CN106115610B - The preparation method of nano-micro structure - Google Patents
The preparation method of nano-micro structure Download PDFInfo
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- CN106115610B CN106115610B CN201610526724.9A CN201610526724A CN106115610B CN 106115610 B CN106115610 B CN 106115610B CN 201610526724 A CN201610526724 A CN 201610526724A CN 106115610 B CN106115610 B CN 106115610B
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- B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
- B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
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- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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Abstract
The present invention provides a kind of preparation method of nano-micro structure, comprises the following steps：The scattered hydrophobic polymer particle layer of nanoscale is formed on substrate；Generate multiple the first ingots for corresponding and being spaced apart with the plurality of hydrophobic polymer particle respectively；One second ingot is generated on every one first ingot；One the 3rd ingot is generated on every one second ingot；Wherein, the first polymer does not dissolve in second polymer solution, and the second polymer does not dissolve in third polymer solution, and first preset concentration, the second preset concentration and the 3rd preset concentration reduce successively.The present invention is simple with technological process, and the more preferable beneficial effect of antireflective property of the substrate.
Description
Technical field
The present invention relates to optics production field, more particularly to a kind of preparation method of nano-micro structure.
Background technology
At present, the micro- anti-reflection structure of the nanometer of moth eye obtains in solar cell, biology sensor and display panel field
To being widely applied.Currently used preparation method has photoetching process, electron beam lithography, nano-imprint method and self-assembly method.Light
Lithography and electron beam lithography require higher in terms of technology of preparing, and equipment costly, prepares cost height, and in terms of selection
Also can be subject to certain restrictions.
Therefore, the prior art is defective, need to improve.
The content of the invention
It is an object of the invention to provide a kind of preparation method of nano-micro structure；To solve existing nano-micro structure
The technical problem of complex manufacturing technology in preparation method.
To solve the above problems, technical scheme provided by the invention is as follows：
A kind of preparation method of nano-micro structure is provided, comprised the following steps：
The scattered hydrophobic polymer particle layer of nanoscale is formed on substrate, the hydrophobic polymer particle layer has multiple
Every the hydrophobic polymer particle of distribution；
The first polymer solution of the first preset concentration is coated with the substrate, and first in the first polymer solution is poly-
Compound is crystallized by nuclearing centre of hydrophobic polymer particle, with generate it is multiple respectively with the plurality of hydrophobic polymer particle one
One the first ingot for corresponding to and being spaced apart；
The second polymer solution of the second preset concentration is coated with the plurality of first ingot, the second polymer solution
In second polymer using the contact surface with first ingot as nuclearing centre carry out heterogeneous nucleation crystallization, with respectively each
One second ingot is generated on first ingot；
The third polymer solution of the 3rd preset concentration is coated with second ingot, in the third polymer solution
Third polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one second ingot, with respectively every 1 the
One the 3rd ingot is generated on two ingots；
Wherein, the first polymer does not dissolve in second polymer solution, and the second polymer is molten insoluble in third polymer
Liquid, first preset concentration, the second preset concentration and the 3rd preset concentration reduce successively.
It is further comprising the steps of in the preparation method of nano-micro structure of the present invention：
The 4th polymer solution of the 4th preset concentration is coated with the 3rd ingot, in the 4th polymer solution
4th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 3rd ingot, with respectively every 1 the
One the 4th ingot is generated on three ingots；The third polymer does not dissolve in the 4th polymer solution, and the described 4th is pre-
If concentration is less than the 3rd preset concentration.
It is further comprising the steps of in the preparation method of nano-micro structure of the present invention：
The 5th polymer solution of the 5th preset concentration is coated with the 4th ingot, in the 5th polymer solution
5th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 4th ingot, with respectively every 1 the
One the 5th ingot is generated on four ingots, the 4th polymer does not dissolve in the 5th polymer solution, and the described 5th is pre-
If concentration is less than the 4th preset concentration.
It is further comprising the steps of in the preparation method of nano-micro structure of the present invention：
The 6th polymer solution of the 6th preset concentration is coated with the 5th ingot, in the 6th polymer solution
6th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 5th ingot, with respectively every 1 the
One the 6th ingot is generated on five ingots, the 5th polymer does not dissolve in the 6th polymer solution, and the described 6th is pre-
If concentration is less than the 5th preset concentration.
