CN106052947B - The device and method of mixed gas pressure intensity in a kind of measurement transparent beads - Google Patents
The device and method of mixed gas pressure intensity in a kind of measurement transparent beads Download PDFInfo
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- CN106052947B CN106052947B CN201610547854.0A CN201610547854A CN106052947B CN 106052947 B CN106052947 B CN 106052947B CN 201610547854 A CN201610547854 A CN 201610547854A CN 106052947 B CN106052947 B CN 106052947B
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- 238000000034 method Methods 0.000 title claims abstract description 31
- 238000005259 measurement Methods 0.000 title claims abstract description 14
- 239000011324 bead Substances 0.000 title abstract 2
- 230000003287 optical effect Effects 0.000 claims abstract description 17
- 239000004005 microsphere Substances 0.000 claims description 189
- 238000006073 displacement reaction Methods 0.000 claims description 55
- 239000011257 shell material Substances 0.000 claims description 22
- 230000033001 locomotion Effects 0.000 claims description 11
- 238000005516 engineering process Methods 0.000 claims description 9
- 238000002310 reflectometry Methods 0.000 claims description 8
- 230000009471 action Effects 0.000 claims description 6
- 230000003068 static effect Effects 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 239000011521 glass Substances 0.000 claims description 4
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000005096 rolling process Methods 0.000 claims description 3
- 230000008961 swelling Effects 0.000 claims description 3
- 239000004215 Carbon black (E152) Substances 0.000 claims description 2
- 230000007613 environmental effect Effects 0.000 claims description 2
- 229930195733 hydrocarbon Natural products 0.000 claims description 2
- 150000002430 hydrocarbons Chemical class 0.000 claims description 2
- 230000007246 mechanism Effects 0.000 claims description 2
- 239000002184 metal Substances 0.000 claims description 2
- 229910052751 metal Inorganic materials 0.000 claims description 2
- 229920000642 polymer Polymers 0.000 claims description 2
- 238000005086 pumping Methods 0.000 claims description 2
- 238000005305 interferometry Methods 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 70
- 239000000463 material Substances 0.000 description 6
- 230000004927 fusion Effects 0.000 description 4
- 238000001069 Raman spectroscopy Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- YZCKVEUIGOORGS-OUBTZVSYSA-N Deuterium Chemical compound [2H] YZCKVEUIGOORGS-OUBTZVSYSA-N 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000009172 bursting Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007123 defense Effects 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 229910052805 deuterium Inorganic materials 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 239000002737 fuel gas Substances 0.000 description 1
- 238000007499 fusion processing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 polypropylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Measuring Fluid Pressure (AREA)
Abstract
The invention discloses a kind of device and method of mixed gas pressure intensity in measurement transparent beads, the device and method are to be radially expanded increment by what optical interferometry obtained microballoon, mixed gas air pressure is calculated by pressure equilibrium, realizes quick, the lossless and accurate measurement of arbitrary component mixed gas pressure intensity in microballoon.
Description
Technical Field
The invention belongs to the technical field of optical precision measurement, and particularly relates to a device and a method for measuring the pressure of mixed gas in transparent microspheres.
Background
In the fields of fusion energy utilization, high-temperature and high-density scientific research and national defense, the hollow microspheres are widely applied, and the pressure of fuel gas in the microspheres is important physical parameters in important physical processes such as fusion efficiency, symmetry of fusion process compression and the like. The total amount of the gas in the mixed gas in the microsphere is gradually reduced along with the time, so that the pressure of the mixed gas is a dynamic parameter, and the parameter must be measured by adopting a real-time measuring method.
A method for measuring deuterium gas in microspheres based on Raman scattering spectrum analysis is disclosed in journal of J.Appl. Phys.A. published by Michael. C.Drake et al, national Bureau of the United states of standards, 1992, and the method is based on the scattering properties of Raman-active gas to measure the pressure of the gas. The method has the following defects: only raman active gases can be measured and non-raman active gases cannot be measured.
