CN106168526A - A kind of rotor-support-foundation system on-line dynamic balancing system and method - Google Patents
A kind of rotor-support-foundation system on-line dynamic balancing system and method Download PDFInfo
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- CN106168526A CN106168526A CN201610670935.XA CN201610670935A CN106168526A CN 106168526 A CN106168526 A CN 106168526A CN 201610670935 A CN201610670935 A CN 201610670935A CN 106168526 A CN106168526 A CN 106168526A
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- signal
- rotor
- support
- foundation system
- dynamic balancing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M1/00—Testing static or dynamic balance of machines or structures
- G01M1/30—Compensating unbalance
- G01M1/36—Compensating unbalance by adjusting position of masses built-in the body to be tested
Abstract
The present invention provides a kind of rotor-support-foundation system on-line dynamic balancing system and method, including: signal transducer, gather the unbalance vibration information of rotor-support-foundation system and be converted into analogue signal, being sent to signal picker；Signal picker, converts analog signals into digital signal, and after digital signal is carried out noise reduction, Filtering Processing, delivers to data handling system；Data handling system, calculates, processes the digital signal received, and obtains the unbalance mass of rotor-support-foundation system and phase information and produces actuating signal, being sent to signal projector；Signal projector, is transmitted to balance regulator by actuating signal；Balance regulator is generation action inside this actuator, thus adjusts the amount of unbalance of rotor-support-foundation system, it is achieved the on-line dynamic balancing of rotor-support-foundation system.The present invention realizes rotor-support-foundation system and completes dynamic balancing in the case of not shutting down, and removes from tradition experiment of dynamic balancing and repeats the machine that opens, outage, it is adaptable to the system that should not shut down shuts down, to reduce, the economic loss brought.
Description
Technical field
The present invention relates to rotor on-line dynamic balancing field, in particular it relates to a kind of by computer calculate amount of unbalance and
Phase place also controls external balance regulator and realizes the system and method for rotor-support-foundation system on-line dynamic balancing.
Background technology
Actual rotor is inevitably present error during processing and manufacturing, installation etc., causes its geometrical axis and rotation
Shaft axis is misaligned.When the rotor is turning, the power system that the centrifugal intertia force of each elementary mass of rotor is formed is not a balance
Power system, now, claims rotor to have uneven or unbalance.The imbalance of rotor is the driving source that rotating machinery is main.Statistics
Display, rotating machinery accounts for 60%-70% due to what vibration cause lost efficacy, wherein due to accounting for that rotor unbalance reason lost efficacy
30%.
Experiment of dynamic balancing under existence conditions needs first rotor to be disassembled to be put on dynamic balancing machine from machine to complete
Experiment of dynamic balancing, installs and goes back；Or carry out spot dynamic balance.Both approaches complex steps, time-consuming, and need
Repeatedly to shut down the machine of opening, be not suitable for doing rapid dynamic balance.Such as, for large rotor systems such as steam turbines, shut down and once can carry
Carry out huge economic loss, be not suitable for traditional dynamic balance method.
Based on above reason, engender self-balancing technology.Application self-balancing technology can realize rotor-support-foundation system not
Dynamic balancing is completed in the case of shutdown.Rotor-support-foundation system refers to including rotating shaft, rotating disk, bearing, bearing block etc. including all appurtenances
Whole set of system.
Existing self-balancing equipment design principle specifically include that change Mass Distribution, increase (minimizing) quality and compensation from
Mental and physical efforts three kinds.
Changing Mass Distribution method is to be moved in ring by the mass in motor or field drives balancing head, makes to put down
In weighing apparatus head, Mass Distribution changes, thus balances the unbalance mass of rotor-support-foundation system.Common are now Zhejiang University's research and development
Electromagnetic balancing head.
Increasing (minimizing) mass method is in the running of rotor, by certain means in the uneven phase of rotor-support-foundation system
Certain mass is added or removed at Wei, thus completes the on-line dynamic balancing of rotor-support-foundation system.Common increase quality method is with spray
The liquid etc. of the solid of high-speed motion, rapid solidification is injected in the unbalance phase surface of rotor-support-foundation system by head, and mass bonds
On rotor-support-foundation system surface, thus balance its unbalance mass.But this method easily makes mass bonding insecure, it is impossible to full
The requirement of foot length time service.
