CN106145926A - A kind of manufacture method of zinc oxide electronic ceramics - Google Patents
A kind of manufacture method of zinc oxide electronic ceramics Download PDFInfo
- Publication number
- CN106145926A CN106145926A CN201510181979.1A CN201510181979A CN106145926A CN 106145926 A CN106145926 A CN 106145926A CN 201510181979 A CN201510181979 A CN 201510181979A CN 106145926 A CN106145926 A CN 106145926A
- Authority
- CN
- China
- Prior art keywords
- zinc oxide
- manufacture method
- electronic ceramics
- oxide electronic
- biscuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
The present invention relates to the manufacture method of a kind of zinc oxide electronic ceramics, wherein utilize Gelcasting Technique to prepare zinc oxide electronic ceramics parts, be dried by batch mixing slurrying, solidification, green machined, defat, sinter, the step such as machining prepares consistency zinc oxide electronic ceramic component more than 90%.The preparation method of the present invention eliminates vacuum defoamation technique, thus simplifies existing gel casting process technique, reduce manufacturing cost.
Description
Technical field
The present invention relates to the manufacture method of a kind of zinc oxide electronic ceramics, be specifically related to a kind of manufacture method utilizing Gelcasting Technique to prepare zinc oxide electronic ceramics parts, the invention still further relates to the purposes of above-mentioned electronic ceramics.
Background technology
It is the electron-like ceramic material that principal crystalline phase adds that suitable alloy etc. is made that zinc oxide ceramics refers to zinc oxide (ZnO).There is excellent nonlinear factor, pressure sensitive voltage wide ranges (a few volt of zero point to tens kilovolts), the feature such as voltage temperature coefficient is little, time response is fast, leakage current is little.Primary raw material is zinc oxide, and alloy has bismuth oxide, cobalt oxide, strontium oxide, titanium oxide etc..Can be used for manufacturing voltage stabilizing element and overvoltage protection element (low-voltage piezoresistor as in integrated circuit) in high-tension circuit, also can be used as spark gap.
The manufacture method of zinc oxide ceramics generally has normal pressure-sintered method and hot pressing sintering method at present.Normal pressure-sintered is through injection forming, isostatic cool pressing or after molding by zinc source and oxygen source powder, high temperature sintering in specific atmosphere so that blank sintering is fine and close.In the patent of invention " zinc oxide pressure-sensitive ceramic and preparation method thereof " of publication number CN101096309A neutralizes the patent of invention " preparation method of a kind of low-resistivity zinc oxide ceramic material " of CN103496966A, have employed pre-molding and normal pressure-sintered technique prepares zinc oxide ceramics.Sintering process is similar with producing Zinc oxide-base target operation, but sintering process is relatively low to the density controlled range of ceramic component, the parts of simple shape, such as plane tabular, cylinder-like part can only be prepared, cannot prepare the abnormity such as ultra-thin tubular, spiral, foliaceous, production cost is higher simultaneously.
Hot pressed sintering is to utilize powder after being heated to uniform temperature, the thermoplasticity being had and mobility, completing two processes of molding and sintering in an operation, the patent of invention " a kind of Zinc oxide-based wide bandgap ceramic target and preparation method thereof " at publication number CN102312202A have employed hot-pressing sintering technique and prepares zinc oxide ceramics simultaneously.Although technique is simple, but has the disadvantage in that graphite can penetrate into inside target, by Zinc oxide-base powder reduction, causing target carbon content to sharply increase, the extremely difficult removal of carburizing, the target after decarburization is internal easily forms substantial amounts of hole；Heat pressing process is prepared zinc oxide ceramics and is difficult in large size and heteromorphosis simultaneously；The internal relative density of hot-pressure oxidation zinc pottery is uneven, and middle part and marginal density difference reach more than 5%, it is difficult to obtain high-quality zinc oxide ceramics.Owing to hot-pressing sintering technique needs also exist for carrying out secondary powder process, the most also it is unable to reach being uniformly distributed of doped source.
