CN106282939A - A kind of mould coating and its preparation method and application - Google Patents

A kind of mould coating and its preparation method and application Download PDF

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CN106282939A
CN106282939A CN201510261422.9A CN201510261422A CN106282939A CN 106282939 A CN106282939 A CN 106282939A CN 201510261422 A CN201510261422 A CN 201510261422A CN 106282939 A CN106282939 A CN 106282939A
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coating
mould
target
mould coating
preparation
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CN106282939B (en
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黄峰
裴旺
李朋
朱萍
葛芳芳
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Ningbo Institute of Material Technology and Engineering of CAS
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Ningbo Institute of Material Technology and Engineering of CAS
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Abstract

The invention discloses a kind of mould coating, component list is shown as (V1-a-bAlaMeb)1-xNx, described Me is Hf, Nb, Zr, Y or Ta;A, b, x are atom ratio, wherein, 0.18≤a≤0.57,0.03≤b≤0.68,0.4≤x≤0.6.The invention provides a kind of VAlMeN mould coating adding metallic element Me, by composition, structure regulating, prepare the mould coating with high rigidity, low-friction coefficient and high tenacity.When this mould coating is used for aluminium alloy processing mold, on the one hand can significantly reduce frictional resistance when die casting mutually moves with mould, improve the die casting degree of engagement with mould, casting accuracy is high;On the other hand, coating has preferable toughness, in repeatedly extrusion process, it is possible to reduce the generation of crackle, improves the surface quality of aluminium alloy castings.

Description

A kind of mould coating and its preparation method and application
Technical field
The invention belongs to field of ceramic coatings, be specifically related to a kind of quaternary nitride mould coating and its preparation method and application.
The measure of precision of background die casting is the key factor affecting die casting precision with surface quality.The importance of mould coating is described as a example by aluminum alloy die casting.The fusion temperature of aluminum is 680 DEG C, owing to temperature during die casting is high, adds pressure when filling type big so that aluminum alloy die-casting die often be full of cracks, cracking, erosion, stick, the form that deforms and lost efficacy, die life is the lowest.
Ti-Al-N coating { Li C, Paulitsch, et al.Thermal stability and oxidation resistance of Ti Al N coatings [J] .Surf.Coat.Technol., 2012,206:2954-2960}, because having higher hardness (about 35GPa), high temperature resistance (500 DEG C~800 DEG C) oxidisability and low heat conductivity.It is commonly used for the protective coating of aluminum alloy die-casting die at present, erosion effect to cavity when can effectively alleviate aluminum liquid high speed filling die cavity, reduces mould be full of cracks, problems of crack that in die casting cyclic process, thermal stress is brought.
As the Chinese patent literature of Publication No. CN103567374A discloses a kind of coating material for aluminum die casting and the method preparing this coating material.This coating material includes the CrN binder course being formed on the surface of base material, be arranged in CrN binder course the TiAlN/CrN nanometer multilayer on surface and TiAlN/CrSi (C) the N nanometer multilayer being arranged on the surface of TiAlN/CrN nanometer multilayer.Preparation method includes: inputs nitrogen in response to the gas access through chamber and forms nitrogen atmosphere, uses Cr target, be deposited on the surface of base material by CrN binder course;Use TiAl target and Cr target, TiAlN/CrN nanometer multilayer is deposited on the surface of deposited CrN binder course;Re-use TiAl target and TiAlN/CrSiN nanometer multilayer is deposited on the surface of TiAlN/CrN nanometer multilayer by CrSi target.
Although such coating material has thermostability and the high-temperature stability of excellence, but because of its coefficient of friction higher coefficient of friction > 0.5}, pressure when in addition filling type is big, frictional resistance when aluminum alloy die casting is mutually moved with mould is big, and then affecting the degree of engagement of die casting and mould, the die casting precision of preparation is low.Secondly, the hardness of Ti Al N coating is high, and toughness is low, and in aluminium alloy extruded forming process, unavoidable coating can be poor due to deformability, and crackle occurs.The appearance of these crackles, can affect the surface quality of aluminum alloy die casting, especially Surface Quality and require that high deep-cavity thin-wall die casting impact is the most prominent.
