CN106052725A - Z-X axis magnetoresistance sensor - Google Patents
Z-X axis magnetoresistance sensor Download PDFInfo
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- CN106052725A CN106052725A CN201610403592.0A CN201610403592A CN106052725A CN 106052725 A CN106052725 A CN 106052725A CN 201610403592 A CN201610403592 A CN 201610403592A CN 106052725 A CN106052725 A CN 106052725A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
Abstract
The invention provides a Z-X axis magnetoresistance sensor for measuring parameters of a gear or multiple magnetic poles. The magnetoresistance sensor is a single-chip Z-X axis magnetoresistance sensor, and comprises a substrate in an X-Y plane, long-bar-type soft magnetic flux concentrators arranged on the substrate and magnetoresistance sensing unit strings arranged on the upper or lower surfaces of the soft magnetic flux concentrators and having X-directional magnetic sensitive direction. The magnetoresistance sensing unit strings comprise a reference magnetoresistance sensing unit string arranged on an Y-axis centre line of the soft magnetic flux concentrator, a push magnetoresistance sensing unit string and a pull magnetoresistance sensing unit string, which are arranged at the two sides of the Y-axis centre line and are equidistant to the Y-axis centre line, and a sensitive magnetoresistance sensing unit string arranged between the two soft magnetic flux concentrators, wherein the push and pull magnetoresistance sensing unit strings and the reference and sensitive magnetoresistance sensing unit strings are in stagger arrangement, and are connected into a reference bridge-type X-axis sensor and a push-pull bridge-type Z-axis sensor. The Z-X axis magnetoresistance sensor has the advantages of being simple in sensor structure, high in flexibility, low in power consumption and small in size, and capable of measuring the gear or multiple magnetic poles in any period interval.
Description
Technical field
The present invention relates to magnetic sensor field, particularly to a kind of Z-X axle magnetic resistance sensor.
Background technology
Magneto-resistor gear or many magnetic pole sensors are widely used in measuring speed and displacement, and its middle gear includes planar strip
Band-shaped gear or circular gear, now, rely on the back of the body magnetic and gear between formed magnetic circuit, and gear motion time its tooth root and
Tooth top in the change in the cycle in magnetic field produced by magnetic resistance sensor surface, forms sinusoidal form when sequentially passing through back of the body magnetic
Output signal；Many magnetic pole sensors are then incremental encoder, use the band-shaped or circular NS of planar strip to replace free pole, from
On magnetic resistance sensor, produced magnetic field by magnetic pole, form the output signal of sinusoidal form, it is generally the case that magnetic resistance sensor
When output two-way phase contrast is the sinusoidal signal of 90 degree, output voltage signal has maximum, it is possible to determine that sensor is relative
In gear or the position of many magnetic poles and the translational speed of the latter.
Under normal circumstances, magnetic resistance sensor is gradient type, including X or the Z axis magnetoelectricity of two groups of separate features distances
Resistance sensor unit, and the periodic distance that characteristic distance is gear or many magnetic poles 1/4 time, both phase contrasts are 90, now
Output signal is the strongest.
But, for the Cycle Length of gear or many magnetic poles bigger time, also require that in magnetic resistance sensor two groups accordingly
Magneto-resistor sensing unit to separate bigger characteristic distance too, and this defines for size and the encapsulation of magnetic resistance sensor
Challenge.
Patent CN104197828A discloses a kind of single-chip off-axis magneto-resistor Z-X angular transducer and measuring instrument recently,
Including a direction of magnetization along circular the two poles of the earth shape magnetic coder code-disc radially, and the Z-X angular transducer of a single-chip,
Described Z-X angular transducer is positioned at the tangential direction of circular code wheel, including an X-axis magnetic resistance sensor along substrate, and
One Z axis magnetic resistance sensor being perpendicular to substrate, during test, Z-direction is along the diametric(al) of magnetic coder code-disc, and X-axis
Direction is along the tangential direction of magnetic coder code-disc, it is achieved thereby that the output of two sinusoidal signals that two differences are 90 degree, its
Feature is that X-axis and Z axis magnetic resistance sensor are positioned at same chip, and can be single-chip, and is not separated by characteristic distance
Requirement.
For the measurement problem of gear or many position of magnetic poles and speed, the present invention proposes a kind of new scheme, i.e. uses
X-Z magnetic resistance sensor, utilizes the X-axis of magnetic circuit, z-component as magnetic signal, realizes gear or many position of magnetic poles and speed
Measurement.
Summary of the invention
For the measurement problem of gear or many position of magnetic poles and speed, the present invention proposes a kind of new scheme, i.e. uses
Z-X magnetic resistance sensor, utilizes the X-axis of magnetic circuit, z-component as magnetic signal, realizes gear or many position of magnetic poles and speed
Measurement.
