CN106092321B - A kind of measuring method of the THz wave frequency measuring equipment based on CARS effects - Google Patents
A kind of measuring method of the THz wave frequency measuring equipment based on CARS effects Download PDFInfo
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- CN106092321B CN106092321B CN201610493507.4A CN201610493507A CN106092321B CN 106092321 B CN106092321 B CN 106092321B CN 201610493507 A CN201610493507 A CN 201610493507A CN 106092321 B CN106092321 B CN 106092321B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
- G01J3/4412—Scattering spectrometry
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Abstract
The invention discloses a kind of measuring methods of the THz wave frequency measuring equipment based on CARS effects, the laser that laser projects successively vertical incidence to spectroscope and off axis paraboloidal mirror, through spectroscope and off axis paraboloidal mirror reflection after laser and light to be detected by convex lens focus after be incident to sample, it is absorbed by the light part after sample by baffle, another part forms anti-Stokes light, the rear of baffle is equipped with to detect the detection device of anti-Stokes light, the front one side of stepping mobile platform is equipped with scale, scale is connected with to gather the information acquisition device of slit location information.Apparatus of the present invention have the characteristics that wide range of measurement, high sensitivity, reliability are high, compact-sized, at low cost and can work at ambient temperature, suitable for Terahertz scientific research field and the practical application area of Terahertz Technology, and accurate reliable light frequency to be measured can be obtained by its measuring method.
Description
Technical field
The present invention relates to a kind of Electromagnetic Wave Detection technology, specifically, be related to it is a kind of relevant anti-based on space folding
The device and method of Stokes (abbreviation BOX CARS) effect measurement Terahertz (THZ).
Background technology
Many different types of terahertz emission sources are obtained for very big development in recent years, and are widely used in into
In the fields such as picture, spectrum analysis.In tera-hertz spectra analysis field, terahertz time-domain spectroscopic technology realizes number due to being typically only capable to
The spectrally resolved ability of ten GHz, cannot meet the needs of actual in certain applications.In this context, Ren Menti
Go out various more accurate methods to detect the frequency of THZ, but have shortcoming, it is specific as follows：
What the frequency measurement of Terahertz long-wave band was commonly used at present is heterodyne method, it is that measured signal is comparable with frequency
Local oscillated signal difference frequency obtains the frequency of tested THz wave by analyzing the intermediate-freuqncy signal of output.But for THz high
Power pulse ripple, there are still following two defects for heterodyne method:First, THz local oscillations source is seldom, and it is expensive；Second is that by
It is too short to survey the pulse width of THz pulse ripple, can not ensure the effect of local continuous wave signal and pulse wave mixing, so as to affect
Measurement accuracy.
Also a kind of method for measuring THZ frequencies is to go to detect using FP interferometers, FP interferometer measurement Terahertz wave frequencies
After the principle of rate is THz wave vertical incidence FP interferometers, when metallic mesh is larger to the reflectivity of incidence wave, transmitted light
Generation multiple-beam interference adjusts the light path between two adjacent beams of transmitted light by mobile two metallic mesh spacing of FP interferometers
Difference, interfering beam pass through lens post-concentration on the detector.Test the different spacing by gathering two metallic mesh of FP interferometers
Corresponding transmitted light intensity, carries out curve fitting, and can draw the spacing of two neighboring light intensity peak, calculates Terahertz frequency
Rate.Its main feature is that interferometer fineness is high, measurement result is accurate, and shortcoming is to need to make metallic mesh using special technique, and
The line width of the metallic mesh of making, thickness and cycle are all in micron dimension, it is difficult to preserve, in addition, structure Fabry-Perot
It is difficult to install and ensure the depth of parallelism of two metallic meshes during interferometer.The metallic mesh that improving this method selection has substrate is built
Fabry-Perot interferometers have compact to measure during narrow linewidth terahertz emission wavelength, are easily installed, adjust, ensure the depth of parallelism,
Convenient for the advantage of preservation, but fineness decreases.
Except two kinds of THZ frequency sonding methods above, the Fourier transform spectrometer, of terahertz wave band is also operated in
Can be used for the frequency spectrum of measurement THZ, but the detector that uses of the technology only under the temperature conditionss of liquid nitrogen cooling
It can carry out the detection of low frequency THz wave and high sensitivity detection.
