CN106199917B - Optical lens and laser process equipment with the optical lens - Google Patents
Optical lens and laser process equipment with the optical lens Download PDFInfo
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- CN106199917B CN106199917B CN201610727294.7A CN201610727294A CN106199917B CN 106199917 B CN106199917 B CN 106199917B CN 201610727294 A CN201610727294 A CN 201610727294A CN 106199917 B CN106199917 B CN 106199917B
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- 230000003287 optical effect Effects 0.000 title claims abstract description 122
- 238000000034 method Methods 0.000 title claims abstract description 16
- 230000008569 process Effects 0.000 title claims abstract description 16
- 239000000463 material Substances 0.000 claims abstract description 30
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 230000005540 biological transmission Effects 0.000 claims abstract description 4
- 239000005357 flat glass Substances 0.000 claims description 24
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 claims description 3
- 229910001635 magnesium fluoride Inorganic materials 0.000 claims description 3
- 238000009738 saturating Methods 0.000 claims description 2
- 238000012545 processing Methods 0.000 abstract description 6
- 241000700608 Sagitta Species 0.000 description 2
- 230000004075 alteration Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012634 optical imaging Methods 0.000 description 1
- 238000009304 pastoral farming Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000012216 screening Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/001—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras
- G02B13/0015—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design
- G02B13/002—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface
- G02B13/004—Miniaturised objectives for electronic devices, e.g. portable telephones, webcams, PDAs, small digital cameras characterised by the lens design having at least one aspherical surface having four lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B13/00—Optical objectives specially designed for the purposes specified below
- G02B13/14—Optical objectives specially designed for the purposes specified below for use with infrared or ultraviolet radiation
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Lenses (AREA)
Abstract
The present invention relates to a kind of optical lens and with the laser process equipment of the optical lens.Above-mentioned optical lens includes the first lens, the second lens, the third lens and the 4th lens being arranged in order along the transmission direction of incident beam, first lens are double concave type negative lens, second lens are curved month type positive lens, and the third lens are planoconvex positive lens, and the 4th lens are biconvex positive lens；The material of the substrate of first lens, the second lens, the third lens and the 4th lens is heat safe optical material.Above-mentioned optical lens and the laser process equipment with the optical lens, since the material of the substrate of the first lens, the second lens, the third lens and the 4th lens is heat safe optical material, optical lens is applicable in the working environment of continuous high-power ultraviolet laser, so as to be effectively prevented from the problem of lens that ultraviolet laser is easy to cause in camera lens deform, the fineness and clarity of ultraviolet laser when processing the workpiece ensure that.
Description
Technical field
The present invention relates to the technical fields of laser processing, more particularly to a kind of optical lens and with the optical lens
Laser process equipment.
Background technology
Since the radius for the hot spot that the wavelength of ultraviolet laser is shorter and focuses is smaller, and ultraviolet laser has smaller disperse
Hot spot and higher resolution ratio, ultraviolet laser can accomplish retrofit, to be widely used in the processing of product.
However, the wavelength due to ultraviolet laser is shorter, under equal-wattage, the energy entrained by ultraviolet laser is compared with other classes
The laser of type is big, and the lens being easy to cause in camera lens deform.For example, ultraviolet laser makes the radius of curvature of lens generate change
Change, to influence the focal length of entire camera lens.Especially when camera lens is applied to the working environment of continuous high-power ultraviolet laser
When middle, the subregion of optical center can be by the prolonged exposure of stronger light, in the range of exposures of the light of camera lens
In the same plane, that is, there is not the focus off-set phenomenon of center-spot surrounding defocus, to influence work in the focus of the heart and surrounding
The fineness and clarity of part processing.
Invention content
Based on this, it is necessary to be easy to cause the problem of lens in camera lens deform for ultraviolet laser, provide one kind
Optical lens and laser process equipment with the optical lens.