A kind of Z-X axle magnetic resistance sensor proposed by the invention, is used for detecting tested device such as gear or many magnetic poles
Position, the direction of motion, speed and acceleration, described Z-X axle magnetic resistance sensor is positioned at parallel with the incisal plane of tested device
And on the working face of described incisal plane predetermined gap, the X-axis magnetic-field-sensitive direction of described Z-X axle magnetic resistance sensor is put down
Row is in described incisal plane and along the tangential motion direction of described tested device, and the Z axis magnetic field of described Z-X axle magnetic resistance sensor is quick
Sense direction is perpendicular to described incisal plane, and described tested device is gear or many magnetic poles, and described Z-X axle magnetic resistance sensor is single
Sheet Z-X axle magnetic resistance sensor, including:
The substrate being positioned on X-Y plane, is positioned at the major axis on described substrate, short axle arranged in parallel along Y, X-direction respectively
Multiple strip soft magnetism flux concentrators, and be positioned on described soft magnetism flux concentrator upper surface or lower surface along Y-direction
Multiple magnetic-field-sensitive directions arranged in parallel are along the magneto-resistor sensing unit string of X-axis；
Described magneto-resistor sensing unit string includes: the reference magneto-resistor being positioned on the Y-axis centrage of described flux concentrator
Sensing unit string, it is positioned at the sensitive magneto-resistor sensing unit string of the Y-axis centrage gap location of described flux concentrator, and respectively
Be positioned at described flux concentrator Y-axis centrage both sides and equidistant with described Y-axis centrage push away magneto-resistor sensing unit string and
Draw magneto-resistor sensing unit string, and described in push away magneto-resistor sensing unit string be electrically connected be connected into push arm, described in draw magneto-resistor sensing unit
String be electrically connected be connected into draw bow, described being electrically connected with reference to magneto-resistor sensing unit string is connected into reference arm, described sensitive magneto-resistor sensing unit
String is electrically connected and is connected into sensitive arm, described push arm, draws bow and described reference arm, sensitive arm connect into further and sense with reference to bridge-type X-axis
Device and push-pull bridge Z axis sensor, be respectively used to detect X and Z axis magnetic-field component；The described magnetoelectricity with reference to bridge-type X-axis sensor
Resistance sensing unit string is staggered with the magneto-resistor sensing unit string of described push-pull bridge Z axis sensor.
Preferably, the magneto-resistor sensing unit forming described magneto-resistor sensing unit string is that GMR or TMR magneto-resistor sensing is single
Unit, includes Seed Layer, lower electrode layer, nailed layer, pinning layer, sealing coat, free layer, bias layer the most successively, powers on
Pole layer and cover layer, the material of described sealing coat is Al2O3, MgO or metal, and described bias layer is exchange-biased layer or forever
Magnetic bias layer.
Preferably,
Described nailed layer is positioned at the described pinning layer side away from described sealing coat；
Described exchange-biased layer is positioned at the described free layer side away from described sealing coat；
Least one layer of ferromagnetic in described free layer, described nailed layer, described nailed layer and described bias layer
Material is made up of the high magnetic permeability soft magnetic materials of at least one comprised in Fe, Co, Ni.
Preferably, the described nailed layer direction of magnetization is X-direction, and the described free layer direction of magnetization is Y direction.
Preferably, described with reference to magneto-resistor sensing unit string, push away magneto-resistor sensing unit string, draw magneto-resistor sensing unit string
Corresponding described soft magnetism flux concentrator is for occupying soft magnetism flux concentrator, and remaining described soft magnetism flux concentrator is vacant soft
Magnetic flux concentrator, described with reference to magneto-resistor sensing unit string, push away magneto-resistor sensing unit string, draw magneto-resistor sensing unit displacement
Occupy on soft magnetism flux concentrator or lay respectively at described in same and occupy described in three on soft magnetism flux concentrator or respectively
It is positioned at described in two and occupies on soft magnetism flux concentrator；Described sensitive magneto-resistor sensing unit displacement is in two described vacant soft magnetisms
Between flux concentrator or occupying between soft magnetism flux concentrator described in two or be positioned at a described vacant soft magnetism flux
Occupy between soft magnetism flux concentrator described in concentrator and one.
Preferably, push away magneto-resistor sensing unit string described in and described magneto-resistor sensing unit string of drawing occupies and N number of recommends magnetoelectricity
Resistance sensing unit region R1, R2 ..., RN, described reference magneto-resistor sensing unit string and described sensitive magneto-resistor sensing unit string
Occupy M with reference to sensitive magneto-resistor sensing unit region P1, P2 ..., PM, described staggered pattern be following any one, two
Planting or the combination of three kinds: N is integer and N >=1, M is integer and M >=1；
1) during N=M, (R1, P1) ... (Ri, Pi) ..., (RN, PM) or (P1, R1) ... (Pi, Ri) ..., (PM, RN)；
2) N=2i, M=2i-1, time；
R1,(P1,R2),…(Pi-1,Ri),(Pi),(Ri+1,Pi+1),…(R2i-1,P2i-1),R2i；
Or N=2i-1, M=2i, time；
P1,(R1,P2),…(Ri-1,Pi),(Ri),(Pi+1,Ri+1),…(P2i-1,R2i-1),P2i
3) N=2j-1, M=2j-2,
(R1,P1),…(Rj-1,Pj-1),Rj,(Pj,Rj+1),…,(P2j-2,R2j-1)
Or M=2j-1, N=2j-2,
(P1,R1),…(Pj-1,Rj-1),Pi,(Rj,Pj+1),…,(R2j-2,P2j-1)；
Described i is integer and i >=1, and j is integer and j >=2.
Preferably, recommend described in magneto-resistor sensing unit region comprise one or more push away magneto-resistor sensing unit string, with
And one or more magneto-resistor sensing unit string of drawing, described comprise one or more quick with reference to sensitive magneto-resistor sensing unit region
Sense magneto-resistor sensing unit string and one or more sensitive magneto-resistor sensing unit string.
Preferably, described in recommend gap between the soft magnetism flux concentrator in magneto-resistor sensing unit region identical, described
Identical with reference to gap between the soft magnetism flux concentrator in sensitive magneto-resistor sensing unit region.
