CN106086767A - Circulation evacuation, the sprayed coating vacuum deposition techniques of pressurising recovery and device thereof - Google Patents
Circulation evacuation, the sprayed coating vacuum deposition techniques of pressurising recovery and device thereof Download PDFInfo
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- CN106086767A CN106086767A CN201610705527.3A CN201610705527A CN106086767A CN 106086767 A CN106086767 A CN 106086767A CN 201610705527 A CN201610705527 A CN 201610705527A CN 106086767 A CN106086767 A CN 106086767A
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- vacuum
- drying oven
- vacuum drying
- evacuation
- pressurising
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
- C23C4/18—After-treatment
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- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
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Abstract
The present invention relates to lance technology field, particularly relate to a kind of circulate evacuation, pressurising recover sprayed coating vacuum deposition techniques and device, it is spaced the evacuation of 200 degree, with the method being filled with noble gas, reach vacuum and recover the different conditions of pressure, meeting can heated parts and coating, recovering pressure in vacuum drying oven is 0.05Mpa, and which repeats, when arriving 1100 degree, without evacuation, after being incubated 10 minutes, evacuation, then workpiece furnace cooling, now cannot filling with inert gas again, prevent sub-cooled coating surface from causing defect.To furnace temperature be down to 200 degree time, by workpiece take out.Coating good attachment after process implementing, dense surface, without scaling loss, peel off, the defect such as cracking.
Description
Technical field
The present invention relates to lance technology field, particularly relate to a kind of circulate evacuation, pressurising recover sprayed coating vacuum melt
Apply technique and device thereof.
Background technology
Powder metallurgy used by face coat is mostly Co, Ni and Fe powder, and technique prepared by coating is the most varied, as
Plating, the burning of plasma spraying (Plasma Spray), physical vapor deposition (PVC), chemical gaseous phase deposition (CVD), high speed oxygen
The techniques such as method (HOVF)；Its application is the most extremely wide, almost includes all of high-technology field and neck industrial, civilian
Territory, such as: space flight, aviation, navigation, computer electronics, information, traffic, oil, chemical industry, building, water conservancy, machinery etc..There is statistical table
Bright, the industry directly related with sufacing has accounted for the 7% of total value of production in national economy.But use the coating material that these technique prepares
The cost that material has is high, and some thinner thicknesses, being combined with matrix of having is the most firm.
Such as conventional oxyacetylene torch cladding, although with low cost, but coating is coarse, and oxidation is serious and qualification rate is low.
Oxyacetylene torch cladding production efficiency is low, and labor intensity is big, requires higher to craftsmanship, it is impossible to formulate accurate technique side
Method, entirely with workman personal experience and fortune, is unfavorable for carrying out of large-scale production.But vacuum cladding can make up to a certain extent
Above deficiency, because its economy and extensive use are expected to expand further the application of alloy coat.Simultaneously to face coat
Technology is significant.
Summary of the invention
The technical problem to be solved in the present invention is: in order to solve decarburization during vacuum deposition, fine vacuum in prior art
The technical problems such as lower part alloy volatilizees from coating surface, causes surface alloy element poor, and coating easily ftractures, come off, this
The technique that invention provides a kind of sprayed coating vacuum deposition circulating evacuation, pressurising recovery.
The technical solution adopted for the present invention to solve the technical problems is: a kind of circulate evacuation, pressurising recover spraying
The technique of layer vacuum deposition, comprises the steps:
1) isothermal holding is carried out by preparing in the workpiece sprayed is firstly placed on the vacuum drying oven sealed so that workpiece reaches room
Temperature；Purpose is to allow workpiece reach steady statue, it is to avoid be directly placed into the supercool defect that cracks or come off etc. in vacuum drying oven；
2) before heating, first to carrying out evacuation in vacuum drying oven, when reaching working vacuum degree ＜ 40Pa in vacuum drying oven, stop
Evacuation；
3) in space, noble gas then it is passed through so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20% (outside part
Surface area is more than 0.02 square metre, air pressure capping, and surface deposited metal material is higher than 950 degree, and air pressure removes the limit)；Utilize indifferent gas
Body is as flow media heated parts, because of heat convection, and radiation heat transfer, the uniformity of piece surface temperature has had guarantor
Card.