The method that current domestic relevant wet-forming technique prepares ceramic component is to use micropore mold, carries out evacuation dehydration forming or carries out filter pressing injection forming by external pressure.In the patent of invention " a kind of low cost prepares the method for high-performance large-scale alumina article " of publication number CN102442819A and the patent of invention " injection forming reaction-sintered prepares the method for Re:YAG polycrystalline transparent ceramic " of publication number CN101985399A, injection forming is all used to prepare ceramic body, but there is also simple shape, the problem that green strength is the highest, intensity for mould, mould pore size has higher requirement, die cost is higher, add optional equipment, cause base substrate cost of manufacture higher, and the problem that this technique exists doped source sedimentation, easily cause doped source to reunite.
Nineteen nineties, the M. A. Jenny and O. O. of U.S.'s Oak Ridge National Laboratory (Oak Ridge National Laboratory)
A kind of brand-new ceramic material wet-forming technique gel casting forming (Gel-casting) of Omatete teaching inventive, it is the perfect adaptation of traditional grouting process and organic chemistry high polymerization theory, by introducing a kind of new sizing mechanism, develop traditional slip-casting shaping process.Its ultimate principle be high solid loading (volume fraction be not less than 50%), low viscosity (at 1Pa about s) ceramic size in, mix organic monomer and the cross-linking agent of low concentration, after adding initiator and catalyst and casting, there is home position polymerization reaction under certain conditions in the organic monomer in slurry, form firm tridimensional network, so that suspended substance in-situ solidifying molding, obtain uniform, the ceramic body of high intensity, near net-shape.Then carry out the demoulding, dry, organics removal, sintering, can be prepared by required ceramic part.That first this technology invents is the non-aqueous gel casting (Non of organic solvent
Aqueous gel-casting), improve consequently as one, invented again the hydrogel casting (aqueous for aqueous solvent
And be widely used in various pottery gel-casting),.This technique is compared with conventional wet moulding process, have that equipment is simple, molding blank component is uniform, defect is few, be not required to defat, be unlikely to deform, can be with outstanding advantages such as molding complicated shape part and practicality are the strongest, by domestic and international academia and the very big concern of industrial quarters.
The cardinal principle of gel casting forming (Gel-casting) technique is: disperseed by ceramic powder under the effect of dispersant, add organic monomer and ceramic slurry made by cross-linking agent, it is subsequently adding initiator and catalyst, change environmental condition (referring generally to temperature conditions), organic monomer and cross-linking agent is made to occur polyreaction to form macromolecular chain under the effect of initiator and catalyst, do not break off a friendship connection, thus form gel network structure, ceramic particle is wrapped in and wherein forms the ceramic body with some strength.But it is it is generally required to slurry is carried out vacuum outgas stirring in existing Gelcasting Technique so that complicated process of preparation, relatively costly.How the most current Gelcasting Technique is improving the solid content of slurry, improves and still needs to improve in the consistency of ceramic body.
Summary of the invention
It is an object of the invention to provide the manufacture method of a kind of zinc oxide electronic ceramics, specifically the present invention utilizes Gelcasting Technique to manufacture zinc oxide electronic ceramics, and provide one technique in terms of existing technologies relatively easy, the manufacture method of lower-cost zinc oxide electronic ceramics.
The present invention prepares the low-doped zinc oxide slurry (preparation of high solid loading slurry is the essential condition that wet-forming technique develops high density ceramic) of low-viscosity (＜ 100mPa s), high solid loading (50% ~ 60%) by addition organic dispersing agent ball milling in premixed liquid.Blank forming uses Gelcasting Technique slurry fluidity less than 100mPa s, can be directly added into deaeration agent aerofluxus degassing uniform stirring 10 in atmospheric conditions～after 20 minutes, and injection does not absorbs water, watertight arbitrary shape mould.Mould stands, and makes slurry curing obtain wet embryo.It is dried 6～48 hours under the conditions of hot and humid, obtains target element embryo；This method is prone to the demoulding, can obtain relatively dry pressing density base substrate more greatly, evenly, and be not likely to produce drying distortions.Whole process operation is simple, and die cost is the lowest and eliminates vacuum deaerator plant, can prepare, according to the situation of different moulds, the base substrate that shape, size, thickness are different.Additionally, different from dry pressing, the base substrate after the demoulding is also without doing further CIP process.Meanwhile, Gelcasting Technique can ensure doped source being uniformly distributed at intrinsic silicon.Ceramic post sintering use Fluid Air stove sintering or the method for pressure-fired atmosphere sintering, by control sintering curre can prepare complex-shaped, density is controlled, electrical property is controlled and the uniform zinc oxide ceramics of microscopic structure.