Preferably,
The magnetic pole that described many magnetic poles comprise has the intensity of magnetization being parallel to tangential direction, and adjacent two described magnetic poles divide
Not there is the antiparallel intensity of magnetization or be respectively provided with magnetic reversal intensity clockwise Yu counterclockwise,
Or the magnetic pole comprised has the intensity of magnetization being perpendicular to direction, described incisal plane, and described adjacent two magnetic poles divide
Not there is the antiparallel intensity of magnetization or be respectively provided with centripetal and centrifugal magnetic reversal intensity.
Preferably, described tested device also includes for providing magnetic field to magnetize the back of the body magnetic of described gear；Wherein,
Described back of the body magnetic is cuboid permanent-magnet alloy, and its width and short transverse are quick along described X-axis and Z axis magnetic field respectively
Sense direction, and its direction of magnetization is along described Z axis magnetic-field-sensitive direction；
Or,
Described back of the body magnetic is cylindrical magnet alloy material, and its direction of magnetization and axial direction are all along described Z axis magnetic-field-sensitive
Direction；
Or,
Described back of the body magnetic is the square permanent-magnet alloy that surface has Baltimore groove, and described Baltimore groove plane perpendicular is in described Z
Axle sensitive direction, and the direction of magnetization is along described Z axis magnetic-field-sensitive direction.
Preferably, described Z-X axle magnetic resistance sensor is between described back of the body magnetic and described gear, and is positioned at described back of the body magnetic
Surface.
Preferably,
During described gear testing, described back of the body magnetic width is more than 0.5 times of described gear period pitch；
Or,
During described gear testing, the specific gap between described Z-X axle magnetic resistance sensor and described gear is more than 0.1
Times and less than 1.0 times of described gear period pitch.
It is simple that the present invention has sensor construction, highly sensitive, low-power consumption, small size, and during any week can be measured
Away from gear and the advantage of many magnetic poles.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present application or technical scheme of the prior art, below will be to embodiment or existing
In having technology to describe, the required accompanying drawing used is briefly described, it should be apparent that, the accompanying drawing in describing below is only this
Some embodiments described in application, for those of ordinary skill in the art, in the premise not paying creative work
Under, it is also possible to other accompanying drawing is obtained according to these accompanying drawings.
Fig. 1 is strip gear and sensor test figure；
Fig. 2 is the many magnetic poles of strip and the sensor test figure of perpendicular magnetization；
Fig. 3 is the many magnetic poles of strip and the sensor test figure of parallel magnetization；
Fig. 4 is the many magnetic poles of wheel shape and the sensor test figure of diametrical magnetization；
Fig. 5 is the normal direction many magnetic poles of magnetized wheel shape and sensor test figure；
Fig. 6 is gear wheels and sensor test figure；
Fig. 7 is that traditional X-ray is to gear or many magnetic pole sensors structure chart；
Fig. 8 is that traditional Z is to gear or many magnetic pole sensors structure chart；
Fig. 9 be traditional X-ray to or Z-direction gear or many magnetic pole sensors signal output figure；
Figure 10 is single-chip Z-X gear or many magnetic pole sensors structure chart；
Figure 11 is Z-X gear or many magnetic pole sensors signal output figure；
Figure 12 is single-chip Z-X magnetoelectricity group sensor construction figure；
Figure 13 a is magnetoelectricity group sensing unit structures figure；
Figure 13 b is magnetoelectricity group sensing unit direction of magnetization schematic diagram；
Figure 14 a is that X-axis magnetic resistance sensor is for reference to bridge architecture figure；
Figure 14 b be Z axis magnetic resistance sensor be push-pull bridge structure chart
Figure 15 a is with reference to magneto-resistor sensing unit string location diagram；
Figure 15 b is for pushing away or draw magneto-resistor sensing unit string location diagram；
Figure 15 c is for drawing or push away magneto-resistor sensing unit string location diagram；
Figure 16 a is reference during a corresponding soft magnetism flux concentrator, pushes away and draw magneto-resistor sensing unit string location diagram；
Figure 16 b is reference during corresponding three magneto-resistor sensing unit strings, pushes away and draw magneto-resistor sensing unit string position relationship
Figure；
Figure 16 c is reference during corresponding two magneto-resistor sensing unit strings, pushes away and draw magneto-resistor sensing unit string position relationship
Figure；
Sensitivity magneto-resistor sensing unit string location diagram when Figure 17 a is corresponding two vacant soft magnetism flux concentrators；
Sensitivity magneto-resistor when Figure 17 b occupies soft magnetism flux concentrator for a corresponding vacant soft magnetism flux concentrator and one
Sensing unit string location diagram；
Figure 17 c occupies schematic diagram between soft magnetism flux concentrator for sensitive magneto-resistor sensing unit displacement in two；
Figure 18 a is vacant soft magnetism flux concentrator schematic diagram；
Figure 18 b is for occupying soft magnetism flux concentrator schematic diagram；
Figure 19 a is the arrangement mode schematic diagram of 4000；
Figure 19 b is the arrangement mode schematic diagram of 4001；
Figure 20 a is the arrangement mode schematic diagram of 4002；
Figure 20 b is the arrangement mode schematic diagram of 4003；
Figure 21 a is the arrangement mode schematic diagram of 4004；
Figure 21 b is the arrangement mode schematic diagram of 4005；
Figure 22 is magneto-resistor sensing unit string arrangement mode one schematic diagram on Z-X magnetic resistance sensor；
Figure 23 is magneto-resistor sensing unit string arrangement mode two schematic diagram on Z-X magnetic resistance sensor；
Figure 24 is magneto-resistor sensing unit string arrangement mode three schematic diagram on Z-X magnetic resistance sensor；
Figure 25 is magneto-resistor sensing unit string arrangement mode four schematic diagram on Z-X magnetic resistance sensor；
Figure 26 is magneto-resistor sensing unit string arrangement mode five schematic diagram on Z-X magnetic resistance sensor；
Figure 27 is that block shape carries on the back magnetic structure schematic diagram；
Figure 28 is cylindrical back of the body magnetic structure schematic diagram；
Figure 29 is that throat block shape carries on the back magnetic structure schematic diagram.