Therefore, inventing a kind of novel die coating solving the problems referred to above is one of current direction studied.
Summary of the invention
The invention provides a kind of VAlMeN mould coating adding metallic element Me, by composition, structure regulating, prepare the mould coating with high rigidity, low-friction coefficient and high tenacity.When this mould coating is used for aluminium alloy processing mold, on the one hand can significantly reduce frictional resistance when die casting mutually moves with mould, improve the die casting degree of engagement with mould, casting accuracy is high;On the other hand, coating has preferable toughness, in repeatedly extrusion process, it is possible to reduce the generation of crackle, improves the surface quality of aluminium alloy castings.
A kind of mould coating, component list is shown as (V1-a-bAla Meb)1-xNx, described Me is Hf (hafnium), Nb (niobium), Zr (zirconium), Y (yttrium) or Ta (tantalum);
A, b, x are atom ratio, wherein, 0.18≤a≤0.57,0.03≤b≤0.68,0.4≤x≤0.6.
These elements such as Hf, Nb, Zr, Y, Ta, atomic radius is bigger, and react the nitride formed (such as TaN in view of these elements and nitrogen, ZrN etc.) lattice paprmeter more than c-AlN, when part Ta substitutes Al, AlN distortion of lattice can be caused, thus add the potential barrier that c-AlN changes to buergerite AlN, after making the annealing of V-Al-Me-N mould coating high-temp, still keep higher hardness.
As preferably, in described mould coating, 0.2≤a≤0.35,0.5≤b≤0.65,0.45≤x≤0.55.
As preferably, described Me is Ta, Hf or Zr;More preferably Ta or Zr.
Most preferably, described mould coating, Me is Ta, a=0.24, b=0.57, x=0.48;Me is Zr, a=0.25, b=0.57, x=0.49.
From growth structure, i.e. observing from Cross Section Morphology, described mould coating structure is fine and close.As preferably, described mould coating is columnar crystal structure, column crystal die width is 70~100nm, mean diameter is 80~100nm, and the length of each column crystal is more than 400nm,, there is not the micro chink width of micro chink or existence between adjacent two column crystals 2~3nm in draw ratio >=5 of column crystal.
X-ray diffraction method is utilized to test in the range of the angle of diffraction 2 θ=35 °~45 °, as preferably, described mould coating is NaCl type crystal structure, V-Al-Me-N exists in the way of solid solution, at the angle of diffraction 2 θ=41.6 °~42.8 °, (200) diffraction maximum occurs, and/or at the angle of diffraction 2 θ=36.8 °~37.8 °, (111) diffraction maximum occurs.Further preferably, when the angle of diffraction 2 θ=35 °~45 °, described mould coating only occurs in that (200) diffraction maximum, and diffraction maximum occurs that position is 2 θ=42.4 °.
The present invention prepares the architectural feature of coating and determines it and remain to keep higher hardness and low coefficient of friction when high temperature extrusion aluminium alloy castings as mould coating, and the anti-crack effect of coating is preferable when repeating extruding.By adding element Hf, Nb, Zr, Y, Ta of relatively large radius on the basis of VAlN coating, as a example by Ta element, after VAlN coating high-temp (700 DEG C) annealing without Ta, hardness only has 14~20GPa.By adding after Ta, the higher TaN of Composite hardness (~32GPa) during high temperature, can be formed, and the raising of integral hardness when causing VAlTaN coating high-temp.Secondly, containing appropriate Ta in coating, under higher sputtering power, V that the Ta atomic ratio sputtered sputters, Al, atom N energy exceed about 20eV, the dynamics that film surface is bombarded when adding film forming together with the Ar atom of bounce-back by the Ta atom of these a small amount of high energy, the mobility of surface atom, diffusion are increased, the beneficially densification of coating.Experiment finds, coating densification, its mechanical behavior under high temperature (such as coating hardness, fretting wear etc.) has significantly to be improved.Secondly, after adding metal Ta, the toughness of coating is improved.Coating is made also to be able to while possessing certain degree of hardness, in the generation of crackle that repeats to draw up in extrusion process, improve the surface quality of extruding aluminium alloy foundry goods.
