CN106045324A - Glass ceramic and multilayer inorganic membrane filter - Google Patents
Glass ceramic and multilayer inorganic membrane filter Download PDFInfo
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- CN106045324A CN106045324A CN201610370296.5A CN201610370296A CN106045324A CN 106045324 A CN106045324 A CN 106045324A CN 201610370296 A CN201610370296 A CN 201610370296A CN 106045324 A CN106045324 A CN 106045324A
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0018—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents
- C03C10/0027—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing SiO2, Al2O3 and monovalent metal oxide as main constituents containing SiO2, Al2O3, Li2O as main constituents
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C3/00—Glass compositions
- C03C3/04—Glass compositions containing silica
- C03C3/076—Glass compositions containing silica with 40% to 90% silica, by weight
- C03C3/097—Glass compositions containing silica with 40% to 90% silica, by weight containing phosphorus, niobium or tantalum
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/20—Frequency-selective devices, e.g. filters
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- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
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Abstract
The invention provides high-mechanical-property glass ceramic for a multilayer inorganic membrane filter. The glass ceramic comprises, by weight, 69-80% of SiO2, 8-12.5% of Li2O, 4-10% of Al2O3, 1.5-3% of P2O, 1-8% of ZrO2, 0.5-3.0% of K2O and 0.5-5% of MgO+ZnO+BaO+SrO. The glass ceramic is free of harmful components such as PbO or As2O3 and high in expansion factor, refractive index variation of an inorganic membrane can be avoided at an application temperature of the multilayer inorganic membrane filter, and accordingly product temperature stability can be improved. In addition, the glass ceramic is high in mechanical property and chemical stability, durability of the filter is guaranteed, and high transmittance in a certain waveband (960-1600nm) is realized.
Description
Technical field
The present invention relates to a kind of devitrified glass and multilamellar inoranic membrane wave filter.
Background technology
Multi layer film filter is formed with substrate with by modes such as sedimentation, radio frequency-ion galvanoplastic, magnetron metallikons
Inorganic thin film on substrate is constituted, and this inorganic thin film is alternately made up of high index inorganic film and low-refraction inoranic membrane.Should
Multilayer filter has cut-out specific wavelength, passes through a kind of special wavelength or anti-reflective function, wherein, cuts off the filtering of specific wavelength
Device is notch filter, and the wave filter only by a kind of specific wavelength is band filter, by one in band filter
Specific short wavelength or long wavelength are high pass or low pass filter (ND wave filter).Therefore, multi layer film filter can be as entering
The partial wave of row light wave and the passive component of conjunction ripple, be frequently utilized in optical communication network.
In optical communication network, it is often used in WDM (wavelength separation multiplexing) optical communication system a kind of multilamellar
Film filter is referred to as band filter (BPF), and it can separate multi-wavelength with the narrowest broadband, and band filter can divide again
For going out the boundary filter of C band (1528~1562nm) and L band (1561~1620nm), and C band-edge filter can be divided into
The short wavelength field at center (1528~1545nm: common name blue zone) and long wavelength field (1545~1561nm: be generally called red tape) this
Two kinds of broadband filters.
The mid-band frequency of band filter will change with the change that temperature is slight, so the centre wavelength to band
Temperature stability just propose problem.This just requires that on the one hand the baseplate material that band filter is used has at certain wave band
(960~1600nm) have higher transmitance, on the other hand require that the coefficient of expansion of baseplate material matches with inorganic thin film.
The substrate that the optical filter of general photographing unit is used is plastics, and owing to the thermostability of plastics is bad, band is logical
Wave filter has strong laser light incident when using, plastics are susceptible to deformation and go bad, it is therefore necessary to use the preferable glass of thermostability
Glass.
If band filter amorphous glass is as substrate, owing to the thermal expansivity of amorphous glass is low, mechanical strength not
High the highest with case hardness, result in amorphous glass substrate inadequate, if but to improve to compression stress and the endurance of inoranic membrane
The coefficient of expansion of amorphous glass, it is necessary to add a large amount of Na2O alkaline components, but glass contains Na2O, can cause film forming on glass
Property poor, the migration of basic ion makes the mechanical property of substrate and surface property deteriorate, thus limits it and extensively apply.
Summary of the invention
The technical problem to be solved be to provide a kind of have higher mechanical performance for multilamellar inoranic membrane
The devitrified glass of wave filter.