Detailed description of the invention
Below with reference to the accompanying drawings and in conjunction with the embodiments, the present invention is described in detail.
Embodiment one
Fig. 1-6 is common several gears and many magnetic poles and magnetic resistance sensor instrumentation plan.Fig. 1 is strip gear
And magnetic resistance sensor instrumentation plan, wherein 10 is strip gear, including tooth head 20 and tooth head gap 21, between the two
The period pitch that distance is strip gear, 40 is gear sensor, is located parallel to the plane 81 of strip gear teeth tips
On, and the distance specific gap of tooth top, additionally include the back of the body magnetic 3 being positioned at gear sensor surface, wherein gear sensor 40
Between back of the body magnetic 3 and strip gear 10, wherein strip gear 10 is magnetically soft alloy material, and carrying on the back magnetic 3 is magnetically hard alloy material
Material.
Fig. 2 and Fig. 3 is two kinds of forms of the many magnetic poles of strip and magnetic resistance sensor instrumentation plan, wherein long in Fig. 2
The many magnetic poles of strip 12 in the many magnetic poles of bar shaped 11 and Fig. 3 all include multiple free pole, and adjacent two free poles have
The contrary direction of magnetization, the wherein direction of magnetization of adjacent the free pole 30 and 31 respectively Z-direction in Fig. 2, and the phase in Fig. 3
Adjacent free pole 40 and 41 is respectively the direction of magnetization of X-direction, and described free pole is permanent-magnet alloy, and many magnetic poles sense
Device 41 and 42 lays respectively in the plane 82 and 83 being parallel to the many magnetic poles of strip 11 and 12 surface, and the many magnetic poles of distance bar shaped
Specific gap, surface, the many magnetic poles of strip have specific period spacing.
Fig. 4 and Fig. 5 is respectively two kinds of forms of the many magnetic poles of wheel shape and magnetic resistance sensor instrumentation plan, wherein in Fig. 4
Wheel shape free pole 14 in wheel shape free pole 13 and Fig. 5 all comprises multiple circular arc free pole, and adjacent two freedom
The adjacent free pole 50 and 51 that magnetic pole has in the contrary direction of magnetization, i.e. Fig. 4 under polar coordinate is respectively centripetal and centrifugal
Direction, and adjacent free pole 60 and 61 in Figure 5 is respectively positive theta and anti-theta angle direction, its period pitch is
Circular arc corresponding to Theta, the most magnetic pole sensors 43 and 44 lay respectively at and are parallel to the many magnetic poles of wheel shape 13 and 14 incisal plane
Plane 84 and 85 on, and distance specific gap, incisal plane.
Fig. 6 is gear wheels and magnetic resistance sensor instrumentation plan, wherein the distribution of tooth head 70 period circular, adjacent teeth head
Gap is 71, and equally, its period pitch is the circular arc corresponding to Theta, and described gear 15 is magnetically soft alloy alloy material, magnet-wheel
Sensor 45 is located parallel in the plane 86 in described magnet-wheel incisal plane, and distance specific gap, gear incisal plane, additionally wraps
Including back of the body magnetic 7, be positioned at gear sensor 45 surface, back of the body magnetic 7 is permanent-magnet alloy.
Embodiment two
Fig. 7 and 8 is respectively traditional gear or many magnetic pole sensors 100 and 101 structure chart, its middle gear or many magnetic poles and passes
Sensor 100 and 101 includes two sensing units 200,201 and 300 and of two separate features spacing 1 and feature pitch respectively
301, wherein two the magneto-resistor sensing units 200 and 201 in Fig. 7 have X-axis magnetic-field-sensitive direction Hx1 and Hx2, in Fig. 8
Two magneto-resistor sensing units 300 and 301 have Z axis magnetic-field-sensitive direction Hz1 and Hz2, be more than at strip magnetic pole or
Coordinate representation method under gear, for gear wheels or magnetic pole, under polar coordinate, the direction of its corresponding X-axis is Theta angle
Degree, the direction of corresponding Z axis is r direction.
Fig. 9 is the signal output figure of the conventional gears shown in corresponding diagram 7 and Fig. 8 or many magnetic pole sensors, output signal
When V1 and V2 is two sines or the cosine signal that phase contrast is 90 degree, its outgoing position signal is the strongest, now, for conventional tooth
It must is fulfilled for as follows between wheel or the feature pitch of many magnetic pole sensors 100 and 101 and many magnetic poles or the period pitch of gear
Relation, i.e. feature pitch are the 1/4 of period pitch, therefore for many magnetic poles or the gear of large period spacing, corresponding requirement
Two magneto-resistor sensing units increase mounting distance, cause chip size excessive.
Embodiment three
The structure chart of a kind of single-chip Z-X magnetic resistance sensor that Figure 10 is proposed by the application, wherein single-chip Z-X magnetic
Electric resistance sensor 102, comprises single magneto-resistor sensing unit 400, it is possible to responds X-axis magnetic field and Y-axis magnetic field, comprises X
Axle magnetic resistance sensor and Z axis magnetic resistance sensor, X and Z axis magnetic resistance sensor have identical magnetic-field-sensitive region, and phase
The most staggered.
