CN106097316B - The substrate position identifying processing method of laser scribing means image identification system - Google Patents
The substrate position identifying processing method of laser scribing means image identification system Download PDFInfo
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- G06T7/0002—Inspection of images, e.g. flaw detection
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Abstract
The present invention relates to a kind of substrate position identifying processing methods of laser scribing means image identification system, and this method comprises the following steps：Binary conversion treatment is carried out to the entire image of acquisition；Edge detection is done to image Mark points, obtains level, the vertical centre dotted line of spider；Mark dot center line is detected, central point on the dotted line of spider center is transformed into the sinusoidal line of rectangular coordinate system parameter space, straight line is sought being converted into seeking for intersection point pole coordinate parameter between sinusoidal line, obtains the pole coordinate parameter of spider horizontal line and vertical line；The polar coordinates of spider intersection point are obtained according to the pole coordinate parameter of spider horizontal line and spider vertical line.Accuracy of identification of the present invention is high, good reliability, is applicable to the equipment that laser scribing (line) machine or laser cutting machine etc. need image recognition processing.
Description
Technical field
The invention belongs to technical field of image processing, are related to a kind of substrate position knowledge of laser scribing means image identification system
Other processing method.
Background technology
In order to improve workpiece quality, process time is reduced, processing cost is reduced, laser technology generates and therewith by extensive
Concern is gradually applied to manufacture, surface treatment and material processing and other fields.Laser scribing means is made of passive device resistance substrate
In special equipment.The image identification system of the equipment is used to automatically determine the position of dicing substrate, makes exit positions and substrate
Position is aligned completely.It is of less demanding to the accuracy of identification of Mark points in ± 2 μ due to very a height of ± 3 μm of equipment scribing positional precision
Often there are the feelings of multiple noise spots and two Mark points due to the diversity and unstability of scribing process in visual field in m
Condition, therefore the recognition methods of traditional template matches cannot meet actual scribing requirement.
Invention content
The technical problem to be solved in the present invention is to provide a kind of identifications of the substrate position of laser scribing means image identification system
Processing method, this method accuracy of identification is high, identification certainty is good.
In order to solve the above-mentioned technical problem, the substrate position identifying processing of laser scribing means image identification system of the invention
Method includes the following steps：
Step 1: image binaryzation is handled：
Gray count is done to the whole picture figure of acquisition, obtains its gray average and using the gray average as binary-state threshold；
When the gray value of pixel in image is more than the binary-state threshold, it is set as 1, is otherwise 0, obtains binary image；Two-value
It is " stain " to change in image the pixel for being 0；
Step 2: doing edge detection to image Mark points：
The Mark points are spider graph；In selected image-region, respectively both horizontally and vertically from surrounding
Gray value detection is carried out to field of view center, the ordinate of " stain " in the often row pixel found to upper and lower directions is averaged,
Obtain the horizontal centre dotted line of spider；The abscissa of " stain " in each column pixel found to left and right directions is averaged,
Obtain the vertical centre dotted line of spider；
Step 3：The line detection of Mark dot center：
1) for spider horizontal centre dotted line, origin of any point as rectangular coordinate system on image is taken；Establish one
Two-dimentional accumulator array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn])；θiIn the angular range of setting
Value；
2) initialization Ay [ρi,θi]=0；Point on the dotted line of center is mapped in polar coordinate system parameter space, is corresponded to
Sinusoidal line；
For any point J on the dotted line of center, by its rectangular co-ordinate (xj, yj) formula (1) is substituted into, calculate θ1, θ2...
θi... θnCorresponding ρ values, i.e. ρj1, ρj2... ..., ρji, ρjn, obtain the central point and be mapped in polar coordinate system parameter space
Sinusoidal line；
ρji=xjcosθi+yjsinθi (1)
It often obtains a central point and is mapped to sinusoidal line in polar coordinate system parameter space, judge the sinusoidal line and obtain before
Sinusoidal line whether have intersection point；For any point J, if the corresponding sinusoidal line of point has intersection points B with the sinusoidal line obtained before0
(ρjo,θo), then by the array element Ay [ρ in corresponding two-dimentional accumulator arrayo,θo] plus 1；And so on, until obtaining center
All the points are mapped to the intersection point of sinusoidal line and these sinusoidal lines in polar coordinate system parameter space on dotted line, and it is tired to finally obtain two dimension
Add device array (Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]) voting result；In two-dimentional accumulator array
Maximum array element is found in voting result, the corresponding intersection point of the array element is the horizontal polar coordinates ginseng of central point
Number；
Using method same as central point horizontal line pole coordinate parameter is calculated, the polar coordinates ginseng of central point vertical line is obtained
Number；
Step 4: the pole for obtaining spider intersection point according to the pole coordinate parameter of spider horizontal line and spider vertical line is sat
Mark.
