CN106168788B - A kind of carrying disc rotation controller and its control method - Google Patents
A kind of carrying disc rotation controller and its control method Download PDFInfo
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- CN106168788B CN106168788B CN201610616124.1A CN201610616124A CN106168788B CN 106168788 B CN106168788 B CN 106168788B CN 201610616124 A CN201610616124 A CN 201610616124A CN 106168788 B CN106168788 B CN 106168788B
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/04—Programme control other than numerical control, i.e. in sequence controllers or logic controllers
- G05B19/05—Programmable logic controllers, e.g. simulating logic interconnections of signals according to ladder diagrams or function charts
- G05B19/054—Input/output
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- Automation & Control Theory (AREA)
- Chemical Vapour Deposition (AREA)
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Abstract
The embodiment of the invention discloses a kind of carrying disc rotation controller and its control methods, by constantly detecting carrying disk rotating speed and compared with preset rotating speed of target, to form feedback regulation to adjust carrying disk rotating speed, go out to be suitble to the reaction chamber gaseous environment of the real-time revolving speed according to the real-time rotational speed regulation of the carrier detected simultaneously, solves the problems, such as that reaction cavity environment and real-time revolving speed be not corresponding during revolving speed adjusts.The method comprise the steps that carrier rotational speed control module, reaction cavity Gas Control Module, servo motor and pneumatic operated valve, the carrier rotational speed control module is communicated to connect with the reaction cavity Gas Control Module and the servo motor respectively, the reaction cavity Gas Control Module and pneumatic operated valve communication connection.
Description
Technical field
The present invention relates to control field more particularly to a kind of carrying disc rotation controller and its control methods.
Background technique
MOCVD is a kind of novel vapour phase epitaxy growing technology to grow up on the basis of vapor phase epitaxial growth (VPE)
It using III race, the organic compound of II race's element and V, VI race's element hydride etc. as crystal growth source material, with heat point
Solution reactive mode carries out vapour phase epitaxy on substrate, growth various III-V race, group Ⅱ-Ⅵ compound semiconductor and theirs is more
The thin layer monocrystal material of first solid solution.Crystal growth in usual MOCVD system is all in normal pressure or low pressure (10-100Torr)
Lead to down in quartzy (stainless steel) reaction chamber of cold wall of H2 and carries out.
In order to guarantee the quality of epitaxial wafer growth, need to realize substrate supporting in reaction chamber by environment in control reaction chamber
The control of disk high-speed smooth.The main method of control substrate supporting disk high-speed smooth operation is single control reaction chamber gas at present
Air-flow in discharge or adjusting reaction chamber.
However, current method have the defects that it is certain: do not detect carrier actual speed and form feedback regulation and control
Motor rotation processed will not without adjusting the corresponding gaseous environment of this revolving speed according to the real-time revolving speed of the carrier detected yet
Two links of reaction chamber air inlet and exhaust combine to control the environment in reaction chamber, and then cannot effectively control in reaction chamber
Environment cannot realize that substrate supporting disk high-speed smooth controls in reaction chamber, so the quality of epitaxial wafer growth can be reduced.
Summary of the invention
The embodiment of the invention provides a kind of carrying disc rotation controller and its control methods, by constantly detecting carrying
The real-time revolving speed of disk and compared with preset rotating speed of target, to form feedback regulation to adjust carrying disk rotating speed, together
When gone out to be suitble to the reaction chamber gaseous environment of the real-time revolving speed according to the rotational speed regulation of the actual bearer disk detected, solve and turning
The reaction cavity environment problem not corresponding with real-time revolving speed during velocity modulation is whole.
A kind of carrying disc rotation controller provided in an embodiment of the present invention characterized by comprising carrying disk rotating speed control
Molding block, reaction cavity Gas Control Module, servo motor and pneumatic operated valve, the carrier rotational speed control module respectively with it is described
Reaction cavity Gas Control Module and servo motor communication connection, the reaction cavity Gas Control Module and described pneumatic
Valve communication connection；
Wherein, the carrier rotational speed control module, for getting the real-time tach signal of the servo motor feedback,
And charge flow value and the calculating of air flow value out are carried out according to the corresponding real-time revolving speed of the real-time tach signal, and will calculating
As a result corresponding control signal be sent to the reaction cavity Gas Control Module control the pneumatic operated valve carry out with it is calculated
The charge flow value and the corresponding adjusting of air flow value out.
