CN106197577A - Wireless and passive flow transducer based on MEMS technology - Google Patents
Wireless and passive flow transducer based on MEMS technology Download PDFInfo
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- CN106197577A CN106197577A CN201610500974.5A CN201610500974A CN106197577A CN 106197577 A CN106197577 A CN 106197577A CN 201610500974 A CN201610500974 A CN 201610500974A CN 106197577 A CN106197577 A CN 106197577A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/56—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using electric or magnetic effects
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Abstract
The present invention relates to flow transducer and MEMS technology field, a kind of wireless and passive flow transducer based on MEMS technology.A kind of wireless and passive flow transducer based on MEMS technology, including a wireless and passive flow transducer sensing unit in hollow tubular structure；Described wireless and passive flow transducer sensing unit includes that the sensing unit based on MEMS technology in hollow tubular structure, nesting are fixed on the sensing unit substrate in hollow tubular structure of the outside of sensing unit based on MEMS technology and a pair ring-type electrode of two ports of composition wireless and passive flow transducer sensing unit.The present invention is as a kind of Novel flow rate sensor based on MEMS technology, due to its simple in construction, affected less by pipe diameter, self energizing can be realized, so the pipeline flow monitoring system of various environment can be applied to, Monitoring Pinpelines the most in the wild, in the extreme environment system that the traditional flow sensors such as micro-fluidic system flow monitoring is limited.
Description
Technical field
The present invention relates to flow transducer and MEMS technology field, a kind of wireless and passive based on MEMS technology
Flow transducer.
Background technology
The measurement of fluid flow occupies critical role in commercial production and process control.Particularly in the energy, metallurgy, fortune
The fields such as defeated, medical apparatus and instruments, scientific experiments.The size adapting to working environment ability of flow transducer, and certainty of measurement
The indexs such as height the most greatly affect the development of society's every profession and trade.Nowadays to digitized, intellectuality, miniaturization, multi-functional
Change, web development is the inexorable trend that flow transducer develops in the future, and therefore studying high-quality flow transducer is very
Necessary.At present conventional flow sensor can be roughly divided into following a few class:
1. volumetric flow sensor: fluid is constantly full of and discharges the measurement original paper of known volume, thus cumulative counting to obtain stream
The flow of body.Such as Chinese invention patent 201110061455.0
2. turbine type flow sensor: liquid impact flow turbo blade rotates, according to Faraday law of electromagnetic induction by turbine
Rotational be converted into the signal of telecommunication output, obtain flow signal.Such as Chinese invention patent 201110061455.0
3. differential pressure flow sensor: by measuring the pressure difference value occurred before and after when throttling element in fluid flow through conduit,
And obtain associated flow value.Such as Chinese invention patent 200910010946.5
4. electromagnetic flow transducer: conducting liquid flowing cutting magnetic induction line, produces induction electromotive force, because electromotive force becomes with flow velocity
Direct ratio, so corresponding flow value can be learnt.Such as Chinese invention patent 201510265254.0
5. ultrasonic flow sensor: be based on the principle that can carry fluid flow information when ultrasound wave is propagated in a fluid.
Such as Chinese invention patent 201410818583.9
Above-mentioned traditional flow sensors there are intelligent low, it is desirable to have line source is powered, it is impossible to realization is wirelessly transferred, sensor network
The deficiencies such as network management, additionally due to structure is complicated, volume is relatively big, gets involved fluid section too much, is not suitable for the survey of micrometeor
Amount, applied environment is limited.Therefore have and must invent a kind of novel flow sensor.
Summary of the invention
The present invention proposes a kind of based on MEMS technology, can realize being wirelessly transferred, passive self-energizing flow sensor,
There are intelligent low with the existing flow transducer of solution, it is desirable to have line source is powered, it is impossible to realization is wirelessly transferred, sensor network
The deficiencies such as network management, and it is not suitable for the technical problem of the measurement of micrometeor.