①
The preparation of composite granule:
With one or more compositions in ZnO powder body and the titanium of not higher than 25% mass fraction, bismuth, stannum, manganese, cobalt, aluminum, chromium, nickel, barium, silver, boron, antimony, wherein, the weight content of ZnO is 75～99.9%, and the weight of doped source is surplus；Powder purity is more than 3N, and the mean diameter of composite granule is limited to 0.01～300 μm, preferably 50nm～100 μm.
②
Gel casting forming system:
Suitably gel casting forming system is as shown in the table
③
The preparation of high solid loading slurry:
By the purity 1. prepared be 99.9%, mean diameter be that the composite powder of 0.01～3 μm mixes with deionized water premixed liquid, wherein pure water, organic monomer, cross-linking agent are with 100:(5～15): the part by weight of (1～2.5) fully dissolves composition premixed liquid.It is subsequently adding 0.01～0.1wt% dispersant, carries out mechanical ball milling and prepare the slurry that powder body volume content is 45～65%, regulate the pH value of slurry to 8～11 with pure ammonia or dust technology subsequently.Ball-milling Time is that 15～48 hours available viscosity is less than the high fluidity slurry of 100mPa s.One or both during wherein organic monomer is following Organic substance: polyvinyl alcohol (PVA), polyacrylic acid, Methacrylamide (MAM) or acrylamide monomer, N-vinyl pyrrolidone (NVP), methoxyl group-Polyethylene Glycol methacrylic acid (MPEGMA), Dimethylaminoethyl Methacrylate (DMAEMA), dimethyl hydroxy ethyl acrylic acid methyl ester. (HEMA), DMAA (DMMA), Tetramethylammonium hydroxide.Wherein cross-linking agent selects the little molecule of high price, non-electrolyte or polyelectrolyte class material, specifically can select N-N ' methylene-bisacrylamide (MBAM), Polyethylene Glycol, polyethylene glycol dimethacrylate (PEGDMA), acrylic acrylic acid methyl ester., n-octyl alcohol, along staring at the one in diene dianhydride sodium salt copolymer.
④
The blank forming of high solid loading slurry:
The high fluidity slurry that will 2. prepare adds the initiator of 0.02 ‰～0.55wt ‰.Add the catalyst of 0～0.20 ‰, and organic deaeration agent of 0.12～0.9wt%, normal pressure uniform stirring degassing 5～20min.Be poured into do not absorb water, watertight mould.Mould stands, and makes slurry curing obtain wet embryo.Hot and humid lower dry 6～48 hours, the demoulding after molding, obtain biscuit of ceramics.Owing to the slurry in the present invention has the viscosity high fluidity less than 100mPa s, therefore it is made without vacuum defoamation stirring, under normal temperature and pressure conditions, only i.e. can realize the discharge of bubble.Described initiator is Ammonium persulfate. (APS), azo diimidazole quinoline propane (AZIP), azo two miaow base propane hydrochloride salt (AZAP), hydrogen peroxide (H2O2Any one in).Described catalyst is tetramethylethylenediamine.Described organic deaeration agent is a kind of in Polyethylene Glycol or n-octyl alcohol or both are in the mixed solution of the ratio of 1:2.Described slip solidify wet base step for be warming up to 55～70 DEG C cause curing reactions, or add ethylenediamines catalyst promote add organic monomer crosslink curing reaction so that slip is solidified into wet base.
⑤
The defat of collosol and gel casting base substrate:
Being machined out biscuit 3., base substrate continues to heat up in moving air stove to carry out defat under the conditions of 200 DEG C～650 DEG C afterwards, removes organic additive, processes the time 15～20h.
⑥
The sintering of molding blank:
4. the base substrate after middle defat is heated under pressure-fired atmospheric condition 1200 DEG C～1550 DEG C of densified sintering products, and temperature retention time 20～48h is sintered, and prepares pottery.Machine-shaping obtains zinc oxide electronic ceramics parts, and pottery relative density is more than 96%, and microstructure and chemical composition are uniform.
