CN106124051A - A kind of small-sized Raman spectrometer - Google Patents
A kind of small-sized Raman spectrometer Download PDFInfo
- Publication number
- CN106124051A CN106124051A CN201610799758.5A CN201610799758A CN106124051A CN 106124051 A CN106124051 A CN 106124051A CN 201610799758 A CN201610799758 A CN 201610799758A CN 106124051 A CN106124051 A CN 106124051A
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- Prior art keywords
- small
- raman spectrometer
- spectrogrph
- raman
- sized
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- 238000001069 Raman spectroscopy Methods 0.000 title claims abstract description 76
- 230000003287 optical effect Effects 0.000 claims abstract description 25
- 238000012360 testing method Methods 0.000 claims abstract description 11
- 230000005540 biological transmission Effects 0.000 claims abstract description 8
- 238000005057 refrigeration Methods 0.000 claims abstract description 8
- 230000005284 excitation Effects 0.000 claims abstract description 4
- 238000001514 detection method Methods 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 3
- 239000010931 gold Substances 0.000 claims description 3
- 229910052737 gold Inorganic materials 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 abstract description 7
- 238000010168 coupling process Methods 0.000 description 9
- 238000005859 coupling reaction Methods 0.000 description 9
- 230000008878 coupling Effects 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 7
- 238000011160 research Methods 0.000 description 7
- 238000001237 Raman spectrum Methods 0.000 description 5
- 239000013307 optical fiber Substances 0.000 description 4
- 238000011161 development Methods 0.000 description 3
- 238000012827 research and development Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 231100000749 chronicity Toxicity 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 230000002708 enhancing effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000004416 surface enhanced Raman spectroscopy Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000002381 microspectrum Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
Abstract
The invention provides a kind of small-sized Raman spectrometer, it includes light path device before Raman, spectrogrph and ccd detector；Before Raman, light path device includes laser instrument, laser line filter, dichroic mirror, convergent mirror, specimen holder, Rayleigh scattering optical filter, plane mirror and coupled lens；Wherein, the laser that described laser instrument is launched, by after laser line filter, reflects through dichroic mirror, then focuses on testing sample by convergent mirror；The Raman signal produced after laser excitation testing sample passes through Rayleigh scattering optical filter after dichroic mirror transmission, then is assembled the entrance port entering spectrogrph after plane mirror reflects by coupled lens.The present invention uses the mode that direct light path couples, and improves the collection efficiency of Raman signal, also makes testing sample alternative improve；Separately, the present invention uses refrigeration mode area array CCD detector to carry out spectra collection, has higher signal to noise ratio.
Description
Technical field
The present invention relates to Raman spectroscopy, especially with regard to a kind of small-sized Raman spectrometer.
Background technology
Raman spectrum is a kind of finger printing, and different types of compound is different due to its chemical constitution, Raman spectrum
Characteristic peak is the most different.Along with laser technology and the fast development of CCD technology in recent years, Portable Raman optical spectrum detection product by
Gradually having come into the practical stage, large quantities of companies all starts develop and produce Portable Raman optical spectrum product, reduces and draws
The use threshold of graceful spectrum.Raman spectrum has been achieved for important application in Rapid identification unknown compound association area, this
A little association areas include bioscience, medical diagnosis, pharmaceuticals industry, food safety, chemical monitoring etc..Raman spectrometer is all right
For workshop or application on site, because it need not sample pre-treatments, it is not necessary to directly contact sample.
At present, applicant developed Finder Vista (micro-graceful), Finder One (micro-spectrum), MiRass (micro-shake) and
Combination type Raman spectrum system, these products have high-resolution, high s/n ratio, belong to scientific research level Raman spectrometer product, its
It is mainly used in institution of higher learning and the physics of scientific research institutions and chemical experiment research.Due to scientific research level Raman spectrometer small product size
Greatly, the most portable, be not particularly suited for detect level client, so, research and development be applicable to detect level client small-sized Raman spectrometer
Become this area to need badly and solve the technical problem that.It addition, applicant is by the research and development of these a few money scientific research level Raman products above-mentioned, the palm
Abundant Raman application experience and the key technology of a large amount of Raman spectrometer design are held.Applicant has the confidence research and development of abundance
Go out to meet the small-sized Raman spectrometer of market demand.
