CN106026702A - High-power direct current plasma power supply - Google Patents
High-power direct current plasma power supply Download PDFInfo
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- CN106026702A CN106026702A CN201610340056.0A CN201610340056A CN106026702A CN 106026702 A CN106026702 A CN 106026702A CN 201610340056 A CN201610340056 A CN 201610340056A CN 106026702 A CN106026702 A CN 106026702A
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- 238000005259 measurement Methods 0.000 claims abstract description 27
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- 210000002381 plasma Anatomy 0.000 abstract 6
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- 238000000034 method Methods 0.000 description 13
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
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- 230000003749 cleanliness Effects 0.000 description 1
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- 230000003071 parasitic effect Effects 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M7/00—Conversion of ac power input into dc power output; Conversion of dc power input into ac power output
- H02M7/02—Conversion of ac power input into dc power output without possibility of reversal
- H02M7/04—Conversion of ac power input into dc power output without possibility of reversal by static converters
- H02M7/12—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode
- H02M7/21—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal
- H02M7/217—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only
- H02M7/2176—Conversion of ac power input into dc power output without possibility of reversal by static converters using discharge tubes with control electrode or semiconductor devices with control electrode using devices of a triode or transistor type requiring continuous application of a control signal using semiconductor devices only comprising a passive stage to generate a rectified sinusoidal voltage and a controlled switching element in series between such stage and the output
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02M—APPARATUS FOR CONVERSION BETWEEN AC AND AC, BETWEEN AC AND DC, OR BETWEEN DC AND DC, AND FOR USE WITH MAINS OR SIMILAR POWER SUPPLY SYSTEMS; CONVERSION OF DC OR AC INPUT POWER INTO SURGE OUTPUT POWER; CONTROL OR REGULATION THEREOF
- H02M1/00—Details of apparatus for conversion
- H02M1/0067—Converter structures employing plural converter units, other than for parallel operation of the units on a single load
- H02M1/007—Plural converter units in cascade
Abstract
The invention relates to a high-power direct current plasma power supply. The high-power direct current plasma power supply comprises n groups of series-wound PSM modules, a wave-smoothing inductor, a first current measurement module and a feedback control protection system, wherein the network voltage is connected with the input end of a rectifier transformer through a vacuum circuit breaker; the output end of the rectifier transformer is connected to the input ends of each group of PSM modules separately; the outputs of the n groups of series-wound PSM modules are connected to an output electrode through the wave-smoothing inductor; the first current measurement module is mounted on a major loop bus; and the input end of the feedback protection control system is connected with the first current measurement module while the output end of the feedback protection control system is connected with the control ends of the PSM modules separately. The high-power direct current plasma power supply has a large power supply output voltage range; the output power can achieve the MW level; and meanwhile, the high-power direct current plasma power supply has good dynamic characteristics, quite short reaction time, and good current control characteristics, and can rapidly response to the sharp disturbance of the plasma load and can ensure the quality of the plasmas products.
Description
Technical field
The present invention relates to a kind of power supply, be specifically related to a kind of high power DC plasma electrical source.
Background technology
At present, plasma technique in metallurgy, spraying, surface modification, environmental improvement, communicate and detect and the application of other industrial circles is more and more extensive, plasma chemical industry cleanliness without any pollution in process of production, and need not use catalyst, technical process is simple, adaptability to raw material is wide, in today that resource scarcity, environmental problem are increasingly serious, the most efficiently, reasonably utilize plasma technique, be the key subjects of relation environmental protection, comprehensive utilization of resources, energy-saving and emission-reduction, industrial structure optimization.But, the multiple application of plasma technique to be realized and all-round popularization, it is critical only that fast response time to be had, control performance are good, reliability is high high power plasma power supply and high performance plasma generator.
Theoretical and the plasma process situation according to electric arc, the energy stability of plasma load is directly related with electric current, and plasma electrical source mainly uses constant-current source.In technical process, combined influence due to many factors such as gas discharge characteristic, gas pressure, gas composition and plasma temperatures, plasma load there will be relatively large disturbances, such as beat arc phenomenon, plasma load resistance can be made to strongly reduce, plasma electrical source output near short circuit, so plasma load typically presents the C-V characteristic of level or rising.If plasma electrical source output voltage can not the change of quick responsive load impedance time, be just difficult to stable output electric current, thus the process conditions of plasma can be lost, it is impossible to maintain normal discharge process, and then technological effect cannot be ensured, affect product quality.Therefore, plasma electrical source must possess steep drop characteristic, it is necessary to has good dynamic characteristic, the shortest response time to adapt to the drastically change of load.