In the preparation method of nano-micro structure of the present invention, the first polymer, third polymer and the 5th
Polymer is identical polymer, and the second polymer, the 4th polymer and the 6th polymer are identical polymer.
In the preparation method of nano-micro structure of the present invention, the first polymer and the third polymer
For poly- fluorine benzene material, the second polymer is poly- benzene material；Or
The first polymer and the third polymer are water-soluble ionic polymers material, the second polymer
For oil-soluble polyester material.
In the preparation method of nano-micro structure of the present invention, the formation nanoscale on substrate disperses hydrophobic
The step of polymer particles layers, includes：
One layer of copolymer mixture being made up of hydrophilic polymer and hydrophobic polymer of spin coating on substrate, copolymerization mixing
Thing is distributed in nanoscale；
The hydrophilic polymer is washed away using polar solvent, to form the scattered hydrophobic polymer particle layer of nanoscale,
The hydrophobic polymer particle layer has multiple hydrophobic polymer particles being spaced apart.
In the preparation method of nano-micro structure of the present invention, the hydrophobic polymer is poly-methyl methacrylate
Ester, the hydrophilic polymer are polystyrene.
It is further comprising the steps of in the preparation method of nano-micro structure of the present invention：
Washed away and do not crystallized or the less first polymer of crystallinity, second polymer and the respectively using corresponding solvent
Trimerization compound.
In the preparation method of nano-micro structure of the present invention, the substrate is glass substrate.
Compared with prior art, the present invention by least being crystallized three times on substrate, and the polymerization used every time
The concentration of thing solution reduces successively, so as to formed on substrate it is multiple it is lower it is big small convex cone shaped nano-micro structure, technique stream
Journey very simple, and it is more preferable beneficial to effect with antireflective property using the substrate with nano-micro structure that this technique is formed
Fruit.
For the above of the present invention can be become apparent, preferred embodiment cited below particularly, and coordinate institute's accompanying drawings, make
Describe in detail as follows：
Brief description of the drawings
Fig. 1 is the flow chart of the preferred embodiment of the preparation method of the nano-micro structure of the present invention；
Fig. 2A-Fig. 2 E are the schematic diagram of the preparation method of the nano-micro structure of the present invention.
Embodiment
The explanation of following embodiment is with reference to additional schema, to illustrate the particular implementation that the present invention can be used to implementation
Example.The direction term that the present invention is previously mentioned, such as " on ", " under ", "front", "rear", "left", "right", " interior ", " outer ", " side "
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used is to illustrate and understand the present invention, and is not used to
The limitation present invention.
In figure, the similar unit of structure is represented with identical label.
Fig. 1 is refer to, Fig. 1 is the flow chart of the preferred embodiment of the preparation method of the nano-micro structure of the present invention.At this
In preferred embodiment, the preparation method of the nano-micro structure, comprise the following steps：
S101, forms the scattered hydrophobic polymer particle layer of nanoscale on substrate, and the hydrophobic polymer particle layer has
Multiple hydrophobic polymer particles being spaced apart；
S102, the first polymer solution of the first preset value is coated with substrate, first in the first polymer solution
Polymer is crystallized by nuclearing centre of hydrophobic polymer particle, with generate it is multiple respectively with the plurality of hydrophobic polymer particle
The first ingot for corresponding and being spaced apart；
S103, is coated with the second polymer solution of the second preset concentration on first ingot, and the second polymer is molten
Second polymer in liquid carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with the first ingot, with respectively each
One second ingot is generated on first ingot；
S104, is coated with the third polymer solution of the 3rd preset concentration on second ingot, and the third polymer is molten
Third polymer in liquid carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one second ingot, to exist respectively
One the 3rd ingot is generated on every one second ingot；
S105, is coated with the 4th polymer solution of the 4th preset concentration on the 3rd ingot, and the 4th polymer is molten
The 4th polymer in liquid carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 3rd ingot, to exist respectively
One the 4th ingot is generated on every one the 3rd ingot；
S106, is coated with the 5th polymer solution of the 5th preset concentration on the 4th ingot, and the 5th polymer is molten
The 5th polymer in liquid carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 4th ingot, to exist respectively
One the 5th ingot is generated on every one the 4th ingot；
S107, is coated with the 6th polymer solution of the 6th preset concentration on the 5th ingot, and the 6th polymer is molten
The 6th polymer in liquid carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 5th ingot, to exist respectively
One the 6th ingot is generated on every one the 5th ingot.