The Gelcasting Technique utilizing the present invention prepares zinc oxide electronic ceramics parts, the zinc oxide electronic ceramics even tissue obtained, stable performance.It is simultaneously available for preparing form parts, and without arranging allowance, and other method is difficulty with.Inventive gel casting technical matters cost is lower, and the equipment of collosol and gel forming technique than CIP cheap 75%, compared with conventional GPC injection molding and forming technology, more decreases vacuum outgas link.By adjusting slip solid concentration and sintering temperature in the Gel-casting process of the present invention, the density altitude that can make ceramic component is controlled, can also the cheapest waterproof material of acrylic of use cost use as mould simultaneously.The Gel-casting process shaping speed of the present invention is fast, and can be processed biscuit when preforming.
Below table is the Contrast on effect using inventive gel casting process with prior art:
| Gel casting forming | Injection forming | Cold isostatic compaction | Thermal spraying molding | Hip moulding | |
| Ceramic mass | Excellent | Good | Excellent | Difference | Excellent |
| Manufacturing cost | Cheap | In | High | Low | High |
| Equipment cost | Cheap | High | High | High | High |
| Die cost | Cheap | Low | High | Nothing | High |
| Speed of production | Hurry up | Slowly | Slowly | Hurry up | Slowly |
| Uniform doping | Excellent | Difference | Difference | Difference | Difference |
| Opposite sex parts | It is | Poor | Difference | Difference | Difference |
| Total evaluation | Optimum | Good | Difference | Difference | Worst |
Accompanying drawing explanation
Fig. 1 is the zinc oxide electronic ceramics slurry preparation flow chart of the present invention.
Fig. 2 is the zinc oxide electronic ceramics manufacturing flow chart of the present invention.
Detailed description of the invention
Hereinafter embodiment of the present invention is further elaborated.
Embodiment 1
Weigh the powder body 9900 grams of zinc oxide, bismuth oxide powder 100 grams with numerical digit electronic balance, raw material consists of 99wt% zinc oxide and 1wt% bismuth oxide, mean diameter 1 μm, and powder purity is all higher than 99.9%, makes mixing material powder.
Pure water, acrylamide monomer, N-N ' bismethacrylamide are fully dissolved composition premixed liquid 1971 grams with the part by weight of 100:6.5:1.5.
The JA-281 of noresidue after the sintering of 0.05wt% is done dispersant and adds premixed liquid.
Being added in premixed liquid by the material powder of 60wt% and be placed in spheroidal graphite 30 minutes in ball mill, continue ball milling 40 hours being put into by remaining 40wt% material powder in ball mill, slurry does ball-milling medium with zirconia ball in ball mill.Ball milling prepares the slurry that powder body volume content is 50%, the both solid concentration 50% of material powder in slurry, with the pH value of pure ammonia regulation slurry to 9.5, obtains the high fluidity slip that viscosity is 55mPa s.Adding n-octyl alcohol organic deaeration agent and 0.1wt ‰ ammonium persulfate initiator of 0.5wt%, in blender, atmospheric agitation deaerates 15 minutes, crosses 60 mesh sieves and is poured into non-porous mold.In the present embodiment, mould is spiral type, and 50 DEG C of air-ovens put into by the mould that will be equipped with slurry after casting mold, heat up and promote gel monomers crosslinking curing.The wet base substrate demoulding after solidification, is dried 30 hours under 65 DEG C and 80% damp condition, thus obtains high intensity flawless zinc oxide ceramics biscuit.
Being heated in ventilating air stove by biscuit and carry out degumming, first furnace temperature rises to 300 DEG C, programming rate is not higher than 1 DEG C/min, and insulation is not less than 2 hours, is then warming up to 650 DEG C, and insulation is not less than 5 hours, and programming rate is not higher than 1 DEG C/min.Cool to room temperature with the furnace, obtain the blank after degumming.
Being positioned in ventilating air stove by blank after degumming and be sintered, first furnace temperature rises to 800 DEG C, programming rate is not higher than 1 DEG C/min, and insulation is not less than 2 hours, is then warming up to 1200 DEG C, and insulation is not less than 5 hours, and programming rate is not higher than 1 DEG C/min.Cool to room temperature with the furnace, sintered body is polished, produces zinc oxide voltage stabilizing original paper.Being 97.5% by drainage actual measurement relative density, cutting sample and surveying ceramic body resistance is 2 × 10-1Ω cm, microstructure is uniform, there is not the ceramic oxygen lack problem that vacuum-sintering is caused.
