction light is exposed on benchmark concave mirror；
S2, benchmark concave mirror guiding mechanism adjust described benchmark concave mirror position, and tested convex spherical mirror is adjusted
Complete machine structure regulates described tested convex spherical mirror and moves along the direction being perpendicular to its optical axis, makes described benchmark recessed
Face mirror reflects in described second diffraction light extremely described tested convex spherical mirror, forms the first reflection light；
S3, described first reflection light, through tested convex spherical mirror and described benchmark concave mirror, reflex to described
On point-diffraction interference device, form the second reflection light；
Described second reflection light is done by S4, described point-diffraction interference device with described first diffraction light
Relate to, form interference image；
S5, image processing apparatus receive described interferogram, and according to described interference image and described benchmark
The face shape error data of concave mirror carry out data process, thus obtain the face shape of described tested convex spherical mirror
Error information.
As preferably, before performing described step S1, also include using point-diffraction interference device to base
Quasi-concave mirror carries out surface testing, obtains the face shape error data of described benchmark concave mirror.
As preferably, described point-diffraction interference device include light source, pin hole illuminating spotlight mirror, pinhole plate,
Interference image imaging lens group, described light source and described pin hole illuminating spotlight mirror the converged light sent focuses on
It is radiated on the pin hole of pinhole plate, forms diffraction light.
As preferably, benchmark concave mirror guiding mechanism includes angle-adjusting mechanism and position adjusting mechanism,
Angle-adjusting mechanism and position adjusting mechanism adjust described benchmark concave mirror position so that through described benchmark
The tested convex spherical mirror of optical registration of the reflection of concave mirror, forms the first reflection light, and makes described first anti-
Penetrate light again through tested convex spherical mirror and benchmark concave mirror, form described second reflection light, return
Focus on described pinhole plate, be reflected into described interference image imaging lens group through pinhole plate.
The beneficial effects of the present invention is: the present invention passes through set-point diffraction interferometer, benchmark concave mirror
And guiding mechanism, reach the beneficial effect of accurate test convex spherical mirror surface-shaped.
Accompanying drawing explanation
Fig. 1 is that point-diffraction interferometer concave spherical surface mirror shape tests structure chart；
Fig. 2 is the structure chart of point-diffraction interferometer convex spherical mirror detecting system one specific embodiment of the present invention；
Fig. 3 is point-diffraction interferometer convex spherical mirror surface testing method flow chart of the present invention.
Icon illustrates:
1, LASER Light Source 2, pin hole illuminating spotlight mirror
3, pinhole plate 4, interference image imaging lens group
5, interference image receptor 6, control device
7, tested concave mirror 8, tested concave mirror guiding mechanism
9, angle-adjusting mechanism 10, position adjusting mechanism
11, benchmark concave mirror 12, tested convex spherical mirror
13, tested convex spherical mirror supports debugging mechanism
Detailed description of the invention
In order to make the purpose of the present invention, technical scheme and advantage clearer, below in conjunction with accompanying drawing
And specific embodiment, the present invention is further elaborated.Should be appreciated that described herein
Specific embodiment is only in order to explain the present invention, and is not construed as limiting the invention.
The technical problem to be solved is that how to realize a kind of simple in construction, accuracy of detection high
The detection device and method of convex spherical mirror surface-shaped.
In the detection device of the convex spherical mirror surface-shaped of the present invention, detect concave spherical mirror at point-diffraction interferometer
Improve on the basis of the shape of face, using concave spherical mirror as reference mirror, adjust recessed ball by guiding mechanism
Face mirror, the position of convex spherical mirror so that a part of diffraction light wave reflexes to convex spherical through concave spherical mirror
Mirror, then through convex spherical mirror and the reflection of concave spherical mirror, finally enter the interference image of point-diffraction interferometer
Imaging lens group, is imaged onto interference image receptor, thus realizes the detection of convex spherical mirror surface-shaped.
Refer to Fig. 1, for the structure chart of point-diffraction interferometer detection concave spherical surface mirror surface-shaped in prior art.
