CN106062600A - Various novel multi-wavelength multiplexers, and novel multi-wavelength light sources using multiplexers - Google Patents
Various novel multi-wavelength multiplexers, and novel multi-wavelength light sources using multiplexers Download PDFInfo
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- CN106062600A CN106062600A CN201580006643.XA CN201580006643A CN106062600A CN 106062600 A CN106062600 A CN 106062600A CN 201580006643 A CN201580006643 A CN 201580006643A CN 106062600 A CN106062600 A CN 106062600A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/04—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings formed by bundles of fibres
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/125—Bends, branchings or intersections
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
Abstract
The present invention pertains to:a small multiplexer with which it is possible to achieve higher environmental resistance and higher light efficiency as well as low-cost mass production when used in a laser projector for a mobile telephone and in-vehicle use, wherein the multiplexer multiplexes light beams of a plurality of red, green, blue, or near-infrared wavelengths; and a light source using the multiplexer. The present invention makes it possible to produce at low cost the following: multiplexers which have a hollow light guide of claim 1 or a bundle fiber having a thin cladding diameter of 10 mum or less of claim 4, which are not affected by beam vertical and horizontal modes of wavelength and wavelength bandwidth, and with which it is possible to solve the aforementioned problems of improving environmental resistance, light efficiency, productivity, and the like; and multi-wavelength small laser light sources which, with the combined use of the multiplexer and a surface mount chip-type LD, can be realized on a practical level as a fiber output type of claim 3, a thin chip type for LD surface mounting of claim 5, and an outer cylindrical or square type for LD three-dimensional mounting of claim 6.
Description
Technical field
The present invention relates to a kind of three primary colors RGB (R=Red, G=Green, B=Blue wavelength) light source technology, it is used for scheming
As processing means, endoscope and Ophthalmoligic instrument etc. utilize medical diagnosis that light carries out and treatment, optic communication and based on MEMS or
The sweep type of DMD or projection type scialyscope based on LCOS.
Background technology
In existing optic communication, wave multiplexer based on optical fibre wavelength-division multiplex is used mostly array waveguide grating (AWG=
Array Wave-Guide Grating) (patent documentation 1).Recently in order to scialyscope formula miniature laser display is used for mobile phone
With vehicle-mounted purposes, also occur in that the waveguide type RGB tri-wavelength wave multiplexer (patent documentation 2) of miniaturization.In addition with low cost and
The optical fiber that coupling efficiency is high exports, the RGB wave multiplexer (patent documentation 3) of Filter Type.
Prior art literature
Patent documentation 1: Japanese Patent Laid-Open 2005-234245 publication
Patent documentation 2: Japanese Patent Laid-Open 2013-195603 publication
Patent documentation 3: Japanese Patent Laid-Open 2013-228651
Summary of the invention
Invent technical problem to be solved
According to above-mentioned prior art, although can make various multi-wavelength wave multiplexer, but the application beyond optic communication
Aspect, such as in the equipment such as porjection type scialyscope using laser and device, as used these existing wave multiplexers, from general
For evaluation criteria, such as at loss, wave band and light beam transverse mode and the aspect such as productivity and cost of light, it uses condition
Several as follows are had with limitation.
In prior art, comprise the coupling efficiency from light source to wave multiplexer and damage with the conjunction wave optical system within wave multiplexer
Optical transmission loss etc. within consumption and wave multiplexer, the loss of light can not be ignored, and this optical loss also can be along with closing ripple
The radical of wavelength and the increase of quantity of light source and become big.
And, no matter light source is LD or LED to the conjunction wave technology in past, and no matter the element of wave multiplexer side is optical fiber
Or waveguide, is all largely dependent on the incident and transverse mode of outgoing beam.
Additionally, in wave multiplexer in the past, be according to wanting the wavelength difference closing each light of ripple to carry out closing ripple, and use based on ripple
Long transmission or reflection mode filter or diffraction element, due to the wavelength dependency of these opticses, thus the spy of wave multiplexer
Property can depend on wavelength and the bandwidth of wavelength of multiple light of ripple to be closed.And when using waveguide type and optical-fiber type wave multiplexer, by light
Being enclosed in waveguide or optical fiber is to be carried out by the refractivity of inner core Yu covering material, thus with the horizontal stroke of the light closed
Mould also has relation.Due to their wavelength dependency, the trichromatic bluish-green red wavelength shown for porjection type TV is executed
Add the light source within the 1600nm of more than 200nm and sensor, make the bandwidth of the light sources such as LD extend to 1200nm, then pass by
Optical fiber or guide technology will cannot tackle completely.It is to say, most existing wave multiplexer be respectively provided with wavelength dependency and
Light beam transverse mode dependency.
In sum, wave multiplexer optical loss and for the transverse mode of light beam and wavelength and wavelength bandwidth restriction and
The existing problem such as dependency, is technical problem underlying to be solved by this invention.
In porjection type TV, the most vehicle-mounted purposes and handset use, there is a large amount of Production requirement, it is necessary to such as quasiconductor
Productivity that the technology of technique is brought and product reliability, low cost and high-performance and as the most chip-shaped minimal typeization is produced
Product, thus, the manufacture method of the wave multiplexer that can meet requirements above is also the technical problem to be solved.
Solve the technical scheme that technical problem is used
One of technical problem underlying to be solved by this invention, be the closed ripple of existing wave multiplexer light wavelength dependency and
The transverse mode dependency of the light beam of closed ripple.First, as the method solving these problems, the medium being transmitted light can use
Without wavelength dependent hollow type photoconduction in wave multiplexer as according to claim 1 of the present invention.Further, as solving these problems
Another kind of method, by being incidentally hardly dependent on the reflection such as the metal of wavelength at the internal face of photoconduction described in claim 1
Thin film, thus light beam is enclosed in photoconduction, and unrelated with lambda1-wavelength.Additionally, the light beam transmitted in photoconduction is either
What kind of transverse mode, say, that either what kind of beam diameter, have what kind of beam divergence angle, all can be by incidentally in light guide side
The reflection of the thin film in face and be enclosed in photoconduction, wave multiplexer can also be solved thereby through above-mentioned various methods and light beam transverse mode is depended on
Lai Xing.
It addition, in the wave multiplexer of claim 4, as the method solving above-mentioned every problem, employ pencil optical fiber,
Wavelength characteristic according to each incident light source and light beam transverse mode characteristic, be taken separated from wanting each optical fiber bare wire of harness one by one
Kind, thus it is no longer influenced by the impact of every limiting factor such as the wavelength of the light source of ripple to be closed and the transverse mode of bandwidth and light beam.
Thus, want with the composition of the pencil optical fiber described in all hollow type photoconductions as claimed in claim 2 and claim 4
Element both can operate with the LD of single transverse mode as the wave multiplexer that technical scheme is made, it is possible to applies to the LED containing pole higher mode
Deng area source, and either for from ultraviolet near infrared wavelength, or for wavelength bandwidth all almost without dependency.