In the journal of Fusion Technology, Salazar et al, los alamos national laboratory, 2000, issued to Pressure testing of micro balloons by bursting, a destructive method and apparatus for measuring gas Pressure in microspheres was disclosed. The method comprises placing the microspheres in a closed container, crushing the microspheres in the closed container under vacuum state, filling the closed container with gas in the microspheres, measuring the gas pressure at the moment by using a precise gas pressure sensor, and calculating the pressure of the gas in the microspheres according to the known volume of the closed container and the known volume of the microspheres. The method has the following defects: the measured object is destroyed in the measuring process, and the measured object can not be reused.
Steinman et al, US, 2007, who is a general atomic energy agency, published in Fusion science and technology, development in capsule gas fill half-life determination, and disclosed a method for measuring air pressure based on changes in the optical path of the gas inside the microspheres before and after the microspheres are inflated. The method has the following defects: only a single component gas can be measured.
The common problem of the existing method is that a nondestructive and highly applicable device and method for measuring the pressure of the mixed gas in the microsphere are lacked.
Disclosure of Invention
The invention aims to provide a device for measuring the pressure of mixed gas in transparent microspheres, and the invention aims to provide a method for measuring the pressure of mixed gas in transparent microspheres.
The invention relates to a device for measuring the pressure intensity of mixed gas in transparent microspheres, which is characterized by comprising an interference light path, a reflector, a five-axis displacement table, a computer, an image acquisition card and a five-axis displacement table controller;
the interference light path comprises an area array detector, a condenser, a spectroscope I, a lens, a point light source, a spectroscope II, an objective lens I, an objective lens II and a reflector; the light emitted by the point light source is incident to the spectroscope I through the lens, reflected at the spectroscope I and divided into reference light and measuring light through the spectroscope II, wherein the reference light is reflected by the spectroscope II and then focused to the reflecting mirror through the objective lens II, the measuring light is transmitted at the spectroscope II and then focused to the microsphere through the objective lens I, the light returned by the reflecting mirror and the microsphere are converged at the spectroscope II and interfered to form interference light, the interference light is transmitted to the condenser lens through the spectroscope I and focused to the area array detector to form an interference image, and the interference image is transmitted to the computer through the image acquisition card;
the five-axis displacement table is fixedly provided with a reflector, microspheres are placed on the reflector, the five-axis displacement table controller controls the five-axis displacement table to drive the reflector to move, and the image acquisition card controls the area array detector to acquire images.
The five-axis displacement platform is a five-degree-of-freedom motion mechanism and realizes X-axis, Y-axis, Z-axis, pitching and rolling motions, and the five-axis displacement platform is one or a combination of more than two of a piezoelectric ceramic displacement platform, a stepping motor displacement platform and a manual displacement platform.
The reflector is of a groove structure, the inner surface of the groove is a metal coating with the reflectivity of more than 90%, and the left and right bulges of the groove limit the movement of the microspheres.
The reflecting mirror is formed by combining a plurality of reflecting mirrors with different reflectivities which are uniformly distributed on the circumference, a rotating shaft is arranged on the circle center of the circumference and is vertical to the circumferential plane, the rotating shaft drives the reflecting mirror to rotate, and the matched reflecting mirror is selected according to the intensity of a measuring optical signal during measurement.