Preferably,
The carrier rotational speed control module specifically includes PLC controller unit, servo motor driving unit, carrier and turns
Fast measuring unit；
The output end of the PLC controller unit respectively with the servo motor driving unit input terminal, the reaction chamber
The connection of body Gas Control Module；
The output end of the servo motor driving unit and the servo motor input terminal communicate to connect；
The input terminal of the carrier rotation speed measurement unit is communicated with the output end of the photoelectric encoder of the servo motor
Connection；
The input terminal of the output end of the carrier rotation speed measurement unit and the PLC controller unit communicates to connect.
Preferably,
The reaction cavity gas flow control module includes charge flow rate control unit, outlet flow controlling unit；
The charge flow rate control unit and the carrier rotational speed control module communicate to connect；
The outlet flow controlling unit and the carrier rotational speed control module communicate to connect.
Preferably,
The servo motor driving unit, for driving the servo motor to rotate；
The photoelectric encoder, for acquiring the tach signal of the servo motor, and by the real-time of the servo motor
Tach signal is transmitted to the carrier rotation speed measurement unit；
The carrier rotation speed measurement unit, described real-time turn for carrying out the photoelectric encoder received transmitting
Fast signal passes to the PLC controller unit；
The PLC controller unit, by carrying out charge flow value according to the real-time revolving speed and out based on air flow value
It calculates, and the corresponding control signal of calculated result is sent to the reaction cavity Gas Control Module and controls the pneumatic operated valve progress
Adjusting corresponding with the calculated charge flow value and the air flow value out.
Preferably,
The PLC controller unit is also used to the described real-time of the received carrier rotation speed measurement unit transmitting
The revolving speed scheduling signals of tach signal and the servo motor are compared, if the corresponding revolving speed dispatch value of revolving speed scheduling signals and
The corresponding initial speed value difference of the real-time tach signal then continues to adjust the revolving speed of servo motor, otherwise stops adjusting servo
The revolving speed of motor.
Preferably,
The charge flow rate control unit is according to the corresponding control signal control of the calculated charge flow value
Pneumatic operated valve carries out adjusting corresponding with the calculated charge flow value；
The outlet flow controlling unit according to it is calculated it is described go out described in the corresponding control signal of air flow value controls
Pneumatic operated valve carries out and the calculated corresponding adjusting of air flow value out.
A kind of control method of carrying disc rotation controller described in one kind provided in an embodiment of the present invention, including carrying
Disk rotating speed control module, reaction cavity Gas Control Module, servo motor and pneumatic operated valve, the carrier rotational speed control module point
Do not communicated to connect with the reaction cavity Gas Control Module and the servo motor, the reaction cavity Gas Control Module and
The pneumatic operated valve communication connection；
The control method includes:
S1, the carrier rotational speed control module get the real-time tach signal of the servo motor feedback；
S2, the carrier rotational speed control module carry out inlet air flow according to the corresponding real-time revolving speed of the real-time tach signal
The calculating of magnitude and out air flow value；
The corresponding control signal of calculated result is sent to the reaction cavity gas by S3, the carrier rotational speed control module
Body control module controls the pneumatic operated valve and carries out tune corresponding with the calculated charge flow value and the air flow value out
Section.
Preferably,
The control method further includes that the carrier rotation speed measurement unit of the carrier rotational speed control module will pass through institute
The real-time tach signal for stating the photoelectric encoder acquisition of servo motor passes to the PLC of the carrier rotational speed control module
Controller unit.
Preferably,
The carrier rotation speed measurement unit of the carrier rotational speed control module will be compiled by the photoelectricity of the servo motor
The PLC controller unit that the real-time tach signal of code device acquisition passes to the carrier rotational speed control module specifically wraps
It includes:
The real-time tach signal is passed to the carrier rotational speed control module by the carrier rotation speed measurement unit
PLC controller unit；
The PLC controller unit is by the revolving speed scheduling signals of the received real-time tach signal and the servo motor
It is compared, if the corresponding revolving speed dispatch value of the revolving speed scheduling signals and the corresponding initial speed value of the real-time tach signal
Revolving speed that is different then continuing to adjust servo motor, otherwise stops the revolving speed for adjusting servo motor.