A kind of optical lens includes the first lens, the second lens, third being arranged in order along the transmission direction of incident beam
Lens and the 4th lens, first lens are double concave type negative lens, and second lens are curved month type positive lens, the third
Lens are planoconvex positive lens, and the 4th lens are biconvex positive lens；It is first lens, second lens, described
The material of the third lens and the substrate of the 4th lens is heat safe optical material.
The optical material is vitreous silica or magnesium fluoride in one of the embodiments,.
Center thickness of first lens on optical axis is 3mm ± 0.15mm in one of the embodiments, described the
Two lens on optical axis center thickness be 5mm ± 0.25mm, the third lens on optical axis center thickness be 14mm ±
0.7mm, center thickness of the 4th lens on optical axis are 9mm ± 0.45mm.
The both sides of first lens are respectively equipped with first surface and the second curved surface in one of the embodiments, described
First surface is far from second lens, and second curved surface is adjacent to second lens, the radius of curvature of the first surface
Radius of curvature for -40mm ± 2mm, second curved surface is 800mm ± 40mm；
The both sides of second lens are respectively equipped with third curved surface and the 4th curved surface, and the third curved surface is adjacent to described second
Curved surface, for the 4th curved surface adjacent to the third lens, the radius of curvature of the third curved surface is -100mm ± 5mm, described the
The radius of curvature of four curved surfaces is -70mm ± 3.5mm；
The both sides of the third lens are respectively equipped with the 5th curved surface and the 6th curved surface, and the 5th curved surface is adjacent to the described 4th
Curved surface, for the 6th curved surface far from the 4th lens, the radius of curvature of the 5th curved surface is ∞, the song of the 6th curved surface
Rate radius is -60mm ± 3mm；
The both sides of 4th lens are respectively equipped with the 7th curved surface and the 8th curved surface, and the 7th curved surface is adjacent to the described 6th
Curved surface, for the 8th curved surface far from the 6th curved surface, the radius of curvature of the 7th curved surface is 350mm ± 17.5mm, described
The radius of curvature of 8th curved surface is -350mm ± 17.5mm, make the coplanarity of incident beam focus after optical lens focuses compared with
It is good.
In one of the embodiments, second curved surface between the third curved surface on optical axis at a distance from be 5mm
± 0.25mm, the 4th curved surface between the 5th curved surface on optical axis at a distance from be 0.5mm ± 0.025mm, described the
Six curved surfaces between the 7th curved surface on optical axis at a distance from be 0.5mm ± 0.025mm.
Optical lens further includes sheet glass in one of the embodiments, and it is remote that the sheet glass is located at the 4th lens
Side from the third lens, and the material of the substrate of the sheet glass is heat safe optical material, with to the 4th lens
It is protected, to improve the service life of optical lens.
The both sides of the sheet glass are respectively equipped with the first plane and the second plane in one of the embodiments, and described
One plane adjacent to the 8th curved surface, second plane far from the 8th curved surface, the radius of curvature of first plane and
The radius of curvature of second plane is ∞, and the margin of tolerance of the radius of curvature of first plane and the second plane be ±
0.05mm。
Center thickness of the sheet glass on optical axis is 4mm ± 0.2mm in one of the embodiments,；
Or the 8th curved surface between first plane on optical axis at a distance from be 4mm ± 0.2mm.
In one of the embodiments, first lens, second lens, the third lens, it is described 4th thoroughly
The refractive index of the material of mirror and the sheet glass and the ratio of Abbe number are 0.0208955 ± 0.001044776.
A kind of laser process equipment, including above-mentioned optical lens.
