CN106167247A - Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser - Google Patents
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser Download PDFInfo
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Abstract
The invention discloses a kind of anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, periodicity groove and the micro-nano mastoid process hierarchy bionic surface and solid-state polydimethylsiloxane of femtosecond laser induction processing the base material prepared is constituted.Present invention nonlinear interaction based on femtosecond laser processing ultra-intense laser with material, uses femtosecond laser that solid-state polydimethylsiloxane substrate is carried out prescan, obtains the isotropic super-hydrophobic micro-nano surface of even surface roughness；By regulation scan period and pulse energy, preparing large period groove structure, obtain the bionic surface of the grand tertiary structure of micro-nano, this surface has super-hydrophobic and anisotropic wetting characteristics, and anisotropy roll angle is 6o, identical with the Rice Leaf surface in nature.
Description
Technical field
The present invention relates to micro-nano bionical processing and micro-fluidic field, specifically a kind of imitative based on energy adjustment femtosecond laser
The anisotropy micro-nano surface of raw processing.
Background technology
Surface tension driving based on micro nano structure is that a kind of input without external energy just can drive liquid to flow
Method, has broad application prospects in micro-fluidic chip.In order to improve the conevying efficiency of microfluid and control microfluid fortune
Defeated direction, people learn and produce the bionic surface with similar animals and plants epidermal structure, and this bionic surface is referred to as
Micro-nano bionic surface.
Micro-nano bionic surface is broadly divided into two kinds: 1) the micro-nano bionic surface of isotropism, i.e. liquid on surface each
Direction has identical wetting characteristics, and the contact angle of different directions is identical with roll angle, such as bionical lotus leaf surface.2) anisotropy
Micro-nano bionic surface, i.e. liquid have different wetting characteristicss in surface all directions, such as bionical Rice Leaf, bionical butterfly table
Face, liquid is more easy on this type of surface transmit along a certain specific direction.Along with ultrafast laser micro-nano technology technology development and swash
Carrying out in a deep going way of light-matter interaction research, femtosecond laser micro-nano technology technology causes extensively in surface texture is processed
Pay close attention to.Femtosecond laser has that extremely short pulse width and high peak power, processing heat affecting be little, resolution advantages of higher,
Three dimensional structure can be processed in transparent material, the material surfaces such as metal, quasiconductor and thin film prepare various micro nano structure.
The control utilizing femtosecond laser to carry out surface micro-structure and liquid motion behavior also obtains important progress, such as the U.S.
Manchester university Guo Chunlei etc. utilizes the method for femtosecond laser direct write to etch coarse at metal, glass, silicon face
Micro nano structure, this structure has a super wet characteristic, and find liquid can overcome self gravitation along processing groove from lower to
Upper movement, Xi'an Jiao great Chen cutting edge of a knife or a sword seminar utilizes femtosecond laser directly to scan solid-state polydimethylsiloxane surface, etching
Go out coarse periodicity groove structure, the water droplet fortune that micro-structure surface viscous force under the most different concurrent laser parameter effects is controlled
Dynamic characteristic.Owing to the working (machining) efficiency of the micro-nano bionical finished surface of femtosecond laser is high and processing structure controllability is good, it is at cell
Motor control, self-cleaning surface and the field such as micro-fluidic have good application prospect.
In recent years, in terms of the transmission of micro-flow direction, micro fluidic device, the surface tension driving liquid of micro nano structure
Flowing can gravitational attraction people interest widely.In field, anisotropic microstructure nano bionic surface, people utilize micro-nano imitative
The anisotropic structure on raw surface changes the wetting characteristics on surface, and directivity controls fluid motion.And different laser energy and not
With under the process-cycle, anisotropic surface based on the bionical processing of the femtosecond laser that surface roughness is controlled is never ground by people
Study carefully.The micro nano structure of the micro-nano bionic surface of femtosecond laser can improve the roughness on surface, increases surface contact angle and fall
Low surface adhesion, periodically groove structure can be that liquid provides energy barrier in the rolling being perpendicular to groove direction, thus
Realize liquid surface anisotropy roll, both combine hierarchy can with the anisotropic wetting property of optimizing surface,
Obtain big contact angle, low adhesion and the bionic surface of anisotropy moistening, it is achieved to surface liquid flow direction and flowing speed
The control of degree.