Preferably,
The control method specifically includes:
301, the carrier rotation speed measurement unit of the carrier rotational speed control module gets the servo motor
The real-time tach signal of feedback simultaneously controls the PLC that the real-time tach signal passes to the carrier rotational speed control module
Device unit processed；
302, the PLC controller unit of the carrier rotational speed control module is corresponding according to the real-time tach signal
The real-time revolving speed carry out charge flow value and the calculating of air flow value out；
303, the PLC controller unit of the carrier rotational speed control module is corresponding by calculated charge flow value
Control signal and the corresponding control signal of air flow value is sent respectively to the described of the reaction cavity Gas Control Module out
Charge flow rate control unit and the outlet flow controlling unit control the pneumatic operated valve and carry out and the calculated inlet air flow
Magnitude and the corresponding adjusting of air flow value out.
As can be seen from the above technical solutions, the embodiment of the present invention has the advantage that
1, it by measuring the revolving speed of carrier, is then calculated according to the real-time revolving speed of detection corresponding with the real-time revolving speed
Charge flow rate and throughput out, adjust out the reaction chamber gaseous environment for being suitble to the real-time revolving speed, solve and adjusted in revolving speed
The reaction cavity environment problem not corresponding with real-time revolving speed in journey, and then make the running environment of reaction cavity carrying disc spins control
It is optimal, guarantees the quality of epitaxial wafer growth.
2, in the adjustment process of reaction chamber gaseous environment, by the way that two links of reaction chamber air inlet and exhaust are combined,
More rapidly, optimal reaction chamber gaseous environment is efficiently adjusted out, is conducive to keep carrier stable rotation, guarantees that epitaxial wafer is raw
Long quality.
3, by measuring the revolving speed of carrier, and servo motor is formed compared with the revolving speed scheduling signals of servo motor and is turned
The feedback regulation of speed, so that entire speed regulation process is more rapid, stablizes.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention without any creative labor, may be used also for those of ordinary skill in the art
To obtain other attached drawings according to these attached drawings.
Fig. 1 is a kind of structural representation of one embodiment of the carrying disc rotation controller provided in the embodiment of the present invention
Figure；
Fig. 2 is a kind of one embodiment of the control method of the carrying disc rotation controller provided in the embodiment of the present invention
Flow diagram；
Fig. 3 is a kind of another implementation of the control method of the carrying disc rotation controller provided in the embodiment of the present invention
The flow diagram of example.
Specific embodiment
The embodiment of the invention provides a kind of carrying disc rotation controller and its control methods, by constantly detecting carrying
The real-time revolving speed of disk and compared with preset rotating speed of target, to form feedback regulation to adjust carrying disk rotating speed, together
When gone out to be suitble to the reaction chamber gaseous environment of the real-time revolving speed according to the rotational speed regulation of the real-time carrier detected, solve and turning
The reaction cavity environment problem not corresponding with real-time revolving speed during velocity modulation is whole.
In order to make the invention's purpose, features and advantages of the invention more obvious and easy to understand, below in conjunction with the present invention
Attached drawing in embodiment, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that disclosed below
Embodiment be only a part of the embodiment of the present invention, and not all embodiment.Based on the embodiments of the present invention, this field
Those of ordinary skill's all other embodiment obtained without making creative work, belongs to protection of the present invention
Range.
Referring to Fig. 1, a kind of one embodiment of the carrying disc rotation controller provided in the embodiment of the present invention includes:
Carrier rotational speed control module 1, reaction cavity Gas Control Module 2, servo motor 3 and pneumatic operated valve 5, carrying disk rotating speed control mould
Block 1 is communicated to connect with reaction cavity Gas Control Module 2 and servo motor 3 respectively, reaction cavity Gas Control Module 2 and pneumatic
Valve 5 communicates to connect；
Wherein, carrier rotational speed control module 1, the real-time tach signal fed back for getting servo motor 3, and according to
The corresponding real-time revolving speed of tach signal carries out charge flow value and the calculating of air flow value out in real time, and calculated result is corresponding
Control signal is sent to reaction cavity Gas Control Module 2 and controls the progress of pneumatic operated valve 5 and calculated charge flow value and outlet
The corresponding adjusting of flow value.
