CN106040325A - Method and device for manufacturing glass microfluidic chip through mould pressing technology - Google Patents
Method and device for manufacturing glass microfluidic chip through mould pressing technology Download PDFInfo
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- CN106040325A CN106040325A CN201610348151.5A CN201610348151A CN106040325A CN 106040325 A CN106040325 A CN 106040325A CN 201610348151 A CN201610348151 A CN 201610348151A CN 106040325 A CN106040325 A CN 106040325A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L3/00—Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
- B01L3/50—Containers for the purpose of retaining a material to be analysed, e.g. test tubes
- B01L3/502—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
- B01L3/5027—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
- B01L3/502707—Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
Abstract
The invention provides a method and a device for manufacturing a glass microfluidic chip through a mould pressing technology. According to the invention, by utilizing a variety of mechanical processing or energy-beam processing methods, a mold core containing a microfluidic chip antistructure is prepared on a high-rigidity and insusceptible-bonding metal mold material of mold steel, stainless steel, tungsten and the like; a glass preforming body and the mold core are simultaneously placed into a precision mould pressing machine; and by adopting a standard mould pressing technology (heating, pressurizing, annealing and cooling), a micro structure needed by the glass microfluidic chip is processed on the glass by one time. In the whole mould pressing process, the use of reagents and equipment needed by traditional dry etching and wet etching are not needed; the processing efficiency is high (one-off molding can be finished in 8 minutes); subsequent processing is not needed; the quality of a groove after mould pressing is good; meanwhile, the mold core has little deformation and high service life, and can realize mass preparation of the glass microfluidic chip.
Description
Technical field
The present invention relates to a kind of efficient, glass micro-fluidic chips preparation method of low cost and device, belong to microfabrication
Technical field.
Background technology
Micro-fluidic chip is also called micro-total analysis system (micro total analysis systems, μ TAS), is one
Class with microchannel network as architectural feature, collection sample introduction, sample treatment, biochemical reaction, separate, be detected as one global function miniature
Detection and the system of analysis.Short owing to possessing response time, consume amount of reagent little, it is easy to miniaturization, automatization and portability etc. are excellent
Point, microfluidic chip technology is since the nineties in 20th century is proposed by Switzerland scientist Manz et al., it has also become the most alive
The science frontier jumped, is widely used in the field such as chemistry, biology, medical science.
Glass, quartz, high molecular polymer and pottery is mainly had for making the material of micro-fluidic chip.With glass as base
The micro-fluidic chip of body compared with quartz, silicon chip and the pottery micro-fluidic chip as matrix, has good thermal diffusivity with other,
High light transmittance and insulating properties, and EOF is stronger；Compared with lucite and micro-fluidic chip that silicone rubber is matrix, glass core
Sheet matrix has good intensity, and bio-compatibility is good, and chemical stability is high, and Heat stability is good, channel surface is prone to modification etc.
Advantage.Therefore, along with the development of microfluidic chip technology, using glass material as the micro-fluidic chip of matrix by causing industrial circle
Concern with academia.But there is significant difference, in micro fabrication side in the Wuli-Shili-Renli system approach of glass material and other materials
Face needs to carry out new research and technology test, the most not yet forms unified glass micro fabrication standards system.
Present stage, because of the consideration in terms of cost of manufacture and technical maturity, micro-fluidic chip the most still uses and is prone to processing and batch system
The organic polymer made makees matrix material.
In order to preferably play the advantage of glass micro-fluidic chips, explore a kind of low cost, high efficiency, high manufacturing accuracy
Glass micro channels processing technology is significant.In existing document report, the processing method of glass micro-fluidic chips is main
There is a following four classes:
(1) wet etching: glass is isotropic material, can use HF solution that glass is implemented the quarter of non-single direction
Erosion, but the sidewall that this kind of method processes is curved, and processing depth-to-width ratio is low, low precision, and needs metal or Si as protective layer.