From the point of view of the chronicity of technology development and the chronicity of demand, miniature/handheld Raman spectrometer will be ability
The major trend of territory development, it is mainly by spectral module (spectrogrph) and the CCD linear array device (refrigeration or room temperature type) of miniaturization
And laser optical path etc. is constituted.Present stage, miniature/handheld Raman spectrometer is primarily limited to the performance of CCD linear array device, it is difficult to
Reach the demand of Raman detection, so miniature/handheld Raman spectrometer on the market is generally only " looking very beautiful ", from reality
Also have a certain distance with changing, even if coordinating SERS technology, being the most still difficult to meet and detecting especially trace inspection
The actual demand surveyed, adds SERS technology itself ripe not enough and efficient so that handheld Raman spectrometer is in a short time
It is difficult to lead market.
Prior art related to the present invention:
1, current, for easy to use and unified coupled modes, on market, most Miniature Raman spectrometer all use
The mode of optical fiber coupling, but optical fiber coupling energy loss is relatively big, in the detection application of Raman, it is impossible to test to some Ramans
The sample that signal is more weak, so makes the alternative reduction of sample.
The coupled modes versatility of the front light path module of these Miniature Raman spectrometer is low, does not has fixing coupling interface,
It cannot carry out direct-coupling with any a spectrogrph, and coupling optical path needs to carry out special design.
2, current, on market, most Miniature Raman spectrometer all use refrigeration mode scientific research level CCD, relatively costly.
Summary of the invention
In order to solve above-mentioned shortcoming and defect, it is an object of the invention to provide a kind of small-sized Raman spectrometer.
For reaching above-mentioned purpose, the invention provides a kind of small-sized Raman spectrometer, this spectrogrph includes light path before Raman
Device, spectrogrph and ccd detector；
Before described Raman, light path device includes laser instrument, laser line filter, dichroic mirror, convergent mirror, specimen holder, Rayleigh
Diffuser filter, plane mirror and coupled lens；
Wherein, the laser that described laser instrument is launched, by after laser line filter, reflects through dichroic mirror, then by meeting
Poly-mirror focuses on testing sample；
The Raman signal produced after laser excitation testing sample passes through Rayleigh scattering optical filter after dichroic mirror transmission, then
Assembled the entrance port entering spectrogrph by coupled lens after plane mirror reflects.
According to small-sized Raman spectrometer of the present invention, wherein, before described Raman, light path device passes through one with spectrogrph
Group coupled lens couples, and this coupled lens has the F/# consistent with spectrogrph, with light path Raman signal and spectrum before ensureing
Instrument has maximum coupling efficiency.
According to small-sized Raman spectrometer of the present invention, it is preferable that described spectrogrph is the spectrogrph of C-T type structure.
According to small-sized Raman spectrometer of the present invention, it is preferable that grating used by described spectrogrph includes that plane is delineated
Grating, transmission grating or the concave grating of flattened field correction.
According to small-sized Raman spectrometer of the present invention, wherein, the diffraction efficiency of described transmission grating is higher than 90%, phase
Compared with plane ruled grating, its diffraction efficiency can improve 10-20%.
According to small-sized Raman spectrometer of the present invention, can be by using the transmission grating of high-diffraction efficiency or flat picture
The concave grating of field correction substitutes the plane ruled grating in spectrogrph, to improve the receipts light efficiency of spectrogrph itself.But such as
If really before Raman, light path device still couples with optical fiber with spectrogrph, coupling efficiency does not reaches the direct light path of the present invention yet
The technique effect that coupling can reach.
According to small-sized Raman spectrometer of the present invention, it is preferable that the line density of described plane ruled grating is
1200g/750nm.Wherein, 1200 grooves can meet the resolution requirement of Raman application.
According to small-sized Raman spectrometer of the present invention, it is preferable that the blaze wavelength of described plane ruled grating is
750nm.Because this spectrogrph is mainly used in the Raman application of 785nm, the wavelength band of use is 800nm-940nm, so glittering
Wavelength selects 750nm.
According to small-sized Raman spectrometer of the present invention, it is preferable that optical element used by described spectrogrph is the light of F/3
Learn element.The present invention selects the optical element of little focal length, and then can reduce the volume of spectrogrph, it addition, in order to improve spectrum
The throughput of instrument, selects the optical element of F/3.
According to small-sized Raman spectrometer of the present invention, it is preferable that described optical element is that surface is coated with infrared enhancing
The optical element of gold film.
According to small-sized Raman spectrometer of the present invention, it is preferable that described ccd detector is TE refrigeration (quasiconductor system
Cold) profile battle array ccd detector.
According to small-sized Raman spectrometer of the present invention, it is preferable that the cryogenic temperature of described ccd detector is minimum to be reached-
60℃。
According to small-sized Raman spectrometer of the present invention, it is preferable that the pixel count of described ccd detector more than 2000 ×
256, Pixel Dimensions is 15 × 15 μm, and CCD detection face size is more than 30 × 3.8mm.