Additionally, the problem of the comprehensive light efficiency about wave multiplexer, specifically, couple including to incident beam in wave multiplexer
The lifting of efficiency, the conjunction ripple of optical system that will be used when inciding many light beam coupling within wave multiplexer by a light beam
What the lifting of efficiency and the loss of wave multiplexer interior lights and exit end were lost overcomes.Conjunction ripple described in claim 1
In device, as the method promoting light efficiency, have employed the photoconduction of hollow.Firstly, because be hollow, so there is not the suction of light
Receive, and owing to being accompanied with the thin film with high reflectance at the inwall of hollow light guide, thus light preferably can be closed, transmission
Loss is few.And also the shape of photoconduction incidence end can be designed according to the characteristic of incident beam, thus promote incident illumination
Coupling efficiency.Additionally, in pencil optical fiber wave multiplexer described in claim 4, because being the wavelength according to each incident light source
Optical fiber is individually selected with beam characteristics, can be with the optimal coupling process of each incident illumination thereby through this method
Obtain maximum coupling efficiency.Additionally, because the light that would be coupled to each optical fiber is joined directly to exit end and exports, so removing
Outside loss when incidence end incident illumination couples, wave multiplexer main body is almost without loss.
It addition, for carrying out mass-produced problem with high reliability, miniaturization and low cost, first, the present invention weighs
Profit requires the manufacture method of the hollow type photoconduction of the wave multiplexer of the claim 1 described in 2, i.e. by the ditch by subsidiary reflective film
The cover plate laminating of groove place substrate and subsidiary reflective film thus make the method for wave multiplexer and can solve the problem that this problem.Namely
Say, the substrate described in claim 2, if using the general material such as silicon and glass, by using the etching of semiconductor technology
Device or laser beam straight forming device, it is easy to just can produce the photoconduction groove described in claim 2 accurately.This
Outward, by plating or PVD (Physical Vapor Deposition: physical vapour deposition (PVD)) and CVD (Chemical Vapor
Deposition: chemical gaseous phase deposits) etc. the evaporation coating method photoconduction groove that can be carved on substrate described in claim 2
Two sides and bottom surface carry out the coating of metal or thin dielectric film.Above-mentioned manufacture method as the manufacture of semiconductor device,
Can produce in a large number with low cost.Also it is can be with low cost by the wave multiplexer described in pencil optical fiber fabrication claim 4
Carry out mass-produced method.It addition, the multi wave length illuminating source according to any one of the claims in the present invention 5 and 6, it is possible to by above-mentioned
Low cost described in claim 1 and 4 and reliability is high, can the wave multiplexer of volume production as parts, from original multiple N number of light
In source independent, be prepared in advance, because of regardless of whether management or production in terms of, all can be with low cost and high reliability
Produce in a large number.
Invention effect
In claim 1 use without the dependent hollow light guide of wavelength, it is thus possible to from ultraviolet to visible and near-infrared
The very wide range band alleviating distention in middle-JIAO of more than 1000nm carry out the conjunction ripple of multi-wavelength light.Wave multiplexer described in claim 4 is because using
Pencil optical fiber, thus in ultraviolet near infrared bandwidth on a large scale, as long as in the transmission bands of optical fiber bare wire glass all
Applicable.It is to say, two kinds of wave multiplexers described in the claims in the present invention 1 and 4 are hardly dependent on wavelength and wavelength bandwidth,
There is in terms of wavelength characteristic the effect of excellence.
It addition, the hollow type photoconduction described in claim 1 is by attaching in each side relative to optical transmission direction
Reflective film, it is possible to almost light is independently closed by the angle of divergence with institute input beam, therefore from the LD of single transverse mode to area source
The LED of the many transverse modes of high order, be hardly dependent on light beam transverse mode, it is possible to carry out each wavelength and each transverse mode according to respective application
The conjunction ripple of light source.Additionally, the pencil optical fiber described in claim 4 also is able to the characteristic choosing of each transverse mode according to incident light source light beam
Select the kind of each optical fiber bare wire.It is to say, two kinds of wave multiplexers described in the claims in the present invention 1 and 4 are at incident light source light beam
Transverse mode aspect have excellence the suitability.
From the point of view of essential structure, the either photoconduction described in claim 1 or the pencil optical fiber described in claim 4,
For the light source of each conjunction ripple, incident illumination is all to be joined directly to exit end from light end face to carry out outgoing, and not by other
Parts, so almost without any loss, the efficiency of wave multiplexer main body is close to 100%.When especially light source is single transverse mode LD, from
Light shines the comprehensive light efficiency till wave multiplexer output, can reach 70% when using the wave multiplexer described in claim 1, uses
More than 90% is can reach, the lifting effect highly significant of efficiency during wave multiplexer described in claim 4.Additionally, above two is closed
Ripple device is because being that compact makes, and the transmission route of wave multiplexer interior lights as it has been described above, between incidence end and exit end directly
Link and distance is the shortest, thus the spatial coherence of light beam can also be kept in transmitting procedure to greatest extent.
Additionally, two kinds of wave multiplexers described in claim 1 and 4 install LD light source system as by the multi-surface of above-mentioned multi-wavelength
The indispensable critical component of multi wave length illuminating source made, because being compact slim chip-shaped, so also having improving product
The effect of dependable with function.
Due to quasiconductor systems such as the evaporations of etching and reflectance coating that employs hollow light guide groove as claimed in claim 2
Make method, so the wave multiplexer described in claim 1 can carry out volume production with low cost.Further, use described in claim 4
The chip-shaped wave multiplexer of pencil optical fiber is compared with existing waveguide type or Filter Type wave multiplexer, it is possible to cost is greatly reduced.Make
For the critical component of multi wave length illuminating source, the claims in the present invention 1 and two kinds of wave multiplexers described in 4 production with become present aspect also
There is significant effect.
Further, according to claim 3, moreover it is possible to realized the multi-wavelength of optical fiber output by compact slim chip-shaped wave multiplexer
Light source.About spectacle and vehicle-mounted look squarely display type scialyscope, owing to this light source is to be transmitted light by optical fiber, so
Can be separately positioned between light source and display display device.Such as, in the scialyscope of spectacle, light source and driving power supply are put
In pocket, light is attached by optical fiber, and glasses are only placed projection machine optical system, therefore, it is possible to realize lighting and little
Type.Vehicle-mounted when using, as looking squarely the placement location of display type scialyscope, owing in car, temperature Change is big, thus device
Operation condition need to meet subzero 30 DEG C～90 DEG C of these temperature ranges above freezing, and within the scope of the biggest temperature, action is to LD light source
For the most difficult, and by use optical fiber wave multiplexer, RGB tri-wavelength LD and driver are placed on other and easily carry out temperature
The place of management, and by optical fiber looking squarely that light is transmitted, display type scialyscope is only placed optical system, can tolerate pole
Cold or very hot environment.If the wave multiplexer in the present invention to be used for above-mentioned each application, then it can be the making of various device
Bringing great convenience property.Further, by the surface installation LD chip described in claim 6 being carried out three-dimensional installation and right
Thermal diffusivity improves, and forms Φ 3mm～the cube rod of the cylinder of Φ about 6mm or 3mm～5mm, as can
Dress the multiple wavelength laser light source of (Wearable) formula electronic equipment, both possessed installation, moreover it is possible to realize miniaturization.