The invention discloses a method for measuring the pressure of mixed gas in a transparent microsphere, which comprises the following steps:
a. pumping the interior of the microsphere with a hollow structure to vacuum;
b. placing the microspheres on a reflector, placing the reflector on a five-axis displacement table, driving the reflector to horizontally move by the five-axis displacement table, moving the microspheres below an objective lens I, and controlling the five-axis displacement table to adjust the level so that the optical axis of the objective lens I is perpendicular to the reflector;
c. the five-axis displacement table drives the reflector to move along the Z-axis direction, so that the focal plane of the objective lens I is 5 microns higher than the upper vertex of the outer surface of the microsphere, and the position of the five-axis displacement table at the moment is defined as the Z-axis initial position;
d. starting a point light source, and controlling the area array detector to collect an interference image I by the computer through the image collecting card0；
e. The five-axis displacement table controls the microspheres to move in a stepping manner along the Z-axis direction, and after each step is moved, the computer controls the area array detector to acquire an interference image I through the image acquisition card1Interference image InUntil the focal plane of the objective lens I exceeds the lower vertex of the outer surface of the microsphere;
f. taking out the microspheres, and filling mixed gas into the microspheres by adopting an inflation technology;
g. repeating the steps b to e until the interference image II of the inflated microspheres0Interference image IImFinishing the collection;
h. extracting interference image I0Interference image InCenter point P of microspheres in each image1And the fixed point Q on the reflector other than the microspheres1The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate1And Q1The gray scale curve is obtained by a quadratic fitting peak-searching algorithm1Obtaining Z-axis coordinate Z of the top point on the outer surface of the microsphere in the gray curve of the point1Z-axis coordinate of vertex on inner surface of microsphere2Z-axis coordinate of lower vertex of inner surface of microsphere3Z-axis coordinate of lower vertex of outer surface of microsphere4(ii) a At Q1Obtaining Q from the gray curve of the point1Z-axis coordinate Z of point5Calculating the optical thickness t, t = z of the shell layer of the microsphere2-z1Inner diameter d of microsphere1，d1= z3-z2Lower vertex of microsphere outer surface and Q1Optical path difference l of point in Z-axis direction1，l1=z4-z5；
i. Extracting interference image II0Interference image IImCenter point P of microspheres in each image2And the fixed point Q on the reflector other than the microspheres2The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate2And Q2The gray scale curve is obtained by a quadratic fitting peak-searching algorithm2Obtaining Z-axis coordinate Z of the top point on the outer surface of the inflated microsphere in the gray curve of the point6Z-axis coordinate of vertex on inner surface of microsphere7Z-axis coordinate of lower vertex of inner surface of microsphere8Z-axis coordinate of lower vertex of outer surface of microsphere9(ii) a At Q2Obtaining Q from the gray curve of the point2Z axis coordinate Z10Calculating the optical path d corresponding to the inner diameter length of the microsphere2，d2= z8- z7Lower vertex of microsphere outer surface and Q2Optical path difference l of point in Z-axis direction2，l2=z9-z10；
j. By means of1=2(n1-1)t0，l2=2(n1-1)t0+(n-1)d1，t=n1t0The refractive index n of the shell of the microsphere can be obtained1Thickness t of microsphere shell0And the refractive index n of the mixed gas;
k. using n = d2/( d1+ Δ L), solving to obtain the diameter expansion amount Δ L of the inflated microspheres;
by knowing Young's modulus E, Poisson ratio mu, external ambient pressure P of the shell of the microsphereatmAnd measuring the diameter swelling amount DeltaL and the inner diameter d of the obtained microspheres1And shell thickness t0And calculating the gas pressure P of the mixed gas in the microspheres by a static pressure state equation.
The shell material of the microsphere is one of glass or transparent hydrocarbon polymer.
The inflation technology is high-pressure gas permeation inflation technology.
The mixed gas is more than two kinds of mixed gas, and the pressure P of the mixed gas is more than or equal to 10 times of the environmental pressure Patm。
The static pressure state equation is as follows:
the displacement equation of the microsphere under the combined action of the internal mixed gas and the external atmospheric environment is as follows:
(1)
the pressure equation of the microsphere under the combined action of the internal mixed gas and the external atmospheric environment is as follows:
(2)
wherein,the displacement increment of the radius of the microsphere in the radial direction;ris the radius of the sphere;the pressure of the surface of the microsphere;
the analytical formula of formula (1) is:
(3)
a, B is a constant to be solved;
substituting formula (3) for formula (2) to obtain:
(4)
at the inner surface of the microsphere,(ii) a At the outer surface of the microspheres,(ii) a Wherein,= d1the/2 is the inner radius of the microsphere (8),= d1/2+t0the outer radius of the microsphere (8);
will be provided withIn the formula (3), A, B and the gas pressure P of the gas mixture in the microspheres are obtained by solving the formula (3) and the formula (4).