Above-mentioned optical lens and the laser process equipment with the optical lens, incident beam from the first lens first
Side is injected, the fraction light in incident beam by the first reflection from lens, most of light in incident beam by first thoroughly
Mirror reflects；It is reflected away from the second side of the first lens by the way that the light of the first sides of the first lens is most of, due to the
The material of the substrate of one lens is heat safe optical material, can be caused to avoid the energy entrained by high-power ultraviolet laser
The problem of first lens deform, to can accurately be incident upon on the second lens after making incident beam pass through the first lens；
And so on, it is incident since the material of the substrate of the second lens, the third lens and the 4th lens is heat safe optical material
Light beam can pass through the second lens, the third lens and the 4th lens successively along scheduled light path, ultimately form the outgoing after focusing
Light beam；The focus at center and surrounding in outgoing beam range of exposures is respectively positioned on same plane；Wherein, the first lens are concave-concave
Type negative lens, for dissipating parallel incident beam；Second lens are curved month type positive lens, for removing through the first lens
Aberration in incident beam；The third lens are planoconvex positive lens, for that will pass through the light in the incident beam of the second lens
Pool directional light；4th lens are biconvex positive lens, for will be by the light in the incident beam of the third lens into one
Step pools directional light, to keep the collimation of the light of the outgoing beam after focusing preferable；Optical lens is applicable to continuously
High-power ultraviolet laser working environment in, so as to be effectively prevented from the lens that ultraviolet laser is easy to cause in camera lens
The problem of deforming ensure that the fineness and clarity of ultraviolet laser when processing the workpiece.
Description of the drawings
Fig. 1 is the structural schematic diagram of the optical lens of an embodiment；
Fig. 2 is the figure of optical lens preferred embodiment of optical lens shown in Fig. 1；
Fig. 3 is the curvature of field figure of optical lens shown in Fig. 1；
Fig. 4 is the distortion figure of optical lens shown in Fig. 1；
Fig. 5 is the MTF figures of optical lens shown in Fig. 1.
Specific implementation mode
To facilitate the understanding of the present invention, below with reference to relevant drawings to optical lens and the laser with the optical lens
Process equipment is described more fully.Optical lens and the laser process equipment with the optical lens are given in attached drawing
Preferred embodiment.But optical lens and the laser process equipment with the optical lens can come in many different forms
It realizes, however it is not limited to embodiment described herein.Make to optical lens and tool on the contrary, purpose of providing these embodiments is
There is the disclosure of the laser process equipment of the optical lens more thorough and comprehensive.
Unless otherwise defined, all of technologies and scientific terms used here by the article and belong to the technical field of the present invention
The normally understood meaning of technical staff is identical.Saying in optical lens and laser process equipment with the optical lens herein
Term used in bright book, which is only for the purpose of describing specific embodiments, is not intended to limit the present invention.This paper institutes
Use term " and/or " include one or more relevant Listed Items any and all combinations.
It should be noted that the direction of propagation of light is from the left side of Fig. 1 to the right in this specification.Radius of curvature it is positive and negative
Be subject to curved surface sphere center position and optical axis 20 intersection point, the centre of sphere of curved surface is in the point with a left side, then radius of curvature is negative.Conversely,
The centre of sphere of curved surface is in the point with the right side, then radius of curvature is just.It is object space positioned at the camera lens left side, it is picture to be located on the right of camera lens
Side.In addition, the corresponding numerical value of parameters herein is expressed as " basic size ± deviation ", wherein " basic size+partially
Difference " is the corresponding greatest limit numerical value of the parameter, and " basic size-deviation " is the corresponding least limit numerical value of the parameter, therefore should
The numerical value of parameter is between least limit numerical value and greatest limit numerical value.For example, the numerical value of d1 is expressed as " 3mm ± 0.15mm ",
That is 2.85mm≤d1≤3.15mm.
As shown in Figure 1, the laser process equipment (not shown) of an embodiment includes optical lens 10.Optical lens 10
Include the first lens 100 being arranged in order along the transmission direction of incident beam, the second lens 200, the third lens 300 and the 4th thoroughly
Mirror 400, the first lens 100 are double concave type negative lens, and the second lens 200 are curved month type positive lens, and the third lens 300 are planoconvex
Positive lens, the 4th lens 400 are biconvex positive lens.First lens 100, the second lens 200, the third lens 300 and the 4th are thoroughly
The material of the substrate of mirror 400 is heat safe optical material.In one of the embodiments, optical material be vitreous silica or
Magnesium fluoride.In the present embodiment, optical material is vitreous silica.