The present invention adopts the following technical scheme that realization: a kind of wireless and passive flow transducer based on MEMS technology,
Including a wireless and passive flow transducer sensing unit in hollow tubular structure；Described wireless and passive flow transducer is quick
Sense unit includes that the sensing unit based on MEMS technology in hollow tubular structure, nesting are fixed on sensitivity based on MEMS technology
The sensing unit substrate in hollow tubular structure of the outside of unit and constitute wireless and passive flow transducer sensing unit
A pair ring-type electrode of two ports；Described electrode and adjacent sensing unit based on MEMS technology and sensing unit substrate
Two ends between be tightly connected；The inwall border of electrode is fixed with encapsulated electrode silica gel, electrode and sensitivity based on MEMS technology
Unit electrically connects, and one of them electrode is as high voltage end, and another electrode is as low-voltage end；Also include power management module
And wireless signal transmission module；Described high voltage end is connected with the input anode of power management module, described low-voltage end
It is connected with the input cathode of power management module；The output head anode of power management module and wireless signal transmission module
Positive source is connected, and the negative pole of output end of power management module is connected with the power cathode of wireless signal transmission module；High
Voltage end is also connected with the signal input part of wireless signal transmission module；Sensing unit based on MEMS technology and being fixed with
The composition fluid passage, inner space of the electrode of encapsulated electrode silica gel.
As it is shown in figure 1, wireless and passive flow sensor includes Part I, Part II, Part III.First
It is divided into wireless and passive flow transducer sensing unit part.In this section, the fluid in fluid passage with based on MEMS technology
Sensing unit (dewatering nano material) surface there is friction coupling, produce corresponding voltage letter E, voltage signal is by based on MEMS
The electrode at the sensing unit two ends of technology, is transmitted in Part II and Part III.Part II is wireless and passive flow sensing
Device power management module.In this section, captured voltage signal is through the current rectifying and wave filtering circuit within power management module
After, enter energy-storage units, as the energy of Part III wireless signal transmission module.Part III is wireless and passive flow sensing
Wireless signal transmission module in device.In this section, captured voltage signal enters wireless signal transmission module, through A
D change-over circuit is converted to pulse signal, is modulated in sinusoidal signal produced by oscillating circuit, and the signal after modulation is through amplifying
Circuit, is sent to neighbouring signal storage base station by the voltage signal carrying flow information with wireless form.Terminal control
After device processed extracts signal from signal storage base station, according to corresponding relation between known flow and voltage signal size, calculate
Going out the uninterrupted of correspondence, show and record data, so far flow monitoring process terminates.Described wireless signal transmission module and electricity
Source control module can use existing known circuits.
Further, described wireless signal transmission module and power management module are integrated on same circuit board and make
Tubular structure seals nesting and is assemblied on the outer wall of sensing unit substrate；The two ends of tubular structure circuit board are all connected with electrode
Connect；Also include the package header of a hollow tubular；The described wireless and passive flow transducer being equipped with tubular structure circuit board
Sensing unit nesting is fixed on inside package header；Tubular structure circuit board half is wireless signal transmission module, and second half is
Power management module；The two-port of package header is respectively and fixedly provided with a flange；Flange center's hole internal diameter and fluid passage internal diameter phase
With and the central axis conllinear of flange center's hole internal diameter and fluid passage；Flange is towards end face and the electrode outer side edges of electrode side
It is tightly connected, is tightly connected between flange center's hole inwall and encapsulated electrode silica gel；The work antenna of wireless signal transmission module
It is embedded in package header.
Wireless and passive flow transducer sensing unit and power management module and wireless signal transmitting module are integrated in one
In the package header of tubular, whole device volume is small and exquisite, and parts are all located at, inside package header, improve service life, carry
Use is quite convenient to.
Fig. 4 is that wireless and passive flow transducer network management signal transmits topological diagram, and wireless and passive flow transducer will
Signal transmission, to the signal storage base station of neighbouring node location, is extracted signal by terminal controller from signal storage base station, flat
Ring topology between row Node base station can realize information sharing, accesses any one base station and just may be used reaching terminal controller
Obtain the purpose of full detail.