Summary of the invention it is an object of the invention to provide a kind of anisotropy based on the bionical processing of energy adjustment femtosecond laser
Micro-nano surface, to solve the problem that prior art exists.
In order to achieve the above object, the technical solution adopted in the present invention is:
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, including base material, it is characterised in that: described
Base material is PDMS polymer, and described PDMS polymer is by liquid polydimethylsiloxane prepolymer prepolymer and silicone resin solution
Firming agent is mixed to form, and in base material, solid-state polydimethylsiloxane Polymer Processing is anisotropic micro-nano bionical table
Face, described micro-nano bionic surface is macroscopically periodicity groove structure, microcosmic is multilamellar micro-nano mastoid process structure.
Described anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, it is characterised in that: whole
Individual micro-nano bionic surface, the periodically gap periods of groove are 100 μm-600 μm, and gash depth is 30 μm-100 μm；
A diameter of 1 μm-1.5 μm of micro-nano mastoid process structure, the flat contact angle of finished surface is 150.69o-155.27o,
Right contact angle is 155.27o -156.99o, horizontal rolling angle is 1.5o -3.05o, vertical scrolling angle is 2.1o-10.1o, rolling
Dynamic angle anisotropy is 0.15o -7.1o；
In the PDMS polymer of base material, the weight of liquid polydimethylsiloxane prepolymer liquid polydimethylsiloxane prepolymer
Percent is 90.91%, and the percetage by weight of silicone resin solution solidifying agent is 9.09%.
Described anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, it is characterised in that: system
Preparation Method is as follows: first clean substrate of glass, in proportion by before liquid polydimethylsiloxane with acetone soln and deionized water
Polymers and silicone resin solution solidifying agent configure to be poured in substrate of glass, liquid polydimethylsiloxane prepolymer and silicone tree
Solution curing dose is mixed to form PDMS polymer, and the substrate of glass with PDMS polymer is put into vacuum chamber deaeration, utilizes
Sol evenning machine makes PDMS polymer uniform film forming, then by putting into curing oven with the substrate of glass of PDMS polymer, obtains base material；
Secondly use femto-second laser to prepare micro-nano bionic surface, regulate femto-second laser light path, base material is fixed on and adds
On work platform, utilize the movement all around of step motor control machine table, regulate focal depth, the scanning week of scanning galvanometer is set
Phase, sweep speed, control the pulse energy of femto-second laser, regulate and control machined parameters, prepare anisotropic micro-nano bionical
Surface；
Finally utilize acetone, ethanol and deionized water that micro-nano bionic surface is carried out.
Described anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, it is characterised in that: system
During Bei, femtosecond laser centre wavelength is 800 nm, and pulsewidth is 100 fs, repetition rate 1 kHz, and pulse energy is 50 mW-
450 mW, the scan period is 100 μm-600 μm, and sweep speed is 1 mm/s；In the preparation process of base material, liquid poly dimethyl
Siloxanes prepolymer is 10:1, PDMS polymer deaeration 30 in vacuum chamber with the weight ratio of silicone resin solution solidifying agent
Min, the rotating speed adjusting sol evenning machine in film forming procedure is 500 r/min, and spin coating 10 s makes glue spread out, then arranges rotating speed 2500 r/
Min, spin coating 30 s, make glue uniformly pave, and PDMS polymer is placed on 60oBaking oven in 3 hours, whole base material thickness about 5
mm。
First the present invention is mixed to form PDMS with liquid polydimethylsiloxane prepolymer and silicone resin solution solidifying agent
Polymer prepares base material, and recycling femtosecond laser processing ultra-intense laser and the nonlinear interaction of material, at PDMS polymer surfaces
It is scanned processing, makes the super-hydrophobic bionic surface of anisotropy of the grand tertiary structure of micro-nano.It is an advantage of the invention that based on energy
Amount regulation femtosecond laser bionical processing nonlinear effect can be capable of the multistage microstructural system under high efficiency, micro/nano-scale
Standby.Simultaneously because first the course of processing carries out low-yield, the prescan of minor cycle, make whole even surface roughness, it is ensured that no
With the surface of scan period after machining, it is respectively provided with superhydrophobic characteristic, and contact angle is close, it is achieved that to Rice Leaf surface
Super-hydrophobic, low adhesion and anisotropic properties bionical.
