CN106128985A - A kind of device of automatic transfer sapphire substrate - Google Patents
A kind of device of automatic transfer sapphire substrate Download PDFInfo
- Publication number
- CN106128985A CN106128985A CN201610687954.3A CN201610687954A CN106128985A CN 106128985 A CN106128985 A CN 106128985A CN 201610687954 A CN201610687954 A CN 201610687954A CN 106128985 A CN106128985 A CN 106128985A
- Authority
- CN
- China
- Prior art keywords
- bearing box
- control unit
- control
- transfer
- substrate bearing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
Abstract
The present invention discloses the device of a kind of automatic transfer sapphire substrate, belong to technical field of semiconductors, including frame, frame is separately installed with guide rail, feeding unit material, buanch unit and control unit, described feeding unit material and control unit connect, and described buanch unit and control unit connect；Described feeding unit material is used for carrying substrates, and described buanch unit is used for transfer substrates, and described control unit is respectively used to control feeding unit material carrying substrates and control buanch unit transfer substrates.This shifts the device of sapphire substrate automatically, can effectively substitute artificial, improve production efficiency and finished product yield.
Description
Technical field
The present invention relates to a kind of substrate transfering apparatus, be specifically related to the device of a kind of automatic transfer sapphire substrate, belong to
Technical field of semiconductors.
Background technology
PSS (Patterned Sapphire Substrate, graphical sapphire substrate) is at sapphire substrate surface
Form the Sapphire Substrate with microcosmos pattern.The dislocation that on the one hand patterned substrate can effectively reduce epitaxial structure layer is close
Degree, improves crystal mass and the uniformity of epitaxial material, and then improves the internal quantum of light emitting diode；On the other hand,
Owing to graphic structure adds scattering of light, change the optowire of light emitting diode, be lifted out light probability.
PSS technique include cleaning, drying, gluing, photoetching, etch, clean, drying etc., due to the frock folder of different operations
The material of tool and substrate quantity are different, need to shift PSS substrate between the frock clamp of different operations.Artificial transfer
Process easily causes the scuffing of PSS substrate, fragmentation etc., reduces and produces yield；And the speed of human users is slow, and production efficiency is low.
Summary of the invention
The problem existed for above-mentioned prior art, the present invention provides the device of a kind of automatic transfer sapphire substrate, can
Effectively carry sapphire substrate transfer velocity and finished product yield.
To achieve these goals, the device of a kind of automatic transfer sapphire substrate that the present invention uses, including frame, machine
It is separately installed with guide rail, feeding unit material, buanch unit and control unit, described feeding unit material and control unit on frame to connect, institute
State buanch unit and control unit connects；
Described feeding unit material is used for carrying substrates, and described buanch unit is used for transfer substrates, and described control unit is used respectively
In controlling feeding unit material carrying substrates and controlling buanch unit transfer substrates；
Described feeding unit material includes the front road substrate bearing box that rear road substrate bearing box coordinates with rear road substrate bearing box,
Described rear road substrate bearing box is for carrying the substrate after transfer, and described rear road substrate bearing box moves along guide rail, described before
Road substrate bearing box is for carrying substrate to be transferred；
Described buanch unit includes mechanical hand, for driving the control-transferring device of mechanical hand, described control-transferring device
Control mechanical hand and do horizontal displacement, substrate is pushed to rear road substrate bearing box by front road substrate bearing box, after substrate transfer,
Mechanical hand level exits front road substrate bearing box to waiting position；
After described control unit controls, road substrate bearing box supports seat along guide rail horizontal displacement to lifting, is positioned at lifting and supports
Zuo Shanghou road substrate bearing box drops to and front road substrate bearing box correspondence position along Z-direction, machinery in buanch unit
After completing substrate transfer under the effect of hands and control-transferring device, drop to frame bottom, tailing edge track water along lifting support frame
Flat pass and deliver to blanking position.
As improvement, described control unit includes the signal projector that controller is connected, described rear road base with controller
Sheet Carrier box, control-transferring device are respectively equipped with signal receiver.
As improvement, the lower end of described mechanical hand is provided with short rail, and described control-transferring device receives control unit and occurs
Movement directive signal after, control-transferring device control mechanical hand move horizontally on short rail.