Experimental data such as Fig. 5 of above-mentioned Part I wireless and passive flow transducer sensing unit part signal collection, 6 institutes
Show: Fig. 5 is that in the case of 420mMKCL solution flow rate is fixed, wireless and passive flow transducer sensing unit part correspondence produces
Current signal and the deionized water of identical flow velocity do not have obvious current signal to be contrasted；Fig. 6 is 420mMKCL solution flow rate
In the case of Gu Ding, voltage signal and the identical flow velocity that wireless and passive flow transducer sensing unit part correspondence produces go from
Sub-water does not has obvious voltage signal to be contrasted.
The present invention is as a kind of Novel flow rate sensor based on MEMS technology, due to its simple in construction, by pipe diameter
Affect less, it is possible to achieve self energizing, so the pipeline flow monitoring system of various environment can be applied to, the most in the wild
Monitoring Pinpelines, in the extreme environment system that the traditional flow sensors such as micro-fluidic system flow monitoring is limited.Additionally, pass according to signal
Defeated network topology structure, it is possible to achieve the intellectuality of sensor and network management.
Accompanying drawing explanation
Fig. 1: the workflow diagram of wireless and passive flow transducer based on MEMS technology.
Fig. 2: wireless and passive flow sensor arrangement figure based on MEMS technology, 1-electrode in figure, 2-package header, 3-without
Line signal transmission module, 4-power management module, 5-sensing unit substrate, 6-flange, 7-fluid passage, 8-encapsulated electrode silicon
Glue, 9-sensing unit based on MEMS technology.
Fig. 3 is the side view of Fig. 2.
Fig. 4: wireless and passive flow transducer network management signal transmission topological diagram, 10-terminal controller, 11-signal
Storage base station, 12-wireless and passive based on MEMS technology flow transducer.
(electric current is in time for experimental data one that Fig. 5 wireless and passive based on MEMS technology flow sensor signal gathers
Change).
(voltage is in time for experimental data two that Fig. 6 wireless and passive based on MEMS technology flow sensor signal gathers
Change).
Fig. 7 wireless signal transmission module and power management module circuit structure diagram.
Detailed description of the invention
A kind of wireless and passive flow transducer based on MEMS technology, including a wireless and passive in hollow tubular structure
Flow transducer sensing unit；Described wireless and passive flow transducer sensing unit include in hollow tubular structure based on
The sensing unit 9 of MEMS technology, nesting be fixed on the outside of sensing unit 9 based on MEMS technology in hollow tubular structure
A pair ring-type electrode 1 of two ports of sensing unit substrate 5 and composition wireless and passive flow transducer sensing unit；Institute
State and be tightly connected between electrode 1 with adjacent sensing unit based on MEMS technology 9 and the two ends of sensing unit substrate 5；Electrode 1
Inwall border be fixed with encapsulated electrode silica gel 8, electrode 1 electrically connects with sensing unit 9 based on MEMS technology, one of them electricity
Pole 1 is as high voltage end, and another electrode is as low-voltage end；Also include power management module 4 and wireless signal transmission module
3；Described high voltage end is connected with the input anode of power management module 4, described low-voltage end and power management module 4
Input cathode is connected；The output head anode of power management module 4 is connected with the positive source of wireless signal transmission module 3
Connecing, the negative pole of output end of power management module 4 is connected with the power cathode of wireless signal transmission module 3；High voltage end also with
The signal input part of wireless signal transmission module 3 is connected；Sensing unit 9 based on MEMS technology and be fixed with encapsulated electrode
The composition fluid passage, inner space 7 of the electrode 1 of silica gel 8.
