CN106021703A - Method for extracting weight line width in layout design - Google Patents
Method for extracting weight line width in layout design Download PDFInfo
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- CN106021703A CN106021703A CN201610326227.4A CN201610326227A CN106021703A CN 106021703 A CN106021703 A CN 106021703A CN 201610326227 A CN201610326227 A CN 201610326227A CN 106021703 A CN106021703 A CN 106021703A
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- layout design
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F30/00—Computer-aided design [CAD]
- G06F30/30—Circuit design
- G06F30/39—Circuit design at the physical level
- G06F30/392—Floor-planning or layout, e.g. partitioning or placement
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Abstract
The invention provides a method for extracting weight line width in layout design. The method comprises the steps of determining maximum line width and minimum line width allowable for a design rule in layout design data, a minimum storage unit of a layout, and an allowable error of the weight line width; extracting the layout design data by utilizing a zoom method through the calculated line width, obtaining all first geometric graphs with the line widths equal to the calculated line width in the layout design data, and obtaining areas of the first geometric graphs; and removing all the first geometric graphs in the layout design data to obtain first layout data.
Description
Technical field
The present invention relates to quasiconductor design and manufacture field, be specifically related to manufacturing design DFM (Design For
Manufacture) manufacturability graphic designs field；It is more particularly related to a kind of layout design
In the extracting method of weight live width.
Background technology
Along with the continuous propelling of semiconductor fabrication process node, IC design complexity is continuously increased, with
And design cost is significantly increased, as far as possible improve flow success rate become chip Chevron Research Company (CRC)
Basic demand and select contract manufacturing partner important indicator.Manufacturability design DFM electronic product sets
Meter and foundry manufacturing close association, by the change of designing axiom, the improvement of method for designing, and then promote product
The survival rate of product and yield rate.Cmp (CMP-Chemical Mechanical Polishing) work
Skill focus inspection is the important technology of DFM.In order to find CMP focus accurately, typically now adopt
With setting up CMP model, analog simulation client version G-Design data obtain chip after CMP
The relevant informations such as pattern, it then follows certain rule finds the focus that CMP window is less.
From the point of view of the feature of CMP own, different live widths, density and the girth of figure can affect grinding rate,
The height causing chip surface morphology rises and falls, and increases the difficulty of subsequent optical carving technology, the difference of metal thickness simultaneously
Different meeting causes the difference of cabling line footpath and length, finally affects the electrical property of chip, causes yield rate to reduce and asks
Topic.The technique focus the most effectively finding CMP is several with the live width of layout design data, density and girth etc.
What characteristic parameter extraction has the strongest dependency.
It is said that in general, the density in unit lattice point in layout design data, it is easier to extract.The most correct
Extract a great problem that design configuration live width is industry.
Industry extracts the method for weight live width at present is that line width values all in lattice point, area value are substituted into weight line
Wide computing formula calculates.
Being illustrated in fig. 1 shown below, comprise 3 figures in certain lattice point, wherein the width of figure G1 is w1, area
For a1；The width of figure G2 is w2, and area is a2；The width of figure G3 is w3, and area is a3；
The computational methods of its weight live width are designated as:
The weight live width of many figures of n then promotes postscript:
It is that polygon is adopted along single X or Y-direction for the method that non-rectangular Graph Extraction line taking is wide
With cutting, charge to formula with rectangular form the most again and calculate weight live width.
During actual use, find that the method can not well cut to pad (Pad) figure of maximum
Shape.Be illustrated in fig. 2 shown below this L-shaped figure cutting can along X, Y both direction, obtain four figure G1,
G2, G3 and G4, result difference is the biggest.As G3 figure is under infinitesimal situation, in X direction
Cut value be 2 times of cut value in X direction.Simultaneously for being similar to the more complicated topology shown in Fig. 3
Figure, the cutting rule along single direction is more difficult to solve the classification problem of figure.
Summary of the invention
The technical problem to be solved is for there is drawbacks described above in prior art, it is provided that Yi Zhongyi
In the extracting method for the weight live width in layout design that operation realizes.
In order to realize above-mentioned technical purpose, according to the present invention, it is provided that the weight live width in a kind of layout design
Extracting method, including:
Determining that the maximum line width that in layout design data, design rule allows is L, minimum feature is S, domain
Minimum memory unit of cells is d, and the allowable error of weight live width is e%；
With the live width of w1=L/2-d, layout design data separate pantography is extracted, draw layout design
In data, all live widths are first geometric figure of w1, show that the first geometric area is A1 simultaneously；
In removing layout design data, all first geometric figures are to obtain first edition diagram data；
Utilize pantography to extract first edition diagram data with the live width of w2=w1* (1-e%), draw first
In layout data, all live widths are approximately second geometric figure of w2, draw the second geometric area simultaneously
For A2；
In removing first edition diagram data, all second geometric figures are to obtain second edition diagram data；
Utilize pantography to extract current layout data with the live width of wi=wi-1* (1-e%), draw domain
In data, all live widths are approximately the predetermined geometric figure of wi, draw the area of predetermined geometric figure GEi simultaneously
For Ai；Remove all of predetermined geometric figure in current layout data to obtain the layout data updated.
