CN106041707A - Dust-free polishing device of metal product - Google Patents
Dust-free polishing device of metal product Download PDFInfo
- Publication number
- CN106041707A CN106041707A CN201610584820.9A CN201610584820A CN106041707A CN 106041707 A CN106041707 A CN 106041707A CN 201610584820 A CN201610584820 A CN 201610584820A CN 106041707 A CN106041707 A CN 106041707A
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- Prior art keywords
- metallic article
- processed
- electric contact
- conduction
- power supply
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
- B24B29/02—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/06—Dust extraction equipment on grinding or polishing machines
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Electrical Discharge Machining, Electrochemical Machining, And Combined Machining (AREA)
Abstract
The invention relates to a dust-free polishing device of a metal product. The dust-free polishing device comprises a polishing system and a group of weak-current loop circuit systems, wherein the polishing system comprises a conductive polishing abrasive wheel and a to-be-processed metal product, which form a friction pair. Each weak-current loop circuit comprises a weak-current power supply, guide wires which are separately connected to a positive electrode and a negative electrode of the weak-current power supply and power connection heads which correspond to the guide wires in number; one end of each guide wire is connected to the positive electrode or the negative electrode of the weak-current power supply, and the other end of the corresponding guide wire is connected to the corresponding power connection head; and the power connection heads are electrically connected to the conductive polishing abrasive wheel and the to-be-processed metal product separately. The dust-free polishing device has metal dust which does not fly, avoids influence on health of a worker, avoids polluting environment, and avoids potential safety hazards such as combustion and explosion.
Description
Technical field
The present invention relates to surface of metal product polishing technology field, particularly relate to a kind of dustless burnishing device of metallic article.
Background technology
In the industrial production, particularly in haberdashery and hardware processing, polishing is the important procedure affecting product quality；But throw
Photoreduction process is inevitably formed substantial amounts of dust, human body is produced high risks, particularly when can not get effectively controlling,
Easily cause the occupation disease such as pneumoconiosis；And a large amount of dust pollution sublimity, produce potential safety hazard；At present, for existing polishing dust
Problem, the controlling device that main employing is special, there is equipment complexity, costliness, assemble and the high deficiency of site requirements, and mostly
Number equipment does not consider the actual characteristic of dust when design；Owing to the 80%-90% of polishing dust is metallic dust, therefore,
For the combustible material such as magnesium, titanium, in polishing process, quick heating, spark greatly, even if using special cleaner, are the most only to powder
The recycling of dirt, it is impossible to stop the formation of dust, can not avoid the generation of the security incidents such as burning, blast completely.
Patent CN201510743019.X (producing polishing assembly and the chemical polishing appts of micro-electrostatic field) discloses one
Electric field-assisted chemical mechanical polishing method, the uniform electric field that the method must use electric capacity to produce disperses or homogenization chemical polishing
Liquid, to reach to improve quality of finish, the purpose of polishing efficiency, the travel condition being limited to uniform electric field is harsh, and the method is the suitableeest
Together in electronic product etc. for material integrity, small-sized, the process of regular shape product that precision requirement is high；And, chemistry
Polishing process will not produce dust, it is not necessary to dedusting, i.e. uniform electric field is unrelated with dust.
Summary of the invention
The technical problem to be solved is to provide a kind of dustless burnishing device of metallic article, and it has what nothing was flown upward
Metallic dust, it is to avoid the impact healthy on workman, it is to avoid pollute environment, stopped the potential safety hazard such as burning, blast.
For solving above-mentioned technical problem, the present invention uses following technical proposals: a kind of dustless burnishing device of metallic article, it
Including polishing system and one group of weak electrical loop Circuits System；
This polishing system includes conductive polishing emery wheel and metallic article to be processed, and both constitute friction pair；
This weak electrical loop Circuits System include light current power supply, be connected to light current positive source and the wire of negative pole and
The electric contact of respective numbers；
One end of each wire is connected with the negative or positive electrode of weakness power supply, and the other end of this wire connects electricity
Head；Electric contact electrically connects with conductive polishing emery wheel and metallic article to be processed respectively so that polishing system and weak electrical loop circuit
System collectively forms the dustless burnishing device of metallic article of static electrification field.