Accompanying drawing explanation
Fig. 1 is that the use N root of the claim 1 that method makes according to claim 2 is incident with 1 outgoing hollow type
The concept map of the wave multiplexer structure of photoconduction.Upper strata is the cover plate that lower surface is accompanied with light reflective film, and lower floor is to be carved with N+1 root light
Lead and be covered with optical reflection film with the substrate of groove, each side of described groove and bottom surface.By the laminating of the two, form N root incident
And 1 outgoing, i.e. N+1 root photoconduction.By subsidiary in cover plate lower surface and each side of N+1 root photoconduction groove with bottom surface institute
The light total reflection thin film of coating, thus it was input to the light beam of each wavelength in incident photoconduction before the outfan to outgoing photoconduction
It is closed.
Fig. 2 is to be denoted as embodiment 1, the wave multiplexer made according to the ditch groove on substrate shown in claim 2
The accompanying drawing forming pattern of the cross-sectional configuration of photoconduction, i.e. incidence on substrate and outgoing photoconduction.In order to clearly show respectively in Fig. 2
Photoconduction groove and the structure of coupling part, amplify image, but draw not in scale.In single transverse mode LD, by this base
Each incidence of the wave multiplexer that plate is made and outgoing photoconduction and overall dimensions thereof, will be carried out in the embodiment 1 below in detail
Narration.
Fig. 3 is 3 light beam inputs of the pencil optical fiber using the multiple N=3 described in claim 4 in embodiment 2,1 light beam
The spatial wave multiplexer of 3 couple 1 light beam of output.
Fig. 4 is in 3 coverings of institute's harness in the internal diameter Φ 25 μm hole of the ferrule central appended by Fig. 3 wave multiplexer outfan
The microphotograph of the outgoing end face of the optical fiber of a diameter of Φ 10 μ.
Fig. 5 is slim chip-shaped RGB LASER Light Source compact in embodiment 2, and the wave multiplexer in figure uses shown in Fig. 33
To 1, the light source of wave multiplexer light incident side is the RGB tri-wavelength list transverse mode surface installing type LD of 638nm, 520nm and 450nm.
Fig. 6 is an example as embodiment 3, to the solid shown in the structure in the rgb light source of cylindrical shape
CAD design figure.Three surface installing type LD carry out in the way of the center of circle is symmetrical three-dimensional installation by figure, and employs right and want
Ask the pencil optical-fiber type 3 described in 4 to 1 wave multiplexer.
Fig. 7 is another example of embodiment 3, illustrates the structure of the multi wave length illuminating source that LD carries out three-dimensional installation
Three Dimensional CAD Design figure.Right part in figure be profile be four wavelength light sources of RGB and NIR of square rod shape, four surfaces peace
Dress type LD is arranged on the face of cube surrounding in centrosymmetric mode, 4 to 1 wave multiplexer use claim 4 institute
The pencil optical-fiber type wave multiplexer stated.Additionally, the square rod shape light source on right side in figure (is assembled into by the parts of in figure 711～732
Light source) put into heat radiation and the cylindrical metal container (in figure 740) of protective effect being positioned in figure left side, additionally it is possible to will outward
Shape makes cylinder into.
Fig. 8 is embodiment 3 and the profile photo of embodiment 4 preproduction.The photo 801 in left side is the circle described in embodiment 3
Cylindricality RGB tri-wavelength LD light source, the photo 802 on right side is as embodiment 4, in the photoconduction described in claim 3, uses
The RGB three-wavelength source of optical fiber output type wave multiplexer.
Detailed description of the invention
Embodiment 1
Fig. 1 schematically show and use claim 1 institute being made according to the method described in the claims in the present invention 2
The structure of the wave multiplexer of the hollow type photoconduction stated.Incidence shown in figure and outgoing photoconduction and the detail shape of coupling part and size
Different because of the transverse mode of incident light source and the difference of the transverse mode of associated exiting side light beam.Additionally, in order to by each
The essential part of structure clearly shows, in Fig. 1, the size of photoconduction does not show in proportion with substrate size, but has done arbitrary
Amplify display.
First, by single transverse mode LD of wavelength RGB (=RGB) with 3 three wavelength wave multiplexers to 1, by right of the present invention
The forming method requiring the hollow type photoconduction described in 2 is shown in Fig. 2.According to the ditch groove on substrate described in claim 2
The method making photoconduction, the input side on the substrate of Fig. 23 and outlet side 1 totally 4 grooves form these hollow type photoconductions
The hollow space of optical transmission medium.It is to say, the shape of each groove is the shape of actual photoconduction self on substrate shown in Fig. 2,
Also it is the formation pattern of wave multiplexer photoconduction.Light source in this example is RGB mono-transverse mode LD, therefore the cross section, i.e. of each photoconduction of wave multiplexer
On substrate, the cross sectional shape of groove is the superfine square of a few micrometers (μm) left and right designed according to practical rank.For clearly
Showing the detail shape of these photoconductions, in Fig. 2, the size of groove does not show in proportion with substrate size, but has done and arbitrarily put
Big display.
Light source in the present embodiment 1 is red 660nm, green 520nm, blue 450nm these three wavelength, is high brightness
Single transverse mode LD.Typical beam characteristics is, dissipates the fast axle of full-shape FAHM (Full Angle at Half Maximum)=25 °
Upper luminous point (emitter) width of FA (Fast Axis) is about 1.5 μm, the upper luminescence of the slow axis SA (Slow Axis) of FAHM=10 °
Point width is about 5 μm, and beam quality factor M^2 is about 1.2.
According to the claims in the present invention 1, N=3 in this example, the radical of photoconduction is incident illumination N=3 root, emergent light 1, closes
Meter totally 4, and the 1 of emergent light is converged with 1 of 3 a length of redness of incident illumination medium wave, thus Fig. 2 seems only RGB tri-
3 photoconductions of wavelength.