In the step 2, after entire image edge is removed 20 pixels, take middle section as selected image
Region.
In the step 3, θiThe angular range set is [85 °, 95 °].It can be needed according to available accuracy between set angle
Every taking equiangularly spaced or not equiangularly spaced.In two dimension accumulator array of the present invention, take it is equiangularly spaced, it is adjacent
Array element θiAngle interval take 0.1 °.
Further, the step of the invention also includes acquisition spectral discriminations, steps are as follows for this：
If the discrete pixel that the binary image intermediate value that step 1 obtains is 0 and the value of surrounding pixel point is 1 is " to make an uproar
Point "；Judge in binary image whether " noise " number is more than the noise amount threshold set, is to judge current image date
Mistake does not identify；Otherwise step 2 is carried out；The noise amount threshold wherein set is more than or equal to 1% and is less than or equal to 3%.
Further, the invention also includes identification point coordinates determination steps；Steps are as follows for this：
For the spider intersection point that step 3 obtains, around it in 30 × 30 pixel coverages, if binary image
The pixel quantity that intermediate value is 1 is more than the 20% of total pixel quantity, then it is assumed that is wrong identification image, otherwise it is assumed that step 3
In the obtained rectangular co-ordinate of spider intersection point it is correct.
Beneficial effects of the present invention：
When the present invention does edge detection to image Mark points, gray value detection is carried out in selected image-region, to
Obtained horizontal centre dotted line and vertical centre dotted line, can rejection image marginal interference, improve spider identification accuracy；
In the line detection of Mark dot center, the central point on the dotted line of spider center is transformed into the sine of rectangular coordinate system parameter space
Straight line is sought being converted into seeking for intersection point pole coordinate parameter between sinusoidal line by line, and accuracy of identification is high, good reliability；For
There is the case where larger noise jamming in image, by the ratio shared by " noise " as judgment basis, can effectively judge side by side
Except error image, it is ensured that without misrecognition the problem of.It present invention can be suitably applied to the needs such as laser scribing (line) machine or laser cutting machine
The equipment of image recognition processing.
Description of the drawings
Invention is further described in detail with reference to the accompanying drawings and detailed description.
Fig. 1 is image identification system hardware block diagram.
Fig. 2 is the substrate position identifying processing method flow diagram of the laser scribing means image identification system of the present invention.
Fig. 3 is the CCD camera collected processing image to be identified containing Mark points in real time.
Fig. 4 is finely detected by edge, the pixel coordinate distribution situation figure obtained.
Fig. 5 is the parameter list diagram of rectangular coordinate system parameter space straight line in hough transformation.
Fig. 6 is the expression figure that center dotted line is mapped to polar coordinate system parameter space in hough transformation.
After the completion of Fig. 7 is identification, the image judged is done to the center position coordinates of Mark points.
Specific implementation mode
The image identification system of the present invention is as follows：
Make substrate motion to the position of CCD camera 3 as shown in Figure 1, industrial personal computer 1 controls the movement of slide holder 4, and makes on substrate
Mark points enter in the visual field of CCD camera 3；Industrial personal computer 1 obtains the signal in place from linear motor XY platforms, industry control simultaneously
Machine 1 triggers CCD camera 3 and acquires piece image, as shown in Figure 3.Image data is transferred to industrial personal computer 1 via image pick-up card 2
In, industrial personal computer 1 is handled as follows it after obtaining image data, as shown in Figure 2：
Step 1: acquisition spectral discrimination：
Since the image of acquisition is formed by cutting ceramic by laser substrate, influenced by technique and environment in cutting process,
It causes fraction substrate to there is dust to be attached on substrate and Mark points, noise jamming is generated to image recognition, therefore in identification image
Preceding " noise " number in image judges.In piece image, gray count is done to whole picture figure, it is equal to obtain its gray scale
Value, as binary-state threshold.When the gray value at image midpoint is more than the binary-state threshold, it is set as 1, is otherwise 0, obtains two
Value image, the pixel that intermediate value is 0 are " stain "." noise " is to be worth for 0 and surrounding pixel point in binary image
Discrete " stain " that value is 1.
