CN106248350A - The material homogeneity detection method of a kind of optical glass and device - Google Patents
The material homogeneity detection method of a kind of optical glass and device Download PDFInfo
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- CN106248350A CN106248350A CN201510962393.9A CN201510962393A CN106248350A CN 106248350 A CN106248350 A CN 106248350A CN 201510962393 A CN201510962393 A CN 201510962393A CN 106248350 A CN106248350 A CN 106248350A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
Abstract
The present invention proposes the material homogeneity detection method of a kind of optical glass, at least three sub-aperture region will be divided into by microscopy, respectively each sub-aperture region is calculated material homogeneity, recycling sub-aperture stitching algorithm is calculated by the material homogeneity of microscopy, additionally, monitored and correction by the plane mirror monitoring interferometer and side by the lateral attitude of microscopy, therefore the heeling condition of the uniformity test result of different sub-aperture is completely the same, and " inclination " amount introduced in sub-aperture interferes testing result by the out of focus in uniformity and astigmatism can be retained truly, thus avoid, by the unified uniformity of microscopy, discontinuous splicing vestige is occurred.The method that the present invention proposes is during utilizing small-bore phase-shifting interferometer to realize the detection of large-aperture optical glass material uniformity, it is possible not only to realize whole wave aberration absolute sense of material homogeneity, and the detection error that discontinuous splicing vestige causes can be eliminated.
Description
Technical field
The present invention relates to optical interferometry technical field, the material particularly to a kind of optical glass is uniform
Property detection method and device.
Background technology
High-precision optical imaging lens is generally made up of multiple optical lenses, in order to reach preferably to become picture element
Amount, it is desirable to the transmission wavefront of optical lens reaches diffraction limit, and the material homogeneity of optical glass is light
Learn one of main source of camera lens transmission wavefront error.Additionally, use zero compensation mirror method detection aspheric surface
During mirror surface-shaped, in order to obtain High-precision aspheric surface testing as a result, it is desirable to correct each of zero-bit compensating glass
Plant error source, the most just include the impact on compensating glass non-spherical wavefront of the compensating glass glass material uniformity.
In above-mentioned application, the absolute sense technology of optical glass material uniformity is to develop high-precision optical to become
As camera lens and the indispensable important step of zero compensation mirror.
In prior art, generally utilize transmission beam method based on phase-shifting interferometer detection optical glass material uniform
Property, the method can eliminate interferometer by the most different configuration of detection, optical standard has, by microscopy
The systematic error that two face, surface shapes introduce during detection, thus realize optical glass material uniformity
Absolute sense.For the detection of large-aperture optical glass material uniformity, directly utilize aperture interferometer
Solving the problems referred to above cost the highest, prior art even cannot manufacture and meet bore and measuring accuracy requirement
Interferometer and optical standard tool, therefore generally use based on small-bore interferometer zygote aperture splicing technology
Solve the test problems of large-aperture optical glass material uniformity.But, above-mentioned solution cannot be high-precision
Out of focus in degree test material homogeneity and astigmatism, and during owing to being moved by microscopy, lateral attitude is easily sent out
Changing, causes splicing to leave discontinuous splicing vestige in final uniformity testing result,
Thus cause uniformity test error to increase.
Summary of the invention
In view of this, embodiments provide a kind of optical glass material homogeneity detection method and
Device.
It is an object of the present invention to provide the material homogeneity detection method of a kind of optical glass, described side
Method includes:
It is polished optical glass to be detected obtaining parallel flat as by microscopy；
By described three the sub-aperture area, wherein, two adjacent sub-aperture region of being at least divided into by microscopy
Territory has overlapping region；
Obtain the material homogeneity in each sub-aperture region；
Utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing calculate with
Obtain the material homogeneity of described large-aperture optical glass.
Alternatively, described being polished by optical glass to be detected obtains parallel flat as concrete by microscopy
Including: it is polished the upper and lower surface of optical glass to be detected obtaining parallel flat as by microscopy.