Described wireless signal transmission module 3 and power management module 4 are integrated on same circuit board and make tubular knot
Structure seals nesting and is assemblied on the outer wall of sensing unit substrate 5；The two ends of tubular structure circuit board are all connected with electrode 1；Also
Package header 2 including a hollow tubular；The described wireless and passive flow transducer sensitivity being equipped with tubular structure circuit board
It is internal that unit nesting is fixed on package header 2；Tubular structure circuit board half is wireless signal transmission module 3, and second half is electricity
Source control module 4；The two-port of package header 2 is respectively and fixedly provided with a flange 6；Flange 6 centre bore internal diameter and fluid passage 7 internal diameter
The central axis conllinear of identical and flange 6 centre bore internal diameter and fluid passage 7；Flange 6 is towards the end face of electrode 1 side and electrode
1 outer side edges is tightly connected, and is tightly connected between flange 6 center bore inner wall and encapsulated electrode silica gel 8；Wireless signal transmission module 3
Work antenna be embedded in package header 2.
Sensing unit 9 based on MEMS technology uses hydrophobicity SnO2Nano material is made.
Electrode 1 width is 0.5cm, and sensing unit substrate 5 uses glass or quartz to make, a length of 9cm, and internal diameter is
1.5cm。
A kind of wireless and passive flow transducer based on MEMS technology, including multiple in hollow tubular structure and be sequentially connected with
Wireless and passive flow transducer sensing unit；Each wireless and passive flow transducer sensing unit includes in hollow tubular structure
Sensing unit based on MEMS technology 9, nesting be fixed on sensing unit 9 based on MEMS technology outside in hollow tubular
The sensing unit substrate 5 of structure and a pair ring-type electricity of two ports of composition wireless and passive flow transducer sensing unit
Pole 1；The inwall border of electrode 1 is fixed with encapsulated electrode silica gel 8, and electrode 1 electrically connects with sensing unit 9 based on MEMS technology；
Sensing unit 9 based on MEMS technology and be fixed with the composition fluid passage, inner space 7 of electrode 1 of encapsulated electrode silica gel 8；
Electrically connect between the electrode of adjacent wireless and passive flow transducer sensing unit；Multiple wireless and passive flows after being sequentially connected with pass
In two electrodes 1 of the head and the tail of sensor sensing unit, one as high voltage end, another electrode is as low-voltage end；Also include
Power management module 4 and wireless signal transmission module 3；Described high voltage end is connected with the input anode of power management module 4
Connecing, described low-voltage end is connected with the input cathode of power management module 4；The output head anode of power management module 4 with
The positive source of wireless signal transmission module 3 is connected, the negative pole of output end of power management module 4 and wireless signal transmission module
The power cathode of 3 is connected；High voltage end also signal input part with wireless signal transmission module 3 is connected；Multiple fluids lead to
Road 7 is mutually communicated.
Below in conjunction with the accompanying drawings and embodiment, the present invention is described in further details:
Embodiment 1: a kind of wireless and passive flow transducer
As shown in Figure 2,3, including package header 2, described package header 2 is embedded with the working day of wireless signal transmission module 3
Line；Described wireless signal transmission module 3 is integrated in same circuit board with power management module 4, seals and is assemblied in sensing unit base
The outer layer at the end 5；Described sensing unit substrate 5 is in side, fluid passage 7 surface attachment；Described sensing unit based on MEMS technology
9 both sides are respectively provided with electrode 1, are respectively connecting to wireless signal transmission module 3 and power management module 4；Described electrode 1 is at stream
Body passage 7 fluid contact level one side seal is coated with encapsulated electrode silica gel 8；Sensor both sides end face is formed and detected fluid respectively
The composition surface that the outer surface of pipe is suitable, and use the modes such as flange 6 to fix.
Described sensing unit based on MEMS technology 9 both sides are respectively provided with electrode 1, all use the annular electro that material silver is made
Pole, annular electrode width is 0.5cm.
Described sensing unit based on MEMS technology 9 uses the tubular hydrophobic nano material made based on MEMS technology,
This example uses hydrophobicity SnO2Nano material, material is attached to cylinder glass or quartz substrate (sensing unit substrate 5)
Inner surface, L in a length of 9cm(Fig. 2), internal diameter is 1.5cm.