(2) dry etching: by the deep reaction ion etching (deep in SF6 plasma (ICP) source of inductive
Reactive ion etching, DRIE) carry out dry etch process, can under low pressure produce the plasma of high concentration,
Realizing the processing of groove profound and subtle to glass, but this lithographic method speed is low, equipment cost is high and carves between photoresist and glass
Erosion selectivity is low, seriously limits the popularization of this kind of technique.
(3) Laser Processing: laser skilled worker's speed is fast, efficiency is high, but because processing local temperature is high, glass heat conductivity is poor,
It is easy to produce micro-crack and heat affected layer at finished surface, affects serious surface quality.
(4) micromachined: micro-machining includes micro-Ultrasonic machining (micro-ultra-sonic-
Machining, MUSM), sandblasting, butcher's saw etc., but the characteristic size of minimum is subject to processing the restriction of tool heads, and surface quality
Difference, seriously governs the popularization of this technology.
For the limitation present in the processing silica micro structure of four class processing methods above, K.Kawai et al. of Japan
(Kawai K,Yamaguchi F,Nakahara A,et al.Fabrication of vertical and high-
aspect-ratio glass microfluidic device by borosilicate glass molding to
silicon structure[C].14th International Conference on Miniaturized Systems
For Chemistry and Life Sciences 2010, MicroTAS 2010.2010.) and domestic J.W.Liu et al.
(Liu J W,Huang Q A,Shang J T,et al.Micromachining of Pyrex7740glass for
micro-fluidic devices[C]//Proc.14th Int.Conf.Miniaturized Syst.Chem.Life Sci.
(μ TAS) .2010:1907-1909.) all attempt using a kind of new processing technology, comprise silicon etching, glass and silicon under vacuo
Anode linkage, heat treatment, chemically mechanical polishing and glass single-sided etching, this technique can make the structure of high-aspect-ratio,
Little characteristic size reaches 10 μm, but its long processing time, cost is high, and processing phenomenon easily occurs.
It addition, there is also on international market a kind of photosensitive glass make micro-fluidic chip method (Dietrich T R,
Ehrfeld W,Lacher M,et al.Fabrication technologies for microsystems utilizing
photoetchable glass[J].Microelectronic Engineering,1996,30(1):497-504.Freitag
A,Vogel D,Scholz R,et al.Microfluidic devices made of glass[J].Journal of the
Association for Laboratory Automation,2001,6(4):45-49.).One researched and developed by Schott company
Photosensitive glass FOTURAN is as glass matrix material for kind, this material photaesthesia near ultraviolet wavelength 310nm.Main system
Make process as follows: (1) exposed portion, make the chrome mask needing micro structure, and exposure FOTURAN glass under ultraviolet light；(2) heat
Process part, glass basis is heated to 600 DEG C, and keeps about 1 hour so that the crystallization of glass material of exposed portion, and
The glass material of unexposed portion keeps glassy state；(3) etched portions, puts into glass basis in hydrofluoric acid solution and etches, knot
The etch rate of the glass material of brilliant part is about 20 times of non-glass ceramics, it is easy to obtain the micro structure of high-aspect-ratio.This
Also it is the most unique silica micro structure production program of the marketization.Although this technique can omit the system of photoresist in common process
Standby process, and depth-to-width ratio can be prepared on glass>10, etching width<micro structure of 50 μm, but because of photosensitive glass in the program
Cost is high, and needs to prepare the operation such as chrome mask and heating, and the production cycle is long, a piece of glass-chip comprising micro structure on market
Preliminary quotation is more than 500 dollars, seriously governs the popularization of this technology.
In sum, some process routes of existing document report have bigger limitation, and major part all exists cost
The problems such as height, process are complicated, machining accuracy is poor, surface quality is poor, working (machining) efficiency is low, seriously govern glass micro-fluidic chips
Extensively application.Silica micro structure processing technique is one of major technology bottleneck of glass micro-fluidic system development at present.
Summary of the invention
The present invention is directed to the problems referred to above, it is provided that a kind of mould pressing process makes the method and apparatus of glass micro-fluidic chips, energy
Enough reduce the production cost of glass micro-fluidic chips, improve working (machining) efficiency and the crudy of glass micro-fluidic chips.
