CN106091915B - The device and microspur detection method that microspur detecting sensor, perception microspur change - Google Patents
The device and microspur detection method that microspur detecting sensor, perception microspur change Download PDFInfo
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- CN106091915B CN106091915B CN201610375972.8A CN201610375972A CN106091915B CN 106091915 B CN106091915 B CN 106091915B CN 201610375972 A CN201610375972 A CN 201610375972A CN 106091915 B CN106091915 B CN 106091915B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/16—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
- G01B7/18—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance
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Abstract
The present invention relates to distances to be driven perception field, more particularly, to a kind of microspur detecting sensor, the device and microspur detection method of perception microspur variation.Microspur detecting sensor includes elastic substrates layer, sensor layer, elastic protective layer and detection circuit；Elastic substrates layer, sensor layer and elastic protective layer are cascading；Sensor layer is flexible conductive material；Detection circuit is connect with sensor layer.The device for perceiving microspur variation includes top rigid body, lower part rigid body and microspur detecting sensor；Top rigid body and lower part rigid body are separately positioned on the opposite sides of microspur detecting sensor.Microspur detection method is that the setting of microspur detecting sensor need to detected position, detects the resistance variations of the sensor layer of microspur detecting sensor, is changed according to the spacing that the resistance variations of sensor layer calculate microspur detecting sensor detection position.The device of the invention production is simple, and application method is convenient.
Description
Technical field
The present invention relates to distances to be driven perception field, more particularly, to a kind of microspur detecting sensor, perception microspur variation
Device and microspur detection method.
Background technique
Range sensor is using time-of-flight method come with a kind of sensor of the distance of detection object." time-of-flight method "
Be by emitting especially short and measuring this light pulse from being emitted to the time being reflected by the object back, by survey time interval come
Calculate the distance between object.
It can only measure the displacement that distance is unable to detection object, and therefore, people have invented displacement sensor.
Displacement sensor is also known as linear transducer, is a kind of linear unit for belonging to metal induction, the effect of sensor
It is that various measurands are converted to electricity.In process of production, the measurement of displacement is generally divided into measurement full size and machine
Tool is displaced two kinds.
Form by measured variable transformation is different, and displacement sensor can be divided into analog and two kinds digital.It is analog again
Physical property type and two kinds of structural type can be divided into.
Common displacement sensor is in the majority with analog structure type, including potentiometric displacement transducer, inductance type force-displacement pass
Sensor, selsyn, capacitive displacement transducer, electric vortex type displacement sensor, Hall displacement transducer etc..
One important advantage of digital displacement transducer is easy for signal being sent directly into computer system.This sensing
Device is quickly grown, and application is increasingly extensive.
But either range sensor or displacement sensor, it cannot measure in the object in lesser situation
The deformation of body, and how the miniature deformation of object is measured, it is a problem for urgently needing to solve now.
Summary of the invention
The purpose of the present invention is to provide the devices of perception microspur variation, are asked with solving technology existing in the prior art
Topic.
The device of perception microspur variation provided by the invention, including elastic substrates layer, sensor layer, elastic protective layer and inspection
Slowdown monitoring circuit；
The elastic substrates layer, the sensor layer and the elastic protective layer are cascading；
The sensor layer is flexible conductive material；
The detection circuit is connect with the sensor layer, for detecting the Parameters variation of the sensor layer.
Further, the sensor layer be graphene circuit layer, microplate layer, carbon nanotube circuit layer, carbon dust circuit layer,
It metal material layer, metal oxide film plating layer, conductive compound crystalline material, inorganic non-metallic crystal circuit and/or organic leads
Electric material circuit.
Further, the detection circuit is resistance detecting circuit, for detecting the resistance change of the sensor layer.
Further, the detection circuit includes input, output end, virtual earth end and build-out resistor；
One end of the build-out resistor connects the input terminal, and the other end connects the output end；
One end of the sensor layer connects the output end, and the other end connects the virtual earth end, for by described defeated
The voltage change of outlet detects the resistance variations of the sensor layer, and then calculates the deformation of the sensor layer.
The present invention also provides it is a kind of perception microspur variation device comprising top rigid body, lower part rigid body and on
The microspur detecting sensor stated；
The top rigid body and the lower part rigid body are separately positioned on the opposite sides of the microspur detecting sensor.
Further, the device of perception microspur variation further includes elastomer；
The elastomer is arranged between the top rigid body and the lower part rigid body, and elastomer setting exists
The surrounding of the microspur detecting sensor.