When Figure 11 is the different types of gear shown in Fig. 1-6 or the work of many magnetic pole sensors, when gear or many magnetic
When pole is relative to one period pitch of sensor relative movement, X-axis magnetic-field component on sensing station and Z axis magnetic-field component
Scattergram, it can be seen that X-axis magnetic-field component Bx and Z axis magnetic-field component Bz all have sine and cosine feature, and phase contrast is 90
Degree, there is the effect identical with conventional gears or many magnetic pole sensors, it is necessary to emphasize a bit, for shown in Fig. 2-5
Many magnetic poles, sensor can meet working condition on any gap of many magnetic pole surfaces, but for the gear shown in Fig. 1 and 6
Sensor, it is necessary to meet certain working clearance scope, additionally, its back of the body magnetic must also meet certain width, and along during week
The width in gap direction, its working clearance scope is, back of the body magnetic width more than 0.5 times of described gear period pitch, working clearance is
More than 0.1 less than 1.0 times of described gear period pitch.
Having an advantage in that, described single-chip Z-X magnetic resistance sensor need not separate features spacing, but to the same area
X magnetic field and Z magnetic-field component measure, therefore Z-X magnetic resistance sensor is smaller.
Embodiment four
A kind of single-chip Z-X magnetic resistance sensor 900 that Figure 12 is proposed by the application, including being positioned on X-Y plane
Substrate 901, is positioned at the magneto-resistor sensing unit layer 902 above substrate, and soft magnetism flux concentrator layer 903, and magneto-resistor passes
Sense elementary layer 902 is positioned at soft magnetism flux concentrator layer 903 upper surface or lower surface, and Figure 13 is magneto-resistor sensing unit structures
Figure, Figure 13 a magnetoelectricity group sensing unit 800 includes successively, Seed Layer 801, lower electrode layer 802, pinning layer 803, nailed layer
804, sealing coat 805, free layer 806, bias layer 807, upper electrode layer 808 and protective mulch 809, wherein sealing coat 805
Can be Al2O3, MgO or metal level Cu, free layer 806 or nailed layer 804 be that the high magnetic permeability comprising Fe, Co, Ni is soft
Permalloy material, nailed layer is antiferromagnet IrMn or PtMn, or comprises ferromagnetic material layers/metal intermediate layer/ferrum
Flux material layer, bias layer be permanent-magnet alloy layer or exchange-biased layer such as antiferromagnet material layer such as PtMn or
IrMn, or comprise ferromagnetic material/metal intermediate layer/ferromagnetic material layers, Figure 13 b is the magnetoelectricity group sensing unit direction of magnetization, its
The middle free layer direction of magnetization is along long axis direction, and pinned layer magnetization direction is along short-axis direction, and both are 90 degree of angles.
Figure 14 is the bridge architecture figure of X-axis magnetic resistance sensor and Z axis magnetic resistance sensor, and wherein 14a show X-axis magnetic
Electric resistance sensor is with reference to bridge architecture, comprises with reference to magnetoelectricity group sensing unit and sensitive magnetoelectricity group sensing unit, and Figure 14 b is
Z axis magnetic resistance sensor is push-pull bridge structure, comprises and pushes away magnetoelectricity group sensing unit and draw magnetoelectricity group sensing unit.
Figure 15 is three kinds of magneto-resistor sensing unit string schematic diagrams, it is characterised in that magneto-resistor sensing unit displacement is in strip
On shape soft magnetism flux concentrator, wherein, 15a is with reference to magnetoelectricity group sensing unit string 3000, wherein magneto-resistor sensing unit string
On the 3003 Y-axis centrages 3002 being positioned at strip soft magnetism flux concentrator 3001, Figure 15 b and 15c respectively pushes away or draws magnetoelectricity
Group sensing unit string 3004,3008, wherein magnetoelectricity group sensing unit string 3006 and 3011 lays respectively at strip soft magnetism flux collection
The both sides of the centrage 3005 and 3010 of middle device 3007 and 3009, and distance center line same distance.
Figure 16 is the reference shown in Figure 15, pushes away, draws the arrangement architecture figure of magneto-resistor sensing unit string, wherein Figure 16 a
In 3013, three kinds of magneto-resistor sensing unit strings push away, draw magnetoelectricity group sensing unit string 3015 and 3013 and sense with reference to magneto-resistor
Unit string 3017 lays respectively on a strip soft magnetism flux concentrator, and in the 3018 of Figure 16 b, three kinds of magneto-resistor sensings are single
Unit's string i.e. pushes away magnetoelectricity group sensing unit string 3022, draws magneto-resistor sensing unit string 3023, with reference to magneto-resistor sensing unit string 3024
Laying respectively on three strip soft magnetism flux concentrators, in the 3025,3032 and 3038 of Figure 16 c, three kinds of magneto-resistor sensings are single
Unit's displacement is on two strip soft magnetism flux concentrators, and wherein the magneto-resistor sensing unit string 3029 and 3027 of recommending of 16c1 accounts for
According to one of them strip soft magnetism flux concentrator 3027, and occupy another strip with reference to magneto-resistor sensing unit string 3028
Soft magnetism flux concentrator 3026, Figure 16 c2 pushes away magnetoelectricity group sensing unit string 3035 and accounts for reference to magneto-resistor sensing unit string 3034
According to one of them soft magnetism flux concentrator 3034, draw magneto-resistor sensing unit string 3037 and then occupy another soft magnetism flux concentrator
In 3033, Figure 16 c3, draw magneto-resistor sensing unit string 3043 and to occupy one of them soft with reference to magneto-resistor sensing unit string 3042
Magnetic flux concentrator 3039, pushes away magnetoelectricity group sensing unit string 3041 and occupies another soft magnetism flux concentrator 3040.