Embodiment 2
Weigh the powder body 9900 grams of zinc oxide with numerical digit electronic balance, alumina powder jointed 100 grams, raw material consists of 99wt% zinc oxide and 1wt% aluminium oxide, mean diameter 1 μm, and powder purity is all higher than 99.9%, makes mixing material powder.
Pure water, acrylamide monomer, N-N ' bismethacrylamide are fully dissolved composition premixed liquid 1975 grams with the part by weight of 100:10:1.5.
The JA-281 of noresidue after the sintering of 0.1wt% is done dispersant and adds premixed liquid.
The raw material split of 60wt% being added in premixed liquid and be placed in spheroidal graphite 30 minutes in ball mill, continue ball milling 60 hours being put into by remaining 40wt% material powder in ball mill, slurry does ball-milling medium with zirconia ball in ball mill.Ball milling prepares the slurry that powder body volume content is 50%, the both solid concentration 50% of material powder in slurry, with the pH value of pure ammonia regulation slurry to 9.5, obtains the high fluidity slip that viscosity is 70mPa s.Adding n-octyl alcohol organic deaeration agent and 0.1wt ‰ ammonium persulfate initiator of 0.7wt%, in blender, atmospheric agitation deaerates 15 minutes, crosses 60 mesh sieves and is poured into non-porous mold.In the present embodiment, mould is spiral type, and 50 DEG C of air-ovens put into by the mould that will be equipped with slurry after casting mold, heat up and promote gel monomers crosslinking curing.The wet base substrate demoulding after solidification, is dried 30 hours under 70 DEG C and 80% damp condition, thus obtains high intensity flawless zinc oxide ceramics biscuit.
Being heated in ventilating air stove by biscuit and carry out degumming, first furnace temperature rises to 300 DEG C, programming rate is not higher than 1 DEG C/min, and insulation is not less than 10 hours, is then warming up to 650 DEG C, and insulation is not less than 5 hours, and programming rate is not higher than 1 DEG C/min.Cool to room temperature with the furnace, obtain the blank after degumming.
Being positioned in ventilating air stove by blank after degumming and be sintered, first furnace temperature rises to 800 DEG C, programming rate is not higher than 1 DEG C/min, and insulation is not less than 10 hours, is then warming up to 1550 DEG C, and insulation is not less than 5 hours, and programming rate is not higher than 1 DEG C/min.Cool to room temperature with the furnace, sintered body is polished, produces zinc oxide voltage stabilizing original paper.Being 98% by drainage actual measurement relative density, cutting sample and surveying ceramic body resistance is 2 × 10-1Ω cm, microstructure is uniform, there is not the ceramic oxygen lack problem that vacuum-sintering is caused.
Above example is only used for being specifically described the present invention, and protection scope of the present invention is not played any restriction effect by it, and protection scope of the present invention is determined by claim.According to techniques known and technical scheme disclosed in this invention, can derive or association goes out many flexible programs, all these flexible programs, also being regarded as is protection scope of the present invention.
Claims (10)
1. the manufacture method of a zinc oxide electronic ceramics, it is characterised in that comprise the steps:
A. preparing material powder: mixed with doped source powder body by Zinc oxide powder, in mixed powder, the mass fraction shared by Zinc oxide powder is 75%～99.9%, and powder purity is more than 99.9%, diameter of particle 0.01～300 μm；
B. premixed liquid is prepared: by pure water, organic monomer, cross-linking agent with 100:(5～15): the part by weight of (1～2.5) fully dissolves composition premixed liquid；
C. prepare high fluidity slurry: premixed liquid will be added by the dispersant of noresidue after sintering, and regulate pH value to 9～11, carry out ball milling by ball mill, material powder mix with premixed liquid in batches, obtain viscosity and be less than the high fluidity slurry of 100mPa s；
D. biscuit is prepared: deaeration agent and initiator are added high fluidity slurry, carry out mechanical agitation at ambient pressure, it is subsequently injected into mould, the mould being marked with slurry is positioned in air drying cabinet, heat up to accelerate slurry crosslinking curing, curing and demolding obtains wet base, wet base is placed in constant temperature and humidity condition and is dried to obtain biscuit；
E. biscuit degumming: biscuit is heated in ventilating air stove and carries out degumming, first furnace temperature is risen to 200 DEG C～400 DEG C, and after being incubated a period of time, again it is warming up to 400 DEG C～650 DEG C, and it being incubated to degumming complete, above-mentioned programming rate is not higher than 1 DEG C/min, treats that air furnace is cooled to room temperature subsequently；
F. sintering: the biscuit after degumming is positioned in ventilating air stove and is sintered, first furnace temperature is risen to 700 DEG C～900 DEG C, and after being incubated a period of time, again it is warming up to 1200 DEG C～1600 DEG C, and it is incubated complete to sintering, above-mentioned programming rate is not higher than 1 DEG C/min, treats that air furnace is cooled to room temperature subsequently, obtains the relative density zinc oxide electronic ceramics more than 96%.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterized in that, described organic monomer is one or a combination set of polyvinyl alcohol, polyacrylic acid, methyl acrylamide monomer, acrylamide monomer, N-vinyl pyrrolidone, methoxypolyethylene glycol methacrylic acid, Dimethylaminoethyl Methacrylate, dimethyl hydroxy ethyl acrylic acid methyl ester., DMAA, Tetramethylammonium hydroxide.