Alternatively, the material homogeneity in described acquisition each sub-aperture region specifically includes:
Adjust described any one sub-aperture region made by the position of microscopy in the plurality of sub-aperture region
The interference fringe formed with transmission plane camera lens is zero striped；
Regulation plane of reflection lens location makes described plane of reflection camera lens be formed with described transmission plane camera lens
Interference fringe be zero striped, wherein, described transmission plane camera lens is formed the with described by microscopy front surface
One interference cavity, described is formed the second interference cavity by upper and lower two surfaces of microscopy, described by microscopy rear surface with
Described plane of reflection camera lens forms the 3rd interference cavity；
Described first interference cavity, described second interference cavity and institute is calculated according to wavelength phase shift principle of interference
State the testing result of the 3rd interference cavity；
Obtain described transmission plane camera lens and the 4th interference cavity of described transmission plane camera lens formation, according to ripple
Long phase shift principle of interference calculates the testing result of described 4th interference cavity；
According to described first interference cavity, described second interference cavity, described 3rd interference cavity and the described 4th
The testing result of interference cavity calculates the material homogeneity in described sub-aperture region.
Alternatively, at least it is divided into three sub-aperture area by microscopy specifically includes described:
It is divided into three sub-aperture area, the respectively first sub-aperture region, the second son by microscopy by described
Aperture area and third sub-aperture region；
Alternatively, what described acquisition described transmission plane camera lens and described transmission plane camera lens were formed is the 4th dry
Relate to chamber, calculate the testing result of described 4th interference cavity according to wavelength phase shift principle of interference before, institute
Method of stating also includes:
Taken out described between described transmission plane camera lens and described transmission plane camera lens by microscopy.
Alternatively, described adjustment described by the position of microscopy make in the plurality of sub-aperture region arbitrary
After the interference fringe that individual sub-aperture area and transmission plane camera lens are formed is zero striped, described method is also wrapped
Include:
Obtain by the tilt quantity of microscopy；
Described utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing meter
Calculate and specifically include with the material homogeneity obtaining described large-aperture optical glass:
Described utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing meter
Calculate and described by the tilt quantity of microscopy with obtain described large-aperture optical glass material homogeneity.
It is a further object to provide the material homogeneity detection device of a kind of optical glass, described
Device include for carry out the interferometer of wavelength phase-shifting interference measuring, transmission plane camera lens, be positioned at described
Penetrate below plane camera lens by microscopy, for adjusting described transmission plane lens location so that with described quilt
Interference fringe is zero striped five dimensions that microscopy is formed adjust platforms, are positioned at and described are put down by the reflection below microscopy
Face camera lens, for adjust described plane of reflection lens location so that with the described interference bar formed by microscopy
Stricture of vagina is that the three-dimensional of zero striped adjusts platform；
Described is that optical glass to be detected is polished obtaining parallel flat by microscopy；
Described at least it is divided into three sub-aperture area, two the most adjacent sub-aperture region by microscopy surface
Territory；
Described interferometer carries out material homogeneity to each sub-aperture region divided respectively and is examined
Survey result and the affiliated testing result of utilization carries out splicing and calculates to obtain described by the material homogeneity of microscopy..
Alternatively, described device also includes:
Plane mirror, described by the lateral attitude of microscopy for correcting；
Monitor interferometer, described by the lateral attitude of microscopy for monitoring；
The Monitoring Data that described interferometer is additionally operable to according to described plane mirror and described supervision interferometer is true
Determine the described tilt quantity by microscopy and utilize sub-aperture stitching algorithm by the material in whole sub-aperture regions
Uniformity carries out splicing and calculates and described described uniform by the material of microscopy to obtain by the tilt quantity of microscopy
Property.
The present invention proposes the material homogeneity detection method of a kind of optical glass, will be divided at least by microscopy
Three sub-aperture area, calculate material homogeneity respectively to each sub-aperture region, and recycling sub-aperture is spelled
Connect algorithm to be calculated by the material homogeneity of microscopy, it addition, by the lateral attitude of microscopy by monitoring interference
The plane mirror of instrument and side monitors and correction, therefore the inclining of the uniformity test result of different sub-aperture
Ramp-like state is completely the same, and is introduced in sub-aperture interferes testing result by the out of focus in uniformity and astigmatism
" inclination " amount can be retained truly, thus avoid and occur not in the unified uniformity of microscopy
Continuous print splicing vestige.The method that the present invention proposes is utilizing small-bore phase-shifting interferometer to realize heavy caliber light
During learning the detection of glass material uniformity, the whole wave aberrations being possible not only to realize material homogeneity are exhausted
To detection, and the detection error that discontinuous splicing vestige causes can be eliminated.