Specifically include: LASER Light Source 1, pin hole illuminating spotlight mirror 2, pinhole plate 3, interference image imaging lens group
4, interference image receptor 5, image acquisition and System control computer 6, tested concave mirror 7 and quilt
Survey concave mirror guiding mechanism 8.LASER Light Source 1 set gradually in its light path pin hole illuminating spotlight mirror 2 and
Pinhole plate 3, is symmetrical arranged two parts device in the light path of pinhole plate, and a part is interference image imaging
Mirror group 4, interference image receptor 5, another part is tested concave spherical mirror 7, tested concave spherical mirror 7
Bottom be provided with tested concave spherical mirror guiding mechanism, for adjusting the position of tested concave spherical mirror 7.
Specifically, LASER Light Source 1 laser sent, after pin hole illuminating spotlight mirror 2 converges, poly-
Jiao is radiated on the pin hole of pinhole plate 3 generation pin hole diffraction outgoing light wave.Pin hole diffraction outgoing light wave quilt
It is divided into two parts: being partly into interference image imaging lens group 4, another part is irradiated to tested concave spherical surface
On mirror 7.By tested position accurate adjusting mechanism 8 of showing on trial, the irradiation light being reflected mirror 7 is returned
And focus near the pin hole of pinhole plate 3, and it is reflected into interference image imaging lens group 4 through pinhole plate,
Producing interferogram with front portion diffraction light wave interference, imaged mirror group 4 is imaged onto interference image and receives
Device 5, image acquisition obtains tested concave spherical mirror face shape error with System control computer 6 computational analysis
Information.
Detect mirror shape based on point-diffraction interference device, improve further, define point of the present invention and spread out
Rhizoma Belamcandae interferometer convex spherical mirror detecting system.Including point-diffraction interference device, benchmark concave spherical mirror, benchmark
Concave spherical mirror guiding mechanism, tested convex spherical mirror guiding mechanism, control device and image processing apparatus.
Point-diffraction interference device, is used for producing diffraction light, and is done with the light received by described diffraction light
Relate to, produce interference image；
Benchmark concave spherical mirror, for reflexing to tested by the diffraction light that described point-diffraction interference device produces
Convex spherical mirror, and by the reflected light back of tested convex spherical mirror to described point-diffraction interference device；
Benchmark concave spherical mirror guiding mechanism, for adjusting the position of benchmark concave spherical mirror；
Tested convex spherical mirror guiding mechanism, for adjusting the position of described tested convex spherical mirror；
Control device, be used for controlling described benchmark concave spherical mirror guiding mechanism and tested convex spherical mirror adjusts
The change in location of mechanism；
Image processing apparatus, for receiving the interference image of described point-diffraction interference device, and to described
Interference image calculates, thus obtains the face shape information of described tested convex spherical mirror.
Specifically, point-diffraction interference device produces diffraction light, and a diffraction light part is directly entered a diffraction
In the interferoscope group of interferometer (the referred to as first diffraction light), Part II is irradiated on benchmark concave mirror,
Diffraction light is reflexed in tested convex spherical mirror by benchmark concave mirror, and diffraction light is at tested convex spherical mirror minute surface
Upper reflecting, and be reflected back on benchmark concave mirror on its former road, benchmark concave mirror receives tested
The diffraction light that convex spherical mirror reflects back, and reflexed to, on point-diffraction interference device, reflect
Light and the first diffraction light interfere on point-diffraction interference device, and form interferogram, at image
Reason device receives interferogram, and carries out according to described interferogram and described benchmark concave spherical mirror face shape error
Data process, thus obtain the face shape error test data of tested convex spherical mirror.The face of benchmark concave mirror
Shape error is it is known that or carry out detection according to the mode described in Fig. 1 by point-diffraction interferometer and obtain
Arrive.
Refer to Fig. 2, for convex spherical mirror detecting system one specific embodiment of the present invention.Including LASER Light Source
1, pin hole illuminating spotlight mirror 2, pinhole plate 3, interference image imaging lens group 4, interference image receptor 5,
Image acquisition and System control computer 6, benchmark concave mirror angle-adjusting mechanism 9, position adjusting mechanism
10, benchmark concave mirror 11, tested convex spherical mirror 12, tested convex spherical mirror support debugging mechanism 13.Base
Quasi-concave mirror 11 is reflecting mirror.