The content of the invention
The purpose of the invention is to overcome deficiency of the prior art, provide it is a kind of based on space folding it is relevant it is anti-this
The Terahertz frequency measuring equipment and method of lentor effect (BOX CARS), this device have wide range of measurement, sensitivity
It is high, reliability is high, compact-sized, at low cost and the characteristics of can work at ambient temperature, suitable for Terahertz scientific research field
And the practical application area of Terahertz Technology, and accurate reliable light frequency to be measured can be obtained by its measuring method.
The purpose of the present invention is what is be achieved through the following technical solutions：
A kind of THz wave frequency measuring equipment based on CARS effects, including laser, spectroscope, off axis paraboloid mirror
Mirror, convex lens, sample, baffle, stepping mobile platform and computer, the laser that the laser projects successively extremely divide by vertical incidence
Light microscopic and off axis paraboloidal mirror, laser and light to be detected after spectroscope and off axis paraboloidal mirror reflection pass through the convex lens
The sample is incident to after focusing, is absorbed by the light part after the sample by the baffle, another part is formed with instead
Stokes light, the rear of the baffle are equipped with to detect the detection device of the anti-Stokes light, the detection device
By slit, collimating element, dispersion element, concentrating element and the CCD detector structure being successively set on the stepping mobile platform
Into the front one side of the stepping mobile platform is additionally provided with scale, and the scale is connected with to gather slit location information
Information acquisition device, described information collector, CCD detector and stepping mobile platform are connected by cable with the computer.
The laser is made of continuous wide band laser.
The surface of the off axis paraboloidal mirror is coated with metallic gold.
The precision of the scale is below nanoscale or nanoscale.
A kind of measuring method of the THz wave frequency measuring equipment based on CARS effects, comprises the following steps：
(1) laser is opened, mobile stepping mobile platform makes detection device be moved with stepping mobile platform；
(2) detection device detects the point of anti-Stokes light signal enhancing in moving process, passes through scale and calculating
Machine records the position data of detection device under the moment；
(3) light frequency to be measured is obtained by the frequency calculation formula of light to be detected；
(4) to make measurement data accurately reliable, correspondingly increase on the basis of the measuring device two spectroscopes,
One convex lens, a sample and a baffle, move stepping mobile platform, detection device are made to be moved with stepping from top to bottom
Platform moves；
(5) by step (2) detection device is made to detect two anti-Stokes light signal enhancings in moving process
Point records the position data of detection device under two moment respectively；
(6) two light frequencies to be measured are obtained by step (3), if the value difference of the two light frequencies to be measured is larger, weighed
New measurement；If difference is small, both take after average value as light frequency to be measured finally, to eliminate random error.
Two spectroscopical parameters of one of them described in step (4) are 1/4 reflectivity, 3/4 transmissivity；Another
Parameter is 1/3 reflectivity, 2/3 transmissivity.
Step correspondingly increases multigroup spectroscope, convex lens, sample and gear in (4) on the basis of the measuring device
Plate records the position data of multigroup detection device by step (2), multigroup light frequency to be measured is obtained by step (3), if more
The value difference of group light frequency to be measured is small, then takes after the average value of multigroup light frequency to be measured as light frequency to be measured finally.
Compared with prior art, advantageous effect caused by technical scheme is：
1. measuring device of the present invention is at low cost, error is small, precision is high, and with faster measuring speed, it can be extensive
In laboratory applied to the Terahertz association area that goes in for the study.
2. wide range of measurement, the frequency except that can measure entire THZ wave bands, can also measure far infrared and microwave band
Wave frequency.
3. after device holistic conformation, when measurement only needs stepping mobile platform to be occurred to obtain anti-Stokes optical signal
The position data of detection device, easy to operate finally by computer data acquisition and calculating, measuring speed during enhancing point
Soon.
4. it can correspondingly increase multigroup spectroscope, convex lens, sample and baffle on the basis of measuring device, so as to survey
Multigroup light frequency to be measured, take after the average value of group light frequency to be measured as final light frequency to be measured so that measurement data is smart
Really reliable, precision is high.