Further, polishing system includes conductive polishing emery wheel, metallic article to be processed and fixes this metal system to be processed
The conduction fixing tool of product, conductive polishing emery wheel rubs for a pair with the metallic article to be processed composition being fixed on conduction fixing tool
Wipe pair；
Further, electric contact respectively with conduction fixing tool, metallic article to be processed or/and conductive polishing emery wheel is electrically connected
Connect so that polishing system and weak electrical loop Circuits System collectively form the dustless burnishing device of metallic article of static electrification field.
Further, described conductive polishing emery wheel is connected by power transmission shaft high-speed rotary motor, and this power transmission shaft is arranged with
With the electric contact of axle sleeve, axle sleeve is fixed on the end of high-speed rotary motor by support arm；Described side wall of shaft sleeve is provided with in band
The through hole of screw thread, in electric contact is placed in tapped through hole and touches, on electric contact with the power transmission shaft being arranged in axle sleeve
Connecting and have power spring, the other end of this power spring is fixed on the externally threaded conduction briquetting of band, and this conduction briquetting is screwed together in
Tapped through hole, conduction briquetting connects and has the wire connected with light current power electrode, and this electric contact passes through axle sleeve bullet
Property press-fits on power transmission shaft, it is thus achieved that the loop that power supply, polishing workpiece, buff wheel are formed；
Further, described light current power supply preferably contacts device by DISCRETE ELASTIC SUPPORTS with metallic article electric connection mode to be processed
Electrically connecting with metallic article to be processed, this DISCRETE ELASTIC SUPPORTS contact device includes elastic conduction L-shaped bonding jumper, is fixed on elastic conduction L
The electric contact of shape bonding jumper galianconism end and vertical fixed plate, elastic conduction L-shaped bonding jumper is long-armed to be horizontally disposed with, and its long arm end
Being fixed in vertical fixed plate, when electric contact and surface of metal product to be processed touch, the long-armed of elastic conduction L-shaped bonding jumper can
Elastic deformation, closely touches in metallic article to be processed remaining secured to the electric contact of elastic conduction L-shaped bonding jumper galianconism end
Surface, metallic article water the most to be processed moves flat or horizontal axis rotates, connecing of elastic conduction L-shaped bonding jumper galianconism end
Dateline the most closely touches in surface of metal product to be processed, makes mechanical polishing system and weak electrical loop Circuits System be formed always
Weak electrical loop, forms electrostatic field in "on" position；
Further, described electric contact material is that the electricity such as copper material, graphite touches material, and electric contact is loss product, and its effect is anti-
Only after the metallic article frictional dissipation to be processed of wire and the power transmission shaft of rotation or movement, cause loose contact, thus cannot shape
Become energized circuit, make electrostatic field disappear；
Further, the described DC source that light current power supply is pressure-adjustable or alternating current power supply, this light current output voltage values is
0.5V-36V；
Further, in order to improve polishing efficiency, Digit Control Machine Tool can be used to control conductive polishing emery wheel respectively and to pass through power transmission shaft
The high-speed rotary motor connected and the running orbit of metallic article to be processed, described metallic article to be processed and/or conduction are fixing
Frock is arranged on the movable working platform of Digit Control Machine Tool, and the high-speed rotary motor that conductive polishing emery wheel is connected by power transmission shaft is pacified
It is contained on the mechanical hand of Digit Control Machine Tool.
The beneficial effect comprise that
1, dustless polishing is realized: the dustless burnishing device of the present invention relies on electrostatic force, by what grinding process was formed
Metal fragment tightly be adsorbed in surface of metal product, metal fragment will not aloft fly upward, thus reaches the effect of dustless polishing
Really；Even if after power-off, this electrostatic force the most sustainable certain time, meet follow-up cleaning demand, it is achieved whole operation
Dustlessization of journey.