LASER Light Source 1, pin hole illuminating spotlight mirror 2, pinhole plate 3, interference image imaging lens group 4 are constituted
Point-diffraction interference device.Interference image receptor 5, image acquisition and System control computer 6 pie graph
As processing means and control device.Position adjusting mechanism 10 and benchmark concave mirror angle-adjusting mechanism 9 structure
Becoming benchmark concave mirror guiding mechanism, be provided with position adjusting mechanism 10 bottom benchmark concave mirror, position is adjusted
The bottom of complete machine structure 10 is provided with benchmark concave mirror angle-adjusting mechanism 9.Preferably, angle adjustment machine
Structure 9 is triangle body structure, for adjusting the angle of benchmark concave mirror 11, so that through benchmark concave mirror
The tested convex spherical mirror of optical registration of reflection, form the first reflection light, and make described first reflection light again
Secondary through tested convex spherical mirror with benchmark concave mirror, form described second reflection light, return focuses on
On described pinhole plate, it is reflected into described interference image imaging lens group through pinhole plate.
It is tested convex spherical mirror guiding mechanism that tested convex spherical mirror supports debugging mechanism 13.Tested convex spherical
Mirror supports debugging mechanism 13 1 aspect and is used for regulating convex spherical mirror and is perpendicular to irradiation direction of principal axis and moves, another
Aspect is used for supporting described convex spherical mirror.
Specifically, point-diffraction interferometer convex spherical mirror surface-shaped method of testing: by LASER Light Source 1 and pin hole
The converged light focusing illumination that illuminating spotlight mirror 2 sends is on the pin hole of pinhole plate 3.Through pin hole diffraction
Outgoing light wave is divided into two parts, the referred to as first diffraction light and the second diffraction light；First diffraction light enters
Interference image imaging lens group 4；Second diffraction light is irradiated to the benchmark concave mirror 11 of convex spherical mirror detection.
Benchmark concave mirror 11 is regulated, by tested convex by angle-adjusting mechanism 9 and position adjusting mechanism 10
Coquille supports debugging mechanism 13 and regulates tested convex spherical mirror 12 so that through the photograph of benchmark concave mirror 11
Penetrate the tested convex spherical mirror of optical registration 12, form the first reflection light, and again through tested convex spherical mirror 12 He
11 two the reflecting mirror reflections of benchmark concave mirror, form the second reflection light, return and focus on pinhole plate 3
Near pin hole, the second reflection light is reflected into interference image imaging lens group 4 through pinhole plate 3.This entrance is done
The light and the first diffraction light wave interference that relate to image imaging lens group produce interferogram, and through interference image imaging
Mirror group 4 is imaged onto interference image receptor 5.During adjustment, tested convex spherical mirror 12 should unified connect
Receive the incident illumination reflected back by benchmark concave mirror 11, thus obtain unified test information.
Image acquisition tests data with System control computer 6 computational analysis, and combines benchmark concave mirror
The face shape information of 11 carries out face shape correction to detection data, can obtain the test of convex spherical mirror face shape error
Result.The face shape information of benchmark concave mirror 11 can be through obtaining face shape error information by Fig. 1 method.
Based on this, refer to Fig. 3, for point-diffraction interferometer convex spherical mirror surface testing method stream of the present invention
Cheng Tu.It is accomplished by the detection to convex spherical mirror surface-shaped:
Performing step S1, point-diffraction interference device produces diffraction light, spreads out including the first diffraction light and second
Penetrate light, and the first diffraction light is exposed on described benchmark concave mirror.
Preferably, point-diffraction interference device include LASER Light Source, pin hole illuminating spotlight mirror, pinhole plate,
Interference image imaging lens group.The converged light focusing illumination sent by LASER Light Source and pin hole illuminating spotlight mirror
On the pin hole of pinhole plate.It is divided into two parts through the outgoing light wave of pin hole diffraction；It is partly into dry
Relate to image imaging lens group (the referred to as first diffraction light)；Another part is irradiated to the base of convex spherical mirror detection
Quasi-concave mirror (the referred to as second diffraction light).