As shown in Figure 1, in one of the embodiments, center thickness d1 of first lens 100 on optical axis 20 be 3mm ±
0.15mm.Center thickness d2 of second lens 200 on optical axis 20 is 5mm ± 0.25mm.The third lens 300 are on optical axis 20
Center thickness d3 is 14mm ± 0.7mm.Center thickness d4 of 4th lens 400 on optical axis 20 is 9mm ± 0.45mm.Specifically exist
In the present embodiment, center thickness d1 of first lens 100 on optical axis 20 is 3mm, center of second lens 200 on optical axis 20
Thickness d 2 is 5mm, and center thickness d3 of the third lens 300 on optical axis 20 is 14mm, during the 4th lens 400 are on optical axis 20
Heart thickness d 4 is 9mm.
As shown in Figure 1, the both sides of the first lens 100 are respectively equipped with first surface 110 and in one of the embodiments,
Two curved surfaces 120, first surface 110 is far from the second lens 200, and the second curved surface 120 is adjacent to the second lens 200.First surface 110
Radius of curvature R 1 is -40mm ± 2mm, and the radius of curvature R 2 of the second curved surface 120 is 800mm ± 40mm.The both sides of second lens 200
It is respectively equipped with third curved surface 210 and the 4th curved surface 220, third curved surface 210 is adjacent to the second curved surface 120, and the 4th curved surface 220 is adjacent to
Three lens 300.The radius of curvature R 3 of third curved surface 210 is -100mm ± 5mm, and the radius of curvature R 4 of the 4th curved surface 220 is -70mm
±3.5mm.The both sides of the third lens 300 are respectively equipped with the 5th curved surface 310 and the 6th curved surface 320, and the 5th curved surface 310 is adjacent to the 4th
Curved surface 220, the 6th curved surface 320 is far from the 4th lens 400.The radius of curvature R 5 of 5th curved surface 310 is ∞, it will be understood that the 5th
Curved surface 310 is close to plane.The 5th curved surface 310 is replaced by plane in one of the embodiments,.The curvature of 6th curved surface 320 half
Diameter R6 is -60mm ± 3mm.The both sides of 4th lens 400 are respectively equipped with the 7th curved surface 410 and the 8th curved surface 420, the 7th curved surface
410 adjacent to the 6th curved surface 320, and the 8th curved surface 420 is far from the 6th curved surface 320.The radius of curvature R 7 of 7th curved surface 410 is 350mm
The radius of curvature R 8 of ± 17.5mm, the 8th curved surface 420 are -350mm ± 17.5mm, and incident beam is after the focusing of optical lens 10
The coplanarity of focus is preferable, i.e. focusing of the beam incident optical after optical lens 10 is preferable.Specifically in the present embodiment, first
The radius of curvature R 1 of curved surface 110 is -40mm, and the radius of curvature R 2 of the second curved surface 120 is 800mm, the curvature half of third curved surface 210
Diameter R3 is -100mm, and the radius of curvature R 4 of the 4th curved surface 220 is -70mm, and the radius of curvature R 5 of the 5th curved surface 310 is ∞, the 6th
The radius of curvature R 6 of curved surface 320 is -60mm, and the radius of curvature R 7 of the 7th curved surface 410 is 350mm, the curvature half of the 8th curved surface 420
Diameter R8 is -350mm.
As shown in Figure 1, in one of the embodiments, between the second curved surface 120 and third curved surface 210 on optical axis 20
Distance D23For 5mm ± 0.25mm.4th curved surface 220 distance D on optical axis 20 between the 5th curved surface 31045For 0.5mm ±
0.025mm.6th curved surface 320 distance D on optical axis 20 between the 7th curved surface 41067For 0.5mm ± 0.025mm.In this reality
It applies in example, the second curved surface 120 distance D on optical axis 20 between third curved surface 21023For 5mm, the 4th curved surface 220 and the 5th
Distance D between curved surface 310 on optical axis 2045For 0.5mm, between the 6th curved surface 320 and the 7th curved surface 410 on optical axis 20
Distance D67For 0.5mm.