For a long time, the most traditional commonly used silicon controlled rectification power source of high power plasma DC source, for the steep drop characteristic needed for obtaining and stable operating current, generally need to increase vacuum in the loop and adjust pipe, or seal in energy consumption and reach the resistance of more than tens kilowatts；Frequency and the characteristic etc. of SCR rectification circuit due to alternating current circuit, also the response time determining silicon controlled rectification power source can only achieve a millisecond magnitude (as under power frequency, the average out-of-control time of three-phase bridge rectifier circuit has just reached 1.27ms), and, silicon controlled rectification power source power factor is the highest.So, this power supply not only efficiency is low, energy consumption is high, and bulky, heavy, and dynamic responding speed is slow, and control performance is poor, it is difficult to adapt to the drastically change of load impedance characteristic.
In recent years, also the plasma electrical source using high frequency full-bridge inverting fabrication techniques is occurred in that, compare tradition silicon controlled rectification power source, although high frequency inverter have energy-conservation, save material, to advantages such as the electrical network little and preferable control performances of impact, but under high power plasma loaded work piece environment, high power contravariant formula plasma electrical source also exists the problems such as the transmission of strong energy efficient and the reliability that the factors such as parallel current-sharing, temperature rise, electromagnetic interference, structure complexity, parasitic parameter cause.
High-performance, the development of high power DC plasma electrical source of high reliability and exploitation, be the bottleneck of domestic and international high power plasma system development, to high power plasma system is all-round developing and popularization and application play vital effect.
Summary of the invention
It is an object of the invention to provide a kind of high power DC plasma electrical source, not only dynamic property is good, the drastically change of plasma load output impedance can be quickly responded in several microseconds, stably export electric current, ensure product quality, and this power supply also has higher power factor, the highest efficiency and reliability.
For achieving the above object, present invention employs techniques below scheme: include the PSM module that n group is connected, flat ripple inductance, first current measurement module and feedback control protection system, line voltage is connected with the input of rectifier transformer through vacuum circuit breaker, the outfan of rectifier transformer is respectively connecting to often organize the input of PSM module, the output of PSM module of n group series connection through flat ripple inductance connection to output electrode, described first current measurement module is arranged on major loop bus, for measuring electric power outputting current, and after being converted into voltage output in proportion, it is connected to feedback control protection system, the input of described feedback protection system and the first current measurement module are connected, its outfan is connected with the control end of PSM module respectively.
Further improvement as technique scheme:
Described feedback control protection system; running state monitoring unit is set including digitial controller and parameter; described parameter sets running state monitoring unit and is connected alternately with digitial controller, and the outfan of digitial controller is connected with the control end of each PSM module by optical fiber；
Described feedback control protection system, for by carrying out real-time communication, the output of current measurement module on detection major loop simultaneously with parameter setting running state monitoring unit, calculating the number of the PSM module of required switching.
Described PSM module includes that isolating transformer, vacuum contactor, soft charge resistance, rectification circuit, fly-wheel diode, varistor, insulated gate bipolar transistor, IGBT drive and control module, comparator and the second current measurement module；nullDescribed rectification circuit is made up of six Power Diode Pumped，The ac input end of described rectification circuit is respectively successively through AC fuse、Vacuum contactor is connected with the former limit of isolating transformer，Described soft charge resistor coupled in parallel is at the two ends of vacuum contactor，The cathode output end of described rectification circuit is connected with the colelctor electrode of insulated gate bipolar transistor，The emitter stage of insulated gate bipolar transistor is connected with the negative electrode of fly-wheel diode，The grid of insulated gate bipolar transistor、Collector and emitter drives with IGBT and the outfan of control module is connected，The anode of fly-wheel diode is connected with the cathode output end of rectification circuit，The anode of described fly-wheel diode is connected with the colelctor electrode of insulated gate bipolar transistor through Absorption Capacitance，Described varistor、Output resistance and filter capacitor are connected in parallel on the outfan of rectification circuit respectively，Described second current measurement module is arranged on the emitter stage of insulated gate bipolar transistor，The low-pass filtered device of positive input of described comparator and the second current measurement module are connected，Its reverse input end is connected with power supply VCC through peripheral circuit，The outfan of comparator drives with IGBT and the input of control module is connected，Described IGBT drives and the feeder ear of control module is connected with the secondary of isolating transformer.