Compensating centrifugal force method is to rotor one size of applying is certain and rotor rotates same frequency by the means of electromagnetism
Electromagnetic force, the vibration that this power causes can be offset the initial unbalance vibration of rotor, thus be reached the online from flat of rotor-support-foundation system
Weighing apparatus purpose.At present this on the one hand do reasonable be diagnosis and the spontaneous recovery Engineering Research Center of Beijing University of Chemical Technology.
Existing method has the drawback that:
1. can only realize the dynamic balancing of rotor-support-foundation system in a short time, it is impossible to ensure the operating steady in a long-term of rotor-support-foundation system；
2. can only realize at laboratory, it is impossible to be applied to produce in reality.
Summary of the invention
For defect of the prior art, it is an object of the invention to provide a kind of rotor-support-foundation system on-line dynamic balancing system and side
Method, for the rotor-support-foundation system worked online, by collecting its vibration signal, it is judged that unbalanced phase place and quality, and then produces
Action removes to balance its unbalance mass, thus reaches the effect of on-line dynamic balancing.
According to an aspect of the present invention, it is provided that a kind of rotor-support-foundation system on-line dynamic balancing system, including:
Signal transducer, for gathering the unbalance vibration information of rotor-support-foundation system, is converted into analogue signal by vibration information,
And analogue signal is sent to signal picker；
Signal picker, for the analogue signal produced by signal transducer received is converted to digital signal, and
After digital signal is carried out noise reduction, Filtering Processing, deliver to data handling system；
Data handling system, for calculating, processes the digital signal received, obtain rotor-support-foundation system unbalance mass and
Phase information also produces actuating signal, is sent to signal projector；
Signal projector, for being transmitted to balance regulator by the actuating signal that data handling system produces；
Balance regulator, for receiving actuating signal the generation action inside this actuator of signal projector, thus
Adjust the amount of unbalance of rotor-support-foundation system, it is achieved the on-line dynamic balancing of rotor-support-foundation system.
Preferably, described balance regulator is made up of axle upper part and phantom element, wherein:
Described axle upper part is linked together with the rotating shaft in rotor-support-foundation system by key, and rotates with rotating shaft；Servo-actuated
Part is enclosed within rotating shaft and keeps certain interval with rotating shaft；Phantom element keeps synchronous axial system with axle upper part.
It is highly preferred that be equidistantly distributed some apertures in the card of described axle upper part, sucked type magnetic is installed bottom aperture
Ferrum；The afterbody of axle upper part is provided with controller, set of cells and signal receiving device.
It is highly preferred that described phantom element is made up of stationary part and rotating part, wherein:
Some apertures, the position of aperture and the aperture one in axle upper part card equidistantly it is distributed in the card of rotating part
One is corresponding；Before operation, a steel ball it is pre-placed in each aperture；
The outer rim of rotating part is provided with the permanent magnet of some equidistant distributions；Near the position of rotating part on stationary part
Put and hot-wire coil is installed.
It is highly preferred that described axle upper part is 3-5mm with the rotating part spacing in phantom element.
Preferably, described balance regulator uses in pairs, and the both sides of the rotating disk being separately mounted in rotor-support-foundation system.
Preferably, described signal transducer is two eddy current displacement sensors；Two eddy current displacement sensors intersect
Placing in an angle of 90 degrees, the plane that two eddy current displacement sensors are formed is perpendicular to rotor axis direction.
Preferably, described signal picker includes wave filter, multichannel analog-to-digital conversion card and multi-channel signal acquiring card, letter
The analogue signal filtered device filtering that number sensor transmits becomes digital signal after multichannel analog-to-digital conversion card analog digital conversion, and
Preserved by multi-channel signal acquiring card, and send to data handling system.
Preferably, described data handling system, the digital signal sent by signal picker is carried out at digital signal
Reason, calculates unbalance mass and the phase information of rotor-support-foundation system from signal characteristic, and sends actuating signal, actuating signal warp
Launched by signal projector, to control balance regulator action.
It is highly preferred that described data handling system can use software to realize, PC carry.
It is highly preferred that described signal projector is arranged on the PC of data handling system.