Described wireless signal transmission module 3, use ultra-low power consumption wireless modules A PC240, launch power 10mW, transmit away from
From spacious 400 meters.Its work antenna is embedded in package header 2.
Embodiment 2:
Change the sensor caliber yardstick in embodiment 1 and sensor length.And by built-in wireless signal transmission module 3 and electricity
Source control module 4 changes into external, completes the measurement of micrometeor.
Time actually used, in order to obtain more preferable signal, three flow transducers use cascade to detect.Fig. 7
Showing power management module 4 and the circuit of wireless signal transmission module 3, wherein wireless signal transmission module 3 includes single-chip microcomputer
MCU and wireless signal transmitting module MODULE；Power management module circuit include bridge rectifier diode (D1, D2, D3, D4),
Amplifier OP, N-channel enhancement mode field effect transistor Q1 etc..Described three flow transducers 1,2,3 signal output part (high electricity of electrode
Pressure side) series connection after sequentially pass through resistance R1, bridge rectifier diode (D1, D2, D3, D4), diode D5, inductance L1, Schottky
The BATT mouth of diode SD, the VCC mouth of resistance R8 with MCU and MODULE is connected；Inductance L1 one end and Schottky diode
The positive pole of SD connects, and the inductance L1 other end passes through resistance R5, R6 ground connection；Three flow transducer 1,2,3 low-voltage ends are connected to
Between diode D4 and D3, the connection end ground connection of D1, D4；D2, D3 connect end and are connected with the positive pole of D5, and the negative pole of D5 passes through electric capacity
C1 ground connection；The negative pole of D5 is connected with the inductance L1 other end, the positive pole of Schottky diode SD and N-channel enhancement mode field effect transistor
The drain electrode of Q1 connects, and the grid of N-channel enhancement mode field effect transistor Q1 is connected with the outfan of amplifier OP, N-channel enhancement mode field
The source electrode of effect pipe Q1 passes through resistance R4 ground connection, the lining pole of N-channel enhancement mode field effect transistor Q1 and the anti-phase input of amplifier OP
End is connected；The outfan of amplifier OP is connected with the negative pole of Schottky diode SD；The grid of N-channel enhancement mode field effect transistor Q1
Resistance R7 and R6 ground connection are passed through in pole；The end that connects of resistance R7 Yu R6 is connected with the positive input of amplifier OP；Resistance R8 and MCU
One end of being connected of VCC mouth also by Zener diode DZ and resistance R4 ground connection, wherein the positive pole of Zener diode DZ with
Resistance R4 connects；It is connected between the positive pole of Zener diode DZ and the negative pole of Schottky diode SD and has electric capacity C2；MCU's
XTAL1 mouth passes through electric capacity C3 ground connection, and the XTAL2 mouth of MCU passes through electric capacity C4 ground connection, and connecting between XTAL1 mouth and XTAL2 mouth has stone
English crystal resonator X；The signal output part (high voltage end) of three flow transducers is also connected with the P1.7/ADC7 mouth of MCU；
The P2.6 mouth of MCU is connected with the SET_A mouth of MODU, and the P2.7 mouth of MCU is connected with the SET_B mouth of MODU；RXD/P3.0 and MODU
RXD mouth be connected, TXD/P3.1 mouth is connected with the TXD mouth of MODU, and INTO/P3.2 mouth is connected with the AUX mouth of MODU；
The REST mouth of MODU connects electric capacity C5, and the electric capacity C5 other end connects to be had digitally；The REST mouth of MODU connects also by resistance R9
Ground；The other end of resistance R9 is by a switch and electric capacity C5 and being digitally connected.
