CN106019490A - MEMS optical switch module with 1*N channels - Google Patents
MEMS optical switch module with 1*N channels Download PDFInfo
- Publication number
- CN106019490A CN106019490A CN201610625919.9A CN201610625919A CN106019490A CN 106019490 A CN106019490 A CN 106019490A CN 201610625919 A CN201610625919 A CN 201610625919A CN 106019490 A CN106019490 A CN 106019490A
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- CN
- China
- Prior art keywords
- array
- mems
- pedestal
- pipe cap
- mems chip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
- G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
- G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
- G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention relates to an MEMS optical switch module with 1*N channels. An MEMS chip including a lens is installed on a base, a multi-core collimator including an optical fiber array and an array lens is installed in a pipe cap, the optical fiber array is led out of the outer end of the pipe cap, and the inner end of the pipe cap is matched and fixedly connected with the inner end of the base. N ranges from 1 to 24. An input optical fiber in the optical fiber array is located in the center, and N output optical fibers are symmetrical about a center to form a circular array or a rectangular array. The diameter of a light window is larger than the diameter of the optical fiber array. The centers of the MEMS chip, the light window of the pipe cap, the array lens and the optical array are located on the same straight line. Six bonding pads insulated from the base are arranged on the periphery of the MEMS chip in the center of the base and bonded with functional welding points of the MEMS chip. Six pins at the outer end of the base are correspondingly connected with the six bonding pads. The input optical fiber and the output optical fibers are located on the same side of the MEMS chip, the number of needed devices is remarkably reduced, the number of the channels is large, the structure is compact, and the size is small; optical path switching is achieved through one-time reflection, and the responding speed is improved.
Description
Technical field
The present invention relates to optic communication and optical tests technical field, the MEMS light of specifically a kind of 1 × N channel
Switch module.
Background technology
Microelectron-mechanical photoswitch, i.e. MEMS (Micro Electro-Mechanical Systems) light is opened
Closing, developed rapidly in recent years, it is that semiconductor fine process technology is tied mutually with micro-optic and micro mechanical technology
Close, a microcomputer of generation-electrical-optical integration novel switched, be that Large Copacity switched optical network switch is sent out
The main flow direction of exhibition.
Mems optical switch is to carve some small eyeglasses on silicon wafer, by electrostatic force or the work of electromagnetic force
With, make associated micromirror sheet produce lifting, rotate or mobile, thus change the direction of propagation of input light with reality
The function that existing light path selects.Mems optical switch relatively traditional mechanical formula photoswitch has clear superiority, its switch
Time is generally less than 10ms, and IC manufacturing technology volume is little, integrated level is high, low in energy consumption, reliability in use
By force；Be provided simultaneously with the filter with low insertion loss of traditional mechanical formula photoswitch, low crosstalk, low polarization sensitivity, height disappear
Light ratio, high switching speed, small size without wavelength selectivity and waveguide switch, it is prone to large-scale integrated
Advantage.
1 × N mems optical switch is a kind of novel optical exchanger part based on MEMS technology exploitation, by MEMS
Chip and multicore collimator composition, be widely used in optic path and conversion.N number of route can be carried out arbitrarily
Switching, it is achieved data exchange in N road.
It is relatively big to there is volume in existing 1 × N mems optical switch, especially bulky when many ways,
Power consumption is high, switching time the defect such as length.And it installs the most cumbersome with the connection of controlling organization.
Summary of the invention
It is an object of the invention to the mems optical switch module of a kind of 1 × N channel of design, its MEMS chip
Being installed on pedestal, the multicore collimator containing fiber array and array lens is installed in pipe cap, pipe cap with
Pedestal is fixing to be connected.Its input optical fibre and output optical fibre are positioned at the same multicore collimation of MEMS chip the same side
In device, required components and parts are few, and port number is many, compact conformation, volume are little, lightweight, response is fast, insert
Damage low, good stability.