Wherein, the first polymer does not dissolve in second polymer solution, and the second polymer is molten insoluble in third polymer
Liquid, the third polymer do not dissolve in the 4th polymer solution, and the 4th polymer does not dissolve in the 5th polymer solution, the 5th polymerization
Thing does not dissolve in the 6th polymer solution.First preset concentration, the second preset concentration, the 3rd preset concentration, the 4th preset concentration,
5th preset concentration and the 6th preset concentration reduce successively.
It is to be appreciated that the first polymer, third polymer and the 5th polymer can be identical polymer, should
Second polymer, the 4th polymer and the 6th polymer can be identical polymer.
It is to be appreciated that in present inventor, step S105 to S107 is not indispensable, as long as meeting at least shape
Into the distribution layer of three-layered node crystal block, also, after step S107, similar means can also be used, continue coating polymerization
Thing solution is to form the distribution layer of ingot.
2A-2E is carried out to each step of the preparation method of the nano-micro structure in the preferred embodiment below in conjunction with the accompanying drawings
Describe in detail.
In step S101, forming the method for the scattered hydrophobic polymer particle layer of nanoscale can use：In substrate
One layer of copolymer mixture being made up of hydrophilic polymer and hydrophobic polymer of spin coating on 11, the copolymer mixture are in nanometer fraction
Cloth；The hydrophilic polymer is washed away using polar solvent, to form the scattered hydrophobic polymer particle layer of nanoscale.Wherein,
First substrate surface must be cleaned before polymer blend is coated with.Due to polymer blend two groups of polymer hydrophily and
Hydrophobicity is different, and polymer shows nanoscale distribution.The hydrophobic polymer is polymethyl methacrylate, the hydrophilic polymer
Thing is polystyrene, and certainly, it is not limited to this.Go to step S102.
In step S102, first polymer solution is uniformly coated on to the substrate 11 that hydrophobic polymer particle is distributed with
After upper, the speed of the volatilization of the solvent of first polymer solution is controlled, makes first polymer start to crystallize in substrate surface, wherein
The evaporation rate of solvent can be controlled by the air pressure or temperature on control base board surface.Due to depositing for nano level particulate
, the molecule of first polymer can be crystallized by nuclearing centre of nanoparticle, by control solvent volatilize speed and
The temperature of crystallization, the size of polymer crystallization and the compactness of crystal can be preferably controlled, and be washed away with solvent and do not crystallize or tie
The brilliant less polymer of degree, so as to form preferable first ingot 12 of surface characteristic.As shown in Figure 2 A, step S103 is gone to.
In step S103, after second polymer solution is uniformly coated on every one first ingot 12, control the
The speed of the volatilization of the solvent of dimerization polymer solution, second polymer is set to start to crystallize on the surface of the first ingot 12, wherein can
To control the evaporation rate of solvent by the air pressure near the first ingot 12 of control or temperature.By controlling solvent to volatilize
Speed and crystallization temperature, can preferably control the size of polymer crystallization and the compactness of crystal, and washed away with solvent
Do not crystallize or the less polymer of crystallinity, so as to form preferable second ingot 13 of surface characteristic.Wherein, every one second knot
The area of crystal block 13 is less than the area of the first ingot 12, and second ingot 13 is located at the center line of the first ingot 12
On, in order to form convex cone nano-micro structure.Wherein it is possible to realized by controlling the concentration of polymer, the second preset concentration
Less than the first preset concentration, content of the polymer content than the polymer in first polymer solution in second polymer solution
Few, therefore, the area of every one first ingot 12 is more than the area of every one second ingot 13.