As improvement, described guide rail includes that horizontal rail one and horizontal rail two, horizontal rail one are positioned at frame top, horizontal rail two
It is positioned at frame bottom.
As improvement, described control unit is arranged on the side of blanking position.
As improvement, the side of described lifting support frame is provided with driving means, and described driving means is connected with control unit,
Control unit controls driving means and drives lifting to support seat along Z-direction decline.
Compared with prior art, when needs transfer substrates, by road substrate bearing box after control unit control along guide rail
Horizontal displacement supports seat to lifting, is positioned at lifting support Zuo Shanghou road substrate bearing box and drops to and front road base along Z-direction
Sheet Carrier box correspondence position, control unit controls mechanical hand by control-transferring device and does horizontal displacement, by substrate by front road base
Sheet Carrier box pushes to rear road substrate bearing box, completes base in buanch unit under the effect of mechanical hand and control-transferring device
After sheet transfer, rear road substrate bearing box drops to frame bottom along lifting support frame, and tailing edge horizontal rail horizontal transmission is to blanking
Position.This shifts the device of sapphire substrate automatically, can effectively substitute artificial, improve production efficiency and finished product yield.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention；
In figure: 1, rear road substrate bearing box, 2, front road substrate bearing box, 3, mechanical hand, 4, control-transferring device, 5, machine
Frame, 6, lifting support seat, 7, control unit, 8, guide rail, 9, wait position, 10, blanking position, 11, lifting support frame.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention of greater clarity, below by drawings and Examples, to this
Invention is further elaborated.However, it should be understood that specific embodiment described herein is only in order to explain the present invention,
It is not limited to the scope of the present invention.
Unless otherwise defined, all of technical term used herein and scientific terminology are led with the technology belonging to the present invention
The implication that the technical staff in territory is generally understood that is identical, and the term used the most in the description of the invention is intended merely to retouch
State the purpose of specific embodiment, it is not intended that in limiting the present invention.
As it is shown in figure 1, the device of a kind of automatic transfer sapphire substrate, including frame 5, frame 5 is separately installed with and leads
Rail 8, feeding unit material, buanch unit and control unit, described feeding unit material and control unit connect, described buanch unit and control
Unit connects；
Described feeding unit material is used for carrying substrates, and described buanch unit is used for transfer substrates, and described control unit is used respectively
In controlling feeding unit material carrying substrates and controlling buanch unit transfer substrates；
Described feeding unit material includes the front road substrate bearing box that rear road substrate bearing box 1 coordinates with rear road substrate bearing box 1
2, described rear road substrate bearing box 1 is used for the substrate after carrying transfer, and described rear road substrate bearing box 1 moves along guide rail 8, institute
Shu Qian road substrate bearing box 2 is for carrying substrate to be transferred；
Described buanch unit includes mechanical hand 3, for driving the control-transferring device 4 of mechanical hand 3, described transfer controls dress
Put 4 control mechanical hands 3 and do horizontal displacement, substrate is pushed to rear road substrate bearing box 1, substrate by front road substrate bearing box 2
After transfer, mechanical hand 3 level exits front road substrate bearing box 2 to waiting position 9；
After described control unit controls, road substrate bearing box 1 supports seat 6 along guide rail 8 horizontal displacement to lifting, is positioned at lifting
Support seat 6 Shang Hou road substrate bearing box 1 to drop to and front road substrate bearing box 2 correspondence position along Z-direction, at buanch unit
After completing substrate transfer under the effect of middle mechanical hand 3 and control-transferring device 4, drop to frame 5 bottom along lifting support frame 11,
Tailing edge track 8 horizontal transmission is to blanking position 10.
As the improvement of embodiment, described control unit includes the signal projector that controller is connected, institute with controller
Being respectively equipped with signal receiver in Shu Hou road substrate bearing box 1, control-transferring device 4, described controller passes through signal projector
Signal receiver in road substrate bearing box 1 sends command signal backward, and Shi Hou road substrate bearing box 1 moves on guide rail 8, when
Rear road substrate bearing box 1 moves to during with front road substrate bearing box 2 correspondence position, and controller is controlled to transfer by signal projector
The signal receiver of device 4 processed sends order, makes control-transferring device 4 control mechanical hand 3 and does horizontal displacement, by substrate by front road
Substrate bearing box 2 pushes in rear road substrate bearing box 1, and then controller sends order again, road substrate bearing box 1 after control
Dropping to frame 5 bottom along guide rail 8, tailing edge horizontal rail horizontal transmission is to blanking position 10.