Further, the material of the elastomer be rubber, silica gel, organic silica gel, foam, acrylic glue, foamed plastic,
Foaming metal, elastic metallic structure and/or resilient plastic construction.
Further, the device of perception microspur variation further includes briquetting；
The briquetting is separately positioned on the opposite two sides of the microspur detecting sensor, and is separately positioned on the microspur sense
Know the opposite both ends of sensor.
Further, the device of perception microspur variation further includes briquetting；
The microspur detecting sensor is arranged in close to the side of the top rigid body in the briquetting；
The middle part of the microspur detecting sensor is arranged in the briquetting.
The present invention also provides a kind of microspur detection methods, and above-mentioned microspur detecting sensor setting is being needed check bit
It sets, the resistance variations of the sensor layer of the microspur detecting sensor is detected, according to the resistance variations of the sensor layer
Calculate the spacing variation of microspur detecting sensor detection position.
Microspur detecting sensor provided by the invention, perception microspur variation device and microspur detection method, will lead
The sensor layer of electricity is arranged in and need to detect on the object of deformation, is detected by detection circuit to the parameter of sensor layer,
The variation of sensor layer is judged by the variation of parameter, and then obtains the deformation of the object of detection position or detection, realization pair
The detection of micro- deformation.The device of the invention production is simple, and application method is convenient.
Detailed description of the invention
It, below will be to specific in order to illustrate more clearly of the specific embodiment of the invention or technical solution in the prior art
Embodiment or attached drawing needed to be used in the description of the prior art be briefly described, it should be apparent that, it is described below
Attached drawing is some embodiments of the present invention, for those of ordinary skill in the art, before not making the creative labor
It puts, is also possible to obtain other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of the device of present invention perception microspur variation；
Structural schematic diagram when Fig. 2 is one piece of briquetting of the device of present invention perception microspur variation；
Fig. 3 is the use state of Fig. 2 with reference to figure；
Structural schematic diagram when Fig. 4 is two pieces of briquettings of the device of present invention perception microspur variation；
Fig. 5 is the use state of Fig. 4 with reference to figure；
Fig. 6 is the circuit diagram of the detection circuit of microspur detecting sensor of the present invention.
Appended drawing reference：
1：Top rigid body 2：Microspur detecting sensor 3：Elastomer
4：Lower part rigid body 5：Briquetting 6：Elastic protective layer
7：Sensor layer 8：Elastic substrates layer
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with attached drawing, it is clear that described implementation
Example is a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill
Personnel's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In addition, term " first ", " second ", " third " are used for description purposes only, it is not understood to indicate or imply phase
To importance.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
To be mechanical connection, it is also possible to be electrically connected；It can be directly connected, can also can be indirectly connected through an intermediary
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood at this with concrete condition
Concrete meaning in invention.
As shown in figures 1-6, the present invention provides a kind of devices of perception microspur variation, including elastic substrates layer 8, sensing
Device layer 7, elastic protective layer 6 and detection circuit；
The elastic substrates layer 8, the sensor layer 7 and the elastic protective layer 6 are cascading；
The sensor layer 7 is flexible conductive material；
The detection circuit is connect with the sensor layer 7, for detecting the Parameters variation of the sensor layer 7.
Sensor layer 7 is set between elastic substrates layer 8 and elastic protective layer 6, and the material of sensor layer 7 is with bullet
The conductive material of property, and sensor layer 7 is connect with detection circuit.
When in use, after elastic substrates layer 8 being fixed, it will need to detect object and the elastic protective layer of deformation
6 offset.When object to elastic protective direction due to compressing when deformation occurs, elastic protective follows one starting of object
Raw deformation, and then cause sensor layer 7 deformation occurs, cause the parameters of sensor layer 7 to change, at this point, passing through inspection
After slowdown monitoring circuit detects the parameter of sensor layer 7, by the variation of parameter, the deformation that can be generated to object is calculated
It obtains.
The ratio data specifically calculated, need to be according to the ratio and detection different sensors layer 7 of different object conductances
Material determines.
It should be pointed out that object can also be mobile to the direction far from elastic protective, at this time, it may be necessary to which elasticity is protected
Watch box is bonded with object, i.e., elastic protective can be moved together with object, and then is able to drive from sensor layer 7 and is occurred
Deformation, brings the Parameters variation of sensor layer 7, and then obtains final deformation data.