The mems optical switch module of the one 1 × N channel of present invention design includes MEMS chip and multicore
Collimator, multicore collimator contains fiber array and array lens, it is characterised in that described containing eyeglass
MEMS chip is installed on pedestal, and described multicore collimator is installed in pipe cap, and fiber array is from pipe cap
End is drawn, and matches with pedestal the inner in pipe cap the inner, and the two fixing connection, top, described pipe cap the inner has
One optical window, this optical window is the most relative with the MEMS chip on described pedestal, also with the array lens phase in pipe cap
Right.The incident illumination that input optical fibre in multicore collimator imports, after array lens collimates, arrives MEMS
The eyeglass of chip, by lens reflecting, changes the direct of travel of light, and light converges at certain by array lens again
Root output optical fibre.Control rotation or the movement of MEMS chip, the angle of lens reflecting light can be controlled, make
Incident illumination enters selected output optical fibre, it is achieved light path switches.
Described N is integer, and span is 1≤N≤24.
The fiber array of described multicore collimator contains N+1 root optical fiber, and an input optical fibre is positioned at center, N
Root output optical fibre arranges in centrosymmetry mode.
The optical window diameter of described pipe cap is more than fiber array diameter.
Described fiber array is circular array symmetrically or rectangular array centered by input optical fibre.
In the center of MEMS chip, the center of pipe cap optical window, the center of array lens and fiber array
The heart is on same straight line.
MEMS chip, the pedestal around MEMS chip are installed in the center of described pedestal and pipe cap butt end
On have 6 pads being fixed on pedestal, pad all with pedestal insulate, the function solder joint of MEMS chip is through gold
Line or silver wire are bonded with 6 pads respectively.6 pins are fixed in the outer end of described pedestal, all exhausted with pedestal
Edge, each pin is connected respectively 6 pads.
Described pedestal is TO type pedestal, the formula that i.e. leads of transistor metal-clad type pedestal, and it is pluggable in mark
Quasi-circuit board.
Compared with prior art, the advantage of the mems optical switch module of one 1 × N channel of the present invention is:
1, input optical fibre and output optical fibre are positioned at the same multicore collimator of MEMS chip the same side, incident illumination
Shown by components and parts needed for the deflecting reflection of eyeglass to different output optical fibre ports, this mems optical switch module
Writing and reduce, port number is many, compact conformation, volume are little, lightweight；2, input optical fibre and output optical fibre it
Between only need to i.e. be achieved light path converting by primary event, greatly improve response speed, decrease switching
Time, and Insertion Loss is low, good stability；3, the design protection of pedestal and pipe cap MEMS chip and multicore
Collimator, and standardized pedestal pin makes this photoswitch to be connected with circuit easily.
Accompanying drawing explanation
Fig. 1 is the mems optical switch module embodiments structural representation of this 1 × N channel；
Fig. 2 is the fiber array cross sectional representation in Fig. 1；
Fig. 3 is that the mems optical switch module embodiments input luminous reflectance of this 1 × N channel is to 1 tunnel therein
The simplification index path of output optical fibre；
Label in figure: 1. fiber array, 1-1. input optical fibre, 1-2. output optical fibre, 2. array lens,
3. pipe cap, 4. pedestal, 5.MEMS chip.
Detailed description of the invention
Below in conjunction with embodiment and accompanying drawing, the invention will be further described.
The mems optical switch module embodiments of this 1 × N channel is as it is shown in figure 1, left side is the base of truncated cone-shaped
Seat 4, it is TO type pedestal, and 6 pins are fixed in the outer end of pedestal, all insulate with pedestal, and each pin divides
Not corresponding 6 pads connected in pedestal, pad all insulate with pedestal.The center of pedestal 4 round platform is fixed
MEMS chip 5 containing eyeglass is installed, paster technique can be used to paste MEMS chip 5, MEMS chip 5
Function solder joint be bonded with 6 pads respectively through gold thread.
Being pipe cap 3 on the right side of Fig. 1, multicore collimator contains fiber array 1 and array lens 2, and multicore collimates
Device is installed in pipe cap 3, and fiber array 1 is drawn from the outer end of pipe cap 3.
This example pipe cap 3 is cylinder cap, matches with the round platform of pedestal 4, pipe cap 3 and both pedestals 4
Connect with stored energy welding.
One optical window is arranged at the inner top of this example pipe cap 3, and this optical window is the most relative with the MEMS chip 5 on pedestal 4,
Also relative with the array lens 2 in pipe cap 3, the optical window diameter of pipe cap 3 is more than fiber array 1 diameter.
The center of MEMS chip 5, the center of pipe cap 3 optical window, the center of array lens 2 and fiber array 1
Center be on same straight line.