The technical solution used in the present invention is as follows:
A kind of mould pressing process makes the method for glass micro-fluidic chips, comprises the following steps:
1) Metal mould material is used to prepare the core rod of the antistructure comprising micro-fluidic chip；
2) glass is carried out ahead of schedule body and core rod puts into accurate die pressing machine, use mould pressing process disposably to process on glass
Micro structure required for glass micro-fluidic chips.
Further, step 1) utilize machining or beam processing method to prepare core rod；Described Metal mould material is
High rigidity be difficult to the materials such as bonding metal material, such as mould steel, rustless steel, tungsten.
Further, step 1) minimum feature size of antistructure of described micro-fluidic chip is 5 μm, maximum etching depth
It is 200 μm.
Further, step 2) described mould pressing process includes: heats, pressurizes, anneals and cools down；Specifically include following step
Rapid:
First stage, body of being carried out ahead of schedule by glass is placed in lower mold, comprises the metal core rod of micro structure towards glass surface, is placed on glass
On glass, then pass to noble gas, discharge the air in forming room, then glass and mould are heated to molding temperature；
Second stage, moves downwardly to contacting metal core rod by mold, and is pressed downward against making glass body of carrying out ahead of schedule to be moulded to
Type；
Phase III, keep less pressure, and Slow cooling is to discharge internal stress, i.e. carries out annealing process；
Fourth stage, is cooled fast to ambient temperature the demoulding from mould by glass.
A kind of molding die device realizing said method, including mold, lower mold, inner sleeve and outer sleeve, inner sleeve
Cylinder internal diameter and mold, lower mold molded portion crest clearance coordinate, between the internal diameter of outer sleeve and the external diameter of inner sleeve
Gap coordinates.
Further, described mold and lower mold use high rigidity, high intensity and sludge proof mold materials, by super
The mechanical processing techniques such as accurate grinding make；The embossing surface of described mold and lower mold reaches nanoscale by precise polished
Roughness.
Further, the maximal clearance of the external diameter of the internal diameter of described inner sleeve and described mold, lower mold molded portion
Less than 0.010mm.
Further, the end face of the molded portion of described mold, lower mold is provided with chamfering, in order in mold process
Aerofluxus；The sidewall of described inner sleeve has through hole, it is ensured that inner chamber gas can be discharged in mold process；The side of described outer sleeve
Wall has through hole, in order to aerofluxus.
Further, said apparatus ensures embossing depth by the height of outer sleeve.
The present invention proposes glass micro-fluidic chips technology of preparing based on accurate die pressing technique, this chip first
Reagent that technology of preparing needs without using traditional dry etching and wet etching and equipment, the high (one-shot forming of working (machining) efficiency
In 8 minutes), without subsequent treatment, mold after groove quality good, it is possible to achieve the large batch of system of glass micro-fluidic chips
Standby.
Accompanying drawing explanation
Fig. 1 is a kind of typical microstructure of metal core rod.
Fig. 2 is typical integral die mould structure schematic diagram, and wherein 1 is outer sleeve, and 2 is inner sleeve, and 3 is mold, 4
For tungsten core rod, 5 carry out ahead of schedule body for glass, and 6 is lower mold.
Fig. 3 is the curve chart that glass volume varies with temperature.
Fig. 4 is mold process schematic diagram, and wherein (a) figure is heating, and (b) figure is pressurization, and (c) figure is annealing, and (d) figure is cold
But.
Fig. 5 is temperature and the time dependent graph of a relation of pressure.
Fig. 6 be mold before and after the typical pattern of metal core rod, wherein (a) figure be mold before, after (b) figure is mold pressing.
Fig. 7 is the pattern contrast before and after position 1 core rod groove molds, and before wherein Before represents mold pressing, After represents mould
After pressure.
Fig. 8 is the pattern contrast before and after position 2 core rod groove molds, and before wherein Before represents mold pressing, After represents mould
After pressure.
Fig. 9 is to mold the typical glass microstructural photographs obtained.