Accompanying drawing explanation
Fig. 1 is the flow chart of a kind of embodiment of the material homogeneity detection method of the optical glass of the present invention；
Fig. 2 is the flow process of the another kind of embodiment of the material homogeneity detection method of the optical glass of the present invention
Figure；
Fig. 3 be the material homogeneity detection method of the optical glass of the present invention be divided into many height by microscopy
The schematic diagram of aperture area；
Fig. 4 is a kind of structural representation of the material homogeneity detection device of the optical glass of the present invention.
Detailed description of the invention
In order to make those skilled in the art be more fully understood that the present invention program, real below in conjunction with the present invention
Execute the accompanying drawing in example, the technical scheme in the embodiment of the present invention be clearly and completely described, it is clear that
Described embodiment is only the embodiment of a present invention part rather than whole embodiments.Based on
Embodiment in the present invention, those of ordinary skill in the art are obtained under not making creative work premise
The every other embodiment obtained, all should belong to the scope of protection of the invention.
Term " first " in description and claims of this specification and above-mentioned accompanying drawing, " second ", "
Three " " the 4th " etc. is for distinguishing similar object, without being used for describing specific order or successively time
Sequence.Should be appreciated that the data of so use can be exchanged in the appropriate case, in order to enforcement described herein
Example can be implemented with the order in addition to the content except here illustrating or describe.Additionally, term " includes "
" have " and their any deformation, it is intended that cover non-exclusive comprising, such as, comprise
The process of series of steps or unit, method, system, product or equipment are not necessarily limited to clearly to list
Those steps or unit, but can include the most clearly listing or for these processes, method,
Product or intrinsic other step of equipment or unit.
Shown in Fig. 1, the one of the material homogeneity detection method of a kind of optical glass that the present invention provides
Planting embodiment, described method includes:
S101, it is polished optical glass to be detected obtaining parallel flat as by microscopy.
S102, by described three the sub-aperture area, wherein, two adjacent sons of being at least divided into by microscopy
Aperture area has overlapping region.
S103, obtain the material homogeneity in each sub-aperture region.
S104, sub-aperture stitching algorithm is utilized to be spliced by the material homogeneity in whole sub-aperture regions
Calculate to obtain the material homogeneity of described large-aperture optical glass.
The present invention proposes the material homogeneity detection method of a kind of optical glass, will be divided at least by microscopy
Three sub-aperture area, calculate material homogeneity respectively to each sub-aperture region, and recycling sub-aperture is spelled
Connect algorithm to be calculated by the material homogeneity of microscopy, it addition, by the lateral attitude of microscopy by monitoring interference
The plane mirror of instrument and side monitors and correction, therefore the inclining of the uniformity test result of different sub-aperture
Ramp-like state is completely the same, and is introduced in sub-aperture interferes testing result by the out of focus in uniformity and astigmatism
" inclination " amount can be retained truly, thus avoid and occur not in the unified uniformity of microscopy
Continuous print splicing vestige.The method that the present invention proposes is utilizing small-bore phase-shifting interferometer to realize heavy caliber light
During learning the detection of glass material uniformity, the whole wave aberrations being possible not only to realize material homogeneity are exhausted
To detection, and the detection error that discontinuous splicing vestige causes can be eliminated.
Shown in Fig. 2 and Fig. 3, the material homogeneity detection side of a kind of optical glass that the present invention provides
The another kind of embodiment of method, described method includes:
S201, it is polished the upper and lower surface of optical glass to be detected obtaining parallel flat as by microscopy.
S202, by described three the sub-aperture area, wherein, two adjacent sons of being at least divided into by microscopy
Aperture area has overlapping region.
S203, adjust described any one sub-aperture made by the position of microscopy in the plurality of sub-aperture region
The interference fringe that region, footpath is formed with transmission plane camera lens is zero striped.
S204, regulation plane of reflection lens location make described plane of reflection camera lens and described transmission plane mirror
The interference fringe that capitiform becomes is zero striped, and wherein, described transmission plane camera lens is with described by microscopy front surface
Form the first interference cavity, described formed the second interference cavity by upper and lower two surfaces of microscopy, described by after microscopy
Surface forms the 3rd interference cavity with described plane of reflection camera lens.