In step S104, after third polymer solution is uniformly coated on every one second ingot 13, control the 3rd
The speed of the volatilization of the solvent of polymer solution, third polymer is set to start to crystallize on the surface of the second ingot 13, wherein can be with
The evaporation rate of solvent is controlled by the air pressure near the second ingot 13 of control or temperature.Volatilized by controlling solvent
Speed and the temperature of crystallization, the size of polymer crystallization and the compactness of crystal can be preferably controlled, and be washed away not with solvent
Crystallization or the less polymer of crystallinity, so as to form preferable 3rd ingot 14 of surface characteristic.Wherein, every one the 3rd crystallization
The area of block 14 is less than the area of the second ingot 13, and the 3rd ingot 14 is located at the center line of the second ingot 13
On, in order to form convex cone nano-micro structure.Wherein it is possible to realized by controlling the concentration of polymer, the 3rd preset concentration
Less than the second preset concentration, content of the polymer content than the polymer in second polymer solution in third polymer solution
Few, therefore, the area of every one second ingot 13 is more than the area of every one the 3rd ingot 14.
In step S105, after the 4th polymer solution is uniformly coated on every one the 3rd ingot 14, control the
The speed of the volatilization of the solvent of four polymer solutions, the 4th polymer is set to start to crystallize on the surface of the 3rd ingot 14, wherein can
To control the evaporation rate of solvent by the air pressure near the 3rd ingot 14 of control or temperature.By controlling solvent to volatilize
Speed and crystallization temperature, can preferably control the size of polymer crystallization and the compactness of crystal, and washed away with solvent
Do not crystallize or the less polymer of crystallinity, so as to form preferable 4th ingot 15 of surface characteristic.Wherein, the 4th ingot
15 area is less than the area of the 3rd ingot 14, and the 4th ingot 15 is located on the center line of the 3rd ingot 14,
In order to form convex cone nano-micro structure.Wherein it is possible to be realized by controlling the concentration of polymer, the 4th preset concentration is less than
3rd preset concentration, polymer content is fewer than the content of the polymer in third polymer solution in the 4th polymer solution, because
This, the area of every one the 3rd ingot 14 is more than the area of every one the 4th ingot 15.
In step S106, after the 5th polymer solution is uniformly coated on every one the 4th ingot 15, control the
The speed of the volatilization of the solvent of five polymer solutions, the 5th polymer is set to start to crystallize on the surface of the 4th ingot 15, wherein can
To control the evaporation rate of solvent by the air pressure near the 4th ingot 15 of control or temperature.By controlling solvent to volatilize
Speed and crystallization temperature, can preferably control the size of polymer crystallization and the compactness of crystal, and washed away with solvent
Do not crystallize or the less polymer of crystallinity, so as to form preferable 5th ingot 16 of surface characteristic.Wherein, the 5th ingot
16 area is less than the area of the 4th ingot 15, and the 5th ingot 16 is located on the center line of the 4th ingot 15,
In order to form convex cone nano-micro structure.Wherein it is possible to be realized by controlling the concentration of polymer, the 5th preset concentration is less than
4th preset concentration, polymer content is fewer than the content of the polymer in the 4th polymer solution in the 5th polymer solution, because
This, the area of every one the 4th ingot 15 is more than the area of every one the 5th ingot 16.
In step S107, after the 6th polymer solution is uniformly coated on every one the 5th ingot 16, control the
The speed of the volatilization of the solvent of six polymer solutions, the 6th polymer is set to start to crystallize on the surface of the 5th ingot 16, wherein can
To control the evaporation rate of solvent by the air pressure near the 5th ingot 16 of control or temperature.By controlling solvent to volatilize
Speed and crystallization temperature, can preferably control the size of polymer crystallization and the compactness of crystal, and washed away with solvent
Do not crystallize or the less polymer of crystallinity, so as to form preferable 6th ingot 17 of surface characteristic.Wherein, the 6th ingot
Area be less than the area of the 5th ingot, and the 6th ingot 17 is located on the center line of the 5th ingot 16, so as to
In formation convex cone nano-micro structure.Wherein it is possible to be realized by controlling the concentration of polymer, the 6th preset concentration is less than the 5th
Preset concentration, polymer content is fewer than the content of the polymer in the 5th polymer solution in the 6th polymer solution, therefore, often
The area of one the 5th ingot 16 is more than the area of every one the 6th ingot 17.