When femto-second laser pulse energy and scan period change, the surface topography of finished surface changes, to bionical
The anisotropy on surface rolls wettability and there occurs change the most accordingly, and this illustrates that this invention can effectively change bionic surface to liquid
The ability that body flow direction controls.
At present, it is achieved the major technique of the super-hydrophobic bionic surface of anisotropy of the grand tertiary structure of micro-nano has, interference lithography,
Micro shaping, surface wrinkling, reactive ion etching and mask lithography, these methods generally need the procedure of processing of more than three times, and
Existing preparation method is compared, and the present invention uses femtosecond laser to carry out multiple scanning processing, is a kind of efficient single step processing
Method, the fast (> 1mm/s of its processing scanning speed), big (> the 40 mm*30 mm of the range of work), and ensure the course of processing cleans nothing
Chemical contamination, this technology is micro-fluidic in future, has great application prospect in the application such as automatically cleaning and cell qualitative transfer.
Accompanying drawing explanation
Fig. 1 a is the schematic diagram of the femtosecond laser processing light path consistent with the embodiment of the present invention.
Fig. 1 b is the schematic diagram of the femtosecond laser surface scan processing consistent with the embodiment of the present invention.
Fig. 2 a is the Rice Leaf micro-nano grand tertiary structure model schematic diagram consistent with the embodiment of the present invention.
Fig. 2 b is the photo of PDMS substrate after the femtosecond laser consistent with the embodiment of the present invention is processed.
Fig. 2 c is the bionical Rice Leaf groove Electronic Speculum figure consistent with the embodiment of the present invention, and Fig. 2 d is the micro-nano knot of bionic surface
Structure Electronic Speculum figure.
Fig. 3 a is that the liquid consistent with the embodiment of the present invention is parallel to groove direction rolling stress on bionical Rice Leaf surface
Schematic diagram, Fig. 3 b liquid is perpendicular to groove direction and rolls stress schematic diagram on bionical Rice Leaf surface, and Fig. 3 c is that liquid is in substrate
It is θ with inclination angle, bottom surface, when groove and inclination angle, substrate edge are α, stress schematic diagram.
Fig. 4 a is the different pulse energies consistent from the embodiment of the present invention, and different scanning cycle correspondence is parallel to groove direction
Roll angle experimental data figure.
Fig. 4 b is the different pulse energies consistent from the embodiment of the present invention, and different scanning cycle correspondence is perpendicular to groove direction
Roll angle experimental data figure.
The corresponding anisotropy in different scanning cycle bionical Rice Leaf surface that Fig. 5 is consistent with the embodiment of the present invention rolls real
Test datagram.
Detailed description of the invention
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, including bionic surface and necessarily thick
Degree base material, bionic surface is the hierarchy surface of periodicity groove structure and micro-nano mastoid process structure, and base material preparation has PDMS
The substrate of glass of polymer is constituted, and PDMS polymer is solid-state polydimethylsiloxane (PDMS) prepolymer and silicone resin solution
Firming agent is mixed to form.
Whole PDMS polymer surfaces, the periodically gap periods of groove are 100 μm-600 μm, and gash depth is (number
Space is wanted between word and unit) 30 μm-100 μm, a diameter of 1 μm-1.5 μm of surface micronano structure mastoid process, process table
The flat contact angle in face is 150.69o-155.27o, and right contact angle is 155.27o-156.99o, and horizontal rolling angle is 1.5o
-3.05o, vertical scrolling angle is 2.1o-10.1o, and roll angle anisotropy is 0.15o-7.1o.
Constituting the weight fraction of liquid polydimethylsiloxane prepolymer in the PDMS polymer of base material is 90.91%, silicone
The weight fraction of resin solution curing dose is 9.09%.
In the course of processing, femtosecond laser centre wavelength is 800 nm, and pulsewidth is 100 fs, repetition rate 1 kHz, pulse
Energy is 50 mW-450 mW, and the scan period is 100 μm-600 μm, and sweep speed is 1 mm/s；In the preparation process of base material,
Constituting in the PDMS polymer of base material, liquid polydimethylsiloxane prepolymer with the weight ratio of silicone resin solution solidifying agent is
10:1, PDMS polymer is deaeration 30 min in vacuum chamber, and the rotating speed adjusting sol evenning machine in film forming procedure is 500 r/min, even
Glue 10 s, makes glue spread out, then arranges rotating speed 2500 r/min, and spin coating 30 s makes glue uniformly pave, and PDMS polymer is placed on
3 hours in the baking oven of 60o, base material thickness about 5 mm.