According to another aspect of the present invention, it is provided that a kind of rotor-support-foundation system on-line dynamic balancing method, comprise the steps:
The first step, do on dynamically balanced rotor-support-foundation system installation balance regulator, signal transducer at needs；
Second step, signal transducer, signal picker, signal projector, data handling system are connected by wire；
3rd step, start rotor-support-foundation system, the axle upper part of balance regulator rotates together with rotating shaft, balance regulator with
Produce electromagnetic force after the hot-wire coil energising of dynamic part, and interact with permanent magnet thus drive phantom element and axle top
Divide and keep synchronized rotation；The unbalance information of rotor-support-foundation system is gathered by signal transducer, and displacement signal changed by signal transducer
Become analogue signal, and be sent at signal picker；
The simulation that signal transducer is transmitted by the filtering of the 4th step, signal picker filtered device with multichannel analog-to-digital conversion card
Signal is filtered and analog digital conversion, and analogue signal becomes digital signal, and digital signal is collected also by data collecting card
It is sent to data handling system；
The digital signal that signal picker is transmitted by the 5th step, data handling system is by being calculated unbalanced phase place
And quality, produce actuating signal, and actuating signal is sent to signal projector；
6th step, signal projector launch actuating signal, the signal receiver that the axle upper part of balance regulator is installed
Receive actuating signal, controller the sucked type electric magnet energising controlled bottom the circular hole of unbalance phase position produces
Electromagnetic force, in the steel ball in the circular hole of the rotating part of attraction correspondence position phantom element to the circular hole of axle upper part, thus produces
Raw compensation quality, and then realize the on-line dynamic balancing of rotor-support-foundation system.
Compared with prior art, the present invention has a following beneficial effect:
1. present invention achieves rotor-support-foundation system in working order under dynamic balancing, it is not necessary to repeatedly shut down experiment, decrease
Tradition shuts down commercial production impact and the economic loss that dynamic balance method brings, and meets commercial production demand；
2. can stay on rotor-support-foundation system for a long time after the present invention completes a dynamic balancing, it is ensured that its dynamic balancing effect；
3. the present invention only need to install balance regulator on rotor-support-foundation system additional, it is to avoid rotor-support-foundation system is carried out bigger amendment gives
The impact that rotor performance is brought；
4. the present invention can monitor the operation conditions of rotor-support-foundation system, in real time rotor-support-foundation system is carried out dynamic balancing, thus avoids
The serious consequence caused due to rotor-support-foundation system imbalance, improves the safety of this relatively hazardous equipment of rotor-support-foundation system.
Accompanying drawing explanation
By the detailed description non-limiting example made with reference to the following drawings of reading, the further feature of the present invention,
Purpose and advantage will become more apparent upon:
Fig. 1 is the overall structure schematic diagram of one embodiment of the present invention；
Fig. 2 is that the signal of one embodiment of the present invention flows to schematic diagram；
Fig. 3 is the balance regulator structural representation of one embodiment of the present invention；
Fig. 4 is the axle upper part schematic diagram of the balance regulator of one embodiment of the present invention；
Fig. 5 is the phantom element schematic diagram of the balance regulator of one embodiment of the present invention；
In figure: 100-balance regulator, 200-signal transducer, 300-signal picker, 400-signal projector, 500-
Data handling system, 600-rotor-support-foundation system；
1-phantom element stator (stationary part), 2-coil, 3-permanent magnet, 4-axle upper part, 5-circular hole, 6-sucked type electricity
Magnet, 7-controller, 8-battery, 9-signal receiver, 10-phantom element rotor (rotating part), 11-steel ball, 12-circular hole,
13-rotating disk.
Detailed description of the invention
Below in conjunction with specific embodiment, the present invention is described in detail.Following example will assist in the technology of this area
Personnel are further appreciated by the present invention, but limit the present invention the most in any form.It should be pointed out that, the ordinary skill to this area
For personnel, without departing from the inventive concept of the premise, it is also possible to make some deformation and improvement.These broadly fall into the present invention
Protection domain.
As shown in Figure 1 and Figure 2, a kind of rotor-support-foundation system on-line dynamic balancing system, including balance regulator 100, signal transducer
200, signal picker 300, signal projector 400 and data handling system 500, wherein:
Vibration information, for gathering the unbalance vibration information of rotor-support-foundation system, is converted into simulation letter by signal transducer 200
Number, and analogue signal is sent to signal picker；
Signal picker 300 for being converted to digital signal by the analogue signal received, and carries out certain noise reduction, filter
After ripple etc. process, deliver to data handling system；
Data handling system 500, for calculating, processing the digital signal received, obtains the unbalance mass of rotor-support-foundation system
With phase information produce actuating signal；
Signal projector 400 is for being transmitted to balance regulator by the actuating signal that data handling system produces；
Balance regulator 100 is used for by receiving actuating signal generation action inside actuator, thus adjusts rotor
The amount of unbalance of system, it is achieved the on-line dynamic balancing of rotor-support-foundation system.