As in figure 2 it is shown, this example N=24, an input optical fibre 1-1 are positioned at center, 24 output optical fibres
The rectangular arranged that 1-2 is centrosymmetric centered by input optical fibre 1-1.
As it is shown on figure 3, the incident illumination that the input optical fibre 1-1 in multicore collimator imports is through array lens
After 2 collimations, arriving the eyeglass of MEMS chip 5, the reflection of eyeglass, change the direct of travel of light, light is again
Certain root output optical fibre is converged at by array lens 2.Control rotation or the movement of MEMS chip 5 eyeglass,
The angle of lens reflecting light can be controlled, make incident illumination enter selected output optical fibre, it is achieved light path switches.
Above-described embodiment, is only to the purpose of the present invention, technical scheme and beneficial effect the most specifically
Bright specific case, the present invention is not limited to this.All done within the scope of disclosure of the invention
Any modification, equivalent substitution and improvement etc., within being all contained in protection scope of the present invention.
Claims (8)
1. a mems optical switch module for 1 × N channel, collimates including MEMS chip (5) and multicore
Device, multicore collimator contains fiber array (1) and array lens (2), it is characterised in that:
The described MEMS chip (5) containing eyeglass is installed on pedestal (4), and described multicore collimator is installed
In pipe cap (3), fiber array (1) is drawn from the outer end of pipe cap (3)；Pipe cap (3) inner with
Match in pedestal (4) the inner, the two fixing connection；One optical window is arranged at the inner top of described pipe cap (3),
This optical window is the most relative with the MEMS chip (5) on described pedestal (4), also with the battle array in pipe cap (3)
Row lens (2) are relative；The incident illumination that input optical fibre (1-1) in multicore collimator imports is through array
After lens (2) collimation, arrive the eyeglass of MEMS chip (5), the reflection of eyeglass, change the traveling of light
Direction, light converges at certain root output optical fibre (1-2) by array lens (2) again.
The mems optical switch module of 1 × N channel the most according to claim 1, it is characterised in that:
Described N is integer, and span is 1≤N≤24.
The mems optical switch module of 1 × N channel the most according to claim 2, it is characterised in that:
The fiber array (1) of described multicore collimator contains N+1 root optical fiber, an input optical fibre (1-1)
Being positioned at center, N root output optical fibre (1-2) arranges in centrosymmetry mode.
The mems optical switch of 1 × N channel the most according to claim 3, it is characterised in that:
Circular array symmetrical centered by described fiber array (1) or rectangular array.
The mems optical switch of 1 × N channel the most according to any one of claim 1 to 4, its
It is characterised by:
The optical window diameter of described pipe cap (3) is more than fiber array (1) diameter.
The mems optical switch of 1 × N channel the most according to any one of claim 1 to 4, its
It is characterised by:
The center of described MEMS chip (5), the center of pipe cap (3) optical window, array lens (2)
The center of center and fiber array (1) is on same straight line.
The mems optical switch of 1 × N channel the most according to any one of claim 1 to 4, its
It is characterised by:
MEMS chip (5) is installed at the center of described pedestal (4) and pipe cap (3) butt end, at MEMS
Having 6 pads being fixed on pedestal (4) on chip (5) pedestal (4) around, pad is all and pedestal
(4) insulation, the function solder joint of MEMS chip (5) is bonded with 6 pads respectively through gold thread or silver wire；
6 pins are fixed in the outer end of described pedestal (4), all insulate with pedestal (4), each pin correspondence respectively
Connect 6 pads.