Described PSM module also includes indicating circuit, described indicating circuit is made up of current-limiting resistance and light emitting diode, the negative electrode of described light emitting diode is connected with the cathode output end of rectification circuit, and its anode is connected with the emitter stage of insulated gate bipolar transistor through current-limiting resistance.
As shown from the above technical solution, high power DC plasma electrical source of the present invention, its electric power output voltage scope is big, output is up to MW level, there is good dynamic characteristic, the shortest response time, can quickly respond the acute large disturbances of (musec order) plasma load, possess good current controling characteristic, it is ensured that the quality of plasma products.This high power DC plasma electrical source simple in construction, has fault redundance function, and it is properly functioning that part of module fault will not affect power supply, and reliability is high；Meanwhile, the present invention has the highest power factor, improves power quality, reduces production cost.
Accompanying drawing explanation
Fig. 1 is the overall circuit figure of the present invention；
Fig. 2 is the circuit theory diagrams of PSM module in the present invention.
Detailed description of the invention
The present invention will be further described below in conjunction with the accompanying drawings:
As shown in Figure 1, the high power DC plasma electrical source of the present embodiment, PSM module 2 including the series connection of n group, flat ripple inductance 7, first current measurement module 8 and feedback control protection system, line voltage is connected through the input of vacuum circuit breaker 1 with rectifier transformer 3, the outfan of rectifier transformer 3 is respectively connecting to often organize the input of PSM module 2, the output of the PSM module 2 of n group series connection is connected to output electrode through flat ripple inductance 7, first current measurement module 8 is arranged on major loop bus, for measuring electric power outputting current, and after being converted into voltage output in proportion, it is connected to feedback control protection system, input and first current measurement module 8 of feedback protection system are connected, its outfan is connected with the control end of PSM module 2 respectively.
Feedback control protection system; running state monitoring unit 10 is set including digitial controller 9 and parameter; parameter sets running state monitoring unit 10 and is connected alternately with digitial controller 9, and the outfan of digitial controller 9 is connected with the control end of each PSM module 2 by optical fiber 11；This feedback control protection system, for by carrying out real-time communication, the output of current measurement module on detection major loop simultaneously with parameter setting running state monitoring unit 10, calculating the number of the PSM module 2 of required switching.
As in figure 2 it is shown, PSM module 2 includes that isolating transformer 34, indicating circuit, vacuum contactor 21, soft charge resistance 22, rectification circuit 24, fly-wheel diode 31, varistor 25, insulated gate bipolar transistor 28, IGBT drive and control module 35, comparator 37 and the second current measurement module 30；nullRectification circuit 24 is made up of six Power Diode Pumped，The ac input end of rectification circuit 24 is respectively successively through AC fuse 23、Vacuum contactor 21 is connected with the former limit of isolating transformer 34，Soft charge resistance 22 is connected in parallel on the two ends of vacuum contactor 21，The cathode output end of rectification circuit 24 is connected with the colelctor electrode of insulated gate bipolar transistor 28，The emitter stage of insulated gate bipolar transistor 28 is connected with the negative electrode of fly-wheel diode 31，The grid of insulated gate bipolar transistor 28、Collector and emitter drives with IGBT and the outfan of control module 35 is connected，The anode of fly-wheel diode 31 is connected with the cathode output end of rectification circuit 24，The anode of fly-wheel diode 31 is connected through the colelctor electrode of Absorption Capacitance 29 with insulated gate bipolar transistor 28，Varistor 25、Output resistance 26 and filter capacitor 27 are connected in parallel on the outfan of rectification circuit 24 respectively，Second current measurement module 30 is arranged on the emitter stage of insulated gate bipolar transistor 28，The low-pass filtered device of positive input 36 of comparator 37 is connected with the second current measurement module 30，Its reverse input end is connected with power supply VCC through peripheral circuit，The outfan of comparator 37 drives with IGBT and the input of control module 35 is connected，IGBT drives and the feeder ear of control module 35 is connected with the secondary of isolating transformer 34.This indicating circuit is made up of current-limiting resistance 33 and light emitting diode 32, and the negative electrode of light emitting diode 32 is connected with the cathode output end of rectification circuit 24, and its anode is connected through the emitter stage of current-limiting resistance 33 with insulated gate bipolar transistor 28.