4) start heater to heat in vacuum drying oven, when temperature arrives 200 DEG C, stop heating, again to very
Evacuation is carried out so that the vacuum in vacuum drying oven arrives working vacuum degree ＜ 40Pa in empty stove；
6) after insulation, then it is passed through noble gas so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20%；
7) start heater to heat in vacuum drying oven, when temperature promotes 200 DEG C again, stop heating, the most right
Evacuation is carried out so that the vacuum in vacuum drying oven arrives working vacuum degree ＜ 40Pa in vacuum drying oven；
8) after insulation, then it is passed through noble gas so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20%；Above-mentioned technique
During, it is passed through noble gas, desirably prevents alloying element under high-temperature situation more in vacuum evaporation, cause surface alloy unit
Element is poor.Vacuum too high generation coating decarburization phenomenon in conventional vacuum stove heating process simultaneously, is passed through noble gas and recovers pressure
Power, reduces coating decarburization；
9) step 7 is repeated) and 8), until the temperature in vacuum drying oven reaches 1100 DEG C ± 5 DEG C；Without evacuation, terminating
The sintering temperature inversion point of nearly coating about 1100 degree, different for this temperature transition point of different coating materials, need to make sample
Part is tested；
10) after insulation, evacuation (according to different products, and coating material, temperature retention time is different, and insulation length is root
According to sample test, namely produce minute surface when the coating surface of heated exemplar, soon confirm during flowing.Taking out here
Vacuum is in order to technique follow-up after considering so far is without evacuation again, now in melting process, produces phase transformation and is wrapped up in
The last residual gas overlayed in coating is precipitated)；
11) cooling, when the temp. in vacuum furnace is down to 200 DEG C, takes out workpiece.
Described step 6), step 8) and step 10) in temperature retention time be 10 minutes.Step 6) and 8) in insulation be in order to
The thermograde in workpiece is allowed to reduce so that workpiece reaches uniform temperature, for the product that size is big, stabilization time in principle
President, for major part product, enough, temperature retention time can determine 10 minutes temperature retention times with the exemplar testing time, special
Be not for coating surface at temperature homogeneity, basically reached requirement.
The device of a kind of sprayed coating vacuum deposition techniques for circulating evacuation, pressurising recovery, including vacuum drying oven, vacuum
Being communicated with noble gas tank and vacuum pump on stove, the inner ring of vacuum drying oven is provided with heating element heater uniformly, the middle part in vacuum drying oven
It is provided with work support.
For the ease of accurately understanding variations in temperature, the outside of described vacuum drying oven is additionally provided with the temperature for detecting in-furnace temperature
Degree table.
For the ease of accurate decompression force change, the pipeline between described noble gas tank and vacuum drying oven is also equipped with pressure
Power table.
The invention has the beneficial effects as follows, the present invention circulation evacuation, pressurising recover sprayed coating vacuum deposition techniques and
Its device, is spaced the evacuation of 200 degree, and the method being filled with noble gas, reaches vacuum and recovers the different conditions of pressure, work
Skill implement after coating good attachment, dense surface, without scaling loss, peel off, the defect such as cracking.
Accompanying drawing explanation
The present invention is further described with embodiment below in conjunction with the accompanying drawings.
Fig. 1 is that the present invention implements for the device optimum circulating the sprayed coating vacuum deposition techniques of evacuation, pressurising recovery
The structural representation of example.
In figure: 1, noble gas tank, 2, coating, 3, vacuum drying oven, 4, heating element heater, 5, vacuum pump, 6, workpiece, 7, workpiece props up
Frame, 8, Pressure gauge, 9, thermometer.
Detailed description of the invention
In conjunction with the accompanying drawings, the present invention is further detailed explanation.These accompanying drawings are the schematic diagram of simplification, only with
The basic structure of the illustration explanation present invention, therefore it only shows the composition relevant with the present invention.