In the present embodiment, the material of elastic protective layer 6 can be rubber, silica gel, organic silica gel, foam, acrylic glue,
Foamed plastic, foaming metal, elastic metallic structure, resilient plastic construction etc., as long as the work of protection sensor layer 7 can be played
With.
Equally, the material of elastic substrates layer 8 is also possible to rubber, silica gel, organic silica gel, foam, acrylic glue, foaming modeling
Material, foaming metal, elastic metallic structure, resilient plastic construction etc., can be from the other side of sensor layer 7 to sensor layer 7
It is protected.
Preferred embodiment is that the sensor layer 7 is graphene circuit layer, microplate layer, carbon nanotube circuit layer, carbon
Powder circuit layer, metal material layer, metal oxide film plating layer, conductive compound crystalline material, inorganic non-metallic crystal circuit and/
Or organic conductive material circuit.
The working principle of sensor layer 7 is as follows：
For using graphite as the material of sensor layer 7：Graphene is formed into network on 1-5000 atomic layer level thickness
Structure, network can be hexagon, quadrangle triangle, establishment shape etc. mode.As the elastic protective layer that sensor layer 7 adheres to
6 by deformation, and due to forming network structure on 1-5000 atomic layer level thickness, itself, can be with elastic protective layer 6 without rigidity
Deformation, it is considered that constituting the circuit of sensor layer 7 can stretch in a certain direction from microstructure.As Figure 2-Figure 5,
Drawing high distance is D1-D.Sensitive layer is drawn high distance change between rear atom simultaneously, causes the variation of the parameters such as resistance.Then when
6 type of elastic protective layer, which becomes, to be restored, and sensor circuit layer is attached on elastic protective layer 6 also to be restored together, while resistance restores.
In the present embodiment, the material of sensor layer 7 can be graphene circuit layer, microplate layer, carbon nanotube circuit layer,
Carbon dust circuit layer, metal material layer, metal oxide film plating layer, conductive compound crystalline material, inorganic non-metallic crystal circuit
And/or organic conductive material circuit etc., but its be not limited solely to it is above-mentioned be set out several, can also be other materials
Matter, that is to say, that as long as it can satisfy with elasticity and is capable of the characteristic of conduction.
Preferred embodiment is that the detection circuit is resistance detecting circuit, for detecting the electricity of the sensor layer 7
Change in resistance.
In the present embodiment, detection circuit is resistance detecting circuit, i.e., mainly for detection of the resistance value of sensor layer 7
Variation, the deformation occurred by the variation of resistance value come judgment object.
It should be pointed out that detection circuit in the present embodiment is resistance detecting circuit, but it is not limited solely to electricity
Detection circuit is hindered, can also be the detection circuit of other parameters, such as can be capacitor, voltage, inductance, optical property (as thoroughly
Photosensitiveness, color etc.) etc. the variation of parameters detection circuit, that is to say, that as long as it can pass through the Parameters variation of sensor layer 7
Carry out the deformation of judgment object generation.
Preferred embodiment is that the detection circuit includes input, output end, virtual earth end and build-out resistor；
One end of the build-out resistor connects the input terminal, and the other end connects the output end；
One end of the sensor layer 7 connects the output end, and the other end connects the virtual earth end, for by described defeated
The voltage change of outlet detects the resistance variations of the sensor layer 7, and then calculates the deformation of the sensor layer 7.
In the present embodiment, detection circuit is resistance detecting circuit, and circuit diagram is as shown in Figure 6, wherein R1 is matching electricity
It is input voltage, Vout is output voltage that resistance, R2, which are miniature change sensor, Vi n,.
Its testing principle is：
In the case where the total voltage of R1 and R2 is constant, when the resistance value of R2 changes, the number of output voltage Vout
Value can also change, and after measuring later to Vout output voltage values, pass through formula (1)
It is calculated, it can be deduced that the resistance variations of sensor layer 7, and then according to the available top of the transitive relation of power
Change in displacement D-D1 between rigid body 1 and lower part rigid body 4.
The present invention also provides a kind of devices of perception microspur variation comprising top rigid body 1,4 and of lower part rigid body
Above-mentioned microspur detecting sensor 2；
The top rigid body 1 and the lower part rigid body 4 are separately positioned on opposite the two of the microspur detecting sensor 2
Side.
By the transmitting of top rigid body 1 and lower part rigid body 4, the deformation for needing detection object is passed into microspur perception and is passed
Sensor 2 can be effectively protected microspur perception and pass simultaneously as top rigid body 1 and lower part rigid body 4 are rigid
Sensor 2.
