CN106098739B - A kind of OLED illumination panel and preparation method thereof - Google Patents

A kind of OLED illumination panel and preparation method thereof Download PDF

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Publication number
CN106098739B
CN106098739B CN201610584557.3A CN201610584557A CN106098739B CN 106098739 B CN106098739 B CN 106098739B CN 201610584557 A CN201610584557 A CN 201610584557A CN 106098739 B CN106098739 B CN 106098739B
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conductive film
transparent conductive
electrode
exit
insulating layer
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CN106098739A (en
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周雷
徐苗
李洪濛
邹建华
高栋雨
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GUANGZHOU NEW VISION OPTOELECTRONIC CO Ltd
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GUANGZHOU NEW VISION OPTOELECTRONIC CO Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09GARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION
    • G09G3/00Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes
    • G09G3/20Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters
    • G09G3/22Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources
    • G09G3/30Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels
    • G09G3/32Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED]
    • G09G3/3208Control arrangements or circuits, of interest only in connection with visual indicators other than cathode-ray tubes for presentation of an assembly of a number of characters, e.g. a page, by composing the assembly by combination of individual elements arranged in a matrix no fixed position being assigned to or needed to be assigned to the individual characters or partial characters using controlled light sources using electroluminescent panels semiconductive, e.g. using light-emitting diodes [LED] organic, e.g. using organic light-emitting diodes [OLED]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • H10K50/805Electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

Abstract

The invention discloses a kind of OLED illumination panels and preparation method thereof, including metal grill auxiliary electrode, metallic bone electrode and the first transparent conductive film.The metallic bone electrode makes the luminous point in each metal grill mutually indepedent.One end of first transparent conductive film overlaps electrode connection by contact metal, and metallic bone electrode is connected with metal grill auxiliary electrode, and the other end of first transparent conductive film is connect with the second transparent conductive film.The present invention reduces direction according to voltage, that is distance of the lighting unit apart from anode exit rationally designs the line width and length of the first transparent conductive film, realizes different resistance values, luminance non-uniformity caused by effectively compensating for because of voltage drop, realizes the uniformity of luminance of OLED illumination panel.