As it is shown in figure 1, be optimum embodiment of the present invention, one is used for circulating evacuation, the sprayed coating vacuum that pressurising recovers
The device of deposition techniques, is connected with vacuum drying oven 3 including noble gas tank 1, and is observed the furnace pressure of vacuum drying oven 3 by Pressure gauge 8,
Being provided with heating element heater 4 in vacuum drying oven 3 for heating, vacuum stove 3, vacuum drying oven 3 is connected on vacuum pump 5 and is opened by vacuum pump 5
Starting shipment row, reach the purpose of evacuation, the pressure of vacuum pump 5 is observed by Pressure gauge 8, and vacuum drying oven 3 connects thermometer
9, thermometer 9 can be observed temperature in vacuum drying oven 3 at any time, in vacuum drying oven 3, be provided with work support 7, work support 7 is installed
Workpiece 6, adhering coating 2 on workpiece 6.
The circulation evacuation of the present embodiment, the sprayed coating vacuum deposition techniques that pressurising recovers, implement as follows, very
Being provided with work support 7 in empty stove 3, work support 7 is installed workpiece 6, workpiece 6 must be incubated to indoor temperature, and workpiece 6 adheres to
Coating 2, before beginning to warm up element 4 heating, first passes through vacuum pump 5 and opens operation evacuation, when arriving maximum vacuum, stop
Only, vacuum pressure is observed by Pressure gauge 8, then opens noble gas tank 1 and is passed through noble gas, reaches 0.05Mpa, then
Starting heating element heater 4 to heat, utilize noble gas as flow media heated parts, because of heat convection, and radiation is changed
Heat, the uniformity of piece surface temperature has had guarantee；In thermometer 9 shows stove, when temperature improves 200 degree, then evacuation
Once, it is incubated 10 minutes in the case of temperature stabilization；It is subsequently placed into noble gas, reaches 0.05Mpa, then start heating element heater
4 heating, temperature promotes 200 degree again.In above-mentioned technical process, it is passed through noble gas, desirably prevents alloy unit under high-temperature situation
Element is more in vacuum evaporation, causes the phenomenon that surface alloy element is poor.In conventional vacuum stove heating process, vacuum is spent simultaneously
High coating 2 is easily generated decarburization phenomenon, is passed through noble gas and recovers pressure, reduces coating 2 decarburization；Along with said process repeat into
OK, finally close to the sintering temperature inversion point of coating about 1100 degree, now set final temperature as 1100 degree, it is not necessary to take out true
Sky, after being incubated 10 minutes, evacuation, then workpiece 6 furnace cooling, now cannot filling with inert gas again, prevent sub-cooled
Coating surface causes defect.To furnace temperature be down to 200 degree time, by workpiece take out.
With the above-mentioned desirable embodiment according to the present invention for enlightenment, by above-mentioned description, relevant staff is complete
Entirely can carry out various change and amendment in the range of without departing from this invention technological thought.The technology of this invention
The content that property scope is not limited in description, it is necessary to determine its technical scope according to right.
Claims (5)
1. one kind circulates evacuation, the sprayed coating vacuum deposition techniques of pressurising recovery, it is characterised in that: comprise the steps:
1) isothermal holding is carried out by preparing in the workpiece sprayed is firstly placed on the vacuum drying oven sealed so that workpiece reaches room temperature；
2) before heating, first to carrying out evacuation in vacuum drying oven, when reaching working vacuum degree ＜ 40Pa in vacuum drying oven, stop taking out very
Empty；
3) in space, noble gas then it is passed through so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20%；
4) start heater to heat in vacuum drying oven, when temperature arrives 200 DEG C, stop heating, again to vacuum drying oven
Inside carry out evacuation so that the vacuum in vacuum drying oven arrives working vacuum degree ＜ 40Pa；
6) after insulation, then it is passed through noble gas so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20%；
7) start heater to heat in vacuum drying oven, when temperature promotes 200 DEG C again, stop heating, again to vacuum
Evacuation is carried out so that the vacuum in vacuum drying oven arrives working vacuum degree ＜ 40Pa in stove；
8) after insulation, then it is passed through noble gas so that the air pressure in vacuum drying oven reaches 0.05Mpa ± 20%；
9) step 7 is repeated) and 8), until the temperature in vacuum drying oven reaches 1100 DEG C ± 5 DEG C；
10) after insulation, evacuation；
11) cooling, when the temp. in vacuum furnace is down to 200 DEG C, takes out workpiece.