In Fig. 1 Yu Fig. 2, the direction of arrow represents the flow direction of signal.The imbalance of rotor-support-foundation system 600 collected by signal transducer 200
Displacement signal, and pass to signal picker 300 after displacement signal is converted into analogue signal；Signal picker 300 receives mould
Intend signal and analogue signal be filtered and analog digital conversion, data collecting card be collected and transmit signals to data
Reason system 500；Data handling system 500 is by being calculated unbalanced phase place and quality, and produces actuating signal, action
Signal sends signal projector 400 to；Signal projector 400 is launched actuating signal and is balanced actuator 100, balance regulator
100 receive actuating signal, and produce action, it is achieved thereby that the on-line dynamic balancing of rotor-support-foundation system.
As it is shown on figure 3, in one embodiment, described balance regulator 100 is by the axle upper part 4 of a diameter of 80mm and servo-actuated
Part composition, phantom element divides phantom element rotor 10 and the phantom element stator 1 including diameter 80mm, axle upper part 4 with
Dynamic part rotor 10 spacing 5mm；Axle upper part 4 is linked together by the bonded rotating shaft with rotor-support-foundation system, can be with rotating shaft
Rotate together；Phantom element rotor 10 is enclosed within the rotating shaft of rotor-support-foundation system 600, concentric with rotating shaft and and rotating shaft keep certain between
Gap, keeps synchronous axial system with axle upper part 4；Phantom element stator 1 fixes on the ground.
As shown in Figure 4, in one embodiment, it is distributed equally spacedly at radius 30mm in the card of described axle upper part 4
The circular hole 5 of 16 a diameter of 8mm, the bottom of circular hole 5 is provided with sucked type Magnet 6；The afterbody of axle upper part 4 is provided with controller
7, battery 8 and signal receiver 9, wherein: controller 7 receives the control signal that data handling system 500 is launched, and controls number simultaneously
According to the coil electricity in the circular hole specified by processing system 500；Battery 8 is for being energized to coil 2；Signal receiver 9 is used for connecing
Receive the control signal that data handling system 500 is launched.
As it is shown in figure 5, in one embodiment, 16 circles are distributed in the card of described phantom element rotor 10 equally spacedly
Hole 12, the position of circular hole 12 and circular hole 5 one_to_one corresponding in the card of axle upper part 4.
As preferred embodiment, in 16 circular holes 12 on described phantom element rotor 10, all it is pre-placed one 2
Gram steel ball 11 (as shown in Figure 3).
As preferred embodiment, the outer rim of described phantom element rotor 10 is provided with 20 permanent magnets 3 equally spacedly,
On phantom element stator 1, the position near phantom element rotor 10 is provided with hot-wire coil 2 (as shown in Figure 3)；When hot-wire coil 2
Electromagnetic force can be produced during energising, and produce active force anti-mutually with permanent magnet 3, thus promote phantom element rotor 10 to rotate.
As preferred embodiment, described balance regulator 100 uses in pairs (such as balance regulator 1 peace in Fig. 1
Weighing apparatus actuator 2), and it is separately mounted to the both sides of the rotating disk of rotor-support-foundation system.
As preferred embodiment, described signal transducer 200 is two eddy current displacement sensors, and its model is
ZZF2-I type non-contact electric eddy shift sensor；Two signal transducers are placed on the bearing block transfering from one department to another system, and hand over
Fork is placed in an angle of 90 degrees；The plane that two signal transducers are formed is perpendicular to rotor axis direction.
As preferred embodiment, described signal picker 300, including wave filter, multichannel analog-to-digital conversion card with many
Channel signal capture card, the filtering of analogue signal filtered device becomes digital signal after multichannel analog-to-digital conversion card analog digital conversion,
And preserved by multi-channel signal acquiring card.