< during S, all numerical value Wi, Ai of obtaining are substituted into formula at wi
Try to achieve the weight line width values of lattice point.
Preferably, L is 1um～100um.
Preferably, S is 5nm～130nm.
Preferably, e is 3～10.
Preferably, the extracting method of the weight live width in described layout design is used for layout design.
Preferably, the extracting method of the weight live width in described layout design processes for layout verification.
The invention provides a kind of for characterizing the new method of the extraction of weight live width in layout design.In this mistake
Cheng Zhong, main by pantography total energy advantage distillation big live width figure, extract thereafter little live width figure.This
All kinds of complex topology figures can very correctly be decomposed by bright method, obtains correct weight line width values,
Domain technique focus is obtained and predicts accurately by effectively auxiliary CMP model.The letter of whole layout patterns extraction step
Bright, only a few step can be summarized as, it is easy to operation realizes.
Accompanying drawing explanation
In conjunction with accompanying drawing, and by with reference to detailed description below, it will more easily the present invention is had more complete
Understand and its adjoint advantage and feature is more easily understood, wherein:
Fig. 1 schematically showed according to the showing of the computational methods of weight live width in the single lattice point of prior art
Illustration.
Fig. 2 schematically shows the L shape figure according to prior art along X, the example of Y-direction cutting.
Fig. 3 schematically shows topological graph structure complicated in domain.
Fig. 4 schematically shows carrying of the weight live width in layout design according to the preferred embodiment of the invention
The schematic diagram of access method.
Fig. 5 schematically shows carrying of the weight live width in layout design according to the preferred embodiment of the invention
The schematic diagram of access method.
It should be noted that accompanying drawing is used for illustrating the present invention, and the unrestricted present invention.Note, represent structure
Accompanying drawing may be not necessarily drawn to scale.Further, in accompanying drawing, same or like element indicate identical or
The label that person is similar to.
Detailed description of the invention
In order to make present disclosure more clear and understandable, below in conjunction with specific embodiments and the drawings to this
Bright content is described in detail.
For solving the problem of the classification of above-mentioned domain live width present in prior art, the present invention proposes a kind of complete
New pantography effectively solves the subsumption problem of figure live width.Available pantography processes the L in Fig. 2
Shape figure.
Fig. 4 schematically shows carrying of the weight live width in layout design according to the preferred embodiment of the invention
The schematic diagram of access method.
Wherein, first, by all limits of original L shape geometric figure toward centre of figure minification prearranged multiple a
Geometric figure P1 is reduced to be formed；Wherein, the value of prearranged multiple a be able to make that reduces to reduce geometric figure P1
Minor face is infinitesimal rectangle；Subsequently, all limits of geometric figure P1 will be reduced and amplify toward figure surrounding predetermined
Multiple a is to amplify figure P2；Hereafter, L shape geometric figure is removed the region of amplification figure P2 to be remained
Remaining geometric figure P3；According to above-mentioned steps, find and residue geometric figure P3 boil down to be able to be made infinitesimal
Rectangular size value b.Amplifying a value corresponding for figure P2 is then live width w1, remains P3 pair, geometric figure
The b value answered is then live width w2, easily solves the area value of P2, P3；Substitute into above-mentioned each value and try to achieve this L shape figure
The weight line width values of shape.
On the whole, the extracting method bag of the weight live width in layout design according to the preferred embodiment of the invention
Include following step:
Determining that the maximum line width that in layout design data, design rule allows is L, minimum feature is S, domain
Minimum memory unit of cells is d, and the allowable error of weight live width is e%；
For instance, it is preferred that L is 1um～100um, S is 5nm～130nm.For instance, it is preferred that e is
3～10.
According to memory element d described by claims 1, having following characteristics, d is 0.1nm～2nm.
Pantography is utilized to extract, in drawing lattice point layout data GE in lattice point with the live width of w1=L/2-d
In layout data, all live widths are the first geometric figure GE1 of w1, draw the first geometric figure GE1 simultaneously
Area be A1；
In removing domain GE, all first geometric figure GE1 are to obtain first edition diagram data GE2_Pre；
Pantography is utilized to extract first edition diagram data GE2_Pre with the live width of w2=w1* (1-e%),
Show that in first edition diagram data GE2_Pre, all live widths are approximately the second geometric figure GE2 of w2, simultaneously
The area drawing the second geometric figure GE2 is A2；
In removing first edition diagram data GE2_Pre, all second geometric figure GE2 are to obtain second edition diagram data
GE3_Pre；
Repeat aforesaid operations, can be summarized as: with the live width of wi=wi-1* (1-e%) to current layout data
GEi_Pre utilizes pantography to extract, and show that in layout data, all live widths are approximately the predetermined geometry of wi
Figure GEi, show that the area of predetermined geometric figure GEi is Ai simultaneously；Remove current layout data GEi_Pre
In all of predetermined geometric figure GEi with obtain update layout data GEi+1_Pre；When wi < S owns
Operation completes.