The manufacture method of zinc oxide electronic ceramics the most according to claim 2, it is characterized in that, described cross-linking agent be N-N ' methylene-bisacrylamide, Polyethylene Glycol, polyethylene glycol dimethacrylate, acrylic acrylic acid methyl ester., n-octyl alcohol, along staring at one or a combination set of diene dianhydride sodium salt copolymer.
The manufacture method of zinc oxide electronic ceramics the most according to claim 3, it is characterized in that, the addition of initiator is 0.02 ‰～0.55wt ‰, the addition of deaeration machine is 0.12～0.9wt%, described deaeration agent is a kind of in Polyethylene Glycol or n-octyl alcohol or both are in the mixed solution of the ratio of 1:2, and described initiator is one of Ammonium persulfate., azo diimidazole quinoline propane, azo two miaow base propane hydrochloride salt, hydrogen peroxide.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterised in that described constant temperature and humidity condition refers to be dried under 50～70 DEG C and 80% damp condition make wet base be dried for 30 hours to become biscuit.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterized in that, in described biscuit degumming step, after furnace temperature rises to 200 DEG C～400 DEG C, temperature retention time is not less than 2 hours, and after being again warming up to 400 DEG C～650 DEG C, temperature retention time is not less than 5 hours.
The manufacture method of zinc oxide electronic ceramics the most according to claim 6, it is characterized in that, in described sintering step, after furnace temperature rises to 700 DEG C～900 DEG C, temperature retention time is not less than 2 hours, and after being again warming up to 1200 DEG C～1600 DEG C, temperature retention time is not less than 10 hours.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterised in that prepare in biscuit step described, adds catalyst tetramethylethylenediamine or pinacone in high fluidity slurry.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterised in that in described preparation high fluidity slurry stage, ball-milling medium is zirconia ball, Ball-milling Time more than 24 hours.
The manufacture method of zinc oxide electronic ceramics the most according to claim 1, it is characterised in that the material of described mould is fluid-tight acrylic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510181979.1A CN106145926A (en) | 2015-04-17 | 2015-04-17 | A kind of manufacture method of zinc oxide electronic ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510181979.1A CN106145926A (en) | 2015-04-17 | 2015-04-17 | A kind of manufacture method of zinc oxide electronic ceramics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106145926A true CN106145926A (en) | 2016-11-23 |
Family
ID=58057555
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510181979.1A Pending CN106145926A (en) | 2015-04-17 | 2015-04-17 | A kind of manufacture method of zinc oxide electronic ceramics |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106145926A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110436915A (en) * | 2019-08-05 | 2019-11-12 | 北京航大微纳科技有限公司 | A kind of FBAR piezoelectric layer Zinc oxide doped target material and preparation method thereof |
| CN112457001A (en) * | 2020-12-07 | 2021-03-09 | 常州泰捷防雷科技有限公司 | Preparation method of high-compactness zinc oxide piezoresistor chip |
| CN113800892A (en) * | 2021-09-24 | 2021-12-17 | 宜宾红星电子有限公司 | Forming method for fine structure beryllium oxide ceramic |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102212781A (en) * | 2011-05-10 | 2011-10-12 | 孔伟华 | Method for manufacturing high-density and low-cost zinc oxide aluminum sputtering target |
| CN102351526A (en) * | 2011-06-11 | 2012-02-15 | 江苏尚易新材料科技有限公司 | Method for preparing AZO target materials by adopting gel injection molding forming |
-
2015