First, between LD and photoconduction, do not use lens, and when light is carried out direct-coupling, with the photoconduction of display in Fig. 2
The perpendicular cross sectional shape of optical transmission direction be, 3 be laterally (width of groove in=Fig. 2) 6.5 ± 0.5 μ
M, is longitudinally (depth direction of=groove) 3.5 ± 0.5 μm, has made preproduction with this numerical value.Now use RGB trichroism common
3 single transverse mode LD, are investigated the light efficiency of this wave multiplexer.First FA and SA of LD is individually positioned in this example wave multiplexer
Vertical and horizontal direction, then by the longitudinal direction of the luminous point of each LD with each photoconduction sensitive surface being positioned at this example wave multiplexer input side
Align with the center of horizontal both direction, in the direction of the optical axis with above-mentioned sensitive surface distance about 5 μm aligned in position also
Aligning, then original compared to LD output, can be with redness 75%, green 71%, indigo plant from the outlet of this example wave multiplexer outlet side
The ratio of color 68%, it is thus achieved that the overall efficiency of light.The outgoing beam that wave multiplexer sends, its about M^2=1.6, this numeric ratio M^2
Desired value 2.1 good a lot.The reason that can obtain this result is, the wave multiplexer in this example is small-sized wave multiplexer, from inciding
Outgoing, the optical path length of photoconduction is only number about mm, and light beam is not yet completely diffusing to intended high-order transverse mode.
Further, the multiplying power that uses FA direction to be 1 to 2.5 between LD and photoconduction, SA direction are the cylinder of multiplying power of 1 to 1
Shape lens, when being the coupling of generally square backward wave multiplexer by beam shaping, at wave multiplexer light incident side, the cross section of each photoconduction of RGB
Shape also according to the shape of incident beam, is adjusted to the square being laterally and longitudinally 5 μm.Use the rgb light of this wave multiplexer
Source is output as single transverse mode beam of M^2=1.3, achieves the comprehensive light efficiency of about 90%.
Technique employed in the present embodiment 1 is, is about the upper surface coating of the silicon wafer substrate of below 1mm at thickness
Photoresist, by the method for dry ecthing, makes cross sectional shape groove as above, then in side and the bottom surface of groove
Gold evaporation thin film.Fig. 2 and actual size are the most disproportionate, the wave multiplexer in this example, transversely arranged 3 photoconductions of light incident side that
Leaving the interval of 1.5mm between this, length direction is 5mm, forms the chip shape about wide W5mm × long L5mm × thickness t1.5mm.
Further, this wave multiplexer is matched with surface installing type RGB tri-wavelength LD and installs, manufactured experimently light source.This light source is RGB tri-
Primary colors list transverse mode exports, and during direct-coupling, profile is W5mm × L8mm × t2.5mm, and when using Lens Coupling, its profile is W5mm
× L12mm × t2.8mm, both are compact die type.
Embodiment 2
Use pencil optical fiber described in the claims in the present invention 4 chip-shaped, be applicable to the RGB tri-wavelength list of multiple N=3
The wave multiplexer of transverse mode LD, as embodiment 2 at the CAD of Fig. 3 shown in the drawings of its essential structure.Additionally, the mark of the present embodiment 2
Thing be the chip-shaped light source of the RGB three primary colors LD described in the claims in the present invention 5 using this wave multiplexer, this light source basic
Structure is as shown in Figure 5.
If in above-mentioned wave multiplexer, the bare wire optical fiber of harness is single transverse mode, i.e. NA=0.12～0.13, inner core diameter Φ=3.5
～4.0 μm, then can match with the transverse mode of primary source LD, would not be beaten from the spatial coherence of the light beam of wave multiplexer output
Disorderly.But, single transverse mode optical fiber of commercial type, because its cladding diameter is Φ 125 μm, so being not particularly suited for the present embodiment 2.
Preferably optical fiber bare wire be inner core diameter be Φ 4 μm, cladding diameter be about Φ 6～8 μm, but the present invention when application be according to
Practical rank use NA=0.2, inner core diameter be Φ 7 μm, cladding diameter be the existing production of the optical fiber bare wire of Φ 10 μm
Wave multiplexer.Cladding diameter is that single transverse mode bare wire optical fiber of below 10 μm is the most under development, and it uses the inorganic glass of low melting point
Glass or plastic material.
It is 3 of outlet side institute harness of the RGB tri-wavelength list transverse mode wave multiplexer of the embodiment 2 constituted in Fig. 3 shown in Fig. 4
The microphotograph of the outgoing end face of optical fiber.In equilateral triangle Dare, tower-like 3 optical fiber being closely bundled together is adjacent
Distance between inner core is about 10 μm.As the manufacture method shown in Fig. 4 photo, because being 3 optical fiber end that will be bundled together
Face forms by grinding polish, thus Shi center opened Φ 25 μm left and right aperture, external diameter be the glass hose of Φ 1mm
Lasso inserts 3 bare wires, is fixed with binding agent.At wave multiplexer input side, the incident end face of 3 optical fiber is with each other
The interval of 2mm is transversely arranged.The RGB wave multiplexer of the N=3 described in this claim 4 is that width is 6mm, thickness with length
Chip-shaped wave multiplexer for about 2mm.
At present, RGB tri-ripple of the pencil optical fiber wave multiplexer of above-mentioned NA0.2, inner core diameter Φ 7 μm bare wire, N=3 root is used
Long chip-shaped light source, directly carries out when coupling of light between LD with optical fiber without lens, as it is shown in figure 5, its profile be width 6mm,
Long 8.5mm, coupling efficiency between thick 1.8mm, LD and wave multiplexer optical fiber can reach about 65%；In light source LD and conjunction
When using coupled lens between ripple device, the coupling efficiency of light can rise to the highest by 85%, but the length direction of its profile then reaches
11mm.Pencil optical fiber input and outgoing both ends of the surface are not accompanied with the thin dielectric film of antireflection at present, if subsidiary, then the coupling of light
Close efficiency and can also promote more than 5% again.Substantially, the wave multiplexer in Fig. 5 can be from the pencil optical fiber solutions described in claim 4
Switch to the hollow type light guide approach described in claim 1.Both relevant characteristics are as previously described, almost identical, made
Rgb light source also be able to carry out single transverse mode output with the coupling efficiency of identical chip-shaped profile and same levels.Namely
Say, the rgb light source described in the claims in the present invention 5 of the subject matter as the present embodiment 2 shown in Fig. 5, cover right and want
Seek the chip-shaped wave multiplexer of two ways described in 1 and 4.
Additionally, also investigated the transverse mode of the embodiment 2 RGB tri-wavelength light beam from pencil fiber exit to wave multiplexer outlet side
Characteristic.Carrying out tentative calculation according to optical fiber bare wire inner core diameter 7 μm, NA0.2, the numerical value of quality factor M^2 that light beam transverse mode is relevant divides
It is not: red wavelength 638nm is 3.5, green wavelength 520nm is 4.2, blue wavelength 450nm is 4.9, and measured value is red green
Blue all below 2, it is essentially close to single transverse mode.The reason of this result is, the length of the wave multiplexer optical fiber bare wire in this example
Being about about 6mm, light beam transmission range in a fiber is extremely short, and the effect being mixed into higher mode not yet highlights, institute's input beam
Transverse mode is not also upset and is just had arrived at outfan.