The former limit of this rectifier transformer 3 uses delta connection, 3 subharmonic currents can be avoided to flow into electrical network, rectifier transformer 3 secondary be star connection 4 and delta connection 5 alternately, so can finally export 12 pulse wave rectifier voltages at DC side, the ripple of DC side can be reduced, and effectively suppress the wave distortion of AC.Rectified transformator 3 enters the input of PSM module 2 after being transformed into suitable voltage, in PSM module 2, alternating voltage can be transformed into galvanic current pressure by rectification unit and filter unit, with turning off, the conducting of IGBT switch element determines often whether group PSM module puts into, often the output voltage of group PSM module 2 is Um, after the series connection of n group on all four PSM module 2, maximum output voltage value i.e. can reach n*Um, the output voltage values of power supply depends on the number putting into PSM module at any time, its value be Uout=m*Um (wherein, m is for putting into number of modules, m≤n), electric power output voltage is adjustable between 0～n*Um, when certain PSM module 2 turns off, the fly-wheel diode 31 turned off in module provides afterflow passage for the electric current in loop.Output after the series connection of n group PSM module 2 is again by, after outputting inductance 7, being connected to the electrode two ends of plasma load, and this outputting inductance 7 can smooth output electric current, reduces pulsation of current.
The feedback control protection system of the present invention, with digitial controller 9 as core, by setting and running state monitoring unit 10 real-time communication with parameter, receives the operational factor of the every task of power supply, and uploads power supply actual motion state in real time；A LEM current measurement module 8 on major loop measures the output current value of power supply in real time, and it is converted into voltage output in proportion, by shielded cable, magnitude of voltage is transferred to the analog quantity input of digitial controller 9, digitial controller 9 converts thereof into corresponding digital quantity and compares with the current setting value in operational factor, PID arithmetic etc., calculate the number of the PSM module 9 of required switching, exported by the GPIO interface of digitial controller 9 correspondence, and control and the driver element 35 of each PSM module 2 it is connected to by fiber-optic transfer 11, such that it is able to fast conducting or turn off the insulated gate bipolar transistor 28 in corresponding PSM module 2, realize the Rapid Variable Design of electric power output voltage, make to export electric current quickly to follow the tracks of and stable at current setting value；The duty of each PSM module 2 also can be transferred to digitial controller 9 by fiber-optic transfer unit in real time, and is uploaded to running state monitoring system.
As in figure 2 it is shown, the indicating circuit that light emitting diode 32 and current-limiting resistor 33 are composed in series, for showing the duty of each PSM module 2, the second current measurement module 30, for monitoring the output electric current of each PSM module 2.Vacuum contactor 21 and soft charge resistance 22 constitute soft charge circuit; in the preparatory stage; when vacuum circuit breaker 1 closes; when rectifier transformer 3 is charged; PSM module 2 is charged for filter capacitor 27 by soft charge resistance 22, rectification circuit 24; after on filter capacitor 27, voltage reaches the 70% of its peak value; close vacuum contactor 21 again; so can be prevented effectively from capacitance voltage to overcharge; meanwhile, if in work process, when finding filter capacitor 27 both end voltage higher than protection threshold value; also can direct disjunction vacuum contactor 21, protection equipment and the safety of device.Rectification circuit 24 is made up of six Power Diode Pumped, wherein three diodes are common-anode, and other three is commoncathode, and outlet side is parallel with filter capacitor 27, constitute the uncontrollable current rectifying and wave filtering circuit of three-phase together, three-phase alternating voltage is transformed into galvanic current pressure；It is serially connected with the AC fuse 23 of three-phase alternating current input circuit, is used for protecting phase fault to cross stream；It is connected in parallel on the piezoresistor 25 of rectifier bridge DC output end both sides, is used for protecting DC side output overvoltage；The output stage of PSM module 2 is made up of IGBT module 28 and the fast switch element recovering the class Buck structural topology that fly-wheel diode 31 forms, and the input of each PSM module 2 the most only need to be by or off this insulated gate bipolar transistor i.e. IGBT of 28() can realize；The Absorption Capacitance 29 being connected in parallel on IGBT colelctor electrode and fly-wheel diode 31 anode two ends uses noninductive electric capacity, IGBT, fly-wheel diode 31 can be suppressed to turn off overvoltage and du/dt, reduce switching loss when turning off and noise；When IGBT module 28 turns on, this PSM module 2 puts into, the light emitting diode 32 being attempted by this module outfan is lighted, representing that this module is in running order, the current-limiting resistance 33 connected with light emitting diode limits the electric current by light emitting diode branch road, when IGBT module 28 turns off, this PSM module does not puts into, electric current in major loop passes through fly-wheel diode 31 afterflow, and light emitting diode 32 extinguishes simultaneously, represents that this PSM module 2 is not devoted oneself to work.