As shown in Figure 1, optical lens 10 further includes sheet glass 500 in one of the embodiments, sheet glass 500 is located at
4th side of the lens 400 far from the third lens 300, and the material of the substrate of sheet glass 500 is heat safe optical material, with
4th lens 400 are protected, to improve the service life of optical lens 10.In the present embodiment, sheet glass 500 is flat
Plate screening glass.The both sides of sheet glass 500 are respectively equipped with the first plane 510 and the second plane 520 in one of the embodiments,
First plane 510 is adjacent to the 8th curved surface 420, and the second plane 520 is far from the 8th curved surface 420.The radius of curvature R 9 of first plane 510
For ∞, the radius of curvature R 10 of the second plane 520 is ∞, and the tolerance of the radius of curvature of the first plane 510 and the second plane 520
Range is ± 0.05mm.
As shown in Figure 1, in one of the embodiments, center thickness d5 of the sheet glass 500 on optical axis 20 be 4mm ±
The margin of tolerance of 0.2mm, center thickness d5 of the sheet glass 500 on optical axis 20 are 5%.In the present embodiment, sheet glass 500 exists
Center thickness d5 on optical axis 20 is 4mm.In one of the embodiments, in light between the 8th curved surface 420 and the first plane 510
Distance on axis 20 is 4mm ± 0.2mm.In the present embodiment, between the 8th curved surface 420 and the first plane 510 on optical axis 20
Distance be 4mm.
As shown in Figure 1, the first lens 100, the second lens 200, the third lens the 300, the 4th in one of the embodiments,
The refractive index Nd of the material of lens 400 and sheet glass 500 with Abbe number (for roentgen Ernest & Whitney Abbe send out by Abbe number
Bright physics number, also referred to as " V- numbers ".Abbe number is used for weighing the degree of dispersion of the light of medium) ratio (Nd/Vd) of Vd is equal
It is 0.0208955 ± 0.001044776.In the present embodiment, the first lens 100, the second lens 200, the third lens 300,
The ratio (Nd/Vd) of the refractive index Nd and Abbe number Vd of the material of four lens 400 and sheet glass 500 are 1.4/67.
Following table is the specific design parameter value of the preferred embodiment of optical lens 10.
After above-mentioned design, the focal length of optical lens 10 is 259mm, Entry pupil diameters 10mm, the incident light of laser
The wavelength of beam is 355nm, and field angle is 2 ω=50 °, and the working (finishing) area of incident beam is 160mm*160mm.
Fig. 2 is the figure of optical lens preferred embodiment of the preferred embodiment of optical lens 10, as shown in Fig. 2, incident beam is regarded in six differences
The distribution of the hot spot point in rink corner (0 °, 15 °, 25 °, 35 °, 45 ° and 50 °) direction, the corresponding multiple reality of each field angle
Hot spot point is predominantly located in ideal hot spot circle, shows that incident beam is very high by the image quality of optical lens 10.Fig. 3 is
The curvature of field figure of the preferred embodiment of optical lens 10, Fig. 4 are the distortion figure of the preferred embodiment of optical lens 10, wherein curvature of field figure
In two curves indicate that the situation of sagitta of arc direction and meridian direction, wherein S are the situation in sagitta of arc direction respectively, T is meridian side
To situation.Curvature of field figure and distortion figure in critical field, show optical lens 10 corrected to optimum state and with compared with
Good quality of optical imaging.Fig. 5 is MTF (the Modulation Transfer of the preferred embodiment of optical lens 10
Function, modulation transfer function) figure, from figure it is found that the grazing of curve is preferable, i.e., 10 edge of optical lens and center at
The uniformity of picture is preferable, and the resolution ratio of optical lens 10 is higher.