Top rigid body 1 and lower part rigid body 4 are made of rigid material, and the elasticity of intermediate miniature change sensor internal is protected
Sheath 6 and elastic substrates layer 8 can be compressed and be drawn high, and when top rigid body 1 and rigid body 4 relative distance in lower part reduces or increasing
Added-time cannot be compressed or draw high, and mutually stagger since briquetting 5 and lower fixed block are rigid materials, therefore miniature change sensor
And elastic protective layer 6 that briquetting 5 contacts and elastic lower protective layer can be become by the flexure type of local misalignment.
When elastic protective layer 6 and elastic lower protective layer can be become by the flexure type of local misalignment, sensor layer 7 presss from both sides resilient protection
Between layer 6 and elastic substrates layer 8, type it can also become therewith, the type of sensor layer 7 becomes the variation that can generate resistance.
It can detecte the compression between top rigid body 1 and lower part rigid body 4 by the variable quantity of detection resistance or draw high
Distance change change to D1 from D.
Preferred embodiment is that the device of perception microspur variation further includes elastomer 3；
The elastomer 3 is arranged between the top rigid body 1 and the lower part rigid body 4, and the elastomer 3 is set
Set the surrounding in the microspur detecting sensor 2.
Elastomer 3 is additionally provided with around microspur detecting sensor 2, for being protected to microspur detecting sensor 2,
Meanwhile the material of elastomer 3 needs to be flexible material, and the shape of microspur detecting sensor 2 can be followed to become sending out
Raw deformation.
Preferred embodiment is, the material of the elastomer 3 be rubber, silica gel, organic silica gel, foam, acrylic glue,
Foamed plastic, foaming metal, elastic metallic structure and/or resilient plastic construction.
In the present embodiment, the material of elastomer 3 can be rubber, silica gel, organic silica gel, foam, acrylic glue, foaming
The flexible materials such as plastics, foaming metal, elastic metallic structure and/or resilient plastic construction.
But elastomer 3 is not limited solely to above-mentioned listed material, as long as flexible material, can rise
To while carrying out protective effect to microspur detecting sensor 2, additionally it is possible to follow the sensor layer 7 one of microspur detecting sensor 2
Cut that deformation occurs.
Preferred embodiment is that the device of perception microspur variation further includes briquetting 5；
The briquetting 5 is separately positioned on the opposite two sides of the microspur detecting sensor 2, and is separately positioned on the microspur
The opposite both ends of detecting sensor 2.
As shown in Figure 4 and Figure 5, in the present embodiment, briquetting 5 is two pieces, and it is opposite to be separately positioned on microspur detecting sensor 2
Two sides, and be fixedly connected respectively with top rigid body 1 and lower part rigid body 4, and be separately positioned on 2 phase of microspur detecting sensor
Pair both ends.
Such setting, when on top, rigid body 1 or lower part rigid body 4 are squeezed and apply pressure to briquetting 5, microspur
The briquetting 5 of 2 two sides of detecting sensor to close to the movement of the direction of microspur detecting sensor 2, then makes microspur detecting sensor 2
Deformation is generated, and since the opposite two sides of microspur detecting sensor 2 are arranged in briquetting 5, the deformation generated is put
Greatly, then resistance changes greatly, and then is relatively easy to the deformation for obtaining the object measured by the present apparatus.
In the present embodiment, briquetting 5 is Nian Jie with the connection type of top rigid body 1 or lower part rigid body 4, it should be pointed out that
, it is not limited solely to be bonded, can also be other connection types, such as can be riveting, can be welding,
As long as the two can be fixed together, and the using effect of microspur detecting sensor 2 is not influenced.
Preferred embodiment is that the device of perception microspur variation further includes briquetting 5；
The microspur detecting sensor 2 is arranged in close to the side of the top rigid body 1 in the briquetting 5；
The middle part of the microspur detecting sensor 2 is arranged in the briquetting 5.
As shown in Figures 2 and 3, the set-up mode of briquetting 5 can also be only one piece, briquetting 5 is fixed at micro-
The middle part of side away from detecting sensor 2, briquetting 5 is fixed at microspur detecting sensor 2 close to top in the present embodiment
The side of rigid body 1 is also possible to be positioned close to the side of lower part rigid body 4.
When on top, rigid body 1 or lower part rigid body 4 are pressurized or receive pulling force, it is able to drive on microspur detecting sensor 2
Deformation occurs the middle part of sensor layer 7, and then the signal of resistance variations is amplified, is achieved the purpose that convenient for detection.