Present invention also offers the preparation method of described mould coating, the preparation method that can use includes magnetron sputtering method, vacuum evaporation, ion beam assisted depositing etc.;
As preferably, the present invention have employed magnetron sputtering method, by the way of using radio frequency and DC source jointly to act on Me target, which makes the Me atom of sputtering have higher energy (energy is about 100eV, exceeds 20eV than sputter gas Ar atom).The Me atom of these high energy, is on the one hand prone to react formation Me nitride with nitrogen, and solid solution mutual with VAlN forms the solid solution with NaCl type crystal structure the most again.On the other hand, the dynamics that film surface is bombarded when adding film forming together with the Ar atom of bounce-back by the Me atom of high energy so that the mobility of surface atom, diffusion increase, the beneficially densification of coating.Thus for preparing high-temperature oxidation resistance, low-friction coefficient, the specific structure of toughness preferable VAlMeN mould coating institute provides the foundation;And the method is easy and simple to handle, production cost is low, it is simple to industrialization large-scale production.
Specifically comprise the following steps that
(1) target and substrate are installed;
Described target is Me target and VAl alloys target;
(2) coating deposition: in vacuum chamber, Me target is connected with the DC source of RF-assisted, VAl alloys target is connected with DC source, in the presence of working gas nitrogen and argon, deposited at least one first type surface added on hot substrate by reactive magnetron sputtering method, obtain described wear-resistant coating;
Rf frequency >=60MHz, Me target power density is 3.2~5.1W/cm2;Vananum target power supply power density is 1.5~3.1W/cm2
The present invention uses VAl alloys target and Me target to be target, and two targets are common and N2Reactive sputtering and form mould coating.
As preferably, in step (1), described baseplate material is selected from: hard alloy, pottery, owing to substrate material is the least to the Effect on Mechanical Properties of VAlMeN coating, as long as therefore this substrate can be suitable as the substrate of this VAlMeN coating with the adhesion of this coating more than 20N.
Described substrate cleans through Chemical cleaning and/or plasma glow;
Described Chemical cleaning is: it is 30%~60% abstergent solution, saturated Na that substrate or die workpiece are sequentially placed into concentration2CO3Each ultrasonic cleaning 10~20min in solution, acetone, dehydrated alcohol, deionized water, then forced air drying 1~2h in the drying baker that temperature is 80 DEG C~100 DEG C, or use purity be the high-purity N of 99.99%2Dry up.
Described plasma glow cleans: put into by the substrate after Chemical cleaning in vacuum chamber in rotatable frame, the plasma utilizing argon to produce etches 10~20min to substrate so that hydrone, gas molecule or the dust particale of substrate surface attachment is fallen by bombardment completely.
As preferably, in step (2), in vacuum chamber, in advance back end vacuum is evacuated to less than 4.5 × 10-5Pa;Substrate heating-up temperature is 300~550 DEG C.
As preferably, in step (2), the flow-rate ratio of nitrogen and argon is 1/5~1/2, and keeping deposition pressure is 0.2~1Pa;Further preferably, deposition pressure is 0.2~0.8Pa.
As preferably, in step (2), in deposition process, substrate can not biasing, direct unsettled setting, it is possible to apply the back bias voltage of-20V~-30V on substrate.
As preferably, in step (2), the sedimentation rate of coating is 7~25nm/min, more preferably 15~20nm/min.
The invention also discloses a kind of aluminium alloy processing mold, its major face has this mould coating, and coating layer thickness is 2~10 μm, and Coating Surface Roughness Ra is 2.6~7.7nm;The surface of this degree of roughness is beneficial to this coating and has relatively low coefficient of friction when high temperature.
As preferably, described V-Al-Ta-N mould conductivity at 600~3000 μ Ω .cm, more preferably 1000~1800 μ Ω .cm.