Description of the drawings
Fig. 1 is the structure diagram of the present invention.
Fig. 2 is phase matched principle schematic in frequency measurement.
Fig. 3 is the structure diagram of a wherein embodiment of the invention.
Reference numeral：1- lasers 2- smooth 3- spectroscopes 4- off axis paraboloidal mirrors 5- convex lens 6- sample 7- baffles to be detected
8- scale 9- slit 10- collimating element 11- dispersion element 12- concentrating element 13-CCD detector 14- stepping mobile platforms 15- is counted
Calculation machine 16- information acquisition devices
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings：
As shown in Figure 1, a kind of THz wave frequency measuring equipment based on CARS effects, including laser 1, spectroscope 3,
Off axis paraboloidal mirror 4, convex lens 5, sample 6, baffle 7, stepping mobile platform 14 and computer 15, laser 1 is by continuous wide band
Laser is formed, for emitting the laser of continuous wide band；For off axis paraboloidal mirror 4 for light path of transferring, surface is coated with metallic gold；
Convex lens 5 is used to two beam laser and a branch of light to be detected 2 converging at sample 6, and light 2 to be detected is needs the light detected, originally
Its frequency is set to ω in implementation2；Sample 6 selects Raman frequency shift larger and is located at the focal point of convex lens 5；Baffle 7
For filtering some unwanted light.
Vertical incidence to spectroscope 3 and off axis paraboloidal mirror 4, is divided the laser that laser 1 projects in the present embodiment successively
The parameter of mirror is 1/2 transmissivity, 1/2 reflectivity, laser and light to be detected 2 after spectroscope 3 and off axis paraboloidal mirror 4 reflect
Sample 6 is incident to after being focused on by convex lens 5, is absorbed by the light part after sample 6 by baffle 7, another part is formed with
Anti-Stokes light, the rear of baffle 7 are equipped with to detect the detection device of anti-Stokes light, and detection device is by setting gradually
Slit 9, collimating element 10, dispersion element 11, concentrating element 12 and CCD detector 13 on stepping mobile platform 14 are formed,
The effect of slit 9 is that the object point of spectrometer imaging system is formed under the irradiation of incident light；Collimating element 10 makes what slit 9 was sent
Light becomes directional light；11 generally use grating of dispersion element makes optical signal spatially become a plurality of light beam by wavelength dispersion；
Concentrating element 12 focuses on the light beam after dispersion, it is made to form a series of picture of entrance slits 9 on focal plane, wherein each picture point
Corresponding to a specific wavelength；CCD detector 13 is positioned over focal plane, for measuring the luminous intensity of each wavelength picture point.Stepping is moved
The front one side of platform 14 is additionally provided with to observe and demarcate the high-precision scale 8 of 9 position of slit, and the precision of scale 8 is to receive
Below meter level or nanoscale；8 link information collector 16 of scale, information acquisition device 16, CCD detector 13 and stepping mobile platform
14 are connected by cable with computer 15, the direction stepping of the programme-control stepping mobile platform 14 of computer 15 along scale 8
Movement, the position data of the slit 9 when information acquisition device 16 will appear from anti-Stokes light signal enhancing are transmitted to computer 15,
15 operating measurement program of computer reads the digital voltage value that information acquisition device 16 exports, work is sent to stepping mobile platform 14
It instructs, measurement result finally is calculated for user.
The principle of measuring device of the present invention is as follows：
As shown in Figure 1：Since laser 1 is a wideband laser, various frequencies are contained, are then wherein certainly existed
Some frequencies omega1Meet formula (1.1)
ω1-ω2=ωVFormula (1.1)
In formula：ωvFor the vibration frequency of the Raman active of sample 6, wherein ωvThe known quantity being to determine.
ω2It is the frequency of light 2 to be detected.ω1It is the incident laser frequency of laser 1, shares two beams：By continuous broadband
The light that laser 1 emits is divided into two in early period light path, and a part has passed through the top of convex lens 5, and a part has passed through convex
The lower section of lens 5.