Incident beam is via the light path route of optical lens 10：1) first surface of the incident beam from the first lens 100
110 inject, and are projected from the second curved surface 120 of the first lens 100.2) light projected by the second curved surface 120 is saturating from second
The third curved surface 210 of mirror 200 is injected, and is projected from the 4th curved surface 220 of the second lens 200.3) it is projected by the 4th curved surface 220
Light is injected from the 5th curved surface 310 of the third lens 300, and is projected from the 6th curved surface 320 of the third lens 300.4) by the 6th
The light that curved surface 320 projects is injected from the 7th curved surface 410 of the 4th lens 400, and from the 8th curved surface 420 of the 4th lens 400
It projects.5) light projected by the 8th curved surface 420 is injected from the first plane 510 of sheet glass 500, and from the of sheet glass 500
Two planes 520 project.
Above-mentioned optical lens 10 and the laser process equipment with the optical lens 10, incident beam is from the first lens
100 first side is injected, and the fraction light in incident beam is reflected by the first lens 100, the major part in incident beam
Light is reflected by the first lens 100.Occurred in the first lens 100 by the small light of the first side of the first lens 100 more
Secondary reflection, most of light reflect away from the second side of the first lens 100, due to the material of the substrate of the first lens 100
For heat safe optical material, the first lens 100 can be caused to become to avoid the energy entrained by high-power ultraviolet laser
The problem of shape, to can accurately be incident upon on the second lens 200 after making incident beam pass through the first lens 100；And so on,
It is incident since the material of the substrate of the second lens 200, the third lens 300 and the 4th lens 400 is heat safe optical material
Light beam can pass through the second lens 200, the third lens 300 and the 4th lens 400 successively along scheduled light path, ultimately form focusing
Outgoing beam afterwards；The focus at center and surrounding in the range of exposures of outgoing beam is respectively positioned on same plane.Wherein, first
Lens 100 are double concave type negative lens, for dissipating parallel incident beam.Second lens 200 are curved month type positive lens, for going
Except the aberration in the incident beam by the first lens 100.The third lens 300 are planoconvex positive lens, for that will pass through second
Light in the incident beam of lens 200 pools directional light.4th lens 400 are biconvex positive lens, for will be by the
Light in the incident beam of three lens 300 further pools directional light, to make the light of the outgoing beam after focusing
Collimation is preferable.Optical lens 10 is applicable in the working environment of continuous high-power ultraviolet laser, so as to effective
Ground avoids the problem that ultraviolet laser is easy to cause the lens in camera lens and deforms, and ensure that ultraviolet laser when processing the workpiece
Fineness and clarity.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned reality
It applies all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, it is all considered to be the range of this specification record.
Several embodiments of the invention above described embodiment only expresses, the description thereof is more specific and detailed, but simultaneously
It cannot therefore be construed as limiting the scope of the patent.It should be pointed out that coming for those of ordinary skill in the art
It says, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to the protection of the present invention
Range.Therefore, the protection domain of patent of the present invention should be determined by the appended claims.
Claims (8)
1. a kind of optical lens, which is characterized in that include the first lens being arranged in order along the transmission direction of incident beam, second
Lens, the third lens and the 4th lens, first lens are double concave type negative lens, and second lens are that curved month type is just saturating
Mirror, the third lens are planoconvex positive lens, and the 4th lens are biconvex positive lens；First lens, described
The material of the substrate of two lens, the third lens and the 4th lens is vitreous silica or magnesium fluoride；The optical frames
It is four that head, which has the quantity of the optical element of focal power,；Center thickness of first lens on optical axis be 3mm ±
0.15mm, second lens center thickness on optical axis is 5mm ± 0.25mm, the third lens center thickness on optical axis
For 14mm ± 0.7mm, center thickness of the 4th lens on optical axis is 9mm ± 0.45mm.