As the improvement of embodiment, the lower end of described mechanical hand 3 is provided with short rail, and described control-transferring device 4 receives control
After the movement directive signal that unit processed occurs, control-transferring device 4 controls mechanical hand 3 and moves horizontally on short rail.Use short rail
Design, makes control-transferring device 4 drive mechanical hand 3 to move more convenient, quick.
As the improvement of embodiment, described guide rail 8 includes that horizontal rail one and horizontal rail two, horizontal rail one are positioned at frame 5 and push up
End, horizontal rail two is positioned at frame 5 bottom, and reasonable in design is easy to install, it is ensured that rear road substrate bearing box 1 is at guide rail 8
Upper movement is more convenient.
As the improvement of embodiment, described control unit 7 is arranged on the side of blanking position 10, reasonable in design, installs
Easy to use.
As the improvement of embodiment, the side of described lifting support frame 11 is provided with driving means, described driving means and control
Unit 7 processed connects, and control unit 7 controls driving means and drives lifting support seat 6 to decline along Z-direction, when lifting supports seat 6 edge
When lifting support frame 11 drops to front substrate bearing box 2 same level face, road, driving means controls lifting and supports seat 6 stopping shifting
Dynamic, it is now placed in lifting support seat 6 Shang Hou road substrate bearing box 1 and has coordinated substrate to shift with front road substrate bearing box 2, treat
After substrate is transferred to rear road substrate bearing box 1 by front road substrate bearing box 2, control unit 7 continues to control driving means and drives liter
Descending branch support seat 6 declines, and when extremely lifting support seat 6 is in horizontal rail two isoplanar, lifting supports seat 6 along horizontal rail horizontal transmission
To blanking position 10.
When needs transfer substrates, road substrate bearing box 1 horizontal rail one water along guide rail 8 after being controlled by control unit 7
Prosposition moves to lifting and supports seat 6, and then rear road substrate bearing box 1 is under lifting supports the effect of seat 6, drops to along Z-direction
With front road substrate bearing box 2 correspondence position, control unit 7 controls mechanical hand 3 by control-transferring device 4 and does horizontal displacement, will
Substrate is pushed to rear road substrate bearing box 1 by front road substrate bearing box 2, and in buanch unit, mechanical hand 3 and transfer control dress
Putting after completing substrate transfer under the effect of 4, rear road substrate bearing box 1 drops to frame 5 bottom, tailing edge water along lifting support frame 11
Plate rail two horizontal transmission is to blanking position.This shifts the device of sapphire substrate automatically, can effectively substitute artificial, improve production efficiency
And finished product yield.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit the present invention, all essences in the present invention
Any amendment, equivalent or the improvement etc. made within god and principle, should be included within the scope of the present invention.
Claims (6)
1. the device of an automatic transfer sapphire substrate, it is characterised in that include that frame (5), frame are separately installed with on (5)
Guide rail (8), feeding unit material, buanch unit and control unit, described feeding unit material and control unit connect, described buanch unit and
Control unit connects；
Described feeding unit material is used for carrying substrates, and described buanch unit is used for transfer substrates, and described control unit is respectively used to control
Feeding unit material carrying substrates processed and control buanch unit transfer substrates；
Described feeding unit material includes the front road substrate bearing box that rear road substrate bearing box (1) coordinates with rear road substrate bearing box (1)
(2), described rear road substrate bearing box (1) substrate after carrying transfer, and described rear road substrate bearing box (1) is along guide rail
(8) mobile, described front road substrate bearing box (2) is for carrying substrate to be transferred；
Described buanch unit includes mechanical hand (3), is used for driving the control-transferring device (4) of mechanical hand (3), and described transfer controls
Device (4) controls mechanical hand (3) and does horizontal displacement, and by front road substrate bearing box (2), substrate is pushed to rear road substrate bearing box
(1), after substrate transfer, mechanical hand (3) level exits front road substrate bearing box (2) to waiting position (9)；
After described control unit controls, road substrate bearing box (1) supports seat (6) along guide rail (8) horizontal displacement to lifting, is positioned at liter
Descending branch support seat (6) Shang Hou road substrate bearing box (1) drops to and front road substrate bearing box (2) correspondence position along Z-direction,
After buanch unit completes under the effect of mechanical hand (3) and control-transferring device (4) substrate transfer, under lifting support frame (11)
It is down to frame (5) bottom, tailing edge track (8) horizontal transmission to blanking position (10).