Additionally, also investigated the same centration of the embodiment 2 RGB tri-wavelength light beam from light source outgoing, at pencil optical fiber
Exit portal places colourless (=achromatism) lens that focal length is 20mm, and carries out calibrating so that the beam diameter in 1 meter of front is minimum,
The beam spot footpath (FWHM) of final measured R and G and B these three light beam is about below Φ 0.5mm.And, three wavelength three light
Bundle spaces between about about 0.5mm, within a Φ 1.5mm concentric circular, thus for practical rank, it is possible to
A light beam as three wavelength uses.
According to above assessment result, compared to the emergent light from former LD, use the output after the present embodiment 2-in-1 ripple device
Being respectively, the 160mW of red 638nm is output as 135mW, the 80mW of green 520nm is output as 65mW, the 80mW of blue 450nm
It is output as 62mW, is almost single transverse mode from three wavelength light beams of wave multiplexer fiber exit, it is possible to meet as vehicle-mounted and mobile phone
With the requirement of the high brightness height output that porjection type scialyscope should possess.
Embodiment 3
The RGB multi wave length illuminating source of embodiment 1 and 2 as above is because be mounted side by side on can dispel the heat multiple LD
On same plane, therefore all reach the high output of more than 100mW with each wavelength, even multiple surface installing type LD chip is also
Because height consumes electric current and the high-density installation of minimal type, and heat dissipation problem can substantially occur.The rgb light of the present embodiment 3
It is different that multiple LD chip is in one plane installed from 2 examples noted earlier in source, although the same surface installing type LD chip that uses, but
Being to carry out three-dimensional installation in accordance with the method for claim 6, its profile is cylindrical and polygonal rod three-dimensional shape.This
Light source in example, by multiple LD so carry out three-dimensional installation, thus not only improves thermal diffusivity, moreover it is possible to by profile being changed
For cylinder etc., make the shape that various application are easily installed.
As example, surface mount chip type LD, coupled lens and the pencil optical fiber type described in claim 4 are closed ripple
This three of device carries out three-dimensional installation according to the method described in claim 6 and obtains rgb light source, its building block principle and structure such as figure
Shown in 6.The profile of this light source uses cylinder, so solid is assembled in the LD outgoing of the RGB inside cylindrical metal container
Three luminous points and be positioned at three light end faces of 3 optical fiber of light incident side of wave multiplexer, carry out luminous point Face to face
Mate with 1 couple 1 of sensitive surface, be distributed with the equilateral triangle Delta of same size, use three coupled lens, by three LD
The light each exported by three fiber end faces, couples with each optical fiber in 3 optical fiber respectively.In this Fig. 6, design and
Manufacture experimently the cylindrical shape of length 8mm, diameter of phi 5.6mm.If do not used lens to take direct-coupled mode to pacify
Dress, then can be by size reduction to diameter of phi 4.8mm, long 6mm.
Fig. 7 is as another example, is carried out with near-infrared four wavelength LD light source module by the visible RGB installed with square
The assembled configuration figure assembled.As the example in Fig. 6, use 4 coupled lens, send from four LD of spatially type distribution
4 wavelength light beams coupled to the wave multiplexer of the 4 couple 1 pencil optical fiber being distributed in identical solid type.Square 4 color LD moulds on the right side of Fig. 7
Block (in figure 711～732 a set of) can also be encapsulated in be positioned at the external diameter in left side be Φ 5mm, the cylindrical storage of a length of 8mm
In housing (in figure 740).The trial-production in Fig. 8 shown in left photo being the RGB-NIR light source being packaged like this in the past is real
One of thing.The size of this module is external diameter Φ 6mm, length 12mm.
Embodiment 4
Embodiment 4 is to use the rgb light source of the optical-fiber type wave multiplexer in photoconduction described in claim 3, as Fig. 8 is right
Shown in the photo of side.The laser that the LD of the can-like list transverse mode RGB of Φ 3.8 emits uses Lens Coupling to input to above-mentioned wave multiplexer
In side-light guides, additionally, the output light of outgoing photoconduction also uses on the single transverse mode optical fiber of Lens Coupling to 1, the output of final optical fiber
Output relative to former LD, it is achieved the efficiency of about 60%.
The present embodiment 4 mode being used to the application apparatus of the multi-wavelength LD light source of wave multiplexer, its key point is light
Fine output.It is to carry out optical transport by optical fiber between light source and fiber-optic output containing LD, thus in the place separated with light source,
Required light can be exported to application apparatus, and by only light source body the most additionally being placed, it is possible to easily solve to dissipate
Heat problem.For noted earlier vehicle-mounted in the case of, even if carrying out the set-up site looking squarely display type scialyscope of light output
Ambient temperature be in subzero 35 DEG C～above freezing more than 90 DEG C in a big way, due to by independent in interior rgb light source main body containing LD
Place, also therefore be able to normal operation.It is to say, this light source is indispensable for the application of vehicle-mounted aspect.
Industrial practicality
The slim compact chip-shaped wave multiplexer as described in claim 1 and 4 uses as critical component, same to luck
By the mounting technique described in claim 5, then can make the slim compact multi wave length illuminating source of plane mount type, additionally it is possible to application
In having mobile phone or other wearable display devices of miniature requirement, such as, use the laser projection of MEMS or DMD, LCOS etc.
The purposes such as machine.
Additionally, use in the multi wave length illuminating source of the optical fiber output type wave multiplexer described in claim 4, because being to pass through optical fiber
It is transmitted between destination's " scialyscope " of LD light source and light, so easier tolerance car is interior and field equitemperature is harsh
Environment, thus can be used for the purposes such as automotive field.
Further, multiple for multi-wavelength high output LD are carried out by claim 6 three-dimensional installation together, it is possible to make external diameter at Φ
The cylindrical multi wave length illuminating source of below 5mm, thus it is not only able to use the profile of easily installation, moreover it is possible to improve thermal diffusivity, it is possible to
For the wearable laser display apparatus such as laser pen or spectacle.
Additionally, about the installation of small-sized multiple wavelength laser light source, if using such as wave multiplexer described in claim 1 and 4
Various constituent part, then installation can be divided into the installation of the wave multiplexer self that the installation by each internal part carries out make
Industry and this two big operation of the installation exercise being optically coupled to wave multiplexer that each independent LD is penetrated, thus especially a large amount of raw
During product, compare over and involve the installation exercise of multiple LD, be all easier to launch in management in terms of manufacturing the two, thus in fall
Can also the reliability of improving product on the basis of low cost.