Preparation method is as follows: first clean substrate of glass, in proportion by poly-for liquid diformazan with acetone soln and deionized water
Radical siloxane prepolymer and silicone resin solution solidifying agent configure to be poured in substrate, puts PDMS polymer into vacuum chamber and takes off
Bubble, utilizes sol evenning machine to make PDMS polymer uniform film forming, then this PDMS polymer is put into curing oven, obtain base material；Regulation
Good light path, is fixed on base material in machine table, utilizes the movement all around of step motor control machine table, and regulation focus is deep
Degree, arranges the scan period of scanning galvanometer, sweep speed, controls the pulse energy of femtosecond laser, regulate and control machined parameters, prepare
Anisotropic micro-nano bionic surface, utilizes acetone, ethanol and deionized water to be carried out surface to be machined.
First the present invention prepares substrate of glass with liquid polydimethylsiloxane prepolymer and silicone resin solution solidifying agent
On PDMS polymer, constitute base material, the nonlinear interaction of recycling femtosecond laser processing ultra-intense laser and material, at PDMS table
Face is scanned processing, makes the super-hydrophobic bionic surface of anisotropy of the grand tertiary structure of micro-nano, it is achieved that high efficiency, micro-nano chi
Prepared by the multistage microstructural under Du.
The manufacturing process preparing micro-nano bionical anisotropic surface is shown in Fig. 1.
The first step: regulation femto-second laser parameter and system of processing light path.Femto-second laser (Legend Elite-is set
1K-HE, Coherent, America) centre wavelength 800 nm, pulsewidth 100 fs, repetition rate 100 kHz.Laser parameter
After Wen Ding, regulation processing light path system.Utilizing diaphragm, quarter-wave plate, spectroscopical combination that polarizes arranges laser pulse energy
Amount (50 mW-450 mW) and femto-second laser polarized state, regulate scanning galvanometer, keeps laser level scanning, arranges scanning galvanometer
Scanning pattern (progressively scans), the cycle (50 μm-600 μm), area (40 mm*30 mm) and speed (1 mm/s).
Second step: surface roughness prescan.Being placed on processing platform by the base material made, regulation processing plane is with sharp
The distance of optical focus, makes processing plane out of focus 2.66 mm, and using pulse energy is 50 mW, and the scan period is 50 μm, scanning speed
Rate is that the parameter of 1 mm/s is processed, and obtains the super-hydrophobic micro-nano surface of even surface roughness.
3rd step: rescan groove processing.Regulation pulse energy (50 mW-450 mW), the scan period (100 μm-
600 μm), the PDMS surface of prescan is carried out rescan, the cycle of processing is the groove structure of 100 μm-600 μm,
Obtaining bionical Rice Leaf surface, and use acetone, surface to be machined is carried out by ethanol and deionized water..
Fig. 2 a is Rice Leaf micro-nano grand tertiary structure model schematic diagram, and Fig. 2 b is the photo of Laser Processing rear substrate, figure
2c be electronic scanner microscope shooting bionical Rice Leaf trench cross section figure (SEM, JSM-6700F, JEOL, Tokyo,
Japan), Fig. 2 d is the Electronic Speculum figure of bionic surface micro nano structure.
Fig. 3 is the liquid force analysis schematic diagram at this micro-nano bionical processing anisotropic surface.
Fig. 4 is to record on contact angle measurement (CA100D, Innuo, China), and different scanning cycle correspondence is put down
Row is in groove direction and is perpendicular to groove direction roll angle experimental data figure.
Fig. 5 is the different scanning cycle bionical Rice Leaf surface correspondence anisotropy roll experiment data recorded in an experiment
Figure.
Claims (4)
1. anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser, including base material, it is characterised in that: institute
Stating base material is PDMS polymer, and described PDMS polymer is molten with silicone resin by liquid polydimethylsiloxane prepolymer prepolymer
Liquid-solid agent is mixed to form, and in base material, solid-state polydimethylsiloxane Polymer Processing is anisotropic micro-nano bionical
Surface, described micro-nano bionic surface is macroscopically periodicity groove structure, microcosmic is multilamellar micro-nano mastoid process structure.