Aforementioned carrier rotational speed control module 1 specifically includes PLC controller unit 11, servo motor driving unit 12, holds
Load plate rotation speed measurement unit 13；
The output end of PLC controller unit 11 respectively with 12 input terminal of servo motor driving unit, reaction cavity gas control
Molding block 2 connects；
The output end of servo motor driving unit 12 and the input terminal of servo motor 3 communicate to connect；
The output end of the photoelectric encoder 4 of the input terminal and servo motor 3 of carrier rotation speed measurement unit 13 communicates to connect；
The output end of carrier rotation speed measurement unit 12 and the input terminal of PLC controller unit 11 communicate to connect.
Previous reaction cavity gas flow control module 2 includes charge flow rate control unit 21, outlet flow controlling unit
22；
Charge flow rate control unit 21 and carrier rotational speed control module 1 communicate to connect；
Outlet flow controlling unit 22 and carrier rotational speed control module 1 communicate to connect.
Servo motor driving unit 12, for driving servo motor 3 to rotate；
Photoelectric encoder 4 is passed for acquiring the tach signal of servo motor 3, and by the real-time tach signal of servo motor 3
It is delivered to carrier rotation speed measurement unit 13；
Carrier rotation speed measurement unit 13, the real-time tach signal that the transmitting of photoelectric encoder 4 for will receive pass
Pass PLC controller unit 11；
PLC controller unit 11, for carrying out charge flow value and the calculating of air flow value out according to real-time revolving speed, and will
The corresponding control signal of calculated result is sent to reaction cavity Gas Control Module 2 and controls pneumatic operated valve progress and calculated air inlet
The corresponding adjusting of flow value and out air flow value.
Further, aforementioned PLC controller unit 11 is also used to transmit received carrier rotation speed measurement unit 13
The revolving speed scheduling signals of real-time tach signal and servo motor 3 are compared, if the corresponding revolving speed dispatch value of revolving speed scheduling signals
Initial speed value corresponding with real-time tach signal is different, continues the revolving speed for adjusting servo motor 3, otherwise stops adjusting servo
The revolving speed of motor 3.
Further, charge flow rate control unit 21 controls gas according to the corresponding control signal of calculated charge flow value
Dynamic valve 5 carries out adjusting corresponding with calculated charge flow value；
Outlet flow controlling unit 22 is carried out according to the corresponding control signal control pneumatic operated valve 5 of calculated air flow value out
Adjusting corresponding with calculated air flow value out.
Referring to Fig. 2, a kind of one kind provided in the embodiment of the present invention control for carrying disc rotation controller above-mentioned
Method, including carrier rotational speed control module, reaction cavity Gas Control Module, servo motor and pneumatic operated valve carry disk rotating speed
Control module is communicated to connect with reaction cavity Gas Control Module and servo motor respectively, and reaction cavity Gas Control Module is gentle
Dynamic valve communication connection；
The control method includes:
S1, carrier rotational speed control module get the real-time tach signal of servo motor feedback；
S2, carrier rotational speed control module carry out charge flow value according to the corresponding real-time revolving speed of real-time tach signal and go out
The calculating of air flow value；
The corresponding control signal of calculated result is sent to reaction cavity gas control mould by S3, carrier rotational speed control module
Block controls pneumatic operated valve and carries out adjusting corresponding with calculated charge flow value and out air flow value.
The above is that a kind of process of control method for carrying disc rotation controller is described in detail, below will be right
The control method of control device carries out further detailed description, please refers to Fig. 2 and Fig. 3, one provided in the embodiment of the present invention
Another embodiment of the control method of carrying disc rotation controller kind above-mentioned includes:
The servo motor rotation is driven by the servo motor driving unit first, the control method in the present embodiment
The following steps are included:
Further, control method above-mentioned further includes that the carrier rotation speed measurement unit of carrier rotational speed control module is incited somebody to action
The PLC controller of carrier rotational speed control module is passed to by the real-time tach signal that the photoelectric encoder of servo motor acquires
Unit.