The device and the method for measuring the pressure of the mixed gas in the transparent microsphere have the following advantages that:
1. the range of applicable gas is wide. The method is suitable for measuring the pressure of mixed gas of any component in the microsphere, converts the optical path change of the gas into the expansion amount of the microsphere through the principle of interferometry, and calculates the pressure of the internal mixed gas through the radial expansion amount of the microsphere. The method has no relation with the optical property of each component gas, does not limit the type of the measured gas pressure, and has wide application range.
2. The measuring process does not damage the measured micro-sphere. By means of the interference measurement principle, the radial expansion value of the microsphere is measured, the structure of the microsphere is not damaged, and therefore the measurement result reflects the real gas pressure.
3. The measuring efficiency is obviously improved. The time required for interferometry is short, usually less than 1 minute, and the measurement efficiency of the mixed gas pressure is significantly improved for large-batch microsphere measurement.
The invention relates to a device and a method for measuring the pressure of mixed gas in a transparent microsphere, which are used for obtaining the radial expansion amount of the microsphere through optical interference measurement and calculating the pressure of the mixed gas through pressure balance, thereby realizing the rapid, nondestructive and accurate measurement of the pressure of the mixed gas in the microsphere.
Drawings
FIG. 1 is a schematic view of an apparatus for measuring the pressure of a mixed gas in transparent microspheres according to the present invention;
in the figure, 1, an area array detector 2, a condenser lens 3, a spectroscope I4, a lens 5, a point light source 6, a spectroscope II 7, an objective lens I8, microspheres 9, mixed gas 10, a reflector plate 11, a five-axis displacement table 12, an objective lens II 13, a reflector 14, a computer 15, an image acquisition card 16 and a five-axis displacement table controller.
Detailed Description
The invention is further illustrated by the following examples in conjunction with the accompanying drawings:
example 1
The invention discloses a device for measuring the pressure intensity of mixed gas in transparent microspheres, which comprises an interference light path, a reflector 10, a five-axis displacement table 11, a computer 14, an image acquisition card 15 and a five-axis displacement table controller 16, wherein the interference light path is arranged on the reflector;
the interference light path comprises an area array detector 1, a condenser 2, a spectroscope I3, a lens 4, a point light source 5, a spectroscope II 6, an objective lens I7, an objective lens II 12 and a reflector 13; the light emitted by the point light source 5 is incident to a spectroscope I3 through a lens 4, reflected at the spectroscope I3 and then divided into reference light and measuring light through a spectroscope II 6, wherein the reference light is reflected by the spectroscope II 6 and then focused to a reflecting mirror 13 through an objective lens II 12, the measuring light is transmitted at the spectroscope II 6 and then focused to a microsphere 8 through an objective lens I7, the lights returned by the reflecting mirror 13 and the microsphere 8 are converged at the spectroscope II 6 and interfered to form interference light, the interference light is transmitted to a condenser 2 through the spectroscope I3 and focused to an area array detector 1 to form an interference image, and the interference image is transmitted to a computer 14 through an image acquisition card 15;
a reflector 10 is fixed on the five-axis displacement table 11, microspheres 8 are placed on the reflector 10, the five-axis displacement table controller 16 controls the five-axis displacement table 11 to drive the reflector 10 to move, and the image acquisition card 15 controls the area array detector 1 to acquire images.
The movement of the five-axis displacement table 11 in the embodiment is realized by a stepper motor displacement table, the movement of the Z-axis is realized by a piezoelectric ceramic displacement table, and the pitching movement and the rolling movement are respectively realized by a manual tilt adjusting displacement table.
The inner surface of the groove of the reflector 10 is a silver coating with a reflectivity of 99%, and the left and right bulges of the groove limit the movement of the microspheres 8.
The reflector 13 is composed of four reflectors having different reflectivities of 25%, 50%, 75%, and 99%.