Described multi-channel signal acquiring card uses NI-9234 voltage signal collector
As preferred embodiment, described data handling system 500, the signal number that signal picker is received
Word signal processing, calculates the unbalance mass of rotor-support-foundation system and phase information from signal characteristic and sends actuating signal, dynamic
Make signal to launch via signal projector, control balance regulator action.
As preferred embodiment, described data handling system 500 is carried by PC, and realizes via software programming.
As preferred embodiment, described signal projector 400 is arranged on the PC of data handling system 500.
Use said system structure, carry out the balance method of rotor-support-foundation system on-line dynamic balancing system, comprise the steps:
The first step, makees installation balance regulator, signal transducer 200 on dynamically balanced rotor-support-foundation system at needs；
Second step, leads to signal transducer 200, signal picker 300, signal projector 400, data handling system 500
Cross wire to connect；
3rd step, starts rotor-support-foundation system, and the axle upper part 4 of balance regulator 100 rotates together with rotor-support-foundation system, and balance is adjusted
The phantom element rotor 10 of joint device 100, by the effect of electromagnetic force between hot-wire coil 2 and permanent magnet 3, keeps with axle upper part 4
Synchronized rotation；The unbalance information of rotor-support-foundation system is gathered by signal transducer 200, and displacement signal is converted into analogue signal, passes
Deliver at signal picker 300；
4th step, it is filtered and analog digital conversion by signal picker 300, data collecting card be collected, will letter
Number it is sent to data handling system 500；
5th step, data handling system 500 is by being calculated unbalanced phase place and quality, and produces actuating signal,
Transmit signals to signal projector 400；
6th step, signal projector 400 launches actuating signal, the signal that the axle upper part 4 of balance regulator 100 is installed
Receptor 9 receives actuating signal, controller 7 control the sucked type electromagnetism bottom the circular hole 5 of unbalance phase position
Ferrum 6 energising produces electromagnetic force, attracts the steel ball 11 in the circular hole 12 of correspondence position phantom element rotor 1 to the circle of axle upper part 4
In hole 5, thus create compensation quality, and then achieve the on-line dynamic balancing of rotor-support-foundation system.Two balance regulators move simultaneously
Make, unbalance mass equivalence is completed dynamic balancing in two planes.
The present invention realizes rotor-support-foundation system and completes dynamic balancing in the case of not shutting down, and removes from tradition experiment of dynamic balancing and repeats to open
Machine, outage, it is adaptable to the system that should not shut down shuts down, to reduce, the economic loss brought.
Above the specific embodiment of the present invention is described.It is to be appreciated that the invention is not limited in above-mentioned
Particular implementation, those skilled in the art can make various deformation or amendment within the scope of the claims, this not shadow
Ring the flesh and blood of the present invention.
Claims (10)
1. a rotor-support-foundation system on-line dynamic balancing system, it is characterised in that including:
Signal transducer, for gathering the unbalance vibration information of rotor-support-foundation system, is converted into analogue signal by vibration information, and will
Analogue signal is sent to signal picker；
Signal picker, for being converted to digital signal, and logarithm by the analogue signal produced by signal transducer received
After word signal carries out noise reduction, Filtering Processing, deliver to data handling system；
Data handling system, for calculating, processing the digital signal received, obtains unbalance mass and the phase place of rotor-support-foundation system
Information also produces actuating signal, is sent to signal projector；
Signal projector, for being transmitted to balance regulator by the actuating signal that data handling system produces；
Balance regulator, for receiving actuating signal the generation action inside this actuator of signal projector, thus adjusts
The amount of unbalance of rotor-support-foundation system, it is achieved the on-line dynamic balancing of rotor-support-foundation system.
A kind of rotor-support-foundation system on-line dynamic balancing system the most according to claim 1, it is characterised in that described balance regulator
It is made up of axle upper part and phantom element, wherein:
Described axle upper part is linked together with the rotating shaft in rotor-support-foundation system by key, and rotates with rotating shaft；Phantom element
It is enclosed within the rotating shaft of rotor-support-foundation system and keeps certain interval with rotating shaft；Phantom element keeps synchronous axial system with axle upper part.
A kind of rotor-support-foundation system on-line dynamic balancing system the most according to claim 2, it is characterised in that described axle upper part
Equidistantly it is distributed some apertures in card, sucked type Magnet is installed bottom aperture；The afterbody of axle upper part is provided with controller, electricity
Pond group and signal receiving device.