2, polishing intensity is low, technique is simple, with low cost: the dustless burnishing device of the present invention only need to existing commonly
Polishing system carries out simple energising process, even if the metallic article friction pair of polishing process is in weak electrical loop circuit, it is not necessary to
Professional takes out pouring equipment, it is not necessary to change existing glossing；And the electric flow shape formed after being energized, electrical heating effect,
Reduce the intensity of surface of metal product, accelerate the plastic deformation on surface, reduce polish pressure, reduce polishing intensity.
3, safe and environment-friendly: the present invention realizes dust-free operation, environment, health will not be produced harm；And the present invention
The loop circuit applied is low-tension current, there is not potential safety hazard.
Accompanying drawing explanation
Fig. 1 is the embodiment of the present invention 1 structural representation.
Fig. 2 is the embodiment of the present invention 2 structural representation.
Fig. 3 is the embodiment of the present invention 3 structural representation.
Fig. 4 is the partial enlargement structural representation of the electric contact of Fig. 3 band axle sleeve.
Fig. 5 is the embodiment of the present invention 4 structural representation.
Fig. 6 is the partial enlargement structural representation of Fig. 5 DISCRETE ELASTIC SUPPORTS contact device.
Detailed description of the invention
Embodiment 1
Shown in Figure 1, a kind of dustless burnishing device of metallic article, it includes polishing system 1 and one group of weak electrical loop
Circuits System 2；
This polishing system 1 includes conducting electricity manually polishing emery wheel 11 and metallic article to be processed 12, and both constitute a pair friction
Secondary；
This weak electrical loop Circuits System 2 includes light current power supply 21, is connected to light current power supply 21 positive pole 211 and negative pole
Two wires 22 of 212 and the electric contact 23 of respective numbers；
One end of a piece wire 22 is connected with the positive pole 211 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23, one end of another root wire 22 is connected with the negative pole 212 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23；Two electric contacts 23 electrically connect with conduction manually polishing emery wheel 11 and metallic article to be processed 12 respectively, and conduction is manually thrown
Light emery wheel 11 is provided with insulated handle, it is simple to manual operator is held, and the conductive polishing emery wheel 11 after wire connection is with to be processed
Metallic article 12 and weak electrical loop Circuits System 2 collectively form weak electrical loop, produce electrostatic field after energising.
Described electric contact 23 material is for selecting graphite material.
Described light current power supply 21 is the DC source of pressure-adjustable, and this light current output voltage values is 0.5V.
Embodiment 2
Shown in Figure 2, a kind of dustless burnishing device of metallic article, it includes polishing system 1 and one group of weak electrical loop
Circuits System 2；
Polishing system 1 includes conductive polishing emery wheel 11, metallic article to be processed 12 and fixes this metallic article to be processed
The conduction fixing tool 13 of 12, conductive polishing emery wheel 11 and metallic article to be processed 12 structure being fixed on conduction fixing tool 13
Friction pair in a pair；
This weak electrical loop Circuits System 2 includes light current power supply 21, is connected to light current power supply 21 positive pole 211 and negative pole
Two wires 22 of 212 and the electric contact 23 of respective numbers；
One end of a piece wire 22 is connected with the positive pole 211 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23, one end of another root wire 22 is connected with the negative pole 212 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23；Two electric contacts 23 respectively with conduction fixing tool 13 and metallic article to be processed 12 electrically connect so that polishing system and
Weak electrical loop Circuits System collectively forms the dustless burnishing device of metallic article of static electrification field.
Described conductive polishing emery wheel 11 is connected by power transmission shaft 3 high-speed rotary motor 4.
Described electric contact 23 material is for selecting copper material.
Described light current power supply 21 is the alternating current power supply of pressure-adjustable, and this light current output voltage values is 36V.