Label declaration
Fig. 1 correlation indices:
The substrate being carved with photoconduction groove of the wave multiplexer of 110 claim 1
The upper surface of 111 substrates 110, this face is carved with photoconduction groove
112 N+1 the photoconduction grooves being engraved on face 111, n=1 ... in figure, N represent nth root incidence photoconduction, n=
N+1 represents 1 outgoing photoconduction
The 113 incident and side of outgoing photoconduction groove and bottom surfaces, in order to close light, at these sides and the end
Topcoating is covered with the metallic film or thin dielectric film being totally reflected light
120 carry out, with the upper surface of substrate 110, the cover plate for covering light guide groove fitted
The lower surface of 121 cover plates 120, i.e. carrying out being carved on opposite substrate 110 upper surface 111 fitted with this face
Photoconduction groove builds to be formed the side of photoconduction.In order to light being enclosed in formed photoconduction, it is covered with in this topcoating
The metallic film that light is totally reflected or thin dielectric film
Fig. 2 correlation indices:
The outgoing photoconduction groove of the wave multiplexer of 200 claim 1 being made according to the method for claim 2
Outfan
In more than 201 N=3 root, the light beam input of the incident photoconduction of the 1st red wavelength
The light beam input of the incident photoconduction of 202 the 2nd blue wavelengths
The light beam input of the incident photoconduction of 203 the 3rd green wavelengths
210 outgoing photoconduction grooves
The incident photoconduction groove of 211 the 1st red wavelengths
The incident photoconduction groove of 212 the 2nd blue wavelengths
The incident photoconduction groove of 213 the 3rd green wavelengths
The incidence of 222 the 2nd blue wavelengths and the coupling part of outgoing photoconduction
The incidence of 223 the 3rd green wavelengths and the coupling part ※ of outgoing photoconduction
※ is as in figure 2 it is shown, for the 1st red wavelength, be a straight line from input 201 to outfan 200, namely
Saying, incident photoconduction 211 there is no coupling part, but directly links with outgoing photoconduction 210, and both are combined into 1.
Fig. 3 correlation indices:
The pencil optical-fiber type wave multiplexer of 300 claim 4 is fixed with the chip template of optical fiber
The input side of 301 wave multiplexers
The outlet side of 302 wave multiplexers
310 tight harnesses are at the exit end of multiple N=3 root optical fiber of wave multiplexer outlet side
31i i=1,2,3；The incident end face of 3 optical fiber of wave multiplexer input side
32j j=1,2,3；It is used for 3 optical fiber are carried out hi-Fix and fixing 3 ditches on chip template 300
Groove
Fig. 4 (microphotograph) correlation indices:
Wave multiplexer outlet side harness shown in 400 Fig. 3 has the lasso of optical fiber outgoing end face after grinding
41i i=1,2,3；Harness, can from photo at 3 optical fiber bare wires that cladding diameter is Φ 10 μm of ring face
Find out that these 3 optical fiber are closely bundled together so that equilateral triangle Dare is tower-like
The inner core of 421 optical fiber bare wires
The covering of 422 optical fiber bare wires
Scale shown in 430 microphotographs, unit length=10 μm
Fig. 5 correlation indices:
COS type list transverse mode LD is installed on 501 blue (Blue) 450nm wavelength surfaces
502 red (Red) 638nm wavelength COS type list transverse mode LD
503 green (Green) 520nm wavelength COS type list transverse mode LD
The heat radiation copper coin of 504 RGB tri-wavelength LD
The chip template being fixed with optical fiber of the wave multiplexer described in 505 claim 1, wave multiplexer is by this plate 505 and 3
Pencil optical fiber 51i (i=B, R, G are trichroism) forms
Being that i=B, R, G are trichroism the most respectively in 51i figure, wave multiplexer input is that the LD light source with RGB is direct to 1 with 1
Multiple N=3 root optical fiber that optical coupling mode is installed, in the present embodiment 1, the size of 3 optical fiber bare wires be inner core diameter Φ 7 μm,
NA0.2, cladding diameter Φ 10 μm
514 wave multiplexer outlet sides meet condition described in claim 1 and the outgoing end face of multiple N=3 root optical fiber of harness
Fig. 6 correlation indices:
The trichroism i=R of 611-i, G, B surface mount type COS type LD (3)
The LD electrode (negative electrode and each 3 groups of anode, totally 6) of 612-j trichroism j=R, G, B
The LD heat transmission radiator (3 set) of 613-k trichroism k=R, G, B
The coupled lens (3 set) that 621-s is optically coupled to wave multiplexer from the LD of trichroism s=R, G, B
The 630 wave multiplexer main bodys being made up of 3 pencils optical fiber 631-i (i=R, G, B)
Three pencil optical fiber ※ of the wave multiplexer of the light that 631-t sends for the LD receiving trichroism t=R, G, B
※ RGB trichroism LD light source body by the LD electrode of LD, 612-j of 611-i as enumerated above, the radiator of 613-k,
In the figures such as the coupled lens of 621-s and the wave multiplexer of 630, each parts composition on right side, carries out solid according to the configuration relation in figure
Install, form a module.
The beam exit mouth of 632 pencil optical fiber type wave multiplexers
640 are used for receiving the external shell of the trichroism RGB LASER Light Source main body module on right side in above-mentioned figure, and its profile is
Cylinder, a size of L8mm × Φ 5.6mm
Fig. 7 correlation indices:
711-i tetra-color i=R, G, B, NIR near-infrared surface installation COS type LD (4)
The LD of 712a-j tetra-color j=R, G, B, NIR+electrode (totally 4, anode)
The LD of 712b-j tetra-color j=R, G, B, NIR-electrode (totally 4, negative electrode)
The 713 heat transmission radiators that tetra-LD of RGB and NIR are bonded together
721-k coupled to four set coupled lens of wave multiplexer from the LD of four color k=R, G, B, NIR
730 pencil optical fiber types 4 are to 1 wave multiplexer main body
Four pencil optical fiber of the wave multiplexer of the light that 731-s sends for the LD receiving four color s=R, G, B, NIR
The beam exit mouth of the pencil optical-fiber type wave multiplexer of 732 claim 4
※ RGB+NIR tetra-color LD light source body by the LD electrode of LD, 712a-j and 712b-j of 711-i as enumerated above,
Each parts composition on right side in the figures such as the wave multiplexer of the radiator of 713, the coupled lens of 721-k and 730, according to the configuration in figure
Relation carries out three-dimensional installation, forms a module.