The first polymer, second polymer, third polymer, the 4th polymer, the 5th polymer and the 6th polymerization
The molecular weight of thing is larger, and structure is more regular, has certain crystal property, has relatively stiff group in strand main chain (such as
Structures such as phenyl ring, naphthalene nucleus, anthracene nucleus, five-ring heterocycles, hexa-member heterocycle, condensed ring etc.), to ensure that polymer molecule has preferably after crystallisation
Mechanical strength.For example, the first polymer, third polymer and the 5th polymer are poly- fluorine benzene material, second is poly-
Compound, the 4th polymer and the 6th polymer are poly- benzene material.Or the first polymer, third polymer and
5th polymer is poly- fluoronaphthalene material, and second polymer, the 4th polymer and the 6th polymer are the poly- naphthalene material of oil-soluble.Or
Person, the first polymer, third polymer and the 5th polymer are the poly- naphthalene material of water soluble ion, second polymer,
Four polymer and the 6th polymer are the poly- naphthalene esters material of oil-soluble.
Due to first preset concentration, the second preset concentration, the 3rd preset concentration, the 4th preset concentration, the 5th default dense
Degree and the 6th preset concentration reduce successively, therefore first polymer solution, second polymer solution, third polymer solution,
The content of 4th polymer solution, the 5th polymer solution and the polymer in the 6th polymer solution reduces successively, therefore
Crystallize formed the first ingot 12, the second ingot 13, the 3rd ingot 14, the 4th ingot 15, the 5th ingot 16 with
And the 6th the area of ingot 17 be sequentially reduced, so as to form the nano-micro structure of convex cone shaped.
From the foregoing, it will be observed that the present embodiment is by least crystallizing three times, and the concentration of the polymer solution used every time is successively
Reduce, so as to formed on substrate it is multiple it is lower it is big small convex cone shaped nano-micro structure so that the substrate has antireflection
Beneficial effect.
In summary, although the present invention is disclosed above with preferred embodiment, above preferred embodiment simultaneously is not used to limit
The system present invention, one of ordinary skill in the art, without departing from the spirit and scope of the present invention, it can make various changes and profit
Decorations, therefore protection scope of the present invention is defined by the scope that claim defines.
Claims (10)
1. a kind of preparation method of nano-micro structure, it is characterised in that comprise the following steps：
The scattered hydrophobic polymer particle layer of nanoscale is formed on substrate, the hydrophobic polymer particle layer has multiple intervals point
The hydrophobic polymer particle of cloth；
The first polymer solution of the first preset concentration is coated with the hydrophobic polymer particle layer, in the first polymer solution
First polymer crystallized by nuclearing centre of hydrophobic polymer particle, with generate it is multiple respectively with the plurality of hydrophobic polymeric
The first ingot that composition granule is corresponded and is spaced apart；
The second polymer solution of the second preset concentration is coated with the plurality of first ingot, in the second polymer solution
Second polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with first ingot, with respectively every one first
One second ingot is generated on ingot；
The third polymer solution of the 3rd preset concentration is coated with the plurality of second ingot, in the third polymer solution
Third polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one second ingot, with respectively every 1 the
One the 3rd ingot is generated on two ingots；
Wherein, the first polymer does not dissolve in second polymer solution, and the second polymer does not dissolve in third polymer solution, should
First preset concentration, the second preset concentration and the 3rd preset concentration reduce successively.
2. the preparation method of nano-micro structure according to claim 1, it is characterised in that further comprising the steps of：
The 4th polymer solution of the 4th preset concentration is coated with the plurality of 3rd ingot, in the 4th polymer solution
4th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 3rd ingot, with respectively every 1 the
One the 4th ingot is generated on three ingots；The third polymer does not dissolve in the 4th polymer solution, and the described 4th is pre-
If concentration is less than the 3rd preset concentration.
3. the preparation method of nano-micro structure according to claim 2, it is characterised in that further comprising the steps of：
The 5th polymer solution of the 5th preset concentration is coated with the plurality of 4th ingot, in the 5th polymer solution
5th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 4th ingot, with respectively every 1 the
One the 5th ingot is generated on four ingots, the 4th polymer does not dissolve in the 5th polymer solution, and the described 5th is pre-
If concentration is less than the 4th preset concentration.