Embodiment 3
Seeing shown in Fig. 3 and Fig. 4, a kind of dustless burnishing device of metallic article, it includes polishing system 1 and one group of light current
Loop circuit system 2；
Polishing system 1 includes conductive polishing emery wheel 11, metallic article to be processed 12 and fixes this metallic article to be processed
The conduction fixing tool 13 of 12, conductive polishing emery wheel 11 and metallic article to be processed 12 structure being fixed on conduction fixing tool 13
Friction pair in a pair；
This weak electrical loop Circuits System 2 includes light current power supply 21, is connected to light current power supply 21 positive pole 211 and negative pole
Two wires 22 of 212 and the electric contact 23 of respective numbers；
One end of a piece wire 22 is connected with the positive pole 211 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23, one end of another root wire 22 is connected with the negative pole 212 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23；Two electric contacts 23 electrically connect with conductive polishing emery wheel 11 and metallic article to be processed 12 respectively so that polishing system and
Weak electrical loop Circuits System collectively forms the dustless burnishing device of metallic article of static electrification field.
Described conductive polishing emery wheel 11 is connected by power transmission shaft 3 high-speed rotary motor 4, and this power transmission shaft 3 is arranged with band
The electric contact 23 of axle sleeve 5, axle sleeve 5 is fixed on the end of high-speed rotary motor 4 by support arm 51；Set on described axle sleeve 5 sidewall
Have tapped through hole 52, in electric contact 23 is placed in tapped through hole 52 and with the power transmission shaft 3 being arranged in axle sleeve 5
Touching, electric contact 23 connects power spring 53, and the other end of this power spring 53 is fixed on the externally threaded conduction briquetting of band
On 54, this conduction briquetting 54 is screwed together at tapped through hole 52, and conduction briquetting 54 connects to be had and light current power supply 21 electrode
The wire 22 of connection, this electric contact 23 press-fits on power transmission shaft 3 by axle sleeve 5 elasticity, it is thus achieved that power supply, polishing workpiece, polishing mill
The loop that wheel is formed.
Described electric contact 23 material is graphite material.
Described light current power supply 21 is the DC source of pressure-adjustable, and this light current output voltage values is 18V.
Embodiment 4
Seeing shown in Fig. 4-Fig. 6, a kind of dustless burnishing device of metallic article, it includes polishing system 1 and one group of light current
Loop circuit system 2；
Polishing system 1 includes conductive polishing emery wheel 11, metallic article to be processed 12 and fixes this metallic article to be processed
The conduction fixing tool 13 of 12, conductive polishing emery wheel 11 and metallic article to be processed 12 structure being fixed on conduction fixing tool 13
Friction pair in a pair；
This weak electrical loop Circuits System 2 includes light current power supply 21, is connected to light current power supply 21 positive pole 211 and negative pole
The three of the wires 22 of 212 and the electric contact 23 of respective numbers；
One end of a piece wire 22 is connected with the positive pole 211 of weakness power supply 21, and the other end of this wire 22 connects
Dateline 23, same one end of another two wires 22 is connected with the negative pole 212 of weakness power supply 21, and the other end of another two wires 22 divides
Lian Jie there is not electric contact 23；Three electric contacts 23 respectively with fix the conduction fixing tool 13 of this metallic article 12 to be processed, to be added
Work metallic article 12 and conductive polishing emery wheel 11 electrically connect so that it is quiet that polishing system and weak electrical loop Circuits System collectively form band
The dustless burnishing device of metallic article of electric field.
Described conductive polishing emery wheel 11 is connected by power transmission shaft 3 high-speed rotary motor 4, and this power transmission shaft 3 is arranged with band
The electric contact 23 of axle sleeve 5, axle sleeve 5 is fixed on the end of high-speed rotary motor 4 by support arm 51；Set on described axle sleeve 5 sidewall
Have tapped through hole 52, in electric contact 23 is placed in tapped through hole 52 and with the power transmission shaft 3 being arranged in axle sleeve 5
Touching, electric contact 23 connects power spring 53, and the other end of this power spring 53 is fixed on the externally threaded conduction briquetting of band
On 54, this conduction briquetting 54 is screwed together at tapped through hole 52, and conduction briquetting 54 connects to be had and light current power supply 21 electrode
The wire 22 of connection, this electric contact 23 press-fits on power transmission shaft 3 by axle sleeve 5 elasticity, it is thus achieved that power supply, polishing workpiece, polishing mill
The loop that wheel is formed.