Description

A kind of OLED illumination panel and preparation method thereof
Technical field
The present invention relates to illumination panel manufacturing technology field, specially a kind of OLED illumination panel and preparation method thereof.
Background technique
Existing OLED illumination panel is made of transparent conductive film anode, organic luminous layer and metal cathode layer.Due to transparent Anode square resistance is larger, causes entire illumination panel in the voltage drop far from anode tap it is obvious that generally can reach 0.1V- 0.5V, and OLED work between high luminance area when, the pressure drop of usual 0.1V can lead to thousands of cd/m2Brightness decline, result in Illumination panel has apparent brightness irregularities phenomenon.For the inhomogeneities for improving illumination panel brightness, there has been proposed many sides Case is essentially all to increase to be connected to the metal auxiliary electrode to distribute as net shape with transparent anode on transparent anode layer, due to The square resistance of metal auxiliary electrode is smaller, generally in 0.5 Ω/mouth or so, so that voltage drop reduces in entire panel, however increases The metal grill auxiliary electrode added can not be inherently eliminated the irregularity in brightness of illumination panel, especially large scale and illuminate Panel and flexible light panel.For large size panel, although can arrange multiple anodes around panel, but due to size It is larger, panel middle section pressure drop or apparent;For flexible light panel, in order to meet the needs of flexible, voltage draws Outlet is typically distributed across panel on one side or certain both sides, the region pressure drop so as to cause separate anode voltage exit are obvious.
As shown in Figure 6 and Figure 7, the generally square grid row of auxiliary electrode arrangement used in the prior art Cloth, and the transparent anode of panel is linked to be whole piece.The anode exit of the prior art and the cathode of the prior art on panel Exit can be located at panel both sides (such as Fig. 6) or four sides (such as Fig. 7), and general anode exit is got in panel periphery distributed quantity More, panel can be more uniform.Along arrow direction in Fig. 6 and Fig. 7, voltage is decline, this certainly will will cause entire luminescent panel Brightness can decline with arrow direction.
Therefore, in view of the shortcomings of the prior art, providing a kind of OLED illumination panel and preparation method thereof to overcome illumination panel The problem of brightness disproportionation, is very necessary.
Summary of the invention
The purpose of the present invention is to provide a kind of OLED illumination panels and preparation method thereof, to solve in above-mentioned background technique The problem of proposition.
To achieve the above object, the invention provides the following technical scheme:
A kind of OLED illumination panel, including substrate, the upper surface of substrate are closely fitted with SiO2Buffer layer, SiO2Buffer layer Upper surface be equipped with metal grill auxiliary electrode, be equipped with illumination in each mesh of the metal grill auxiliary electrode Unit, and lighting unit is electrically connected with metal grill auxiliary electrode, substrate are equipped with exit, and exit respectively with metal grill Auxiliary electrode and lighting unit electrical connection.
Lighting unit include metallic bone electrode, the first insulating layer, contact hole, the first transparent conductive film, second insulating layer, Second transparent conductive film, organic layer and metallic cathode, metallic bone electrode is connect with metal grill auxiliary electrode, and metallic bone The upper surface of electrode is closely fitted with the first insulating layer, and the first insulating layer is equipped with contact hole, and contact hole is located at metallic bone The top of electrode, the upper surface of the first insulating layer are closely fitted with the first transparent conductive film and the second transparent conductive film, and adjacent Between two lighting units the resistance value of the first transparent conductive film along voltage reduce direction reduce, one end of the first transparent conductive film with The connection of second transparent conductive film, the other end of the first transparent conductive film pass through contact hole and connect with metallic bone electrode, and first thoroughly The upper surface of bright conductive film is equipped with second insulating layer, and the upper surface of the second transparent conductive film is closely fitted with organic layer, organic layer Upper surface be closely fitted with metallic cathode.
The quantity of the exit is one, and exit includes anode exit and cathode end, and anode is drawn End and cathode end are individually fixed in the both ends of the same side wall of substrate, and cathode end is electrically connected with metallic cathode, anode Exit is electrically connected with metal grill auxiliary electrode.
The quantity of the exit is two, and two exits are separately positioned on the two sidewalls of substrate, exit packet Anode exit and cathode end are included, and anode exit and cathode end are individually fixed in the two of the same side wall of substrate End, and cathode end is electrically connected with metallic cathode, anode exit is electrically connected with metal grill auxiliary electrode.