S205, calculate described first interference cavity C1, described second dry according to wavelength phase shift principle of interference
Relate to chamber C2 and the testing result of described 3rd interference cavity C3.
Utilize wavelength phase shift interfere 1 can utilize one-shot measurement obtain three interference cavity testing result:
C1=-S1-S2+k1,
C2=nS2-nS3+nT+k2,
C3=-S3-S4+k3
Wherein, S1, S2, S3And S4It is respectively transmission plane camera lens, by microscopy front surface, by after microscopy
Surface and the face shape error of plane of reflection camera lens, n is by microscopy Refractive Index of Material, and T is by microscopy thickness,
k1, k2And k3It is three constant terms.
S206, obtain the 4th interference cavity that described transmission plane camera lens and described transmission plane camera lens are formed,
The testing result of described 4th interference cavity is calculated according to wavelength phase shift principle of interference.
Will be located between transmission plane camera lens and described transmission plane camera lens before obtaining the 4th interference cavity
Taken out the detection carrying out the 4th interference cavity again by microscopy, the calculation for the 4th interference cavity can be:
CEC=-S1-S4+k4
Wherein, k4For constant term.
S207, according to described first interference cavity, described second interference cavity, described 3rd interference cavity and institute
The testing result stating the 4th interference cavity calculates the material homogeneity in described sub-aperture region.
Can be used by the calculation of the material homogeneity H1 of on microscopy aperture area:
H1=nT=C2-n(CEC-C3-C1)
Carry out calculating by the parameter utilizing calculating process above to obtain and can obtain a sub-aperture area
Material homogeneity.
It is pointed out that the step that the material homogeneity for each sub-aperture region detects is similar,
Repeat according to step S203 to S207, do not repeat.
Alternatively, when the material homogeneity carrying out another sub-aperture region detects, again will
Put back in interference cavity by microscopy, in fetching process repeatedly, by microscopy supporting mechanism need to guarantee low stress and
High position repdocutbility, readjusts by microscopy lateral attitude, makes by microscopy and the formation of transmission plane camera lens
Interference fringe is zero striped, utilizes and monitors that interferometer measurement is by the plane mirror of microscopy support means side
The inclination T of interference fringe1And T2, utilize five dimensions to adjust platform and adjust by microscopy position, make by second son of microscopy
The interference fringe that aperture is formed with transmission plane camera lens is zero striped, observes the plane monitoring interferometer measurement
The inclination T ' of mirror interference striped1With T '2, utilize five dimensions to adjust platform fine setting and tilted to make plane reflection by microscopy
The interference fringe of mirror tilts for T1And T2, repeat the operating process of step S203 to S207, it is possible to obtain
Material homogeneity H by second sub-aperture of microscopy2。
S208, sub-aperture stitching algorithm is utilized to be spliced by the material homogeneity in whole sub-aperture regions
Calculate to obtain the material homogeneity of described large-aperture optical glass.
For sub-aperture stitching algorithm, those of ordinary skill in the art it is to be appreciated that concrete splicing not
Repeat, it should be pointed out that also increase during splicing to by the tilt quantity of microscopy, profit
With sub-aperture stitching algorithm, the material homogeneity in whole sub-aperture regions is carried out splicing to calculate and described
By the tilt quantity of microscopy to obtain the material homogeneity of described large-aperture optical glass, it is to avoid complete by microscopy
Bore uniformity occurs discontinuous splicing vestige.
For the acquisition by microscopy tilt quantity, the invention provides a kind of implementation, specifically include:
For the ease of understanding the technical scheme of the application, provide below a kind of use scene and explained.
1, using large-aperture optical glass two surface finish be parallel flat as by microscopy, two surface requirements reach
To higher surface figure accuracy.
2, build material homogeneity measurement apparatus based on small-bore phase-shifting interferometer via wavelength tuning, move including wavelength
Relevant interferometer main frame, transmission plane camera lens, adjusted platform, plane of reflection camera lens, three-dimensionals by microscopy, five dimensions
Adjust platform, monitor interferometer and plane mirror, heavy caliber is divided into multiple sub-aperture region by microscopy,
Each sub-aperture region all can utilize phase-shifting interferometer via wavelength tuning to measure, and adjacent two sub-aperture area tool
There is sufficiently large overlapping region, to ensure follow-up splicing precision.