As it is shown in fig. 7, the voltage signal V1 of three flow transducers, V2, V3 are after series circuit, and a part of signal enters
Enter power management module circuit, be partly into the input end of analog signal P1.7/ADC7 mouth of single-chip microprocessor MCU, as simulation letter
Number input.In electric power management circuit, voltage signal, after full-bridge rectification, is stored in super capacitor C1, through overvoltage
After amplifying circuit and rectification circuit, as the power supply supply of integrated circuit, it is separately input to single-chip microprocessor MCU and wireless signal is sent out
Penetrating in module MODULE, voltage analog signal is after P1.7/ADC7 mouth enters single-chip microcomputer, through the internal A/D convertor circuit of single-chip microcomputer
It is converted into digital signal.In single-chip microcomputer and radio transmitter module communications portion, the P2.6 mouth of single-chip microcomputer and P2.7 mouth are with wireless
The SET_A mouth of transmitter module and SETT-B mouth connect, single-chip microcomputer internal processes control the current potential height of P2.6 mouth and P2.7 mouth,
Control the mode of operation of wireless transmitter module.And realized under program control and wireless transmit by TXD mouth and RXD mouth
The acceptance of module is launched data and accepts data.
Sensing unit based on MEMS technology of the present invention uses following steps to make:
1. material preparation preparation: utilize soft lithographic technique, by SnO2Nano wire self assembly, on NOA81 array microtrabeculae, obtains
To the micro-nano hierarchical structure with hydrophobic property；
2. material modification and transfer: use low-surface energy substance such as: octadecyl trichlorosilane alkane carries out surface modification to material, can
To obtain super hydrophobic surface.And nano material is transferred to silicon dioxide cylindrical inner wall；
3. prepared by electrode: leads copper foil tape as electrode paste at inner-walls of duct two ends using double, draws wire.Double lead copper foil tape with
Nano material is fully contacted, and with insulation silica gel packaging；
4. the wire of extraction is connected in Part II signal processing integrated circuit；
So far flow transducer sensing unit part completes.
It is understood that it will be apparent to those skilled in the art that any amendment, equivalent can be carried out according to the above description
Replace, improve, and all these modifications and variations all should belong to the protection domain of claims of the present invention.
Claims (5)
1. a wireless and passive flow transducer based on MEMS technology, it is characterised in that include in hollow tubular structure
Wireless and passive flow transducer sensing unit；Described wireless and passive flow transducer sensing unit includes tying in hollow tubular
The sensing unit (9) based on MEMS technology of structure, nesting be fixed on the outside of sensing unit (9) based on MEMS technology in sky
The sensing unit substrate (5) of heart tubular structure and constitute a pair of two ports of wireless and passive flow transducer sensing unit
Ring-type electrode (1)；Described electrode (1) and adjacent sensing unit (9) based on MEMS technology and sensing unit substrate (5)
It is tightly connected between two ends；The inwall border of electrode (1) is fixed with encapsulated electrode silica gel (8), electrode (1) with based on MEMS technology
Sensing unit (9) electrical connection, one of them electrode (1) is as high voltage end, and another electrode is as low-voltage end；Also include
Power management module (4) and wireless signal transmission module (3)；Described high voltage end is proper with the input of power management module (4)
Pole is connected, and described low-voltage end is connected with the input cathode of power management module (4)；Power management module (4) defeated
Go out proper pole to be connected with the positive source of wireless signal transmission module (3), the negative pole of output end of power management module (4) and nothing
The power cathode of line signal transmission module (3) is connected；High voltage end also with the signal input part of wireless signal transmission module (3)
It is connected；Sensing unit (9) based on MEMS technology and be fixed with the inner space of electrode (1) of encapsulated electrode silica gel (8)
Constitute fluid passage (7).