The metal grill auxiliary electrode is by least one in single layer Al, Cu, Mo, Ti, Ag, Au, Ta, Cr or aluminium alloy Layer is constituted.
First transparent conductive film is the carbon nanometer with the metal oxide of sputtering method production or solution methods production One of pipe, PEDOT and Ag nano wire.
First insulating layer is by SiO2、Si3N4、Al2O3、Y2O3Or insulating film made of polyimides, described second Insulating layer is the insulating film made of photoresist or polyimides.
The metallic cathode is made of at least one of Al, Cu, Mg, Ag or Au.
A kind of production method specific steps of OLED illumination panel are as follows:
The first step makes SiO on substrate2Buffer layer;
Second step, in the SiO2Deposited metal overlaps electrode on buffer layer;
Third step deposits the first insulating layer and etches contact hole;
4th step deposits the first transparent conductive film and the second transparent conductive film, and graphical first transparent conductive film is formed The compensation resistance of different resistance values between lighting unit;
5th step deposits second insulating layer;
6th step, depositing organic;
7th step, deposited metal cathode.
Specifically, in the first step, substrate is specially glass, PEN, PET, PI or metal foil,
Specifically, metallic bone electrode is specially single layer metal firms in second step, or by single layer Al, Cu, Mo, Ti, The plural layers of any two layers of composition described above in Ag, Au, Ta, Cr or aluminium alloy,
Specifically, the first insulating layer is specially SiO in third step2、Si3N4、Al2O3、Y2O3Or made of polyimides Insulating film,
Specifically, second insulating layer is specially insulating film made of photoresist or polyimides (PI) in the 5th step,
Specifically, metallic cathode is specially single layer Al, Cu, Mg/Ag, Au film in the 7th step.
Compared with prior art, the beneficial effects of the present invention are: metal grill auxiliary electrode and the metal in each grid Electrode connection is overlapped, so that panel intraoral illumination unit is mutually indepedent, in each the first transparent conductive film of metal grill inner utilization Conducting wire is made, is connected in the second transparent conductive film of each lighting unit, by the length and width that rationally design transparent conductive film Degree constantly reduces the resistance value of the first transparent conductive film in the anode exit far from exit to realize different resistance values To realize the uniformly light-emitting of entire OLED illumination panel.
Detailed description of the invention
Fig. 1 is lighting unit domain of the invention;
Fig. 2 is first embodiment of the present invention structural schematic diagram;
Fig. 3 is second embodiment of the present invention structural schematic diagram;
Fig. 4 is A-A sectional view in Fig. 1;
Fig. 5 is B-B sectional view in Fig. 1;
Fig. 6 is the structural schematic diagram of the first prior art;
Fig. 7 is the structural schematic diagram of second of prior art.
In figure: 1 substrate, 2SiO2Buffer layer, 3 metal grill auxiliary electrodes, 4 lighting units, 41 metallic bone electrodes, 42 First insulating layer, 43 contact holes, 44 first transparent conductive films, 45 second insulating layers, 46 second transparent conductive films, 47 organic layers, 48 metallic cathodes, 5 exits, 51 anode exits, 52 cathode ends, the exit of 6 prior art anodes and 7 prior arts The exit of cathode, arrow direction indicate the direction of illumination panel voltage decline.
Specific embodiment
The present invention is described further combined with specific embodiments below, but protection scope of the present invention is not limited to This.
Embodiment 1:
As shown in Figure 1, Figure 2, shown in Fig. 4 and Fig. 5, a kind of OLED illumination panel, including substrate 1, the upper surface of substrate 1 are closely pasted Conjunction has SiO2Buffer layer 2, SiO2The upper surface of buffer layer 2 is equipped with metal grill auxiliary electrode 3, the metal grill auxiliary electrode 3 It is to be made of at least one layer in single layer Al, Cu, Mo, Ti, Ag, Au, Ta, Cr or aluminium alloy, it is auxiliary positioned at the metal grill Help in each mesh of electrode 3 and be equipped with lighting unit 4, lighting unit 4 include metallic bone electrode 41, the first insulating layer 42, Contact hole 43, the first transparent conductive film 44, second insulating layer 45, the second transparent conductive film 46, organic layer 47 and metallic cathode 48, Metallic bone electrode 41 is connect with metal grill auxiliary electrode 3, and the upper surface of metallic bone electrode 41 is closely fitted with first Insulating layer 42, first insulating layer 42 are made of photoresist or polyimides, and the first insulating layer 42 is equipped with contact hole 43, and contact hole 43 is located at the top of metallic bone electrode 41, it is transparent that the upper surface of the first insulating layer 42 is closely fitted with first Conductive film 44 and the second transparent conductive film 46, and the resistance value of first transparent conductive film 44 prolongs electricity between two neighboring lighting unit 4 The low direction of pressure drop reduces, and first transparent conductive film 44 is with the metal oxide or solution methods system of sputtering method