When " noise " number is more than the noise amount threshold of setting in piece image, then current image date mistake is judged
Accidentally, it does not identify.The noise amount threshold set is 1%, 2% or 3%.
After being determined that image data is correct, it is handled as follows：
Step 2: doing edge detection to image Mark points：
Since the Mark point images of acquisition are influenced by light-source brightness, substrate scribing process, for the reliability of identification, dividing
Intermediate 620 × 460 pixels, rejection image marginal interference are taken to be identified in 640 × 480 pixel point ranges of resolution.
Mark points are spider graph.The binary image that step 1 obtains is detected, the often row pixel that upper and lower directions is found
In the ordinate of " stain " be averaged, the abscissa of " stain " in each column pixel found to left and right directions is averaged
Value, obtains the center dotted line of spider.As shown in figure 4, stain discrete in image is " noise " and the spider detected
Edge pixel point, the intermediate dotted line in spider edge pixel point is obtained spider center dotted line.
Step 3: the line detection of Mark dot center：
1) since the spider center dotted line obtained in step 2 is the discrete point of a series of level of approximation lines and vertical line,
So it is the key that the present invention accurately to extract rectilinear coordinates equation from these discrete points.Horizontal line has 620 discrete points,
Vertical line has 460 discrete points, if can not ensure the precision of recognizer with simple fitting a straight line, therefore hough is taken to become
It changes and straight line is detected.The principle of the transformation is：Each point corresponds in the spider center dotted line obtained by step 2)
The straight line in rectangular coordinate system parameter space, as shown in figure 5, the straight line of rectangular coordinate system parameter space corresponds to
A point in image.The straight all the points in original image, their slope and intercept is identical, so they are straight
Angular coordinate system parameter space corresponds to the same point.Each spot projection on the dotted line of spider center to rectangular coordinate system is joined in this way
After under number space, the accumulation point under rectangular coordinate system parameter space has just corresponded to the straight line that central point is linked to be.Due to horizontal line ten
The equation of word fork is x=c, and the slope of straight line is infinity.The equation of y=kx+b forms can not indicate.So in the present invention
In the hough transformation of application, indicated using parametric polar equation ρ=xcos θ+ysin θ.(ρ, θ) is indicated under rectangular coordinate system
Straight line.Wherein ρ is distance of the straight line to origin, and θ is the angle of the vertical line and X-axis of the straight line, and value range is
[0°,180°].As shown in Figure 6.Under polar coordinate representation, conllinear point transformation is to polar coordinate system parameter in the dotted line of spider center
It behind space, is all intersected at a bit in parameter space, (ρ, the θ) obtained at this time is the pole coordinate parameter of required straight line.It is sat in pole
Under mark indicates, it is sinusoidal line that the point in image, which is mapped to polar coordinate system parameter space,.At this point, asking the straight line side that image midpoint forms
Journey translates into the coordinate found intersection.
2) the horizontal computation processing method of spider is in the present invention：Establish a two-dimentional accumulator array (Ay [ρ1,
θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]).Coordinate origin can take on image any point (in level in Fig. 4
Heart dotted line bottom is a little used as origin).ρ1、ρ2、……ρi、……ρnValue range be [0,460]；What it is due to calculating is
Horizontal ordinate only judges in valid interval for the fast reliability of judgement, therefore θi(i=1,2 ... ..., n)
Value range be [85 °, 95 °], as shown in Figure 4.θiIt can value or unequal interval value at equal intervals.It is spaced smaller detection essence
Degree is higher, θ in the present inventioniValue at equal intervals, θiWith θi-1Angle between be divided into 0.1 °.
3) initialization Ay [ρi,θi]=0.Point on the dotted line of center is mapped in polar coordinate system parameter space, is corresponded to
Sinusoidal line.For any point J on the dotted line of center, by its rectangular co-ordinate (xj, yj) formula (1) is substituted into, calculate θ1, θ2...