3, transmission plane camera lens is installed on interferometer main frame, will be arranged in detection device by microscopy, profit
Adjusting platform adjustment by five dimensions is made its first sub-aperture area and transmission plane camera lens be formed by microscopy position
Interference fringe is zero striped, is arranged on by plane of reflection camera lens in detection device, utilizes three-dimensional to adjust platform and adjusts
The interference fringe that whole inclination makes itself and transmission plane camera lens be formed is zero striped, finally adjusts interferometer and focuses on
Position makes plane of reflection camera lens become the object plane of interferometer imaging mirror.Transmission plane camera lens, by microscopy and anti-
Penetrate the position relationship between plane camera lens three and need to meet the testing requirement of phase-shifting interferometer via wavelength tuning, to prevent
Test process occurs the interference of frequency multiplication interference signal.
4, in the case of comprising by the having one's bosom filled with of microscopy, transmission plane camera lens is interfered with being formed by microscopy front surface
Chamber C1, formed interference cavity C by microscopy front and rear surfaces2, formed dry by microscopy rear surface with plane of reflection camera lens
Relate to chamber C3.Utilize phase-shifting interferometer via wavelength tuning that one-shot measurement can be utilized to obtain the detection of following three interference cavity
Result:
C1=-S1-S2+k1,
C2=nS2-nS3+nT+k2,
C3=-S3-S4+k3
Wherein, S1, S2, S3And S4It is respectively transmission plane camera lens, by microscopy front surface, by after microscopy
Surface and the face shape error of plane of reflection camera lens, n is by microscopy Refractive Index of Material, and T is by microscopy thickness,
k1, k2And k3It is three constant terms.
5, taking out by microscopy 3, transmission plane camera lens forms cavity C with plane of reflection camera lensEC, utilize wavelength
The testing result that phase-shifting interferometer 1 obtains cavity is as follows:
CEC=-S1-S4+k4
Wherein, k4For constant term.Therefore, by the material homogeneity H of 3 first sub-aperture of microscopy1Can be by
The above-mentioned test result having one's bosom filled with cavity is derived:
H1=nT=C2-n(CEC-C3-C1)
6, again will be put back in interference cavity by microscopy 3, in fetching process repeatedly, by microscopy supporting mechanism
Low stress and high position repdocutbility need to be guaranteed.Readjust by microscopy lateral attitude so that it is with transmission plane
The interferogram that camera lens is formed is zero striped, utilizes and monitors that interferometer 7 is measured by microscopy support means side
The inclination T of plane mirror 8 interference fringe1And T2。
Utilize five dimensions to adjust platform 4 and adjust by microscopy position so that it is second sub-aperture and transmission plane camera lens
The interference fringe formed is zero striped, observes plane mirror 8 interference fringe monitoring that interferometer 7 is measured
Inclination T '1With T '2, utilize five dimensions to adjust platform 4 and finely tune to be tilted to make the interference bar of plane mirror 8 by microscopy
Stricture of vagina tilts for T1And T2.Then, step 4 and the operating process of 5 are repeated, it is possible to obtain by microscopy second
The material homogeneity H of sub-aperture2.Repeat the measurement in each sub-aperture region, it is possible to obtain by microscopy
The material homogeneity H in 3 all sub-aperture regions1,H2,H3..., Hn。
7, utilize classical sub-aperture stitching algorithm by the material homogeneity by the whole sub-aperture region of microscopy 3
Data H1,H2,H3..., HnBe stitched together acquisition heavy caliber by the material homogeneity of microscopy Zone Full
H。
A kind of method described above, corresponding, the material that present invention also offers a kind of optical glass is equal
Even property detection device, is applied to the material homogeneity detection method of above-mentioned optical glass, is described below.