2. optical lens according to claim 1, which is characterized in that the both sides of first lens are respectively equipped with the first song
Face and the second curved surface, the first surface is far from second lens, and second curved surface is adjacent to second lens, and described
The radius of curvature of one curved surface is -40mm ± 2mm, and the radius of curvature of second curved surface is 800mm ± 40mm；
The both sides of second lens are respectively equipped with third curved surface and the 4th curved surface, and the third curved surface is bent adjacent to described second
Face, for the 4th curved surface adjacent to the third lens, the radius of curvature of the third curved surface is -100mm ± 5mm, the described 4th
The radius of curvature of curved surface is -70mm ± 3.5mm；
The both sides of the third lens are respectively equipped with the 5th curved surface and the 6th curved surface, and the 5th curved surface is bent adjacent to the described 4th
Face, for the 6th curved surface far from the 4th lens, the radius of curvature of the 5th curved surface is ∞, the curvature of the 6th curved surface
Radius is -60mm ± 3mm；
The both sides of 4th lens are respectively equipped with the 7th curved surface and the 8th curved surface, and the 7th curved surface is bent adjacent to the described 6th
Face, for the 8th curved surface far from the 6th curved surface, the radius of curvature of the 7th curved surface is 350mm ± 17.5mm, described the
The radius of curvature of eight curved surfaces is -350mm ± 17.5mm.
3. optical lens according to claim 2, which is characterized in that between second curved surface and the third curved surface
Distance on optical axis is 5mm ± 0.25mm, the 4th curved surface between the 5th curved surface on optical axis at a distance from be 0.5mm
± 0.025mm, the 6th curved surface between the 7th curved surface on optical axis at a distance from be 0.5mm ± 0.025mm.
4. optical lens according to claim 3, which is characterized in that further include sheet glass, the sheet glass is located at described
4th side of the lens far from the third lens, and the material of the substrate of the sheet glass is heat safe optical material.
5. optical lens according to claim 4, which is characterized in that the both sides of the sheet glass are respectively equipped with the first plane
With the second plane, first plane is adjacent to the 8th curved surface, and second plane is far from the 8th curved surface, and described first
The radius of curvature of the radius of curvature of plane and the second plane is ∞, and the radius of curvature of first plane and the second plane
The margin of tolerance is ± 0.05mm.
6. optical lens according to claim 5, which is characterized in that center thickness of the sheet glass on optical axis be
4mm±0.2mm；
Or the 8th curved surface between first plane on optical axis at a distance from be 4mm ± 0.2mm.
7. according to claim 4 to 6 any one of them optical lens, which is characterized in that first lens, described second are thoroughly
Mirror, the third lens, the refractive index of material and the ratio of Abbe number of the 4th lens and the sheet glass are
0.0208955±0.001044776。
8. a kind of laser process equipment, which is characterized in that including claim 1 to 7 any one of them optical lens.
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| CN201610727294.7A CN106199917B (en) | 2016-08-25 | 2016-08-25 | Optical lens and laser process equipment with the optical lens |
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|---|---|---|---|
| CN201610727294.7A CN106199917B (en) | 2016-08-25 | 2016-08-25 | Optical lens and laser process equipment with the optical lens |
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| CN106199917A CN106199917A (en) | 2016-12-07 |
| CN106199917B true CN106199917B (en) | 2018-11-13 |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101846791B (en) * | 2010-06-11 | 2012-01-04 | 深圳市大族激光科技股份有限公司 | F-theta optical lens |
| WO2014067085A1 (en) * | 2012-10-31 | 2014-05-08 | 深圳市大族激光科技股份有限公司 | EXTREME ULTRAVIOLET LASER MARKING Fθ SHOT AND LASER PROCESSING DEVICE |
| KR20150015254A (en) * | 2013-07-31 | 2015-02-10 | 삼성디스플레이 주식회사 | Method of monitoring a laser beam and laser irradiation apparatus using the same |
| CN104175003B (en) * | 2014-09-09 | 2016-05-25 | 大族激光科技产业集团股份有限公司 | A kind of laser-processing system and multi-path laser processing unit (plant) |
-
2016
- 2016-08-25 CN CN201610727294.7A patent/CN106199917B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN106199917A (en) | 2016-12-07 |
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