The invention discloses a method for measuring the pressure of mixed gas in a transparent microsphere, which comprises the following steps:
a. the interior of the hollow glass microspheres 8 is vacuumized;
b. placing the microspheres 8 on a reflector 10, placing the reflector 10 on a five-axis displacement table 11, driving the reflector 10 to horizontally move by the five-axis displacement table 11, moving the microspheres 8 below an objective lens I7, and controlling the five-axis displacement table 11 to adjust the level so that the optical axis of the objective lens I7 is perpendicular to the reflector 10;
c. the five-axis displacement table 11 drives the reflector 10 to move along the Z-axis direction, so that the focal plane of the objective lens I7 is 5 microns higher than the upper vertex of the outer surface of the microsphere 8, and the position of the five-axis displacement table at the moment is defined as the Z-axis initial position;
d. starting the point light source 5, the computer 14 controls the area array detector 1 to collect an interference image I through the image collecting card 150；
e. The five-axis displacement platform 11 controls the microspheres 8 to move in a stepping manner along the Z-axis direction, and after each step is moved, the computer 14 controls the area array detector 1 to collect the interference image I through the image acquisition card 151Interference image InUntil the focal plane of the objective lens I7 exceeds the lower vertex of the outer surface of the microsphere 8;
f. will be microTaking out the ball 8, filling mixed gas 9 into the microsphere 8 by adopting a high-pressure gas permeation inflation technology, wherein the mixed gas 9 is D2And3he mixed gas;
g. repeating the steps b to e until the interference image II of the inflated microspheres 80Interference image IImFinishing the collection;
h. extracting interference image I0Interference image InCenter point P of microsphere 8 in each image1And the gray value of (2) and the fixing point Q on the reflector 10 other than the microspheres 81The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate1And Q1The gray scale curve is obtained by a quadratic fitting peak-searching algorithm1Obtaining Z-axis coordinate Z of top point on outer surface of microsphere 8 from gray curve of point1Z-axis coordinate of the apex on the inner surface of microsphere 82Z-axis coordinate of lower vertex of inner surface of microsphere 83Z-axis coordinate of lower vertex of outer surface of microsphere 84(ii) a At Q1Obtaining Q from the gray curve of the point1Z-axis coordinate Z of point5Calculating the optical thickness t, t = z of the shell layer of the microsphere 82-z1Inner diameter d of microsphere 81，d1= z3-z2Lower vertex of outer surface of microsphere 8 and Q1Optical path difference l of point in Z-axis direction1，l1=z4-z5；
i. Extracting interference image II0Interference image IImCenter point P of microsphere 8 in each image2And the gray value of (2) and the fixing point Q on the reflector 10 other than the microspheres 82The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate2And Q2The gray scale curve is obtained by a quadratic fitting peak-searching algorithm2Obtaining Z-axis coordinate Z of the top point on the outer surface of the inflated microsphere 8 from the gray curve of the point6Z-axis coordinate of the apex on the inner surface of microsphere 87Z-axis coordinate of lower vertex of inner surface of microsphere 88Of the lower apex of the outer surface of the microsphere 8Z-axis coordinate Z9(ii) a At Q2Obtaining Q from the gray curve of the point2Z axis coordinate Z10Calculating the optical path length d corresponding to the inner diameter length of the microsphere 82，d2= z8- z7Lower vertex of outer surface of microsphere 8 and Q2Optical path difference l of point in Z-axis direction2，l2=z9-z10；
j. By means of1=2(n1-1)t0，l2=2(n1-1)t0+(n-1)d1，t=n1t0The refractive index n of the shell of the microsphere 8 can be obtained1Thickness t of microsphere 8 shell0And the refractive index n of the mixed gas;
k. using n = d2/( d1+ Δ L), solving to obtain the diameter expansion amount Δ L of the inflated microspheres 8;
by knowing Young's modulus E, Poisson ratio mu, external ambient pressure P of the shell of the microsphereatmAnd the measured diameter swelling amount DeltaL and inner diameter d of the microsphere 81And shell thickness t0The gas pressure P of the mixed gas 9 inside the microspheres 8 is calculated by the static pressure equation of state.