Shown in Fig. 3 and Fig. 4, the present invention provides the material homogeneity detection device of a kind of optical glass
A kind of embodiment, described device include for carry out the interferometer 1 of wavelength phase-shifting interference measuring, transmission put down
Face camera lens 2, be positioned at below described transmission plane camera lens by microscopy 3, for adjusting described transmission plane mirror
Head position is so that adjust platform 4 with five dimensions that the described interference fringe formed by microscopy is zero striped, be positioned at institute
State the plane of reflection camera lens 5 below by microscopy, for adjusting described plane of reflection lens location so that with institute
Stating the interference fringe formed by microscopy is that the three-dimensional of zero striped adjusts platform 6；
Described it is polished obtaining parallel flat for optical glass to be detected by microscopy 3；
Described at least it is divided into three sub-aperture area, two the most adjacent sub-aperture by microscopy 3 surface
Region；
Described interferometer 1 carries out material homogeneity detection respectively and obtains each sub-aperture region divided
Testing result belonging to testing result utilization carries out splicing and calculates to obtain described uniform by the material of microscopy
Property.
The present invention propose a kind of optical glass material homogeneity detection device, will by microscopy 3 be divided into
Few three sub-aperture area, calculate material homogeneity to each sub-aperture region respectively, recycle sub-aperture
Stitching algorithm is calculated by the material homogeneity of microscopy 3, it addition, by the lateral attitude of microscopy 3 by supervising
Monitoring depending on the plane mirror 7 of interferometer 8 and side and correct, therefore the uniformity of different sub-aperture is surveyed
The heeling condition of test result is completely the same, and is interfered detection by the out of focus in uniformity and astigmatism in sub-aperture
" inclination " amount introduced in result can be retained truly, thus avoids by the unified uniformity of microscopy 3
Middle appearance discontinuous splicing vestige.The method that the present invention proposes is utilizing small-bore phase-shifting interferometer to realize
During the detection of large-aperture optical glass material uniformity, it is possible not only to realize the whole of material homogeneity
Wave aberration absolute sense, and the detection error that discontinuous splicing vestige causes can be eliminated.
Alternatively, described device also includes:
Plane mirror 7, described by the lateral attitude of microscopy for correcting；
Monitor interferometer 8, described by the lateral attitude of microscopy for monitoring；
Described interferometer 1 is additionally operable to according to described plane mirror 7 and the monitoring of described supervision interferometer 8
Data determine the described tilt quantity by microscopy 3 and utilize sub-aperture stitching algorithm by whole sub-aperture districts
The material homogeneity in territory carries out splicing and calculates and described described by microscopy to obtain by the tilt quantity of microscopy 3
Material homogeneity.
Those skilled in the art is it can be understood that arrive, and for convenience and simplicity of description, above-mentioned retouches
The specific works process of the system stated, device and unit, is referred to the correspondence in preceding method embodiment
Process, does not repeats them here.
In several embodiments provided herein, it should be understood that disclosed system, device and
Method, can realize by another way.Such as, device embodiment described above is only shown
Meaning property, such as, the division of described unit, be only a kind of logic function and divide, actual can when realizing
There to be other dividing mode, the most multiple unit or assembly can in conjunction with or be desirably integrated into another
System, or some features can ignore, or do not perform.Another point, shown or discussed each other
Coupling direct-coupling or communication connection can be the INDIRECT COUPLING by some interfaces, device or unit
Or communication connection, can be electrical, machinery or other form.
One of ordinary skill in the art will appreciate that all or part of step realizing in above-described embodiment method
The program that can be by completes to instruct relevant hardware, and described program can be stored in a kind of computer
In readable storage medium storing program for executing, storage medium mentioned above can be read only memory, disk or CD etc..
Material homogeneity detection method and device to a kind of optical glass provided by the present invention are carried out above
It is discussed in detail, for one of ordinary skill in the art, according to the thought of the embodiment of the present invention, at tool
All will change on body embodiment and range of application, in sum, this specification content should not be managed
Solve as limitation of the present invention.
Claims (8)
1. the material homogeneity detection method of an optical glass, it is characterised in that described method includes:
It is polished optical glass to be detected obtaining parallel flat as by microscopy；
By described three the sub-aperture area, wherein, two adjacent sub-aperture region of being at least divided into by microscopy
Territory has overlapping region；
Obtain the material homogeneity in each sub-aperture region；
Utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing calculate with
Obtain the material homogeneity of described large-aperture optical glass.
Method the most according to claim 1, it is characterised in that described optical glass to be detected is entered
Row polishing obtains parallel flat and specifically includes as by microscopy:
It is polished the upper and lower surface of optical glass to be detected obtaining parallel flat as by microscopy.