The invention provides a kind of small-sized Raman spectrometer, it is a small size but has the Raman of relatively high s/n ratio
Spectrogrph；Wherein, the mode using direct light path to couple before described Raman between light path device with spectrogrph, largely carry
The high collection efficiency of Raman signal, also makes the alternative raising of testing sample；It addition, the small-sized Raman spectrum of the present invention
Instrument uses the area array CCD detector (cryogenic temperature is minimum reaches-60 DEG C) of refrigeration mode to carry out spectra collection, relative to non-refrigeration type
Linear CCD Detector, has higher signal to noise ratio, is applicable not only to industrial customer, is more suitable for scientific research level client.
Accompanying drawing explanation
The small-sized Raman spectrometer structural representation that Fig. 1 provides for the embodiment of the present invention.
Main Reference label declaration:
1 laser instrument；
2 laser line filter；
3 dichroic mirrors；
4 convergent mirrors；
5 specimen holders；
6 Rayleigh scattering optical filters；
7 plane mirrors；
8 coupled lens；
9 spectrogrphs；
10 ccd detectors.
Detailed description of the invention
In order to the technical characteristic of the present invention, purpose and beneficial effect are more clearly understood from, in conjunction with in detail below
Technical scheme is carried out described further below by embodiment and Figure of description, but it is not intended that to the present invention can
The restriction of practical range.
Embodiment 1
Present embodiments providing a kind of small-sized Raman spectrometer, its structural representation is as it is shown in figure 1, can from Fig. 1
Going out, this spectrogrph includes light path device before Raman, spectrogrph 9 and ccd detector 10；
Before described Raman, light path device includes laser instrument 1, laser line filter 2, dichroic mirror 3, convergent mirror 4, specimen holder
5, Rayleigh scattering optical filter 6, plane mirror 7 and coupled lens 8；
Wherein, the laser that described laser instrument 1 is launched is by, after laser line filter 2, reflecting through dichroic mirror 3, then lead to
Overconvergence mirror 4 focuses on testing sample；
The Raman signal produced after laser excitation testing sample passes through Rayleigh scattering optical filter 6 after dichroic mirror 3 transmission,
Assembled the entrance port entering spectrogrph 9 again by coupled lens 8 after plane mirror 7 reflects；
Described spectrogrph 9 is the spectrogrph of C-T type structure, and grating used by this spectrogrph is plane ruled grating, and its line is close
Degree is 1200g/750nm, and blaze wavelength is 750nm；
Optical element used by this spectrogrph 9 is the optical element of F/3, and this optical element is that surface is coated with infrared enhancing gold
The optical element of film；
Described ccd detector 10 is TE refrigeration mode area array CCD detector, and the cryogenic temperature of this ccd detector is minimum reaches-60
DEG C its pixel count is more than 2000 × 256, and Pixel Dimensions is 15 × 15 μm, and CCD detection face size is more than 30 × 3.8mm.
The small-sized Raman spectrometer that the present embodiment is provided uses the mode of direct light path coupling, and it can measure the two of silicon
Peak, rank, and the mode using optical fiber to couple is only capable of measuring the single order peak of silicon, this illustrates small-sized Raman light provided by the present invention
Spectrometer uses direct light path coupled modes, can improve signal to noise ratio to a great extent.
Additionally, the spectral resolution that small-sized Raman spectrometer provided by the present invention can reach, it is better than 10cm-1, and
Technical target of the product with type is suitable in the market.
Claims (10)
1. a small-sized Raman spectrometer, it is characterised in that this spectrogrph includes that light path device before Raman, spectrogrph and CCD visit
Survey device；
Before described Raman, light path device includes laser instrument, laser line filter, dichroic mirror, convergent mirror, specimen holder, Rayleigh scattering
Optical filter, plane mirror and coupled lens；
Wherein, the laser that described laser instrument is launched, by after laser line filter, reflects through dichroic mirror, then passes through convergent mirror
Focus on testing sample；
The Raman signal produced after laser excitation testing sample passes through Rayleigh scattering optical filter after dichroic mirror transmission, then through flat
Assembled the entrance port entering spectrogrph by coupled lens after the reflecting mirror reflection of face.
Small-sized Raman spectrometer the most according to claim 1, it is characterised in that described spectrogrph is the light of C-T type structure
Spectrometer.
Small-sized Raman spectrometer the most according to claim 1 and 2, it is characterised in that grating used by described spectrogrph includes
Plane ruled grating, transmission grating or the concave grating of flattened field correction.