Performing step S2, described benchmark concave mirror guiding mechanism adjusts described benchmark concave mirror position, quilt
Survey the convex spherical mirror guiding mechanism described tested convex spherical mirror of regulation to move along the direction being perpendicular to its optical axis,
Make the first diffraction light described in benchmark concave mirror to described tested convex spherical mirror, form the first reflection
Light.Preferably, benchmark concave mirror is reflecting mirror.
Perform step S3, described first reflection light through described tested convex spherical mirror and described benchmark concave mirror,
Reflex on described point-diffraction interference device, form the second reflection light.
Preferably, the irradiation through benchmark concave mirror is made by angle-adjusting mechanism and position adjusting mechanism
The tested convex spherical mirror of optical registration, and again return through tested convex spherical mirror and two reflecting mirrors of benchmark concave mirror
Returning focuses near the pin hole of pinhole plate, is reflected into interference image imaging lens group through pinhole plate.This enters
The light entering interference image imaging lens group produces interferogram with front portion diffraction light wave interference, and through interfering
Image imaging lens group is imaged onto interference image receptor.
Performing step S4, described point-diffraction interference device is by described second reflection light and described second diffraction
Light is interfered, and forms interferogram.
Performing step S5, described image processing apparatus receives described interferogram, and according to described interferogram
And the face shape error of described benchmark concave mirror carries out data process, thus obtain described tested convex spherical mirror
Face shape error data.
Preferably, before performing step S1, also include using point-diffraction interference device to benchmark concave surface
Mirror carries out face after testing.
The present invention is by arranging benchmark concave mirror and guiding mechanism, it is achieved that have convex spherical mirror detection
Benefit effect.
The detailed description of the invention of present invention described above, is not intended that limiting the scope of the present invention.
Any according to other changes accordingly various done by the technology design of the present invention and deformation, all should wrap
Containing within the scope of the invention as claimed.
Claims (10)
1. the detecting system of a convex spherical mirror surface-shaped, it is characterised in that include point-diffraction interference device,
Benchmark concave spherical mirror, benchmark concave spherical mirror guiding mechanism, tested convex spherical mirror guiding mechanism, control dress
Put and image processing apparatus；
Described point-diffraction interference device, be used for producing diffraction light, and by described diffraction light with receive
The interference of light, produces interference image；
Described benchmark concave spherical mirror, for reflexing to the diffraction light that described point-diffraction interference device produces
Tested convex spherical mirror, forms the first reflection light, and by the reflected light back of tested convex spherical mirror to described
Point-diffraction interference device, forms the second reflection light；
Described benchmark concave spherical mirror guiding mechanism, for adjusting the position of benchmark concave spherical mirror；
Described tested convex spherical mirror guiding mechanism, is used for adjusting described tested convex spherical mirror position；
Described image processing apparatus, for receiving the interference image of described point-diffraction interference device, and root
Calculate according to the face shape error data of described interference image and described benchmark concave mirror, thus obtain institute
State the face shape information of tested convex spherical mirror；
Described control device, is used for controlling the described benchmark concave spherical mirror guiding mechanism described benchmark of adjustment recessed
Coquille position, and control the described tested convex spherical mirror position of tested convex spherical mirror guiding mechanism adjustment.
2. the detecting system of convex spherical mirror surface-shaped as claimed in claim 1, it is characterised in that described
Benchmark concave mirror is reflecting mirror.
3. the detecting system of convex spherical mirror surface-shaped as claimed in claim 1, it is characterised in that described
Point-diffraction interference device includes light source, pin hole illuminating spotlight mirror, pinhole plate, interference image imaging group；
Beam projecting direction along described light source sets gradually described pin hole illuminating spotlight mirror, described pin hole
Plate, described interference image imaging group；
The light of described light source outgoing, after described pin hole illuminating spotlight mirror converges, is irradiated to described pinhole plate
Upper generation diffraction light, described diffraction light includes the first diffraction light and the second diffraction light, described first diffraction
Light is irradiated to described interference image imaging group；Described second diffraction light and described second reflection light are irradiated to
On described benchmark concave spherical mirror.