All numerical value Wi, Ai of obtaining are substituted into formulaTry to achieve this lattice point
Weight line width values.
For example, the power during Fig. 5 schematically shows layout design according to the preferred embodiment of the invention
The schematic diagram of the extracting method of weight live width.Fig. 5 show one actual simple for correcting layout design
The friendly property of photoetching process check optimization method.
What Fig. 5 represented is the decomposition example that complex topology structure in Fig. 3 uses pantography.
All figures are used pantography, and feature sizes is w1, obtain geometric figure 501, wherein 501
Graphics area is a1；
Using pantography to removing 501 remaining figures, feature sizes is w2, obtains geometric figure 502,503,
Wherein the gross area of 502,503 figures amounts to a2；
Using pantography to removing 501,502,503 remaining figures, feature sizes is w3, obtains geometric graph
Shape 504, wherein 504 graphics areas are calculated as a3；
Using pantography to removing 501,502,503,504 remaining figures, feature sizes is w4, obtains
Geometric figure 505,506, wherein 505,506 total graphic area are calculated as a4；
Utilize formulaCalculate weight live width.
Through the screening of pantography, be ultimately breaks down into live width to be w1, w2, w3 amount to 501 with w4,502,
503,504,505 and 506 amount to 6 geometric figures, and corresponding area is a1, a2, a3 and a4, generation
Enter formula and easily try to achieve the weight live width of reorganization figure.
Present invention achieves the extracting method of weight live width in a kind of more effective layout design.After tested, certain
Domain is 2% at the allowable error transported of setting weight live width, uses the extraction of the method weight live width of the present invention
Accuracy is 100%, and patterning method extraction accuracy is 98%.
The extracting method of the weight live width in layout design is advantageously used for according to the preferred embodiment of the invention
Layout design, layout verification etc. process.
Furthermore, it is necessary to explanation, unless stated otherwise or point out, otherwise the term in description " first ",
" second ", " the 3rd " etc. describe be used only for distinguishing in description each assembly, element, step etc., and not
It is intended to indicate that the logical relation between each assembly, element, step or ordering relation etc..
Although it is understood that the present invention discloses as above with preferred embodiment, but above-described embodiment is also
It is not used to limit the present invention.For any those of ordinary skill in the art, without departing from skill of the present invention
In the case of art aspects, technical solution of the present invention is made many by the technology contents that all may utilize the disclosure above
Possible variation and modification, or it is revised as the Equivalent embodiments of equivalent variations.Therefore, every without departing from this
The content of bright technical scheme, according to the present invention technical spirit to any simple modification made for any of the above embodiments,
Equivalent variations and modification, all still fall within the range of technical solution of the present invention protection.
Claims (9)
1. the extracting method of the weight live width in a layout design, it is characterised in that including:
Determining that the maximum line width that in layout design data, design rule allows is L, minimum feature is S, domain
Minimum memory unit of cells is d, and the allowable error of weight live width is e%；
With the live width of w1=L/2-d, layout design data separate pantography is extracted, draw layout design
In data, all live widths are first geometric figure of w1, show that the first geometric area is A1 simultaneously；
In removing layout design data, all first geometric figures are to obtain first edition diagram data.
The extracting method of the weight live width in layout design the most according to claim 1, it is characterised in that
Also include:
Utilize pantography to extract first edition diagram data with the live width of w2=w1* (1-e%), draw first
In layout data, all live widths are approximately second geometric figure of w2, draw the second geometric area simultaneously
For A2；
In removing first edition diagram data, all second geometric figures are to obtain second edition diagram data.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
It is also to include:
Utilize pantography to extract current layout data with the live width of wi=wi-1* (1-e%), draw domain
In data, all live widths are approximately the predetermined geometric figure of wi, draw the area of predetermined geometric figure GEi simultaneously
For Ai；Remove all of predetermined geometric figure in current layout data to obtain the layout data updated.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
It is also to include:
< during S, all numerical value Wi, Ai of obtaining are substituted into formula at wi
Try to achieve the weight line width values of lattice point.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
Being, L is 1um～100um.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
Being, S is 5nm～130nm.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
Being, e is 3～10.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
Being, the extracting method of the weight live width in described layout design is used for layout design.
The extracting method of the weight live width in layout design the most according to claim 1 and 2, its feature
Being, the extracting method of the weight live width in described layout design processes for layout verification.
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| CN107103145A (en) * | 2017-05-08 | 2017-08-29 | 上海华力微电子有限公司 | The method for calculating distribution of the line width fixed knot away from different lines in domain |
| CN117933175A (en) * | 2024-03-25 | 2024-04-26 | 杭州广立微电子股份有限公司 | Layout equivalent line width calculation method and device, electronic device and storage medium |
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| CN107103145A (en) * | 2017-05-08 | 2017-08-29 | 上海华力微电子有限公司 | The method for calculating distribution of the line width fixed knot away from different lines in domain |
| CN117933175A (en) * | 2024-03-25 | 2024-04-26 | 杭州广立微电子股份有限公司 | Layout equivalent line width calculation method and device, electronic device and storage medium |
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| CN106021703B (en) | 2019-06-28 |
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