The present invention also provides a kind of microspur detection methods, and the above-mentioned setting of microspur detecting sensor 2 is being needed check bit
It sets, detects the resistance variations of the sensor layer 7 of the microspur detecting sensor 2, become according to the resistance of the sensor layer 7
Change and calculates the spacing variation that the microspur detecting sensor 2 detects position.
Top rigid body 1 and lower part rigid body 4 are made of rigid material, and intermediate elastomer 3 and miniature change sensor can
To be compressed and be drawn high, when top rigid body 1 and 4 relative distance of lower part rigid body decrease or increase, while miniature change is sensed
Device and elastomer 3 all can be compressed and be drawn high.
The compression and stretching of miniature change sensor can generate the variation of electrical property, can be resistance variations, are also possible to electricity
Hold the variation of variation inductance or light transmittance, the optical changes such as color.
Variable quantity by detecting these physical quantitys can detecte the compression between top rigid body 1 and lower part rigid body 4
Or the distance change drawn high, and then obtain the result for the deformation for finally needing to detect.
Microspur detecting sensor 2 provided by the invention, perception microspur variation device and microspur detection method, will lead
The sensor layer 7 of electricity is arranged in and need to detect on the object of deformation, is examined by detection circuit to the parameter of sensor layer 7
It surveys, the variation of sensor layer 7 is judged by the variation of parameter, and then obtain the deformation of the object of detection position or detection, it is real
Now to the detection of micro- deformation.The device of the invention production is simple, and application method is convenient.
Finally it should be noted that：The above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent
Present invention has been described in detail with reference to the aforementioned embodiments for pipe, those skilled in the art should understand that：Its according to
So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into
Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution
The range of scheme.
Claims (7)
1. a kind of device of perception microspur variation, which is characterized in that passed including top rigid body, lower part rigid body, microspur perception
Sensor and briquetting；
The top rigid body and the lower part rigid body are separately positioned on the opposite sides of the microspur detecting sensor；
The briquetting is separately positioned on the opposite two sides of the microspur detecting sensor, and is separately positioned on the microspur perception and passes
The opposite both ends of sensor；
Or the microspur detecting sensor is arranged in close to the side of the top rigid body in the briquetting, and the briquetting is set
It sets at the middle part of the microspur detecting sensor；
The microspur detecting sensor, including elastic substrates layer, sensor layer, elastic protective layer and detection circuit；
The elastic substrates layer, the sensor layer and the elastic protective layer are cascading；
The sensor layer is flexible conductive material；
The detection circuit is connect with the sensor layer, for detecting the Parameters variation of the sensor layer.
2. the device of perception microspur variation according to claim 1, which is characterized in that the sensor layer is graphene electricity
Road floor, microplate floor, carbon nanotube circuit layer, carbon dust circuit layer, metal material layer, metal oxide film plating layer, conductive compound
Crystalline material, inorganic non-metallic crystal circuit or organic conductive material circuit.
3. the device of perception microspur variation according to claim 2, which is characterized in that the detection circuit is resistance detection
Circuit, for detecting the resistance change of the sensor layer.
4. the device of perception microspur variation according to any one of Claims 2 or 3, which is characterized in that the detection electricity
Road includes input, output end, virtual earth end and build-out resistor；
One end of the build-out resistor connects the input terminal, and the other end connects the output end；
One end of the sensor layer connects the output end, and the other end connects the virtual earth end, for passing through the output end
Voltage change detect the resistance variations of the sensor layer, and then calculate the deformation of the sensor layer.
5. the device of perception microspur variation according to claim 1, which is characterized in that further include elastomer；
The elastomer is arranged between the top rigid body and the lower part rigid body, and the elastomer is arranged described
The surrounding of microspur detecting sensor.
6. the device of perception microspur variation according to claim 5, which is characterized in that the material of the elastomer is rubber
Glue, silica gel, organic silica gel, foam, acrylic glue, foamed plastic, foaming metal, elastic metallic structure or resilient plastic construction.
7. a kind of microspur detection method, which is characterized in that needing the device setting of perception microspur variation described in claim 1
Position is detected, the resistance variations of the sensor layer of the device of the perception microspur variation are detected, according to the sensor layer
Resistance variations calculate it is described perception microspur variation device detection position spacing variation.
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| CN1313949A (en) * | 1998-07-28 | 2001-09-19 | 罗斯蒙特航空航天公司 | Flexible silicon strain gage |
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