The static pressure state equation is as follows:
the displacement equation of the microspheres 8 under the combined action of the internal mixed gas 9 and the external atmospheric environment is as follows:
(1)
the pressure equation of the microspheres 8 under the combined action of the internal mixed gas 9 and the external atmospheric environment is as follows:
(2)
wherein,the displacement increment of the radius of the microsphere 8 in the radial direction;ris the radius of the sphere;is the pressure on the surface of the microspheres 8;
the analytical formula of formula (1) is:
(3)
a, B is a constant to be solved;
substituting formula (3) for formula (2) to obtain:
(4)
at the inner surface of the micro-spheres 8,(ii) a At the outer surface of the microspheres 8,(ii) a Wherein,= d1the/2 is the inner radius of the microspheres 8,= d1/2+t0the ambient pressure P is the outer radius of the microsphere 8 and is measured by a barometeratm=0.1 MPa；
Inner diameter d of glass microspheres 81=500 μm, shell thickness t0=3 μm, the young modulus E =80 GPa for the shell layer of the microsphere 8, and the poisson ratio μ = 0.3. Wherein the Young's modulus E and Poisson ratio μ are in the handbook of Springer handbook condensed material and materials dataIt is also called out in this section. The increase in diameter expansion Δ L =0.94 μm for microspheres 8 was measured and wouldSubstituting the formula (3) to obtain the gas pressure P of the mixed gas 9 in the microspheres 8, which is 5.2 MPa.
Example 2
The embodiment of the present embodiment is basically the same as embodiment 1, and the main differences are that:
the inner surface of the recess of the reflector 10 is coated with copper having a reflectivity of 95%.
The microspheres 8 are polystyrene microspheres with an internal diameter d1=800 μm, shell thickness t0=20 μm, young modulus E =3.2 GPa of microsphere 8 shell layer, poisson ratio μ = 0.38, and ambient pressure Patm=0.1 MPa. Wherein the Young's modulus E and Poisson's ratio μ are found in the handbook "Springer handbook condensed material and materials data".
The mixed gas 9 is D2And T2And mixing the gases, measuring the expansion increment delta L =2.3 μm of the diameter of the microsphere 8, and calculating the gas pressure P =1.5 MPa of the mixed gas 9 in the microsphere 8.
Example 3
The embodiment of the present embodiment is basically the same as embodiment 1, and the main differences are that:
the inner surface of the recess of the reflector 10 is a tin coating having a reflectivity of 90%.
The microspheres 8 are polypropylene microspheres with an inner diameter d1=600 μm, shell thickness t0=20 μm, young modulus E =1.1 GPa of microsphere 8 shell layer, poisson ratio μ =0.3, and ambient pressure Patm=0.1 MPa. Wherein the Young's modulus E and Poisson's ratio μ are found in the handbook "Springer handbook condensed material and materials data".
The mixed gas 9 is D2、 T2And3he mixed gas, the increase in diameter expansion Δ L =5.1 μm of the microspheres 8 measured, and the gas pressure P =1.8 MPa of the mixed gas 9 inside the microspheres 8 calculated.
The present invention is not limited to the above-described embodiments, and those skilled in the art will be able to make various modifications without creative efforts from the above-described conception, and fall within the scope of the present invention.