θi... θnCorresponding ρ values, i.e. ρj1, ρj2... ..., ρji, ρjn, obtain the central point and be mapped in polar coordinate system parameter space
Sinusoidal line；
ρji=xjcosθi+yjsinθi (1)
It is specific as follows：
As shown in fig. 6, first by the coordinate (x of first discrete central point on horizontal centre dotted line1, y1) substitute into formula
(1), the corresponding pole coordinate parameter (ρ of first discrete central point is calculated11, θ1), (ρ12, θ2) ..., (ρ1i, θi)……(ρ1n,
θn), obtain first sinusoidal line A1；Again by the coordinate (x of second discrete central point2, y2) formula (1) is substituted into, calculate second
Corresponding pole coordinate parameter (the ρ of a discrete central point21, θ1), (ρ22, θ2) ..., (ρ2i, θi)……(ρ2n, θn), obtain second
Sinusoidal line A2；And so on, all the points on the dotted line of center are mapped in polar coordinate system parameter space, corresponding sine is obtained
Line A3, A4, A5, A6...AN, 3<N<620.As shown in fig. 6, A2 and A1 intersect at B1 points, it is assumed that the corresponding polar coordinates of B1 points are
(ρ21,θ1) (either (ρ11,θ1), ρ21=ρ11), then by array element Ay [ρ1,θ1] plus 1, Ay [ρ when due to initialization1,θ1]=
0, so Ay [ρ at this time1,θ1]=1.A3 and A1, A2 intersect at B1 points simultaneously, then by Ay [ρ1,θ1] add 1 again, i.e. Ay [ρ1,θ1]=
2；A4 and A1, A2, A3 intersect at B2, B4, B6 point respectively, it is assumed that the corresponding polar coordinates of B2, B4, B6 are respectively (ρ42,θ2)、(ρ43,
θ3)、(ρ46,θ6), then by Ay [ρ2,θ2]、Ay[ρ3,θ3]、Ay[ρ6,θ6] add 1 respectively.And so on, until it is all it is discrete in
The sinusoidal line computation of heart point mapping terminates, and obtains two-dimentional accumulator array voting result；It is found in this voting result maximum
Array element, the corresponding pole coordinate parameter of the array element, as central point horizontal polar coordinates are straight in correspondence image
Central point quantity on the horizontal line that line includes is most.For shown in Fig. 6, totally 7 sinusoidal lines are in θiIn value range respectively
Intersection, intersection point is respectively B1, B2, B3...B6, the correspondence array element Ay [ρ finally obtained1,θ1]=2, Ay [ρ2,θ2]=1,
Ay[ρ3,θ3]=1, Ay [ρ4,θ4]=1, Ay [ρ5,θ5]=1, Ay [ρ6,θ6]=4；Due to Ay [ρ6,θ6] maximum, so the pole of B6
Coordinate (ρ66,θ6) it is the horizontal polar coordinates of required spider.Similarly, the polar coordinates of spider vertical line, wherein θ i can be obtained
Value range can be [- 5 °, 5 °].Spider is finally obtained according to spider vertical line and the horizontal polar coordinates of spider
The rectangular co-ordinate of intersection point.
4) identification point coordinates judgement：Since the substrate cost of laser scribing machine equipment cutting is higher, the image recognition of mistake
The positional precision for directly affecting cutting causes the substrate of cutting that cannot meet required precision and scrap, so right before cutting
The coordinate of identification point is judged.As shown in fig. 7, usually the width of spider center dotted line is 20 pixel values, therefore in cross
It pitches in 30 pixel value ranges in the center directions XY and does gray scale judgement.Ideally, the point two-value in gray scale judgement area
After change processing, it is 800 pixel values to be worth for 0 point number, is 100 pixel values for 1 point number, it is contemplated that the shadow of " noise "
It rings, if value is more than the 20% of total pixel number, as wrong identification image for 1 pixel after binary conversion treatment.When being determined as
When error in data and the image of wrong identification, industrial personal computer sends the process instruction for being determined as error image, and the movement of slide glass platform will
Substrate is put into waste bin, otherwise carries out scribing work.
Claims (5)
1. a kind of substrate position identifying processing method of laser scribing means image identification system, it is characterised in that including walking as follows
Suddenly：
Step 1: image binaryzation is handled：
Gray count is done to the whole picture figure of acquisition, obtains its gray average and using the gray average as binary-state threshold；Work as figure
When the gray value of pixel is more than the binary-state threshold as in, it is set as 1, is otherwise 0, obtains binary image；Binary picture
Pixel for 0 as in is " stain "；
Step 2: doing edge detection to image Mark points：
The Mark points are spider graph；In selected image-region, both horizontally and vertically circumferentially regarded from four respectively
Field center carries out gray value detection, and the ordinate of " stain " in the often row pixel found to upper and lower directions is averaged, obtains
The horizontal centre dotted line of spider；The abscissa of " stain " in each column pixel found to left and right directions is averaged, and is obtained
The vertical centre dotted line of spider；
Step 3：The line detection of Mark dot center：
1) for spider horizontal centre dotted line, origin of any point as rectangular coordinate system on image is taken；Establish a two dimension
Accumulator array Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn]；θiThe value in the angular range of setting；
2) initialization Ay [ρi,θi]=0；Point on the dotted line of center is mapped in polar coordinate system parameter space, obtain it is corresponding just
String；
For any central point J on horizontal centre dotted line, by its rectangular co-ordinate (xj, yj) formula (1) is substituted into, calculate θ1, θ2...