The carrier rotation speed measurement unit of aforementioned carrier rotational speed control module will be compiled by the photoelectricity of the servo motor
The PLC controller unit that the real-time tach signal of code device acquisition passes to carrier rotational speed control module specifically includes:
Real-time tach signal is passed to the PLC controller list of carrier rotational speed control module by carrier rotation speed measurement unit
Member；
PLC controller unit compares the revolving speed scheduling signals of received real-time tach signal and the servo motor
Compared with, if the corresponding revolving speed dispatch value of revolving speed scheduling signals with real-time tach signal corresponding initial speed value difference if continue to adjust
Otherwise the revolving speed of servo motor stops the revolving speed for adjusting servo motor.
Aforementioned control method specifically includes:
301, the carrier rotation speed measurement unit of carrier rotational speed control module gets turning in real time for servo motor feedback
Fast signal and the PLC controller unit that real-time tach signal is passed to carrier rotational speed control module；
302, the PLC controller unit of carrier rotational speed control module according to the corresponding real-time revolving speed of real-time tach signal into
The calculating of traveling air flow value and out air flow value；
303, the PLC controller unit of carrier rotational speed control module believes the corresponding control of calculated charge flow value
Number and the corresponding control signal of air flow value is sent respectively to the charge flow rate control unit of reaction cavity Gas Control Module out
Outlet flow controlling unit controls pneumatic operated valve and carries out adjusting corresponding with calculated charge flow value and out air flow value.
In order to make it easy to understand, below by a kind of carrying disc spins control with a concrete application scene to embodiment illustrated in fig. 1
The control method that device processed rotates carrier is specifically described, and application examples includes:
After system electrification, initialization carrier rotational speed control module 1, reaction cavity gas flow control module 2, servo electricity
Machine 3 and photoelectric encoder 4.
Photoelectric encoder 4 with difference output acquires the real-time tach signal of servo motor 3, and by servo motor 3
Real-time tach signal is transmitted to input/output (I/O) mouth with 8 road analog/digitals by carrier rotation speed measuring module 13
PLC controller unit 11.Under the scheduling of PLC controller unit 11, by being incited somebody to action after the processing of servo motor drive module 12
The revolving speed scheduling signals of PLC controller unit 11 pass to servo motor 3, and then adjust the revolving speed of servo motor 3.
Simultaneously PLC controller unit 11 calculated according to the real-time tach signal that carrier rotation speed measuring module 13 transmit and
The corresponding charge flow rate of the real-time revolving speed and out throughput, then the I/O mouth of PLC controller unit 11 by charge flow rate and goes out
The corresponding control signal of throughput is delivered separately to charge flow rate control unit 21 and outlet flow controlling unit 22, and then controls
SNC pneumatic operated valve adjusts charge flow rate and out throughput, to adjust out the reaction chamber gaseous environment for being suitble to the real-time revolving speed.
It is apparent to those skilled in the art that for convenience and simplicity of description, the system of foregoing description,
The specific work process of device and unit, can refer to corresponding processes in the foregoing method embodiment, and details are not described herein.
In several embodiments provided herein, it should be understood that disclosed system, device and method can be with
It realizes by another way.For example, the apparatus embodiments described above are merely exemplary, for example, the unit
It divides, only a kind of logical function partition, there may be another division manner in actual implementation, such as multiple units or components
It can be combined or can be integrated into another system, or some features can be ignored or not executed.Another point, it is shown or
The mutual coupling, direct-coupling or communication connection discussed can be through some interfaces, the indirect coupling of device or unit
It closes or communicates to connect, can be electrical property, mechanical or other forms.
The unit as illustrated by the separation member may or may not be physically separated, aobvious as unit
The component shown may or may not be physical unit, it can and it is in one place, or may be distributed over multiple
In network unit.It can select some or all of unit therein according to the actual needs to realize the mesh of this embodiment scheme
's.
It, can also be in addition, the functional units in various embodiments of the present invention may be integrated into one processing unit
It is that each unit physically exists alone, can also be integrated in one unit with two or more units.Above-mentioned integrated list
Member both can take the form of hardware realization, can also realize in the form of software functional units.