Claims (9)
1. A device for measuring the pressure intensity of mixed gas in a transparent microsphere is characterized by comprising an interference light path, a reflector (10), a five-axis displacement table (11), a computer (14), an image acquisition card (15) and a five-axis displacement table controller (16);
the interference light path comprises an area array detector (1), a condenser lens (2), a spectroscope I (3), a lens (4), a point light source (5), a spectroscope II (6), an objective lens I (7), an objective lens II (12) and a reflector (13); light emitted by the point light source (5) is incident to the spectroscope I (3) through the lens (4), is reflected at the spectroscope I (3), and is divided into reference light and measurement light through the spectroscope II (6), wherein the reference light is focused to the reflector (13) through the objective lens II (12) after being reflected by the spectroscope II (6), the measurement light is focused to the microsphere (8) through the objective lens I (7) after being transmitted at the spectroscope II (6), the light respectively returned by the reflector (13) and the microsphere (8) is converged at the spectroscope II (6) and is interfered to form interference light, the interference light is transmitted to the condenser lens (2) through the spectroscope I (3) and is focused to the area array detector (1) to form an interference image, and the interference image is transmitted to the computer (14) through the image acquisition card (15);
the five-axis displacement platform (11) is fixed with a reflector (10), microspheres (8) are placed on the reflector (10), the five-axis displacement platform controller (16) controls the five-axis displacement platform (11) to drive the reflector (10) to move, and the image acquisition card (15) controls the area array detector (1) to acquire images.
2. The apparatus of claim 1, wherein the apparatus comprises: the five-axis displacement platform (11) is a five-degree-of-freedom motion mechanism and realizes X-axis, Y-axis, Z-axis, pitching and rolling motions, and the five-axis displacement platform (11) is one or a combination of more than two of a piezoelectric ceramic displacement platform, a stepping motor displacement platform and a manual displacement platform.
3. The apparatus of claim 1, wherein the apparatus comprises: the reflector (10) is of a groove structure, the inner surface of the groove is a metal coating with the reflectivity of more than 90%, and the left and right bulges of the groove limit the movement of the microspheres (8).
4. The apparatus of claim 1, wherein the apparatus comprises: the reflecting mirror (13) is formed by combining a plurality of reflecting mirrors with different reflectivities which are uniformly distributed on the circumference, a rotating shaft is arranged on the circle center of the circumference and is vertical to the circumferential plane, the rotating shaft drives the reflecting mirror to rotate, and the matched reflecting mirror is selected according to the intensity of a measuring optical signal during measurement.
5. The method for the apparatus for measuring the pressure of a mixed gas in transparent microspheres according to claim 1, comprising the steps of:
a. pumping the interior of the microspheres (8) with hollow structures to vacuum;
b. placing the microspheres (8) on a reflector (10), placing the reflector (10) on a five-axis displacement table (11), driving the reflector (10) to move horizontally by the five-axis displacement table (11), moving the microspheres (8) to the position below an objective lens I (7), and controlling the five-axis displacement table (11) to adjust the level to ensure that the optical axis of the objective lens I (7) is perpendicular to the reflector (10);
c. a five-axis displacement table (11) drives a reflector (10) to move along the Z-axis direction, so that the focal plane of an objective lens I (7) is 5 microns higher than the upper vertex of the outer surface of the microsphere (8), and the position of the five-axis displacement table at the moment is defined as the Z-axis initial position;
d. starting the point light source (5), and controlling the area array detector (1) to collect an interference image I by the computer (14) through the image collecting card (15)0；
e. The five-axis displacement platform (11) controls the microspheres (8) to move in a stepping manner along the Z-axis direction, and after each step is moved, the computer (14) controls the area array detector (1) to collect an interference image I through the image collection card (15)1Interference image InUntil the focal plane of the objective lens I (7) exceeds the lower vertex of the outer surface of the microsphere (8);
f. taking out the microspheres (8), and filling mixed gas (9) into the microspheres (8) by adopting an inflation technology;