Method the most according to claim 1 and 2, it is characterised in that each sub-aperture of described acquisition
The material homogeneity in region specifically includes:
Adjust described any one sub-aperture region made by the position of microscopy in the plurality of sub-aperture region
The interference fringe formed with transmission plane camera lens is zero striped；
Regulation plane of reflection lens location makes described plane of reflection camera lens be formed with described transmission plane camera lens
Interference fringe be zero striped, wherein, described transmission plane camera lens is formed the with described by microscopy front surface
One interference cavity, described is formed the second interference cavity by upper and lower two surfaces of microscopy, described by microscopy rear surface with
Described plane of reflection camera lens forms the 3rd interference cavity；
Described first interference cavity, described second interference cavity and institute is calculated according to wavelength phase shift principle of interference
State the testing result of the 3rd interference cavity；
Obtain described transmission plane camera lens and the 4th interference cavity of described transmission plane camera lens formation, according to ripple
Long phase shift principle of interference calculates the testing result of described 4th interference cavity；
According to described first interference cavity, described second interference cavity, described 3rd interference cavity and the described 4th
The testing result of interference cavity calculates the material homogeneity in described sub-aperture region.
Method the most according to claim 3, it is characterised in that be at least divided into described by microscopy
Three sub-aperture area specifically include:
It is divided into three sub-aperture area, the respectively first sub-aperture region, the second son by microscopy by described
Aperture area and third sub-aperture region.
Method the most according to claim 3, it is characterised in that described acquisition described transmission plane mirror
The 4th interference cavity that head and described transmission plane camera lens are formed, calculates according to wavelength phase shift principle of interference
Before the testing result of described 4th interference cavity, described method also includes:
Taken out described between described transmission plane camera lens and described transmission plane camera lens by microscopy.
Method the most according to claim 3, it is characterised in that described adjustment is described by the position of microscopy
Put so that doing that any one the sub-aperture region in the plurality of sub-aperture region and transmission plane camera lens are formed
Relating to after striped is zero striped, described method also includes:
Obtain by the tilt quantity of microscopy；
Described utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing meter
Calculate and specifically include with the material homogeneity obtaining described large-aperture optical glass:
Described utilize sub-aperture stitching algorithm the material homogeneity in whole sub-aperture regions is carried out splicing meter
Calculate and described by the tilt quantity of microscopy with obtain described large-aperture optical glass material homogeneity.
7. the material homogeneity detection device of an optical glass, it is characterised in that described device includes using
In carrying out the interferometer of wavelength phase-shifting interference measuring, transmission plane camera lens, being positioned at described transmission plane camera lens
Lower section by microscopy, for adjusting described transmission plane lens location so that being formed by microscopy with described
Interference fringe be zero striped five dimension adjust platforms, be positioned at described by the plane of reflection camera lens below microscopy, use
In adjusting described plane of reflection lens location so that being zero striped with the described interference fringe formed by microscopy
Three-dimensional adjust platform；
Described is that optical glass to be detected is polished obtaining parallel flat by microscopy；
Described at least it is divided into three sub-aperture area, two the most adjacent sub-aperture region by microscopy surface
Territory；
Described interferometer carries out material homogeneity to each sub-aperture region divided respectively and is examined
Survey result and the affiliated testing result of utilization carries out splicing and calculates to obtain described by the material homogeneity of microscopy.
Device the most according to claim 7, it is characterised in that described device also includes:
Plane mirror, described by the lateral attitude of microscopy for correcting；
Monitor interferometer, described by the lateral attitude of microscopy for monitoring；
The Monitoring Data that described interferometer is additionally operable to according to described plane mirror and described supervision interferometer is true
Determine the described tilt quantity by microscopy and utilize sub-aperture stitching algorithm by the material in whole sub-aperture regions
Uniformity carries out splicing and calculates and described described uniform by the material of microscopy to obtain by the tilt quantity of microscopy
Property.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510962393.9A CN106248350B (en) | 2015-12-21 | 2015-12-21 | A kind of material homogeneity detection method and device of optical glass |
Applications Claiming Priority (1)
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| CN106248350B (en) | 2019-01-29 |
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