θi... θnCorresponding ρ values, i.e. ρj1, ρj2... ..., ρji, ρjn, obtain central point J and be mapped to polar coordinate system parameter space
Interior sinusoidal line；
ρji=xjcosθi+yjsinθi (1)
It often obtains a central point and is mapped to sinusoidal line in polar coordinate system parameter space, judge the sinusoidal line and obtain before just
Whether string has intersection point；For any central point J, if the corresponding sinusoidal lines of central point J have friendship with the sinusoidal line obtained before
Point B0 (ρjo,θo), then by the array element Ay [ρ in corresponding two-dimentional accumulator arrayo,θo] plus 1；And so on, until obtaining
All the points are mapped to the intersection point of sinusoidal line and these sinusoidal lines in polar coordinate system parameter space on horizontal centre dotted line, final to obtain
To two-dimentional accumulator array Ay [ρ1,θ1], Ay [ρ2,θ2] ... Ay [ρi,θi]…Ay[ρn,θn] voting result；It is cumulative in two dimension
Maximum array element is found in device array voting result, the corresponding intersection point of the array element is that the horizontal pole of central point is sat
Mark parameter；
Using method same as central point horizontal line pole coordinate parameter is calculated, the pole coordinate parameter of central point vertical line is obtained；
Step 4: obtaining the polar coordinates of spider intersection point according to the pole coordinate parameter of central point horizontal line and central point vertical line.
2. the substrate position identifying processing method of laser scribing means image identification system according to claim 1, feature
It is in the step 2, after entire image edge is removed 20 pixels, takes middle section as selected image-region.
3. the substrate position identifying processing method of laser scribing means image identification system according to claim 1 or 2, special
It levies and is in the step 3, θiThe angular range set is [85 °, 95 °].
4. the substrate position identifying processing method of laser scribing means image identification system according to claim 1, feature
It is to further include the steps that acquisition spectral discrimination, steps are as follows for this：
If the discrete pixel that the binary image intermediate value that step 1 obtains is 0 and the value of surrounding pixel point is 1 is " noise "；
Judge in binary image whether " noise " number is more than the noise amount threshold set, is to judge current image date mistake
Accidentally, it does not identify；Otherwise step 2 is carried out；The noise amount threshold wherein set is more than or equal to 1% and is less than or equal to 3%.
5. the substrate position identifying processing method of laser scribing means image identification system according to claim 1 or 4, special
Sign is to further include identification point coordinates determination step；Steps are as follows for this：
For the spider intersection point that step 3 obtains, around it in 30 × 30 pixel coverages, if binary image intermediate value
It is more than the 20% of total pixel quantity for 1 pixel quantity, then it is assumed that it is wrong identification image, otherwise it is assumed that in step 3
The rectangular co-ordinate of the spider intersection point arrived is correct.
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| CN109345550A (en) * | 2018-08-07 | 2019-02-15 | 信利光电股份有限公司 | The grasping means of hot spot angle point, device and the readable storage medium storing program for executing of structure light image |
| CN109961067B (en) * | 2019-03-19 | 2021-05-28 | 上海望友信息科技有限公司 | Method and system for selecting optical reference point, computer storage medium and equipment |
| CN112614094B (en) * | 2020-12-15 | 2023-04-18 | 郑州金惠计算机系统工程有限公司 | Insulator string abnormity positioning and identifying method based on sequence state coding |
| CN112505055B (en) * | 2021-02-03 | 2021-06-08 | 苏州维嘉科技股份有限公司 | Method and device for detecting copper leakage of circuit board |
| CN114627141B (en) * | 2022-05-16 | 2022-07-22 | 沈阳和研科技有限公司 | Cutting path center detection method and system |
| CN115031633B (en) * | 2022-08-11 | 2022-11-08 | 长春光华微电子设备工程中心有限公司 | On-board detection system of laser scribing machine and detection method thereof |
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