The present invention also provides a kind of multilamellar inoranic membrane wave filter prepared by above-mentioned devitrified glass.
The present invention solves the technical scheme is that devitrified glass of technical problem, and its percentage by weight composition contains:
SiO2: 69~80%;Li2O:8~12.5%;Al2O3: 4~10%;P2O5: 1.5~3%;ZrO2: 1~8%;K2O:0.5~
3%;MgO+ZnO+BaO+SrO:0.5~5%.
Devitrified glass, its percentage by weight composition contains: SiO2: 69~80%;Li2O:8~12.5%;Al2O3: 3~
10%;P2O5: 1~3%;ZrO2: 0.1~8%;K2O:0.5~3%;MgO+ZnO+BaO+SrO:0.5~5%.
Further, possibly together with TiO2: 0~3%.
Further, possibly together with TiO2: 0.5~3%.
Further, wherein, TiO2/(ZrO2+P2O5) it is 0.05~1.2.
Further, wherein, TiO2/(ZrO2+P2O5) it is 0.1~0.7.
Further, wherein, TiO2/(ZrO2+P2O5) it is 0.2~0.5.
Further, possibly together with Y2O3+La2O3+Gd2O30~3%;Sb2O3+CeO20~2%.
Further, wherein, ZrO20.1~5%;And/or Al2O34~7%.
Further, Na is not contained2O。
Further, wherein, ZrO20.1~2%.
Further, containing lithium bisilicate crystal in described glass, and alpha-quartz crystal, α-cristobalite crystal, α-stone
At least one in English solid solution crystals.
Further, described devitrified glass is in-25 DEG C~75 DEG C of temperature ranges, and its coefficient of expansion is 90 × 10-7/ DEG C~
130×10-7/ DEG C in the range of.
Further, the Young's modulus of described devitrified glass is at more than 85GPa.
15, devitrified glass as claimed in claim 1 or 2, it is characterised in that the formula hardness of exerting of described devitrified glass exists
600kgf/mm2Above.
Further, the bending strength of described devitrified glass is at 10Kg/mm2Above.
Further, the 10mm sheet glass of described devitrified glass transmittance in the wave-length coverage of 950nm~1600nm
Be 80% or more than.
Multilamellar inoranic membrane wave filter, uses and forms the multilamellar coefficient of expansion nothing more than devitrified glass on above-mentioned devitrified glass
Machine film is formed.
The invention has the beneficial effects as follows: the devitrified glass of the present invention does not contains PbO or As2O3Etc. harmful components.Have higher
The coefficient of expansion, at a temperature of multilamellar inoranic membrane wave filter is applied, can avoid the variations in refractive index of inoranic membrane, can improve product
Temperature stability, have higher mechanical performance and preferable chemical stability, it is ensured that wave filter persistency, and necessarily
Wave band (960~1600nm) has higher transmitance.
Accompanying drawing explanation
Fig. 1 is the XRD curve chart of the devitrified glass of embodiments of the invention 1.
Fig. 2 is the transmittance curve figure of the devitrified glass 10mm thick 960~1600nm of embodiments of the invention 1.
Detailed description of the invention
The substrate devitrified glass of the multilamellar inoranic membrane wave filter that the present invention is set forth below limits its composition and the reason of content,
And its coefficient of expansion, Young's modulus, hardness, bending strength, transmitance and principal crystalline phase.
The glass substrate of the multilamellar inoranic membrane wave filter that the present invention provides is with LiO2-Al2O3-SiO2Crystallite for system
Glass.
The devitrified glass of the baseplate material of the multilamellar inoranic membrane wave filter that the present invention provides is-25 DEG C~75 DEG C of temperature ranges
In, its coefficient of expansion is 90 × 10-7/ DEG C~130 × 10-7/ DEG C in the range of, preferably 110~120 × 10-7/ DEG C in the range of.?
In band filter, the temperature stability of centre wavelength is relevant with the thermal refractive index coefficient of multilamellar inorganic thin film, and refractive index is
Being determined by the atomic density of film on multilamellar inorganic thin film, in film formation process, the substrate temperature of band filter is 200
DEG C, substrate has bigger expansion, and thin film is after this substrate generates, when cooling, owing to the coefficient of expansion of substrate is more than the swollen of thin film
Swollen coefficient, thin film, by compressive stress, causes the film atomic density of thin film to increase, thus refractive index is consequently increased.When substrate
The coefficient of expansion is less than 90 × 10-7/ DEG C, substrate can not give the compressive stress that thin film is enough, promoted centre wavelength with temperature wave
Dynamic property is big, result in adjacent wave length and can produce interference, when the coefficient of expansion of base plate glass is more than 140 × 10-7/ DEG C, cause thin
Film can come off on substrate, have impact on the durable usability of wave filter.