Small-sized Raman spectrometer the most according to claim 3, it is characterised in that the line density of described plane ruled grating is
1200g/750nm。
5. according to the small-sized Raman spectrometer described in claim 3 or 4, it is characterised in that glittering of described plane ruled grating
Wavelength is 750nm.
Small-sized Raman spectrometer the most according to claim 1 and 2, it is characterised in that optical element used by described spectrogrph
Optical element for F/3.
Small-sized Raman spectrometer the most according to claim 6, it is characterised in that it is infrared that described optical element is that surface is coated with
Strengthen the optical element of gold film.
Small-sized Raman spectrometer the most according to claim 1, it is characterised in that described ccd detector is TE refrigeration profile
Battle array ccd detector.
Small-sized Raman spectrometer the most according to claim 8, it is characterised in that the cryogenic temperature of described ccd detector is
Low reach-60 DEG C.
Small-sized Raman spectrometer the most according to claim 8 or claim 9, it is characterised in that the pixel count of described ccd detector
More than 2000 × 256, Pixel Dimensions is 15 × 15 μm, and CCD detection face size is more than 30 × 3.8mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610799758.5A CN106124051A (en) | 2016-08-31 | 2016-08-31 | A kind of small-sized Raman spectrometer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610799758.5A CN106124051A (en) | 2016-08-31 | 2016-08-31 | A kind of small-sized Raman spectrometer |
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| CN106124051A true CN106124051A (en) | 2016-11-16 |
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| CN201610799758.5A Pending CN106124051A (en) | 2016-08-31 | 2016-08-31 | A kind of small-sized Raman spectrometer |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106645093A (en) * | 2017-03-21 | 2017-05-10 | 中国工程物理研究院材料研究所 | Raman spectrum plane imaging device |
| CN106770176A (en) * | 2016-12-26 | 2017-05-31 | 同方威视技术股份有限公司 | The method for safety monitoring of Raman spectrum testing equipment and Raman spectrum testing equipment |
| CN106770182A (en) * | 2017-03-24 | 2017-05-31 | 北京极光仪器科技有限公司 | The Portable Raman spectrometer of tool CCD turnover light paths |
| CN107807118A (en) * | 2017-12-13 | 2018-03-16 | 奥谱天成（厦门）光电有限公司 | A kind of handheld Raman spectrometer based on refrigeration mode back lighting type CCD |
| CN109374592A (en) * | 2018-09-19 | 2019-02-22 | 北京理工大学 | A kind of miniature laser spectrometer |
| CN109470685A (en) * | 2019-01-10 | 2019-03-15 | 华东师范大学 | A kind of Raman lines scanning Hyperspectral imager of integrated reflection and transmission |
| CN109596598A (en) * | 2019-01-07 | 2019-04-09 | 武汉大学 | A kind of portable mono wavelength Raman photometer based on SERS |
| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
| CN111175282A (en) * | 2020-02-24 | 2020-05-19 | 江苏师范大学 | Raman spectrometer based on objective signal acquisition |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106770176A (en) * | 2016-12-26 | 2017-05-31 | 同方威视技术股份有限公司 | The method for safety monitoring of Raman spectrum testing equipment and Raman spectrum testing equipment |
| CN106645093A (en) * | 2017-03-21 | 2017-05-10 | 中国工程物理研究院材料研究所 | Raman spectrum plane imaging device |
| CN106770182A (en) * | 2017-03-24 | 2017-05-31 | 北京极光仪器科技有限公司 | The Portable Raman spectrometer of tool CCD turnover light paths |
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| CN107807118A (en) * | 2017-12-13 | 2018-03-16 | 奥谱天成（厦门）光电有限公司 | A kind of handheld Raman spectrometer based on refrigeration mode back lighting type CCD |
| CN109374592A (en) * | 2018-09-19 | 2019-02-22 | 北京理工大学 | A kind of miniature laser spectrometer |
| CN109596598A (en) * | 2019-01-07 | 2019-04-09 | 武汉大学 | A kind of portable mono wavelength Raman photometer based on SERS |
| CN109470685A (en) * | 2019-01-10 | 2019-03-15 | 华东师范大学 | A kind of Raman lines scanning Hyperspectral imager of integrated reflection and transmission |
| CN109975210A (en) * | 2019-04-28 | 2019-07-05 | 重庆冠雁科技有限公司 | A kind of bare engine module of handheld Raman spectrometer |
| CN111175282A (en) * | 2020-02-24 | 2020-05-19 | 江苏师范大学 | Raman spectrometer based on objective signal acquisition |
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Application publication date: 20161116 |