Circulate evacuation, the sprayed coating vacuum deposition techniques of pressurising recovery the most as claimed in claim 1, it is characterised in that: institute
State step 6), step 8) and step 10) in temperature retention time be 10 minutes.
3. the device being used for circulating the sprayed coating vacuum deposition techniques of evacuation, pressurising recovery, it is characterised in that: include true
Empty stove (3), vacuum drying oven (3) is communicated with noble gas tank (1) and vacuum pump (5), and the inner ring of vacuum drying oven (3) is provided with uniformly
Heating element heater (4), the middle part in vacuum drying oven (3) is provided with work support (7).
4. the device of the sprayed coating vacuum deposition techniques for circulating evacuation, pressurising recovery as claimed in claim 3, it is special
Levy and be: the outside of described vacuum drying oven (3) is additionally provided with the thermometer (9) for detecting in-furnace temperature.
5. the device of the sprayed coating vacuum deposition techniques for circulating evacuation, pressurising recovery as claimed in claim 3, it is special
Levy and be: on the pipeline between described noble gas tank (1) and vacuum drying oven (3), be also equipped with Pressure gauge (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610705527.3A CN106086767B (en) | 2016-08-23 | 2016-08-23 | The sprayed coating vacuum deposition techniques that circulation vacuumizes, pressurising recovers |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610705527.3A CN106086767B (en) | 2016-08-23 | 2016-08-23 | The sprayed coating vacuum deposition techniques that circulation vacuumizes, pressurising recovers |
Publications (2)
| Publication Number | Publication Date |
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| CN106086767A true CN106086767A (en) | 2016-11-09 |
| CN106086767B CN106086767B (en) | 2018-05-08 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610705527.3A Active CN106086767B (en) | 2016-08-23 | 2016-08-23 | The sprayed coating vacuum deposition techniques that circulation vacuumizes, pressurising recovers |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111627797A (en) * | 2020-06-08 | 2020-09-04 | 中国电子科技集团公司第二十四研究所 | Processing method for improving bonding reliability of semiconductor chip |
| CN116603708A (en) * | 2023-04-25 | 2023-08-18 | 东华隆（广州）表面改质技术有限公司 | Coating production method of connecting bolt for deep sea drilling equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85103589A (en) * | 1985-05-20 | 1986-02-10 | 汪行恺 | The common heating furnace remelting processing of sprayed metal coating |
| CN102212652A (en) * | 2011-05-17 | 2011-10-12 | 武汉钢铁(集团)公司 | Rapid degassing method of vacuum induction furnace |
| CN104296524A (en) * | 2013-07-16 | 2015-01-21 | 东阳市和顺磁业有限公司 | A high vacuum sintering furnace |
-
2016
- 2016-08-23 CN CN201610705527.3A patent/CN106086767B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN85103589A (en) * | 1985-05-20 | 1986-02-10 | 汪行恺 | The common heating furnace remelting processing of sprayed metal coating |
| CN102212652A (en) * | 2011-05-17 | 2011-10-12 | 武汉钢铁(集团)公司 | Rapid degassing method of vacuum induction furnace |
| CN104296524A (en) * | 2013-07-16 | 2015-01-21 | 东阳市和顺磁业有限公司 | A high vacuum sintering furnace |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111627797A (en) * | 2020-06-08 | 2020-09-04 | 中国电子科技集团公司第二十四研究所 | Processing method for improving bonding reliability of semiconductor chip |
| CN116603708A (en) * | 2023-04-25 | 2023-08-18 | 东华隆（广州）表面改质技术有限公司 | Coating production method of connecting bolt for deep sea drilling equipment |
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| Publication number | Publication date |
|---|---|
| CN106086767B (en) | 2018-05-08 |
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