If the integrated unit is realized in the form of SFU software functional unit and sells or use as independent product
When, it can store in a computer readable storage medium.Based on this understanding, technical solution of the present invention is substantially
The all or part of the part that contributes to existing technology or the technical solution can be in the form of software products in other words
It embodies, which is stored in a storage medium, including some instructions are used so that a computer
Equipment (can be personal computer, server or the network equipment etc.) executes the complete of each embodiment the method for the present invention
Portion or part steps.And storage medium above-mentioned includes: USB flash disk, mobile hard disk, read-only memory (ROM, Read-Only
Memory), random access memory (RAM, Random Access Memory), magnetic or disk etc. are various can store journey
The medium of sequence code.
The above, the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations；Although referring to before
Stating embodiment, invention is explained in detail, those skilled in the art should understand that: it still can be to preceding
Technical solution documented by each embodiment is stated to modify or equivalent replacement of some of the technical features；And these
It modifies or replaces, the spirit and scope for technical solution of various embodiments of the present invention that it does not separate the essence of the corresponding technical solution.
Claims (8)
1. a kind of carrying disc rotation controller characterized by comprising carrier rotational speed control module, reaction cavity gas
Control module, servo motor and pneumatic operated valve, the carrier rotational speed control module control mould with the reaction cavity gas respectively
Block and servo motor communication connection, the reaction cavity Gas Control Module and pneumatic operated valve communication connection；
Wherein, the carrier rotational speed control module, for getting the real-time tach signal of the servo motor feedback, and root
Charge flow value and the calculating of air flow value out are carried out according to the corresponding real-time revolving speed of the real-time tach signal, and by calculated result
Corresponding control signal be sent to the reaction cavity Gas Control Module control the pneumatic operated valve carry out with it is calculated described
Charge flow value and the corresponding adjusting of air flow value out；
The carrier rotational speed control module specifically includes PLC controller unit, servo motor driving unit, carrying disk rotating speed and surveys
Measure unit；
The output end of the PLC controller unit respectively with the servo motor driving unit input terminal, the reaction cavity gas
The connection of body control module；
The output end of the servo motor driving unit and the input terminal of the servo motor communicate to connect；
The output end of the photoelectric encoder of the input terminal and servo motor of the carrier rotation speed measurement unit communicates to connect；
The input terminal of the output end of the carrier rotation speed measurement unit and the PLC controller unit communicates to connect；
The servo motor driving unit, for driving the servo motor to rotate；
The photoelectric encoder, for acquiring the tach signal of the servo motor, and by the real-time revolving speed of the servo motor
Signal is transmitted to the carrier rotation speed measurement unit；
The carrier rotation speed measurement unit, the real-time revolving speed for carrying out the photoelectric encoder received transmitting are believed
Number pass to the PLC controller unit；
The PLC controller unit, for carrying out charge flow value and the calculating of air flow value out according to the real-time revolving speed, and
The corresponding control signal of calculated result is sent to the reaction cavity Gas Control Module and controls the pneumatic operated valve progress and meter
The charge flow value calculated and the corresponding adjusting of air flow value out.
2. carrying disc rotation controller according to claim 1, which is characterized in that the reaction cavity gas flow control
Molding block includes charge flow rate control unit, outlet flow controlling unit；
The charge flow rate control unit and the carrier rotational speed control module communicate to connect；
The outlet flow controlling unit and the carrier rotational speed control module communicate to connect.
3. carrying disc rotation controller according to claim 1, which is characterized in that the PLC controller unit is also used
In the revolving speed tune for the real-time tach signal and the servo motor for transmitting the received carrier rotation speed measurement unit
Degree signal is compared, if the corresponding revolving speed dispatch value of revolving speed scheduling signals and the corresponding initial speed of the real-time tach signal
Value difference then continues to adjust the revolving speed of servo motor, otherwise stops the revolving speed for adjusting servo motor.
4. carrying disc rotation controller according to claim 2, which is characterized in that the charge flow rate control unit root
It is carried out and the calculated inlet air flow according to the calculated charge flow value corresponding control signal control pneumatic operated valve
The corresponding adjusting of magnitude；
The outlet flow controlling unit controls described pneumatic according to the corresponding control signal of the calculated air flow value out
Valve carries out and the calculated corresponding adjusting of air flow value out.