Figure 17 is the location drawing of sensitive magneto-resistor sensing unit, and in 17a, 3044 is sensitive magneto-resistor sensing unit string 3047
Between two vacant soft magnetism flux concentrators 3045 and 3046, in 17b, 3048 is sensitive magneto-resistor sensing unit string 3051
Occupying between soft magnetism flux concentrator 3059 a vacant soft magnetism flux concentrator 3049 and one, in 17c, 3052 is quick
Sense magneto-resistor sensing unit string 3055 occupies between soft magnetism flux concentrator 3052 and 3053 at two.
Figure 18 is strip soft magnetism flux concentrator type map, and wherein 3056 in 18a are vacant soft magnetism flux concentrator,
There is no any magneto-resistor sensing unit string above, and 18b is for occupying soft magnetism flux concentrator, has magneto-resistor sensing unit above
String, the effect of vacant type soft magnetism flux concentrator is so that magneto-resistor sensing unit string present position has uniform magnetic field, or
Person makes magneto-resistor sensing unit string meet the feature of spatial symmetry distribution.
Embodiment five
Figure 19-21 is the typical magneto-resistor sensing unit string arrangement figure of single-chip Z-X magnetic resistance sensor, in order to ensure
It is interval that X-axis magnetic resistance sensor and Z axis magnetic resistance sensor have identical magnetic field induction, it is desirable to X-axis magneto-resistor sensing unit
Reference corresponding to string, sensitive magneto-resistor sensing unit string and pushing away corresponding to Z axis magneto-resistor sensing unit string, draw magneto-resistor and pass
Sense unit string is staggered, it is assumed that pushes away magneto-resistor sensing unit string and draws magneto-resistor sensing unit string and occupy N (N is for more than or equal to 1
Integer) individual recommend magneto-resistor sensing unit region R1, R2 ..., RN, pass with reference to magneto-resistor sensing unit string and sensitive magneto-resistor
It is individual with reference to sensitivity magneto-resistor sensing unit region P1, P2 that sense unit string occupies M (M is the integer more than or equal to 1) ..., PM, then hand over
Wrong arrangement mode be following any one, two kinds or the combination of three kinds:
1) during N=M, (R1, P1) ... (Ri, Pi) ..., (RN, PM) or (P1, R1) ... (Pi, Ri) ..., (PM, RN)；
2) N=2i, M=2i-1, time (i is the integer more than or equal to 1)；
R1,(P1,R2),…(Pi-1,Ri),(Pi),(Ri+1,Pi+1),…(R2i-1,P2i-1),R2i；
Or N=2i-1, M=2i, time (i is the integer more than or equal to 1)；
P1,(R1,P2),…(Ri-1,Pi),(Ri),(Pi+1,Ri+1),…(P2i-1,R2i-1),P2i
3) N=2i-1, M=2i-2, time (i is the integer more than or equal to 2)；
(R1,P1),…(Ri-1,Pi-1),Ri,(Pi,Ri+1),…,(P2i-2,R2i-1)
Or M=2i-1, N=2i-2, (i is the integer more than or equal to 2)
(P1,R1),…(Pi-1,Ri-1),Pi,(Ri,Pi+1),…,(R2i-2,P2i-1)
Wherein in Figure 19 a 4000 with respectively the first arrangement mode corresponding of 4001 in 19b, 4000 are arranged as Z1/X1/
Z2/X2/Z3/X3,4001 are arranged as X1/Z1/X2/Z2/X3/Z3.
Figure 20 is corresponding the second arrangement mode, and wherein 4002 in 20a are arranged as X1/Z1/X2/Z2/Z3/X3/Z4/
X4, wherein, Z2 and Z3 constitutes a common region, and 4003 in 20b are arranged as Z1/X1/Z2/X2/X3/Z3/X4/Z4,
Wherein, X2 and X3 constitutes a common region.
Figure 21 is the third arrangement mode corresponding, and wherein 4004 in 21a are arranged as X1/Z1/X2/Z2/X3/Z3/X4/
Z4/X5, and the 4005 of 21b are arranged as Z1/X1/Z2/X2/Z3/X3/Z4/X4/Z5.
Figure 22-26 corresponds to the magneto-resistor sensing unit arrangement figure of Z-X axle magnetic resistance sensor, and 5000 shown in Figure 22 are
A kind of corresponding with reference to, push away, draw magneto-resistor sensing unit displacement on a strip soft magnetism flux concentrator, and sensitive magneto-resistor
Sensing unit displacement occupies between soft magnetism flux concentrator in two, or sensitive magneto-resistor sensing unit displacement occupies soft in 1
Between magnetic flux concentrator and 1 vacant soft magnetism flux concentrator, its magneto-resistor sensing unit string puts in order and ties into the second
Structure.