As shown in Figure 2, the power supply of IGBT driving and control module 35 is taken from the three-phase alternating current input side of this PSM module 2, appoint at three-phase alternating current input side and take the most biphase supply IGBT driving and control module after isolating transformer 34 is transformed into suitable low pressure, the DC voltage being re-transformed into multiple voltage grade in inside modules provides DC supply for different components, so can ensure that whole PSM module 2 has good insulation and resistance to voltage levels；PSM module 2 is all carried out by fiber-optic transfer 11 with the signal contact of main control loop, the control signal of main control loop is driven and the signal receiving end of control module 35 by fiber-optic transfer 11 to IGBT, drive circuit in module quickly exports positive and negative driving voltage and is applied to grid and the emitter stage two ends of IGBT, can control IGBT and carry out fast conducting or shutoff, the duty of PSM module 2 also can pass through fiber-optic transfer 11 to master controller simultaneously.The described LEM current measurement module 30 on the IGBT switch-side output bus being arranged on each PSM module 2, for measuring the output electric current of each PSM module, after being converted into voltage output in proportion, high-frequency interferencing signal is filtered through low pass filter 36, the outfan of comparator 37 it is connected to together with default overcurrent protection threshold voltage, the output of comparator 37 is connected to IGBT and drives and the input port of control module 35, if PSM module output current exceedes protection threshold value, then comparator 37 is output as high level, IGBT drives and control module 35 will export negative voltage at once and make IGBT switch immediately turn off, cut off the output of PSM module 2, prevent overcurrent damage equipment and device.
Power supply of the present invention is applicable to plasma load, in the course of the work, impact due to many factors such as the flash-over characteristic of plasma load, gas pressure, temperature, plasma load there will be violent disturbance, this just requires that plasma electrical source has good dynamic characteristic, the drastically change of energy quickly responsive load impedance operator.Take the topological structure that this PSM module 2 is connected, use IGBT switch fast conducting and turn off the mode of PSM module output, just can the drastically change of responsive load voltage in several microseconds, stabling current exports, simultaneously when the fault such as stream, overvoltage occurred, also can export at several microsecond internal cutting off power supplys, ensure equipment safety；Moreover, when certain or certain k PSM module can not work because of fault, as long as desired output voltage values is less than (n-k) * Um, power supply still can work on, thus this novel high power DC plasma electrical source also has good fault redundance function.
Embodiment described above is only to be described the preferred embodiment of the present invention; not the scope of the present invention is defined; on the premise of designing spirit without departing from the present invention; various deformation that technical scheme is made by those of ordinary skill in the art and improvement, all should fall in the protection domain that claims of the present invention determines.
Claims (5)
- null1. a high power DC plasma electrical source，It is characterized in that: include the PSM module (2) that n group is connected、Flat ripple inductance (7)、First current measurement module (8) and feedback control protection system，Line voltage is connected through the input of vacuum circuit breaker (1) with rectifier transformer (3)，The outfan of rectifier transformer (3) is respectively connecting to often organize the input of PSM module (2)，The output of the PSM module (2) of n group series connection is connected to output electrode through flat ripple inductance (7)，Described first current measurement module (8) is arranged on major loop bus，For measuring electric power outputting current，And after being converted into voltage output in proportion, it is connected to feedback control protection system，The input of described feedback protection system and the first current measurement mould (8) are connected，Its outfan control end with PSM module (2) respectively is connected.
- High power DC plasma electrical source the most according to claim 1; it is characterized in that: described feedback control protection system; running state monitoring unit (10) is set including digitial controller (9) and parameter; described parameter sets running state monitoring unit (10) and is connected alternately with digitial controller (9), and the outfan of digitial controller (9) is connected with the control end of each PSM module (2) by optical fiber (11).
- High power DC plasma electrical source the most according to claim 2; it is characterized in that: described feedback control protection system; for by carrying out real-time communication with parameter setting running state monitoring unit (10); the output of current measurement module on detection major loop simultaneously, calculates the number of the PSM module (2) of required switching.