Compared with prior art, present invention have the advantage that
(1) present invention develops a kind of VAlMeN mould coating, and this coating hardness after 700 DEG C of ambient anneal is 30GPa, the Al to diameter 6mm2O3Under the active force of mill ball 2N, the wear rate of coating is~10-15m3/ N m the order of magnitude, coefficient of friction is 0.3~0.5, can significantly reduce frictional resistance when aluminium alloy extrudes with mould.
(2) the mould coating that prepared by the present invention, moulding index is 0.52, can reduce the generation of coating crack, improve the surface quality of aluminium alloy castings in repeating extrusion process.
Accompanying drawing explanation
Fig. 1 is the Cross Section Morphology photo of the VAlTaN coating of embodiment 3 preparation, wherein (a), b () is SEM photograph, c () is TEM photo, d () is TEM high-resolution photo, the yardstick observing pattern from (a)~(d) reduces successively;
Fig. 2 is the surface A FM pattern photo of the VAlTaN coating of embodiment 3 preparation;
Fig. 3 is the XRD figure spectrum of the VAlTaN coating that embodiment 1,3,6 is prepared respectively, (a) embodiment 1, (b) embodiment 3, (c) embodiment 6;
Fig. 4 is the coefficient of friction figure of the VAlTaN coating that embodiment 1,3,6 is prepared respectively, (a) embodiment 1, (b) embodiment 3, (c) embodiment 6;
Fig. 5 is the frictional wear experiment figure of the VAlTaN coating of embodiment 3 preparation;
Fig. 6 is the vickers indentation figure of the V-Al-Ta-N coating that embodiment 1,2,3 and 6 is prepared respectively, (a) embodiment 1, (b) embodiment 2, (c) embodiment 6, (d) embodiment 3.
Detailed description of the invention
Below in conjunction with Figure of description and embodiment, the invention will be further described:
Embodiment 1~6
Select VAl alloys target and metal Ta target be target source by with N2Reaction double target co-sputtering forms VAlTaN coating on WC-Co substrate.
Implement 7~10
Select VAl alloys target and metal Zr target be target source by with N2Reaction double target co-sputtering forms VAlZrN coating on WC-Co substrate.
It is below concrete steps:
(1) installing target, substrate is installed after first passing through Chemical cleaning and plasma glow cleaning in advance again.
(2) using magnetic control sputtering system deposition VAlTaN or VAlZrN coating, be connected with DC source by VAl target, Ta target or Zr target are connected with the DC source of RF-assisted.When back end vacuum is less than 4.5 × 10-5After Pa, it is passed through N2With Ar gas to regulate both flow-rate ratio be 1/3, holding deposition pressure is 0.5Pa, the deposition parameter as shown in table 1, carries out deposition and obtains VAlTaN or VAlZrN coating.
In embodiment 1~10, magnetron sputtering deposition parameter refers to table 1.
Table 1
After deposition terminates, take out sample, use following method of testing to the architectural feature of mould coating assessed embodiment and prepare and mechanical property.
Coating structure and mechanical property characterize:
The mark in detail that the VAlTaN coating prepared has carried out composition, pattern and mechanical property below is levied, and the ValZrN of preparation has only been carried out the sign of mechanical property.
Composition measurement:
The VAlTaN coating of preparation all uses the EDAX energy disperse spectroscopy supporting with Hitachi S4800 field emission scanning electron microscope to carry out composition measurement, its configuration EDAX Si (Li) probe, is calibrated by ZAF, and each sample selectes an area not less than 40mm2Region, measures the meansigma methods of its composition.
Morphology observation:
Use Hitachi S4800 type field emission scanning electron microscope (ejecting gun voltage 4kV) that the surface of VAlTaN coating, the section of preparation are characterized, utilize FEI QUANTA 250FEG type field emission scanning electron microscope that the pattern after its fretting wear is characterized.
Use FEI Tecnai F20 type transmission electron microscope that sample segment has carried out the observation of light field high-resolution pattern, accelerating potential 200kV.