Due to plural layers to be plated on this crystallite glass substrate, and require to process at 2mm × 2mm × below 2mm, in order to
Ensure that crystallite glass substrate does not deforms because of plural layers and ensures the dimensional stability of multilayer film, it is desirable to this devitrified glass has
Having higher mechanical performance, the Young's modulus of devitrified glass of the present invention requires at more than 85GPa;Exert formula hardness at 600kgf/mm2
Above, preferably at 620kgf/mm2Above, more preferably at 650kgf/mm2Above;Bending strength is at 10Kg/mm2Above, preferably exist
15Kg/mm2Above, more preferably at 20Kg/mm2Above.
In optical communication wave filter, substrate has high transmitance, can reduce the attenuation rate of light, is producing signal side
Face, it is possible to reduce noise, therefore the 10mm crystallite glass substrate of present invention printing opacity in the wave-length coverage of 950nm-1600nm
Degree be 70% or more than.
The devitrified glass of the present invention contains lithium bisilicate crystal, and alpha-quartz crystal, α-cristobalite crystal, alpha-quartz are solid
At least one in solid solutions crystals, the present invention is constituted the principal crystalline phase of this devitrified glass by above crystal.Host glass is closing
After suitable heat treatment, generate lithium bisilicate and lithium bisilicate crystal, and alpha-quartz crystal, α-cristobalite crystal, alpha-quartz solid solution
In body crystal, at least one, regulate the expansion of devitrified glass by glass ingredient in devitrified glass and crystalline component content ratio
Coefficient, to obtain the devitrified glass of the present invention in-25 DEG C~75 DEG C of temperature ranges, its coefficient of expansion is 90 × 10-7/ DEG C~
130×10-7/ DEG C in the range of.
SiO2The basic ingredient of the devitrified glass of the present invention, its be formed lithium bisilicate crystal, alpha-quartz crystal, α-
Cristobalitkristall, one of the composition of alpha-quartz solid solution crystals, if SiO2Weight percent content (as follows) 69%
Hereinafter, in devitrified glass, formation crystal can tail off and crystal is the most thicker, affects the coefficient of expansion of devitrified glass and passes through
Rate;If SiO2Content is more than 80%, and glass melting temperature is high, material difficulty, and can compare many shapes when forming crystal
Become the crystal that the coefficient of expansion is big, as-(coefficient of expansion is 674 × 10 to quartz crystal-7/ K), (coefficient of expansion is α-cristobalite crystal
580×10-7/ K), the coefficient of expansion of devitrified glass can be caused to exceed range.
Li2O is the neccessary composition of the devitrified glass principal crystalline phase lithium bisilicate crystal forming the present invention, if Li2O content
Below 8%, the principal crystalline phase content formed in glass is inadequate, affects the devitrified glass coefficient of expansion and mechanical performance, and can cause
Parent glass fusing difficulty;If Li2O content is more than 12.5%, and crystal is easily grown up, and affects devitrified glass transmitance.
Al2O3Mechanical performance and the chemical stability of the devitrified glass of the present invention can be improved, be also that alpha-quartz solid solution is brilliant
The ingredient of body.In order to improve the mechanical performance of devitrified glass, Al need to be added2O3More than 3%, Al need to be added further2O3
More than 4%;If Al2O3Content more than 10%, glass melting difficulty, and easily form the little crystal of the coefficient of expansion, as β-
Spodumene and β-cristobalite, so can be substantially reduced the coefficient of expansion of devitrified glass, does not meets band filter base plate glass
Requirement.Al2O3Preferred content is 4~7%.
P2O5Nucleator for the devitrified glass of the present invention.P2O5Content below 1%, further content 1.5% with
Under, nucleation is very little in glass, forms crystal less, affect the devitrified glass coefficient of expansion in glass;If P2O5Content is 3%
Above, the chemical stability of devitrified glass can be reduced.