Figure 10 is the glass very low power structure three-dimensional pseudocolour picture molding gained.
Detailed description of the invention
Below by specific embodiments and the drawings, the present invention will be further described.
1. glass mould pressing process makes the reasonability of micro structure, maturity and the problem of existence
Glass is the material that a class is special, is a kind of amorphism solid at normal temperatures, and this amorphous solid state is commonly called as
Glassy state.Along with the rising of temperature, glass material can be gradient to molten state from glassy state, and is different from the phase transformation of crystalline material
Journey.When glass is heated to transition temperature Tg with time near up to At, and glass will be softened, and viscosity is reduced to 107.6DPa s arrives
109.0Between dPa s, it is the most shorter that the Stress Release time is also reduced to millisecond magnitude.Therefore this feature can be utilized glass
Glass material carries out compression molding, and forming process will not produce excessive compressive stress, be additionally not easy to material internal produce bubble,
The flaws such as fragmentation, have absolutely proved the feasibility being made silica micro structure by mould pressing process.
Present stage, glass mould pressing process belongs to the technique of a kind of comparative maturity, is mainly used in optical lens components and makes
In.Because glass lens element is all substantially better than plastic at a lot of aspects, as hardness, refractive index, light transmission, heat stability and
Moisture resistance, it is extensively applied on the parts such as high-precision digital camera, mobile phone camera, blue-ray DVD player and videocorder.Allusion quotation
The moulded parts of type includes non-spherical lens, Fresnel lens, diffraction optical element and microlens array.In existing report,
In order to produce more excellent performance, such as high imaging quality and high light intensity uniformity, mold in optical element and also comprise micro structure
Preparation, but concentrate on V groove array (Zhou T F, Liang Z Q, Wang X B, et al.Experiment on Glass
Microgroove Molding by Using Polycrystalline Nickel Phosphorus Mold[C]
.Advanced Materials Research.2013,797:483-488.Kobayashi R,Zhou T,Shimada K,et
al.Ultraprecision Glass Molding Press for Microgrooves with Different Pitch
Sizes[J].Journal ref:International Journal of Automation Technology,2013,7
(6): 678-685.), pyramid array (Zhou T F, Yan J W, Kuriyagawa T.Comparing microgroove
array forming with micropyramid array forming in the glass molding press[C]//
Key Engineering Materials.2010,447:361-365.) and cylinder microarray (Huang C Y, Hsiao W T,
Huang K C,et al.Fabrication of a double-sided micro-lens array by a glass
molding technique[J].Journal of Micromechanics and Microengineering,2011,21
(8):085020.).These several micro structures are all from the standpoint of optical element image quality etc., far do not reach micro-fluidic chip
Requirement.Rectangle groove, as one of most typical micro-fluidic chip feature structure, is prepared also by mould pressing method on glass
Have no report.
Investigating according to domestic and foreign literature, the research using accurate die pressing technique to prepare micro-fluidic chip rarely has report.Mold
Glass micro-fluidic chips and optical lens mainly have following 4 differences: (1) glass is carried out ahead of schedule body aspect, because image quality requires not
Having optical lens strict, micro-fluidic glass body cost of carrying out ahead of schedule is low more than optical lens, and the price of a piece of body of carrying out ahead of schedule can drop to 5 yuan
Hereinafter, and ordinary optical lens are carried out ahead of schedule the price of body typically more than 50 yuan；(2) characteristic size aspect, because of micro-fluidic chip master
Will be in order to realize microfluid flowing inside, characteristic size is typically about 20～200 μm, and in order to realize in optical lens
High image quality, microstructure features size is sometimes for reaching below 10 μm；(3) macro-size aspect, micro-fluidic chip chi
Very little bigger, length/width size is up to 80mm, and the diameter of general optical lens is within 10mm, large-sized micro-fluidic chip mould
Pressure needs bigger core rod, causes early stage core rod to strengthen in manufacturing process difficulty；(4) technology difficulty aspect, and optical lens allusion quotation
Type structure (such as non-spherical structure and V groove structure) is compared, and glass micro-fluidic chips typical structure cross section is rectangle, actual deep wide
Than big (than curved surfaces), sidewall, the nearly right angle of corner, a series of problem will be brought in mold process, as filled
Rate is low, conformality is poor, the demoulding is difficult and core rod is easy to wear etc., and mould pressing process is proposed higher by the making of glass micro-fluidic chips
Requirement.