4. the detecting system of convex spherical mirror surface-shaped as claimed in claim 1, it is characterised in that described
Benchmark concave spherical mirror guiding mechanism includes angle-adjusting mechanism and position adjusting mechanism；
Described position adjusting mechanism, moves along the direction being perpendicular to optical axis for adjusting described benchmark concave mirror
Dynamic；
Described angle-adjusting mechanism, for adjusting the deviation angle of described benchmark concave mirror, thus adjusts
The angle of reflection of described first reflection light.
5. the detecting system of convex spherical mirror surface-shaped as claimed in claim 1, it is characterised in that described
Tested convex spherical mirror guiding mechanism is additionally operable to support described tested convex spherical mirror.
6. the detecting system of convex spherical mirror surface-shaped as claimed in claim 1, it is characterised in that described
The face shape information of benchmark concave mirror obtains described face shape error number by the detection of described point-diffraction interference device
According to.
7. the detection method of a convex spherical mirror surface-shaped, it is characterised in that comprise the following steps:
S1, point-diffraction interference device produce diffraction light, including the first diffraction light and the second diffraction light, and
Described second diffraction light is exposed on benchmark concave mirror；
S2, benchmark concave mirror guiding mechanism adjust described benchmark concave mirror position, and tested convex spherical mirror is adjusted
Complete machine structure regulates described tested convex spherical mirror and moves along the direction being perpendicular to its optical axis, makes described benchmark recessed
Face mirror reflects in described second diffraction light extremely described tested convex spherical mirror, forms the first reflection light；
S3, described first reflection light, through tested convex spherical mirror and described benchmark concave mirror, reflex to described
On point-diffraction interference device, form the second reflection light；
Described second reflection light is done by S4, described point-diffraction interference device with described first diffraction light
Relate to, form interference image；
S5, image processing apparatus receive described interferogram, and according to described interference image and described benchmark
The face shape error data of concave mirror carry out data process, thus obtain the face shape of described tested convex spherical mirror
Error information.
8. the detection method of convex spherical mirror surface-shaped as claimed in claim 7, it is characterised in that holding
Before described step S1 of row, also include using point-diffraction interference device that benchmark concave mirror carries out face shape inspection
Survey, obtain the face shape error data of described benchmark concave mirror.
9. the detection method of convex spherical mirror surface-shaped as claimed in claim 7, it is characterised in that described
Point-diffraction interference device includes light source, pin hole illuminating spotlight mirror, pinhole plate, interference image imaging lens group,
The converged light focusing illumination sent by described light source and described pin hole illuminating spotlight mirror is at the pin hole of pinhole plate
On, form diffraction light.
10. the detection method of convex spherical mirror surface-shaped as claimed in claim 9, it is characterised in that base
Quasi-concave mirror guiding mechanism includes angle-adjusting mechanism and position adjusting mechanism, angle-adjusting mechanism and position
Put guiding mechanism and adjust described benchmark concave mirror position so that through the light of the reflection of described benchmark concave mirror
It is directed at tested convex spherical mirror, forms the first reflection light, and make described first reflection light again through tested convex
Coquille and benchmark concave mirror, form described second reflection light, return and focus on described pinhole plate
On, it is reflected into described interference image imaging lens group through pinhole plate.
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| CN110352317A (en) * | 2017-02-24 | 2019-10-18 | 闪耀光电股份有限公司 | Configurable lamps and lanterns |
| CN107702645A (en) * | 2017-10-10 | 2018-02-16 | 西安交通大学 | A kind of multi-wavelength interference method for detecting phases for being used for point diffraction measuring system |
| CN115638741A (en) * | 2022-10-11 | 2023-01-24 | 淮安艾利光电仪器有限公司 | Aspheric lens surface type detection system |
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