ZrO2Also being the nucleator of the devitrified glass of the present invention, two kinds of nucleators use simultaneously, can make devitrified glass
Growth crystal becomes many and tiny, so can more preferably promote the mechanical performance of devitrified glass and the raising of chemical stability.ZrO2
Content is below 0.1%, to no effect;ZrO2Content is more than 8%, and the fusing difficulty of glass strengthens.ZrO2Content is preferably 0.1
~5%, ZrO2Content is more than 2%, and heat-treatment temperature range is narrow, careless slightly, may result in glass requirement transmitance and reaches not
To requiring, it is not used in large-scale production, therefore ZrO2Content is more preferably 0.1~2%.
K2The Main Function of O is to promote glass melting, reduces the fusion temperature of glass, and the addition of little content is possible to prevent substrate
Glass (glass before the crystallization) crystallize when molding, if there being crystallize in host glass, can affect last devitrified glass performance
On uniformity;If K2O content has exceeded 3%, can form the unwanted crystal such as potassium feldspar in devitrified glass, and also
The thicker change of crystal in glass can be caused big, thus affect the transmitance of glass.K2The content of O is 0.5~3%.
TiO2Effect is formation and the growth that can promote crystal when host glass heat treatment in glass, increases glass
The coefficient of expansion, if but TiO2Content is more than 3%, and glass easily makes crystal in glass on the high side when heat treatment, its glass swelling
Coefficient is easily beyond filter requirements scope, therefore TiO2Content is defined to 0~3%, preferably 0.5~3%.
The present inventor studies discovery, by Reasonable adjustment TiO2、ZrO2And P2O5Content in glass and proportioning are permissible
The crystal making inside glass becomes many and tiny, it is ensured that glass expansion coefficient within the required range, improves the hardness of glass and changes
Kind devitrified glass is in the transmitance of 960-1600nm, therefore, TiO in the present invention2/(ZrO2+P2O5) ratio range be 0.05~
1.2, preferably 0.1~0.7, more preferably 0.2~0.5.
La2O3Notable to the devitrification resistance effect improving glass, if content is higher than 3%, then the easy devitrification of glass, therefore,
La2O3Content be defined to 0~3%.
Y2O3Main Function is the suppression host glass crystallize when glass molding, and improves weatherability and the glass of glass
Hardness.But when its content is more than 3%, add host glass melting difficulty, therefore, Y2O3Content be defined to 0~3%.
Gd2O3Effect be crystal glass when heat treatment, the crystal in suppression glass becomes thick, and can increase glass
The chemical stability of glass, but work as Gd2O3When content is higher than 3%, the devitrification resistance property of glass deteriorates, therefore, and Gd2O3Content limit
It is set to 0~3%.
Y2O3、La2O3And Gd2O3Main Function is the suppression host glass crystallize when glass molding, and improves glass
Weatherability.Y2O3、La2O3And Gd2O3Total content preferably below 3%, when its content is more than 3%, host glass is in crystallization
Time, glass easily becomes opaque, Y2O3、La2O3And Gd2O3Addition hinder glass nucleation, but do not hinder growing up of crystal.
MgO, ZnO, BaO and SrO, as cosolvent, contribute to glass melting, can suppress substrate glass when glass molding
Glass crystallize, prevents when glass crystallization crystalline structure growth from becoming too thick, can improve heat stability and the chemically stable of glass
Property.In order to obtain above effect, these component total contents are more than 0.5%, and when the total content of these components is more than 5%, and glass
Glass the most easily becomes breast when crystallization, makes glass become opaque.
Sb2O3And CeO2Component adds as clarifier, Sb2O3And CeO2Addition total content below 2%.
Without Na in the devitrified glass of the present invention2O, because if containing Na in glass2O, on glass, film property is poor, Na
The migration of ion makes the mechanical property of substrate and surface property deteriorate.
The present invention, in order to obtain above-mentioned devitrified glass, is made up of above-mentioned raw materials that glass mixture is smelting, black annealing obtains
The host glass of devitrified glass, host glass carries out heat treatment about 1~7 hour at a temperature of 500~650 DEG C, produces nucleus,
Crystallization 0.5~6 hours in 700~780 DEG C of temperature, make crystal grow up further.
The devitrified glass of the present invention is ground and polishes, make on crystallite glass substrate roughness at below 5.0A,
It is alternatively formed high index of refraction by sedimentation, radio frequency-ion galvanoplastic or magnetron metallikon inorganic thin on this crystallite glass substrate
Film and low-refraction inorganic thin film, material is thus formed a kind of interference-type wave filter in communication apparatus.