In order to verify that accurate die pressing technique prepares the feasibility of micro-fluidic chip, the present invention is from die wear and molding matter
Measure 2 importances and show that mould pressing process prepares the result of glass micro-fluidic chips typical microstructure (rectangular cross-section groove).
2. the glass micro-fluidic chips technology of preparing based on accurate die pressing technique of the present invention
The present invention first with various machinings or beam processing method in mould steel, rustless steel, the contour rigidity of tungsten, no
The core rod comprising micro-fluidic chip antistructure is prepared, then carried out ahead of schedule by glass body and core rod in the most bonding Metal mould material
Put into accurate die pressing machine simultaneously, use the mould pressing process (heat, pressurize, anneal and cool down) of standard, disposably on glass
Process the micro structure required for glass micro-fluidic chips.
1) mold insert structure
A kind of metal prepares micro-fluidic chip antistructure, it is achieved minimum feature size is 5 μm, maximum etching depth
It is 200 μm, fully meets the dimensional requirement of major part micro-fluidic chip micro structure.A kind of typical microstructure of described metal core rod
As shown in Figure 1.Metal pattern core material can be mould steel, rustless steel, the contour rigidity of tungsten be difficult to bonding metal material.
2) molding die makes
The integral die mould structure schematic diagram of the present invention is as shown in Figure 2.Mold 3 and lower mold 6 use high rigidity, height
Intensity and sludge proof WC mold materials, made by mechanical processing techniques such as superfine grindings, and upper and lower mould embossing surface leads to
Crossing the precise polished nanoscale rough degree that reaches, the end face of upper and lower mould molded portion has chamfering, it is simple to the row in mold process
Gas.The internal diameter of inner sleeve 2 and the crest clearance of upper and lower mould molded portion coordinate, and maximal clearance is less than 0.010mm, limit
The radial displacement of upper and lower mould in mold process.The sidewall of inner sleeve 2 has 2 exhausting holes, circumferentially 90 ° of distributions, it is ensured that inner chamber
Gas can be discharged in mold process.The internal diameter of outer sleeve 1 and the crest clearance of inner sleeve 2 coordinate, and clearance requirement is the highest, typically
More than 0.25mm, ensureing last embossing depth by outer sleeve height, outer sleeve sidewall has a row circumferentially 90 ° of distributions
Four through holes, in order to aerofluxus.
3) glass is carried out ahead of schedule body
Glass is a kind of strong temperature dependency material.At room temperature, glass is a kind of high rigidity fragile material；At high temperature
Under, it becomes a viscoelastic body or viscous liquid.Thermal expansion coefficient of glass is influenced by temperature highly significant, glass volume with
The typical curve of variations in temperature is as shown in Figure 3.Softening point SP is defined as, when glass can deform under its own weight, showing as
The temperature of liquid condition.Yield point At (being referred to as deformation point) is defined as when glass reaches maximum swelling state, and has phase
To low plasticity, temperature when starting to shrink at.When the glass of molten slowly cools down through this point, the volume dramatic decrease of glass
To inversion point Tg, under Tg point, volume contraction rate reduction is to relatively low value.Annealing point (AP) is annealing model in moulded glass
The upper end enclosed, in annealing process, stress is to be reduced to actual acceptable value at short notice.Strain point (StP) is defined as moving back
The lower end of fire temperature range, is also the maximum operating temperature of glass simultaneously.The molded areas of general glass is upper and lower in yield point At
In 50 DEG C, such as the scope of dash area in Fig. 3.Theoretically, all of optical glass can mold.