It is theoretical from coherent antistockes Raman spectroscopy (CARS)：The two incident lights are dissipated corresponding to excited Raman
Pump light (the ω penetrated1=ωL) and stokes light (ω2=ωS).Frequency is ω1And ω2Light produced by stimulated Raman scattering
The very big vibration excited state molecule of population density is given birth to.As nonlinear dielectric, these excited state molecules utilize frequencies omega1's
Incident light generates ωa=2 ω1-ω2Anti-Stokes light.As shown in Fig. 2, meeting phase-matching condition(Thus formula can be calculated) after, the intensity of obtained anti-Stokes optical signal will compare spontaneous Raman
Spectral signal is big by 104~105Times.
Patent of the present invention is substituted usually used conllinear using the coherent (BOX CARS) of space folding
Coherent (CARS).So as to overcome a defect, (two beam incident lasers parallel to each other and signal beams are in sky
Between on be overlapping, it is necessary to costliness spectral filtering piece they are distinguished).What is selected in the present embodiment is that price is relatively low
Continuous wide band laser.The sample 6 for selecting the vibration frequency of a Raman active higher, detection device are moved with stepping and put down
Platform 14 moves, in a position for meeting phase matched, it will the point of anti-Stokes light signal enhancing occur, record this moment
The position data d of detector.Following equation group can be obtained according to correlation computations：
In formulaIt is ω respectively1、ω2、ω3Wave vector, direction and angle [alpha] are as depicted in figs. 1 and 2；
It is respectivelyCorresponding modulus value, c are the lighies velocity.
Simultaneous formula (1.1) again, the formula that can obtain light frequency to be measured are：
To further improve accuracy and reliability, reduction error (properties of samples is slightly variable, noise signal is disturbed) can
To add two spectroscopes, 3, convex lenses 5 and a kind of new sample 6 on the basis of Fig. 1, as shown in Figure 3.Work as detection
When device moves from top to bottom, it finds that the position that two anti-Stokes optical signals are uprushed, records position respectively
Information.According to the calculation in formula (1.3), it is possible to which the frequency for obtaining two light to be measured is respectivelyWithIf
It was found thatWithDiffer larger, then the structural property variation of material may have occurred with regard to explanation or occur larger
Error after improving, it is necessary to remeasure；If it find thatWithIt is of substantially equal, then the average value conduct of the two can be chosen
The frequency of last light to be measured, to eliminate random error.
Further, multigroup spectroscope, lens and sample can be added again a series of anti-Stokes occurs to gather
The location point of optical signal enhancing.So as to calculate multigroup light frequency to be measured..., if
Multigroup frequency is of substantially equal, then final light frequency calculating formula to be measured is
A kind of measuring method of the THz wave frequency measuring equipment based on CARS effects, comprises the following steps：
(1) laser 1 is opened, mobile stepping mobile platform 14 makes detection device be moved with stepping mobile platform 14；
(2) detection device detects the point of anti-Stokes light signal enhancing in moving process, passes through scale and calculating
Machine records the position data of detection device under the moment；
(3) light frequency to be measured is obtained by the frequency calculation formula (1.3) of light to be detected；
(4) to make measurement data accurately reliable, two spectroscopes are correspondingly increased on the basis of the measuring device
3rd, a convex lens 5, a sample 6 and a baffle 7, move stepping mobile platform 14 from top to bottom, make detection device with
Stepping mobile platform 14 moves；
Parameter located above is 1/4 reflectivity, 3/4 transmissivity in two spectroscopes 3 being closer in Fig. 3；It is another
A parameter is 1/3 reflectivity, 2/3 transmissivity；
(5) detection device detects the point of two anti-Stokes light signal enhancings in moving process, records respectively
The position data of detection device under two moment；
(6) two light frequencies to be measured are obtained by the frequency calculation formula of light to be detected, if the two light frequencies to be measured
Value difference is larger, then remeasures；If difference is small, light frequency to be measured is used as after taking the two average value, to eliminate with chance error
Difference.
Preferably, multigroup spectroscope 3, convex lens 5,6 He of sample are correspondingly increased on the basis of the measuring device
Baffle 7 so as to measure multigroup light frequency to be measured by step (2), (3), if the value difference of multigroup light frequency to be measured is small, is adopted
Most accurate light frequency to be measured is calculated with formula (1.4).