Table 1~3 is embodiments of the invention 1-18, is the proportioning composition of devitrified glass, crystalline phase composition, expands system in table
The data such as number, Young Mohs, hardness, bending strength and transmitance.
Table 1
Table 2
Table 3
It is first according in table 1~3 that embodiment 1~18 forms weight content and carries out weighing and burden, raw material can be carbon
Hydrochlorate, nitrate and oxide etc., then all put into load weighted raw material after V-arrangement mixer is thoroughly mixed as glass
Glass raw material.Then the frit prepared is put in electric furnace, carry out melting at a temperature of 1250~1400 DEG C 8 hours,
Carry out at a temperature of 1450~1580 DEG C clarifying 10 hours, then the vitreous humour melted is come out of the stove at 1250~1300 DEG C, pass through
Mould molding, mold temperature, at 200 DEG C, carries out strong wind cooling during molding, prepared host glass slightly moves back Muffle furnace 680 DEG C
Fire.
Prepared host glass being put into high temperature furnace and carries out heat treatment, this heat treatment process includes that nucleus separates out and crystallite
Grow up two stages, wherein in nucleus precipitation phase, make the temperature in Muffle furnace be maintained at 500~650 DEG C, continue 1-7h and make glass
Glass produces the most nucleus, then the temperature in Muffle furnace is increased to about 700~780 DEG C and enters into crystallite growth rank
Section persistently 0.5~6h, the devitrified glass needed for preparing.
Obtained devitrified glass is carried out following test:
Crystalline phase measures: devitrified glass grind into powder, uses X-ray analyzer to measure the crystalline phase kind of devitrified glass,
Scanning speed is at 5K/min, and sweep limits is 5 °-90 °.
Thermalexpansioncoefficientα measures, by the method that GB/T7962.16-2010 specifies, the meansigma methods that temperature is-25~70 DEG C.
The method that Young's modulus specifies according to GB/T7962.6-2010 is measured.
The method that hardness specifies according to GB/T7962.18-2010 is measured.
Bending strength is according to the method for testing specifying glass three-point bending in ASTMC158-02 standard.
Transmission measurement: devitrified glass is prepared as 40 × 30 × 1mm sample, carries out two and leads to light mirror polish, it is desirable to surface
Roughness is Ra=0.012, flatness N=3, △ N=0.5, and above 40 × 30 × 1mm sample is put into Hitachi's U-4100 light splitting
Photometer carries out testing the transmitance of 960-1600mm.
Above-mentioned devitrified glass is started the diamond grain with 800~1200# or 400~1200 aluminium powder # carry out rough lapping
0.5~1h, after rough lapping, make roughness on crystallite glass substrate being polished 0.5~1h with micron order cerium oxide polishing grain
Lower below 5.0A.
Use ion assisted deposition device further, alternately form TiO on devitrified glass at this after polishing2/SiO2,
Ta2O5/SiO2And Nb2O5/SiO2Electrolytic multi-layer thin film, produce multi layer film filter, can be as in optical communication
Plant band filter.
Fig. 1 is XRD (X x ray diffraction) curve chart of the devitrified glass of embodiments of the invention 1.Fig. 2 is the present invention
The transmittance curve figure of the devitrified glass 10mm of embodiment 1 thick 960~1600nm.
Claims (18)
1. devitrified glass, it is characterised in that its percentage by weight composition contains: SiO2: 69~80%;Li2O:8~12.5%;
Al2O3: 4~10%;P2O5: 1.5~3%;ZrO2: 1~8%;K2O:0.5~3%;MgO+ZnO+BaO+SrO:0.5~5%.
2. devitrified glass, it is characterised in that its percentage by weight composition contains: SiO2: 69~80%;Li2O:8~12.5%;
Al2O3: 3~10%;P2O5: 1~3%;ZrO2: 0.1~8%;K2O:0.5~3%;MgO+ZnO+BaO+SrO:0.5~5%.
3. devitrified glass as claimed in claim 1 or 2, it is characterised in that possibly together with TiO2: 0~3%.
4. devitrified glass as claimed in claim 1 or 2, it is characterised in that possibly together with TiO2: 0.5~3%.
5. the devitrified glass as described in claim 3 or 4, it is characterised in that wherein, TiO2/(ZrO2+P2O5) it is 0.05~1.2.
6. the devitrified glass as described in claim 3 or 4, it is characterised in that wherein, TiO2/(ZrO2+P2O5) it is 0.1~0.7.