4) technical process and parameter select
Fig. 4 is glass mold process schematic diagram, is mainly made up of four-stage, is (a) heating, (b) pressurization, (c) respectively
Annealing and (d) cool down.First stage, glass body of carrying out ahead of schedule is placed in lower mold, comprises the metal core rod of micro structure towards glass surface, puts
On glass, then pass to noble gas (typically nitrogen), discharge the air in forming room, it follows that glass and mould by
Infrared lamps is to molding temperature, as shown in (a) figure in Fig. 4；Second stage, mold moves downward, to contacting metal core rod,
And it being depressed into downwards the position that outer sleeve limits, glass body of carrying out ahead of schedule is molded, as shown in (b) figure in Fig. 4；Phase III, protect
Hold less pressure, and Slow cooling is with release internal stress (i.e. annealing process), as shown in (c) figure in Fig. 4；Fourth stage, glass
Glass is quickly cooled to ambient temperature the demoulding from mould, as shown in (d) figure in Fig. 4.By this four-stage, micro-fluidic core
Micro structure required for sheet is i.e. precisely duplicated on glass.In mold process, temperature and the time dependent relation of pressure
As shown in Figure 5.
5) experimental data and result
5.1) core rod abrasion
Very low power is one of most typically micro structure in micro-fluidic chip.Here, choose can mold out on metal pattern micro-
The region of groove, research molds the morphology change of core rod after 21 times, and as shown in Figure 6, before wherein (a) figure is mold pressing, (b) figure is mould
After pressure.It can be seen that in addition to the change having part colours, before and after mold pressing, the morphology change of core rod is inconspicuous.
In order to probe into the mold process change to core rod very low power pattern further, pass through laser confocal microscope respectively
Be perpendicular to very low power scanning direction, it is thus achieved that mold forward and backward core rod region 1 and region 2 (Fig. 6 represents with B1, B2 before mold pressing,
Represent with A1, A2 after molding) cross sectional shape respectively the most as shown in Figure 7 and Figure 8.Although during twice measurement, cross section base
The lateral attitude of line cannot keep consistent completely with height, but upper figure can meet the preliminary analysis cutting shape contrast.From cross section shape
Shape is seen, the core rod groove in region 1 and region 2 forward and backward maintains preferable concordance molding, and it is left that boss height is 25 μm
The right side, shows that this kind of core rod makes glass micro-fluidic chips and have high service life.
5.2) microstructure appearance molded
The mould pressing process proposed by this patent, the microstructural photographs made on glass is as shown in Figure 9.(b) figure in Fig. 9
For the photomacrograph of glass molds casting die, wherein comprise a lot of micro structure, such as micro-cell electron capture detector, very low power, micro-cylinder matrix, micro-square square
Battle array etc..In order to show mold pressing details further, in Fig. 9, (a) figure and (c) figure are respectively cylindrical-array and the glass of glass molds casting die
Very low power enlarged drawing.It can be seen that the cylindrical shape obtained after Mo Yaing and groove shape keep preferably.
In order to study the pattern molding channel bottom, the glass very low power structure three obtained by white light interferometer further
Dimension pseudocolour picture (is illustrated as black and white) as shown in Figure 10.Gash depth is about 22 μm, close to design gash depth (25 μm),
Core rod bottom roughness degree reaches 2.58nm, fully meets the requirement of micro-fluidic chip.
Above example is only limited in order to technical scheme to be described, the ordinary skill of this area
Technical scheme can be modified or equivalent by personnel, without departing from the spirit and scope of the present invention, and this
The protection domain of invention should be as the criterion with described in claims.
Claims (10)
1. the method that a mould pressing process makes glass micro-fluidic chips, it is characterised in that comprise the following steps:
1) Metal mould material is used to prepare the core rod of the antistructure comprising micro-fluidic chip；
2) glass is carried out ahead of schedule body and core rod puts into accurate die pressing machine, use mould pressing process disposably to process glass on glass
Micro structure required for micro-fluidic chip.
2. the method for claim 1, it is characterised in that step 1) utilize machining or beam processing method to prepare mould
Core；Described Metal mould material be high rigidity be difficult to bonding metal material, including mould steel, rustless steel, tungsten.