Described light current power supply 21 with metallic article 12 electric connection mode to be processed for contact device 6 by DISCRETE ELASTIC SUPPORTS and to treat
Processing metallic article 12 electrically connects, and this DISCRETE ELASTIC SUPPORTS contact device 6 includes elastic conduction L-shaped bonding jumper 61, is fixed on elastic conduction L
The electric contact 23 of shape bonding jumper 61 galianconism end and vertical fixed plate 62, elastic conduction L-shaped bonding jumper 61 is long-armed to be horizontally disposed with, and
Its long arm end is fixed in vertical fixed plate 62, when electric contact 23 and metallic article 12 surface to be processed touch, and elastic conduction L-shaped
The long-armed elastically deformable of bonding jumper 61, closely touches remaining secured to the electric contact of elastic conduction L-shaped bonding jumper galianconism end
In surface of metal product to be processed, metallic article water the most to be processed moves flat or horizontal axis rotates, elastic conduction L-shaped
The electric contact of bonding jumper galianconism end the most closely touches in surface of metal product to be processed, makes mechanical polishing system and weak electrical loop
Circuits System forms weak electrical loop always, forms electrostatic field in "on" position.
Described electric contact 23 material is copper material.
Described light current power supply 21 is the alternating current power supply of pressure-adjustable, and this light current output voltage values is 25V.
Embodiment 5
A kind of dustless burnishing device of metallic article, its difference from Example 4 is, described light current power supply 21 is can
The alternating current power supply of pressure regulation, this light current output voltage values is 12V.
Digit Control Machine Tool 7 can be used to control respectively to polish high-speed rotary motor 4 that emery wheel 11 connected by power transmission shaft 3 and to be added
The running orbit of work metallic article 12, described metallic article 12 to be processed and conduction fixing tool 13 are arranged on Digit Control Machine Tool 7
On movable working platform, high-speed rotary motor 4 is arranged on the mechanical hand of Digit Control Machine Tool 7.
As it has been described above, the dustless burnishing device of one metallic article of the present invention, described embodiment and figure, simply the present invention is relatively
Good implementation result, is not to be confined to the present invention, and every and the structure of the present invention, feature etc. approximate, identical person, all should belong to
In the scope of protection of the invention.
Claims (7)
1. the dustless burnishing device of metallic article, it is characterised in that: it includes polishing system (1) and one group of weak electrical loop electricity
Road system (2)；
This polishing system (1) includes conductive polishing emery wheel (11) and metallic article to be processed (12), and both constitute friction pair；
This weak electrical loop Circuits System (2) includes light current power supply (21), is connected to light current power supply (21) positive pole (211) and bears
The wire (22) of pole (212) and the electric contact (23) of respective numbers；
One end of wire (22) is connected with positive pole (211) or the negative pole (212) of light current power supply (21), and another of this wire (22)
End connection has electric contact (23)；Electric contact (23) is electrically connected with conductive polishing emery wheel (11) and metallic article to be processed (12) respectively
Connecing, conductive polishing emery wheel (11) is provided with insulated handle.
A kind of dustless burnishing device of metallic article the most according to claim 1, it is characterised in that: polishing system (1) includes
Conductive polishing emery wheel (11), metallic article to be processed (12) and fix the conduction fixing tool of this metallic article to be processed (12)
(13), conductive polishing emery wheel (11) rubs for a pair with metallic article to be processed (12) composition being fixed in conduction fixing tool (13)
Wipe pair；Electric contact (23) respectively with conduction fixing tool (13), metallic article to be processed (12) or/and conductive polishing emery wheel (11)
Electrical connection.