Shown in Figure 23 shown in 5001 and Figure 24 in 5002, with reference to the corresponding soft magnetism flux concentration of magneto-resistor sensing unit string
Device, pushes away, draws corresponding 1 the common soft magnetism flux concentrator of magneto-resistor sensing unit string, and sensitive magneto-resistor sensing unit string is corresponding
Two occupy soft magnetism flux concentrator or a vacant soft magnetism flux concentrator and one occupy soft magnetism flux concentrator, in addition
Also having vacant soft magnetism flux concentrator to be positioned at X and Z intersection and edge, act as ensureing magnetic field homogeneity, its magneto-resistor passes
Sense unit string puts in order as X11/Z11/X12, or the staggered pattern of Z21/X22/Z22, X and Z the most corresponding multiple with
Class, with reference to magneto-resistor sensing unit string, is then staggered.
Shown in Figure 25 shown in 5003 and Figure 26 in 5004, magneto-resistor sensing unit string puts in order as another way；
Z31/X32/Z32/X32, or the staggered pattern of X41/Z41/X42/Z42, X and Z is the most corresponding multiple similar with reference to magnetoelectricity
Resistance sensing unit string, is then staggered.
It is pointed out that recommend magneto-resistor sensing unit region comprise one or more push away magneto-resistor sensing unit string,
And one or more magneto-resistor sensing unit string of drawing, comprise one or more sensitivity with reference to sensitive magneto-resistor sensing unit region
Magneto-resistor sensing unit string and one or more reference magneto-resistor sensing unit string.
Recommend gap between the soft magnetism flux concentrator in magneto-resistor sensing unit region identical, described reference, sensitive magnetic
Between soft magnetism flux concentrator in resistance sensing unit region, gap is identical.
Embodiment six
Figure 27-29 is respectively the back of the body several structure charts corresponding to magnetic, and wherein Figure 27 is that block shape carries on the back magnetic, and its direction of magnetization is edge
Short transverse, and magnetic resistance sensor is located in one of on magnetic pole N or S surface.
Figure 28 is that column carries on the back magnetic, and vertically, and magnetic resistance sensor is located in one of magnetic pole N or S to its direction of magnetization
On surface.
Figure 29 is that reeded block of shape back of the body magnetic is opened on surface, and its direction of magnetization is to be perpendicular to the direction of bottom portion of groove, and magnetoelectricity
Resistance sensor is positioned at out the top on reeded surface.
Although depicting the application by embodiment, it will be appreciated by the skilled addressee that the application have many deformation and
Change is without deviating from spirit herein, it is desirable to appended claim includes that these deformation and change are without deviating from the application's
Spirit.
Claims (12)
1. a Z-X axle magnetic resistance sensor, described Z-X axle magnetic resistance sensor be positioned at parallel with the incisal plane of tested device and
On the working face of described incisal plane predetermined gap, the X-axis magnetic-field-sensitive direction of described Z-X axle magnetic resistance sensor is parallel
In described incisal plane and along the tangential motion direction of described tested device, the Z axis magnetic-field-sensitive of described Z-X axle magnetic resistance sensor
Direction is perpendicular to described incisal plane, and described tested device is gear or many magnetic poles, it is characterised in that described Z-X axle magneto-resistor passes
Sensor is single-chip Z-X axle magnetic resistance sensor, including:
The substrate being positioned on X-Y plane, is positioned at the major axis on described substrate, short axle respectively along arranged in parallel multiple of Y, X-direction
Strip soft magnetism flux concentrator, and it is positioned on described soft magnetism flux concentrator upper surface or lower surface parallel along Y-direction
Multiple magnetic-field-sensitive directions of arrangement are along the magneto-resistor sensing unit string of X-axis；
Described magneto-resistor sensing unit string includes: the reference magneto-resistor sensing being positioned on the Y-axis centrage of described flux concentrator
Unit string, it is positioned at the sensitive magneto-resistor sensing unit string of the Y-axis centrage gap location of described flux concentrator, and lays respectively at
Described flux concentrator Y-axis centrage both sides also equidistant with described Y-axis centrage push away magneto-resistor sensing unit string and draw magnetic
Resistance sensing unit string, and described in push away magneto-resistor sensing unit string be electrically connected be connected into push arm, described in draw magneto-resistor sensing unit string electricity
Connect into draw bow, described being electrically connected with reference to magneto-resistor sensing unit string is connected into reference arm, described sensitive magneto-resistor sensing unit string electricity
Connect into sensitive arm, described push arm, draw bow and described reference arm, sensitive arm connect into further with reference to bridge-type X-axis sensor and
Push-pull bridge Z axis sensor, is respectively used to detect X and Z axis magnetic-field component；The described magneto-resistor with reference to bridge-type X-axis sensor passes
Sense unit string is staggered with the magneto-resistor sensing unit string of described push-pull bridge Z axis sensor.
A kind of Z-X axle magnetic resistance sensor the most according to claim 1, it is characterised in that form described magneto-resistor sensing
The magneto-resistor sensing unit of unit string is GMR or TMR magneto-resistor sensing unit, includes Seed Layer, bottom electrode the most successively
Layer, nailed layer, pinning layer, sealing coat, free layer, bias layer, upper electrode layer and cover layer, the material of described sealing coat is
Al2O3, MgO or metal, described bias layer is exchange-biased layer or permanent magnet bias layer.
A kind of Z-X axle magnetic resistance sensor the most according to claim 2, it is characterised in that
Described nailed layer is positioned at the described pinning layer side away from described sealing coat；
Described exchange-biased layer is positioned at the described free layer side away from described sealing coat；
Least one layer of ferromagnetic material in described free layer, described nailed layer, described nailed layer and described bias layer
It is made up of the high magnetic permeability soft magnetic materials of at least one comprised in Fe, Co, Ni.