production One of the carbon nanotube of work, PEDOT and Ag nano wire, one end of the first transparent conductive film 44 and the second transparent conductive film 46 Connection, the other end of the first transparent conductive film 44 passes through contact hole 43 and connect with metallic bone electrode 41, and metallic bone electrode 41 connect with metal grill auxiliary electrode 3, and the upper surface of the first transparent conductive film 44 is equipped with second insulating layer 45, and described second absolutely Edge layer 45 is made of photoresist or polyimides, and the upper surface of the second transparent conductive film 46 is closely fitted with organic layer 47, The upper surface of organic layer 47 is closely fitted with metallic cathode 48, and the metallic cathode 48 uses in Al, Cu, Mg, Ag or Au extremely Few one kind is made, and substrate 1 is equipped with exit 5, and the quantity of the exit 5 is one, and exit 5 includes anode exit 51 With cathode end 52, and anode exit 51 and cathode end 52 are individually fixed in the both ends of the same side wall of substrate 1, and yin Pole exit 52 is electrically connected with metallic cathode 48, and anode exit 51 is electrically connected with metal grill auxiliary electrode 3.
When being arrow direction far from anode exit 51, the first transparent conductive film 42 in each of which lighting unit 4 Resistance value is gradually reduced, and the method that resistance reduces is the combination for increasing line width or reducing length, or both, to realize illuminated area The brightness uniformity of plate.
Further, it is assumed that illumination panel has M row N to arrange (M, N are natural numbers), as shown in Fig. 2, the maximum place of its pressure drop The position farthest apart from anode exit 51 in panel, i.e. M row occurs, first is saturating in the grid of upper left corner the first row first row Bright conductive film 42 is R11, the first transparent conductive film 42 is R in second grid of the first row12, successively the i-th row j column resistance be Rij, it needs to meet:
Ri1> Rij> Ri(j+1)> RiN(1≤i≤M, 1 < j < N-1) (1)
R1j> Rij> R(i+1)j> RMj(1 < i < M-1,1≤j≤N) (2)
Its production method is illustrated in conjunction with Fig. 5:
The first step makes SiO on substrate 12Buffer layer 2;
Second step, in the SiO2Deposited metal overlaps electrode 41 on buffer layer 2;
Third step deposits the first insulating layer 42 and etches contact hole 43;
4th step deposits the first transparent conductive film 44 and the second transparent conductive film 46, and graphical first transparent conductive film 44 form the compensation resistance of different resistance values between lighting unit 4;
5th step deposits second insulating layer 45;
6th step, depositing organic 47;
7th step, deposited metal cathode 48.
Specifically, in the first step, substrate 1 specially glass, PEN, PET, PI or metal foil,
Specifically, in second step, metallic bone electrode 41 is specially single layer metal firms, or by single layer Al, Cu, Mo, The plural layers of any two layers of composition described above in Ti, Ag, Au, Ta, Cr or aluminium alloy,
Specifically, the first insulating layer 42 is specially SiO in third step2、Si3N4、Al2O3、Y2O3Or polyimides PI system At insulating film,
Specifically, second insulating layer 45 is specially insulating film made of photoresist or polyimides PI in the 5th step,
Specifically, metallic cathode 48 is specially single layer Al, Cu, Mg/Ag, Au film in the 7th step.
In conclusion the cooperation of exit 5 of the invention and the first transparent conductive film 44 for being connected on each lighting unit 4 It uses, realizes the uniformly light-emitting of entire OLED illumination panel.
Embodiment 2:
As shown in figure 3, the present embodiment and embodiment 1 compare, the quantity of the exit 5 is two, and two extractions End 5 is separately positioned on the two sidewalls of substrate 1, and exit 5 includes anode exit 51 and cathode end 52, and anode exit 51 and cathode end 52 be individually fixed in the both ends of the same side wall of substrate 1, and cathode end 52 is electrically connected with metallic cathode 48 It connects, anode exit 51 is electrically connected with metal grill auxiliary electrode 3.
Region between the maximum place generation in the panel of its pressure drop in this way.Therefore, the resistance value of the first transparent conductive film 44 The condition of satisfaction changes.
Further, it is assumed that illumination panel has M row N to arrange (for convenience of description, M is even number, and N is natural number), as shown in Figure 3 The first transparent conductive film 44 is R in the grid of upper left corner the first row first row11, the first electrically conducting transparent in second grid of the first row Film 44 is R12, successively the resistance of the i-th row j column is Rij, it needs to meet:
Ri1> Rij> Ri(j+1)> RiN(1≤i≤M, 1 < j < N-1) (1)
R1j> Rij> R(i+1)j> R(M/2)j(1 < i < M/2-1,1≤j≤N) (2)
RMj> R(i+1)j> Rij> R(M/2)j(M/2 < i < M-1,1≤j≤N) (3)
Rij=R(M+1-i)j(1≤i≤M) (4)
In conclusion the present invention uses multiple exits 5, avoid that spacing between lighting unit 4 is excessive, according at voltage The uniformly light-emitting of entire OLED illumination panel is furthermore achieved in deficiency.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto, Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.