740 are used for receiving the external shell of the 4 color LD light source body of right side RGB+NIR in figure, and its profile is cylindrical,
A size of L8mm × Φ 5mm
Fig. 8 (photo) correlation indices:
LD, according to the embodiment 3 of claim 6, is carried out the cylindrical RGB three-wavelength source module of three-dimensional installation by 801
Preproduction photo
802 export RGB three-wavelength source mould according to the optical fiber using guide type wave multiplexer of the embodiment 4 of claim 3
The photo of block
The 810 RGB three-wavelength source main bodys being provided with LD and wave multiplexer and outgoing optical fiber
811 green 520nm wavelength, Can-3.8 encapsulation, single transverse mode LD
812 red 638nm wavelength, Can-3.8 encapsulation, single transverse mode LD
813 blue 450nm wavelength, Can-3.8 encapsulation, single transverse mode LD
821 make the light beam coupling that RGB tri-wavelength LD sends, from light source body 810 to single transverse mode optical fiber of outside output light
The lasso of 822 optical fiber 821 outfans, the light of RGB tri-wavelength exports from the end face of this lasso
Claims (6)
1. the N optical multiplexer to 1, it is characterised in that
In order to from making the incident N root incidence photoconduction of multiple N root light beam, by incident for described N root photosynthetic ripple to 1 outgoing photoconduction defeated
Go out, n-th (n=1,2 ..., N) the root photoconduction in described N root has terminal as light direction of advance n-th (n=1,
2 ..., N) individual terminal, arrange in order to by n-th (n=1,2 ..., N) the root light beam in described N root from described N number of the n-th (n=
1,2 ..., N) individual terminal to the transfer of described outgoing photoconduction outgoing N number of coupling part of possessing, in order to realize will be from described N root
The described N root light beam of N number of incident end face incidence of photoconduction all closes ripple extremely described 1 outgoing photoconduction the purpose exported, about
Form the N+1 root photoconduction for described N root incident illumination is transmitted with described 1 emergent light, by making light guide body hollow,
Whole topcoating in the medial wall of photoconduction covers the metallic film or thin dielectric film being totally reflected light, thus become can be by light
The structure that bundle is transmitted in being completely enclosed within photoconduction, makes the described N root light incided in described N root incidence photoconduction close efficiently
Ripple is to described 1 outgoing photoconduction and exports.
2. one kind in the N as claimed in claim 1 method to making described N+1 root photoconduction on 1 wave multiplexer, it is characterised in that
About at N as claimed in claim 1 on 1 wave multiplexer, as the fundamental of structure, form N+1 root and be covered with reflection
The hollow type of thin film is incident and outgoing photoconduction, and first pre-setting 1 material is silicon or metal or pottery or glass, or
The substrate of optical crystal, is pre-designed between described N root incidence photoconduction and described 1 outgoing photoconduction and incidence and outgoing photoconduction
The formation pattern of described N number of coupling part, from the upper surface of described substrate toward depth direction, by wet etching or dry ecthing, or
The beam retrofit such as laser beam or ion beam is used, along the N+1 root being formed as described N number of band coupling part according to substrate material
The pattern of photoconduction, carves the groove of N+1 root photoconduction, at the described N+1 root groove of the photoconduction carved by described method
On all surface of bottom surface and two sides, implement metallic film or the coating of thin dielectric film that light is totally reflected, by
Open in the top of the described N+1 root photoconduction groove carved on the substrate, thus arrange one again (as far as possible with described substrate
Use identical material) be used for the cover plate that covers, the lower surface at described cover plate coat the metallic film that light is totally reflected or
Thin dielectric film, is covered with the N+1 root photoconduction of total reflection film by the bottom surface being made according to described method and two sides
With the upper surface of the described substrate at groove place and the described cover plate being covered with total reflection film being made according to described method
Lower surface alignment, and cover plate is attached, thus in two sides of N+1 root photoconduction groove of described substrate and bottom surface and
The lower surface of the cover plate of described attaching, to be i.e. all accompanied with the total reflection of light along all sides of optical transmission direction as photoconduction thin
Film, thus light is enclosed in described N+1 root hollow type groove.
3. N is to 1 wave multiplexer, at multiple N of hollow type light guide type as claimed in claim 1 base to 1 basic wave multiplexer
On plinth, in optical fiber and use any one structure in following three types:
Possess N root input photoconduction and 1 output optical fibre, the output of the outgoing photoconduction from described wave multiplexer is optically coupled in advance
The wave multiplexer of the Class1 of 1 optical fiber arranged；Or,
Possess N root input optical fibre and 1 output photoconduction, at the N root of the multiple N root optical fiber pre-set Yu described basic wave multiplexer
Between incident photoconduction, with 1 to 1 form light beam carried out direct-coupling, or use lens to carry out the conjunction ripple of the type 2 coupled
Device；Or,
Possess N root input optical fibre and 1 output optical fibre, by the outgoing photoconduction of the wave multiplexer from the described type 2 pre-set
Output light be coupled in the wave multiplexer of type 3 of 1 optical fiber pre-set in the same manner as the wave multiplexer of Class1.
4. one kind uses the chip-shaped N of the pencil optical fiber light beam space wave multiplexer to 1, it is characterised in that
For from multiple N number of point source of input side or the most independent N root light of multiple N root directional light Output of laser
Bundle, becomes a point source to carry out closing ripple exporting to make its optical axis be collected to outlet side,
Prepare 1, the chip template that material is glass or metal in advance；And grind for leaded light to incident end face and outgoing end face
The inner core of mill and the optical fiber bare wire N root of covering composition, arrange input side and the outlet side of light, edge in the both sides of described chip template
The edge of the input side of described chip template, by the incidence end of described N root optical fiber bare wire with want to carry out to close ripple spatially
The incoming position alignment of the independent N root light beam from described N number of light source, separates certain intervals and laterally arranges as string, with bonding
Agent is fixed, and the edge of the outlet side at described chip template, by the tightst for the exit end of described N root optical fiber bare wire
Harness is also fixed with binding agent,
Use the optical system such as lens, by defeated to 1 input to described chip template of described N number of point source or N root collimated light beam 1
Enter the incident end face of the N root optical fiber bare wire of side, then can be from harness at the exit end of the N root optical fiber of the outlet side of described chip template
N root light beam is the most directly exported by face,
Further, when having prepared the described N root optical fiber bare wire being made up of inner core and covering in advance, will be wrapped on bare wire inner core
Cladding thickness is further reduced to the limit (such as, about 1 μm), i.e. make the external diameter (i.e. cladding diameter) of described N root optical fiber bare wire
It is superfine that (such as, during single transverse mode, inner core diameter is below Φ 4 μm, and when described cladding thickness is below 1 μm, the external diameter of bare wire is
Below Φ 6 μm),
Thus the N tight harness of root light beam from the output of described N root fiber exit end face generally looking like N number of point source is existed
The exit end of described N root optical fiber, and due between inner core and inner core extremely close to (when described cladding thickness is below 1 μm, two
Person is spaced in below 2 μm), therefore light beam is restrained and is considered as a point source and exports, i.e. by from the most independent
The N root light beam of N number of light source spatially closes ripple as a point source in practical rank and becomes a light beam and export to output
End.
5. a multiple wavelength laser light source module, it is characterised in that
Described multiple wavelength laser light source module is slim compact chip-shaped module, in order to make slim compact chip-shaped many ripples
Long light source, the multiple N number of surface pre-set installation laterally being arranged with chip-shaped LD on the fixed mount pre-set is string,
Carry out Plane Installation, additionally, pre-set in the pencil optical-fiber type of the hollow light conductivity type according to claim 1 or claim 4
Slim compact chip-shaped multiple N of being made of either method to 1 wave multiplexer, described Plane Installation N number of LD with
Between described wave multiplexer N root hollow light guide or N number of light incident end face of N root pencil optical fiber, in a 1-to-1 manner light is entered
Row direct-coupling or use lens couple, and carry out closing ripple by described wave multiplexer, with a point source output.