Claims (3)
1. a kind of measuring method of the THz wave frequency measuring equipment based on CARS effects, measuring device includes laser, divides
Light microscopic, off axis paraboloidal mirror, convex lens, sample, baffle, stepping mobile platform and computer, the laser that the laser projects
Vertical incidence is to spectroscope and off axis paraboloidal mirror successively, laser after spectroscope and off axis paraboloidal mirror reflection and to be detected
Light is absorbed by being incident to the sample after the convex lens focus by the light part after the sample by the baffle,
Another part is formed with anti-Stokes light, and the rear of the baffle is equipped with to detect the detection dress of the anti-Stokes light
Put, the detection device by be successively set on the stepping mobile platform slit, collimating element, dispersion element, focus on member
Part and CCD detector are formed, and the front one side of the stepping mobile platform is additionally provided with scale, and the scale is connected with to gather
The information acquisition device of slit location information, described information collector, CCD detector and stepping mobile platform pass through cable and institute
Computer is stated to be connected；It is characterized in that, measuring method comprises the following steps：
(1) laser is opened, mobile stepping mobile platform makes detection device be moved with stepping mobile platform；
(2) detection device detects the point of anti-Stokes light signal enhancing in moving process, is remembered by scale and computer
Record the position data of detection device under the moment；
(3) light frequency to be measured is obtained by the frequency calculation formula of light to be detected；
(4) to make measurement data accurately reliable, correspondingly increase on the basis of the measuring device two spectroscopes, one
Convex lens, a sample and a baffle, move stepping mobile platform from top to bottom, make detection device with stepping mobile platform
It is mobile；
(5) by step (2) detection device is made to detect the point of two anti-Stokes light signal enhancings in moving process, divided
The position data of detection device under two moment is not recorded；
(6) two light frequencies to be measured are obtained by step (3), if the value difference of the two light frequencies to be measured is larger, surveyed again
Amount；If difference is small, both take after average value as light frequency to be measured finally, to eliminate random error.
2. a kind of measuring method of the THz wave frequency measuring equipment based on CARS effects according to claim 1, special
Sign is that two spectroscopical parameters of one of them described in step (4) are 1/4 reflectivity, 3/4 transmissivity；Another
Parameter is 1/3 reflectivity, 2/3 transmissivity.
3. a kind of measuring method of the THz wave frequency measuring equipment based on CARS effects according to claim 1, special
Sign is that step correspondingly increases multigroup spectroscope, convex lens, sample and gear in (4) on the basis of the measuring device
Plate records the position data of multigroup detection device by step (2), multigroup light frequency to be measured is obtained by step (3), if more
The value difference of group light frequency to be measured is small, then takes after the average value of multigroup light frequency to be measured as light frequency to be measured finally.
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| CN101210874A (en) * | 2006-12-31 | 2008-07-02 | 清华大学 | Method and apparatus for measuring terahertz time-domain spectroscopy |
| CN102116929A (en) * | 2011-01-30 | 2011-07-06 | 中国科学院西安光学精密机械研究所 | High-speed wide-field coherent anti-Stokes Raman scattering microscopic system and method |
| CN205843814U (en) * | 2016-06-24 | 2016-12-28 | 天津大学 | A kind of THz wave frequency measuring equipment based on CARS effect |
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| US8759778B2 (en) * | 2007-09-27 | 2014-06-24 | Anis Rahman | Terahertz time domain and frequency domain spectroscopy |
| JP2010038809A (en) * | 2008-08-07 | 2010-02-18 | Murata Mfg Co Ltd | Terahertz spectroscopic device |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101210874A (en) * | 2006-12-31 | 2008-07-02 | 清华大学 | Method and apparatus for measuring terahertz time-domain spectroscopy |
| CN102116929A (en) * | 2011-01-30 | 2011-07-06 | 中国科学院西安光学精密机械研究所 | High-speed wide-field coherent anti-Stokes Raman scattering microscopic system and method |
| CN205843814U (en) * | 2016-06-24 | 2016-12-28 | 天津大学 | A kind of THz wave frequency measuring equipment based on CARS effect |
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