Claims (10)

1. a kind of OLED illumination panel, which is characterized in that including substrate (1), the upper surface of substrate (1) is closely fitted with buffer layer (2), the upper surface of buffer layer (2) is equipped with metal grill auxiliary electrode (3), positioned at the metal grill auxiliary electrode (3) Lighting unit (4) are equipped in each mesh;
Wherein lighting unit (4) includes metallic bone electrode (41), the first insulating layer (42), contact hole (43), first transparent leads Electrolemma (44), second insulating layer (45), the second transparent conductive film (46), organic layer (47) and metallic cathode (48);
First transparent conductive film (44) is changed by length adjusts its resistance value, and resistance value reduces direction along voltage and gradually subtracts It is small, compensate lighting unit (4) voltage drop variation on different location;
Lighting unit (4) metallic bone electrode (41) is connect with metal grill auxiliary electrode (3), and metallic bone electrode (41) Upper surface is closely fitted with the first insulating layer (42), and the first insulating layer (42) is equipped with contact hole (43), and contact hole (43) position In the top of metallic bone electrode (41), the upper surface of the first insulating layer (42) be closely fitted with the first transparent conductive film (44) and One end of second transparent conductive film (46), the first transparent conductive film (44) is connect with the second transparent conductive film (46), and first is transparent The other end of conductive film (44) pass through contact hole (43) connect with metallic bone electrode (41), the first transparent conductive film (44) it is upper Surface is equipped with second insulating layer (45), and the upper surface of the second transparent conductive film (46) is closely fitted with organic layer (47), organic layer (47) upper surface is closely fitted with metallic cathode (48).
2. a kind of OLED illumination panel according to claim 1, it is characterised in that: the lighting unit (4) and metal Grid auxiliary electrode (3) electrical connection, substrate (1) be equipped with exit (5), and exit (5) respectively with metal grill auxiliary electrode (3) it is electrically connected with lighting unit (4).
3. a kind of OLED illumination panel according to claim 2, it is characterised in that: the quantity of exit (5) is one, is drawn Outlet (5) includes anode exit (51) and cathode end (52), and anode exit (51) and cathode end (52) divide It is not fixed on the both ends of substrate (1) same side wall, and cathode end (52) is electrically connected with metallic cathode (48), anode exit (51) it is electrically connected with metal grill auxiliary electrode (3).
4. a kind of OLED illumination panel according to claim 2, it is characterised in that: the quantity of exit (5) is two, and Two exits (5) are separately positioned on the two sidewalls of substrate (1), and exit (5) includes that anode exit (51) and cathode are drawn It holds (52), and anode exit (51) and cathode end (52) are individually fixed in the both ends of substrate (1) same side wall, and cathode Exit (52) is electrically connected with metallic cathode (48), and anode exit (51) is electrically connected with metal grill auxiliary electrode (3).
5. a kind of OLED illumination panel according to claim 3 or 4, it is characterised in that: the metal grill auxiliary electrode It (3) is made of at least one layer in single layer Al, Cu, Mo, Ti, Ag, Au, Ta, Cr or aluminium alloy.
6. a kind of OLED illumination panel according to claim 5, it is characterised in that: first transparent conductive film (44) is With one of the metal oxide of sputtering method production or the carbon nanotube of solution methods production, PEDOT and Ag nano wire.
7. OLED illumination panel according to claim 6, it is characterised in that: first insulating layer (42) and described second Insulating layer (45) is made of photoresist or polyimides.
8. OLED illumination panel according to claim 7, it is characterised in that: the metallic cathode (48) using Al, Cu, At least one of Mg, Ag or Au are made.
9. a kind of production method of the OLED illumination panel as described in claim 1 to 8 any one, which is characterized in that specific Step are as follows:
The first step makes SiO on substrate (1)2Buffer layer (2);
Second step, in the SiO2Deposited metal overlap joint electrode (41) and metal grill auxiliary electrode (3) on buffer layer (2);
Third step deposits the first insulating layer (42) and etches contact hole (43);
4th step deposits the first transparent conductive film (44) and the second transparent conductive film (46), and graphical first transparent conductive film (44) the compensation resistance of different resistance values between lighting unit (4) is formed;
5th step deposits second insulating layer (45);
6th step, depositing organic (47);
7th step, deposited metal cathode (48).
10. the production method of OLED illumination panel according to claim 9, which is characterized in that
In second step, metallic bone electrode (41) is specially single layer metal firms, or by single layer Al, Cu, Mo, Ti, Ag, Au, Ta, The plural layers of any two layers of composition described above in Cr or aluminium alloy,
In third step, the first insulating layer (42) is specially SiO2、Si3N4、Al2O3、Y2O3Or insulating film made of polyimides,
In 5th step, second insulating layer (45) is specially insulating film made of photoresist or polyimides,
In 7th step, metallic cathode (48) is specially single layer Al, Cu, Mg/Ag, Au film.
CN201610584557.3A 2016-07-21 2016-07-21 A kind of OLED illumination panel and preparation method thereof Active CN106098739B (en)

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CN109301080B (en) * 2017-07-24 2024-03-05 固安翌光科技有限公司 Organic electroluminescent device
KR102544067B1 (en) * 2018-12-31 2023-06-16 엘지디스플레이 주식회사 Organic light emitting device
US20220278189A1 (en) * 2019-09-19 2022-09-01 Sharp Kabushiki Kaisha Display device and manufacturing method for display device
CN110739338B (en) * 2019-10-24 2022-11-29 京东方科技集团股份有限公司 Display substrate, preparation method thereof and display panel
CN115922096A (en) * 2022-04-15 2023-04-07 山东理工大学 Method for preparing flexible transparent electrode material by femtosecond laser ablation

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