- High power DC plasma electrical source the most according to claim 1, it is characterised in that: described PSM module (2) includes that isolating transformer (34), vacuum contactor (21), soft charge resistance (22), rectification circuit (24), fly-wheel diode (31), varistor (25), insulated gate bipolar transistor (28), IGBT drive and control module (35), comparator (37) and the second current measurement module (30)；nullDescribed rectification circuit (24) is made up of six Power Diode Pumped，The ac input end of described rectification circuit (24) is respectively successively through AC fuse (23)、Vacuum contactor (21) is connected with the former limit of isolating transformer (34)，Described soft charge resistance (22) is connected in parallel on the two ends of vacuum contactor (21)，The cathode output end of described rectification circuit (24) is connected with the colelctor electrode of insulated gate bipolar transistor (28)，The emitter stage of insulated gate bipolar transistor (28) is connected with the negative electrode of fly-wheel diode (31)，The grid of insulated gate bipolar transistor (28)、Collector and emitter drives with IGBT and the outfan of control module (35) is connected，The anode of fly-wheel diode (31) is connected with the cathode output end of rectification circuit (24)，The anode of described fly-wheel diode (31) is connected through the colelctor electrode of Absorption Capacitance (29) with insulated gate bipolar transistor (28)，Described varistor (25)、Output resistance (26) and filter capacitor (27) are connected in parallel on the outfan of rectification circuit (24) respectively，Described second current measurement module (30) is arranged on the emitter stage of insulated gate bipolar transistor (28)，The low-pass filtered device of the positive input (36) of described comparator (37) is connected with the second current measurement module (30)，Its reverse input end is connected with power supply VCC through peripheral circuit，The outfan of comparator (37) drives with IGBT and the input of control module (35) is connected，Described IGBT drives and the feeder ear of control module (35) is connected with the secondary of isolating transformer (34).
- High power DC plasma electrical source the most according to claim 4, it is characterized in that: described PSM module (2) also includes indicating circuit, described indicating circuit is made up of current-limiting resistance (33) and light emitting diode (32), the negative electrode of described light emitting diode (32) is connected with the cathode output end of rectification circuit (24), and its anode is connected through the emitter stage of current-limiting resistance (33) with insulated gate bipolar transistor (28).
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| CN106972562A (en) * | 2017-03-31 | 2017-07-21 | 北京福斯特开关设备有限公司 | A kind of charging circuit and integral type charging equipment |
| CN108449857A (en) * | 2018-01-30 | 2018-08-24 | 安徽省金屹电源科技有限公司 | A kind of exchange aura power supply for vacuum plasma generator |
| CN108646207A (en) * | 2018-05-31 | 2018-10-12 | 国网电力科学研究院武汉南瑞有限责任公司 | Direct current measuring devices current step standard source experimental rig and method |
| CN109980924A (en) * | 2019-02-27 | 2019-07-05 | 华中科技大学 | A kind of PSM high voltage power supply based on feedback control |
| CN113258763A (en) * | 2021-06-22 | 2021-08-13 | 深圳市永联科技股份有限公司 | Power module, voltage-sharing device and electronic equipment |
| CN113812081A (en) * | 2019-05-20 | 2021-12-17 | 三菱电机株式会社 | Power supply device |
| CN114362555A (en) * | 2021-12-28 | 2022-04-15 | 核工业西南物理研究院 | Power module with multi-functional selection |
| CN115166340A (en) * | 2022-09-06 | 2022-10-11 | 中铁电气化勘测设计研究院有限公司 | Processing method of sampling data of subway direct current protection device |
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| CN108646207A (en) * | 2018-05-31 | 2018-10-12 | 国网电力科学研究院武汉南瑞有限责任公司 | Direct current measuring devices current step standard source experimental rig and method |
| CN109980924A (en) * | 2019-02-27 | 2019-07-05 | 华中科技大学 | A kind of PSM high voltage power supply based on feedback control |
| CN113812081A (en) * | 2019-05-20 | 2021-12-17 | 三菱电机株式会社 | Power supply device |
| CN113812081B (en) * | 2019-05-20 | 2024-02-09 | 三菱电机株式会社 | Power supply device |
| CN113258763A (en) * | 2021-06-22 | 2021-08-13 | 深圳市永联科技股份有限公司 | Power module, voltage-sharing device and electronic equipment |
| WO2022267393A1 (en) * | 2021-06-22 | 2022-12-29 | 深圳市永联科技股份有限公司 | Power module, voltage-sharing apparatus and electronic device |
| CN114362555A (en) * | 2021-12-28 | 2022-04-15 | 核工业西南物理研究院 | Power module with multi-functional selection |
| CN115166340A (en) * | 2022-09-06 | 2022-10-11 | 中铁电气化勘测设计研究院有限公司 | Processing method of sampling data of subway direct current protection device |
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