7. the devitrified glass as described in claim 3 or 4, it is characterised in that wherein, TiO2/(ZrO2+P2O5) it is 0.2~0.5.
8. devitrified glass as claimed in claim 1 or 2, it is characterised in that possibly together with Y2O3+La2O3+Gd2O30~3%;Sb2O3
+CeO20~2%.
9. devitrified glass as claimed in claim 1 or 2, it is characterised in that wherein, ZrO20.1~5%;And/or Al2O3 4
~7%.
10. devitrified glass as claimed in claim 1 or 2, it is characterised in that do not contain Na2O。
11. devitrified glasses as claimed in claim 1 or 2, it is characterised in that wherein, ZrO20.1~2%.
12. devitrified glasses as claimed in claim 1 or 2, it is characterised in that containing lithium bisilicate crystal in described glass, with
And at least one in alpha-quartz crystal, α-cristobalite crystal, alpha-quartz solid solution crystals.
13. devitrified glasses as claimed in claim 1 or 2, it is characterised in that described devitrified glass is-25 DEG C~75 DEG C of temperature
In the range of, its coefficient of expansion is 90 × 10-7/ DEG C~130 × 10-7/ DEG C in the range of.
14. devitrified glasses as claimed in claim 1 or 2, it is characterised in that the Young's modulus of described devitrified glass is at 85GPa
Above.
15. devitrified glasses as claimed in claim 1 or 2, it is characterised in that the formula hardness of exerting of described devitrified glass exists
600kgf/mm2Above.
16. devitrified glasses as claimed in claim 1 or 2, it is characterised in that the bending strength of described devitrified glass is at 10Kg/
mm2Above.
17. devitrified glasses as claimed in claim 1 or 2, it is characterised in that the 10mm sheet glass of described devitrified glass exists
Transmittance in the wave-length coverage of 950nm~1600nm be 80% or more than.
18. multilamellar inoranic membrane wave filter, use and form multilamellar on the devitrified glass described in claim 1-17 any claim
The coefficient of expansion is formed more than the inoranic membrane of devitrified glass.
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CN109231840A (en) * | 2018-11-29 | 2019-01-18 | 成都贝施美生物科技有限公司 | A kind of glass ceramics and preparation method thereof |
CN110590165A (en) * | 2019-10-21 | 2019-12-20 | 成都光明光电有限责任公司 | Low-expansion glass ceramics and manufacturing method thereof |
CN113402172A (en) * | 2021-08-06 | 2021-09-17 | 成都光明光电有限责任公司 | Glass-ceramic and glass-ceramic article |
CN113716873A (en) * | 2021-01-28 | 2021-11-30 | 成都光明光电股份有限公司 | Glass ceramics, glass ceramics product and manufacturing method thereof |
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CN113788621A (en) * | 2019-02-08 | 2021-12-14 | Agc株式会社 | Glass ceramics, chemically strengthened glass, and semiconductor support substrate |
CN110590165A (en) * | 2019-10-21 | 2019-12-20 | 成都光明光电有限责任公司 | Low-expansion glass ceramics and manufacturing method thereof |
CN113716873A (en) * | 2021-01-28 | 2021-11-30 | 成都光明光电股份有限公司 | Glass ceramics, glass ceramics product and manufacturing method thereof |
CN113754290A (en) * | 2021-01-28 | 2021-12-07 | 成都光明光电股份有限公司 | Glass ceramics, glass ceramics product and manufacturing method thereof |
CN113831020A (en) * | 2021-01-28 | 2021-12-24 | 成都光明光电股份有限公司 | Glass ceramics, glass ceramics product and manufacturing method thereof |
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CN113402172A (en) * | 2021-08-06 | 2021-09-17 | 成都光明光电有限责任公司 | Glass-ceramic and glass-ceramic article |
CN113402172B (en) * | 2021-08-06 | 2023-09-22 | 成都光明光电有限责任公司 | Glass ceramic and glass ceramic article |
CN114873920A (en) * | 2022-05-27 | 2022-08-09 | 成都光明光电有限责任公司 | Microcrystalline glass and multilayer inorganic membrane filter |
Also Published As
Publication number | Publication date |
---|---|
TWI628152B (en) | 2018-07-01 |
CN111548020A (en) | 2020-08-18 |
CN104926135A (en) | 2015-09-23 |
TW201643127A (en) | 2016-12-16 |
TWI623508B (en) | 2018-05-11 |
TW201736301A (en) | 2017-10-16 |
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