A kind of rotor-support-foundation system on-line dynamic balancing system the most according to claim 2, it is characterised in that described phantom element by
Stationary part and rotating part composition, wherein:
Some apertures equidistantly it are distributed, the position of aperture and the aperture one a pair in axle upper part card in the card of rotating part
Should；Before operation, a steel ball it is pre-placed in each aperture；
The outer rim of rotating part is provided with the permanent magnet of some equidistant distributions；
On stationary part, the position near rotating part is provided with hot-wire coil.
5. according to a kind of rotor-support-foundation system on-line dynamic balancing system described in any one of claim 1-4, it is characterised in that described flat
Weighing apparatus actuator uses in pairs, and the both sides of the rotating disk being separately mounted in rotor-support-foundation system.
6. according to a kind of rotor-support-foundation system on-line dynamic balancing system described in any one of claim 1-4, it is characterised in that described letter
Number sensor is two eddy current displacement sensors；Two eddy current displacement sensors intersect to be placed in an angle of 90 degrees, two electric whirlpools
The plane that stream displacement transducer is formed is perpendicular to rotor-support-foundation system axis direction.
7. according to a kind of rotor-support-foundation system on-line dynamic balancing system described in any one of claim 1-4, it is characterised in that described letter
Number harvester includes wave filter, multichannel analog-to-digital conversion card and multi-channel signal acquiring card, the simulation letter that signal transducer transmits
The filtering of number filtered device becomes digital signal after multichannel analog-to-digital conversion card analog digital conversion, and is protected by multi-channel signal acquiring card
Deposit, and send to data handling system.
8. according to a kind of rotor-support-foundation system on-line dynamic balancing system described in any one of claim 1-4, it is characterised in that described number
According to processing system, the digital signal sent by signal picker carries out Digital Signal Processing, calculates from signal characteristic
The unbalance mass of rotor-support-foundation system and phase information, and send actuating signal, actuating signal is launched via signal projector, with control
Balance regulator action processed.
A kind of rotor-support-foundation system on-line dynamic balancing system the most according to claim 8, it is characterised in that described signal projector
It is arranged on the PC of data handling system.
10. the rotor-support-foundation system on-line dynamic balancing method using system described in any one of claim 1-9, it is characterised in that
Comprise the steps:
The first step, do on dynamically balanced rotor-support-foundation system installation balance regulator, signal transducer at needs；
Second step, signal transducer, signal picker, signal projector, data handling system are connected by wire；
3rd step, startup rotor-support-foundation system, the axle upper part of balance regulator rotates together with rotating shaft, the servo-actuated portion of balance regulator
Point hot-wire coil energising after produce electromagnetic force, and interact with permanent magnet thus drive phantom element and axle top code insurance
Hold synchronized rotation；The unbalance information of rotor-support-foundation system is gathered by signal transducer, and signal transducer is converted into mould displacement signal
Intend signal, and be sent at signal picker；
The analogue signal that signal transducer is transmitted by the filtering of the 4th step, signal picker filtered device with multichannel analog-to-digital conversion card
Being filtered and analog digital conversion, analogue signal becomes digital signal, digital signal is collected by data collecting card and transmits
To data handling system；
The digital signal that signal picker is transmitted by the 5th step, data handling system is by being calculated unbalanced phase place and matter
Amount, produces actuating signal, and actuating signal is sent to signal projector；
6th step, signal projector launch actuating signal, and the signal receiver that the axle upper part of balance regulator is installed receives
Actuating signal, controller the sucked type electric magnet energising controlled bottom the circular hole of unbalance phase position produces electromagnetism
Power, in the steel ball in the circular hole of the rotating part of attraction correspondence position phantom element to the circular hole of axle upper part, thus produces benefit
Repay quality, and then realize the on-line dynamic balancing of rotor-support-foundation system.
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| CN108987298A (en) * | 2017-05-31 | 2018-12-11 | 上海微电子装备（集团）股份有限公司 | Spin coating device and method |
| CN113203522A (en) * | 2021-05-07 | 2021-08-03 | 中国航空工业集团公司北京长城计量测试技术研究所 | Dynamic balance control system and method for rotary machine |
| CN115347730A (en) * | 2022-09-21 | 2022-11-15 | 南昌三瑞智能科技有限公司 | Motor rotor capable of quickly and automatically adjusting dynamic balance and dynamic balance adjusting method |
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