4. the preparation method of nano-micro structure according to claim 3, it is characterised in that further comprising the steps of：
The 6th polymer solution of the 6th preset concentration is coated with the plurality of 5th ingot, in the 6th polymer solution
6th polymer carries out heterogeneous nucleation crystallization by nuclearing centre of the contact surface with every one the 5th ingot, with respectively every 1 the
One the 6th ingot is generated on five ingots, the 5th polymer does not dissolve in the 6th polymer solution, and the described 6th is pre-
If concentration is less than the 5th preset concentration.
5. the preparation method of nano-micro structure according to claim 4, it is characterised in that the first polymer, trimerization
Compound and the 5th polymer are identical polymer, and the second polymer, the 4th polymer and the 6th polymer are identical
Polymer.
6. the preparation method of nano-micro structure according to claim 5, it is characterised in that the first polymer and institute
It is poly- fluorine benzene material to state third polymer, and the second polymer is poly- benzene material；Or
The first polymer and the third polymer are water-soluble ionic polymers material, and the second polymer is oil
Dissolubility polyester material.
7. the preparation method of nano-micro structure according to claim 1, it is characterised in that described that nanometer is formed on substrate
The step of hydrophobic polymer particle layer that level is disperseed, includes：
One layer of copolymer mixture being made up of hydrophilic polymer and hydrophobic polymer of spin coating, the copolymer mixture are on substrate
Nanoscale is distributed；
The hydrophilic polymer is washed away using polar solvent, to form the scattered hydrophobic polymer particle layer of nanoscale, this is dredged
Aqueous polymer stratum granulosum has multiple hydrophobic polymer particles being spaced apart.
8. the preparation method of nano-micro structure according to claim 7, it is characterised in that the hydrophobic polymer is poly- first
Base methyl acrylate, the hydrophilic polymer are polystyrene.
9. the preparation method of nano-micro structure according to claim 1, it is characterised in that further comprising the steps of：
During the formation of the first ingot, washed away and do not crystallized or the less first polymer of crystallinity respectively using corresponding solvent；
During the formation of the second ingot, washed away and do not crystallized or the less second polymer of crystallinity respectively using corresponding solvent；With
And
During the formation of the 3rd ingot, washed away and do not crystallized or the less third polymer of crystallinity respectively using corresponding solvent.
10. the preparation method of nano-micro structure according to claim 1, it is characterised in that the substrate is glass substrate.
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1853318A1 (en) * | 2005-02-14 | 2007-11-14 | Australian Nuclear Science And Technology Organisation | Layered nanoparticles |
| CN101691202A (en) * | 2009-08-11 | 2010-04-07 | 西安交通大学 | Method for preparing polyvinylidene fluoride piezo film with microstructure |
| CN103449530A (en) * | 2013-09-06 | 2013-12-18 | 南京东纳生物科技有限公司 | Preparation method of high-performance magnetic manganese zinc ferrite nanostars and nanoclusters |
| CN103956395A (en) * | 2014-05-09 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Array structure fabric surface and preparing method and application thereof |
| CN105576118A (en) * | 2014-10-17 | 2016-05-11 | 中国科学院声学研究所 | Simple preparation method for nanometer rod or nanometer wire of piezoelectric polymer |
-
2016
- 2016-07-05 CN CN201610526724.9A patent/CN106115610B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1853318A1 (en) * | 2005-02-14 | 2007-11-14 | Australian Nuclear Science And Technology Organisation | Layered nanoparticles |
| CN101691202A (en) * | 2009-08-11 | 2010-04-07 | 西安交通大学 | Method for preparing polyvinylidene fluoride piezo film with microstructure |
| CN103449530A (en) * | 2013-09-06 | 2013-12-18 | 南京东纳生物科技有限公司 | Preparation method of high-performance magnetic manganese zinc ferrite nanostars and nanoclusters |
| CN103956395A (en) * | 2014-05-09 | 2014-07-30 | 中国科学院宁波材料技术与工程研究所 | Array structure fabric surface and preparing method and application thereof |
| CN105576118A (en) * | 2014-10-17 | 2016-05-11 | 中国科学院声学研究所 | Simple preparation method for nanometer rod or nanometer wire of piezoelectric polymer |
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