CN106123758A - 一种碳化硅晶体表面台阶宽度的检测方法 - Google Patents
一种碳化硅晶体表面台阶宽度的检测方法 Download PDFInfo
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- CN106123758A CN106123758A CN201610464045.3A CN201610464045A CN106123758A CN 106123758 A CN106123758 A CN 106123758A CN 201610464045 A CN201610464045 A CN 201610464045A CN 106123758 A CN106123758 A CN 106123758A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/28—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring contours or curvatures
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- General Physics & Mathematics (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
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CN201610464045.3A CN106123758B (zh) | 2016-06-23 | 2016-06-23 | 一种碳化硅晶体表面台阶宽度的检测方法 |
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CN201610464045.3A CN106123758B (zh) | 2016-06-23 | 2016-06-23 | 一种碳化硅晶体表面台阶宽度的检测方法 |
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CN106123758A true CN106123758A (zh) | 2016-11-16 |
CN106123758B CN106123758B (zh) | 2018-09-04 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030107541A1 (en) * | 2001-12-07 | 2003-06-12 | Rohm Co., Ltd. | LCD driver |
CN101329158A (zh) * | 2008-07-28 | 2008-12-24 | 哈尔滨工业大学 | 原子力显微镜测量固体薄膜厚度的方法 |
CN103226007A (zh) * | 2013-04-19 | 2013-07-31 | 天津大学 | 用于测量纳米级金属薄膜厚度的spr相位测量方法 |
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2016
- 2016-06-23 CN CN201610464045.3A patent/CN106123758B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030107541A1 (en) * | 2001-12-07 | 2003-06-12 | Rohm Co., Ltd. | LCD driver |
CN101329158A (zh) * | 2008-07-28 | 2008-12-24 | 哈尔滨工业大学 | 原子力显微镜测量固体薄膜厚度的方法 |
CN103226007A (zh) * | 2013-04-19 | 2013-07-31 | 天津大学 | 用于测量纳米级金属薄膜厚度的spr相位测量方法 |
Non-Patent Citations (1)
Title |
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商庆杰等: "SiC MESFET 工艺在片检测技术", 《半导体技术》 * |
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CN106123758B (zh) | 2018-09-04 |
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Inventor after: Zhu Can Inventor after: Lv Yujun Inventor after: Song Jian Inventor after: Liu Jiapeng Inventor before: Zhu Can Inventor before: Lv Yujun Inventor before: Song Jian Inventor before: Liu Jiapeng |
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Address after: No.99, Tianyue South Road, Huaiyin District, Jinan City, Shandong Province Patentee after: Shandong Tianyue advanced technology Co., Ltd Address before: Room 1106-6-01, AB Block, Century Fortune Center, West Side of Xinyu Road, Jinan High-tech Zone, Shandong Province Patentee before: Shandong Tianyue Advanced Materials Technology Co.,Ltd. |
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