5. a kind of a kind of control method of carrying disc rotation controller as described in any one of Claims 1-4, special
Sign is, comprising:
S1, the carrier rotational speed control module get the real-time tach signal of the servo motor feedback；
S2, the carrier rotational speed control module carry out charge flow value according to the corresponding real-time revolving speed of the real-time tach signal
The calculating of air flow value out；
The corresponding control signal of calculated result is sent to the reaction cavity gas control by S3, the carrier rotational speed control module
Molding block controls the pneumatic operated valve and carries out adjusting corresponding with the calculated charge flow value and the air flow value out.
6. the control method of carrying disc rotation controller according to claim 5, which is characterized in that further include described hold
The carrier rotation speed measurement unit of load plate rotational speed control module will be described in the photoelectric encoder acquisition by the servo motor
Real-time tach signal passes to the PLC controller unit of the carrier rotational speed control module.
7. the control method of carrying disc rotation controller according to claim 6, which is characterized in that the carrier turns
The carrier rotation speed measurement unit of fast control module will be turned in real time by the described of the photoelectric encoder acquisition of the servo motor
The PLC controller unit that fast signal passes to the carrier rotational speed control module specifically includes:
The real-time tach signal is passed to the PLC of the carrier rotational speed control module by the carrier rotation speed measurement unit
Controller unit；
The PLC controller unit carries out the revolving speed scheduling signals of the received real-time tach signal and the servo motor
Compare, if the corresponding revolving speed dispatch value of the revolving speed scheduling signals is with the real-time tach signal, corresponding initial speed value is different
Then continue the revolving speed of adjusting servo motor, otherwise stops the revolving speed for adjusting servo motor.
8. a kind of control method for carrying disc rotation controller according to claim 5, which is characterized in that the control
Method specifically includes:
301, the carrier rotation speed measurement unit of the carrier rotational speed control module gets the servo motor feedback
The real-time tach signal and the real-time tach signal is passed to the PLC controller of the carrier rotational speed control module
Unit；
302, the PLC controller unit of the carrier rotational speed control module is according to the corresponding institute of the real-time tach signal
It states real-time revolving speed and carries out charge flow value and the calculating of air flow value out；
303, the PLC controller unit of the carrier rotational speed control module is by the corresponding control of calculated charge flow value
The corresponding control signal of signal processed and out air flow value is sent respectively to the air inlet of the reaction cavity Gas Control Module
Flow controlling unit and the outlet flow controlling unit control the pneumatic operated valve and carry out and the calculated charge flow value
Adjusting corresponding with the air flow value out.
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| CN113945728A (en) * | 2021-10-18 | 2022-01-18 | 复旦大学 | Epitaxial reactor tray base rotational speed detection device and epitaxial reactor |
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| CN101470447A (en) * | 2007-12-26 | 2009-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transmission cavity pressure control system and method |
| CN104696251A (en) * | 2014-11-24 | 2015-06-10 | 沈阳工业大学 | System and method for intelligently controlling rotation speed of variable-frequency fan |
| CN204878693U (en) * | 2015-06-05 | 2015-12-16 | 北京博力威格智能传控设备有限公司 | Output speed controlling means of fluid coupling ware |
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| US20100063639A1 (en) * | 2008-07-22 | 2010-03-11 | Multi-Chem Group, Llc | Methods and Systems for Applying and Monitoring Multiple Chemical Treatments in Gas Wells |
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| JPH01134605A (en) * | 1987-11-20 | 1989-05-26 | Fanuc Ltd | Numerical controller |
| JPH04195408A (en) * | 1990-11-28 | 1992-07-15 | Yaskawa Electric Corp | Servo motor control method |
| CN101470447A (en) * | 2007-12-26 | 2009-07-01 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Transmission cavity pressure control system and method |
| CN104696251A (en) * | 2014-11-24 | 2015-06-10 | 沈阳工业大学 | System and method for intelligently controlling rotation speed of variable-frequency fan |
| CN204878693U (en) * | 2015-06-05 | 2015-12-16 | 北京博力威格智能传控设备有限公司 | Output speed controlling means of fluid coupling ware |
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