- 2015-04-17 CN CN201510181979.1A patent/CN106145926A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102212781A (en) * | 2011-05-10 | 2011-10-12 | 孔伟华 | Method for manufacturing high-density and low-cost zinc oxide aluminum sputtering target |
| CN102351526A (en) * | 2011-06-11 | 2012-02-15 | 江苏尚易新材料科技有限公司 | Method for preparing AZO target materials by adopting gel injection molding forming |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110436915A (en) * | 2019-08-05 | 2019-11-12 | 北京航大微纳科技有限公司 | A kind of FBAR piezoelectric layer Zinc oxide doped target material and preparation method thereof |
| CN112457001A (en) * | 2020-12-07 | 2021-03-09 | 常州泰捷防雷科技有限公司 | Preparation method of high-compactness zinc oxide piezoresistor chip |
| CN113800892A (en) * | 2021-09-24 | 2021-12-17 | 宜宾红星电子有限公司 | Forming method for fine structure beryllium oxide ceramic |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107188567B (en) | Preparation method of aluminum nitride ceramic with high thermal conductivity | |
| CN110128115A (en) | A kind of method that flash burning prepares oxide eutectic ceramics | |
| CN107555989A (en) | A kind of black zirconia ceramics and preparation method thereof | |
| CN106079030B (en) | A kind of method for fast mfg of the calcium oxide-based ceramic-mould of powder overlay film | |
| CN105272263B (en) | A kind of aqueous tape casting method preparing the carbon containing porous biscuit of silicon carbide reaction-sintered | |
| CN106079032A (en) | A kind of based on agarose, the gel-casting method of ceramic size mixed solution | |
| CN100999017A (en) | Method of gel-casting a cemented carbide body | |
| CN107056297A (en) | Re:Lu2O3Crystalline ceramics and its gel injection moulding preparation | |
| CN105835209A (en) | Ceramic gel injection molding method based on agarose | |
| CN105948742A (en) | Preparation method of white zirconia ceramic | |
| CN105645967A (en) | Preparation method of porous silicon nitride ceramic material with highly oriented through holes | |
| CN106145927A (en) | A kind of manufacture method of gallium doped zinc oxide target | |
| CN107721424A (en) | A kind of method that gel casting forming prepares YAG crystalline ceramics | |
| CN105272223B (en) | A kind of preparation method of large scale oxidation zirconium base heat-barrier material | |
| CN106145926A (en) | A kind of manufacture method of zinc oxide electronic ceramics | |
| CN110436921A (en) | Ceramic and preparation method thereof and electronic equipment | |
| CN101302110A (en) | Method for preparing large-size ceramic grinding ball and mould | |
| CN107914333A (en) | The method that zirconia ceramics cell phone rear cover is made using gel injection molding and forming technology | |
| CN106145928A (en) | A kind of manufacture method of tubular ZnO electronic ceramics | |
| CN106588026A (en) | Method of forming dense or multihole AlN ceramic through injection mould based on agarose gel | |
| CN107963890B (en) | Preparation method of titanium nitride porous conductive ceramic | |
| CN104211407B (en) | A kind of moulding process of big-size complicated shape ceramics biscuits of carbonized bricks | |
| CN105801108B (en) | A kind of preparation method of three-dimensional open-framework lithium matrix body tritium increment agent material | |
| CN102060514A (en) | Method for preparing high-density magnesia ceramic | |
| CN104108938A (en) | Preparation method for Sialon ceramic |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20170831 Address after: 100101, No. 14, building 1, 7, 101, 0801, 3, building 8, building No. 2, West Beichen Road, Chaoyang District, Beijing Applicant after: Chinese LIAN mobile energy investment Limited Address before: 100101 Beijing, Beichen West Road, No. 8, Beichen Century Center, block B, floor 10, Applicant before: Hanergy New materials Technology Co., Ltd. |
|
| TA01 | Transfer of patent application right | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20161123 |
|
| RJ01 | Rejection of invention patent application after publication |