The mems optical switch of 1 × N channel the most according to claim 7, it is characterised in that:
Described pedestal (4) is TO type pedestal, the formula that i.e. leads of transistor metal-clad type pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610625919.9A CN106019490A (en) | 2016-08-01 | 2016-08-01 | MEMS optical switch module with 1*N channels |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610625919.9A CN106019490A (en) | 2016-08-01 | 2016-08-01 | MEMS optical switch module with 1*N channels |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN106019490A true CN106019490A (en) | 2016-10-12 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610625919.9A Pending CN106019490A (en) | 2016-08-01 | 2016-08-01 | MEMS optical switch module with 1*N channels |
Country Status (1)
| Country | Link |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107346051A (en) * | 2017-07-19 | 2017-11-14 | 武汉长盈通光电技术有限公司 | Optic fibre light path couples micro mechanical system |
| CN111562653A (en) * | 2020-04-12 | 2020-08-21 | 桂林电子科技大学 | Multicore fiber exchanger based on array MEMS reflector |
| CN111596413A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber switch based on MEMS reflector |
| CN111596412A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber programmable multifunctional device based on array MEMS reflector |
| CN111596411A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber fan-in fan-out device based on array MEMS reflector |
| CN114167550A (en) * | 2021-12-10 | 2022-03-11 | 武汉邮电科学研究院有限公司 | One-input multi-output multi-core optical fiber optical switch and design method thereof |
| CN116974016A (en) * | 2023-08-04 | 2023-10-31 | 深圳市飞宇光纤股份有限公司 | Single-axis linear deflection MEMS optical switch |
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|---|---|---|---|---|
| WO2001029584A2 (en) * | 1999-10-15 | 2001-04-26 | Laor, Herzel | Mems based 1xn fiber optics switch |
| CN202771038U (en) * | 2012-08-28 | 2013-03-06 | 福州高意通讯有限公司 | M*N multichannel MEMS optical switch |
| CN203178522U (en) * | 2013-01-22 | 2013-09-04 | 中国电子科技集团公司第三十四研究所 | 1 x N motor-type optical switch |
| CN203365727U (en) * | 2013-07-19 | 2013-12-25 | 深圳市中兴新地通信器材有限公司 | Device for changing attribute of input-output channel of fiber array and optical switch |
| CN203630394U (en) * | 2013-12-24 | 2014-06-04 | 上海中科光纤通讯器件有限公司 | 1*N multichannel MEMS optical switch structure |
| CN105259615A (en) * | 2015-11-23 | 2016-01-20 | 北京东方锐镭科技有限公司 | 1*N optical switch |
| CN105372761A (en) * | 2015-10-21 | 2016-03-02 | 武汉光迅科技股份有限公司 | 3D MEMS optical switch array |
| CN205941979U (en) * | 2016-08-01 | 2017-02-08 | 中国电子科技集团公司第三十四研究所 | 1 MEMS photoswitch module of N passageway |
-
2016
- 2016-08-01 CN CN201610625919.9A patent/CN106019490A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001029584A2 (en) * | 1999-10-15 | 2001-04-26 | Laor, Herzel | Mems based 1xn fiber optics switch |
| CN202771038U (en) * | 2012-08-28 | 2013-03-06 | 福州高意通讯有限公司 | M*N multichannel MEMS optical switch |
| CN203178522U (en) * | 2013-01-22 | 2013-09-04 | 中国电子科技集团公司第三十四研究所 | 1 x N motor-type optical switch |
| CN203365727U (en) * | 2013-07-19 | 2013-12-25 | 深圳市中兴新地通信器材有限公司 | Device for changing attribute of input-output channel of fiber array and optical switch |
| CN203630394U (en) * | 2013-12-24 | 2014-06-04 | 上海中科光纤通讯器件有限公司 | 1*N multichannel MEMS optical switch structure |
| CN105372761A (en) * | 2015-10-21 | 2016-03-02 | 武汉光迅科技股份有限公司 | 3D MEMS optical switch array |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107346051A (en) * | 2017-07-19 | 2017-11-14 | 武汉长盈通光电技术有限公司 | Optic fibre light path couples micro mechanical system |
| CN111562653A (en) * | 2020-04-12 | 2020-08-21 | 桂林电子科技大学 | Multicore fiber exchanger based on array MEMS reflector |
| CN111596413A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber switch based on MEMS reflector |
| CN111596412A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber programmable multifunctional device based on array MEMS reflector |
| CN111596411A (en) * | 2020-04-12 | 2020-08-28 | 桂林电子科技大学 | Multi-core optical fiber fan-in fan-out device based on array MEMS reflector |
| CN114167550A (en) * | 2021-12-10 | 2022-03-11 | 武汉邮电科学研究院有限公司 | One-input multi-output multi-core optical fiber optical switch and design method thereof |
| CN116974016A (en) * | 2023-08-04 | 2023-10-31 | 深圳市飞宇光纤股份有限公司 | Single-axis linear deflection MEMS optical switch |
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Application publication date: 20161012 |