The device of a kind of automatic transfer sapphire substrate the most according to claim 1, it is characterised in that described control unit
Include the signal projector that controller is connected with controller, in described rear road substrate bearing box (1), control-transferring device (4)
It is respectively equipped with signal receiver.
The device of a kind of automatic transfer sapphire substrate the most according to claim 2, it is characterised in that described mechanical hand
(3) lower end is provided with short rail, after described control-transferring device (4) receives the movement directive signal that control unit occurs, and transfer
Control device (4) control mechanical hand (3) to move horizontally on short rail.
The device of a kind of automatic transfer sapphire substrate the most according to claim 1, it is characterised in that described guide rail (8)
Including horizontal rail one and horizontal rail two, horizontal rail one is positioned at frame (5) top, and horizontal rail two is positioned at frame (5) bottom.
The device of a kind of automatic transfer sapphire substrate the most according to claim 1, it is characterised in that described control unit
(7) side of blanking position (10) it is arranged on.
The device of a kind of automatic transfer sapphire substrate the most according to claim 1, it is characterised in that described lifting supports
The side of frame (11) is provided with driving means, and described driving means is connected with control unit (7), and control unit (7) controls to drive dress
Put driving lifting and support seat (6) along Z-direction decline.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610687954.3A CN106128985A (en) | 2016-08-18 | 2016-08-18 | A kind of device of automatic transfer sapphire substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610687954.3A CN106128985A (en) | 2016-08-18 | 2016-08-18 | A kind of device of automatic transfer sapphire substrate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106128985A true CN106128985A (en) | 2016-11-16 |
Family
ID=57279125
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610687954.3A Pending CN106128985A (en) | 2016-08-18 | 2016-08-18 | A kind of device of automatic transfer sapphire substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106128985A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201345356Y (en) * | 2008-11-03 | 2009-11-11 | 北京有色金属研究总院 | Rewinder suitable for various media and various sizes |
| US20110313565A1 (en) * | 2010-06-17 | 2011-12-22 | Semes Co., Ltd. | Substrate Processing Apparatus And Method For Loading And Unloading Substrates |
| CN202384384U (en) * | 2011-12-31 | 2012-08-15 | 英利能源（中国）有限公司 | Boat-inversing inserting device of solar battery piece |
| CN202736960U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Automatic chip loading machine |
| CN205984920U (en) * | 2016-08-18 | 2017-02-22 | 徐州同鑫光电科技股份有限公司 | Automatic shift device of sapphire substrate |
-
2016
- 2016-08-18 CN CN201610687954.3A patent/CN106128985A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201345356Y (en) * | 2008-11-03 | 2009-11-11 | 北京有色金属研究总院 | Rewinder suitable for various media and various sizes |
| US20110313565A1 (en) * | 2010-06-17 | 2011-12-22 | Semes Co., Ltd. | Substrate Processing Apparatus And Method For Loading And Unloading Substrates |
| CN202384384U (en) * | 2011-12-31 | 2012-08-15 | 英利能源（中国）有限公司 | Boat-inversing inserting device of solar battery piece |
| CN202736960U (en) * | 2012-05-19 | 2013-02-13 | 东莞市启天自动化设备有限公司 | Automatic chip loading machine |
| CN205984920U (en) * | 2016-08-18 | 2017-02-22 | 徐州同鑫光电科技股份有限公司 | Automatic shift device of sapphire substrate |
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Application publication date: 20161116 |
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| RJ01 | Rejection of invention patent application after publication |