Use contact mode, utilize CETR AIST-NT type atomic force microscope that VAlTaN coating surface profile is characterized.
The coating cross sections pattern of embodiment 3 preparation is as shown in Figure 1, can be seen that coating is column crystal growth structure { shown in Fig. 1 (a) } from SEM, amplify its shape appearance figure and can be seen that { shown in Fig. 1 (b) }, on SEM yardstick, between adjacent two column crystals, there is not micro chink.Observing under TEM bright field image, column crystal width is about 70~100nm, and the length of each column crystal, more than 400nm, does not exist slight gap { shown in Fig. 1 (c) } between adjacent column crystalline substance, coating is fine and close.Further by TEM High Resolution Observations coating { shown in Fig. 1 (d) }, can significantly see lattice fringe, grain boundaries is the most defective.
The coating surface AFM pattern photo of this embodiment 3 preparation is as shown in Figure 2, it can be seen that its grain size is shown in 70~100nm{ Fig. 2 (a) }, surface roughness Ra is 2.6nm~7.7nm, coating surface smoother { shown in Fig. 2 (b) }.
Crystal Structure:
Use the D8Advance type polycrystal X ray diffractometer using Brooker company of Germany to produce that VAlTaN coating carries out the sign of crystal structure, use Cu-K alpha ray, sweep limits 30 °-50 °, step-length 0.02 °.
Coating mechanical property characterizes:
The NANO G200 type nano-hardness tester using MTS company measures the hardness of VAlTaN or VAlZrN coating, moulding and elastic deformation, wherein pressure head is Berkovich, and compression distance is the 10% of coating layer thickness, employing compression distance is certain, and the mode of varying load obtains load-displacement curves.Obtain plasticity and elastic deformation according to load-displacement curves, utilize formula (1) computational plasticity index:
δ H = ϵ p ϵ = 1 - ϵ e ϵ - - - ( 1 )
Wherein δHFor plasticity index, εpFor plastic deformation, εeFor elastic deformation, ε=εpe.Accompanying drawing 6 is embodiment 1, embodiment 2, embodiment 6, the Vickers indentation of the coating of embodiment 3 preparation main part pattern in the secure execution mode (sem.Can be seen that " returning " font crackle occurs in the impression of embodiment 1 and embodiment 2, annular crack extend to outside impression, and present radial crackle, coating poor toughness in the oriented external radiation in impression corner, can be seen that its moulding index proportion by subtraction is 0.28 and 0.35 in conjunction with table 2.The toughness of embodiment 6 relatively embodiment 1 and 2 makes moderate progress, but impression corner is still with the presence of radial crackle, and moulding index is 0.45.The coating toughness of embodiment 3 preparation is preferable, and impression underbead crack quantity is the most less, and corner radial crack is more tiny, and crack length is the most shorter, and moulding index is 0.52.
The friction and wear behavior test of VAlTaN or VAlZrN coating is carried out on CETR UMT-3 type multifunction friction wear testing machine.Antithesis ball is the Al of diameter 6mm2O3Ball, load is 2N, and friction velocity is 5cm/s.
The structure composition of the mould coating that embodiment 1~10 is prepared respectively and Mechanical Characteristics are as shown in table 2.
Table 2
From the results shown in Table 2, the VAlTaN coating of embodiment 3 preparation still has high hardness 30GPa after high temperature 700 DEG C is annealed, and during as mould coating, coefficient of friction is 0.3, compare the most conventional TiAlN mould coating frictional resistance and reduce 2~3 times, wear rate as little as 1.6 × 10-15m3/ N.m, the toughness of coating the most relatively TiAlN improve 2.5 times.In like manner, VAlZrN coating also shows preferable mechanical property.Such as embodiment 9, after 700 DEG C of annealing, coating hardness is 28GPa, and coefficient of friction is 0.3, and plasticity index is 0.46, wear rate as little as 4.6 × 10-15m3/N.m。
Fig. 3 is embodiment 1, embodiment 3, the XRD spectra of the VAlTaN coating that embodiment 6 prepares respectively.In conjunction with table 2 test mechanical property it can be seen that when the coating of preparation main along the growth of (111) high preferred orientation time, coating hardness relatively low (H≤20GPa).When the main edge of coating (200) high preferred orientation of preparation grows, coating hardness higher (H=25~30GPa).Relation between same architectural feature and performance, yet suffers from VAlZrN coating.