6. a multiple wavelength laser light source module, it is characterised in that
In order to make compact multi wave length illuminating source, and multiple LD of high-density installation can be easily made to dispel the heat, and can root
It is designed according to the profile required by application apparatus installation,
On the fixed mount easily making LD dispel the heat of the cylinder pre-set or the three-dimensional shape such as cube shaped, three-dimensional peace is set
Multiple N number of surface of dress is installed and is used chip-shaped LD；And according to the hollow light conductivity type of claim 1 or the pencil of claim 4
Multiple N that either method in optical-fiber type is made are to 1 wave multiplexer, and it is slim chip that described surface is installed with chip-shaped LD
Type, multiple N root wavelength are different,
Then, by be arranged in front of the light incident side of described wave multiplexer for receive the light that the plurality of N number of LD sends photoconduction,
Or N number of incident end face of pencil optical fiber is also according to the three-dimensional distribution identical with the plurality of N number of LD, is arranged in wave multiplexer main body
Input side, and pre-set multiple N number of coupled lens, by each lens are carried out aligning, make each described LD send
Each described incident end face of wave multiplexer input side described in optical registration, is coupled to wave multiplexer, then will be entered by the effect of wave multiplexer
The N root light penetrated accumulates a point source and exports to exiting side,
Thus, by the multiple N number of LD light source will installed by the way of being distributed with solid, possess the multiple N number of of identical solid distribution
The wave multiplexer of incidence end and multiple N number of coupled lens of being used for inputting light toward wave multiplexer from light source are from each constituent part
Carry out three-dimensional assembling in structure, thus utilize and in structure, easily make LD heat radiation and having easily install for various application
The point source of compact cylinder or the profile such as cube shaped exports.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014240554A JP2016095479A (en) | 2014-11-11 | 2014-11-11 | Multiplexer using hollow type light guide |
| JP2014-240554 | 2014-11-11 | ||
| JP2014267190A JP6535848B2 (en) | 2014-12-18 | 2014-12-18 | Chip-type bundle fiber multiplexer and chip-type multi-wavelength light source |
| JP2014-267190 | 2014-12-18 | ||
| PCT/JP2015/075277 WO2016076000A1 (en) | 2014-11-11 | 2015-08-31 | Various novel multi-wavelength multiplexers, and novel multi-wavelength light sources using multiplexers |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106062600A true CN106062600A (en) | 2016-10-26 |
| CN106062600B CN106062600B (en) | 2020-07-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201580006643.XA Active CN106062600B (en) | 2014-11-11 | 2015-08-31 | Light beam combiner and chip type multi-wavelength laser light source |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN106062600B (en) |
| WO (1) | WO2016076000A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109828331A (en) * | 2019-03-27 | 2019-05-31 | 浙江大学 | A kind of wavelength locker and adjustable wavelength laser |
| CN111149262A (en) * | 2017-09-29 | 2020-05-12 | 株式会社藤仓 | Fiber laser system and control method thereof |
| CN111638577A (en) * | 2020-06-29 | 2020-09-08 | 中国科学院半导体研究所 | Surface-mounted integrated optical module |
| CN112514184A (en) * | 2019-03-13 | 2021-03-16 | 国立大学法人福井大学 | Optical waveguide type optical multiplexer, optical waveguide type optical multiplexer light source device, and image projection device |
| CN113193468A (en) * | 2021-05-27 | 2021-07-30 | 三序光学科技(苏州)有限公司 | Semiconductor laser light source module based on planar waveguide type wave combiner and manufacturing method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003065091A2 (en) * | 2002-01-29 | 2003-08-07 | Qinetiq Limited | Optical circuit including hollow core optical waveguides |
| WO2004083923A1 (en) * | 2003-03-22 | 2004-09-30 | Qinetiq Limited | Optical wavelength division multiplexer/ demultiplexer device |
| JP2006126373A (en) * | 2004-10-27 | 2006-05-18 | Univ Of Tokyo | Guide substrate for optical fiber of lightwave circuit module |
| CN103116202A (en) * | 2013-03-08 | 2013-05-22 | 深圳大学 | Visible light wave combiner |
| JP2013228651A (en) * | 2012-04-24 | 2013-11-07 | Jun Narusawa | Multi-wavelength fiber multiplexer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2516975C2 (en) * | 1975-04-17 | 1982-10-28 | Siemens AG, 1000 Berlin und 8000 München | Method of manufacturing an optical waveguide |
-
2015
- 2015-08-31 CN CN201580006643.XA patent/CN106062600B/en active Active
- 2015-08-31 WO PCT/JP2015/075277 patent/WO2016076000A1/en active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003065091A2 (en) * | 2002-01-29 | 2003-08-07 | Qinetiq Limited | Optical circuit including hollow core optical waveguides |
| WO2004083923A1 (en) * | 2003-03-22 | 2004-09-30 | Qinetiq Limited | Optical wavelength division multiplexer/ demultiplexer device |
| JP2006126373A (en) * | 2004-10-27 | 2006-05-18 | Univ Of Tokyo | Guide substrate for optical fiber of lightwave circuit module |
| JP2013228651A (en) * | 2012-04-24 | 2013-11-07 | Jun Narusawa | Multi-wavelength fiber multiplexer |
| CN103116202A (en) * | 2013-03-08 | 2013-05-22 | 深圳大学 | Visible light wave combiner |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111149262A (en) * | 2017-09-29 | 2020-05-12 | 株式会社藤仓 | Fiber laser system and control method thereof |
| CN111149262B (en) * | 2017-09-29 | 2021-09-28 | 株式会社藤仓 | Fiber laser system and control method thereof |
| US11362477B2 (en) | 2017-09-29 | 2022-06-14 | Fujikura Ltd. | Fiber laser system and control method therefor |
| CN112514184A (en) * | 2019-03-13 | 2021-03-16 | 国立大学法人福井大学 | Optical waveguide type optical multiplexer, optical waveguide type optical multiplexer light source device, and image projection device |
| CN109828331A (en) * | 2019-03-27 | 2019-05-31 | 浙江大学 | A kind of wavelength locker and adjustable wavelength laser |
| CN111638577A (en) * | 2020-06-29 | 2020-09-08 | 中国科学院半导体研究所 | Surface-mounted integrated optical module |
| CN113193468A (en) * | 2021-05-27 | 2021-07-30 | 三序光学科技(苏州)有限公司 | Semiconductor laser light source module based on planar waveguide type wave combiner and manufacturing method |
| CN113193468B (en) * | 2021-05-27 | 2023-09-12 | 三序光学科技(苏州)有限公司 | Semiconductor laser light source module based on planar waveguide type combiner and manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2016076000A1 (en) | 2016-05-19 |
| CN106062600B (en) | 2020-07-07 |
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