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser the most according to claim 1, its
It is characterised by: whole micro-nano bionic surface, the periodically gap periods of groove are 100 μm-600 μm, and gash depth is 30
μm-100 μm；
A diameter of 1 μm-1.5 μm of micro-nano mastoid process structure, the flat contact angle of finished surface is 150.69o-155.27o, hang down
Directly feeler is 155.27o -156.99o, horizontal rolling angle is 1.5o -3.05o, vertical scrolling angle is 2.1o-10.1o, roll
Angle anisotropy is 0.15o -7.1o；
In the PDMS polymer of base material, the weight of liquid polydimethylsiloxane prepolymer liquid polydimethylsiloxane prepolymer
Percent is 90.91%, and the percetage by weight of silicone resin solution solidifying agent is 9.09%.
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser the most according to claim 1, its
It is characterised by: preparation method is as follows: first clean substrate of glass, in proportion by poly-for liquid diformazan with acetone soln and deionized water
Radical siloxane prepolymer and silicone resin solution solidifying agent configure to be poured in substrate of glass, poly-before liquid polydimethylsiloxane
Thing and silicone resin solution solidifying agent are mixed to form PDMS polymer, will put vacuum chamber into the substrate of glass of PDMS polymer
Deaeration, utilizes sol evenning machine to make PDMS polymer uniform film forming, then will put into curing oven with the substrate of glass of PDMS polymer,
Obtain base material；
Secondly use femto-second laser to prepare micro-nano bionic surface, regulate femto-second laser light path, base material is fixed on and adds
On work platform, utilize the movement all around of step motor control machine table, regulate focal depth, the scanning week of scanning galvanometer is set
Phase, sweep speed, control the pulse energy of femto-second laser, regulate and control machined parameters, prepare anisotropic micro-nano bionical
Surface；
Finally utilize acetone, ethanol and deionized water that micro-nano bionic surface is carried out.
Anisotropy micro-nano surface based on the bionical processing of energy adjustment femtosecond laser the most according to claim 1, its
Being characterised by: in preparation process, femtosecond laser centre wavelength is 800 nm, and pulsewidth is 100 fs, repetition rate 1 kHz, pulse
Energy is 50 mW-450 mW, and the scan period is 100 μm-600 μm, and sweep speed is 1 mm/s；In the preparation process of base material,
Liquid polydimethylsiloxane prepolymer is that 10:1, PDMS polymer is at vacuum chamber with the weight ratio of silicone resin solution solidifying agent
Interior deaeration 30 min, the rotating speed adjusting sol evenning machine in film forming procedure is 500 r/min, and spin coating 10 s makes glue spread out, then setting turns
Speed 2500 r/min, spin coating 30 s, make glue uniformly pave, and PDMS polymer is placed on 60oBaking oven in 3 hours, whole base
Material thickness about 5 mm.
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| CN108393588A (en) * | 2016-12-21 | 2018-08-14 | 中国航空制造技术研究院 | It is a kind of to prepare metal super-hydrophobic bionic surface method using ultrafast laser technique |
| CN108545694A (en) * | 2018-06-21 | 2018-09-18 | 西安建筑科技大学 | A kind of based superhydrophobic thin films and preparation method thereof with unusual micro-structure |
| CN109851825A (en) * | 2017-11-30 | 2019-06-07 | 洛阳尖端技术研究院 | A kind of anti-fingerprint film and preparation method thereof |
| CN110170747A (en) * | 2019-06-24 | 2019-08-27 | 吉林大学 | A kind of bionic coupling catchments the preparation method on the anti-icing surface of aluminium alloy |
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| CN106586950B (en) * | 2017-01-13 | 2018-01-02 | 温州大学激光与光电智能制造研究院 | A kind of micro-nano self-assembled structures preparation method based on wetability regulation and control |
| CN106586950A (en) * | 2017-01-13 | 2017-04-26 | 温州大学 | Method for preparing micro-nano self-assembled structure based on wettability regulation and control |
| CN107880309A (en) * | 2017-11-30 | 2018-04-06 | 中国石油大学(北京) | Tartan magnetic nano-particle gecko bionic surface and preparation and application |
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| US11914165B2 (en) | 2020-02-07 | 2024-02-27 | Jilin University | Method and device using femtosecond laser to prepare nano-precision structure |
| CN112388168A (en) * | 2020-11-22 | 2021-02-23 | 镇江绅芯易创智能科技有限公司 | Preparation process of self-powered flexible liquid drop sensor based on laser processing technology |
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