g. repeating the steps b to e until the interference image II of the inflated microspheres (8)0Interference image IImFinishing the collection;
h. extracting interference image I0Interference image InCenter point P of microsphere (8) in each image1And the fixed point Q on the reflector (10) other than the microspheres (8)1The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate1And Q1The gray scale curve is obtained by a quadratic fitting peak-searching algorithm1Obtaining the Z-axis coordinate Z of the top point on the outer surface of the microsphere (8) from the gray curve of the point1Z axis of the apex on the inner surface of the microsphere (8)Coordinate z2Z-axis coordinate of lower vertex of inner surface of microsphere (8)3Z-axis coordinate of lower vertex of outer surface of microsphere (8)4(ii) a At Q1Obtaining Q from the gray curve of the point1Z-axis coordinate Z of point5Calculating the optical thickness t, t = z of the shell of the microsphere (8)2-z1Inner diameter d of the microspheres (8)1，d1= z3-z2Lower vertex of the outer surface of the microsphere (8) and Q1Optical path difference l of point in Z-axis direction1，l1=z4-z5；
i. Extracting interference image II0Interference image IImCenter point P of microsphere (8) in each image2And the fixed point Q on the reflector (10) other than the microspheres (8)2The gray value of (1) is respectively drawn by taking the initial position of the Z axis as an origin, the position of the Z axis as an abscissa and the gray value as an ordinate2And Q2The gray scale curve is obtained by a quadratic fitting peak-searching algorithm2Obtaining the Z-axis coordinate Z of the top point on the outer surface of the inflated microsphere (8) from the gray curve of the point6Z-axis coordinate of the apex on the inner surface of the microsphere (8)7Z-axis coordinate of lower vertex of inner surface of microsphere (8)8Z-axis coordinate of lower vertex of outer surface of microsphere (8)9(ii) a At Q2Obtaining Q from the gray curve of the point2Z axis coordinate Z10Calculating the optical path d corresponding to the inner diameter length of the microsphere (8)2，d2= z8- z7Lower vertex of the outer surface of the microsphere (8) and Q2Optical path difference l of point in Z-axis direction2，l2=z9-z10；
j. By means of1=2(n1-1)t0，l2=2(n1-1)t0+(n-1)d1，t=n1t0The refractive index n of the shell of the microsphere (8) can be obtained1Thickness t of shell layer of microsphere (8)0And the refractive index n of the mixed gas;
k. using n = d2/( d1+ Δ L), solving to obtain the diameter expansion amount Δ L of the inflated microspheres (8);
young's modulus E, Poisson ratio μ, external, through a known microsphere shellAmbient pressure PatmAnd measuring the resulting microspheres (8) for the amount of diametric swelling DeltaL, the internal diameter d1And shell thickness t0And calculating the gas pressure P of the mixed gas (9) in the microspheres (8) by a static pressure state equation.
6. The method of claim 5, wherein the pressure of the gas mixture in the transparent microsphere is measured by: the shell material of the microsphere (8) is one of glass or transparent hydrocarbon polymer.
7. The method of claim 5, wherein the apparatus for measuring the pressure of the gas mixture in the transparent microspheres comprises: the inflation technology is high-pressure gas permeation inflation technology.
8. The method of claim 5, wherein the apparatus for measuring the pressure of the gas mixture in the transparent microspheres comprises: the mixed gas (9) is more than two kinds of mixed gas, and the pressure P of the mixed gas (9) is more than or equal to 10 times of the environmental pressure Patm。
9. The method of claim 5, wherein the apparatus for measuring the pressure of the gas mixture in the transparent microspheres comprises: the static pressure state equation is as follows:
the displacement equation of the microspheres (8) under the combined action of the internal mixed gas (9) and the external atmospheric environment is as follows:
(1)
the pressure equation of the microspheres (8) under the combined action of the internal mixed gas (9) and the external atmospheric environment is as follows:
(2)
wherein,is the displacement increment of the radius of the microsphere (8) in the radial direction;ris the radius of the sphere;is the pressure on the surface of the microsphere (8);
the analytical formula of formula (1) is:
(3)
a, B is a constant to be solved;
substituting formula (3) for formula (2) to obtain:
(4)
at the inner surface of the microspheres (8),(ii) a At the outer surface of the microspheres (8),(ii) a Wherein,= d1the/2 is the inner radius of the microsphere (8),= d1/2+t0the outer radius of the microsphere (8);
will be provided withIn the formula (3), A, B and the gas pressure P of the gas (9) mixed in the microspheres (8) are determined by solving the formula (3) and the formula (4).
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