3. the method for claim 1, it is characterised in that step 1) minimal characteristic of antistructure of described micro-fluidic chip
A size of 5 μm, maximum etching depth is 200 μm.
4. the method for claim 1, it is characterised in that step 2) described mould pressing process includes: heats, pressurizes, anneals
And cooling.
5. method as claimed in claim 4, it is characterised in that step 2) described mould pressing process comprises the following steps:
First stage, body of being carried out ahead of schedule by glass is placed in lower mold, comprises the metal core rod of micro structure towards glass surface, is placed on glass
On, then pass to noble gas, discharge the air in forming room, then glass and mould are heated to molding temperature；
Second stage, moves downwardly to contacting metal core rod by mold, and is pressed downward against making glass body of carrying out ahead of schedule molded；
Phase III, keep less pressure, and Slow cooling is to discharge internal stress, i.e. carries out annealing process；
Fourth stage, is cooled fast to ambient temperature the demoulding from mould by glass.
6. the molding die device realizing method described in claim 1, it is characterised in that include mold, lower mold, interior
Sleeve and outer sleeve, the internal diameter of inner sleeve and mold, the crest clearance of molded portion of lower mold coordinate, the internal diameter of outer sleeve
Coordinate with the crest clearance of inner sleeve.
7. molding die device as claimed in claim 6, it is characterised in that described mold and lower mold use high rigidity,
High intensity and sludge proof mold materials, made by mechanical processing techniques such as superfine grindings；Described mold and lower mold
Embossing surface reach nanoscale rough degree by precise polished.
8. molding die device as claimed in claim 6, it is characterised in that the internal diameter of described inner sleeve and described mold,
The maximal clearance of the external diameter of lower mold molded portion is less than 0.010mm.
9. molding die device as claimed in claim 6, it is characterised in that described mold, the molded portion of lower mold
End face is provided with chamfering, in order to the aerofluxus in mold process；The sidewall of described inner sleeve has through hole, it is ensured that inner chamber gas is at mould
Can discharge during pressure；The sidewall of described outer sleeve has through hole, in order to aerofluxus.
10. molding die device as claimed in claim 6, it is characterised in that ensure embossing depth by the height of outer sleeve.
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| CN107790201A (en) * | 2017-10-20 | 2018-03-13 | 河南工业大学 | A kind of method for preparing microfluidic channel on glass using simple heat pressing process |
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| CN111763001A (en) * | 2020-06-10 | 2020-10-13 | 北京理工大学 | Multi-material combined die for high-precision glass die forming |
| CN111792619A (en) * | 2020-07-17 | 2020-10-20 | 中国科学技术大学 | Method for continuously manufacturing micro-nano structures on glass surface in batch |
| CN113387321A (en) * | 2020-03-12 | 2021-09-14 | 北京理工大学 | Processing method for realizing high-centering double-sided glass microstructure array |
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| CN107790201A (en) * | 2017-10-20 | 2018-03-13 | 河南工业大学 | A kind of method for preparing microfluidic channel on glass using simple heat pressing process |
| CN107876112A (en) * | 2017-10-20 | 2018-04-06 | 河南工业大学 | A kind of method of glass Direct Bonding artistic glass base microfluidic channel sealing-in |
| CN113387321A (en) * | 2020-03-12 | 2021-09-14 | 北京理工大学 | Processing method for realizing high-centering double-sided glass microstructure array |
| CN113387321B (en) * | 2020-03-12 | 2022-07-12 | 北京理工大学 | Processing method for realizing high-centering double-sided glass microstructure array |
| CN111763001A (en) * | 2020-06-10 | 2020-10-13 | 北京理工大学 | Multi-material combined die for high-precision glass die forming |
| CN111792619A (en) * | 2020-07-17 | 2020-10-20 | 中国科学技术大学 | Method for continuously manufacturing micro-nano structures on glass surface in batch |
| CN113941377A (en) * | 2021-10-11 | 2022-01-18 | 北京理工大学 | All-glass microfluidic chip and processing method |
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