A kind of Z-X axle magnetic resistance sensor the most according to claim 3, it is characterised in that described nailed layer magnetization side
To for X-direction, the described free layer direction of magnetization is Y direction.
A kind of Z-X axle magnetic resistance sensor the most according to claim 1, it is characterised in that described with reference to magneto-resistor sensing
Unit string, push away magneto-resistor sensing unit string, draw the described soft magnetism flux concentrator corresponding to magneto-resistor sensing unit string for occupying
Soft magnetism flux concentrator, remaining described soft magnetism flux concentrator is vacant soft magnetism flux concentrator, described with reference to magneto-resistor sensing
Unit string, push away magneto-resistor sensing unit string, draw magneto-resistor sensing unit displacement and occupy soft magnetism flux concentrator described in same
Go up or lay respectively to occupy on soft magnetism flux concentrator described in three or lay respectively at and described in two, occupy soft magnetism flux concentrator
On；Described sensitive magneto-resistor sensing unit displacement is between two described vacant soft magnetism flux concentrators or is positioned at described in two and accounts for
According between soft magnetism flux concentrator or be positioned at described in a described vacant soft magnetism flux concentrator and one and occupy soft magnetism flux collection
Between middle device.
A kind of Z-X axle magnetic resistance sensor the most according to claim 1, it is characterised in that described in push away magneto-resistor sensing single
Unit's string and described magneto-resistor sensing unit string of drawing occupy and N number of recommend magneto-resistor sensing unit region R1, R2 ..., RN, described reference
Magneto-resistor sensing unit string and described sensitive magneto-resistor sensing unit string occupy M with reference to sensitive magneto-resistor sensing unit region
P1, P2 ..., PM, described staggered pattern be following any one, two kinds or the combination of three kinds: N be integer and N >=1, M is
Integer and M >=1；
1) during N=M, (R1, P1) ... (Ri, Pi) ..., (RN, PM) or (P1, R1) ... (Pi, Ri) ..., (PM, RN)；
2) N=2i, M=2i-1, time；
R1,(P1,R2),…(Pi-1,Ri),(Pi),(Ri+1,Pi+1),…(R2i-1,P2i-1),R2i；
Or N=2i-1, M=2i, time；
P1,(R1,P2),…(Ri-1,Pi),(Ri),(Pi+1,Ri+1),…(P2i-1,R2i-1),P2i
3) N=2j-1, M=2j-2,
(R1,P1),…(Rj-1,Pj-1),Rj,(Pj,Rj+1),…,(P2j-2,R2j-1)
Or M=2j-1, N=2j-2,
(P1,R1),…(Pj-1,Rj-1),Pi,(Rj,Pj+1),…,(R2j-2,P2j-1)；
Described i is integer and i >=1, and j is integer and j >=2.
A kind of Z-X axle magnetic resistance sensor the most according to claim 6, it is characterised in that described in recommend magneto-resistor sensing
Unit area comprises and one or more push away magneto-resistor sensing unit string and one or more draw magneto-resistor sensing unit string, institute
State and comprise one or more sensitive magneto-resistor sensing unit string and one or more with reference to sensitive magneto-resistor sensing unit region
Sensitive magneto-resistor sensing unit string.
A kind of Z-X axle magnetic resistance sensor the most according to claim 7, it is characterised in that described in recommend magneto-resistor sensing
Between soft magnetism flux concentrator in unit area, gap is identical, described with reference to the soft magnetism in sensitive magneto-resistor sensing unit region
Between flux concentrator, gap is identical.
A kind of Z-X axle magnetic resistance sensor the most according to claim 1, it is characterised in that
The magnetic pole that described many magnetic poles comprise has the intensity of magnetization being parallel to tangential direction, and adjacent two described magnetic poles have respectively
There is the antiparallel intensity of magnetization or be respectively provided with magnetic reversal intensity clockwise Yu counterclockwise,
Or the magnetic pole comprised has the intensity of magnetization being perpendicular to direction, described incisal plane, and adjacent two described magnetic poles have respectively
There is the antiparallel intensity of magnetization or be respectively provided with centripetal and centrifugal magnetic reversal intensity.
A kind of Z-X axle magnetic resistance sensor the most according to claim 1, it is characterised in that described tested device also includes
For providing magnetic field to magnetize the back of the body magnetic of described gear；Wherein,
Described back of the body magnetic is cuboid permanent-magnet alloy, and its width and short transverse are respectively along described X-axis and Z axis magnetic-field-sensitive side
To, and its direction of magnetization is along described Z axis magnetic-field-sensitive direction；
Or,
Described back of the body magnetic is cylindrical magnet alloy material, and its direction of magnetization and axial direction are all along described Z axis magnetic-field-sensitive direction；
Or,
Described back of the body magnetic is the square permanent-magnet alloy that surface has Baltimore groove, and described Baltimore groove plane perpendicular is quick in described Z axis
Sense direction, and the direction of magnetization is along described Z axis magnetic-field-sensitive direction.
11. a kind of Z-X axle magnetic resistance sensors according to claim 10, it is characterised in that described Z-X axle magneto-resistor passes
Sensor is between described back of the body magnetic and described gear, and is positioned at described back of the body magnetic surface.
12. a kind of Z-X axle magnetic resistance sensors according to claim 11, it is characterised in that
The width of described back of the body magnetic is more than 0.5 times of described gear period pitch；
Or,
Specific gap between described Z-X axle magnetic resistance sensor and described gear is more than 0.1 times and less than 1.0 times of described teeth
Wheel period pitch.
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