Fig. 5 Yu Fig. 6 is the frictional wear experiment result that VAlTaN coating is carried out after 700 DEG C of annealing.The coating coefficient of friction of embodiment 3 preparation is relatively low as can be seen from Figure 5 is 0.3, when coating Ta too high levels or too low, and coefficient of friction the highest (embodiment 6 and embodiment 1).Observing from the coating polishing scratch of embodiment 3 preparation further, find its polishing scratch smoother, mill road narrower { Fig. 6 (a) and 6 (b) }, coating is more wear-resisting, wear rate low { Fig. 6 (c) }.The fretting wear that VAlZrN coating is carried out after 700 DEG C of annealing also has similar result, is specifically shown in Table 2.
The all documents mentioned in the present invention are incorporated as reference the most in this application, are individually recited as with reference to like that just as each document.In addition, it is to be understood that after the foregoing having read description of the invention, the present invention can be made various changes or modifications by those skilled in the art, the technical scheme of these equivalents falls within the application appended claims limited range equally.

Claims (9)

1. a mould coating, it is characterised in that component list is shown as (V1-a-bAlaMeb)1-xNx, Described Me is Hf, Nb, Zr, Y or Ta;
A, b, x are atom ratio, wherein, 0.18≤a≤0.57,0.03≤b≤0.68,0.4≤x≤ 0.6。
Mould coating the most according to claim 1, it is characterised in that 0.2≤a≤0.35,0.5 ≤ b≤0.65,0.45≤x≤0.55.
Mould coating the most according to claim 1, it is characterised in that described mould coating In columnar crystal structure, column crystal die width is 70~100nm, and mean diameter is 80~100nm, And the length of each column crystal is more than 400nm, draw ratio >=5 of column crystal, adjacent two column crystals it Between there is not the micro chink width of micro chink or existence 2~3nm, coating structure is fine and close.
4. according to the mould coating described in claim 1 or 3, it is characterised in that described mould Coating is NaCl type crystal structure, and V-Al-Me-N exists in the way of solid solution, the angle of diffraction 2 θ= At 41.6 °~42.8 °, (200) diffraction maximum occurs, and/or at the angle of diffraction 2 θ=36.8 °~37.8 °, (111) diffraction maximum occurs.
Mould coating the most according to claim 4, it is characterised in that in the angle of diffraction 2 θ=35 °~ When 45 °, described mould coating only occurs in that (200) diffraction maximum.
6. the preparation method of a mould coating according to claim 1, it is characterised in that Step is as follows:
(1) target and substrate are installed;
Described target is Me target and VAl alloys target;
(2) coating deposition: in vacuum chamber, Me target is connected with the DC source of RF-assisted, VAl Alloys target is connected with DC source, in the presence of working gas nitrogen and argon, by reaction Magnetron sputtering method deposits at least one first type surface added on hot substrate, obtains described mould and is coated with Layer;
Rf frequency >=60MHz, Me target power density is 3.2~5.1W/cm2;Vananum target electricity Source power density is 1.5~3.1W/cm2
The preparation method of mould coating the most according to claim 6, it is characterised in that step (2), in, in vacuum chamber, back end vacuum is less than 4.5 × 10-5Pa;Substrate heating-up temperature is 300~550 DEG C.
The preparation method of mould coating the most according to claim 6, it is characterised in that step (2) in, the flow-rate ratio of nitrogen and argon is 1/5~1/2, and keeping deposition pressure is 0.2~1Pa.
9. an aluminium alloy processing mold, its major face any one of with good grounds Claims 1 to 5 Mould coating described in claim, it is characterised in that coating layer thickness is 2~10 μm, coating surface Roughness Ra is 2.6~7.7nm.
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