2. wireless and passive flow transducer based on MEMS technology as claimed in claim 1, it is characterised in that described wireless communication
Number transport module (3) is integrated on same circuit board with power management module (4) and makes tubular structure and seals nested assembling
On the outer wall of sensing unit substrate (5)；The two ends of tubular structure circuit board are all connected with electrode (1)；Also include a sky
The package header (2) of heart tubular；The described wireless and passive flow transducer sensing unit nesting being equipped with tubular structure circuit board
It is fixed on package header (2) internal；Tubular structure circuit board half is wireless signal transmission module (3), and second half is power supply pipe
Reason module (4)；The two-port of package header (2) is respectively and fixedly provided with a flange (6)；Flange (6) centre bore internal diameter and fluid passage
(7) internal diameter is identical and the central axis conllinear of flange (6) centre bore internal diameter and fluid passage (7)；Flange (6) is towards electrode (1)
The end face of side is tightly connected with electrode (1) outer side edges, seals between flange (6) center bore inner wall and encapsulated electrode silica gel (8)
Connect；The work antenna of wireless signal transmission module (3) is embedded in package header (2).
3. wireless and passive flow transducer based on MEMS technology as claimed in claim 1 or 2, it is characterised in that based on
The sensing unit (9) of MEMS technology uses hydrophobicity SnO2Nano material is made.
4. wireless and passive flow transducer based on MEMS technology as claimed in claim 2, it is characterised in that electrode (1) is wide
Degree is 0.5cm, and sensing unit substrate (5) uses glass or quartz to make, and a length of 9cm, internal diameter is 1.5cm.
5. a wireless and passive flow transducer based on MEMS technology, it is characterised in that include multiple in hollow tubular structure
And the wireless and passive flow transducer sensing unit being sequentially connected with；Each wireless and passive flow transducer sensing unit includes in sky
The sensing unit (9) based on MEMS technology of heart tubular structure, nesting are fixed on outside sensing unit (9) based on MEMS technology
The sensing unit substrate (5) in hollow tubular structure in portion and two ends of composition wireless and passive flow transducer sensing unit
A pair ring-type electrode (1) of mouth；The inwall border of electrode (1) is fixed with encapsulated electrode silica gel (8), electrode (1) with based on
Sensing unit (9) electrical connection of MEMS technology；Sensing unit (9) based on MEMS technology and be fixed with encapsulated electrode silica gel
(8) the composition fluid passage, inner space (7) of electrode (1)；The electrode of adjacent wireless and passive flow transducer sensing unit it
Between electrically connect；In two electrodes (1) of head and the tail of multiple wireless and passive flow transducer sensing units after being sequentially connected with, a work
For high voltage end, another electrode is as low-voltage end；Also include power management module (4) and wireless signal transmission module (3)；
Described high voltage end is connected with the input anode of power management module (4), described low-voltage end and power management module (4)
Input cathode be connected；The output head anode of power management module (4) and the positive source of wireless signal transmission module (3)
Being connected, the negative pole of output end of power management module (4) is connected with the power cathode of wireless signal transmission module (3)；High electricity
Pressure side also signal input part with wireless signal transmission module (3) is connected；Multiple fluid passages (7) are mutually communicated.
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| CN107037087A (en) * | 2017-05-08 | 2017-08-11 | 中国电建集团中南勘测设计研究院有限公司 | A kind of sensor and measuring method for measuring Air Concentration in Water Flow |
| CN109708708A (en) * | 2019-01-24 | 2019-05-03 | 江西百川水表有限公司 | Intellectual water meter |
| CN110602662A (en) * | 2019-09-24 | 2019-12-20 | 广东聚源管业实业有限公司 | System for transmitting sewer pipeline data based on wireless sensor |
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| CN104864921A (en) * | 2015-06-04 | 2015-08-26 | 山东胜油固井工程技术有限公司 | Capacitive dry powder flow meter |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107037087A (en) * | 2017-05-08 | 2017-08-11 | 中国电建集团中南勘测设计研究院有限公司 | A kind of sensor and measuring method for measuring Air Concentration in Water Flow |
| CN109708708A (en) * | 2019-01-24 | 2019-05-03 | 江西百川水表有限公司 | Intellectual water meter |
| CN110602662A (en) * | 2019-09-24 | 2019-12-20 | 广东聚源管业实业有限公司 | System for transmitting sewer pipeline data based on wireless sensor |
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| CN106197577B (en) | 2019-01-04 |
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