A kind of dustless burnishing device of metallic article the most according to claim 2, it is characterised in that: described conductive polishing emery wheel
(11) there is high-speed rotary motor (4) by power transmission shaft (3) connection, this power transmission shaft (3) is arranged with the electric contact of band axle sleeve (5)
(23), axle sleeve (5) is fixed on the end of high-speed rotary motor (4) by support arm (51)；Described axle sleeve (5) sidewall is provided with band
The through hole (52) of female thread, electric contact (23) be placed in tapped through hole (52) and with the biography being arranged in axle sleeve (5)
Moving axis (3) touches, and the upper connection of electric contact (23) has power spring (53), the other end of this power spring (53) to be fixed on the outer spiral shell of band
On the conduction briquetting (54) of stricture of vagina, this conduction briquetting (54) is screwed together in tapped through hole (52) place, and conduction briquetting (54) connects
It is connected to the wire (22) connected with light current power supply (21) electrode.
A kind of dustless burnishing device of metallic article the most according to claim 1 and 2, it is characterised in that: described light current electricity
Source (21) is to contact device (6) and metallic article to be processed by DISCRETE ELASTIC SUPPORTS with metallic article to be processed (12) electric connection mode
(12) electrical connection, this DISCRETE ELASTIC SUPPORTS contact device (6) includes elastic conduction L-shaped bonding jumper (61), is fixed on elastic conduction L-shaped metal
The electric contact (23) of bar (61) galianconism end and vertical fixed plate (62), elastic conduction L-shaped bonding jumper (61) is long-armed to be horizontally disposed with,
And its long arm end is fixed in vertical fixed plate (62), when electric contact (23) and metallic article to be processed (12) surface touch, bullet
Property conduction L-shaped bonding jumper (61) long-armed elastically deformable.
A kind of dustless burnishing device of metallic article the most according to claim 1 and 2, it is characterised in that: described electric contact
(23) material preferentially selects the electricity such as copper material, graphite to touch material.
A kind of dustless burnishing device of metallic article the most according to claim 1 and 2, it is characterised in that: described light current electricity
Source (21) is DC source or the alternating current power supply of pressure-adjustable, and this light current output voltage values is 0.5V-36V.
A kind of dustless burnishing device of metallic article the most according to claim 2, it is characterised in that: Digit Control Machine Tool can be used
(7) high-speed rotary motor (4) and the metallic article to be processed that conductive polishing emery wheel (11) is connected by power transmission shaft (3) is controlled respectively
(12) running orbit, described metallic article to be processed (12) and/or conduction fixing tool (13) are arranged on Digit Control Machine Tool (7)
On movable working platform, high-speed rotary motor (4) is arranged on the mechanical hand of Digit Control Machine Tool (7).
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| CN201610584820.9A CN106041707B (en) | 2016-07-25 | 2016-07-25 | A kind of dustless burnishing device of metallic article |
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| CN201610584820.9A CN106041707B (en) | 2016-07-25 | 2016-07-25 | A kind of dustless burnishing device of metallic article |
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| CN108214205A (en) * | 2018-01-17 | 2018-06-29 | 苏州工业园区安固电器有限公司 | Commutator polissoir |
| CN109986415A (en) * | 2019-05-06 | 2019-07-09 | 王梅 | A kind of electron ion polissoir and polishing method |
| CN113798927A (en) * | 2020-06-15 | 2021-12-17 | 重庆大学 | Electric field auxiliary abrasive belt grinding method |
| CN115070601A (en) * | 2021-05-14 | 2022-09-20 | 台湾积体电路制造股份有限公司 | Method and system for slurry quality monitoring |
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| CN115070601A (en) * | 2021-05-14 | 2022-09-20 | 台湾积体电路制造股份有限公司 | Method and system for slurry quality monitoring |
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| CN106041707B (en) | 2018-01-16 |
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